CN115313910A - Asymmetric mass type piezoelectric inertia driver - Google Patents
Asymmetric mass type piezoelectric inertia driver Download PDFInfo
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- CN115313910A CN115313910A CN202210984720.0A CN202210984720A CN115313910A CN 115313910 A CN115313910 A CN 115313910A CN 202210984720 A CN202210984720 A CN 202210984720A CN 115313910 A CN115313910 A CN 115313910A
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- 230000009471 action Effects 0.000 claims abstract description 20
- 230000033001 locomotion Effects 0.000 claims abstract description 12
- 230000003068 static effect Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 abstract description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 229910052790 beryllium Inorganic materials 0.000 description 4
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 229910000906 Bronze Inorganic materials 0.000 description 3
- 239000010974 bronze Substances 0.000 description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 3
- 230000026058 directional locomotion Effects 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
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- 230000009286 beneficial effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to an asymmetric mass type piezoelectric inertia driver, and belongs to the technical field of piezoelectric precision driving. The motion body is sequentially provided with a mass block, a piezoelectric bimorph, a small clamping block, a large clamping block, a stepped shaft and an additional mass hollow shaft block from left to right; the outer surface of the small shaft of the stepped shaft adopts an anisotropic friction surface; when the piezoelectric bimorph works, the piezoelectric bimorph generates driving forces with the same magnitude under the excitation of the symmetrical square waves, the mass of a moving body is smaller than that of the moving body in the right half period when the driving device moves to the left in the first half period under the action of the anisotropic friction surface, and the mass of the moving body in one period is asymmetric, so that the directional driving of the driving device is realized.
Description
Technical Field
The invention belongs to the technical field of piezoelectric precision driving, and particularly relates to an asymmetric mass type piezoelectric inertia driver.
Background
In recent years, the demand for precision positioning technology in the application fields of precision measurement, ultra-precision machining, modern medical treatment and the like is increasing day by day, and the research and development of precision drivers are greatly promoted. The piezoelectric precise driver has the remarkable advantages of large stroke, high precision, quick response, high load output, no electromagnetic interference and the like, and meets the requirements of the fields on the precise positioning technology to a great extent. According to different working principles and functions, piezoelectric precise drivers can be divided into direct-acting drivers, inchworm-type drivers, ultrasonic-type drivers and inertial-type drivers.
The inertial type driver has the working principle that the directional motion is realized through the synergistic effect of the inertial force and the friction force, has the characteristics of simple structure, quick frequency response, miniaturization and the like, and becomes one of domestic and foreign research hotspots. The currently developed inertial type actuator can be divided into an asymmetric signal control type, an asymmetric mechanical clamping control type and an asymmetric friction control type according to different control modes.
The asymmetric signal control type driver generally utilizes an asymmetric excitation signal to generate an asymmetric driving force to realize directional driving, but the driver needs to establish a complex signal control system, which is not beneficial to the miniaturization and integration of the driver; the asymmetric mechanical clamping control type realizes the directional driving by designing an asymmetric mechanical clamping structure to match with a symmetric excitation signal to generate an asymmetric driving force, and although the requirements of a signal control system are greatly reduced, the drivers have the problems of serious backspacing phenomenon and nonadjustable friction force; the asymmetric friction control type driver adopts a symmetric excitation signal and a symmetric mechanical clamping structure, realizes directional driving through the asymmetry of friction force in the forward and backward movement direction, has high requirements on a friction contact surface, and can seriously affect the reliability, the stability and the service life of the driver due to the problem of friction and wear caused by long-time work.
Disclosure of Invention
The invention provides an asymmetric mass type piezoelectric inertia driver, which adopts the following implementation scheme: mainly comprises a motion body, a hollow shaft, an additional mass block and a base.
The motion body is provided with a mass block, a piezoelectric bimorph, a small clamping block, a large clamping block and a stepped shaft from left to right in sequence; the mass block is fixedly arranged at the free end of the piezoelectric bimorph; the piezoelectric bimorph is formed by bonding a beryllium bronze substrate and piezoelectric patches, and the piezoelectric patches are positioned on the left side and the right side of the beryllium bronze substrate; the fixed end of the piezoelectric bimorph is symmetrically clamped by a small clamping block and a large clamping block; the cross shaft of the large clamping block is in interference fit with the inner hole of the stepped shaft; the large shaft of the stepped shaft is in transition fit with the inner hole of the hollow shaft, and the small shaft of the stepped shaft is in transition fit with the inner hole of the additional mass hollow shaft block; the friction coefficient of the outer surface of the large shaft, the inner hole surfaces of the hollow shaft and the additional mass hollow shaft block is 0.1; the outer surface of the small shaft adopts an anisotropic friction surface (as shown in figure 5), 5 thorns are uniformly distributed on the outer surface of the small shaft, each thorn is formed by arranging a single pentahedron, the height of each pentahedron is 0.1mm, the included angle between the inclined surface and the symmetrical central plane of each pentahedron is 30 degrees, the included angle between a left inclined line and a horizontal line on the symmetrical central plane is 30 degrees, the included angle between a right inclined line and the horizontal line is 60 degrees, and the distance between every two adjacent pentahedrons is 0.2mm; under the action of anisotropic friction surface, when there is relative motion between the small shaft and the additional mass hollow shaft block, the friction coefficient is 0.2 when the small shaft moves to the left and 0.4 when the small shaft moves to the right, so the friction force f when the small shaft moves to the left 1 Less than the friction force f on movement to the right 2 I.e. friction is directionally dependent; the hollow shaft is fixedly arranged on the base.
In the working process, the hollow shaft is relatively static under the fixing action of the base; when the piezoelectric bimorph bends and deforms to the right/left, the large clamping block and the ladder move to the left/right under the inertia effect; when the moving body moves leftwards, because the friction has direction dependency, the additional mass hollow shaft block does not move along with the small shaft of the stepped shaft under the action of the friction force and is relatively static, and at the moment, the mass m of the moving body 1 Is the sum of the masses of the moving bodies; when the moving body moves to the right, the additional mass hollow shaft block is under the friction force f 2 Moves rightwards along with the small shaft of the stepped shaft under the action of the elastic force, and at the moment, the mass m of the moving body 2 Is a moving body and an additional massMeasuring the total mass of the hollow shaft block; the mass of the additional mass hollow shaft block is m, and the mass relation between the additional mass hollow shaft block and the additional mass hollow shaft block is m 1 ≈ m 2 -m。
In the invention, the piezoelectric bimorph is clamped in a symmetrical clamping mode, and the left/right driving forces generated when the piezoelectric bimorph bends and deforms to the right/left are equal; mass m of the moving body when the drive is moved to the left by the anisotropic friction surface 1 Less than the mass m of the moving body when the driver is moving to the right 2 。
The working mode is as follows: fig. 6 is a schematic diagram of the operation of an asymmetric mass piezoelectric inertial driver according to the present invention, and the driving process is performed according to the following steps.
Step 1: t = t 1 At this time, the moving body of the driver is in an initial state.
And 2, step: t = t 1 -t 2 When the piezoelectric bimorph rapidly deforms in the right direction to generate a driving force in the left direction, and under the action of anisotropic friction, the friction force between the small shaft and the additional mass hollow shaft block is f 1 The additional mass hollow shaft block is static, and the small clamping block, the large clamping block, the piezoelectric bimorph, the mass block and the stepped shaft move leftwards togetherx 1 At this time, the mass m of the moving body 1 The mass sum of the small clamping block, the large clamping block, the piezoelectric bimorph, the mass block and the stepped shaft is obtained.
And 3, step 3: t = t 2 -t 3 When the piezoelectric bimorph rapidly deforms in the left direction to generate a driving force in the right direction, and under the action of anisotropic friction, the friction force between the small shaft and the additional mass hollow shaft block is f 2 The additional mass hollow shaft block, the small clamping block, the large clamping block, the piezoelectric bimorph, the mass block and the stepped shaft move rightwards togetherx 2 At this time, the mass m of the moving body 2 The mass sum of the additional mass hollow shaft block, the small clamping block, the large clamping block, the piezoelectric bimorph, the mass block and the stepped shaft is obtained.
Finally, the driver will move a Δ to the left under excitation by a periodic symmetric square wave signalx(△x = x 1 -x 2 )。
In the invention, the symmetric square wave excitation signal is used as a driving source of the driver, the driver realizes mass asymmetry of the motion body in the first half period and the second half period under the action of the anisotropic friction surface, and further, the driver realizes directional motion under the action of the asymmetric mass.
Advantages and features: the asymmetric mass type piezoelectric inertia driver provided by the invention adopts a symmetric square wave excitation signal acting on a symmetric mechanical clamping piezoelectric vibrator as a driving source of the piezoelectric driver, the piezoelectric vibrator generates driving forces with the same size and opposite directions to match the asymmetric mass to realize directional driving, and the asymmetric mass type piezoelectric inertia driver has the advantages of simple structure and driving signals, good stability, reliable motion process and no electromagnetic interference.
Drawings
Fig. 1 is a schematic structural diagram of a piezoelectric inertial driver with asymmetric mass according to the present invention.
Fig. 2 is a schematic structural diagram of a moving body with an asymmetric mass type piezoelectric inertia driver provided by the invention.
Fig. 3 is a cross-sectional view of an asymmetric mass piezoelectric inertial drive in accordance with a preferred embodiment of the invention.
Fig. 4 isbase:Sub>A sectional viewbase:Sub>A-base:Sub>A of fig. 3.
Fig. 5 is a schematic diagram of the friction surface of the asymmetric mass piezoelectric inertial drive proposed by the present invention.
Fig. 6 is a schematic diagram of the operation of the piezoelectric inertia driver with asymmetric mass according to the present invention.
Detailed Description
The present embodiment will be described in detail with reference to fig. 1 and 2, and the asymmetric mass type piezoelectric inertia driver according to the present embodiment is mainly composed of a moving body 1, a hollow shaft 2, an additional mass hollow shaft block 3, and a base 4.
The moving body 1 is sequentially provided with a mass block 1-4, a piezoelectric bimorph 1-3, a small clamping block 1-2, a large clamping block 1-1 and a stepped shaft 1-5 from left to right; the mass block 1-4 is fixedly arranged at the free end of the piezoelectric bimorph 1-3; the piezoelectric bimorph 1-3 is made of beryllium bronzeThe base plate 1-3-1 and the piezoelectric patches 1-3-2 are bonded, and the piezoelectric patches 1-3-2 are positioned on the left side and the right side of the beryllium bronze base plate 1-3-1; the fixed end of the piezoelectric bimorph 1-3 is symmetrically clamped by the small clamping block 1-2 and the large clamping block 1-1; the transverse shaft 1-1-1 of the large clamping block 1-1 is in interference fit with the inner hole 1-5-1 of the stepped shaft 1-5; the large shaft 1-5-2 of the stepped shaft 1-5 is in transition fit with the inner hole of the hollow shaft 2, and the small shaft 1-5-3 of the stepped shaft 1-5 is in transition fit with the inner hole of the additional mass hollow shaft block 3; the friction coefficient of the outer surface of the large shaft 1-5-2, the inner hole surfaces of the hollow shaft 2 and the additional mass hollow shaft block 3 is 0.1; the outer surface of the small shaft 1-5-3 adopts an anisotropic friction surface (as shown in figure 5), 5 thorns are uniformly distributed on the outer surface of the small shaft 1-5-3, each thorn is formed by arranging a single pentahedron a, the height H of the pentahedron a is 0.1mm, and the included angle between the inclined surface a2 and the symmetrical central surface a1 of the pentahedron aθIs 30 degrees, and the included angle between a left inclined line b1 on a symmetrical central plane a1 and a horizontal line b3αIs 30 DEG, and the angle between the right oblique line b2 and the horizontal line b3βIs 60 degrees, the distance L between two adjacent pentahedrons a is 0.2mm; under the action of the anisotropic friction surface, when the small shaft 1-5-3 and the additional mass hollow shaft block 3 move relatively, the friction coefficient is 0.2 when the small shaft 1-5-3 moves leftwards, and the friction coefficient is 0.4 when the small shaft 1-5-3 moves rightwards, so that the friction force f when the small shaft 1-5-3 moves leftwards 1 Less than the friction force f during rightward movement 2 I.e. friction is directionally dependent; the hollow shaft 2 is fixedly arranged on the base 4.
In the working process, the hollow shaft 2 is relatively static under the fixing action of the base 4; when the piezoelectric bimorph 1-3 bends and deforms to the right/left, the large clamping block 1-1 and the stepped shaft 1-5 move to the left/right under the inertia effect; when the moving body 1 moves to the left, the additional mass hollow shaft block 3 has a direction dependency due to friction at a friction force f 1 Does not move along with the small shaft 1-5-3 of the stepped shaft 1-5 under the action of the elastic element, and is relatively static, at the moment, the mass m of the moving body 1 Is the sum of the masses of the moving body 1; when the moving body 1 moves to the right, the additional mass hollow shaft block 3 is under the friction force f 2 Moves rightwards along with the small shaft 1-5-3 of the stepped shaft 1-5 under the action of the elastic force, and at the moment, the mass m of the moving body 2 Is a moving body 1 and an additional mass hollow shaft block3, sum of masses; the mass of the additional mass hollow shaft block 3 is m; the mass relationship between them is m 1 ≈m 2 -m。
In the invention, the piezoelectric bimorphs 1-3 are clamped in a symmetrical clamping mode, and the left/right driving forces generated when the piezoelectric bimorphs 1-3 bend and deform rightwards/leftwards are equal in magnitude; mass m of the moving body when the drive is moved to the left by the anisotropic friction surface 1 Less than the mass m of the moving body when the driver is moving to the right 2 。
The working mode is as follows: fig. 6 is a schematic diagram of an asymmetric mass piezoelectric inertial drive according to the present invention, and the driving process is performed according to the following steps.
Step 1: t = t 1 At this time, the moving body of the driver is in an initial state.
Step 2: t = t 1 -t 2 When the piezoelectric bimorph 1-3 is rapidly deformed towards the right direction to generate a driving force towards the left direction, and under the action of anisotropic friction, the friction force between the small shaft 1-5-3 and the additional mass hollow shaft block 3 is f 1 The additional mass hollow shaft block 3 is static, the small clamping block 1-2, the large clamping block 1-1, the piezoelectric bimorph 1-3, the mass block 1-4 and the stepped shaft 1-5 move leftwards togetherx 1 At this time, the mass m of the moving body 1 The mass sum of the small clamping block 1-2, the large clamping block 1-1, the piezoelectric bimorph 1-3, the mass block 1-4 and the stepped shaft 1-5 is shown.
And 3, step 3: t = t 2 -t 3 When in use, the piezoelectric bimorph 1-3 is rapidly deformed in the left direction to generate a driving force in the right direction, and the friction force between the small shaft 1-5-3 and the hollow shaft block 3 with the additional mass is f under the action of anisotropic friction 2 The additional mass hollow shaft block 3, the small clamping block 1-2, the large clamping block 1-1, the piezoelectric bimorph 1-3, the mass block 1-4 and the stepped shaft 1-5 move rightwards togetherx 2 At this time, the mass m of the moving body 2 The mass sum of the additional mass hollow shaft block 3, the small clamping block 1-2, the large clamping block 1-1, the piezoelectric bimorph 1-3, the mass block 1-4 and the stepped shaft 1-5 is shown.
Finally, in a periodic symmetrical square waveThe driver will move to the left by delta under the excitation of the signalx(△x = x 1 - x 2 )。
In the invention, the symmetric square wave excitation signal is used as a driving source of the driver, the driver realizes mass asymmetry of the motion body in the first half period and the second half period under the action of the anisotropic friction surface, and further, the driver realizes directional motion under the action of the asymmetric mass.
Claims (1)
1. An asymmetric mass type piezoelectric inertia driver mainly comprises a motion body, a hollow shaft, an additional mass hollow shaft block and a base; the method is characterized in that: applying a symmetrical square wave signal to the piezoelectric bimorph to control the piezoelectric bimorph to bend and deform rightwards/leftwards, wherein the left/right driving forces generated during bending and deformation of the piezoelectric bimorph are equal under the action of symmetrical clamping; when the piezoelectric bimorph is rapidly bent and deformed in the right direction to generate a driving force in the left direction, the additional mass hollow shaft block is relatively static under the action of anisotropic friction, and the moving body moves leftwardsx 1 At this time, the mass m of the moving body 1 Is the sum of the masses of the moving bodies; when the piezoelectric bimorph is rapidly bent and deformed in the left direction to generate a driving force in the right direction, the additional mass hollow shaft block and the moving body move rightwards together under the action of anisotropic frictionx 2 At this time, the mass m of the moving body 2 Is the sum of the masses of the additional mass hollow shaft block and the moving body; because of the mass m of the moving body when moving to the left 1 Less than mass m of moving body in rightward movement 2 Therefore, it isx 1 >x 2 Finally, the driver will move to the left by Δx(△x = x 1 - x 2 )。
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210984720.0A CN115313910A (en) | 2022-08-17 | 2022-08-17 | Asymmetric mass type piezoelectric inertia driver |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210984720.0A CN115313910A (en) | 2022-08-17 | 2022-08-17 | Asymmetric mass type piezoelectric inertia driver |
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| CN115313910A true CN115313910A (en) | 2022-11-08 |
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| CN202210984720.0A Pending CN115313910A (en) | 2022-08-17 | 2022-08-17 | Asymmetric mass type piezoelectric inertia driver |
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