JP4701486B2 - Electron gun for electron beam vapor deposition, vapor deposition material holding device, and vapor deposition device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an improvement of an electron gun used in a vapor deposition apparatus, and in particular, an electron gun main body that emits an electron beam, and a hearth that holds a plurality of crucibles containing vapor deposition materials heated by the electron beam emitted from the electron gun, The present invention relates to an improvement of an electron gun provided with
[0002]
[Prior art]
In various industrial fields such as various optical parts such as lenses, electronics, electricity, automobiles, semiconductors, steel, etc., a vapor deposition apparatus for forming a film on a vapor deposition target is used. The vapor deposition apparatus is an apparatus that deposits a vapor deposition material film on an object by evaporating the vapor deposition material from the electron gun for electron beam vapor deposition toward the object in a vacuum chamber.
3A and 3B are a schematic configuration diagram of a conventional deposition apparatus and a schematic configuration diagram of a conventional electron gun for electron beam deposition. The vapor deposition apparatus shown in (a) includes a dome 2 provided in the upper part of the vacuum chamber 1, an electron gun (vapor deposition source) 3 disposed below the dome 2, and the like. On the lower surface of the dome 2, for example, a plurality of glass substrates 4 as vapor deposition objects are arranged, and vapor deposition materials such as refractory metals equipped on the electron gun 3 side are evaporated and adhered to the surfaces of the glass substrates 4. Film.
FIG. 3B is a perspective view showing the configuration of the electron gun. The electron gun 3 has an electron gun body 5 that emits an electron beam, and a crucible 8 that is attached to and detached from a plurality of crucible housing recesses 7 provided on the upper surface. A cylindrical hearth 6 that is freely supported, and a fixed lid 9 provided with an opening 9a that is disposed close to the upper surface of the hearth 6 and exposes only the crucible located near the electron gun body 5 are provided.
The electron gun body 5 is an electron beam generation source, and the vapor deposition material 10 (in the crucible 8 exposed from the opening 9a by deflecting the path of the electron beam output from the electron beam output unit 5a by a magnetic line from a magnetic pole (not shown). (See FIG. 3 (c)). When the electron beam collides with the vapor deposition material, the vapor deposition material is heated and evaporated. The vapor deposition material becomes a molecular or atomic vapor flow and adheres to the surface of the glass substrate 4 as a vapor deposition target to form a film.
When vapor deposition by the vapor deposition material in the crucible 8 exposed from the opening 9a is completed, the hearth 6 is rotated by a predetermined angle to expose a new crucible 8 from the opening 9a, and vapor deposition can be resumed. This crucible exchange operation can be performed without opening and closing the vacuum chamber.
[0003]
3 (c), the crucible 8 is detachably accommodated in the crucible housing recess 7, but the evaporation material 10 in the crucible 8 is irradiated by the electron beam from the electron gun body 5. After evaporating, as shown in (d), the residue 8a of the vapor deposition material 8 adheres to the periphery of the opening of the recess 7 and remains stuck. If the residue 8a is left unattended, the crucible 8 will not be satisfactorily seated in the recess 7, which will be an obstacle to irradiating the vapor deposition material 8 with the beam. For this reason, when the vacuum chamber 1 is opened after the vapor deposition is completed and the crucible is replaced, it is necessary to perform a complicated operation such as scraping the residue 8a with sandpaper and then cleaning with alcohol on all the concave portions 7. This is the cause of the decline in the operating rate.
Further, if a part of the scraped residue 8a becomes a minute particle of about 5 μm and adheres to the hearth 6 or the like, the residue of the residue will float together with the evaporation material that evaporates and rises, and the glass substrate 4 is evaporated. It becomes easy to adhere to the surface. If debris adheres to a part of the vapor deposition film on the vapor deposition surface of the glass substrate 4, the glass substrate not only becomes defective, but the glass substrate is bonded to another glass substrate without noticing the debris adhesion. Thus, when the composite element is produced, the waste particles become an obstacle and the two glass substrates cannot be bonded in parallel, and the entire composite element becomes a defective product.
In order to prevent such a problem in advance, it is an indispensable process not only to scrape the residue 8a adhering to the periphery of the opening of the recess 7 but also to carefully clean it so that no residue is left. It was. For this reason, the cleaning process after completion | finish of vapor deposition prolonged, and there existed a malfunction that the replacement | exchange of a crucible and the next vapor deposition operation could not be performed until the cleaning process was complete | finished. This has resulted in longer production times due to lower utilization rates.
[0004]
[Problems to be solved by the invention]
The problem to be solved by the present invention is an electron gun comprising an electron gun body that emits an electron beam, and a hearth that holds a plurality of crucibles containing a deposition material heated by the electron beam emitted from the electron gun. After the vapor deposition process using the vapor deposition material in all the crucibles on the hearth is completed, the complicated operation of the apparatus for removing the debris of the vapor deposition material adhering to the recess for housing the crucible in the hearth with the vacuum chamber opened An electron gun for electron beam vapor deposition, a vapor deposition material holding device, and a vapor deposition apparatus that can be replaced with a new crucible in a short time by a simple operation without resuming the rate and restarting the vapor deposition process It is to provide.
[0005]
[Means for Solving the Problems]
In order to solve the above-described problems, an electron gun for electron beam evaporation according to the present invention includes an electron gun body that emits an electron beam, and a plurality of crucibles that are disposed adjacent to the electron gun body and circumferentially on the upper end surface. A rotating cylindrical hearth with a recess, a fixed lid with an opening that exposes only one crucible storage recess of the plurality of crucible storage recesses on the upper end surface of the hearth, and each crucible storage In the electron gun comprising a crucible individually attached to and detached from the recess, the hearth is a cylindrical hearth having a plurality of crucible housing holes along the rotation direction on the upper end surface, the center axis being rotatably supported. A main body, and an annular disc-shaped split hearth that has communication holes that communicate with the respective crucible storage holes along the circumferential direction and is detachably fixed to the upper end surface of the hearth main body, Make the crucible storage hole and the communication hole communicate with each other. And wherein the attaching and detaching the said crucible in each crucible accommodating the recess formed by the.
Also, the deposition material holding apparatus according to the present invention, a crucible for accommodating a vapor deposition material, a hearth having a plurality of crucibles accommodating recess for accommodating the crucible along a circumferential direction on the upper end face, the evaporation material holding consisting The hearth is a cylindrical hearth main body having a plurality of crucible storage holes for rotatably supporting a central axis and storing the crucible along the circumferential direction on the upper end surface, and each crucible storage hole. Each of the crucible storage holes and the communication holes, each having a communication hole that communicates with the upper end surface of the hearth main body and is detachably fixed to the upper end surface of the hearth main body. The crucible is attached to and detached from each crucible housing recess formed by communicating with a hole.
In addition, a vapor deposition apparatus according to the present invention includes the vapor deposition material holding apparatus.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an electron gun for electron beam evaporation, an evaporation material holding device, and an evaporation apparatus according to an embodiment of the present invention will be described in detail.
FIG. 1 is a perspective view showing an external configuration of an electron gun for electron beam evaporation according to an embodiment of the present invention, and FIG. 2 is an exploded perspective view. This electron gun is disposed at the lower part of the vacuum chamber 1 as shown in FIG. 3A, and is a means for depositing a deposition material on a deposition target disposed on the lower surface of the dome 2.
The electron gun 21 of the present invention includes an electron gun body 25 that emits an electron beam, and a rotating cylinder that is disposed adjacent to the electron gun body 25 and includes a plurality of crucible housing recesses 27 along the circumferential direction on the upper end surface 26a. A fixed lid 28 having an opening 28a that exposes only one crucible housing recess 27 of the plurality of crucible housing recesses 27 on the upper end surface 26a of the hearth, and each crucible housing recess 27 And a crucible 29 individually attached and detached.
The electron gun body 25 includes an electromagnet 31, a filament 32, and the like, and an electron beam is output from the filament 32 when the electromagnet 31 is excited. The path of the electron beam is bent by magnetic lines from a magnetic pole (not shown), and is irradiated toward the vapor deposition material 30 in the crucible 29 in the crucible housing recess 27 exposed from the opening 28 a of the fixed lid 28. The vapor deposition material 30 that has been irradiated with the electron beam is heated at a high temperature to evaporate the molecular or atomic vapor deposition material.
The hearth 26 has a cylindrical hearth main body 35 having a plurality of crucible storage holes 36 supported on the upper end surface 26a in the rotation direction and a communication hole communicating with each crucible storage hole 36. An annular disc-shaped split hearth 37 having 38 along the circumferential direction and detachably fixed to the hearth main body upper end surface 26a, and a motor (not shown) for rotating the hearth main body 35 are provided. . By connecting and fixing the communication hole 38 to the crucible storage hole 36, the crucible storage recess 27 is formed.
The crucible 29 for storing the vapor deposition material and the hearth 26 provided with at least one or a plurality of crucible storage recesses 27 for storing the crucible on the upper end face constitute a vapor deposition material holding device.
[0007]
In the embodiment shown in FIG. 2 (a), the hearth body 35 has a cylindrical projection 40 at the center of the upper surface thereof, and is provided with crucible housing holes 36 at a predetermined circumferential pitch in the outer diameter direction. . The split hearth 37 has a fitting hole 41 that fits into the protrusion 40 at the center, and further, a communication hole 38 that communicates with each crucible housing hole 36 in one-to-one correspondence on the outer periphery of the fitting hole 41. It is formed through. The split hearth 37 is fixed to the upper surface of the hearth main body 35 with, for example, a screw (not shown).
FIG. 2B is a cross-sectional view of the main part of the hearth 26, and the crucible storage recess 27 is formed by connecting and fixing the communication hole 38 to the crucible storage hole 36. A crucible 29 is detachably fitted in the crucible housing recess 27.
The fixed lid 28 is disposed close to the upper surface of the divided hearth 37 in a state in which it cannot rotate by a fixing member (not shown). Since the crucible other than the crucible exposed from the opening 28a is concealed by the fixed lid 28, the accommodated vapor deposition material is not irradiated with an electron beam. The fixed lid 28 is assembled so as to be detachable from the upper surface of the hearth.
In the above configuration, the crucible 29 containing the vapor deposition material is fitted in all the required crucible housing recesses 27, the vacuum chamber is closed and the inside is evacuated, and then the electron gun The main body 25 is operated to heat and evaporate the vapor deposition material in the crucible 29 exposed from the opening 28a. The crucible in which the vapor deposition material has been consumed is concealed by moving from the inside of the opening 28a to the lower surface of the fixed lid 28 by the rotation of the hearth body 26, and at the same time, a new crucible 29 is exposed from the opening 28a and accommodated therein. The material is subjected to vapor deposition. Such operations are sequentially repeated to complete a series of vapor deposition steps. When it becomes necessary to replace all the crucibles with new ones, the vacuum chamber is opened and each crucible 29 is removed from the recess 27. Later, the fixed lid 28 is removed, and the split hearth 37 is removed from the upper surface of the hearth main body 35. In the hearth of the present invention, the residue adhering to the hearth described in the description of the prior art adheres exclusively to a portion along the inner peripheral edge (particularly, the tapered portion 38a) of the communication hole 38 of the split hearth 27. It does not adhere in the crucible housing hole 36 that is concealed by. Accordingly, if even the divided hearth 37 to which the residue is attached is removed from the hearth main body 35 and individually cleaned, the next vapor deposition step is performed by attaching the cleaned divided hearth 37 on the hearth main body 35 without waiting for the completion of cleaning. Can be implemented. Accordingly, if a plurality of split hearths 37 are prepared, the vapor deposition process can be resumed by fixing another split hearth to the hearth main body 35 while removing and cleaning the split hearth to which the residue has adhered. Increases productivity and productivity.
[0008]
In addition, about the division | segmentation hearth 37, since this can be immersed in the water tank of an ultrasonic cleaner and can be washed in a circle, removal of residue and prevention of residue can be realized easily and the product yield is reduced due to residue residue. Can be prevented.
As described above, in the electron gun for electron beam evaporation according to the present invention, the hearth supporting the crucible containing the evaporation material that is irradiated with the electron beam from the electron gun body can be attached to and detached from the hearth body and the upper surface of the hearth body. The crucible storage recess is formed by connecting the crucible storage hole on the upper surface of the hearth main body and the communication hole of the split hearth. And when a series of vapor deposition processes were completed and the crucible was replaced, a new crucible could be mounted by removing the split hearth from the hearth main body and replacing the split hearth. For this reason, it is not necessary to remove and clean the residue adhering to the hearth in the vacuum chamber, the crucible replacement operation is completed in a short time, and the operating rate of the apparatus can be increased. In addition, since the detached divided hearth can be easily and completely cleaned outside the vacuum chamber using a cleaning device or the like, it is possible to eliminate the problem that the remaining residue adheres to the deposition target and lowers the product yield.
[0009]
【The invention's effect】
As described above, according to the present invention, in an electron gun comprising an electron gun body that emits an electron beam, and a hearth that holds a plurality of crucibles containing a deposition material heated by the electron beam emitted from the electron gun After the vapor deposition process using the vapor deposition material in all the crucibles on the hearth is completed, the complicated operation of the apparatus for removing the debris of the vapor deposition material adhering to the recess for housing the crucible in the hearth with the vacuum chamber opened It is possible to provide an electron gun for electron beam vapor deposition that enables the vapor deposition process to be restarted by exchanging the crucible with a new crucible in a short time without performing the work of reducing the rate.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an external configuration of an electron gun for electron beam evaporation according to an embodiment of the present invention.
2A is an exploded perspective view of a hearth according to the present invention, and FIG.
3A is a schematic configuration diagram of a conventional vapor deposition apparatus, FIG. 3B is a configuration diagram of a conventional electron gun, FIG. 3C is a configuration diagram of a crucible housing recess, and FIG. FIG.
[Explanation of symbols]
1 vacuum chamber, 2 dome, 21 electron gun, 25 electron gun body, 26 hearth,
26a upper end surface, 27 recess for crucible storage, 28 fixed lid, 28a opening,
29 crucible, 31 electromagnet, 32 filament, 35 hearth body, 36 crucible storage hole, 37 split hearth, 38 communication hole, 40 protrusion, 41 fitting hole.

Claims (3)

An electron gun main body that emits an electron beam; a rotating cylindrical hearth that is disposed adjacent to the electron gun main body and includes a plurality of crucible housing recesses along a circumferential direction on the upper end surface; In an electron gun comprising a fixed lid provided with an opening that exposes only one of the crucible storage recesses, and a crucible that is individually attached to and detached from each of the crucible storage recesses,
The hearth has a cylindrical hearth main body having a plurality of crucible housing holes along the rotation direction on the upper end surface thereof, the center shaft being rotatably supported, and a communication hole communicating with each crucible housing hole in the circumferential direction. An annular disc-shaped split hearth that is detachably fixed to the upper end surface of the hearth main body,
An electron gun for electron beam evaporation, wherein the crucible is attached to and detached from each crucible housing recess formed by communicating each crucible housing hole and the communication hole. A vapor deposition material holding device comprising: a crucible for accommodating a vapor deposition material; and a hearth provided with a plurality of crucible storage recesses for accommodating the crucible along the circumferential direction on an upper end surface,
The hearth has a cylindrical hearth main body having a plurality of crucible storage holes that are rotatably supported at the center axis and store the crucible along the circumferential direction on the upper end surface thereof, and communication that communicates with the crucible storage holes, respectively. An annular disc-shaped split hearth that has a hole along the circumferential direction and is detachably fixed to the upper end surface of the hearth main body,
The vapor deposition material holding apparatus, wherein the crucible is attached to and detached from the crucible housing recess formed by communicating the crucible storage holes and the communication holes. A vapor deposition apparatus comprising the vapor deposition material holding device according to claim 2 .

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