CN1151519A - Check result output device and method and placode checking system and method - Google Patents

Check result output device and method and placode checking system and method Download PDF

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Publication number
CN1151519A
CN1151519A CN96105130A CN96105130A CN1151519A CN 1151519 A CN1151519 A CN 1151519A CN 96105130 A CN96105130 A CN 96105130A CN 96105130 A CN96105130 A CN 96105130A CN 1151519 A CN1151519 A CN 1151519A
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CN
China
Prior art keywords
defective
check result
arrangenent diagram
substrate
installation position
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Granted
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CN96105130A
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Chinese (zh)
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CN1059740C (en
Inventor
石羽正人
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Omron Corp
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Omron Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0266—Marks, test patterns or identification means
    • H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8858—Flaw counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/888—Marking defects

Abstract

The objective of the invention is to efficiently carry out a repairing work for the defective site of a subtrate and quality control for a part mounting site. A subtrate to be inspected is irradiated with a light projecting part, and a part mounting site on the subtrate is inspected, based on a colored image signal picked up by an image pickup part from the reflected light image. Based on the inspected result data, a lay-out figure of a part mounting site in which a defective part position is indicated by various shaped defective site discriminating marks according to defective content is made by a lay-out figure making part. This lay figure is output by an output part through a inspection result output file making part.

Description

Check result output unit and method and base plate inspection system and method
The present invention relates in the operation of checking the device installation position (wherein also comprise the welding position, be designated hereinafter simply as the device installation position) on the substrate to generate according to check result to the device installation position on the substrate and output contain with defective part Identification mark indicate position, defective position device installation position arrangenent diagram the check result output data check result output unit and check result output intent and adopt the base plate inspection system of this check result output unit and adopt the substrate inspecting method of this check result output intent.
Figure 17 is illustrated in the operation (hereinafter to be referred as the device installation procedure) of installing device on the substrate.
In the printing with paste operation A of this figure, in the welding position on the substrate, be the printing coating of carrying out soldering paste on the weld zone part of Copper Foil with soldering paste printing device.
In checking process B, utilize base board checking device or base plate inspection system to check the printing with paste state of each welding position on the substrate, and the substrate of passed examination is delivered to device assembly process C then.
In device assembly process C, by the assembling worker device is assemblied in printing and has been coated with on the substrate of soldering paste.
Then in the reflow soldering step D, the substrate that has assembled device is put into reflow ovens heat, make solder paste melts, device is welded on the substrate.
In checking operation E, handle the state of each the device installation position after device being welded on the substrate through above-mentioned reflow soldering at last with base board checking device or base plate inspection system inspection.
The aforesaid substrate testing fixture is made of light projection unit, light receiver, control and treatment portion.
The light projection unit has fluorescent light, light neon source, LASER Light Source, X ray light source etc., makes the rayed of sending from light source on the device installation position of inspection substrate.The on/off of light source is controlled by control and treatment portion.
Light receiver has CCD color video camera or photomultiplier etc., be used to receive from the substrate reflected light and with the color picture signal of resulting reflected light image, deliver to control and treatment portion by the picture intelligence of the formed optical cutting line in laser radiation welding position or by the light-receiving data such as photoelectron image signal that x-ray bombardment produces.
The action of control and treatment portion control light projection unit and light receiver, and according to checking being examined the position by the light-receiving data of light receiver input, according to its check result generate whether indication substrate qualified, the inspection result data files such as defective position of defective substrate, and with the content output of this inspection result data file.
Below, the action of the base board checking device with said structure is described.
With the device installation position of rayed, receive reflected light by the light projection unit, and obtain the light-receiving data such as color picture signal of reflected light image, these light-receiving data are delivered to control and treatment portion by light receiver at substrate.
In control and treatment portion, according to checking being examined the position, generate the inspection result data file, and export the content of this inspection result data file according to this check result by the light-receiving data of light receiver input.
The aforesaid substrate check system is made of the end device of the aforesaid substrate testing fixture and the inspection result data file off-line setting, that be used for that base board checking device is generated of online setting being exported according to operating personnel's requirement.
Aforesaid substrate testing fixture or base plate inspection system generate the inspection result data file according to preprogrammed check result output intent from the check result of device installation position, and export the content of this inspection result data file.
In above-mentioned check result output intent, identification is arranged on the arrangenent diagram of device installation position and represent method such as defective position, for example, can enumerate the spy and open flat 2-76080 communique, the spy opens the method for recording and narrating in the flat 5-332948 communique.
Check result output intent in the Te Kaiping 2-76080 communique is to use with device shape corresponding shape mark to indicate device installation position on the installation base plate, and demonstrates and use the color different with qualified part mark color to make the arrangenent diagram that defective part mark (for example the mark at defective position with red, qualified part mark with white) indicates position, defective position.
And, zone beyond above-mentioned arrangenent diagram shows the defective content at each defective position successively with literal, the mark at the defective position on the above-mentioned arrangenent diagram is also composed with different colors (for example using yellow) simultaneously, or adopts the method that the defective content at each defective position is gathered demonstration in the zone beyond the above-mentioned arrangenent diagram.
And the special check result output intent of opening in the flat 5-332948 communique is to show to use the color different with qualified part mark color to make the arrangenent diagram of defective part mark, be equipped with the method that the enlarged drawing around this defective position shows simultaneously.
Operating personnel simultaneously observe above-mentioned demonstration, and one side is carried out the correction operation at defective position.
But, in above-mentioned existing check result output intent, can not know that from arrangenent diagram the defective content at defective position specifically is any, do not know that promptly amount of solder still is that device comes off etc. inadequately, what be difficult to judge that enlarged drawing amplifies is which part Zai Yi He of arrangenent diagram shows in the mode of lattice content not, show the very difficult defective content at the defective position of being watched attentively of seeing clearly immediately from its literal, defective content is being gathered in the mode of demonstration, be difficult to distinguish that shown defective content is corresponding with which the defective position on the arrangenent diagram, so position and the affirmation of defective content of defective position on substrate is very bothersome, revises operation and wants the expensive time.
In addition, from the defective of the defective device of above-mentioned arrangenent diagram there is no telling is to take place suddenly, still continue to take place, so in the device installation procedure of situations such as the lasting generation of the privileged site on substrate is defective, can not grasp its mass change trend, postpone the feedback of operation upstream, thereby had the problem that to carry out effective quality management to the device installation position of this in-process substrate.
The present invention develops for solving the problem that above-mentioned prior art exists, and its objective is check result output unit and the check result output intent that the quality management of device installation position on a kind of correction operation that can carry out the defective position of substrate effectively and the substrate is provided and adopts the base plate inspection system of this check result output unit and adopt the substrate inspecting method of this check result output intent.
For achieving the above object, all have the arrangenent diagram generating apparatus according to the check result output unit of the 1st aspect of the present invention and the 6th aspect and the base plate inspection system of the 11st aspect, be used to generate to have the difform defective part Identification mark corresponding and indicate the arrangenent diagram of the device installation position at defective position with defective content.
All have the arrangenent diagram generating apparatus according to the check result output unit of the 3rd aspect of the present invention and the 8th aspect and the base plate inspection system of the 13rd aspect, be used to generate with defective part Identification mark and indicate position, defective position and show the enlarged drawing of specified region, show the arrangenent diagram of regional location shown in this enlarged drawing simultaneously.The base plate inspection system of the check result output unit of the 4th aspect and the 9th aspect and the 14th aspect all has the arrangenent diagram generating apparatus according to the present invention, be used to generate with defective part Identification mark indicate position, defective position and with literal demonstrate the defective content at specified defective position, simultaneously this literal is shown with corresponding to the defective part Identification mark at specified defective position with the interconnective device of extension line installation position arrangenent diagram.
The base plate inspection system of the check result output unit of the 5th aspect and the 10th aspect and the 15th aspect all has the arrangenent diagram generating apparatus according to the present invention, is used to generate with defective part Identification mark indicate position, defective position and demonstrate the device installation position arrangenent diagram that underproof historical record takes place in each device installation position.
The substrate inspecting method of the check result output intent of the 16th aspect and the 21st aspect is used to generate the device installation position arrangenent diagram that indicates defective position with the defective part Identification mark different with defective content corresponding shape according to the present invention, and with this arrangenent diagram output.
The substrate inspecting method of the check result output intent of the 18th aspect and the 23rd aspect according to the present invention, be used to generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark, the enlarged drawing that on this arrangenent diagram, shows the appointed area, demonstrate the position in this represented zone of enlarged drawing simultaneously, and will demonstrate the arrangenent diagram output of the represented regional location of this enlarged drawing; The substrate inspecting method of the check result output intent of the 19th aspect and the 24th aspect is used to generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to the present invention, be presented at the defective content at the defective position that indicates on this arrangenent diagram with literal, output simultaneously with this literal show with corresponding to the defective part Identification mark at specified defective position with extension line interconnect, and should defective content and the defective part Identification mark interconnective arrangenent diagram of extension line.
The substrate inspecting method of the check result output intent of the 20th aspect and the 25th aspect is used to generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to the present invention, on this arrangenent diagram, show that underproof historical record takes place in each device installation position, and output demonstrates the arrangenent diagram of this underproof generation account of the history.
Therefore, check result output unit according to the present invention the 1st aspect and the 6th aspect, the base plate inspection system of the 11st aspect, the check result output intent of the 16th aspect and the substrate inspecting method of the 21st aspect, utilize the arrangenent diagram generating apparatus to generate and indicate the arrangenent diagram of the device installation position at defective position to have the difform defective part Identification mark corresponding with defective content, and by this arrangenent diagram of output, the position and the defective content thereof at defective position can be confirmed from arrangenent diagram rapidly and correctly, thereby the correction operation at defective position can be carried out effectively.
Check result output unit according to the present invention the 3rd aspect and the 8th aspect, the base plate inspection system of the 13rd aspect, the check result output intent of the 18th aspect and the substrate inspecting method of the 23rd aspect, utilize the arrangenent diagram generating apparatus to generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark, and on this arrangenent diagram, show the enlarged drawing of appointed area, demonstrate the position in this represented zone of enlarged drawing simultaneously, by demonstrating the arrangenent diagram output of the represented regional location of this enlarged drawing, can be rapidly and what confirm correctly that enlarged drawing amplifies is which position of arrangenent diagram, thereby can carry out the correction operation at defective position effectively.
Check result output unit according to the present invention the 4th aspect and the 9th aspect, the base plate inspection system of the 14th aspect, the check result output intent of the 19th aspect and the substrate inspecting method of the 24th aspect, utilize the arrangenent diagram generating apparatus to generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark, be presented at the defective content at defective position indicated on this arrangenent diagram with literal, output simultaneously shows this literal with defective part Identification mark corresponding to specified defective position and is connected with extension line, and by this defective content is exported with the arrangenent diagram that extension line is connected with defective part Identification mark, can be rapidly and correctly confirm the defective content at each defective position, thereby can carry out the correction operation at defective position effectively.
Check result output unit according to the present invention the 5th aspect and the 10th aspect 0, the base plate inspection system of the 15th aspect, the check result output intent of the 20th aspect and the substrate inspecting method of the 25th aspect, generation indicates the device installation position arrangenent diagram of position, defective position with defective part Identification mark, on this arrangenent diagram, show that underproof historical record takes place in each device installation position, and demonstrate the arrangenent diagram of this underproof generation account of the history by output, the mass change trend of device installation position can be grasped, thereby the quality management of device installation position can be carried out effectively.
Fig. 1 is the simple structural drawing of expression check result output unit the 1st embodiment of the present invention.
Fig. 2 is the structural drawing of the light projection unit of expression check result output unit the 1st embodiment of the present invention.
Fig. 3 is the process flow diagram of the sequence of operation of expression check result output unit the 1st embodiment of the present invention.
Fig. 4 is the key diagram of face of weld and one example of color image on every side thereof among expression check result output unit the 1st embodiment of the present invention.
Fig. 5 is the key diagram that nonconformance purpose one example is set in expression.
Fig. 6 is the key diagram that the check result of expression check result output unit the 1st embodiment of the present invention is exported arrangenent diagram one example in the picture.
Fig. 7 is the key diagram of an example of defective part Identification mark among expression check result output unit the 1st embodiment of the present invention.
Fig. 8 is the key diagram of data structure one example of expression installation position identification marking.
Fig. 9 is the key diagram that expression installation position identification marking is set an example of picture.
Figure 10 is the key diagram of data structure one example of defective part Identification mark among expression check result output unit the 1st embodiment of the present invention.
Figure 11 is the key diagram that the check result of expression check result output unit the 2nd embodiment of the present invention is exported an example of picture.
Figure 12 is the key diagram of data structure one example of defective part Identification mark among expression check result output unit the 2nd embodiment of the present invention.
Figure 13 is the key diagram that the check result of expression check result output unit the 3rd embodiment of the present invention is exported an example of picture.
Figure 14 is the key diagram of data structure one example of defective part Identification mark among expression check result output unit the 3rd embodiment of the present invention.
Figure 15 is the key diagram that the check result of expression check result output unit the 4th embodiment of the present invention is exported arrangenent diagram one example in the picture.
Figure 16 is the simple structural drawing of check result output unit the 5th embodiment of the present invention, and system's pie graph of the embodiment of expression base plate inspection system of the present invention.
Figure 17 is the key diagram of expression device installation procedure.
Symbolic significance in each accompanying drawing is as follows:
1 smooth projection unit
2 videotape portion
3 X-axis worktable portions
4 Y-axis worktable portions
5 control and treatment portions
6 videotape controller
7 image treatment parts
8,98 storage parts
9,99 input parts
10,100 efferents
11,101 arrangenent diagram generating units
12,102 check the file generating unit
13,103 control parts
15 inspection substrates
91 base board checking devices
92 production lines
93 check result output units
94 1LAN cables
95 data output section
96 floppy disks
97 data input part
Fig. 1 is the simple structural drawing of expression check result output unit the 1st embodiment of the present invention.
In Fig. 1, this check result output unit by light projection unit 1, videotape portion 2, X-axis worktable 3, Y-axis worktable 4 and control and treatment portion 5 and constitute.
Control and treatment portion 5 by videotape controller 6, image treatment part 7, storage part 8, input part 9, efferent 10, arrangenent diagram generating unit 11, check result output file generating unit 12, and control part 13 constitute.
Light projection unit 1 has red light source, green light source, blue-light source totally 3 annulus fluorescent lamp source, and this three coloured light is radiated at being examined on the position of inspection substrate 15 from the different elevations angle.
This three-color light source distributes when three coloured light have the wavelength luminous energy corresponding with resulting pure white coloured light when being examined the position by colour mixture, and the on/off of light and luminosity are controlled by videotaping controller 6 by control part 13.
Fig. 2 is the structural drawing with light projection unit 1 of annular red light source 21, green light source 22, blue-light source 23.In the figure, above-mentioned annular light source 21,22,23 be arranged on make on the concentric circles its center and the portion of videotaping 2 to videotape central shaft 24 consistent, and the radius r of ring 1, r 2, r 3Difference is apart from the height h of substrate surface 25 1, h 2, h 3Also different, so be configured to different angle θ with the elevation angle of the intersection point A that videotapes central shaft 24 from substrate surface 25 1, θ 2, θ 3Here be set at θ 1＞θ 2＞θ 3
Videotaping portion 2 is color television cameras, constitutes an integral body with light projection unit 1, according to the order that videotapes controller 6 to inspection substrate 15 the device installation position videotape successively, and the color picture signal of taking the photograph is delivered to image treatment part 7.
Light projection unit 1 is installed on X-axis worktable 3 and videotapes portion 2, for to inspection substrate 15 the device installation position videotape successively, make light projection unit 1 and videotape portion 2 according to the order that videotapes controller 6 and move at directions X.
Have the substrate cushion cap on the top of Y-axis worktable 4, inspection substrate 15 just is placed on this substrate cushion cap, for the device installation position is videotaped successively, according to the order that videotapes controller 6 inspection substrate 15 is moved in the Y direction.
Videotape controller 6 and have with light projection unit 1, videotape portion 2, X-axis worktable 3, Y-axis worktable 4, and the interface that is connected of control part 13 etc., according to the order of control part 13, control light projection unit 1, videotape the action of portion 2, X-axis worktable 3, Y-axis worktable 4.
Image treatment part 7 carries out the A/D conversion according to the order of control part 13 to the simulation color picture intelligence of being taken the photograph by the portion of videotaping 2, and it is become the color digital pictorial data, and this color image data is carried out image processing such as binarization processing.
Storage part 8 has storeies such as RAM, as image treatment part 7, arrangenent diagram generating unit 11, check result output file generating unit 12, and the workspace of control part 13 use, simultaneously according to the demanded storage of control part 13 from image treatment part 7, arrangenent diagram generating unit 11, check result output file generating unit 12, and the various data of control part 13 inputs.
Input part 9 has keyboard, Genius mouse, reaches image scanner etc., and operating personnel import various data or order by operation inputting part 9.
Efferent 10 has display and printers such as CRT, be used to show or printout from the content of the various information of control part 13 inputs, the color image that is examined the position, check result output file etc.
Arrangenent diagram generating unit 11 is according to the order of control part 13, whether qualified according to each the device installation position that demonstrates inspection substrate, as to reach the defective content at defective position inspection result data, generation indicates the inspection substrate device installation position arrangenent diagram at defective position with the defective part Identification mark different with defective content corresponding shape, and this arrangenent diagram is delivered to check result output file generating unit 12.
Check result output file generating unit 12 generates the check result output file of each inspection substrate according to arrangenent diagram and above-mentioned inspection result data by 11 inputs of arrangenent diagram generating unit.This check result output file is can be by the file of the pictorial data form of the substrate number of inspection substrate retrieval, is made of the literal display frame of above-mentioned arrangenent diagram, defective content etc.
Control part 13 has microprocessor etc., be used to control the action that videotapes controller 6, image treatment part 7, storage part 8, input part 9, efferent 10, arrangenent diagram generating unit 11, reaches check result output file generating unit 12, according to various data or the order imported from input part 9 by operating personnel, according to step shown in Figure 3 inspection substrate is checked, and the content of the check result output file that check result output file generating unit 12 is generated outputs to display part 10, thereby notifies the user with check result.
Fig. 3 is the process flow diagram of the operation steps of expression present embodiment.
In Fig. 3, at ST1, after operating personnel imported and carry out the order of checking, the substrate number of input inspection substrate was arranged on inspection substrate at ST2 on the substrate cushion cap of Y-axis worktable 4, and input has been provided with the instruction of finishing.
At ST3, control part 13 makes X-axis worktable 3 and 4 actions of Y-axis worktable by videotaping control part 6, with the position that is examined of substrate is the position that videotapes that the device installation position moves to the portion of videotaping 2, by light projection unit 1 three coloured light are shone the device installation position, videotape with 2 pairs of images of the portion of videotaping, and the simulation color picture intelligence of taking the photograph is delivered to image treatment part 7 from the light of this device installation position reflection.
Solder surfaces in the inspection process B of Figure 17 or the installing device in checking operation E etc. have diffuse surface, when having the wavelength luminous energy corresponding with resulting pure white coloured light during by colour mixture, three coloured light of light projection unit 1 distribute, so when with this three coloured light irradiation solder surfaces or installing device, can obtain the identical reflected light image of reflected light image when shining white light.
On the other hand, because the face of weld in the inspection operation E of Figure 17 has properties of specular reflection and has the three-dimension curved surface shape, so each curvature portion that substrate surface is had a gradient make from oblique direction incident have coloured light by with the corresponding direction reflection of incident angle, this reflection direction and the portion of videotaping videotape the consistent curvature portion of central axis direction (direction vertical with substrate), owing in the reflected light image, have the color of corresponding colored light sources, so when three coloured light with light projection unit 1 shine face of weld, in the reflected light image, the gradient of face of weld will take on a red color near the curvature portion of par, it is blue that the curvature portion that gradient is very big will be, and gradient will be green at the curvature portion in the middle of the two.
Therefore, as this reflected light image being videotaped with 2 pairs in the portion of videotaping, can obtain at the weld zone of soldering paste face, Copper Foil part, substrate solder mask portion, and part with diffusing characteristic diffuser such as installing device present various colors and present redness, green and blue color image respectively according to its 3D shape in the part that face of weld etc. has a minute surface characteristic.
Fig. 4 expresses an example of the color image of device installation position among the inspection operation E of Figure 17.
In the sectional drawing and vertical view of Fig. 4,31 and 32 is face of weld, the 33rd, installing device, the 34th, the lead terminal of installing device 33 (electrode), the 35th, the solder mask portion, the 36th of substrate, the weld zone part of Copper Foil, face of weld 31,32 and lead terminal 34 have minute surface, and installing device and solder mask portion 35 have diffuse surface.
In color image, the chrominance section of 37,38,39 expression face of weld 31, the 37th, take on a red color near flat portions, the 38th, greeny part, the 39th, be the blue very big part of gradient.40 then is the part that presents the device color, the 41st, present the part of solder mask color.In addition, in installing device and substrate solder mask portion, omitted the color of face of weld 32.
By the portion of videotaping 2 take the photograph the simulation color picture intelligence carry out A/D conversion by image treatment part 7, become the color digital pictorial data.
Control part 13 makes image treatment part 7 actions, and carry out the whether qualified judgement in whole devices installation position of substrate according to this color image data, for defective position, by selecting the project that is consistent from predefined some defective item as underproof content, obtain showing the inspection result data of the defective content at whether qualified and defective position, each device installation position, and this inspection result data is delivered to arrangenent diagram generating unit 11 and check result output file generating unit 12.
For example, when checking about the solder paste amounts among the inspection operation E at Figure 17, extract the zone that presents the soldering paste color out from the color image data of welding position, the data " 1 " of extracting rear region out are generated binary data, calculate the area of soldering paste face from this binary data, and area value and the predefined allowable value of calculating compared, then be judged to be defective as surpassing allowable value, as the area value of calculating is less than allowable value, then defective content becomes " solder paste amounts deficiency ", is " solder paste amounts is too much " when surpassing allowable value.
As check about the installing device in the inspection operation E of Figure 17, then in the color image data of device installation position, note observing the color of present position, mounting portion, do not have the device color as this part and present the color of the solder mask of substrate, then be judged to be " device comes off ", as check relevant welding position, and then extract the part of the red, green, blue color that presents face of weld out, carry out whether qualified judgement such as solder flux amount, welding shape according to the data of this extraction.
Fig. 5 expresses in the inspection process B of Figure 17 and checks and set nonconformance purpose one example among the operation E.
Get back to Fig. 3, at ST4, control part 13 makes 11 actions of arrangenent diagram generating unit, according to above-mentioned inspection result data, generation indicates the device installation position arrangenent diagram of the inspection substrate at defective position with the difform defective part Identification mark corresponding with defective content, and this arrangenent diagram is delivered to check result file generating unit 12.
Then, control part 13 makes 12 actions of check result file generating unit, according to arrangenent diagram and the above-mentioned check result by 11 inputs of arrangenent diagram generating unit, generates the check result file.This check result file is can be by the file of the pictorial data form of the substrate number of inspection substrate retrieval, is made of the literal display frame of above-mentioned arrangenent diagram, defective content etc.
Control part 13 will be kept in the storage part 8 by the check result file that check result file generating unit 12 generates then, simultaneously, the content of check result file is passed through the display or the printer output of efferent 10, thereby check result is informed the user.And after this if any the time, read the check result of desired substrate number from storage part 8 from the requiring of user's outgoing inspection result, and by efferent 10 with its content output.
Fig. 6 expresses an example of the arrangenent diagram of the device installation position in the check result output picture.
In Fig. 6,51～53rd, the difform defective part Identification mark corresponding with defective content, the 51,52, the 53rd, represent the defective part Identification mark that device position deflection, solder flux bridge knot, device come off respectively.
Fig. 7 expresses an example of the defective part Identification mark of defective content.In store various defective part Identification marks in storage part 8, the user can select the defective part Identification mark of each nonconformance purpose of expression to set from storage part 8 when setting defective item.The user passes through to use the mark of the image scanner input of input part 9 as defective part Identification mark, needed defective part Identification mark can be kept in the storage part 8.
Here, illustrate and generating the installation position identification marking data that generate before the arrangenent diagrams and the structure of defective identification marking data by arrangenent diagram generating unit 11.The installation position identification marking is the mark that is illustrated in the device installation position in the arrangenent diagram.
Fig. 8 is the key diagram of data structure one example of expression installation position identification marking.In the figure, identification marking data in installation position are made of device information 111, mark shape information 112, shape Show Color information 113.Device information 111 by expression this be marked at upper right coordinate in the arrangenent diagram, lower-left coordinate, and the data of the kind of device constitute.And mark shape information 112 and shape Show Color information 113 are preestablished by the user, can set the kind of each device.
Fig. 9 is a mark shape information in the identification marking of above-mentioned installation position and an example of shape Show Color information setting picture.The user sets mark shape and shape Show Color in the setting picture shown in Figure 9 by the keyboard or the Genius mouse of the input part 9 shown in the application drawing 1.
Get back to Fig. 8, suppose that the shape information 112 that serves as a mark is set at " ", be set at blueness as shape Show Color information 113, the coordinate points of device information 111 is set at its upper right summit and summit, lower-left, shows on arrangenent diagram that then " " with blue profile is as the installation position identification marking.
Figure 10 is the key diagram of data structure one example of defective part Identification mark in the expression present embodiment.Utilize the installation position identification marking data shown in this defective part Identification flag data and Fig. 8, in arrangenent diagram generating unit 11, generate above-mentioned arrangenent diagram.
In Figure 10, defective part Identification flag data by device information 130, defective mark shape information 132, defective Show Color information 133, and defective shape Show Color information 134 constitute.
Device information 131 has expression, and this is marked at kind, and the data of defective content of upper right coordinate in the arrangenent diagram, lower-left coordinate, this device.
Defective mark shape information 132 is the shape datas by the defective part Identification mark of defective content and part category decision.In the profile portion shape of the defective part Identification mark shown in Fig. 6 and Fig. 7, to set step identical with the mark shape of the installation position identification marking of Fig. 9, preestablished by the kind of each device by the user.In Fig. 7, show defective part Identification mark corresponding with each defective content when the profile portion shape set of defective part Identification mark is " ".Usually, the profile portion shape set with defective part Identification mark is the shape identical with the mark shape of installation position identification marking.
Defective Show Color information 133 and defective shape Show Color information 134 by the user by preestablishing by the kind of each device or by each defective content, defective Show Color information 133 is the Show Color data in the installation position identification marking oblique line portion shown in Fig. 6 and Fig. 7, and defective shape Show Color information 134 is the Show Color data beyond the oblique line portion.
Therefore, in the defective part Identification mark shown in Fig. 6 and Fig. 7, as defective Show Color information 133 being set at redness, defective shape Show Color information 134 being set at yellow, then this defective part Identification mark oblique line portion will present redness, and the part beyond profile portion and the oblique line portion will present yellow.
Get back to Fig. 3, at last at ST5, control part 13 makes 4 actions of Y-axis worktable by videotaping controller 6, and inspection substrate is moved to extracting position, and operating personnel take off the substrate cushion cap of this substrate from Y-axis worktable 4.
Return ST2 then, repeat above step.
In addition, light projection unit 1 in the above-described embodiments is made of annular color fluorescence lamp source, but also available sometimes annular light neon source, X ray light source or the formations such as LASER Light Source of from oblique direction the welding position being shone with fan-shaped plan light.
For example, when adopting LASER Light Source, videotape with the 2 pairs of optical cutting lines that on the welding position, form by planar laser of the portion that videotapes that are positioned at directly over the welding position, and calculate and the relevant inspection data of 3D shape such as the height of soldering paste or leg angle according to the shapometer of this optical cutting line.And when adopting the X ray light source, in order to receive the photoelectron that discharges from the welding position, optical pickup apparatus such as use photomultiplier replace videotaping portion 2.
Like this, as the 1st embodiment according to the check result output unit of the invention described above, then utilize arrangenent diagram generating unit 11, inspection result data according to inspection substrate generates the device installation position arrangenent diagram that indicates defective position with the difform defective part Identification mark corresponding with defective content, and this arrangenent diagram is passed through check result file generating unit 12 export by efferent 10, thereby can confirm the position and the defective content at defective position from arrangenent diagram rapidly and correctly, thereby can carry out the correction operation at defective position effectively.
The 2nd embodiment of check result output unit of the present invention below is described.
The simple formation of device is identical with the 1st embodiment of check result output unit of the present invention shown in Figure 1.In the following description, the part that repeats with the 1st embodiment of check result output unit of the present invention is omitted.
In the present embodiment, whether qualified the arrangenent diagram generating unit according to the inspection result data of the defective content at and defective position by each device installation position that indicates inspection substrate of control part input, generation indicates the inspection substrate device installation position arrangenent diagram at defective position with defective part Identification mark and this arrangenent diagram carried out amplifying after the Region Segmentation shows each regional enlarged drawing, and this arrangenent diagram and enlarged drawing that each is regional are delivered to check result output file generating unit.
Check result output file generating unit according to by the arrangenent diagram of above-mentioned arrangenent diagram generating unit input, enlarged drawing, and, generate the check result output file of each inspection substrate by the above-mentioned inspection result data of control part input.
Therefore, as according to present embodiment, control part utilizes the inspection result data of arrangenent diagram generating unit 11 according to inspection substrate, generation indicates the device installation position arrangenent diagram at defective position with defective part Identification mark, and this arrangenent diagram carried out amplifying after the Region Segmentation show each regional enlarged drawing, and utilize check result output file generating unit, according to arrangenent diagram by above-mentioned arrangenent diagram generating unit input, enlarged drawing, and above-mentioned inspection result data, generate the check result output file of each inspection substrate, and the content of this check result output file outputed to efferent, thereby the check result of inspection substrate is informed the user.
Figure 11 illustrates an example of the output picture of check result.
In Figure 11, the 61st, indicate the device installation position arrangenent diagram, the 62nd at defective position with defective part Identification mark, rap the enlarged drawing, the 63rd that the zone wanting in the arrangenent diagram to amplify is shown by Genius mouse with input part, the command menu, the 64th of the keyboard by operation inputting part or the various command of Genius mouse starting is with the defective content at literal display base plate numbering, defective position, and from the zone of the various information of control part etc.
Arranging Figure 61 and amplifying among Figure 62 that 65 and 66 is defective part Identification marks of indication position, defective position, the 67th, be illustrated in the figure in the zone that is exaggerated in the enlarged drawing.
Initial stage of check result output picture does not show enlarged drawing, by rap with Genius mouse defective part Identification mark show around the defective part Identification mark that knocks enlarged drawing and as 67 figure.
In Figure 11 by by rap defective part Identification mark 65 with Genius mouse, demonstrate the figure 67 that amplifies Figure 62 and be illustrated in the zone that is exaggerated in the enlarged drawing, under this state, as rap around the defective part Identification mark 66, then demonstrate defective part Identification mark 66 enlarged drawing on every side, be simultaneously displayed on the figure 67 in the zone on layout Figure 61 shown in this enlarged drawing.
Figure 12 is the key diagram of the data structure of defective part Identification mark in the expression present embodiment.Utilize the installation position identification marking data shown in this defective part Identification flag data and Fig. 8, in arrangenent diagram generating unit 11, generate above-mentioned arrangenent diagram and enlarged drawing.
In Figure 12, defective part Identification flag data by device information 131, mark shape information 112, shape Show Color information 113, defective display message 141, and amplify display message 142 and constitute.
Device information 131 has been described in Figure 10, and mark shape information 112 and shape Show Color information 113 have been described in Fig. 8.
Defective display message 141 is preestablished by each part category or every defective content by the user, is the data of the inside Show Color of the defective part Identification mark of expression.
Therefore, for the defective part Identification mark 65 or 66 shown in Figure 11, as shape Show Color information 113 be set at blueness, defective display message 141 is set at redness, then the profile portion of this defective part Identification mark presents blueness, inside presents redness.
Amplify display message 142 and be have after adding setting on the X and Y coordinates of the upper right coordinate of device of device information 131 with the upper right coordinate of its display window as the X and Y coordinates value, and deduct setting from the X and Y coordinates of device lower-left coordinate after with its data as the display window lower-left coordinate of X and Y coordinates value, upper right coordinate of this display window and display window lower-left coordinate are just represented the upper right coordinate and the lower-left coordinate of magnification region.In addition, amplify the installation position identification marking data that display message 142 also is additional to present embodiment.
Like this, as the 2nd embodiment according to the check result output unit of the invention described above, then utilize the arrangenent diagram generating unit, inspection result data according to inspection substrate, generation indicates the device installation position arrangenent diagram at defective position with defective part Identification mark, reach regional enlarged drawing with the arrangenent diagram of Genius mouse appointment, simultaneously, on arrangenent diagram, be presented at regional location shown in the enlarged drawing, by exporting this arrangenent diagram and enlarged drawing, can be rapidly and what confirm correctly that enlarged drawing amplified is which zone of arrangenent diagram, since can be rapidly and correctly confirm the position at the defective position on the high substrate of device packing densities such as high-density installation substrate, so can carry out the correction operation at defective position effectively.
The 3rd embodiment of check result output unit of the present invention below is described.
The simple formation of device is identical with the 1st embodiment of check result output unit of the present invention shown in Figure 1.In the following description, the part that repeats with the 1st embodiment of check result output unit of the present invention is omitted.
In the present embodiment, whether qualified the arrangenent diagram generating unit according to the inspection result data of the defective content at and defective position by each device installation position that indicates inspection substrate of control part input, generates with the literal display window of the defective content at each defective position and inspection substrate device installation position arrangenent diagram that defective part Identification mark indicates defective position, and this arrangenent diagram and literal display window is delivered to check result output file generating unit.
Check result output file generating unit generates the check result output file of each inspection substrate according to by the arrangenent diagram of above-mentioned arrangenent diagram generating unit input and literal display window and by the above-mentioned inspection result data of control part input.
Therefore, as according to present embodiment, control part utilizes the inspection result data of arrangenent diagram generating unit 11 according to inspection substrate, the device installation position arrangenent diagram that generation indicates defective position with the literal display window and the defective part Identification mark of the defective content at each defective position, and utilize check result output file generating unit, according to arrangenent diagram and literal display window by above-mentioned arrangenent diagram generating unit input, and above-mentioned inspection result data, generate the check result output file of each inspection substrate, and the content of this check result output file outputed to efferent, thereby the check result of inspection substrate is informed the user.
Figure 13 illustrates an example of the output picture of check result.
In Figure 13, the 71st, indicate the device installation position arrangenent diagram at defective position with defective part Identification mark, 72, the 73, the 74th, indicate the defective part Identification mark of position, defective position, the 75, the 76th, rap the defective content literal display window at the shown defective position of defective part Identification mark with the Genius mouse of input part.The literal display window of each defective part Identification mark and each defective content in defective position is connected with extension line is corresponding respectively.In addition, in the defective historical record in the defective content literal display window at defective position,, demonstrate that underproof number of times takes place at this defective position in the inspection in the past for this defective position.Promptly, the device installation position corresponding with defective part Identification mark 75, past did not take place defective, but the device installation position corresponding with defective part Identification mark 76, because of defective historical record is " 3 ", the expression past attempts took place 3 times defective, in other words, demonstrate on 3 substrates, took place defective.The 77th, the command menu of the various command of keyboard by operation inputting part or Genius mouse starting.
Initial stage of check result output picture does not show and resembles 75 and 76 defective content literal display window, rap the defective part Identification mark of wondering defective content by Genius mouse, show the defective content of the defective part Identification mark that knocks with input part 9.
In Figure 13 by rapping defective part Identification mark 72, demonstrate defective content literal display window 75, defective part Identification mark 72 is connected by extension line is corresponding with defective content literal display window 75, by rapping defective part Identification mark 73, demonstrate defective content literal display window 76, defective part Identification mark 73 is connected by extension line is corresponding with defective content literal display window 76, under this state, as rap defective part Identification mark 74, then demonstrate the defective content at the defective position corresponding with defective part Identification mark 74, defective part Identification mark 74 is connected by extension line is corresponding with shown defective content.
Figure 14 is the key diagram of the data structure of defective part Identification mark in the expression present embodiment.Utilize the installation position identification marking data shown in this defective part Identification flag data and Fig. 8, in arrangenent diagram generating unit 11, generate the literal display window of above-mentioned arrangenent diagram and defective content.
In Figure 14, defective part Identification flag data by mark shape information 112, shape Show Color information 113, defective display message 141, device information 151, and defective content display message 152 constitute.
Device information 151 by the kind of the upper right coordinate in the arrangenent diagram of this mark, lower-left coordinate, this device, defective content, title, and defective historical record constitute.
Defective content display message 152 is made of the upper right coordinate of defective content literal display window shown in expression Figure 13, the upper right coordinate of display window and the display window lower-left coordinate of lower-left coordinate.Upper right coordinate of this display window and display window lower-left coordinate are marked at coordinate figure on the arrangenent diagram and location-appropriate on picture according to this defective part Identification and select available literal to show that the zone of defective content decides.
Like this, as the 3rd embodiment according to the check result output unit of the invention described above, then utilize the arrangenent diagram generating unit to generate with the defective content literal video data at the defective position of Genius mouse appointment and the device installation position arrangenent diagram that defective part Identification mark indicates defective position according to the inspection result data of inspection substrate, and when generation indicates the device installation position arrangenent diagram at defective position with defective part Identification mark, to on arrangenent diagram, be connected with extension line is corresponding with the literal video data at appointed defective position, by exporting this arrangenent diagram, the literal video data, and extension line, can be rapidly and correctly confirm the defective content at specified defective position, so can carry out the correction operation at defective position effectively.
The 4th embodiment of check result output unit of the present invention below is described.
The simple formation of device is identical with the 1st embodiment of check result output unit of the present invention shown in Figure 1.In the following description, the part that repeats with the 1st embodiment of check result output unit of the present invention is omitted.
In the present embodiment, whether qualified the arrangenent diagram generating unit according to the inspection result data of the defective content at and defective position by each device installation position that indicates inspection substrate of control part input, generation indicates defective position, also further demonstrates the inspection substrate device installation position arrangenent diagram that underproof historical record takes place in each device installation position with defective part Identification mark, and this arrangenent diagram is delivered to check result output file generating unit.
Check result output file generating unit generates the check result output file of each inspection substrate according to by the arrangenent diagram of above-mentioned arrangenent diagram generating unit input and the above-mentioned inspection result data of being imported by control part.
Therefore, as according to present embodiment, control part utilizes the inspection result data of arrangenent diagram generating unit 11 according to inspection substrate, generation indicates defective position with defective part Identification mark, and further demonstrate the device installation position arrangenent diagram that underproof historical record takes place in each device installation position, and utilize check result output file generating unit, according to this arrangenent diagram and above-mentioned inspection result data, generate the check result output file of each inspection substrate, and the content of this check result output file outputed to efferent, thereby the check result of inspection substrate is informed the user.
Figure 15 illustrates an example of the device installation position arrangenent diagram in the check result output picture.
In Figure 15, the defective part Identification mark of 81,82,83 indication positions, defective position, the 84th, be judged to be qualified device installation position." * " represents that underproof historical record takes place in each device installation position, and underproof number of times promptly takes place in the past.Underproof number of times takes place and represents with the number of " * " in N the inspection substrate of being checked before the inspection substrate shown in Figure 15.Should " N " set before checking beginning, when it was not set, underproof number of times took place and represents with the number of " * " in whole inspection substrates of checking before this.
For example, when setting N=5, as can be seen from Figure 15, the device installation position at defective position 81 5 inspection substrates before this all are judged as defective, have 1 to be judged as defectively in 5 inspection substrates before this of the device installation position at defective position 82, and that the device installation position at defective position 83 5 inspection substrates before this all are judged as is qualified.Therefore, can judge and take place defective constantly in the device installation position at defective position 81, and the device installation position at defective position 82 be occur abruptly defective, so can infer in the manufacturing process of the device installation position at defective position 81 certain abnormal conditions are taking place.In addition, at 2 " * " being judged to be qualified 84 places, device installation position, there are 2 to be judged as defective in expression 5 inspection substrates before this.
Like this, as the 4th embodiment according to the check result output unit of the invention described above, then utilize the arrangenent diagram generating unit, according to the inspection result data of inspection substrate, generate the device installation position arrangenent diagram that indicates defective position with defective part Identification mark, simultaneously, on arrangenent diagram, be presented at each device installation position underproof historical record takes place, by exporting this arrangenent diagram, owing to grasping the variation tendency of quality, so can carry out the correction operation at defective position effectively.
Figure 16 is the simple structural drawing of check result output unit the 5th embodiment of the present invention, and system's pie graph of the base plate inspection system embodiment of the present invention of this 5th embodiment is adopted in expression.
In Figure 16, the 91st, be assembled in the base board checking device on the production line 92 of device installation procedure, the 93rd, the 5th embodiment of check result output unit of the present invention.
Base board checking device 91 by diskette unit and the data output section 95 with the network connecting portion that is connected with LAN cable 94 etc. constitute, be used for each device installation position of inspection substrate is checked, every substrate is generated the check result of inspection substrate, is the check result file that whether qualified the defective content at each device installation position result of determination and defective position write, and this check result file is write floppy disk 96 or outputs to LAN cable 94 by data output section 95.This check result file can be according to the substrate number identification of inspection substrate.
Check result output unit 93 by data input part 97, storage part 98, input part 99, efferent 00, arrangenent diagram generating unit 101, check result output file generating unit 102, and control part 103 constitute.
Data input part 97 has diskette unit, reaches the network connecting portion that is connected with LAN cable 94, and the check result file of exporting from base board checking device 91 is received by LAN cable 94, or is read in by floppy disk 96.The handing-over of check result file is to be undertaken, or undertaken by floppy disk 96 by LAN cable 94, is selected by the user.
Storage part 98 has storeies such as RAM, as arrangenent diagram generating unit 101, check result output file generating unit 102, and the workspace of control part 103 use, simultaneously according to the demanded storage of control part 103 from arrangenent diagram generating unit 101, check result output file generating unit 102, and the various data of control part 103 outputs.
Input part 99 has keyboard, Genius mouse, reaches image scanner etc., and operating personnel import various data or order by operation inputting part 99.
Efferent 100 has display and printers such as CRT, be used to show or printout from the various information such as content of the check result output file of control part 103 inputs.The data of being imported show on display or with printer prints output, are selected by operating personnel.
Arrangenent diagram generating unit 101 generates the device installation position arrangenent diagram that indicates defective position with defective part Identification mark according to the content of the check result file of importing from control part 103.
Check result output file generating unit 102 generates the check result output file according to from the arrangenent diagram of arrangenent diagram generating unit 101 inputs and the check result file of importing from control part 103.This check result output file is can be by the file of the pictorial data form of the substrate number of inspection substrate retrieval, is made of the literal display frame of above-mentioned arrangenent diagram, defective content etc.
Control part 103 has microprocessor etc., according to various data or the order imported from input part 99 by operating personnel, control data input part 97, storage part 98, efferent 100, arrangenent diagram generating unit 101, and the action of check result output file generating unit 102, and the content of check result output file is shown on the display of display part 100 or export with printer prints.
Below, the action of the embodiment of the base plate inspection system of the present invention with said structure is described.
In base board checking device 91, carry out the light-receiving data that rayed obtains according to device installation position to the inspection substrate that is taken into from production line, whether each device installation position of judging inspection substrate is qualified, and the defective item of the indication defective content relevant with defective position carried out specific inspection, every substrate generated write the whether qualified result of determination in each device installation position, the defective content at defective position, reach the check result file of the position coordinates of each device installation position, and this check result file is write floppy disk 96 or outputs to LAN cable 94 by data output section 95.
On the other hand, in check result output unit 93, will receive by LAN cable 94 from the check result file of base board checking device 91 outputs by data input part 97, or read in by floppy disk 96.
The check result file storage that control part 103 will obtain by data input part 97 is input to arrangenent diagram generating unit 101 and check result output file generating unit 102 simultaneously in storage part 98.
Then, control part 103 makes 101 actions of arrangenent diagram generating unit, content according to the check result file, generation indicates the device installation position arrangenent diagram of position, defective position with defective part Identification mark, and this arrangenent diagram delivered to check result file generating unit 102, and making 102 actions of check result file generating unit, generation has the check result output file of Fig. 6 to pictorial data shown in Figure 13, and this check result output file is kept in the storage part 98.
When the keyboard of user's operation inputting part 99, when having imported the order that check result is exported, control part 103 is read the check result output file of desired substrate number from storage part 98, and by efferent 100 its content is exported.
Like this, as according to the 5th embodiment of the check result output unit of the invention described above and adopt the embodiment of the base plate inspection system of the present invention of this 5th embodiment, the check result output unit is not assembled on the production line 92 of device installation procedure, constitute base plate inspection system but press off-line, utilize the arrangenent diagram generating unit of check result output unit, according to check result file from the base board checking device input, generation indicates the device installation position arrangenent diagram at defective position with defective part Identification mark, and by this arrangenent diagram is exported, when needed, needn't stop production line 92, can confirm the defective position of inspection substrate rapidly and correctly, and can grasp the mass change trend of device installation position exactly, so can carry out the correction operation at defective position and the quality management of device installation position effectively.
From the foregoing description as can be seen, the present invention is according to the inspection result data of inspection substrate, generation indicates the device installation position arrangenent diagram at defective position with defective part Identification mark, and by this arrangenent diagram is exported, can be rapidly and correctly confirm the defective position of inspection substrate, and can grasp the mass change trend of device installation position exactly, carry out the correction operation at defective position and the such effect of quality management of device installation position so have efficiency.

Claims (25)

1. check result output unit, with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to its check result, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate to have the difform defective part Identification mark corresponding with defective content and point out to show the above-mentioned arrangenent diagram at defective position.
2. check result output unit according to claim 1 is characterized in that: can suitably change above-mentioned defective part Identification mark.
3. check result output unit, with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to its check result, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the enlarged drawing of the appointed area that shows above-mentioned arrangenent diagram, demonstrate the above-mentioned arrangenent diagram of regional location shown in this enlarged drawing simultaneously.
4. check result output unit, with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate the device installation position arrangenent diagram that indicates defective position with defective part Identification mark according to its check result, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the defective content that demonstrates specified defective position with literal, simultaneously this literal is shown with corresponding to the defective part Identification mark at specified defective position with the interconnective above-mentioned arrangenent diagram of extension line.
5. check result output unit, with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to its check result, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate and demonstrate the above-mentioned arrangenent diagram that underproof historical record takes place in each device installation position.
6. check result output unit, check result according to the device installation position of the substrate that is obtained by base board checking device generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the above-mentioned arrangenent diagram of pointing out to show defective position with the defective part Identification mark different with defective content corresponding shape.
7. check result output unit according to claim 6 is characterized in that: can suitably change above-mentioned defective part Identification mark.
8. check result output unit, check result according to the device installation position of the substrate that is obtained by base board checking device generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the enlarged drawing of the appointed area that shows above-mentioned arrangenent diagram, demonstrate the above-mentioned arrangenent diagram of regional location shown in this enlarged drawing simultaneously.
9. check result output unit, check result according to the device installation position of the substrate that is obtained by base board checking device generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the defective content that demonstrates specified defective position with literal, simultaneously this literal is shown with corresponding to the defective part Identification mark at specified defective position with the interconnective above-mentioned arrangenent diagram of extension line.
10. check result output unit, check result according to the device installation position of the substrate that is obtained by base board checking device generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate and demonstrate the above-mentioned arrangenent diagram that underproof historical record takes place in each device installation position.
11. base plate inspection system, it is made of base board checking device and check result output unit, base board checking device with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, the check result output unit generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to the check result of this base board checking device, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the above-mentioned arrangenent diagram of pointing out to show defective position with the defective part Identification mark different with defective content corresponding shape.
12. base plate inspection system according to claim 11 is characterized in that: can suitably change above-mentioned defective part Identification mark.
13. base plate inspection system, it is made of base board checking device and check result output unit, base board checking device with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, the check result output unit generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to the check result of this base board checking device, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the enlarged drawing of the appointed area that shows above-mentioned arrangenent diagram, demonstrate the above-mentioned arrangenent diagram of regional location shown in this enlarged drawing simultaneously.
14. base plate inspection system, it is made of base board checking device and check result output unit, base board checking device with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, the check result output unit generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to the check result of this base board checking device, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate the defective content that demonstrates specified defective position with literal, simultaneously this literal is shown with corresponding to the defective part Identification mark at specified defective position with the interconnective above-mentioned arrangenent diagram of extension line.
15. base plate inspection system, it is made of base board checking device and check result output unit, base board checking device with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, the check result output unit generates the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to the check result of this base board checking device, and with this arrangenent diagram output, this check result output unit is characterised in that: have the arrangenent diagram generating apparatus, be used to generate and demonstrate the above-mentioned arrangenent diagram that underproof historical record takes place in each device installation position.
16. a check result output intent is characterized in that: generate to have that the difform defective part Identification mark corresponding with defective content points out to show the device installation position arrangenent diagram at defective position and with this arrangenent diagram output according to check result to the device installation position of substrate.
17. check result output intent according to claim 16 is characterized in that: can suitably change above-mentioned defective part Identification mark.
18. check result output intent, it is characterized in that: generate the device installation position arrangenent diagram of pointing out to show defective position with defective part Identification mark according to check result to the device installation position of substrate, on this arrangenent diagram, the enlarged drawing that shows specified zone, demonstrate the shown regional location of this enlarged drawing simultaneously, and will demonstrate the arrangenent diagram output of regional location shown in this enlarged drawing.
19. check result output intent, it is characterized in that: generate the device installation position arrangenent diagram of pointing out to show defective position with defective part Identification mark according to check result to the device installation position of substrate, demonstrate the defective content at defective position specified on this arrangenent diagram, this literal shown with defective part Identification mark and interconnect simultaneously with literal, and output should defective content and the interconnective arrangenent diagram of defective part Identification mark with extension line with extension line corresponding to indicated defective position.
20. check result output intent, it is characterized in that: generate the device installation position arrangenent diagram of pointing out to show defective position with defective part Identification mark according to check result to the device installation position of substrate, show that on this arrangenent diagram underproof historical record takes place in each device installation position, and output demonstrates the arrangenent diagram of the historical record of this defective generation.
21. substrate inspecting method, it is characterized in that: with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate to have the difform defective part Identification mark corresponding according to its check result and to indicate the device installation position arrangenent diagram of position, defective position with defective content, and with this arrangenent diagram output.
22. substrate inspecting method according to claim 21 is characterized in that: can suitably change above-mentioned defective part Identification mark.
23. substrate inspecting method, it is characterized in that: with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to its check result, on this arrangenent diagram, the enlarged drawing that shows specified zone, demonstrate the shown regional location of this enlarged drawing simultaneously, and will demonstrate the arrangenent diagram output of regional location shown in this enlarged drawing.
24. substrate inspecting method, it is characterized in that: with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to its check result, demonstrate the defective content at defective position specified on this arrangenent diagram with literal, simultaneously this literal is shown with defective part Identification mark to interconnect, and output should defective content and the interconnective arrangenent diagram of defective part Identification mark with extension line with extension line corresponding to indicated defective position.
25. substrate inspecting method, it is characterized in that: with rayed on substrate, receive its reflected light and the device installation position on the substrate is checked according to resulting light-receiving data, generate the device installation position arrangenent diagram that indicates position, defective position with defective part Identification mark according to its check result, show that on this arrangenent diagram underproof historical record takes place in each device installation position, and output demonstrates the arrangenent diagram of the historical record of this defective generation.
CN96105130A 1995-04-20 1996-04-19 Check result output device and method and placode checking system and method Expired - Lifetime CN1059740C (en)

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JP117639/95 1995-04-20
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JP11763995A JP3216033B2 (en) 1995-04-20 1995-04-20 Inspection result output device, inspection result output method, substrate inspection system using this inspection result output device, and substrate inspection method using this inspection result output method

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Also Published As

Publication number Publication date
CN1282865A (en) 2001-02-07
KR960040114A (en) 1996-11-25
KR100205733B1 (en) 1999-07-01
TW304230B (en) 1997-05-01
CN1156673C (en) 2004-07-07
JP3216033B2 (en) 2001-10-09
JPH08292018A (en) 1996-11-05
CN1059740C (en) 2000-12-20

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