CN115323338B - Film coating method for miniature lens - Google Patents
Film coating method for miniature lens Download PDFInfo
- Publication number
- CN115323338B CN115323338B CN202110440265.3A CN202110440265A CN115323338B CN 115323338 B CN115323338 B CN 115323338B CN 202110440265 A CN202110440265 A CN 202110440265A CN 115323338 B CN115323338 B CN 115323338B
- Authority
- CN
- China
- Prior art keywords
- lens
- lenses
- coating
- lens group
- film material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 title claims abstract description 39
- 239000007888 film coating Substances 0.000 title description 25
- 238000009501 film coating Methods 0.000 title description 25
- 238000000576 coating method Methods 0.000 claims abstract description 58
- 239000011248 coating agent Substances 0.000 claims abstract description 56
- 238000007747 plating Methods 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims description 59
- 238000004140 cleaning Methods 0.000 claims description 18
- 238000001704 evaporation Methods 0.000 claims description 13
- 230000008020 evaporation Effects 0.000 claims description 10
- 150000002500 ions Chemical class 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 10
- 239000012528 membrane Substances 0.000 description 9
- 238000005482 strain hardening Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005002 finish coating Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Eyeglasses (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The application provides a film plating method of a miniature lens, which relates to the technical field of miniature lens processing and comprises the steps of obtaining a lens group, wherein the lens group comprises a plurality of lenses, the lenses are clamped in a tool side by side along the radial direction of the lenses, and two end surfaces of the lenses are exposed, so that the end surfaces of the lenses are arranged to form a strip-shaped surface; coating one end face of the plurality of lenses simultaneously; the lens group is turned over, and the other end surfaces of the lenses are coated simultaneously. The whole lens group is coated, loss of a single lens is not caused, the phenomenon that coating surfaces are difficult to distinguish to cause missing coating or repeated coating in the prior art is avoided when the two end surfaces of the lens are coated, and the error rate of coating is reduced. In addition, the mode of integrally coating the plurality of lenses to form the lens group is adopted, so that the problems that the single lens is small in size and difficult to clamp and operate are avoided, the lens group is integrally clamped, the overall coating time is effectively shortened, the coating efficiency is improved, and the operation difficulty is reduced.
Description
Technical Field
The application relates to the technical field of microminiature lens processing, in particular to a film plating method of a microminiature lens.
Background
When the existing lens is processed, the lens is formed by adopting optical cold processing, the lens is generally cylindrical, then the two end faces of the lens are sequentially coated with films, and then the subsequent lens processing is finished, so that a final lens finished product is obtained. The existing film coating often adopts a lens clamping or a lens sticking on the film coating.
For the miniature lens, the small size of the miniature lens limits the available materials, the manufacturing precision and the cleaning process before plating, so that the miniature lens cannot be plated in a clamping manner of the fixture; the lens is adhered to the membrane in a film coating mode, the lens with a tiny size is easy to lose when being cleaned before being coated, and the two end faces of the lens are difficult to distinguish due to the small size of the lens, so that the error rate of film coating is high. Therefore, the operation difficulty of the lens coating film with the micro size is high, and the efficiency is low.
Disclosure of Invention
The embodiment of the application aims to provide a film coating method for a miniature lens, which can improve the film coating efficiency of the miniature lens, reduce the loss of the lens and reduce the error rate of film coating.
In one aspect of the embodiment of the application, a film plating method for a miniature lens is provided, which comprises the steps of obtaining a lens group, wherein the lens group comprises a plurality of lenses, the lenses are clamped in a tool side by side along the radial direction of the lenses, and two end surfaces of the lenses are exposed, so that the end surfaces of the lenses are arranged to form a strip-shaped surface; coating one end face of the plurality of lenses simultaneously; the lens group is turned over, and the other end surfaces of the lenses are coated simultaneously.
When the whole lens group is coated, loss of a single lens is avoided, one end face of each lens of the lens group is coated simultaneously when the two end faces of the lens are coated, and then the other end face of each lens of the lens group is coated simultaneously by turning the direction of the lens group, so that the error rate of coating is reduced. The mode of forming the whole film coating of the lens groups by the plurality of lenses is adopted, the problems that the single lens is small in size and difficult to clamp and operate are avoided, the operation time is effectively shortened by the whole film coating, the film coating efficiency is improved, and the operation difficulty is reduced.
Optionally, the method includes, after obtaining a lens group, where the lens group includes a plurality of lenses, and the plurality of lenses are clamped in the tooling side by side along a radial direction of the lenses and expose two end surfaces of the plurality of lenses, so that the end surfaces of the plurality of lenses are arranged to form a strip-shaped surface, the method includes: cleaning the lens group; placing the cleaned lens group into a vacuum chamber for pre-vacuumizing; and secondarily cleaning the end face of the lens group.
The lens is subjected to surface treatment before film coating, and the whole lens group is treated by cleaning and pre-vacuumizing, so that loss of a single lens due to small size is avoided.
Optionally, pre-evacuating the clean lens group includes: pre-pumping the lens group for 20-30 min at 60-100 ℃ under low vacuum to extract the residual foreign matters on the cylindrical surface of the lens strip.
Optionally, simultaneously coating one end face of the plurality of lenses includes: placing at least one lens group into a clamp, and enabling the clamp to clamp two ends of the lens group so as to expose end faces of the lens; placing at least one clamp on a workpiece disc of a coating machine, wherein the at least one clamp is distributed along the center circumference of the workpiece disc, so that one end face of the lens faces to the film material; the workpiece disc is rotated, so that the film material is evaporated on one end face of the lens in the state that the workpiece disc rotates.
And (3) carrying out batch coating, starting a coating machine, enabling the workpiece disc to rotate, heating and evaporating the film material by an electron gun, enabling the evaporated film material to move upwards, and evaporating on the end face of the lens.
Optionally, simultaneously coating the other end surfaces of the plurality of lenses includes: stopping rotation of the workpiece disc; turning the clamp to enable the other end face of the lens to face the film material; and rotating the workpiece disc to enable the film material to be evaporated on the other end face of the lens in the rotating state of the workpiece disc. And (5) turning over the lens group to finish the film plating of the other end surface of the lens.
Optionally, the film materials include a first film material and a second film material, the first film material and the second film material are different materials, and the first film material and the second film material are alternately laminated and evaporated on the end face of the lens.
Optionally, the rotation speed of the workpiece disc is 30-45/min, and the evaporation time is 35-50 min.
Optionally, rotating the workpiece disc to make the film material vapor deposited on one end surface of the lens in a state that the workpiece disc rotates, or rotating the workpiece disc to make the film material vapor deposited on the other end surface of the lens in a state that the workpiece disc rotates further comprises: one or the other end face of the lens is irradiated with an ion source.
The ion source is adopted for auxiliary evaporation, and irradiates the end face of the lens, so that the film material can be better attached to the end face of the lens.
Optionally, the membrane material and the ion source are staggered and arranged near the center projection of the workpiece disc. And each lens on the workpiece disc can be uniformly covered during film material evaporation, and the energy irradiated by the ion source can be uniformly covered on each lens on the workpiece disc, so that the firmness and compactness of the film layer are improved.
Optionally, after the lens group is turned over and the other end surfaces of the plurality of lenses are coated simultaneously, the method includes: removing the plurality of lenses; and cleaning the lens by ultrasonic waves for 30-35 min. And (5) carrying out film coating post-treatment to obtain a single clean lens.
The method for coating the miniature lens provided by the embodiment of the application comprises the steps of obtaining a lens group after optical cold working of the lens is completed, wherein the lens group comprises a plurality of lenses, and the lenses are clamped in a tool side by side along the radial direction of the lenses and expose two end surfaces of the lenses. When in coating, the whole lens group is coated, and the coating of batch lenses can be finished at the same time. And when the film is coated, the whole lens group is cleaned, pre-vacuumized and the like, compared with the existing film coating for a single lens, the film coating method disclosed by the application has the advantages that loss and loss of the single lens are not caused when the whole lens group is coated, when the film is coated on two end surfaces of the lens, one end surface of each lens of the lens group is coated at the same time, then the direction of the lens group is turned, and the other end surface of each lens of the lens group is coated at the same time, so that the phenomenon of missing or repeated coating caused by the fact that the film coating surface is difficult to distinguish in the prior art is avoided, and the error rate of film coating is reduced. In addition, the mode of integrally coating the plurality of lenses to form the lens group is adopted, so that the problems that the single lens is small in size and difficult to clamp and operate are avoided, the lens group is integrally clamped, the overall coating time is effectively shortened, the coating efficiency is improved, and the operation difficulty is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic flow chart of a film coating method of a micro lens according to the present embodiment;
fig. 2 is a schematic view of a lens assembly according to the present embodiment;
fig. 3 is a schematic view of the structure of the clamp according to the present embodiment;
fig. 4 is a schematic view of a structure of a workpiece tray provided in the present embodiment;
fig. 5 is a schematic diagram of a plating principle provided in this embodiment.
Icon: 100-lens group; 101-a lens; 102-tooling; 1021-a reference plane; 200-clamping; 301-a workpiece tray; 3021-a first membrane material; 3022-a second membrane material; 303-ion source.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application.
In the description of the present application, it should be noted that, the azimuth or positional relationship indicated by the terms "inner", "outer", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship that is commonly put in use of the product of this application, are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and therefore should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
It should also be noted that the terms "disposed," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly coupled, detachably coupled, or integrally coupled, unless otherwise specifically defined and limited; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.
In the prior art, the main fixing modes adopted by the G-Lens coating at present are two: one is conventional G-Lens with the diameter more than or equal to 1.0mm and the length more than 1mm, and a fixture is used for clamping a single Lens and then cleaning and coating; when the fixture clamping mode is used for coating, the limit of the fixture on available materials, manufacturing precision and cleaning process before coating is met, the G-Lens size is required, and the micro-Lens cannot be coated in the fixture clamping mode.
The other is tiny G-Lens with the diameter smaller than 0.5mm and the length smaller than 1mm, and the product is cleaned and then is attached to a film coating film for film coating. The manner of coating the film by attaching the lens to the film also has the following disadvantages: 1) The small-size lens is easy to lose and lose when being cleaned before plating; 2) The plating surface and the non-plating surface are not easy to distinguish when the S2 surface is plated; 3) The product is tiny, is not easy to operate and has low efficiency.
Because of the miniaturization of G-Lens, the two ways can not realize the film plating of the miniature G-Lens due to various limitations.
In order to solve the above problems, an embodiment of the present application provides a film plating method for a micro lens, which is to wipe the whole workpiece without disassembling the workpiece into a single lens 101 after the optical cold working is completed, and to put the workpiece into a specific tool 102 and a fixture 200 for film plating.
Specifically, referring to fig. 1, an embodiment of the present application provides a film coating method for a micro-miniature lens, which is suitable for a lens 101 processed in an optical cold processing process, and the method is used after cold processing to coat a micro-miniature lens 101 with a smaller size, and the application is illustrated by taking a lens 101 specification of phi 0.215mm and l=0.47 mm as an example.
The method comprises the following steps:
S100: the lens group 100 is obtained, the lens group 100 comprises a plurality of lenses 101, the lenses 101 are clamped in the tool 102 side by side along the radial direction of the lenses 101, and two end faces of the lenses 101 are exposed, so that the end faces of the lenses 101 are arranged to form a strip-shaped surface.
After the optical cold working of the lens 101 is completed, the lens group 100 can be obtained. That is, the lens group 100 is the state of the lens 101 after the optical cold working of the lens 101 is completed.
The lens group 100 includes a plurality of lenses 101, the plurality of lenses 101 are held in the fixture 102 side by side in the radial direction of the lenses 101, and both end surfaces of the plurality of lenses 101 are exposed from the fixture 102, so that the obtained lens group 100 forms a strip-shaped surface due to the arrangement of the end surfaces of the plurality of lenses 101.
To arrange the plurality of lenses 101 to form the lens group 100, before S100, that is, during optical cold working, the lens group 100 may be directly formed by optical cold working, and a process of optical cold working is not described herein.
As shown in fig. 2, the formed lens group 100 is provided with a clamping area, the clamping area is a quadrangular area formed by sequentially connecting four planes, one end surface matched with the diameter of the lens 101 in the quadrangular area is a reference surface 1021, the circumferential surface of the first lens 101 is attached to the end surface (reference surface 1021), a plurality of subsequent lenses 101 are sequentially arranged in the clamping area of the tool 102 side by side, the circumferential surfaces of the plurality of lenses 101 are sequentially attached to each other, and the clamping area of the tool 102 clamps the plurality of lenses 101, so that the subsequent overall film plating treatment is facilitated.
Thus, the plurality of lenses 101 are clamped, and the problem that a single micro lens 101 cannot be clamped is solved.
Before coating, the lens 101 is subjected to surface treatment, specifically including:
S101: the lens group 100 is cleaned.
After obtaining the lens group 100 (lens bar), the lens bar was not split into individual lenses 101, but the entire lens bar was wiped, and the lens bar was cleaned under a high power microscope with a cotton swab dipped with alcohol to remove surface dirt.
S102: the cleaned lens assembly 100 is placed in a vacuum chamber and pre-evacuated.
And placing the cleaned lens strip into a vacuum chamber of a coating machine for pre-pumping. The whole lens strip is pre-vacuumized for 20min to 30min under the low vacuum environment at the temperature of 60 ℃ to 100 ℃ and the vacuumized function is to suck out the residual foreign matters on the cylindrical surface of the lens strip.
S103: the end face of the lens group 100 is secondarily cleaned.
The lens group 100 is taken out from the vacuum chamber, and the secondary cleaning is the cleaning before film coating, namely, the residual foreign matters on the end face of the lens strip are erased by dipping alcohol with a cotton swab under a high power microscope, so that the effect during film coating is ensured.
The cleaning and pre-evacuation processes the entire lens assembly 100, thus avoiding the loss of the individual lenses 101 due to their small size.
S110: while coating one end face of the plurality of lenses 101.
S111: at least one lens group 100 is placed in the jig 200 such that the jig 200 grips both ends of the lens group 100 to expose the end face of the lens 101.
A tool 102 can hold a plurality of lenses 101 to form a lens group 100 (lens bar); one fixture 200 may hold at least one lens group 100, the greater the number of lens groups 100 held by the fixture 200, the greater the number of batch-coated lenses 101.
As shown in fig. 3, the plurality of lens groups 100 are held in the jig 200, and the plurality of lens groups 100 are arranged so as to expose both end surfaces of each lens 101, so that subsequent coating of the end surfaces is facilitated.
S112: at least one fixture 200 is placed on a workpiece tray 301 of a film plating machine, and the at least one fixture 200 is distributed along the center circumference of the workpiece tray 301 so that one end face of the lens 101 faces the film stock.
The jigs 200 are placed on a work piece tray 301 of a film plating machine to plate film, and at least one jig 200 may be placed on the work piece tray 301, and when a plurality of jigs 200 are placed on the work piece tray 301, as shown in fig. 4, the plurality of jigs 200 are distributed along the center circumference of the work piece tray 301.
As shown in fig. 5, the film material is located below the work piece tray 301, and one end face of each lens 101 on the work piece tray 301 is placed toward the film material, that is, the lens 101 is placed vertically in the radial direction of the lens 101, so that both end faces of the lens 101 face up and down respectively, and the downward end face just faces the film material.
S113: the work disk 301 is rotated, and the film material is deposited on one end surface of the lens 101 in a state where the work disk 301 is rotated.
The coating machine is started to rotate the workpiece disc 301, and the rotation speed of the workpiece disc 301 is 30-45/min. When the work disk 301 rotates, the film material is heated and evaporated by the electron gun, and the evaporated film material moves upward and is evaporated on the end face of the lens 101.
The evaporation time is 35-50 min, the film material comprises silicon dioxide (SiO 2) and tantalum pentoxide (Ta 2O5), and the evaporation rate of the film material during evaporation is SiO 2：8A/S～15A/S;Ta2O5: 3A/S to 4A/S.
Rotation of the workpiece tray 301 ensures uniformity of the film attached to each lens 101 during batch coating.
Meanwhile, in order to enhance the adhesion of the film material to the end face of the lens 101, the ion source 303 may be used to assist evaporation. The ion source 303 is positioned below the workpiece tray 301, and the end face of the lens 101 is irradiated by the ion source 303, so that the film material can be better attached to the end face of the lens 101.
In addition, the film material and the ion source 303 can be arranged in a staggered manner near the central projection position of the workpiece disc 301, so that each lens 101 on the workpiece disc 301 can be uniformly covered during film material evaporation, and each lens 101 on the workpiece disc 301 can be uniformly covered by energy irradiated by the ion source 303, so that the firmness and compactness of a film layer are improved.
Further, as shown in fig. 5, the membrane materials include a first membrane material 3021 and a second membrane material 3022, where the first membrane material 3021 and the second membrane material 3022 are made of different materials. When the first film 3021 is vapor-deposited, the ion source 303 is used to irradiate, a first film is formed on the end face of the lens 101, then the second film 3022 is vapor-deposited, and the ion source 303 is also used to irradiate, a second film is formed on the first film, so that the first film and the second film are alternately formed on the end face of the lens 101.
The first film 3021 may be silicon dioxide (SiO 2), the second film 3022 may be tantalum pentoxide (Ta 2O5), or the first film 3021 may be tantalum pentoxide (Ta 2O5), the second film 3022 may be silicon dioxide (SiO 2), the first film 3021 and the second film 3022 are alternately deposited on the end surface of the lens 101 by lamination, and the first film 3021 and the second film 3022 are respectively disposed at two sides of the ion source 303.
Of course, the first film 3021 and the second film 3022 are not limited to the above materials, and may be specifically selected according to need.
In the vapor deposition, the plurality of jigs 200 are distributed along the center circumference of the workpiece tray 301, and one end face of each lens 101 faces the film material, so that the plurality of lenses 101 in batch can be vapor deposited at the same time, and the vapor deposition efficiency is improved.
S120: the lens group 100 is turned over while coating the other end surfaces of the plurality of lenses 101.
After the evaporation of one end face of each lens 101 is completed, equipment such as a film plating machine is suspended, the workpiece disc 301 stops rotating, and the clamp 200 on the workpiece disc 301 is turned to the direction so that the other end face of each lens 101 faces the film material.
Then starting a coating machine, rotating the workpiece disc 301 again, and evaporating the film material on the other end face of the lens 101 in the rotating state of the workpiece disc 301 according to the step S113 to finish coating the two end faces of the batch of lenses 101.
Because the end face of the whole lens strip is coated during coating, after one end face is coated, the clamp 200 is turned over integrally to coat the other end face of the whole lens strip, so that the situation that the end faces of the lenses 101 are coated and not coated is not easily distinguished when the single lenses 101 are coated in batches is avoided, and the error rate is reduced.
S131: the plurality of lenses 101 are removed.
After coating the plurality of lenses 101 with the jig 200, the coated lens bar is detached from the jig 200, and the lens bar is soaked with the corresponding solution to remove the plurality of lenses 101 of the lens bar, thereby obtaining a single lens 101.
S132: the lens 101 is cleaned by ultrasonic waves for 30-35 min.
The single lens 101 is cleaned by an ultrasonic cleaner for 30min to 35min to clean the surface of the lens 101, thereby obtaining a clean single lens 101.
According to the film coating method for the miniature lens, the lens group 100 is obtained after optical cold working of the lens 101 is completed, the lens group 100 comprises a plurality of lenses 101, the lenses 101 are clamped in the tool 102 side by side along the radial direction of the lenses 101, and two end faces of the lenses 101 are exposed. When coating, the entire lens group 100 is coated, and the batch of lenses 101 can be coated at the same time. In addition, during film plating, the whole lens group 100 is subjected to cleaning, pre-vacuumizing and other treatments, compared with the existing film plating of a single lens 101, the film plating method disclosed by the application has the advantages that loss of the single lens 101 is not caused during cleaning when the whole lens group 100 is subjected to film plating, one end surface of each lens 101 of the lens group 100 is firstly subjected to film plating simultaneously during film plating of two end surfaces of the lens 101, then the other end surface of each lens 101 of the lens group 100 is subjected to film plating simultaneously by turning the direction of the lens group 100, the phenomenon that the film plating surface is difficult to distinguish in the prior art, and therefore, the film plating missing or repeated plating phenomenon is avoided, and the error rate of film plating is reduced. In addition, the mode of integrally coating the plurality of lenses 101 to form the lens group 100 is adopted, so that the problem that the single lens 101 is small in size and difficult to clamp and operate is solved, the lens group 100 is integrally clamped, the overall coating time is effectively shortened, the coating efficiency is improved, and the operation difficulty is reduced.
Furthermore, the coating method integrates the three ultrasonic cleaning steps of strip disassembly cleaning, pre-coating cleaning and post-coating cleaning in the whole coating process into the method which only needs to carry out one ultrasonic cleaning step after coating is finished, thereby reducing the operation time. The whole film plating process is performed on the whole lens strip, so that the operation difficulty is reduced, and the efficiency is improved; the lens 101 loss is reduced; the method is easy to distinguish the coated surface from the uncoated surface, and reduces the error rate.
The above embodiments of the present application are only examples, and are not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.
Claims (10)
1. A method for coating a miniature lens, comprising:
The method comprises the steps of obtaining a lens group, wherein the lens group comprises a plurality of lenses, the lenses are clamped in a tool side by side along the radial direction of the lenses, and two end faces of the lenses are exposed, so that the end faces of the lenses are arranged to form a strip-shaped surface;
coating one end face of a plurality of lenses at the same time;
Turning over the lens group and coating films on the other end surfaces of the lenses at the same time;
The fixture is provided with a clamping area, a plurality of lenses are sequentially arranged in the clamping area of the fixture side by side, the circumferential surfaces of the lenses are sequentially attached to each other, and the plurality of lenses are clamped by the clamping area of the fixture;
the diameter of the lens is less than 0.5mm, and the length is less than 1mm.
2. The method of claim 1, wherein the obtaining a lens group, the lens group including a plurality of lenses, the plurality of lenses being held side by side in a fixture along a radial direction of the lenses and exposing two end surfaces of the plurality of lenses such that the end surfaces of the plurality of lenses are arranged to form a strip-shaped surface, the method comprising:
Cleaning the lens group;
placing the cleaned lens group into a vacuum chamber for pre-vacuumizing;
and secondarily cleaning the end face of the lens group.
3. The method of coating a miniature lens according to claim 2, wherein said pre-evacuating said cleaned lens group comprises:
The lens group is pre-pumped for 20min to 30min under the low vacuum at the temperature of 60 ℃ to 100 ℃.
4. The method of coating a miniature lens according to claim 1, wherein simultaneously coating one end surface of a plurality of said lenses comprises:
Placing at least one lens group into a clamp, and enabling the clamp to clamp two ends of the lens group so as to expose end faces of the lens;
Placing at least one clamp on a workpiece disc of a film plating machine, wherein the at least one clamp is distributed along the center circumference of the workpiece disc, so that one end face of the lens faces to a film material;
and rotating the workpiece disc to enable the film material to be evaporated on one end face of the lens in the rotating state of the workpiece disc.
5. The method of coating a miniature lens according to claim 4, wherein simultaneously coating the other end surfaces of the plurality of lenses comprises:
Stopping rotation of the workpiece disc;
turning the clamp to enable the other end face of the lens to face the film material;
And rotating the workpiece disc to enable the film material to be evaporated on the other end face of the lens in the rotating state of the workpiece disc.
6. The method according to claim 4 or 5, wherein the film material comprises a first film material and a second film material, the first film material and the second film material are different materials, and the first film material and the second film material are alternately laminated and evaporated on the end face of the lens.
7. The method for coating a miniature lens according to claim 4 or 5, wherein the rotation speed of the workpiece disc is 30 to 45/min, and the evaporation time is 35 to min to 50min.
8. The method of claim 4 or 5, wherein rotating the work plate to deposit the film material on one end surface of the lens in a state in which the work plate rotates, or rotating the work plate to deposit the film material on the other end surface of the lens in a state in which the work plate rotates, further comprises:
one or the other end face of the lens is irradiated with an ion source.
9. The method of claim 8, wherein the film stock and the ion source are offset and positioned near a center projection of the workpiece tray.
10. The method of coating a miniature lens according to claim 1, wherein after said inverting said lens group while coating the other end surfaces of a plurality of said lenses, said method comprises:
removing a plurality of the lenses;
And cleaning the lens by ultrasonic waves for 30-min min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110440265.3A CN115323338B (en) | 2021-04-22 | 2021-04-22 | Film coating method for miniature lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110440265.3A CN115323338B (en) | 2021-04-22 | 2021-04-22 | Film coating method for miniature lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115323338A CN115323338A (en) | 2022-11-11 |
| CN115323338B true CN115323338B (en) | 2024-05-14 |
Family
ID=83913122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110440265.3A Active CN115323338B (en) | 2021-04-22 | 2021-04-22 | Film coating method for miniature lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115323338B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1641065A (en) * | 2004-01-06 | 2005-07-20 | 鸿富锦精密工业（深圳）有限公司 | Optical lens coating apparatus and method |
| CN101373224A (en) * | 2007-08-24 | 2009-02-25 | 鸿富锦精密工业（深圳）有限公司 | Method for making film coating glasses lens |
| TW200914864A (en) * | 2007-09-21 | 2009-04-01 | Hon Hai Prec Ind Co Ltd | Method for fabricating coating lens |
| JP2009242892A (en) * | 2008-03-31 | 2009-10-22 | Hoya Corp | Lens production method, method of producing spectacle lens, and vapor deposition apparatus |
| CN105723274A (en) * | 2013-08-30 | 2016-06-29 | Hoya株式会社 | Spectacle lens and method for producing same |
| CN205420538U (en) * | 2016-03-15 | 2016-08-03 | 苏州久晶光电科技有限公司 | Wash two -sided anchor clamps of coating film |
| CN205438314U (en) * | 2016-03-18 | 2016-08-10 | 福州阭尔发光学有限公司 | Small -size cylinder is regulation of action anchor clamps for lens coating |
| CN207642968U (en) * | 2017-11-10 | 2018-07-24 | 江西水晶光电有限公司 | Coating of lenses fixture |
| CN210163331U (en) * | 2019-05-23 | 2020-03-20 | 广东瑞谷光网通信股份有限公司 | Coating fixture for ball lens |
-
2021
- 2021-04-22 CN CN202110440265.3A patent/CN115323338B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1641065A (en) * | 2004-01-06 | 2005-07-20 | 鸿富锦精密工业（深圳）有限公司 | Optical lens coating apparatus and method |
| CN101373224A (en) * | 2007-08-24 | 2009-02-25 | 鸿富锦精密工业（深圳）有限公司 | Method for making film coating glasses lens |
| TW200914864A (en) * | 2007-09-21 | 2009-04-01 | Hon Hai Prec Ind Co Ltd | Method for fabricating coating lens |
| JP2009242892A (en) * | 2008-03-31 | 2009-10-22 | Hoya Corp | Lens production method, method of producing spectacle lens, and vapor deposition apparatus |
| CN105723274A (en) * | 2013-08-30 | 2016-06-29 | Hoya株式会社 | Spectacle lens and method for producing same |
| CN205420538U (en) * | 2016-03-15 | 2016-08-03 | 苏州久晶光电科技有限公司 | Wash two -sided anchor clamps of coating film |
| CN205438314U (en) * | 2016-03-18 | 2016-08-10 | 福州阭尔发光学有限公司 | Small -size cylinder is regulation of action anchor clamps for lens coating |
| CN207642968U (en) * | 2017-11-10 | 2018-07-24 | 江西水晶光电有限公司 | Coating of lenses fixture |
| CN210163331U (en) * | 2019-05-23 | 2020-03-20 | 广东瑞谷光网通信股份有限公司 | Coating fixture for ball lens |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115323338A (en) | 2022-11-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4495463B2 (en) | Ophthalmic lens processing method | |
| JP6080299B2 (en) | Optical member and manufacturing method thereof | |
| US20110097484A1 (en) | Lens holding tool, lens holding method, and lens processing method | |
| CN111710648B (en) | Ultra-thin wafer back and double-side processing technology for bonded glass carrier plate | |
| CN115323338B (en) | Film coating method for miniature lens | |
| JP4701486B2 (en) | Electron gun for electron beam vapor deposition, vapor deposition material holding device, and vapor deposition device | |
| US10450648B2 (en) | Apparatus and method to coat glass substrates with electrostatic chuck and Van der Waals forces | |
| JPWO2007148536A1 (en) | Film forming apparatus and film forming method | |
| JP4453995B2 (en) | Carrier boat made of fluororesin-coated quartz glass | |
| WO2020250454A1 (en) | Method for regenerating film formation structure and regenerated film formation structure | |
| JP3854085B2 (en) | Substrate processing equipment | |
| JPS5813009A (en) | Method and device for manufacturing surface acoustic wave element | |
| KR20010093683A (en) | Wet cleaning device and wet etching method | |
| JPH06112302A (en) | Plasma processing apparatus and its handling method | |
| CN108193171A (en) | The manufacturing method of the optically isolated structure of multichannel integrated optical filter | |
| JPH09134872A (en) | Method and device for stripping resist | |
| KR101123968B1 (en) | Recycle method of electrostatic chuck | |
| CN116397202A (en) | Coating device for optical fiber surface metallization and coating method thereof | |
| CN112458401A (en) | Preparation method of optical film of plane reflector | |
| US20040023510A1 (en) | Method for producing a quartz glass tank for use in ultrasonic cleaning used for fabricating semiconductor and quartz glass tank obtainable from that method | |
| CN114823421A (en) | Wafer bearing method | |
| JPH03232963A (en) | Method for coating with ceramics film | |
| JPH01141840A (en) | Coating method for linear glass material | |
| WO2019060050A1 (en) | Native or uncontrolled oxide reduction by a cyclic process of plasma treatment and h* radicals | |
| JPH09192587A (en) | Coating method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |