CN115386846A - 一种提高涂层硬质合金工具性能的预处理工艺 - Google Patents

一种提高涂层硬质合金工具性能的预处理工艺 Download PDF

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CN115386846A
CN115386846A CN202110563140.XA CN202110563140A CN115386846A CN 115386846 A CN115386846 A CN 115386846A CN 202110563140 A CN202110563140 A CN 202110563140A CN 115386846 A CN115386846 A CN 115386846A
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hard alloy
coating
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吴振宇
郑光明
程祥
杨先海
凌四营
李学伟
刘焕宝
赵光喜
李阳
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Dalian University of Technology
Shandong University of Technology
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    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D6/00—Heat treatment of ferrous alloys
    • C21D6/04—Hardening by cooling below 0 degrees Celsius
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/22—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for drills; for milling cutters; for machine cutting tools
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides

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Abstract

本发明属于机械加工工具制造技术领域，特别涉及一种提高涂层硬质合金工具性能的预处理工艺。本发明提供了一种提高涂层硬质合金工具性能的预处理工艺，该方法的主要特征是在硬质合金基体工具涂层之前，对硬质合金工具进行深冷处理，处理完后再进行涂层即得涂层硬质合金工具。使用深冷处理工艺对硬质合金基体工具进行表面处理，可以改变基体工具的内部组织结构，提高基体工具强度和硬度，增强基体与涂层的结合强度，增强涂层硬质合金工具的抗剥落和抗破损能力，提高涂层硬质合金工具性能。

Description

一种提高涂层硬质合金工具性能的预处理工艺
技术领域
本发明涉及一种提高涂层硬质合金工具性能的预处理工艺，属于表面处理领域。
背景技术
随着制造业的发展，各类新型材料不断出现，这对传统加工工具的要求越来越高。涂层工具因其高硬度，高耐磨性，高化学稳定性，使用寿命长等优点，目前已逐渐取代传统工具，在切削加工中得到了广泛应用。然而涂层工具在高速加工、干式加工等情况下加工钛合金、高温合金等难加工材料时，仍然出现磨损过大，寿命不高的现象。涂层工具表面性能包括硬度，表面粗糙度，表面残余应力等，提高工具表面性能对提高工具切削性能有重大影响。
深冷处理处理技术具有高效、清洁、易于操作等优势，是一种新兴的表面处理技术。通过对涂层工具的硬质合金基体进行深冷处理，可以改变硬质合金基体工具的内部组织结构，提高基体工具强度和硬度，增强基体与涂层的结合强度，使涂层工具显微硬度、表面残余应力等性能得到强化，涂层工具性能得到提升。
发明内容
本发明的目的，是提供一种提高涂层硬质合金工具性能的预处理工艺，能有效改善涂层硬质合金工具性能。其技术方案为：
一种提高涂层硬质合金工具性能的预处理工艺，包括如下步骤：
（1）选择硬质合金基体工具，并依次采用酒精、丙酮溶液进行超声波清洗去除表面的油污等杂物；
（2）进行深冷处理，将硬质合金基体工具放入深冷箱中缓慢冷却，降温速率0.5~1℃/min，深冷温度-140℃~-196℃，保温时间12~48h，保温后随炉升温至室温；
（3）对深冷处理后的基体工具进行热处理，升温速率为0.5~1℃/min，升温至200℃~300℃，保温2~3h，保温后随炉冷却至室温；
（4）热处理完毕后取出基体工具，进行丙酮溶液的超声波清洗，之后再进行涂层处理，首先制备CrN过渡层，靶材为纯Cr靶，电弧电源输出电流60~100A，工作气压0.5~2.0Pa，沉积时间10~50min，涂层厚度控制在0.5~1μm；之后制备AlCrN涂层，靶材为Al70Cr30靶，靶电流60~120A，负偏压-70~-120V，氮气流量300~450sccm，真空度1.0~2.5pa，整体涂层厚度达到4μm；
（5）涂层处理完毕后得到涂层硬质合金工具。
本发明具有以下有益效果：
深冷处理效率较高，无污染，成本低且不破坏试样，通过改变工具材料的微观组织来提高工具的硬度和耐磨性，增强涂层与基体的结合强度，从而提高工具表面性能。
具体实施方式
1.选用WC-8%Co硬质合金作为基体工具，将基体工具抛光至镜面后依次采用酒精、丙酮溶液超声波清洗，时间30min，去除表面油污，备用。
2.将经步骤1处理后的硬质合金基体工具放入深冷箱中缓慢冷却，冷却方式为通入液氮气体冷却，降温速率1℃/min，深冷温度-190℃，保温时间24h，保温后随炉升温至室温。
3. 将经步骤2处理后硬质合金工具进行热处理，升温速率1℃/min，升温至200℃，保温2h，保温后随炉冷却至室温。
4.将经步骤3处理后硬质合金工具依次进行酒精、丙醇溶液的超声波清洗，时间5min。
5.将经步骤4处理后硬质合金工具进行涂层处理。首先制备CrN过渡层，靶材为纯Cr靶，靶电流70A，工作气压1.0Pa，沉积时间20min，涂层厚度控制在0.5~1μm；之后制备AlCrN涂层，靶材为Al70Cr30靶，靶电流70A，负偏压-90V，氮气流量400sccm，真空度2.0pa，整体涂层厚度达到4μm。涂层处理后得到涂层硬质合金工具。
6.对得到的涂层硬质合金工具性能进行了检测，相比于未前处理工具，处理后涂层硬质合金工具表面性能得到提升：表面粗糙度降低14%，硬度提高28%，表面残余应力提高69%。

Claims (6)

1.一种提高涂层硬质合金工具性能的预处理工艺，其特征包括下述工艺步骤：
（1）选择硬质合金基体工具，并依次采用酒精、丙酮溶液进行超声波清洗去除表面的油污等杂物；
（2）将基体工具放入深冷箱中按照一定冷却速率降温至深冷温度，保温一段时间后随炉升温至室温；
（3）对深冷处理后的基体工具进行热处理，按照一定升温速率升温至保温温度，保温一段时间后随炉冷却至室温；
（4）热处理完毕后取出基体工具，进行丙酮溶液的超声波清洗，之后再进行涂层处理，即得涂层硬质合金工具。
2.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（2）所述冷却速率为0.5~1℃/min，深冷温度为-140℃~-196℃，保温时间为12~48h。
3.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（3）所述升温速率为0.5~1℃/min，保温温度为200℃~300℃，保温时间为2~3h。
4.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（4）所述涂层处理工艺，首先制备CrN过渡层，靶材为纯Cr靶，电弧电源输出电流60~100A，工作气压0.5~2.0Pa，沉积时间10~50min，涂层厚度控制在0.5~1μm；之后制备AlCrN涂层，靶材为Al70Cr30靶，靶电流60~120A，负偏压-70~-120V，氮气流量300~450sccm，真空度1.0~2.5pa，整体涂层厚度达到4μm。
5.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（4）所述涂层处理工艺，所述CrN过渡层沉积于所述硬质合金工具表面，所述AlCrN涂层沉积于所述CrN过渡层表面。
6.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（4）所述涂层处理工艺，所述AlCrN涂层中Al的原子百分比为39at%~45at%，Cr的原子百分比为15at%~21at%。
CN202110563140.XA 2021-05-24 2021-05-24 一种提高涂层硬质合金工具性能的预处理工艺 Withdrawn CN115386846A (zh)

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CN102329151A (zh) * 2011-09-23 2012-01-25 重庆文理学院 一种陶瓷/金属陶瓷刀具的深冷处理方法
CN106893986A (zh) * 2017-03-16 2017-06-27 天津职业技术师范大学 一种高硬度AlCrN纳米复合涂层及其制备工艺
CN107042576A (zh) * 2017-03-27 2017-08-15 深圳市中天超硬工具股份有限公司 烧结刀具及其加工方法
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CN102329151A (zh) * 2011-09-23 2012-01-25 重庆文理学院 一种陶瓷/金属陶瓷刀具的深冷处理方法
CN106893986A (zh) * 2017-03-16 2017-06-27 天津职业技术师范大学 一种高硬度AlCrN纳米复合涂层及其制备工艺
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