CN115446407A - Brazing method of high-volume-fraction SiCp/Al-based composite material and AlN ceramic - Google Patents

Brazing method of high-volume-fraction SiCp/Al-based composite material and AlN ceramic Download PDF

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CN115446407A
CN115446407A CN202211075729.6A CN202211075729A CN115446407A CN 115446407 A CN115446407 A CN 115446407A CN 202211075729 A CN202211075729 A CN 202211075729A CN 115446407 A CN115446407 A CN 115446407A
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brazing
composite material
sicp
based composite
aln ceramic
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李文文
陈波
李思思
邹文江
冯洪亮
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AECC Beijing Institute of Aeronautical Materials
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AECC Beijing Institute of Aeronautical Materials
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08Auxiliary devices therefor
    • B23K3/085Cooling, heat sink or heat shielding means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/10Aluminium or alloys thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52Ceramics

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Abstract

The invention relates to a brazing method of a high volume fraction SiCp/Al-based composite material and AlN ceramic, which comprises the following steps: firstly, metallizing the surface of AlN ceramic by using AgCuTi active solder; and then carrying out vacuum pressure brazing connection on the metalized surface of the AlN ceramic and the SiCp/Al-based composite material by using AlCuSi or AluSiMg brazing filler metal to realize the heterogeneous connection of the high-volume-fraction SiCp/Al-based composite material and the AlN ceramic. The invention solves the problems of poor welding quality and complex surface metallization process of the existing high volume fraction SiCp/Al-based composite material, and can meet the brazing requirement of the high volume fraction SiCp/Al-based composite material and AlN ceramic in the field of high-power electronic packaging.

Description

Brazing method of high-volume-fraction SiCp/Al-based composite material and AlN ceramic
Technical Field
The invention belongs to the technical field of connection of dissimilar materials of ceramic/aluminum-based composite materials, and relates to a brazing method of a high-volume-fraction silicon carbide particle reinforced aluminum-based composite material (SiCp/Al-based composite material) and aluminum nitride (AlN) ceramic.
Background
The silicon carbide particle reinforced aluminum matrix composite (SiCp/Al matrix composite) with high volume fraction (the volume fraction is generally considered to be more than 55% in the field, and the volume fraction is further within the range of 55% -70% and is high in volume fraction) has important application in the manufacturing of precise parts of aerospace photoelectric control systems and microelectronic packaging devices due to the excellent performances of low expansion coefficient, high thermal conductivity, low density and the like. Aluminum nitride (AlN) ceramics are often used as heat-dissipating substrates for high-density, high-power electronic packages because of their high thermal conductivity, low dielectric constant, and thermal expansion coefficient matching the chip. Therefore, in the field of electronic packaging, the connection of the high volume fraction silicon carbide particle reinforced aluminum matrix composite and the aluminum nitride ceramic has specific application requirements.
Currently, brazing common low volume fraction (typically less than 20%) particulate reinforced aluminum matrix composites essentially follow brazing with aluminum alloy brazing filler metal or metallize the surface prior to brazing. However, the conventional aluminum alloy brazing filler metal is not suitable for high volume fraction particle reinforced aluminum matrix composite materials, and good brazing performance cannot be obtained due to surface metallization. This is because: (1) The SiC particle reinforced aluminum matrix composite material with high volume fraction can expose a large amount of SiC particles on the surface of the composite material, and the SiC particles are difficult to be wetted by conventional metal brazing filler metal; (2) The presence of an oxide film on the surface of the aluminum-based composite material also results in poor wettability. Thus, brazing of such materials is very difficult for high volume fractions of SiC particle reinforced aluminum matrix composites, especially when the volume fraction of SiC is relatively large (typically greater than 50%).
Aiming at SiC particle reinforced aluminum matrix composite with high volume fraction, a great deal of research work is concentrated in the field of soldering, and Leiyizhen (welding, 2016 (3): 14-17) and the like adopt Sn3.0Ag0.7Cu solder to perform soldering on SiCp/2024Al composite with the volume fraction of a reinforcing phase being 45% after surface electroplating and SiC ceramic with surface chemically plated with copper at 260 ℃, after the surface of a welded material is plated with copper, the welded material has good wettability, and a fracture part is formed at the joint of the aluminum matrix composite and the electroplated copper.
Due to poor wettability, most of research works include a surface treatment technology during brazing, and ceramic pre-metallization methods, i.e., surface metallization methods, include Physical Vapor Deposition (PVD), chemical Vapor Deposition (CVD), thermal spraying, chemical deposition, ultrasonic methods, plasma implantation, and the like, but the processes are complex and limit industrial application.
The ultrasonic-assisted brazing method removes the surface oxide film through ultrasonic vibration, and realizes the wetting of ceramics in the atmospheric environment without using a brazing flux (Zhang Yang, ultrasonic brazing of the SiC particle reinforced aluminum matrix composite material with high volume fraction, welding, 2008, (8) 29-31).
Pressure Vacuum brazing, nicotine et al (Vacuum brazing of aluminum metal matrix composite (55vol SiCp/A356) using aluminum-based filler alloy, materials Science and Engineering B,2012,177, 1707-1711) investigated Vacuum brazing of aluminum-based composites containing 55% volume fraction SiC particles, improving brazing performance by applying pressure and adding elements such as Mg, ti, ni to the braze.
The active element brazing method is characterized in that active elements such as Ti, zr, hf, nb, cr, mg, V and the like are added into a brazing alloy, and the surface of ceramic is decomposed through chemical reaction to form a reaction layer which can be wetted by metal. Wangpo et Al (preparation of aluminum-based brazing filler metal of high volume ratio SiCp/6063Al composite material and brazing process research, material guide B: research article, 2017, 31, 69-90) prepared (Al-10 Si-20Cu-0.05 Ce) -1Ti quenched foil-shaped brazing filler metal by adopting a rapid strip casting technology, and performed a vacuum brazing experiment on 60% volume fraction SiCp/6063Al composite material, and obtained a shear strength of 112.6MPa under a brazing specification of heat preservation at 590 ℃ for 30 min.
Regarding AlN ceramic brazing, most of patent and literature data are focused on the problem of interface bonding between an aluminum nitride copper clad laminate and aluminum nitride and copper, and the bonding strength between the aluminum nitride copper clad laminate and a copper substrate is improved by metallizing the surface of AlN ceramic, for example, an aluminum nitride ceramic copper clad substrate and a preparation method (CN 201010141328.7) thereof provide a preparation method of the aluminum nitride ceramic copper clad substrate, and a metal mixture coating is firstly formed on an aluminum nitride ceramic substrate by a magnetron sputtering method and then a metal modified layer formed by high-temperature sintering is carried out to effectively improve the good bonding between aluminum nitride and copper foil.
Aiming at the dissimilar material brazing of the high volume fraction SiC particle reinforced aluminum matrix composite and the AlN ceramic, no relevant report and patent are available at present, but conceivably, the brazing wettability of the high volume fraction SiC particle reinforced aluminum matrix composite is very poor, the wettability of the AlN ceramic material is also very poor, the physical and chemical property difference with the aluminum matrix composite is very large, and the interface metallurgical bonding of the two materials difficult to weld is realized very difficult.
Disclosure of Invention
In view of the above-mentioned situation in the prior art, the present invention aims to provide a method for brazing a high volume fraction SiCp/Al-based composite material to an AlN ceramic, so as to solve the problems of poor welding quality and complicated surface metallization process of the conventional high volume fraction SiCp/Al-based composite material, and form a high performance brazed connection between the high volume fraction SiCp/Al-based composite material and the AlN ceramic.
The purpose of the invention is realized by the following technical measures:
a brazing method of a high-volume-fraction SiCp/Al-based composite material and AlN ceramic is realized by adopting a combined method of active brazing filler metal metallization and pressure brazing, firstly, agCuTi active brazing filler metal is used for metallization on the surface of the AlN ceramic, and then, alCuSi brazing filler metal is used for carrying out vacuum pressure brazing connection on the metallized surface of the AlN ceramic and the SiCp/Al-based composite material, so that the heterogeneous connection of the high-volume-fraction SiCp/Al-based composite material and the AlN ceramic is realized.
Polishing the surface of AlN ceramic to be welded on 800# -1000 # abrasive paper for brightness, and ultrasonically cleaning in acetone solution; the AgCuTi solder foil strip is attached to the surface to be welded of the AlN ceramic, so that the AgCuTi solder foil strip is completely paved on the surface to be welded of the AlN ceramic and has consistent thickness, the thickness of the AgCuTi solder foil strip is preferably 30-50 mu m, if the thickness is higher than the range, a pre-metallized ceramic substrate can deform, and if the thickness is lower than the range, a metallized layer is easy to have defects, and meanwhile, the solder foil strip is difficult to prepare, and in addition, the AgCuTi solder can be Ag- (20-40%) Cu- (1-8%) Ti (the percentage of which is mass percentage). And then placing the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 840-900 ℃, wherein the temperature corresponds to the components of the brazing filler metal, determining the optimal brazing temperature range after the brazing filler metal is selected, keeping the temperature for more than 10min, preferably 10-30 min, if the temperature is too long, the reaction time is too long, the reaction of the brazing filler metal and the surface of the ceramic is too strong, reducing the joint strength of the AlN and aluminum-based composite material, cooling to below 400 ℃ at a cooling rate of not more than 5 ℃/min, and cooling to room temperature along with the furnace. The AgCuTi solder alloy and the AlN ceramic are subjected to interface reaction to form metallurgical bonding, so that the surface metallization of the aluminum nitride ceramic with high bonding strength is realized; polishing the surface of the SiCp/Al-based composite material to be welded on 800# -1000 # abrasive paper for brightness, and ultrasonically cleaning in an acetone solution; clamping an AlCuSi or AlSiMg brazing filler metal foil strip with the thickness of 50-150 mu m between the AlN metalized surface and the SiCp/Al-based composite material, wherein the thickness of the AlCuSi or AlSiMg brazing filler metal foil strip is preferably 50-150 mu m, if the thickness of the brazing filler metal foil strip is too thick, the residual stress of a joint after welding is overlarge, and the joint is easy to crack, and if the thickness of the brazing filler metal foil strip is too thin, the defect caused by the loss of the brazing filler metal is easy to cause. And (3) placing the assembled sample into a vacuum diffusion furnace, keeping the temperature at 560-600 ℃, pressurizing and keeping the temperature, keeping the temperature for more than 5min, preferably 5-20 min, and preferably 1-2 MPa, cooling to below 300 ℃ at a cooling rate of not more than 5 ℃/min after keeping the temperature, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
The invention solves the problems of poor welding quality and complex surface metallization process of the existing high volume fraction SiCp/Al-based composite material, and can meet the brazing requirement of the high volume fraction SiCp/Al-based composite material and AlN ceramic in the field of high-power electronic packaging.
Drawings
FIG. 1 is an electron micrograph of a brazed joint of a SiCp/Al-based composite material and AlN ceramic obtained in example 1 according to the present invention.
Detailed Description
For a clearer understanding of the objects, technical solutions and advantages of the present invention, the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.
The invention relates to a brazing method of a high volume fraction silicon carbide particle reinforced aluminum matrix composite and aluminum nitride ceramic, which is realized by adopting a combined method of active brazing filler metal metallization and pressure brazing, and comprises the specific steps of polishing the surface of AlN to be welded on 800# to 1000# abrasive paper for brightness, and ultrasonically cleaning the AlN to be welded in an acetone solution; and (3) attaching a commercial AgCuTi solder foil strip with the thickness of 30-50 microns to the surface to be welded of the AlN ceramic, so that the solder foil strip is completely paved on the surface to be welded of the AlN ceramic and has consistent thickness. And then placing the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 840-900 ℃ for 10-30 min, cooling to below 400 ℃ at a cooling rate of not higher than 5 ℃/min, and cooling to room temperature along with the furnace. The AgCuTi solder alloy and the AlN ceramic are subjected to interface reaction to form metallurgical bonding, so that the surface metallization of the AlN ceramic with high bonding strength is realized; polishing the surface of the SiCp/Al-based composite material to be welded on 800# -1000 # abrasive paper for brightness, and ultrasonically cleaning in an acetone solution; alCuSi or AlSiMg solder foil with the thickness of 50-150 mu m is clamped between the AlN metalized surface and the SiCp/Al-based composite material. And (3) placing the assembled sample into a vacuum diffusion furnace, keeping the temperature at 560-600 ℃, keeping the temperature for 5-20 min and the pressure at 1-2 MPa, cooling to below 300 ℃ at a cooling rate of not higher than 5 ℃/min after the heat preservation is finished, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Example 1:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 60%.
(1) Polishing the surface of AlN ceramic to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning in acetone solution;
(2) Attaching Cusil-ABA (Ag-35.25 Cu-1.75Ti (mass fraction)%) brazing filler metal foil strips with the thickness of 30 mu m to the surface to be welded of AlN, completely paving the surface to be welded of the AlN ceramic with the brazing filler metal foil strips, and putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 880 ℃ for 10min, cooling to below 400 ℃ at a cooling rate of not higher than 5 ℃/min, and cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) The brazing filler metal foil with the brazing filler metal mark of B-Al67CuSi and the thickness of 100 mu m is clamped between the AlN ceramic metalized surface and the SiCp/Al-based composite material, the assembled sample is placed into a vacuum diffusion furnace, the heat preservation temperature is 570 ℃, the heat preservation time is 10min, and the pressure of 1.5MPa is applied. And cooling to below 300 ℃ at a cooling rate of 5 ℃/min after heat preservation is finished, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
The electron micrograph of the brazed joint of the SiCp/Al-based composite material and the AlN ceramic obtained in this example is shown in fig. 1, and the electron micrographs of the brazed joint of the SiCp/Al-based composite material and the AlN ceramic obtained in the subsequent examples are similar to those of this example and are not shown.
Example 2:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 60%.
(1) Polishing the surface of AlN to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning in an acetone solution;
(2) Attaching a TiCusil (Ag-26.7 Cu-4.5Ti (mass fraction)%) solder foil tape with the thickness of 30 mu m to the surface to be welded of the AlN ceramic to ensure that the solder foil tape is completely paved on the surface to be welded of the AlN ceramic and has consistent thickness, then putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 880 ℃ for 10min, cooling to below 400 ℃ at a cooling rate of not higher than 5 ℃/min, and cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) A brazing filler metal foil with the brazing filler metal mark of B-Al86CuSi and the thickness of 100 mu m is clamped between the AlN ceramic metalized surface and the SiCp/Al-based composite material, the assembled sample is placed into a vacuum diffusion furnace, the heat preservation temperature is 570 ℃, the heat preservation time is 10min, and the pressure of 1.5MPa is applied. After the heat preservation is finished, cooling to 300 ℃ at a cooling rate of 5 ℃/min, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Example 3:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 65%.
(1) Polishing and brightening the AlN surface to be welded on No. 1000 abrasive paper, and ultrasonically cleaning the AlN surface in an acetone solution;
(2) Attaching Cusil-ABA (Ag-35.25 Cu-1.75Ti (mass fraction)%) solder foil strips with the thickness of 50 mu m to the surface to be welded of the AlN ceramic to ensure that the solder foil strips are completely paved on the surface to be welded of the AlN ceramic and have consistent thickness, then putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 890 ℃, keeping the temperature for 10min, cooling to 400 ℃ at a cooling rate of not higher than 5 ℃/min, and cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) The brazing filler metal foil with the thickness of 100 mu m and the brand of B-Al86SiMg is clamped between the AlN ceramic metalized surface and the SiCp/Al-based composite material, the assembled sample is placed into a vacuum diffusion furnace, the heat preservation temperature is 570 ℃, the heat preservation time is 10min, and the pressure of 2.0MPa is applied. After the heat preservation is finished, cooling to 300 ℃ at a cooling rate of 5 ℃/min, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Example 4:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 65%.
(1) Polishing and brightening the AlN surface to be welded on No. 1000 abrasive paper, and ultrasonically cleaning the AlN surface in an acetone solution;
(2) Attaching a TiCusil (Ag-26.7 Cu-4.5Ti (mass fraction)%) brazing filler metal foil strip with the thickness of 50 mu m to the surface to be welded of the AlN ceramic, completely paving the brazing filler metal foil strip on the surface to be welded of the AlN ceramic, and keeping the thickness consistent, then putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 890 ℃, keeping the temperature for 10min, cooling to 400 ℃ at a cooling rate of not higher than 5 ℃/min, and then cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) The brazing filler metal foil with the brazing filler metal mark of B-Al88SiMg and the thickness of 100 mu m is clamped between the AlN ceramic metalized surface and the SiCp/Al-based composite material, the assembled sample is placed into a vacuum diffusion furnace, the heat preservation temperature is 570 ℃, the heat preservation time is 10min, and the pressure of 2.0MPa is applied. After the heat preservation is finished, cooling to 300 ℃ at a cooling rate of 5 ℃/min, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Example 5:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 70%.
(1) Polishing the surface of AlN to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning in an acetone solution;
(2) Attaching Cusil-ABA (Ag-35.25 Cu-1.75Ti (mass fraction)%) brazing filler metal foil strips with the thickness of 30 mu m to the surface to be welded of the AlN ceramic to ensure that the brazing filler metal foil strips are completely paved on the surface to be welded of the AlN ceramic and have consistent thickness, then putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 880 ℃ for 10min, cooling to 400 ℃ at a cooling rate of not higher than 5 ℃/min, and then cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) A brazing filler metal foil with the brand of B-Al67CuSi and the thickness of 120 mu m is clamped between the metalized surface of the AlN ceramic and the SiCp/Al-based composite material, the assembled sample is placed into a vacuum diffusion furnace, the heat preservation temperature is 580 ℃, the heat preservation time is 10min, and the pressure of 2.0MPa is applied. After the heat preservation is finished, cooling to 300 ℃ at a cooling rate of 5 ℃/min, and then cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Example 6:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 70%.
(1) Polishing the AlN surface to be welded on 800# abrasive paper to be bright, and ultrasonically cleaning the AlN surface in an acetone solution;
(2) Attaching a TiCusil (Ag-26.7 Cu-4.5Ti (mass fraction)%) solder foil strip with the thickness of 30 mu m to the surface to be welded of the AlN ceramic to ensure that the AlN ceramic is completely paved with the solder foil strip and the thickness is consistent, then putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 880 ℃ for 10min, cooling to 400 ℃ at a cooling rate of not higher than 5 ℃/min, and cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) And clamping a brazing filler metal foil with the thickness of 120 mu m and the brand of B-Al86CuSi between the metalized surface of the AlN ceramic and the SiCp/Al-based composite material, putting the assembled sample into a vacuum diffusion furnace, keeping the temperature at 580 ℃ for 10min, and applying the pressure of 2.0 MPa. After the heat preservation is finished, cooling to 300 ℃ at a cooling rate of 5 ℃/min, and then cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Example 7:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 55%.
(1) Polishing and brightening the AlN surface to be welded on No. 1000 abrasive paper, and ultrasonically cleaning the AlN surface in an acetone solution;
(2) Adhering Cusil-ABA (Ag-35.25 Cu-1.75Ti (mass fraction)%) brazing filler metal foil with the thickness of 50 mu m to the surface to be welded of the AlN ceramic to ensure that the AlN ceramic is completely paved with the brazing filler metal foil and the thickness is consistent, then putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 900 ℃ for 10min, cooling to 400 ℃ at a cooling rate of not higher than 5 ℃/min, and cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) The brazing filler metal foil with the brazing filler metal mark of B-Al67CuSi and the thickness of 80 mu m is clamped between the AlN ceramic metalized surface and the SiCp/Al-based composite material, the assembled sample is placed into a vacuum diffusion furnace, the heat preservation temperature is 570 ℃, the heat preservation time is 10min, and the pressure of 1.5MPa is applied. After the heat preservation is finished, cooling to 300 ℃ at a cooling rate of 5 ℃/min, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Example 8:
the volume fraction of the SiC ceramic particles in the high volume fraction SiCp/Al-based composite material according to the present embodiment is 55%.
(1) Polishing the AlN surface to be welded on 800# abrasive paper to be bright, and ultrasonically cleaning the AlN surface in an acetone solution;
(2) Attaching a TiCusil (Ag-26.7 Cu-4.5Ti (mass fraction)%) brazing filler metal foil strip with the thickness of 50 mu m to the surface to be welded of the AlN ceramic to ensure that the AlN ceramic is completely paved with the brazing filler metal foil strip and the thickness is consistent, then putting the assembled AlN ceramic into a vacuum brazing furnace, keeping the temperature at 900 ℃ for 10min, cooling to 400 ℃ at a cooling rate of not higher than 5 ℃/min, and cooling to room temperature along with the furnace;
(3) Polishing the surface of the SiCp/Al-based composite material to be welded on No. 1000 abrasive paper to be bright, and ultrasonically cleaning the surface in an acetone solution;
(4) The solder foil with the mark of B-Al86SiMg and the thickness of 80 mu m is clamped between the metalized surface of the AlN ceramic and the SiCp/Al-based composite material, the assembled sample is placed into a vacuum diffusion furnace, the heat preservation temperature is 570 ℃, the heat preservation time is 10min, and the pressure of 1.5MPa is applied. After the heat preservation is finished, cooling to 300 ℃ at a cooling rate of 5 ℃/min, and cooling to room temperature along with the furnace to obtain the brazing joint of the SiCp/Al-based composite material and the AlN ceramic.
Compared with the prior art, the method has the following advantages:
1. the ceramic surface metallization does not need complex surface metallization processes such as chemical plating, magnetron sputtering, ion implantation and the like and expensive metallization equipment, only needs one vacuum brazing furnace, and has the advantages of easy process realization and low cost;
the metallurgical bonding between the AgCuTi metalized layer on the AlN ceramic surface and the ceramic substrate is compact, the bonding strength of the connecting surface is high, the AgCu substrate has good heat conductivity, and the problem that the low-temperature brazing filler metal is poor in wettability or non-wettable on the ceramic surface can be well solved;
3. AlN metalized by AlCuSi or AlSiMg solder is selected to be soldered with the high volume fraction silicon carbide particle reinforced aluminum matrix composite, the soldering temperature can be as low as 560 ℃, the solder has low melting point in an Al matrix solder system, the application range is wider, and the influence of relatively low soldering temperature on the matrix performance of the aluminum matrix composite is less.
4. When the AlN metalized with the AlCuSi brazing filler metal is brazed with the silicon carbide particle-reinforced aluminum matrix composite with high volume fraction, preferably small pressure (1 MPa-2 MPa as above) is applied, the contact area between the brazing filler metal and a welded material can be increased under the action of the pressure, the requirement on the flatness of a connecting surface is reduced, the ceramic metalized surface smoothing treatment process is effectively saved, and the aluminum carbide particle-reinforced aluminum matrix composite is more economical and operable in engineering application.
And 5, the AlCuSi brazing filler metal contains a certain amount of Cu element, so that good metallurgical bonding is generated between Ag and Cu in the AlN metallization layer and an Al matrix in the aluminum matrix composite material, and excessive reaction is avoided.

Claims (8)

1. A brazing method of a high volume fraction SiCp/Al-based composite material and AlN ceramic comprises the following steps:
firstly, metallizing the surface of AlN ceramic by using AgCuTi active solder;
and then carrying out vacuum pressure brazing connection on the metalized surface of the AlN ceramic and the SiCp/Al-based composite material by using AlCuSi or AluSiMg brazing filler metal to realize the heterogeneous connection of the high-volume-fraction SiCp/Al-based composite material and the AlN ceramic.
2. The brazing method according to claim 1, wherein said metallizing on the surface of the AlN ceramic with the agcuit active brazing filler metal comprises attaching a foil strip of the agcuit brazing filler metal to the surface to be brazed of the AlN ceramic so that the foil strip of the agcuit brazing filler metal completely spreads over the surface to be brazed of the AlN ceramic and is uniform in thickness, and then placing the assembled AlN ceramic in a vacuum brazing furnace at a holding temperature of 840 ℃ to 900 ℃ for 10min to 30min, cooling to 400 ℃ or less at a cooling rate of not more than 5 ℃/min, and then furnace-cooling to room temperature, wherein the ingredient of the agcuit brazing filler metal is Ag-20 to 40% cu-1 to 8% ti, wherein the percentages are mass percentages.
3. The brazing method according to claim 2, wherein said strips of AgCuTi solder foil have a thickness of 30 μm to 50 μm.
4. The brazing method according to claim 2, further comprising a pretreatment step of polishing the AlN ceramic surface to be welded on 800# to 1000# sandpaper for brightness and ultrasonically cleaning in an acetone solution.
5. The brazing method according to claim 1 or 2, wherein the step of carrying out vacuum pressure brazing connection on the AlN ceramic metalized surface and the SiCp/Al-based composite material by using AlCuSi or AlSiMg brazing filler metal comprises the steps of clamping an AlCuSi or AlSiMg brazing filler metal foil strip between the AlN metalized surface and the SiCp/Al-based composite material, then putting the AlCuSi or AlSiMg brazing filler metal foil strip and the SiCp/Al-based composite material together into a vacuum diffusion furnace for pressurization and heat preservation, wherein the heat preservation temperature is 560-600 ℃, the heat preservation time is 5-20 min, and after the heat preservation is finished, cooling the AlCuSi or AlSiMg brazing filler metal foil strip to below 300 ℃ at a cooling rate not higher than 5 ℃/min, and then cooling the AlCuSi or AlSiMg brazing filler metal foil strip along with the furnace to room temperature.
6. Brazing method according to claim 5, wherein said strips of AlCuSi or AlSiMg brazing filler metal foil have a thickness of 50 μm to 150 μm.
7. The brazing method according to claim 5, wherein the pressure at the time of the pressure holding and the temperature holding is 1MPa to 2MPa.
8. The brazing method according to claim 5, further comprising a pretreatment step of polishing the surface of the SiCp/Al-based composite material to be welded on 800# to 1000# sandpaper and ultrasonically cleaning the surface in an acetone solution.
CN202211075729.6A 2022-09-02 2022-09-02 Brazing method of high-volume-fraction SiCp/Al-based composite material and AlN ceramic Pending CN115446407A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04170373A (en) * 1990-10-31 1992-06-18 Tanaka Kikinzoku Kogyo Kk Production of aln/cu clad base plate
CN1396037A (en) * 2002-08-09 2003-02-12 中国科学院上海硅酸盐研究所 High-temp soldering method for aluminium nitride and copper
JP2005260251A (en) * 1999-04-06 2005-09-22 Tokyo Electron Ltd Mounting stand, plasma processing apparatus, and manufacturing method for mounting stand
CN102009240A (en) * 2010-10-20 2011-04-13 北京科技大学 Method for connecting AlN (aluminum nitride) ceramics and SiC/Al composite material respectively plated with thin-film metal layer on surface
KR101070605B1 (en) * 2010-10-08 2011-10-06 (주)보부하이테크 Ceramic heater for semiconductor wafer and a manufacturing method thereof
CN107256829A (en) * 2017-06-01 2017-10-17 合肥邦诺科技有限公司 A kind of method that utilization thin film technique prepares aluminium nitride copper-clad base plate
CN107363359A (en) * 2017-08-09 2017-11-21 北京工业大学 A kind of method of compound high-entropy alloy solder ceramic soldering and metal
CN114769774A (en) * 2022-05-10 2022-07-22 哈尔滨工业大学 Preparation method of ceramic aluminum-coated substrate for power device

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04170373A (en) * 1990-10-31 1992-06-18 Tanaka Kikinzoku Kogyo Kk Production of aln/cu clad base plate
JP2005260251A (en) * 1999-04-06 2005-09-22 Tokyo Electron Ltd Mounting stand, plasma processing apparatus, and manufacturing method for mounting stand
CN1396037A (en) * 2002-08-09 2003-02-12 中国科学院上海硅酸盐研究所 High-temp soldering method for aluminium nitride and copper
KR101070605B1 (en) * 2010-10-08 2011-10-06 (주)보부하이테크 Ceramic heater for semiconductor wafer and a manufacturing method thereof
CN102009240A (en) * 2010-10-20 2011-04-13 北京科技大学 Method for connecting AlN (aluminum nitride) ceramics and SiC/Al composite material respectively plated with thin-film metal layer on surface
CN107256829A (en) * 2017-06-01 2017-10-17 合肥邦诺科技有限公司 A kind of method that utilization thin film technique prepares aluminium nitride copper-clad base plate
CN107363359A (en) * 2017-08-09 2017-11-21 北京工业大学 A kind of method of compound high-entropy alloy solder ceramic soldering and metal
CN114769774A (en) * 2022-05-10 2022-07-22 哈尔滨工业大学 Preparation method of ceramic aluminum-coated substrate for power device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
钟小婧等,: "AlN陶瓷表面化学镀镍工艺", 真空电子技术, no. 03, pages 14 - 17 *

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