CN115265510B - 传感器及电子装置 - Google Patents

传感器及电子装置

Info

Publication number
CN115265510B
CN115265510B CN202210137012.3A CN202210137012A CN115265510B CN 115265510 B CN115265510 B CN 115265510B CN 202210137012 A CN202210137012 A CN 202210137012A CN 115265510 B CN115265510 B CN 115265510B
Authority
CN
China
Prior art keywords
movable member
movable
component
resonance frequency
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202210137012.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN115265510A (zh
Inventor
宫崎史登
富泽泰
丸藤龙之介
平贺广贵
增西桂
加治志织
小野大骑
小川悦治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of CN115265510A publication Critical patent/CN115265510A/zh
Application granted granted Critical
Publication of CN115265510B publication Critical patent/CN115265510B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
CN202210137012.3A 2021-04-13 2022-02-15 传感器及电子装置 Active CN115265510B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-067538 2021-04-13
JP2021067538A JP7441195B2 (ja) 2021-04-13 2021-04-13 センサ及び電子装置

Publications (2)

Publication Number Publication Date
CN115265510A CN115265510A (zh) 2022-11-01
CN115265510B true CN115265510B (zh) 2025-12-02

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210137012.3A Active CN115265510B (zh) 2021-04-13 2022-02-15 传感器及电子装置

Country Status (4)

Country Link
US (1) US11796319B2 (enExample)
EP (1) EP4075096B1 (enExample)
JP (1) JP7441195B2 (enExample)
CN (1) CN115265510B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7620533B2 (ja) 2021-10-21 2025-01-23 株式会社東芝 位相同期回路及びセンシング装置
JP7596252B2 (ja) 2021-11-17 2024-12-09 株式会社東芝 センサ及び電子装置
JP7746236B2 (ja) 2022-08-16 2025-09-30 株式会社東芝 センサ及び電子装置
JP2024122295A (ja) * 2023-02-28 2024-09-09 株式会社東芝 センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111947637A (zh) * 2019-05-15 2020-11-17 株式会社东芝 传感器

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JP2888029B2 (ja) * 1992-05-08 1999-05-10 株式会社村田製作所 角速度センサ
JPH08159776A (ja) * 1994-12-08 1996-06-21 Nissan Motor Co Ltd 角速度センサ
US7316161B2 (en) * 2002-01-12 2008-01-08 Robert Bosch Gmbh Rotation rate sensor
JP4310325B2 (ja) * 2006-05-24 2009-08-05 日立金属株式会社 角速度センサ
JP4961877B2 (ja) * 2006-07-27 2012-06-27 セイコーエプソン株式会社 角速度・加速度検出センサ
JP5012085B2 (ja) * 2007-02-23 2012-08-29 株式会社ニコン ブレ補正装置及び光学装置
FR2925669B1 (fr) * 2007-12-21 2010-01-15 Sagem Defense Securite Mesure par systeme gyroscopique
US9417067B1 (en) * 2012-01-11 2016-08-16 The Boeing Company Electronic bias compensation for a gyroscope
JP6176001B2 (ja) * 2012-11-29 2017-08-09 株式会社デンソー ジャイロセンサ
JP6278604B2 (ja) 2013-03-14 2018-02-14 三菱プレシジョン株式会社 バイアス補正機能を備えた振動型ジャイロ
JP6211463B2 (ja) * 2014-05-23 2017-10-11 日立オートモティブシステムズ株式会社 慣性センサ
CN104820113B (zh) * 2015-04-30 2018-02-02 东南大学 一种集成温度敏感单元的石英双梁力频谐振器
US10466068B2 (en) * 2017-01-23 2019-11-05 Georgia Tech Research Corporation Systems and methods for operation of vibratory gyroscopes
US10520331B2 (en) * 2017-02-27 2019-12-31 The Charles Stark Draper Laboratory, Inc. Calibration system and method for whole angle gyroscope
JP6802125B2 (ja) * 2017-08-24 2020-12-16 株式会社豊田中央研究所 振動ジャイロ
JP2019045405A (ja) * 2017-09-06 2019-03-22 セイコーエプソン株式会社 電子デバイス、電子機器および移動体
JP7196739B2 (ja) 2019-04-04 2022-12-27 マツダ株式会社 エンジンの燃焼制御装置
JP7134931B2 (ja) * 2019-08-28 2022-09-12 株式会社東芝 センサ
JP2021192012A (ja) * 2020-06-05 2021-12-16 株式会社東芝 センサ及び電子装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111947637A (zh) * 2019-05-15 2020-11-17 株式会社东芝 传感器

Also Published As

Publication number Publication date
EP4075096A1 (en) 2022-10-19
US20220326013A1 (en) 2022-10-13
JP7441195B2 (ja) 2024-02-29
EP4075096B1 (en) 2024-04-10
US11796319B2 (en) 2023-10-24
JP2022162641A (ja) 2022-10-25
CN115265510A (zh) 2022-11-01

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