CN115220254B - 一种反应离子刻蚀处理取向层控制液晶分子预倾角方法 - Google Patents
一种反应离子刻蚀处理取向层控制液晶分子预倾角方法 Download PDFInfo
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Abstract
本发明涉及液晶显示器件制备技术领域，尤其是一种反应离子刻蚀处理取向层控制液晶分子预倾角方法，将垂直取向的聚合物溶液旋涂在携带氧化铟锡薄膜的玻璃基板上，高温固化一定时间成取向膜，将制备的样品进行摩擦处理放在反应离子刻蚀设备中，对垂直取向层进行表面改性，对改性后的样品用紫外固化胶进行光固化贴合制成液晶盒，液晶盒内灌入液晶一制成液晶器件，将液晶二与黑色染料按一定比例混合再次灌入液晶盒制成宾主液晶器件。本发明直接对取向层表面改性，可以改变其润湿性，润湿性改变液晶分子的取向，通过表面改性处理，使受处理的取向层组成的液晶器件实现多种显示模式，同时选择性的刻蚀取向层，实现图案化液晶器件的形成。
Description
技术领域
本发明涉及液晶显示器件制备技术领域，尤其涉及一种反应离子刻蚀处理取向层控制液晶分子预倾角方法。
背景技术
液晶显示器件生产过程中，液晶分子的取向技术关系到液晶响应速度和显示品质。传统的液晶取向技术在于摩擦取向层使取向层表面的液晶分子长轴方向与取向层之间产生预倾角，预倾角的选择直接影响到显示的均匀性及器件的电光特性。在液晶显示器中不做预倾处理，液晶分子在基板表面随机取向，造成各个区域折射率不同，影响显示质量。摩擦取向技术在液晶显示领域使用最为广泛的取向技术；有机高分子材料作为取向层材料随液晶变化小、具有优异的加工性能适用工业化生产。聚酰亚胺作为最常见的取向材料，其本身具有使液晶分子取向的功能外，成本低、适应性好、生产工艺简单。通过在聚酰亚胺取向层进行摩擦处理诱导液晶分子向摩擦方向取向；但摩擦取向产生的预倾角范围很小，无法满足一些特殊器件的预倾角要求。所以，找到一种实现宽范围预倾角的方法，有助于适应多种液晶显示模式，实现良好的光电性能，降低生产成本。为此，我们提出一种反应离子刻蚀处理取向层控制液晶分子预倾角方法。
发明内容
本发明的目的是为了解决现有技术中存在的缺点，而提出的一种反应离子刻蚀处理取向层控制液晶分子预倾角方法。
为了实现上述目的，本发明采用了如下技术方案：
设计一种反应离子刻蚀处理取向层控制液晶分子预倾角方法，包括以下步骤：
步骤S1：将垂直取向的聚合物溶液旋涂在携带氧化铟锡薄膜的玻璃基板上，高温固化一定时间成取向膜；
步骤S2：将步骤S1制备的样品进行摩擦处理放在反应离子刻蚀设备中，对垂直取向层进行表面改性,反应离子刻蚀能够改变取向层的表面形貌影响取向层的润湿性，从而控制液晶分子预倾角，对改性后的样品用紫外固化胶进行光固化贴合制成液晶盒；
步骤S3：液晶盒内灌入液晶一制成液晶器件；将液晶二与黑色染料按一定比例混合再次灌入液晶盒制成宾主液晶器件。
进一步优选的，所述的聚合物溶液为聚酰亚胺溶液。
进一步优选的，在步骤S1中，旋涂的速度为1500-2500rpm，且旋涂的时间为1-3min。
进一步优选的，在步骤S1中，高温固化的温度为180-220℃，高温固化的时间为100-140min。
进一步优选的，在步骤S2中，所述的反应离子刻蚀设备的运行参数为5W，并在5W的条件下处理1-10s。
进一步优选的，在步骤S3中，所述的液晶二与黑色染料的质量比为(95-100)：(1-5)。
进一步优选的，在步骤S2中，所述的光固化对应的光波长为365nm光强为70-90mW/cm2，时间为15-25min。
进一步优选的，所述的紫外固化胶具体为紫外固化胶NOA65。
进一步优选的，所述的液晶器件内的液晶为液晶E7。
进一步优选的，所述的宾主液晶器件内的液晶为液晶DP002-113。
进一步优选的，所述的液晶器件和宾主液晶器件厚度为5μm。
本发明提出的一种反应离子刻蚀处理取向层控制液晶分子预倾角方法，有益效果在于：
1、本发明直接对取向层表面改性，可以改变其润湿性，润湿性改变液晶分子的取向；
2、本发明通过表面改性处理，使受处理的取向层组成的液晶器件实现多种显示模式。
3、该发明利用表面改性的优点，选择性的刻蚀取向层，实现图案化液晶器件的形成。
附图说明
图1为垂直取向层刻蚀处理前后为基板制成的液晶器件在偏光显微镜下的图像。
图2为从左往右依次为刻蚀时间1-4s、5-7s、8-10s的取向层表面形貌。
图3为宾主液晶器件加电工作原理示意图。
图4为本发明的染料掺杂胆甾相液晶透过率-电压图一。
图5为本发明的染料掺杂胆甾相液晶透过率-电压图二。
图6为图案化宾主液晶器件原理示意图。
图7为图案化宾主液晶器件加电前后效果图
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。
实施例1
参照图1-5，一种反应离子刻蚀处理取向层控制液晶分子预倾角方法，包括以下步骤：
步骤S1：将垂直取向的聚酰亚胺溶液旋涂在携带氧化铟锡薄膜的玻璃基板上,旋涂的速度为1500rpm，且旋涂的时间为1min，然后在180℃的条件下高温固化成取向膜，且高温固化的时间为100min；
步骤S2：将步骤S1制备的样品进行摩擦处理放在反应离子刻蚀设备中，并在5W的条件下处理1-4s对垂直取向层进行表面改性，对改性后的样品用紫外固化胶NOA65进行光固化贴合制成液晶盒，且光固化对应的光波长为365nm光强为70mW/cm2，时间为15min；
步骤S3：液晶盒内灌入液晶一制成液晶器件；将液晶二与黑色染料按质量比为99：1进行混合再次灌入液晶盒制成宾主液晶器件。
实施例2
参照图1-5，一种反应离子刻蚀处理取向层控制液晶分子预倾角方法，包括以下步骤：
步骤S1：将垂直取向的聚酰亚胺溶液旋涂在携带氧化铟锡薄膜的玻璃基板上,旋涂的速度为2000rpm，且旋涂的时间为2min，然后在200℃的条件下高温固化成取向膜，且高温固化的时间为120min；
步骤S2：将步骤S1制备的样品进行摩擦处理放在反应离子刻蚀设备中，并在5W的条件下处理5-7s对垂直取向层进行表面改性，对改性后的样品用紫外固化胶NOA65进行光固化贴合制成液晶盒，且光固化对应的光波长为365nm光强为80mW/cm2，时间为20min；
步骤S3：液晶盒内灌入液晶一制成液晶器件；将液晶二与黑色染料按质量比为98.5:1.5进行混合再次灌入液晶盒制成宾主液晶器件。
实施例3
参照图1-5，一种反应离子刻蚀处理取向层控制液晶分子预倾角方法，包括以下步骤：
步骤S1：将垂直取向的聚酰亚胺溶液旋涂在携带氧化铟锡薄膜的玻璃基板上,旋涂的速度为2500rpm，且旋涂的时间为3min，然后在220℃的条件下高温固化成取向膜，且高温固化的时间为140min；
步骤S2：将步骤S1制备的样品进行摩擦处理放在反应离子刻蚀设备中，并在5W的条件下处理8-10s对垂直取向层进行表面改性，对改性后的样品用紫外固化胶NOA65进行光固化贴合制成液晶盒，且光固化对应的光波长为365nm光强为90mW/cm2，时间为25min；
步骤S3：液晶盒内灌入液晶一制成液晶器件；将液晶二与黑色染料按质量比为97：3进行混合再次灌入液晶盒制成宾主液晶器件。
实施例4
参照图1-5，一种图案化宾主液晶器件的方法，包括以下步骤：
步骤S1：将垂直取向的聚酰亚胺溶液旋涂在携带氧化铟锡薄膜的玻璃基板上,旋涂的速度为2500rpm，且旋涂的时间为3min，然后在220℃的条件下高温固化成取向膜，且高温固化的时间为140min；
步骤S2：将步骤S1制备的样品进行摩擦处理放在反应离子刻蚀设备中，并在5W的条件下处理5-7s对垂直取向层掩模刻蚀处理，对改性后的样品用紫外固化胶NOA65进行光固化贴合制成液晶盒，且光固化对应的光波长为365nm光强为90mW/cm2，时间为25min；
步骤S3：液晶盒内灌入液晶一制成液晶器件；将液晶二与黑色染料按质量比为97：3进行混合再次灌入液晶盒制成宾主液晶器件。
由图1可知，垂直取向下液晶分子呈现垂直排列，在偏光显微镜下呈现黑色，旋转器件45ο图像没有变化；刻蚀处理后液晶分子垂直排列被影响，旋转器件45ο出现明暗交替的变化，原因是由于偏转角度使入射光经过液晶分子时，由于液晶的双折射特性，导致出射光出现相位差造成明亮态；
由图4可知，刻蚀处理取向层制成的宾主液晶器件在低频交流电下，随着电压升高透过率逐渐上升；
由图5可知，刻蚀处理取向层制成的宾主液晶器件在高频交流电下，随着电压升高透过率降低。
由图7可知，掩模刻蚀处理取向层制成的图案化宾主液晶器件在不加电条件下，控制不同区域之间，液晶分子预倾角不同使透过率出现差异，器件中呈现图案；加入低频交流电，图案消失，透过率升高；加入高频交流电，图案消失，透过率降低。
由上可知，本发明通过利用垂直取向层材料具有的低润湿性的特点，通过反应离子刻蚀这种表面改性的方式改变取向层的表面形貌影响取向层的润湿性从而控制液晶分子预倾角；利用这种处理方法可以调整液晶分子预倾角的大小从而改变液晶分子的取向方向，可以在单一液晶器件实现多种显示模式，有效降低成本，简化生产工艺；同时可以制成图案化液晶器件，用于信息传递，具有商业潜力。
以上所述，仅为本发明较佳的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本发明揭露的技术范围内，根据本发明的技术方案及其发明构思加以等同替换或改变，都应涵盖在本发明的保护范围之内。
Claims (2)
1.一种反应离子刻蚀处理取向层控制液晶分子预倾角方法，其特征在于，包括以下步骤：
步骤S1：将垂直取向的聚合物溶液旋涂在携带氧化铟锡薄膜的玻璃基板上，高温固化一定时间成取向膜；
步骤S2：将步骤S1制备的样品进行摩擦处理放在反应离子刻蚀设备中，对垂直取向层进行表面改性，反应离子刻蚀能够改变取向层的表面形貌影响取向层的润湿性，从而控制液晶分子预倾角，对改性后的样品用紫外固化胶进行光固化贴合制成液晶盒；
步骤S3：液晶盒内灌入液晶一制成液晶器件；将液晶二与黑色染料按一定比例混合再次灌入液晶盒制成宾主液晶器件；
所述的聚合物溶液为聚酰亚胺溶液；
在步骤S1中，旋涂的速度为1500-2500rpm，且旋涂的时间为1-3min；
在步骤S1中，高温固化的温度为180-220℃，高温固化的时间为100-140min；
在步骤S2中，所述的反应离子刻蚀设备的运行参数为5W，并在5W的条件下处理1-10s；
在步骤S3中，所述的液晶二与黑色染料的质量比为(95-100)：(1-3)；
刻蚀处理取向层制成的宾主液晶器件在低频交流电下，随着电压升高透过率逐渐上升；刻蚀处理取向层制成的宾主液晶器件在高频交流电下，随着电压升高透过率降低；
掩模刻蚀处理取向层制成的图案化宾主液晶器件在不加电条件下，控制不同区域之间，液晶分子预倾角不同使透过率出现差异，器件中呈现图案；加入低频交流电，图案消失，透过率升高；加入高频交流电，图案消失，透过率降低。
2.根据权利要求1所述的反应离子刻蚀处理取向层控制液晶分子预倾角的方法，其特征在于，在步骤S2中，所述的光固化对应的光波长为365nm光强为70-90mW/cm2，时间为15-25min。
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