CN115386827A - 一种提高涂层硬质合金工具性能的处理方法 - Google Patents

一种提高涂层硬质合金工具性能的处理方法 Download PDF

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CN115386827A
CN115386827A CN202110563149.0A CN202110563149A CN115386827A CN 115386827 A CN115386827 A CN 115386827A CN 202110563149 A CN202110563149 A CN 202110563149A CN 115386827 A CN115386827 A CN 115386827A
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coating
hard alloy
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performance
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吴振宇
郑光明
程祥
凌四营
杨先海
李学伟
刘焕宝
赵光喜
李阳
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Dalian University of Technology
Shandong University of Technology
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Shandong University of Technology
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

本发明属于机械加工工具制造技术领域，特别涉及一种提高涂层硬质合金工具性能的处理方法。本发明提供了一种提高涂层硬质合金工具性能的处理方法，该方法的主要特征是在硬质合金基体工具涂层之前，对硬质合金工具表面进行湿式微喷砂处理，处理完后再进行涂层即得涂层硬质合金工具。使用微喷砂工艺对硬质合金基体工具进行表面处理，可以改善工具基体表面质量，提高涂层附着力，增强基体与涂层的结合强度，增强涂层硬质合金工具的抗剥落和抗破损能力，提高工具表面性能。

Description

一种提高涂层硬质合金工具性能的处理方法
技术领域
本发明属于机械加工工具制造技术领域，特别涉及一种提高涂层硬质合金工具性能的处理方法。
背景技术
随着制造业的发展，各类新型材料不断出现，这对传统加工工具的要求越来越高。涂层工具因其高硬度，高耐磨性，高化学稳定性，使用寿命长等优点，目前已逐渐取代传统工具，在切削加工中得到了广泛应用。然而涂层工具在高速加工、干式加工等情况下加工钛合金、高温合金等难加工材料时，仍然出现磨损过大，寿命不高的现象。涂层工具表面性能包括硬度，表面粗糙度，表面残余应力等，提高工具表面性能对提高工具切削性能有重大影响。
微喷砂处理技术具有高效、清洁、易于操作等优势，是一种新兴的表面处理技术。通过对涂层工具的硬质合金基体进行微喷砂前处理，可以改善硬质合金基体的表面形貌，提高涂层与基体的结合强度，从而使涂层工具表面缺陷得到改善，硬度、表面粗糙度、表面残余应力等表面性能得到强化，表面性能得到提升。
发明内容
本发明的目的，是提供一种提高涂层硬质合金工具性能的处理方法，能有效改善工具的表面完整性与切削性能。其技术方案为：
一种提高涂层硬质合金工具性能的处理方法，包括如下步骤：
（1）选择硬质合金基体，依次采用酒精、丙酮溶液进行超声波清洗去除表面的油污等杂物；
（2）进行微喷砂前处理，将硬质合金基体清洗后置于微喷砂处理装置中，并保证待硬质合金基体处于夹具中心，装置的喷砂料为Al2O3颗粒，并由水流带动颗粒；
（3）将处理后硬质合金基体再依次进行乙醇、丙酮溶液超声波清洗，去除表面残余微喷砂颗粒；
（4）基体干燥后进行涂层处理，即得涂层硬质合金工具。
进一步地，步骤（2）所述的微喷砂处理，颗粒粒度大小要低于50μm，按照水料比5:1配置微喷砂液，采用喷砂角度90°，喷砂距离100mm，喷砂时间20~40s，喷砂压强0~0.4MPa。
进一步地，步骤（4）所述涂层处理工艺，首先制备CrN过渡层，靶材为纯Cr靶，电弧电源输出电流60~100A，工作气压0.5~2.0Pa，沉积时间10~50min，涂层厚度控制在0.5~1μm；之后制备AlCrN涂层，靶材为Al70Cr30靶，靶电流60~120A，负偏压-70~-120V，氮气流量300~450sccm，真空度1.0~2.5pa，整体涂层厚度达到4μm。
本发明具有以下有益效果：
微喷砂表面处理速度较快，效率较高，可以有效的改善硬质合金基体工具的表面形貌，提高涂层与基体的结合强度，从而提高涂层工具硬度，强化残余压应力，抑制或消除工具表面裂纹，提高涂层硬质合金工具表面性能。
具体实施方式
1.选用WC-8%Co硬质合金作为基体工具，将基体工具抛光至镜面后依次采用酒精、丙酮溶液超声波清洗，时间30min，去除表面油污，备用。
2.将经步骤1处理后的硬质合金基体工具置于微喷砂处理装置中，并保证待处理工具处于夹具中心。微喷砂装置的喷砂料为Al2O3颗粒，喷料大小为26μm，并由水流带动颗粒，水与喷料配比为5:1。喷砂角度75°，喷砂距离100mm，喷砂时间40s，喷砂压强0.3MPa，喷砂次数为一次。
3.将经步骤2处理后硬质合金工具依次进行酒精、丙醇溶液的超声波清洗，时间5min，去除表面残留的喷料与液体。
4.将硬质合金工具干燥后进行涂层处理，首先制备CrN过渡层，靶材为纯Cr靶，靶电流70A，工作气压1.0Pa，沉积时间20min，涂层厚度控制在0.5~1μm；之后制备AlCrN涂层，靶材为Al70Cr30靶，靶电流70A，负偏压-90V，氮气流量400sccm，真空度2.0pa，整体涂层厚度达到4μm。涂层处理后得到涂层硬质合金工具。
5.对处理后的涂层硬质合金工具性能进行了检测，相比于未前处理工具，处理后涂层硬质合金工具的表面缺陷得到了改善，表面性能得到提升：表面粗糙度降低15%，硬度提高22%，表面残余应力提高31%。

Claims (5)

1.一种提高涂层硬质合金工具性能的处理方法，其特征包括下述工艺步骤：
（1）选择硬质合金基体工具，并依次采用酒精、丙酮溶液进行超声波清洗去除表面的油污等杂物；
（2）进行微喷砂预处理，基体工具清洗后置于微喷砂处理装置中，并保证待处理工具处于夹具中心，装置的喷料为Al2O3颗粒，并由水流带动颗粒；
（3）将处理后基体工具再依次进行酒精、丙酮溶液超声波清洗，去除表面残余微喷砂颗粒；
（4）进行表面涂层处理，即得金属加工工具。
2.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（2）所述的微喷砂预处理，喷料颗粒为Al2O3颗粒，颗粒粒度大小要低于50μm，按照水料比5:1配置微喷砂溶液，采用喷砂角度60°~90°，喷砂距离60~140mm，喷砂时间20~40s，喷砂压强0~0.4MPa。
3.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（4）所述涂层处理工艺，首先制备CrN过渡层，靶材为纯Cr靶，电弧电源输出电流60~100A，工作气压0.5~2.0Pa，沉积时间10~50min，涂层厚度控制在0.5~1μm；之后制备AlCrN涂层，靶材为Al70Cr30靶，靶电流60~120A，负偏压-70~-120V，氮气流量300~450sccm，真空度1.0~2.5pa，整体涂层厚度达到4μm。
4.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（4）所述涂层处理工艺，所述CrN过渡层沉积于所述硬质合金工具表面，所述AlCrN涂层沉积于所述CrN过渡层表面。
5.根据权利要求1所述的提高涂层硬质合金工具性能的处理方法，其特征在于：步骤（4）所述涂层处理工艺，所述AlCrN涂层中Al的原子百分比为39at%~45 at%，Cr的原子百分比为15 at%~21 at%。
CN202110563149.0A 2021-05-24 2021-05-24 一种提高涂层硬质合金工具性能的处理方法 Pending CN115386827A (zh)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106893986A (zh) * 2017-03-16 2017-06-27 天津职业技术师范大学 一种高硬度AlCrN纳米复合涂层及其制备工艺
CN111660208A (zh) * 2020-06-03 2020-09-15 山东理工大学 一种提高金属加工工具寿命的复合表面处理方法
JP2020157378A (ja) * 2019-03-25 2020-10-01 株式会社Moldino 被覆工具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106893986A (zh) * 2017-03-16 2017-06-27 天津职业技术师范大学 一种高硬度AlCrN纳米复合涂层及其制备工艺
JP2020157378A (ja) * 2019-03-25 2020-10-01 株式会社Moldino 被覆工具
CN111660208A (zh) * 2020-06-03 2020-09-15 山东理工大学 一种提高金属加工工具寿命的复合表面处理方法

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