CN115346939A - Heterogeneous embedded pin fin micro-channel radiator - Google Patents

Heterogeneous embedded pin fin micro-channel radiator Download PDF

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CN115346939A
CN115346939A CN202210782286.8A CN202210782286A CN115346939A CN 115346939 A CN115346939 A CN 115346939A CN 202210782286 A CN202210782286 A CN 202210782286A CN 115346939 A CN115346939 A CN 115346939A
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pin
fin
heat sink
micro
ribs
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李春泉
李雪斌
阎德劲
黄红艳
林奈
王侨
王玉斌
张皓
成鹏琳
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Guilin University of Electronic Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/46Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
    • H01L23/473Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids

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Abstract

本发明涉及一种嵌入式针鳍微流道散热器,主要由盖板、针鳍散热模块、基板组成。散热器的针鳍散热模块上主要由高导热系数材料加工而成,其主要特征结构有肋与针鳍,肋与肋之间构成流道,针鳍分布其间,针鳍散热模块有效的解决了热点的问题,提高了微流道散热器针对局部的散热能力。本发明在保留微通道体积小、换热能力强的基础上,进一步改善了微流道散热器针对局部热源的散热能力,具有较高的换热能力和换热极限。本发明结构紧凑、换热能力好,在电子芯片、激光器、整流器等高发热设备冷却方面具有很好的应用前景。

Figure 202210782286

The invention relates to an embedded pin-fin micro-channel radiator, which is mainly composed of a cover plate, a pin-fin heat dissipation module and a base plate. The pin fin heat dissipation module of the radiator is mainly processed by high thermal conductivity materials. Its main characteristic structure is ribs and pin fins. The flow channels are formed between the ribs and the ribs, and the pin fins are distributed among them. The pin fin heat dissipation module effectively solves the problem of The problem of hot spots improves the local cooling capacity of the micro-channel radiator. On the basis of retaining the small volume and strong heat exchange capacity of the micro channel, the invention further improves the heat dissipation capacity of the micro flow channel radiator for local heat sources, and has higher heat exchange capacity and heat exchange limit. The invention has compact structure and good heat exchanging ability, and has good application prospect in the cooling of high heat-generating equipment such as electronic chips, lasers and rectifiers.

Figure 202210782286

Description

一种异质嵌入式针鳍微流道散热器A Heterogeneous Embedded Pin-fin Microfluidic Heat Sink

技术领域technical field

本发明涉及一种新型微通道散热器,特别是一种改进的具有嵌入式针鳍模块的微流道散热器,可用于诸如电子芯片、高功率LED以及激光器等高发热设备的冷却。The invention relates to a new type of micro-channel heat sink, especially an improved micro-channel heat sink with an embedded pin-fin module, which can be used for cooling high heat-generating devices such as electronic chips, high-power LEDs and lasers.

背景技术Background technique

多组件芯片是一种将多块未封装的超大规模集成电路芯片以及专用集成电路芯片组装在一块基板上的部件。随着晶体管特征尺寸的减小,芯片上能够集成的晶体管数量也越来越多,导致芯片产生高热流密度,同时产生大量的热量。热量若不能及时的转移,且再随着热流密度的提高,PCB上热点的存在,会减少电子元器件的工作寿命或直接造成芯片的失效。A multi-component chip is a component that assembles multiple unpackaged VLSI chips and ASIC chips on one substrate. As the feature size of transistors decreases, the number of transistors that can be integrated on a chip is also increasing, resulting in high heat flux density in the chip and generating a large amount of heat at the same time. If the heat cannot be transferred in time, and with the increase of heat flux density, the existence of hot spots on the PCB will reduce the working life of electronic components or directly cause the failure of the chip.

发明内容Contents of the invention

为解决上述技术问题,本发明的目的旨在提供一种新型的异质嵌入式针鳍微流道散热器,能够改善热点问题,强化散热性能,提高散热极限。In order to solve the above technical problems, the object of the present invention is to provide a novel heterogeneous embedded pin-fin microfluidic heat sink, which can improve the hot spot problem, enhance the heat dissipation performance, and increase the heat dissipation limit.

为了实现上述目的,本发明采用的技术方案如下:In order to achieve the above object, the technical scheme adopted in the present invention is as follows:

本发明设计的异质嵌入式针鳍微流道散热器,盖板、基板、针鳍散热模块。所述盖板上设有进水口和出水口。冷却液由进水口流入,经过分流分别流过芯片下方针鳍散热模块以及周围普通微流道,最后汇聚在出水口处流出。The heterogeneous embedded pin-fin micro-channel heat sink, cover plate, base plate, and pin-fin heat dissipation module designed by the present invention. A water inlet and a water outlet are arranged on the cover plate. The cooling liquid flows in from the water inlet, flows through the sub-chip fin cooling module and the surrounding ordinary micro-channels respectively, and finally converges at the water outlet to flow out.

针鳍散热模块采用具有良好导热性能的材料如铜、银等加工制成,其上具有肋以及针鳍结构,所述针鳍与肋的尺寸可根据实际需要确定,在毫米或微米量级。所述的针鳍的截面可以是圆形、方形、梯形或三角形等形状。针鳍与肋均嵌入基板中。所述针鳍散热模块可通过微机电加工技术、3D打印而成。The pin fin heat dissipation module is made of materials with good thermal conductivity, such as copper and silver, and has ribs and pin fin structures on it. The size of the pin fins and ribs can be determined according to actual needs, on the order of millimeters or microns. The cross-section of the needle fin can be in the shape of circle, square, trapezoid or triangle. Both pin fins and ribs are embedded in the substrate. The pin-fin cooling module can be formed by micro-electro-mechanical processing technology and 3D printing.

所述的针鳍散热模块嵌入基板中,通过导热胶粘合或焊接等方式密封和连接。The pin-fin cooling module is embedded in the substrate, sealed and connected by means of heat-conducting adhesive bonding or welding.

本发明与传统的微通道散热器相比,具有以下特征和优点:对于传统微流道散热器(参见图1),本发明采用针鳍散热模块上有针鳍与肋,肋将由微流道而来的液体分流到针鳍散热模块上的流道内,并在针鳍的作用下增加冷却液的湍流强度从而达到增强微流道的散热性性能,同时针鳍散热模块采用导热系数低的材料,使得冷却液能够快速的将热量带走。有效的提高了散热器的综合换热能力和换热极限。Compared with the traditional micro-channel heat sink, the present invention has the following features and advantages: For the traditional micro-channel heat sink (see Figure 1), the present invention adopts pin fins and ribs on the cooling module, and the ribs will be formed by the micro-channel The coming liquid is shunted into the channel on the pin-fin heat dissipation module, and the turbulence intensity of the cooling liquid is increased under the action of the pin-fin to enhance the heat dissipation performance of the micro-channel. At the same time, the pin-fin heat dissipation module adopts materials with low thermal conductivity , so that the coolant can quickly take away the heat. Effectively improve the comprehensive heat transfer capacity and heat transfer limit of the radiator.

附图说明Description of drawings

图1是传统微流道散热器示意图Figure 1 is a schematic diagram of a traditional microchannel radiator

图2 是本发明的一个实施例结构示意图Fig. 2 is a structural schematic diagram of an embodiment of the present invention

图3 盖板结构示意图Figure 3 Schematic diagram of the cover plate structure

图4 是本发明的针鳍散热模块示意图Fig. 4 is a schematic diagram of the pin fin cooling module of the present invention

图5 带有流道的基板示意图Figure 5 Schematic diagram of the substrate with flow channels

图6 本发明工作示意图Fig. 6 working schematic diagram of the present invention

图7 本发明冷却液流动示意图。Fig. 7 is a schematic diagram of the cooling liquid flow of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,对本发明进一步详细说明。此处说明若涉及到具体实例时仅仅用以解释本发明,并不限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention is further described in detail. The description herein is only used to explain the present invention when referring to specific examples, and does not limit the present invention.

本实施例中所述的是一种异质嵌入式针鳍微流道散热器,如图2所示,由盖板1、针鳍散热模块2、基板3组成。What is described in this embodiment is a heat sink with heterogeneous embedded pin-fin micro-channels, as shown in FIG.

参见图3,所述的盖板1包括进水口1-1、出水口1-2、针鳍散热模块上嵌入槽1-3。盖板一般材质为导热系数较低的材质,本实施例中采用LTCC。在盖板背侧针鳍散热模块上嵌入槽1-3所在位置通过导热硅胶或导热硅脂等与发热器件结合。冷却工质采用去离子水,冷却工质从进水口1-1流入,从出水口1-2流出。针鳍散热模块上的嵌入槽深度在此设为盖板厚度一半,具体尺寸根据盖板材料、强度、厚度进行设置,其主要作用是通过减小盖板厚度来达到减小此处热阻的作用以及起到定位的作用,具体尺寸按需求确定。Referring to FIG. 3 , the cover plate 1 includes a water inlet 1-1, a water outlet 1-2, and an embedded groove 1-3 on the pin fin cooling module. The general material of the cover plate is a material with a low thermal conductivity, and LTCC is used in this embodiment. The position of the embedded groove 1-3 on the pin fin heat dissipation module on the back side of the cover plate is combined with the heating device through thermal conductive silicone or thermal grease. The cooling working medium is deionized water, and the cooling working medium flows in from the water inlet 1-1 and flows out from the water outlet 1-2. The depth of the embedding groove on the pin fin cooling module is set to half the thickness of the cover plate. The specific size is set according to the material, strength and thickness of the cover plate. Its main function is to reduce the thermal resistance here by reducing the thickness of the cover plate. The function and the role of positioning, the specific size is determined according to the demand.

参见图4,所述的针鳍散热模块2包括针鳍2-1与肋2-2。针鳍散热模块材质采用导热系数较高的铜,以增强换热能力,。针鳍散热模块上的针鳍2-1采用圆柱体结构,针鳍主要作用为增加换热面积、破坏层流与热边界层以达到增强散热的作用。针鳍散热模块上的肋2-2的高度与基板上微流道的高度相同,肋的间距在毫米或微米量级,其主要通过增大换热面积、破坏层流、分流冷却工质到针鳍上来增强换热能力,具体尺寸按需求确定。Referring to FIG. 4 , the pin fin cooling module 2 includes pin fins 2 - 1 and ribs 2 - 2 . The pin fin cooling module is made of copper with high thermal conductivity to enhance heat transfer capability. The pin fin 2-1 on the pin fin heat dissipation module adopts a cylindrical structure, and the main function of the pin fin is to increase the heat exchange area and destroy the laminar flow and thermal boundary layer to enhance heat dissipation. The height of the ribs 2-2 on the pin-fin heat dissipation module is the same as the height of the micro-channels on the substrate, and the distance between the ribs is on the order of millimeters or microns. The pin fins are used to enhance the heat exchange capacity, and the specific size is determined according to the requirements.

参见图5,所述的基板3包括微流道3-1、导向肋3-2、针鳍散热模块下嵌入槽3-3。基板材质采用LTCC。微流道截面尺寸在毫米或微米量级。导向肋的作用主要为将冷却工质导入针鳍处,针鳍散热模块部分嵌入针鳍散热模块下嵌入槽中。Referring to FIG. 5 , the substrate 3 includes micro-channels 3-1, guide ribs 3-2, and embedded grooves 3-3 under the pin-fin cooling module. The substrate material is LTCC. The cross-sectional size of the microchannel is on the order of millimeters or microns. The function of the guide rib is mainly to introduce the cooling working fluid to the pin fin, and the pin fin heat dissipation module is partially embedded in the embedded groove under the pin fin heat dissipation module.

本实施例工作示意图可参见图6,冷却工质从进水口流入,通过微流道,经导向肋与肋的作用流经针鳍,汇集到微流道中,最终从出水口流出。The working diagram of this embodiment can be seen in Figure 6. The cooling medium flows in from the water inlet, passes through the micro-channel, flows through the pin fins through the action of the guide ribs and ribs, collects in the micro-channel, and finally flows out from the water outlet.

本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进,均应包含在本发明的保护范围之内。Those skilled in the art can easily understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention are all Should be included within the protection scope of the present invention.

Claims (5)

1. The utility model provides an embedded pin fin miniflow way radiator which characterized in that, the radiator comprises apron (1), pin fin heat dissipation module (2), base plate (3): the structural layers are sequentially superposed to form the whole radiator through bonding, sintering or welding;
the embedded pin-fin micro-channel heat sink as claimed in claim 1, wherein the cover plate (1) has pin-fin heat sink module embedded slots for positioning and reducing the local cover plate thickness.
2. The embedded pin fin micro flow channel heat sink according to claim 1, wherein the pin fin heat sink module (2) is made of a metal material with good thermal conductivity, and has two structures of pin fins and ribs, the cross-sectional shape of the ribs can be square, trapezoid, or triangle, the cross-sectional shape of the pin fins can be square, circular, trapezoid, or triangle, and the size of the pin fins and the ribs is in the millimeter or micrometer range.
3. The embedded pin fin micro flow channel heat sink as claimed in claim 1, wherein the substrate (3) has guiding ribs for guiding the cooling medium to the pin fin heat sink module and limiting the pin fin heat sink module.
4. The embedded pin fin micro flow channel heat sink of claim 1, wherein the water inlet and outlet can be provided on both the substrate and the cover plate.
5. The embedded pin-fin micro-channel heat sink according to claim 1, wherein the cover plate (1) and the substrate (3) are made of LTCC, and the embedded pin-fin micro-channel heat sink can be used as a substrate or a PCB.
CN202210782286.8A 2022-07-05 2022-07-05 Heterogeneous embedded pin fin micro-channel radiator Pending CN115346939A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115799247A (en) * 2023-02-08 2023-03-14 广东仁懋电子有限公司 IGBT device and IGBT module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115799247A (en) * 2023-02-08 2023-03-14 广东仁懋电子有限公司 IGBT device and IGBT module

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