CN1825100A - Printed circuit board inspecting method and apparatus inspection logic setting method and apparatus - Google Patents

Abstract

Provided is a technique capable of inspecting quickly a shift of an IC component, with a small storage capacity. This method/device stores preliminarily an inspection logic including a color condition for specifying a color appearing in a component body of an inspection objective component, and a determination condition, the inspection objective component is irradiated at different incident angles with a plurality of colors of lights, a reflected lights therefrom are imaged to acquire an inspection image including at least one part of an edge of the component body of the inspection objective component, a component body area satisfying the color condition is extracted from the inspection image by image processing, using the color condition, the edge in the component body area is specified by the image processing, a value of a feature amount of the edge is compared with the determination condition to determine whether the inspection objective component is brought into a normal posture or not.

Description

Substrate inspecting method and device and inspection logic establishing method and device

Technical field

The present invention relates to check the technology of the dislocation of IC (integrated circuit, the integrated circuit) base part that is installed on the substrate, and the technology that is used for generating the employed inspection logic of inspection.

Background technology

In the past, proposed to be used to check the base board checking device of the scolding tin installation quality of the printed base plate that a plurality of electronic units have been installed.In this printed base plate, " shape of the scolding tin projection when welding electrode part of electronic unit and pad " is called leg, but sometimes because the electrode part of electronic unit wetting, seem and be formed with leg, in fact electronic unit does not contact with leg.Thereby, in order to check the shape that very need not catch the leg that constitutes by free curve exactly of welding.

But, in existing base board checking device,, therefore be difficult to the 3D shape of leg is carried out graphical analysis because light source has used monochromatic single illumination.Therefore, can't judge the good of welding, be not to be to stand practical test as base board checking device.

In order to solve such problem, the applicant has proposed the base board checking device (with reference to patent documentation 1) of mode shown in Figure 16.This mode is called three-color light source color and strengthens mode (or abbreviating color enhancing mode as), is by checking object by the light source irradiation of multiple color, obtaining the technology of the 3D shape of leg as pseudo color image.

The practicability of the self-verifying of printed base plate can be described as in fact after this color strengthens the appearance of mode technology.Particularly the electronic unit miniaturization at present, be difficult to differentiate the leg shape by visual, we can say if there is not color to strengthen the base board checking device of mode, just can't realize inspecting substrate.

As shown in figure 16, the base board checking device that color strengthens mode has: light-projecting portion 105, and it shines primaries with different incident angles to the inspection object on the substrate 110 107; And image pickup part 106, it is taken the reflected light that comes self-check object 107.This light-projecting portion 105 by have different diameters and based on from the control signal of control and treatment portion and three circular light sources 111,112,113 that shine red light, green light, blue light simultaneously constitute.Each light source 111,112,113 is being checked just going up on the position center-aligned and being configured in from checking that object 107 is seen as on the pairing direction in the different elevations angle of object 107.

By the light-projecting portion 105 examination objects (leg) of this structure 107 o'clock, the light of the color corresponding with the surface slope of checking object 107 incides in the image pickup part 106.Thereby, as shown in figure 17, when the welding of electronic unit is good/during element falling/during the state of scolding tin deficiency etc., according to the shape of leg, on the colour image of photographed images, present evident difference.Thus, can easily carry out graphical analysis to the 3D shape of leg, can judge exactly electronic unit have or not or weld good not.In addition, for example cause also can detecting under the state of failure welding in dislocation owing to parts.

[patent documentation 1] Japanese kokai publication hei 2-78937 communique

[patent documentation 2] Japanese kokai publication hei 9-145633 communique

But,, have following distinctive problem about the dislocation inspection of IC base part.In addition, the parts that will arrange a plurality of lead-in wires here on each limit on four limits around the relative both sides of article body or the article body are called " IC base part ".This parts are compared with so-called angle chip part or transistor component, have area very big and the width of lead-in wire and the very narrow feature of arrangement pitch of lead-in wire of article body.

As shown in figure 19, in angle chip part 100 or transistor component,, therefore can enlarge the area of pad (applying the part of scolding tin) 101 because lead-in wire leaves surplus at interval.Thereby scolding tin 102 spreads on pad 101, and in non-defective unit (parts are installed with correct position and/or angle) and substandard products (production part dislocation), the 3D shape of leg is obviously different.Thereby, even by paying close attention to the existing substrate inspecting method of the colour image that the solder sections branch presents, also can the decision means dislocation have or not.

But, under the situation of IC base part 110, must conform at interval with lead-in wire and make pad 111 become elongated shape.Therefore, no matter non-defective unit or substandard products, scolding tin 112 all presents the shape of projection on pad 111 owing to surface tension.Thereby, in the shape of leg, be the difference that occurs non-defective unit and substandard products in the colour image of scolding tin part hardly, only it is observed decision means dislocation exactly.

As a kind of method that addresses this problem, considered following method: should whether not present article body color (for example, the color of substrate) in addition on the zone of arrangement components main body by inquiry, thus the decision means dislocation.Though this method diagonal angle chip part or transistor-like parts are effective, in the inspection of IC base part, there is following technology drawback.As mentioned above, for the IC base part, because the area of article body is very big, therefore in the time will overhauling the color of the All Ranges of answering the arrangement components main body, the processing time increases, and is difficult to realize real-time inspecting substrate.In addition because must handle for the image in the whole zone of answering the arrangement components main body, record, so the capacity of working storage and image memory device becomes huge, the result causes the cost rising of device.

Summary of the invention

Therefore, be to provide can be at high speed and check the technology of the dislocation of IC base part with less memory capacity for first purpose of the present invention.

In addition, strengthen in the base board checking device of mode at color, preestablish the color condition of the color in the zone of indicating to pay close attention to, from check image, extract the zone of satisfying color condition, the judgement that the various characteristic quantities (for example, area or length) that have based on this zone that extracts are very denied.Inspection for the parts dislocation also is identical.Thereby, need before the inspection of reality, set out the employed color condition of inspection, be used to Rule of judgment of distinguishing non-defective unit and substandard products etc.This color condition and Rule of judgment become the parameter of checking logic.Setting, the adjusting that generally will check logic are called training (teaching).

In order to improve the inspection precision, importantly: color condition is set between the characteristic quantity shown in characteristic quantity shown in the non-defective unit and the substandard products, shows remarkable and clear and definite difference.That is, precision is checked in the direct influence of quality that we can say the training of color condition.

Therefore, as shown in figure 18, the applicant has proposed to be used for to support the instrument (with reference to patent documentation 2) that the color condition of color enhancing mode is set.By this instrument, can set a plurality of color characteristic amounts (ROP of comparing of all kinds, the GOP of red, green, blue, BOP and brightness data BRT) higher limit and lower limit separately, as color condition.In the input picture of Figure 18, be provided with the configuration part 127 of the setting value that is used to import color condition and be used to show the setting range display part 128 of the Color Range that extracts according to each color condition that sets.Demonstrate the toning Figure 134 that is illustrated in all colors that obtain under the predetermined brightness in this setting range display part 128, when the operator sets higher limit, the lower limit of each face condition, on toning Figure 134, show the affirmation zone 135 that surrounds the color that extracts according to the color condition that sets.In addition, if press binaryzation the Show Button 129, then demonstrate extraction result based on the current color condition according to bianry image.By this instrument, the operator can carry out appending of color condition, till obtaining suitable extraction result when observing affirmation zone 135 or bianry image.

But, even utilized above-mentioned color condition to set support facility, experience and the intuition that depends on the operator to a great extent because of appending of color condition eventually, and can't avoid setting wrong generation.And produce following problem: no matter how outstanding operator must repeat to trial property to regulate, thereby becomes poor efficiency, needs a lot of labour and adjusting time.

In addition, not only color condition for being used to judge the Rule of judgment very denying, also depends on operator's intuition and experience in the past, and poor efficiency therefore becomes.

Shorten under the manufacturing environment that becomes more and more fierce the minimizing of strong hope training operation, the further robotization of strengthening training at life-span of goods.

Therefore, second purpose of the present invention is to provide to be obtained at high speed and appropriate parameter, color condition, the Rule of judgment of employed inspection logic when checking the dislocation of IC base part with less memory capacity, and can generate the technology of checking logic automatically.

First mode of the present invention is a substrate inspecting method, be installed in the dislocation of the IC base part on the substrate by the base board checking device inspection, may further comprise the steps: logic is checked in storage in advance, and this inspection logic comprises the color condition and the Rule of judgment of the color that article body presented of regulation inspection object parts; Shine the light of multiple color with different incident angles to checking the object parts; Its reflected light is taken, thereby obtained the check image of at least a portion at the edge of the article body that comprises described inspection object parts; Use described color condition,, from described check image, extract the article body zone of satisfying described color condition by Flame Image Process; Determine the edge in described article body zone by Flame Image Process; Compare by value and described Rule of judgment, judge whether described inspection object parts are correct position and/or angle the characteristic quantity at described edge.

Second mode of the present invention is a base board checking device, inspection is installed in the dislocation of the IC base part on the substrate, have: storage unit, logic is checked in its storage, this inspection logic comprises the color condition and the Rule of judgment of the color that article body presented of regulation inspection object parts; The light projector unit, it shines the light of multiple color with different incident angles to checking the object parts; Image unit, it is taken above-mentioned reflection of light light, thereby obtains the check image of at least a portion at the edge of the article body that comprises described inspection object parts; The extracted region unit, it uses described color condition, by Flame Image Process, extracts the article body zone of satisfying described color condition from described check image; The edge determining unit, it determines the edge in described article body zone by Flame Image Process; And judging unit, it compares by value and the described Rule of judgment to the characteristic quantity at described edge, judges whether described inspection object parts are correct position and/or angle.

Color condition is used for the color that the predetermined member main body presented (scope), therefore use the article body zone that this color condition extracts from check image should be roughly consistent, and the edge in article body zone can be regarded the edge of article body as with the profile of article body in the check image.And if investigate the value (for example, position or angle or position and angle) of the characteristic quantity at this edge, then whether the decision means main body installs with correct position and/or angle accurately.

According to first, second mode of the present invention, from check image, extract the article body zone satisfy color condition, and the value of the characteristic quantity at edge that should the zone compares with Rule of judgment and get final product, so can carry out simply and the processing of high speed.And, image that needn't processing element integral body, and the check image of only handling at least a portion at the edge that comprises article body gets final product, so can suppress the use amount of working storage or image memory device.

Third Way of the present invention is the method that is created on the inspection logic of using in the base board checking device.Specifically, carry out following steps by signal conditioning package: according to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine article body part and with the part of article body adjacency; For one or more color characteristic amounts, with each pixel of the part of article body as object-point, will with each pixel of the part of article body adjacency as elimination point, the frequency of obtaining the value of described a plurality of object-point and elimination point color characteristic amount separately distributes; Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best; And the scope of the type of described one or more color characteristic amounts and value (below, the type of color characteristic amount and the scope of value thereof are called " color gamut ") is set at described color condition.

In addition, cubic formula of the present invention is the device that is created on the parameter of using in the aforesaid substrate inspection, have: according to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine article body part and with the unit of the part of article body adjacency; For one or more color characteristic amounts, with each pixel of the part of article body as object-point, will with each pixel of the part of article body adjacency as elimination point, obtain the unit that the frequency of the value of described a plurality of object-point and elimination point color characteristic amount separately distributes; Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the unit of scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best; And the unit that the scope of the type of described one or more color characteristic amounts and value (color gamut) is set at described color condition.

Here, employed color characteristic amount can be used the color characteristic amount that constitutes color space during the search of color gamut was handled.In addition, not only can select to constitute the color characteristic amount of single color space, also can from different color spaces, select a plurality of color characteristic amounts.As color space, for example, can use color space arbitrarily such as RGB, HSV, HSL, CMY, YCC, CIEXYZ, CIELAB, CIELUV.As the color characteristic amount, for example, can use L*, a* among values X, Y in the intensity, brightness, saturation degree, form and aspect, CIEXYZ of colors such as indigo plant, red, green, blue are green, pinkish red, Huang, Z, colourity x, y, z, the CIELAB, L*, u among b*, the CIELUV (u '), v (v ') etc.

Can pre-determine the type of color characteristic amount.For example, learning that in advance the part of tending in article body comprises a lot and under the situation of the color that the part with the article body adjacency comprises hardly, also can adopt the one or more characteristic quantities (intensity of color, brightness etc.) relevant with this color as the employed color characteristic amount of color condition.By such formation, can alleviate the reduction of checking precision and cut down treatment capacity.

In addition, preferably dynamically determine the employed color characteristic amount of color condition.For example, also can may further comprise the steps: generate a plurality of color characteristic amount candidates that constitute by one or more color characteristic amounts; Respectively for described a plurality of color characteristic amount candidates, obtain the scope and the degree of separation of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best, select the color characteristic amount candidate who adopts as described color condition by this degree of separation relatively; The type of the one or more color characteristic amounts that constitute the described color characteristic amount candidate who selects and the scope of value are set at described color condition.In addition, the color characteristic amount candidate who is adopted can be one or more.By such formation, can automatically set the part that shows article body significantly and and the part of article body adjacency between the color condition (color characteristic amount) of difference, realize checking the further raising of precision.

When the generation of Rule of judgment, can may further comprise the steps: a plurality of non-defective unit images that obtain from the IC base part of installing with correct position and/or angle is taken and the IC base part that has produced dislocation taken and a plurality of substandard products images of obtaining, extract the pixel region that satisfies described color condition respectively; Determine the edge of each pixel region by Flame Image Process; The frequency of value of obtaining the characteristic quantity at described edge distributes; Frequency based on the value of described characteristic quantity distributes, and obtains the scope of the value of the characteristic quantity that the value of characteristic quantity at the edge of the value of characteristic quantity at edge of the pixel region that will extract from described non-defective unit image and the pixel region that extracts from described substandard products image separates best; The scope of the type of described characteristic quantity and value is set at described Rule of judgment.

Here, as the type of characteristic quantity, can adopt position or angle or the position and the angle at edge rightly.Be to adopt position, angle or this two characteristic quantity both sides at edge the same with the situation of color characteristic amount, can pre-determine also and can determine automatically by system as Rule of judgment.

According to this structure, can automatically generate the Rule of judgment that has or not of the dislocation that can judge the IC base part accurately according to training image (non-defective unit image and substandard products image).The parameter of the inspection logic of so automatic generation (color condition and Rule of judgment) is stored in the storage unit of base board checking device, offers the dislocation inspection of IC base part.

The 5th mode of the present invention is a substrate inspecting method, be installed in the dislocation of the IC base part on the substrate by the base board checking device inspection, may further comprise the steps: storage in advance checks that logic, this inspections logic comprise that regulation is arranged in the color condition and the Rule of judgment of the color that the base end part branch of the lead-in wire on the edge of article body of inspection object parts presents; Shine the light of multiple color with different incident angles to checking the object parts; Its reflected light is taken, thereby obtained at least a portion at edge of the article body that comprises described inspection object parts and the check image that is arranged in a plurality of lead-in wires on this edge; Use described color condition,, from described check image, extract a plurality of lead-in wires zone of satisfying described color condition by Flame Image Process; Determine to connect the straight line in described a plurality of lead-in wires zone by Flame Image Process; Compare by value and described Rule of judgment, judge whether described inspection object parts are correct position and/or angle the characteristic quantity of described straight line.

The 6th mode of the present invention is a base board checking device, inspection is installed in the dislocation of the IC base part on the substrate, have: storage unit, its storage checks that logic, this inspections logic comprise that regulation is arranged in the color condition and the Rule of judgment of the color that the base end part branch of the lead-in wire on the edge of article body of inspection object parts presents; The light projector unit, it shines the light of multiple color with different incident angles to checking the object parts; Image unit, it is taken above-mentioned reflection of light light, thereby obtains at least a portion at edge of the article body that comprises described inspection object parts and the check image that is arranged in a plurality of lead-in wires on this edge; The extracted region unit, it uses described color condition, by Flame Image Process, extracts a plurality of lead-in wires zone of satisfying described color condition from described check image; The straight line determining unit, it determines to connect the straight line in described a plurality of lead-in wires zone by Flame Image Process; And judging unit, it compares by value and the described Rule of judgment to the characteristic quantity of described straight line, judges whether described inspection object parts are correct position and/or angle.

Color condition is used for the color that the base end part branch of regulation lead-in wire presents (scope), uses the lead-in wire zone that this condition extracts from check image should be roughly consistent with the cardinal extremity part of each lead-in wire in the check image.Because each lead-in wire is arranged along the edge of article body, can regard the straight line parallel as with the edge of article body so connect the straight line in a plurality of lead-in wires zone.So if investigate the value (for example, position or angle or position and angle) of the characteristic quantity of this straight line, then whether the decision means main body installs with correct position and/or angle accurately.

According to the 5th, the 6th mode of the present invention, from check image, extract a plurality of lead-in wires zone satisfy color condition, and the value of the characteristic quantity that connects these regional straight lines compared with Rule of judgment get final product, so can carry out simply and the processing of high speed.And, needn't all images of processing element, get final product and the check image of a plurality of lead-in wires of arranging at least a portion at the edge that comprises article body and this edge handled, so can suppress the use amount of working storage or image memory device.

The 7th mode of the present invention is the method that is created on the parameter of using in the base board checking device of the 6th mode.Specifically, may further comprise the steps: according to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine lead-in wire the cardinal extremity part and with the part of the cardinal extremity part adjacency of lead-in wire; For one or more color characteristic amounts, with each pixel of the cardinal extremity part of lead-in wire as object-point, will with each pixel of part of the cardinal extremity part adjacency of lead-in wire as elimination point, the frequency of obtaining the value of described a plurality of object-point and elimination point color characteristic amount separately distributes; Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best; The scope of the type of described one or more color characteristic amounts and value (color gamut) is set at described color condition.

In addition, all directions of the present invention formula is the device that is created on the parameter of using in the base board checking device of the 6th mode, have: according to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine lead-in wire the cardinal extremity part and with the unit of the part of the cardinal extremity part adjacency of lead-in wire; For one or more color characteristic amounts, with each pixel of the cardinal extremity part of lead-in wire as object-point, will with each pixel of part of the cardinal extremity part adjacency of lead-in wire as elimination point, obtain the unit that the frequency of the value of described a plurality of object-point and elimination point color characteristic amount separately distributes; Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the unit of scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best; And, the scope of the type of described one or more color characteristic amounts and value (color gamut) is set at the unit of described color condition.

Also can adopt above-mentioned shades of colour characteristic quantity for employed color characteristic amount in the search processing of this color gamut.

Can pre-determine the type of color characteristic amount.For example, learning that in advance the base end part branch that tends at lead-in wire comprises a lot and under the situation of the color that the part with the cardinal extremity part adjacency of lead-in wire comprises hardly, also can adopt the one or more characteristic quantities (intensity of color, brightness etc.) relevant with this color as the employed color characteristic amount of color condition.By such formation, can alleviate the reduction of checking precision and cut down treatment capacity.

In addition, also preferably dynamically determine the employed color characteristic amount of color condition.For example, also can may further comprise the steps: generate a plurality of color characteristic amount candidates that constitute by one or more color characteristic amounts; Respectively for described a plurality of color characteristic amount candidates, obtain the scope and the degree of separation of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best, select the color characteristic amount candidate who adopts as described color condition by this degree of separation relatively; The type of the one or more color characteristic amounts that constitute the described color characteristic amount candidate who selects and the scope of value are set at described color condition.In addition, the color characteristic amount candidate who is adopted can be one or more.By such formation, automatically set as present significantly lead-in wire the cardinal extremity part and and the part of the cardinal extremity part adjacency of lead-in wire between the color condition (color characteristic amount) of difference, and can realize checking the further raising of precision.

When the generation of Rule of judgment, also can may further comprise the steps: a plurality of non-defective unit images that obtain from the IC base part of installing with correct position and/or angle is taken and the IC base part that has produced dislocation taken and extract a plurality of pixel regions that satisfy described color condition a plurality of substandard products images of obtaining respectively; Determine to connect the straight line of described a plurality of pixel regions by Flame Image Process; The frequency of value of obtaining the characteristic quantity of described straight line distributes; Frequency based on the value of described characteristic quantity distributes, and obtains the scope of the value of the characteristic quantity that value and the value of the characteristic quantity of the straight line that is connected a plurality of pixel regions that extract from described substandard products image of characteristic quantity that connects the straight line of a plurality of pixel regions that extract from described non-defective unit image separated best; The scope of the type of described characteristic quantity and value is set at described Rule of judgment.

Here,, can adopt the position or the angle of straight line rightly as the type of characteristic quantity, or position and angle.Be to adopt position, angle or this two characteristic quantity both sides of straight line the same with the situation of color characteristic amount, can pre-determine, also can come automatically to determine by system as Rule of judgment.

According to this structure, can automatically generate the Rule of judgment that has or not of the dislocation that can judge the IC base part accurately according to training image (non-defective unit image and substandard products image).The parameter of the inspection logic of so automatic generation (color condition and Rule of judgment) is stored in the storage unit of base board checking device, offers the dislocation inspection of IC base part.

According to the present invention, can be at high speed and check the dislocation of IC base part with less memory capacity.In addition,, can automatically generate, can realize training alleviating of operation, and then realize the robotization of training in order to check the dislocation of IC base part and the inspection logic used at high speed and with less memory capacity according to the present invention.

Description of drawings

Fig. 1 is the figure of hardware configuration of the base plate inspection system of expression embodiments of the present invention.

Fig. 2 is the figure of the functional structure of expression base board checking device.

Fig. 3 is the process flow diagram of the flow process handled of the inspecting substrate of expression first embodiment.

Fig. 4 is the figure that the scope of employed check image is checked in expression.

Fig. 5 is the binary conversion treatment and the definite figure that handles in edge of the check image of expression first embodiment.

Fig. 6 is the figure of functional structure of the inspection logic setting device of expression first embodiment.

Fig. 7 is the process flow diagram of flow process of the inspection logic setting device of expression first embodiment.

Fig. 8 is the figure of definite processing of expression article body part.

Fig. 9 is the figure of an example of expression two-dimensional color distribution plan.

Figure 10 is the figure that the search of expression color gamut is handled.

Figure 11 is the figure of an example of expression distribution plan.

Figure 12 is the process flow diagram of the flow process handled of the inspecting substrate of expression second embodiment.

Figure 13 is the binary conversion treatment and the definite figure that handles in edge of the check image of expression second embodiment.

Figure 14 is the process flow diagram that the inspection logic of expression second embodiment is set the flow process of handling.

Figure 15 is the figure of cardinal extremity definite processing partly of expression lead-in wire.

Figure 16 is the figure of the structure of the expression color base board checking device that strengthens mode.

Figure 17 is the figure of an example of the colour image that presented in the photographed images of expression.

Figure 18 is the figure of the setting support facility of expression color condition.

Figure 19 is the figure of the peculiar problem of expression IC base part.

Embodiment

Followingly exemplarily describe preferred implementation of the present invention in detail with reference to accompanying drawing.

＜the first embodiment 〉

(structure of base plate inspection system)

Fig. 1 represents the hardware configuration of the base plate inspection system of embodiments of the present invention.

Base plate inspection system by carry out base board checking device 1 that inspecting substrate handles and the inspecting substrate that is created on this base board checking device 1 automatically handle in the inspection logic setting device 2 of inspection logic of use constitute.Base board checking device 1 and inspection logic setting device 2 can carry out the handing-over of the electronic data of image or parameter etc. via the recording medium of wired or wireless network or MO or DVD etc.In addition, in the present embodiment, base board checking device 1 and check logic setting device 2 for dividing body structure, but also can in the base board checking device main body, incorporate the function of checking the logic setting device into and become one structure.

(structure of base board checking device)

Base board checking device 1 is to take, use captured image to come the device of the installation quality (welded condition etc.) of the installing component 21 on the self-verifying substrate 20 to substrate irradiation colorama and to it.Base board checking device 1 has substantially: X worktable 22, Y worktable 23, light-projecting portion 24, image pickup part 25 and control and treatment portion 26.

X worktable 22 and Y worktable 23 have respectively based on from the control signal of control and treatment portion 26 and the motor (not shown) of working.By the driving of these motors, X worktable 22 makes light-projecting portion 24 and image pickup part 25 move to X-direction, and Y worktable 23 makes the forwarder 27 of supporting substrate 20 move to Y direction.

Light-projecting portion 24 is made of three circular light sources 28,29,30, and described three circular light sources have different diameters, and based on the control signal from control and treatment portion 26, shine red light, green light, blue light simultaneously.Each light source 28,29,30 is seen as on the pairing direction in the different elevations angle in just going up on the position center-aligned and being configured in from observation position of observation position.By such configuration, light-projecting portion 24 is with the light (in the present embodiment be R, G, B three looks) of different incident angles to the multiple color of 21 irradiations of the installing component on the substrate 20.

Image pickup part 25 is a color camera, observation position just go up the position towards below the location.Thus, take the reflected light of substrate surfaces, offer control and treatment portion 26 after being converted to trichromatic color signal R, G, B by image pickup part 25.

Control and treatment portion 26 is made of following part: A/D converter section 33, image processing part 34, check logical storage portion 35, judging part 36, shooting controller 31, XY worktable controller 37, storer 38, control part (CPU) 39, storage part 32, input part 40, display part 41, printer 42 and communication I/F 43 etc.

A/D converter section 33 is inputs from color signal R, G, the B of image pickup part 25 and is converted to the circuit of digital signal.The shading image data of the digital quantity of each form and aspect are transferred in the image data storage zone in the storer 38.

Shooting controller 31 is the circuit with interface of connecting control part 39 and light-projecting portion 24 and image pickup part 25 etc., output based on control part 39, regulate the light quantity of each light source 28,29,30 of light-projecting portion 24, or keep the control of mutual balance etc. of each form and aspect light output of image pickup part 25.

XY worktable control part 37 is the circuit with interface of connecting control part 39 and X worktable 22 and Y worktable 23 etc., based on the output of control part 39, and the driving of control X worktable 22 and Y worktable 23.

Check that logical storage portion 35 is storage parts that employed inspection logic is handled in the memory substrate inspection.Can check that by base board checking device 1 the multiple inspection of dislocation inspection etc. of the dislocation of the leg inspection of scolding tin shape or inspection part handles.Check that logic prepares at every kind of inspect-type, extract the color condition of the colour image of being scheduled to (pixel region) and the formations such as Rule of judgment of very denying that are used to judge this colour image by the area condition of the inspection object range (inspection area) that is used for specified image, the image that is used in the inspection area.Area condition be for example " marginal position of the article body from position component and/or angle when correct on direction perpendicular to the edge ± 20 pixels, along the scope of 80 pixels on the direction at edge " condition of the position, size, scope etc. of the inspection area the specified image in this wise.Color condition be for example " brightness of pixel is between 150 to 250; and the intensity of red signal is between 150 to 180 " condition of the scope of the value of the color characteristic amount intensity of brightness and red signal (in this example, for) paid close attention to of regulation and this color characteristic amount in this wise.Rule of judgment is " angle at detected edge is that 5 degree or its are following " condition of the scope (in this example, being higher limit) of the value of the characteristic quantity paid close attention to of the regulation angle of edge (in this example, for) and this characteristic quantity in this wise for example.

Image processing part 34 is circuit of carrying out following processing: extract by the processing of the inspection area of area condition regulation the image that obtains from the parts on the substrate 20 21 are taken, extract the processing in the zone of satisfying color condition and the processing of calculating the value of the employed characteristic quantity of Rule of judgment according to the zone of being extracted from the image (check image) of inspection area.Judging part 36 is values of carry out receiving the characteristic quantity that is calculated by image processing part 34, whether satisfies the circuit of the processing very denying that Rule of judgment comes the installment state of decision means according to the value of this characteristic quantity.

Input part 40 is made of required keyboard such as input operation information or data relevant with substrate 20 or mouse etc.The data of being imported are provided for control part 39.Communication I/F 43 is used for carrying out the transmitting-receiving of data between inspection logic setting device 2 or other external device (ED) etc.

Control part (CPU) the 39th is carried out the circuit of various calculation process or control and treatment.Storage part 32 is the memory storages that are made of hard disk or storer, except the program of storage by control part 39 execution, goes back CAD (Computer Aided Design, the computer-aided design (CAD)) information of memory substrate, the judged result that inspecting substrate is handled etc.

The functional structure of base board checking device 1 shown in Figure 2.Base board checking device 1 has: indication information is accepted function 10, substrate and is transported into function 11, CAD information and reads in function 12, worktable operating function 13, camera function 14, check that logic reads in function 15, audit function 16, judged result write-in functions 17 and substrate and transport function 18.Control part 39 is controlled above-mentioned hardware according to the program that is stored in the storage part 32, thereby realizes these functions.In addition, be provided with the CAD information storage part 32a of storage CAD information and the judged result storage part 32b of storage judged result in the inside of storage part 32.

(inspecting substrate processing)

Then, the inspecting substrate in the narration aforesaid substrate testing fixture 1 is handled.In the present embodiment, the position at the edge that is conceived to article body or the method that angle is checked the dislocation of IC base part are described.

Fig. 3 is the process flow diagram that the flow process of processing is checked in expression.

Indication information is accepted function 10 and is in waiting status, up to indication information (the step S100 that has imported indication execution inspecting substrate; Not, step S101).Operation by input part 40, or by communication I/F 43 when external unit has been imported indication information, indication information is accepted function 10 and is sent indication information to substrate and be transported into function 11, CAD information and read in function 12 and check that logic reads in function 15 (step S100; Be).In this indication information, contain the information (model etc.) that becomes the substrate of checking object.

In addition, substrate is transported into function 11 based on indication information, being transported into portion from printed base plate will become the substrate 20 of checking object and be transported into (step S102) on the forwarder 27, and CAD information is read in function 12 and read in the CAD information (step S103) corresponding with the model of substrate from CAD information storage part 32a.The size, the shape that include substrate 20 in this CAD information also comprise the information of the type that is installed in the parts on the substrate 20, quantity, installation site separately.

The inspection logic is read in the type of function 15 according to the parts of being obtained by described CAD information, reads in the inspection logic (step S104) of the dislocation inspection usefulness of IC base part from check logical storage portion 35.Inclusion region condition, color condition and Rule of judgment in checking logic.

Then, worktable operating function 13 obtains information such as the size, shape, configuration of components of substrate 20 according to the CAD information of being read in, and operate X worktable 22 and Y worktable 23 by XY worktable control part 37, make to be installed in a plurality of parts 21 on the substrate 20 align with observation position (camera position) successively (step S105).

On the other hand, camera function 14 makes three light sources 28,29,30 of light-projecting portion 24 luminous by shooting controller 31, simultaneously red, green, the blue light of irradiation on substrate 20.In addition, camera function 14 is synchronously taken (step S106) to the parts on the substrate 20 21 by shooting controller 31 control image pickup parts 25 with the operation of worktable 22,23.The image that photographs is taken in the storer 38.

Then, audit function 16 extracts check image (step S107) by image processing part 34 from photographed images.Check image is the zone by the area condition regulation of checking logic.In the present embodiment, as shown in Figure 4, check image is extracted as at least a portion at the edge that comprises the article body 90 of checking the object parts.That is, article body 90 is roughly rectangle, therefore around have the edge, but the edge on one side is included in the check image and gets final product at least.In addition, needn't in check image, comprise the integral body at this edge, and it is just much of that the part at edge only to occur.

Then, audit function 16 uses color condition with check image binaryzation (step S108) by image processing part 34.Color condition used herein is used for the scope of the color that the predetermined member main body presented.In other words, color condition can be described as difference (separation) color that article body presented and with the condition of the color that part presented of article body adjacency.The color that article body presented depends on material, surface configuration, color, surfaceness of article body etc.For example, in article body is under the situation of resin-encapsulated, light diffuse reflection on the surface of article body, therefore in image, show color roughly the same when shining white light (red black being arranged) as the original color of article body, general, surface in article body produces under the situation of direct reflection, presents in red, green, blue three colors any one in image.Certainly, also identical for the color that presents in part with the article body adjacency.Thereby,, select the type (form and aspect, brightness etc.) of the employed color characteristic amount of color condition according to the tendency of the color that presents in article body part or with the part of article body adjacency.The color condition of present embodiment is made of the lower limit of the intensity of red signal and the lower limit of the upper limit and brightness and four values of the upper limit.Its reason is: the inspection object parts of present embodiment are resin-encapsulated, in photographed images, present the low red colour system color of brightness in the part of article body.In addition, here, the intensity of red signal and any one party in the brightness are all got from 0 to 255 256 grades value.By binary conversion treatment, the pixel (satisfying the pixel of color condition) that is comprised in the color gamut by the color condition definition is converted to white pixel, and remaining pixel transitions is black pixel.

Fig. 5 represents non-defective unit (parts are installed with correct position and/or angle) and the check image of substandard products (production part dislocation) and their binaryzation result.By carrying out binaryzation according to color condition, the part of the article body in the check image 90 is extracted as the white pixel zone as can be known.Here the zone that will extract is called article body zone 91.

Then, audit function 16 is determined the edge 92 (step S109) of parts body region 91 by image processing part 34.Edge usual practice really gets final product as using existing image processing methods such as Hough conversion.Here, determined edge 92 can be regarded as the edge of article body 90.

And the position and the angle of audit function 16 edge calculation 92 are as the characteristic quantity (step S110) at edge 92.In the example of Fig. 5, position as edge 92, obtain from the limit of the left end of check image light, measure perpendicular to the direction on this limit to the edge 92 apart from d, as the angle at edge 92, obtain absolute value with respect to the angle of the vertical direction of check image | θ |.Its result of calculation is transmitted to judging part 36.

The Rule of judgment of the position at 36 pairs of edges that calculate 92 of judging part and angle and inspection logic compares (step S111).This Rule of judgment is the condition that regulation is considered as the scope of tram and/or angle (the not state of production part dislocation), for example, is made of the tolerable limit of the magnitude of misalignment of the position at edge or angle (higher limit or lower limit, perhaps they both).(step S111 under the situation in the scope that the position and the angle at edge 92 is in Rule of judgment; Be), be judged as with correct position and/or angle these parts (non-defective unit) (step S112) have been installed, (step S111 under the situation of the scope that the position or the angle at edge 92 exceeds Rule of judgment; ), be not judged as and on these parts, produced dislocation (substandard products) (step S113).

Judged result write-in functions 17 is written to judged result storage part 32b (step S114) with above-mentioned judged result with position ID (being used for determining the information of parts).

After all parts on the substrate 20 were checked, substrate transported function 18 and transports substrate 20 by the printed base plate portion of transporting, and finished inspecting substrate and handle (step S115).

Inspecting substrate according to above narration is handled, from check image, extract the article body zone of satisfying color condition, and the position at edge that should the zone and angle and Rule of judgment compare and get final product, so can simply and carry out the dislocation inspection of IC base part at high speed, accurately.And image that needn't processing element integral body gets final product and only handle its a part of image (check image), so also can suppress the use amount of working storage or image memory device.

In addition, in the present embodiment, judgment processing has been used the position and the angle at edge, but also can only utilize wherein any one characteristic quantity to judge.In addition, in the present embodiment, only pay close attention to an edge, if but identical judgment processing is implemented at all edges, the raising that then can realize judging precision and check reliability.

In addition, in order to realize there is not the substandard products omission and to cross inspection and judge precision, need to check according to checking object in advance that the color condition of logic and Rule of judgment are set at best value for the height below the allowable value.When the dislocation particularly stated is in realization checked, need color that separate parts main body exactly presented and with the color condition of the color that part presented of article body adjacency.In the present embodiment, the generation (training) of checking logic is automatically carried out by checking logic setting device 2.Below, be elaborated.

(checking the structure of logic setting device)

As shown in Figure 1, check that logic setting device 2 is made of general calculation machine (signal conditioning package), described computing machine has following part as basic hardware: CPU, storer, hard disk, I/O control part, communication I/F, display part, information input unit (keyboard or mouse) etc.

Fig. 6 represents the functional structure of the inspection logic setting device 2 of first embodiment.Check that logic setting device 2 has: indication information is accepted function 50, training image information and is read in function 51, part and determine that function 52, frequency computing function 53, color gamut function of search 54, binaryzation function 55, edge determine function 56, distribution plan systematic function 57, threshold calculations function 58, check logic systematic function 59 and check logic write-in functions 60.By the program in storer or the hard disk of being stored in being read into CPU and carrying out and realize these functions.

In addition, in hard disk, be provided with the training image information D B 61 of the employed training image information of storage training.Training image information is that the non-defective unit (installing with correct position and/or angle) or the training information (training data) of substandard products (producing dislocation) constitute by image and this image of expression of the IC base part that photographs by base board checking device 1.In order to improve the reliability of training, preferably respectively non-defective unit and substandard products are prepared tens～several thousand training image information.

(checking logic setting processing)

Check the flow process that the logic setting is handled along the flowchart text of Fig. 7.

Indication information is accepted function 50 and is in waiting status, up to indication information (the step S200 of the automatic generation of having imported indication inspection logic; Not, step S201).When information input unit has been imported indication information, indication information is accepted function 50 and is read in function 51 letter of transmittal breath (step S200 to training image information; Be).In this indication information, contain the information of the information of determining to become the training image information of checking the logic formation object, type that expression becomes the parts of checking object or model and the information of type that should detected defective etc.

Training image information is read in function 51 according to indication information, reads in the training image information (step S202) corresponding with the inspection logic that should make from training image information D B61.In training image information, comprise a plurality of non-defective unit images and a plurality of substandard products image.Given training information to these images.

(1) setting of color condition is handled

At first, only use the non-defective unit image to carry out the setting of color condition.Part is determined function 52 by Flame Image Process, according to definite " part of article body " (hereinafter referred to as " subject area ") of non-defective unit image and " with the part of article body adjacency " (hereinafter referred to as " exclusionary zone ") (step S203).Specifically, as shown in Figure 8, part determines that function 52 has the template that is made of article body window 70, pad window 71, lead-in wire window 72, amplify/dwindle template on one side, or the relative position between each window of staggering, on one side each window is alignd with article body, pad, lead-in wire in the image.For the alignment of window, for example use methods such as template matches to get final product.Then, part determines that function 52 is set at subject area (with reference to solid line hachure part) with the inboard of article body window 70, and the outside of article body window 70 is set at exclusionary zone (with reference to dotted line hachure part).Here, owing to only used the non-defective unit image, so can carry out the high-precision setting of subject area, exclusionary zone.

As mentioned above, in the dislocation of reality is checked, use color condition only to extract the part of article body.Making the color condition that is suitable for such processing most is equivalent to: the optimum solution of obtaining the color gamut of color of pixel that comprises subject area as much as possible and the color of pixel that almost can exclude exclusionary zone.

Therefore, at first, the frequency of value of obtaining all color of pixel characteristic quantities of subject area and exclusionary zone by frequency computing function 53 distribute (step S204).At this moment, the pixel of subject area is as " object-point ", and the pixel of exclusionary zone is carried out the calculating of frequency as " elimination point " with mutual diacritic form.Below, distribute for frequency visually is described, and use color distribution figure.Color distribution figure is at the frequency (number) that with the color characteristic amount that constitutes color space is the each point recording pixel in the hyperspace of axle.By color distribution figure, can grasp subject area, exclusionary zone color of pixel separately and distribute.In addition, the pixel of mentioning here is meant the minimum resolution of image.Owing to when a plurality of pixel concentrative implementation mappings are handled, colour mixture takes place, so preferred pin is handled to each pixel.

Generally, color space is the hyperspace that is made of the color characteristic amount more than three kinds or three kinds.Thereby, distribute in order to grasp color of pixel exactly, preferably two or more at least color characteristic amounts are calculated frequency.But, because the inscape and the color thereof that comprise in checking employed image are limited, therefore if purpose is the color condition of the color (elimination point) of the color (object-point) that is identified for the separating component main body and neighboring area thereof, then about form and aspect as long as consider that the color characteristic amount of a kind of color or two kinds of colors is just enough.Therefore, in the present embodiment, select redly to comprise form and aspect more and that comprise hardly in part, at each combination calculation frequency of brightness and red color intensity with the article body adjacency as tending to part in article body.

Fig. 9 represents an example of two-dimensional color distribution plan.The transverse axis of Fig. 9 is red intensity, and the longitudinal axis is the value of brightness, all with 0 to 255 256 grades numeric representation.About red intensity, the intensity that approaches 0 red signal more is weak more, promptly is illustrated in and does not contain red composition in the pixel, approaches 255 more and represents that red intensity is strong more.The value of brightness is big more represents that then lightness is strong more.The frequency of the pixel in white circle (zero) the indicated object zone among the figure is the point more than 1 or 1, and the frequency of the pixel of black triangle (▲) expression exclusionary zone is the point more than 1 or 1.In addition, Bai Quan and black triangle also have the data of frequency (number with this color pixel) except (red intensity, brightness).In addition, also identical for Figure 10 of back with Fig. 9, enclose in vain and black triangle is not represented each pixel, but keep the three-dimensional data of (red intensity, brightness, frequency).

Then, color gamut function of search 54 distributes based on object-point and elimination point frequency separately, the color gamut (step S205) that search separates the color distribution of the color distribution of object-point and elimination point best.In the present embodiment, for the simplification of algorithm, shown in Figure 10 (a), obtain lower limit (RInf) and the lower limit (LInf) of the upper limit (RSup) and brightness and four values of the upper limit (LSup) of intensity.Here the optimum solution that should obtain is the combination (RInf, RSup, LInf, LSup) that constitutes four values of the color gamut that comprises object-point (zero) as much as possible and contain elimination point (▲) hardly.

Specifically, Yi Bian color gamut function of search 54 changes each value of RInf, RSup, LInf, LSup,, obtain frequency aggregate value E and be maximum color gamut Yi Bian each color gamut is calculated frequency aggregate value E (with reference to formula 1).Frequency aggregate value E is the index of difference of the quantity (frequency) of expression quantity (frequency) of the object-point that color gamut comprised and elimination point.Figure 10 (b) expression frequency aggregate value E is maximum color gamut.

[formula 1]

$E=\underset{r=\mathrm{RInf}}{\overset{\mathrm{RSup}}{\mathrm{\Σ}}}\underset{l=\mathrm{LInf}}{\overset{\mathrm{LSup}}{\mathrm{\Σ}}}\{S(r,l)-R(r,l)\}$

R: red intensity

L: brightness

S (r, l): point (r, the frequency of the object-point of l) locating

R (r, l): point (r, the frequency of the elimination point of l) locating

And color gamut function of search 54 is set at the color condition of checking usefulness with frequency aggregate value E for maximum color gamut.Like this, according to present embodiment, can automatically generate the color characteristic amount of suitably separating and the combination of its value, and be set at color condition with the part (object-point) of article body with the part (elimination point) of article body adjacency.

In addition, in the present embodiment, constituted color condition, but also can pay close attention to other color characteristic amount and determine parameter by the higher limit of brightness and the higher limit of lower limit and red intensity and four color parameters of lower limit.As the color characteristic amount, for example, can use L*, a* among values X, Y in the intensity, brightness, saturation degree, form and aspect, CIEXYZ of the color of indigo plant, red, green, dark green, pinkish red, Huang etc., Z, colourity x, y, z, the CIELAB, L*, u among b*, the CIELUV (u '), v (v ') etc.In addition, the quantity that constitutes the color characteristic amount of color condition is not limited to 2 kinds, can be a kind, also can make up more than 3 kinds or 3 kinds.That is the color parameter of, can be and suitably selecting color condition and adopted according to the tendency of the colour image that article body in the captured image and neighboring area thereof had.In addition, also be preferably: be not to pre-determine color parameter, but prepare a plurality of color characteristic amount candidates that constitute by one or more color characteristic amounts, each color characteristic amount candidate is carried out above-mentioned frequency Distribution calculation handle and the color condition computing, therefrom adopt best color characteristic amount as color condition.At this moment, distribute for each color characteristic amount candidate's frequency, (in the present embodiment, Zui Da frequency aggregate value E is equivalent to degree of separation to obtain the degree of separation of object-point and elimination point.), by the degree of separation between relatively more mutual, determine that the color characteristic amount candidate who is adopted gets final product.For example, can select a color characteristic amount candidate of degree of separation maximum, also can select a plurality of color characteristic candidates according to the size order of degree of separation.In addition, as the method for search color gamut, except said method, also can use discriminatory analysis, SVM known method such as (Support Vector Machine, support vector machine).

(2) setting of Rule of judgment is handled

Then, use above-mentioned color condition and non-defective unit image, substandard products image to carry out and generate the processing that the Rule of judgment of usefulness is checked in dislocation automatically.

At first, binaryzation function 55 is used above-mentioned color condition, respectively non-defective unit image, substandard products image is carried out binaryzation, thereby extracts the pixel region (step S206) that satisfies color condition.Then, function 56 is determined after the white pixel zone of edge determine to(for) each pixel (step S207) in the edge, calculates the characteristic quantity (position d and angle θ) (step S208) at this edge.These are handled with illustrated in fig. 5 identical.

Then, distribution plan systematic function 57 is different for the distribution tendency of the value of the characteristic quantity in the distribution tendency of the value of the characteristic quantity of grasping the edge in the non-defective unit image and the substandard products image, the frequency of value of obtaining the characteristic quantity at edge distribute (step S209).In the present embodiment, adopt position and angle characteristic quantity, obtain frequency about each characteristic quantity and distribute as the edge.Here, for the position at expression edge, vision ground and the frequency distribution of angle, use location map relevant and the angular distribution figure relevant with the angle at edge with the position at edge.One example of Figure 11 (a) expression location map, the example of Figure 11 (b) expression angular distribution figure.The transverse axis of Figure 11 (a) is represented the magnitude of misalignment Δ d at edge, and the transverse axis of Figure 11 (b) is represented the absolute value of the angle at edge | θ |.Magnitude of misalignment Δ d is the difference between the position d at the edge that calculates in step S208 and position (tram) d0 that the edge should occur as Δ d=d-d0.Can go out this tram d0 according to the CAD information calculations.Observe Figure 11 (a) and (b) time, the characteristic quantity of learning the non-defective unit image distributes (white) and the characteristic quantity distribution (black) of substandard products image shows tangible different.

Then, the threshold value (step S210) the value of the characteristic quantity at the value of the characteristic quantity at the edge in the non-defective unit image and the edge in the substandard products image separated best based on the frequency Distribution calculation of distribution plan of threshold calculations function 58.In the present embodiment, calculate the angle at the lower limit of position d at edge and higher limit, edge | θ | three threshold values of higher limit.Propose the method that various a plurality of peaks that will occur are separated best in distribution plan,, can adopt any method here.For example, can utilize the techniques of discriminant analysis in big Tianjin, perhaps also can be rule of thumb will be defined as threshold value with the be separated by point of 3 σ of the peak of non-defective unit image, or between the end points at the peak of the end points at the peak of non-defective unit image and substandard products image setting threshold.Like this, for position, the angle at edge, generate the Rule of judgment that is used to differentiate non-defective unit and substandard products respectively.

Then, check that logic systematic function 59 generates inspection logic (step S211) according to above-mentioned color condition and Rule of judgment.Then, will check that by inspection logic write-in functions 60 logic is written in the inspection logical storage portion 35 of base board checking device 1, and finish to check logic setting processing (step S212).

According to the present embodiment of above narration, owing to generating automatically in order to check the inspection logic that the dislocation of IC base part is used at high speed and with less memory capacity, so can cut down training required time and load significantly.

And, by the color condition and the Rule of judgment of above-mentioned algorithm computation the best, so can carry out the dislocation inspection of IC base part accurately.The number of the training image information that provides at first in addition, the reliability of color condition and Rule of judgment more at most is high more.

＜the second embodiment 〉

In the above-described first embodiment, be conceived to the dislocation that the IC base part is checked at article body edge partly.But, according to the type of parts, in the color distribution of article body part, deviation or inequality are arranged sometimes, be difficult to determine the edge.The situation that the heating of the surface of situation, article body that for example is printed with character or mark etc. on the surface of article body during owing to Reflow Soldering is out of shape is inferior, irregular colour that all may the generation part main part.Therefore, in second embodiment of the present invention, in the IC base part, be conceived to a plurality of lead-in wires and arrange this point along edge line, do not investigate the edge of article body, and investigation connects the position and the angle of the straight line (hereinafter referred to as " lead-in wire arranging line ") of a plurality of lead-in wires, the dislocation of inspection part thus.

(inspecting substrate processing)

At first, the flow process of handling with reference to the inspection of the flowchart text present embodiment of Figure 12.In addition, for the identical processing of processing (with reference to Fig. 3) of first embodiment, be marked with same step number and omit explanation.

Become being transported into and the reading in of CAD information (step S100～S103) of the substrate of checking object according to indication information.Carry out the reading in of inspection logic (step S104) of the dislocation inspection usefulness of IC base part according to the type of the parts of from this CAD information, obtaining.Inclusion region condition, color condition and Rule of judgment in checking logic.And, based on CAD information, will be transported into substrate and in position align, parts are taken (step S105～S106).

Then, audit function 16 is extracted check image (step S300) by image processing part 34 from photographed images.Check image is the zone by the area condition regulation of checking logic.In the present embodiment, as shown in Figure 4, check image is extracted as at least a portion and a plurality of lead-in wires 94 that are arranged on this edge at the edge that comprises the article body 90 of checking the object parts.At least two lead-in wires 94 o'clock are arranged, can carry out straight-line detection described later, but, be preferably the lead-in wire 94 that in check image, comprises more than 3 or 3 in order to improve the reliability of processing.In addition, needn't in check image, comprise all of lead-in wire 94, as long as it is just enough to comprise cardinal extremity part (shoulder portion) 94a of lead-in wire at least.

Then, audit function 16 uses color condition that check image is carried out binaryzation (step S301) by image processing part 34.Color condition used herein is used to be defined in the scope of the color that the cardinal extremity of lead-in wire partly presents.In other words, color condition we can say the color that presents of base end part branch that is used for difference (separations) lead-in wire and with the color that part presented of the cardinal extremity part adjacency that goes between.The color condition of present embodiment is made of the lower limit of the intensity of red signal and the lower limit of the upper limit and brightness and four values of the upper limit.This is because in photographed images, partly presents the high red colour system color of brightness at the cardinal extremity that goes between.In binary conversion treatment, the pixel (satisfying the pixel of color condition) that is comprised in the color gamut by the color condition definition is converted into white pixel, and remaining pixel is converted into black pixel.

Figure 13 represents non-defective unit (parts are installed with correct position and/or angle) and the check image of substandard products (having produced the parts dislocation) and their binaryzation result.By carrying out binaryzation with color condition, the cardinal extremity part 94a of the lead-in wire in the check image is extracted as the white pixel zone as can be known.Here the zone that extracts is called lead-in wire zone 95.

Then, audit function 16 determines to connect straight line (lead-in wire arranging line) 95 (the step S302) in a plurality of lead-in wires zone 95 by image processing part 34.Straight line usual practice really or uses the line detection method of least square method etc. as can using existing image processing method such as Hough conversion.

Here determined lead-in wire arranging line 96 can be considered as the straight line parallel with the edge of article body 90.Thereby, identical with first embodiment, calculate the position d and the angle θ (step S303) of lead-in wire arranging line 96, their and Rule of judgment of checking logic are compared, thereby judge whether correct (the step S111～S113) of position component and/or angle.The judged result of each IC base part of installing on the substrate is written among the judged result storage part 32b (step S114) with position ID, and the inspecting substrate processing finishes (step S115).

Inspecting substrate according to above narration is handled, from check image, extract a plurality of lead-in wires zone of satisfying color condition, and will connect the position of these regional straight lines and angle and Rule of judgment and compare and get final product, so can simply and carry out the dislocation inspection of IC base part at high speed, accurately.And, because image that needn't processing element integral body and only handle its a part of image (check image) and get final product, so also can suppress the use amount of working storage or image memory device.In addition, in the present embodiment, because the redness of the high brightness that the base end part branch that is conceived to go between presents, so even exist deviation or uneven IC base part also can check without a doubt for the color of article body.

In addition, in the present embodiment, judgment processing has been used the position and the angle of lead-in wire arranging line, but also can only judge according to any one party characteristic quantity.In addition, in the present embodiment, the lead-in wire that only is conceived to an edge is arranged, if but the lead-in wire at a plurality of edges is arranged the identical judgment processing of enforcement, then can realize judging precision and the raising of checking reliability.

(checking logic setting processing)

Then, set the flow process of handling along the logic of the flowchart text present embodiment of Figure 14.For with the identical processing of processing (with reference to Fig. 7) of first embodiment, be marked with same step number and omit detailed explanation.In addition, check that the functional structure (Fig. 6) of the functional structure of logic setting device and first embodiment is roughly the same, but difference is, has " straight line is determined function " and replace the edge and determine function 56.

According to the indication information of being imported, from training image information D B61, read in training image information (step S200～S202).In training image information, comprise a plurality of non-defective unit images and a plurality of substandard products image.Given training information for these images

(1) setting of color condition is handled

At first, only use the non-defective unit image to carry out the setting of color condition.Part is determined function 52 by Flame Image Process, determines " the cardinal extremity part of lead-in wire " (hereinafter referred to as " subject area ") and " with the part of the cardinal extremity part adjacency that goes between " (hereinafter referred to as " exclusionary zone ") (step S400) in the non-defective unit image.Specifically, as shown in figure 15, part determines that function 52 has the template that is made of article body window 70, pad window 71, lead-in wire window 72, amplify/dwindle template on one side, or the relative position between each window of staggering, on one side each window is alignd with article body, pad, lead-in wire in the image.The alignment of window for example can be used methods such as template matches.Then, part determine function 52 will go between window 72 presumptive area (for example, scope from the border distance L of lead-in wire window 72 and article body window 70) is set at subject area (with reference to solid line hachure part), the inboard of article body window 70 is set at exclusionary zone (dotted line hachure part).Here, owing to only use the non-defective unit image, so can carry out the high-precision setting of subject area, exclusionary zone.

In the dislocation of second embodiment is checked, use color condition only to extract the cardinal extremity part of lead-in wire.Making the color condition that is suitable for such processing most is equivalent to: the optimum solution of obtaining the color gamut of color of pixel that comprises subject area as much as possible and the color of pixel that almost can exclude exclusionary zone.

Therefore, identical with first embodiment, the frequency of value of obtaining all color of pixel characteristic quantities of subject area and exclusionary zone distributes (step S204), and search color gamut (step S205) that the color distribution of the color distribution of object-point and elimination point is separated best.Thus, automatically generate the color condition of the shoulder portion that is used to extract lead-in wire.

(2) setting of Rule of judgment is handled

Then, use above-mentioned color condition and non-defective unit image, substandard products image to carry out and generate the processing that the Rule of judgment of usefulness is checked in dislocation automatically.

At first, use above-mentioned color condition respectively with non-defective unit image, substandard products image binaryzation, thereby extract the pixel region (step S206) that satisfies color condition by binaryzation function 55.Then, determine that by straight line function determine the lead-in wire arranging line for each image after (step S401), calculates the characteristic quantity (position and angle) (step S402) of this lead-in wire arranging line.These are handled with identical with the processing of Figure 13 explanation.

Then, the frequency of value that distribution plan systematic function 57 is obtained the characteristic quantity of lead-in wire arranging line distributes, with the difference (step S403) between the distribution tendency of the value of the distribution tendency of the value of the characteristic quantity of grasping the lead-in wire arranging line in the non-defective unit image and the characteristic quantity in the substandard products image.In the present embodiment, adopt position and angle characteristic quantity, obtain frequency about each characteristic quantity and distribute as the lead-in wire arranging line.Here, for the visually position of expression lead-in wire arranging line and the frequency of angle distribute, use the location map relevant with the position of lead-in wire arranging line and with the relevant angular distribution figure of angle of the arranging line that goes between.Then, threshold calculations function 58 and first embodiment distribute based on the frequency of distribution plan the samely, calculate to be used for Rule of judgment (step S404) that the value of the characteristic quantity of the value of the characteristic quantity of the lead-in wire arranging line of non-defective unit image and the lead-in wire arranging line in the substandard products image is separated best.

Then, by checking that logic systematic function 59 generates inspection logic (step S211) according to above-mentioned color condition and Rule of judgment.Then, will check that by inspection logic write-in functions 60 logic is written in the inspection logical storage portion 35 of base board checking device 1, finish to check logic setting processing (step S212).

According to the present embodiment of above narration, owing to generate automatically in order to check the employed inspection logic of IC base part at high speed and with less memory capacity, so can cut down training required time and load significantly.

And, owing to calculate best color condition and Rule of judgment by aforementioned algorithm, so can carry out the dislocation inspection of IC base part accurately.In addition, the training image information that provides the at first reliability of color condition and Rule of judgment more at most is high more.

＜variation 〉

Above-mentioned embodiment only illustration an object lesson of the present invention.Scope of the present invention is not limited to above-mentioned embodiment, can carry out various distortion in the scope of its technological thought.

In addition, in the color condition of above-mentioned embodiment, use two color characteristic amounts as parameter, color gamut is by maximal value, the minimum value regulation of corresponding color characteristic amount, it on two dimensional surface the scope of expression rectangle, but definite method of color gamut is not limited thereto, and also can be the scope of expression circle, polygon, free curve figure etc. on two dimensional surface.And, under the situation of using the parameter more than 3 or 3 too, also can obtain the maximal value, minimum value of each parameter and with its combination as color gamut, it can also be color gamut performance (for example, in three dimensions, representing spherical scope etc.) about the combination of two or more parameters.In addition, as the method for search color gamut, except described method in the above-described embodiment, can use discriminatory analysis, SVM known method such as (Support Vector Machine, support vector machine).

In addition, in the above-described embodiment, used position and angle both as the characteristic quantity of edge or lead-in wire arranging line, but also can only use any one party, also can the use location, the characteristic quantity beyond the angle.

Claims (24)

1. substrate inspecting method is installed in the dislocation of the IC base part on the substrate by the base board checking device inspection, may further comprise the steps:

Logic is checked in storage in advance, and this inspection logic comprises the color condition and the Rule of judgment of the color that article body presented of regulation inspection object parts,

Shine the light of multiple color with different incident angles to checking the object parts,

Its reflected light is taken, thereby is obtained the check image of at least a portion at the edge of the article body that comprises described inspection object parts,

Use described color condition,, from described check image, extract the article body zone of satisfying described color condition by Flame Image Process,

Determine the edge in described article body zone by Flame Image Process,

Compare by value and described Rule of judgment, judge whether described inspection object parts are correct position and/or angle the characteristic quantity at described edge.

2. a base board checking device is checked the dislocation that is installed in the IC base part on the substrate, has:

Storage unit, logic is checked in its storage, this inspection logic comprises the color condition of the color that article body presented of regulation inspection object parts, and Rule of judgment;

The light projector unit, it shines the light of multiple color with different incident angles to checking the object parts;

Image unit, it is taken above-mentioned reflection of light light, thereby obtains the check image of at least a portion at the edge of the article body that comprises described inspection object parts;

The extracted region unit, it uses described color condition, by Flame Image Process, extracts the article body zone of satisfying described color condition from described check image;

The edge determining unit, it determines the edge in described article body zone by Flame Image Process; And

Judging unit, it compares by value and the described Rule of judgment to the characteristic quantity at described edge, judges whether described inspection object parts are correct position and/or angle.

3. the inspection logic establishing method of a base board checking device is created on the inspection logic of using in the inspecting substrate of the described base board checking device of claim 2, may further comprise the steps:

According to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine article body part and with the part of article body adjacency,

For one or more color characteristic amounts, with each pixel of the part of article body as object-point, will with each pixel of the part of article body adjacency as elimination point, the frequency of obtaining the value of described a plurality of object-point and elimination point color characteristic amount separately distributes

Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best,

The scope of the type of described one or more color characteristic amounts and value is set at described color condition.

4. the inspection logic establishing method of base board checking device as claimed in claim 3, wherein,

Pre-determined the type of described color characteristic amount.

5. the inspection logic establishing method of base board checking device as claimed in claim 3, further comprising the steps of:

Generate a plurality of color characteristic amount candidates that constitute by one or more color characteristic amounts,

Respectively for described a plurality of color characteristic amount candidates, obtain the scope and the degree of separation of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best, select the color characteristic amount candidate that adopts as described color condition by this degree of separation relatively

The type of the one or more color characteristic amounts that constitute the described color characteristic amount candidate who selects and the scope of value are set at described color condition.

6. as the inspection logic establishing method of any described base board checking device in the claim 3～5, further comprising the steps of:

A plurality of non-defective unit images that obtain from the IC base part of installing with correct position and/or angle is taken and the IC base part that has produced dislocation taken and a plurality of substandard products images of obtaining, extract the pixel region that satisfies described color condition respectively,

Determine the edge of each pixel region by Flame Image Process,

The frequency of value of obtaining the characteristic quantity at described edge distributes,

Frequency based on the value of described characteristic quantity distributes, obtain the scope of the value of the characteristic quantity that the value of characteristic quantity at the edge of the value of characteristic quantity at edge of the pixel region that will extract and the pixel region that extracts separates best from described substandard products image from described non-defective unit image

The scope of the type of described characteristic quantity and value is set at described Rule of judgment.

7. the inspection logic establishing method of base board checking device as claimed in claim 6, wherein,

The type of described characteristic quantity is that the position at described edge is or/and angle.

8. the inspection logic setting device of a base board checking device is created on the inspection logic of using in the inspecting substrate of the described base board checking device of claim 2, has:

According to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine article body part and with the unit of the part of article body adjacency;

For one or more color characteristic amounts, with each pixel of the part of article body as object-point, will with each pixel of the part of article body adjacency as elimination point, obtain the unit that the frequency of the value of described a plurality of object-point and elimination point color characteristic amount separately distributes;

Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the unit of scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best; And

The scope of the type of described one or more color characteristic amounts and value is set at the unit of described color condition.

9. the inspection logic setting device of base board checking device as claimed in claim 8, wherein,

Pre-determined the type of described color characteristic amount.

10. the inspection logic setting device of base board checking device as claimed in claim 8 also has:

Generate a plurality of color characteristic amount candidates' that constitute by one or more color characteristic amounts unit,

Respectively for described a plurality of color characteristic amount candidates, obtain the scope and the degree of separation of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best, select the color characteristic amount candidate's that adopts as described color condition unit by this degree of separation relatively

The scope of the type of the one or more color characteristic amounts that constitute the described color characteristic amount candidate who selects and value is set at the unit of described color condition.

11. the inspection logic setting device as any described base board checking device in the claim 8～10 has:

A plurality of non-defective unit images that obtain from the IC base part of installing with correct position and/or angle is taken and the IC base part that has produced dislocation taken and extract the unit of the pixel region that satisfies described color condition a plurality of substandard products images of obtaining respectively;

Determine the unit at the edge of each pixel region by Flame Image Process;

Obtain the unit that the frequency of value of the characteristic quantity at described edge distributes;

Frequency based on the value of described characteristic quantity distributes, and obtains the unit of scope of the value of the characteristic quantity that the value of characteristic quantity at the edge of the value of characteristic quantity at edge of the pixel region that will extract from described non-defective unit image and the pixel region that extracts from described substandard products image separates best; And

The scope of the type of described characteristic quantity and value is set at the unit of described Rule of judgment.

12. the inspection logic setting device of base board checking device as claimed in claim 11, wherein,

The type of described characteristic quantity is that the position at described edge is or/and angle.

13. a substrate inspecting method is installed in the dislocation of the IC base part on the substrate by the base board checking device inspection, may further comprise the steps:

Storage in advance checks that logic, this inspections logic comprise that regulation is arranged in the color condition of the color that the base end part branch of the lead-in wire on the edge of article body of inspection object parts presents, and Rule of judgment,

Shine the light of multiple color with different incident angles to checking the object parts,

Its reflected light is taken, thereby is obtained at least a portion at edge of the article body that comprises described inspection object parts and the check image that is arranged in a plurality of lead-in wires on this edge,

Use described color condition,, from described check image, extract a plurality of lead-in wires zone of satisfying described color condition by Flame Image Process,

Determine to connect the regional straight line of described a plurality of lead-in wires by Flame Image Process,

Compare by value and described Rule of judgment, judge whether described inspection object parts are correct position and/or angle the characteristic quantity of described straight line.

14. a base board checking device is checked the dislocation that is installed in the IC base part on the substrate, has:

Storage unit, its storage check that logic, this inspections logic comprise that regulation is arranged in the color condition of the color that the base end part branch of the lead-in wire on the edge of article body of inspection object parts presents, and Rule of judgment;

The light projector unit, it shines the light of multiple color with different incident angles to checking the object parts;

Image unit, it is taken above-mentioned reflection of light light, thereby obtains at least a portion at edge of the article body that comprises described inspection object parts and the check image that is arranged in a plurality of lead-in wires on this edge;

The extracted region unit, it uses described color condition, by Flame Image Process, extracts a plurality of lead-in wires zone of satisfying described color condition from described check image;

The straight line determining unit, it determines to connect the straight line in described a plurality of lead-in wires zone by Flame Image Process; And

Judging unit, it compares by value and the described Rule of judgment to the characteristic quantity of described straight line, judges whether described inspection object parts are correct position and/or angle.

15. the inspection logic establishing method of a base board checking device is created on the inspection logic of using in the inspecting substrate of the described base board checking device of claim 14, this method may further comprise the steps:

According to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine lead-in wire the cardinal extremity part and with the part of the cardinal extremity part adjacency of lead-in wire,

For one or more color characteristic amounts, with each pixel of the cardinal extremity part of lead-in wire as object-point, will with each pixel of part of the cardinal extremity part adjacency of lead-in wire as elimination point, the frequency of obtaining the value of described a plurality of object-point and elimination point color characteristic amount separately distributes

Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best,

The scope of the type of described one or more color characteristic amounts and value is set at described color condition.

16. the inspection logic establishing method of base board checking device as claimed in claim 15, wherein,

Pre-determined the type of described color characteristic amount.

17. the inspection logic establishing method of base board checking device as claimed in claim 15 is further comprising the steps of:

Generate a plurality of color characteristic amount candidates that constitute by one or more color characteristic amounts,

Respectively for described a plurality of color characteristic amount candidates, obtain the scope and the degree of separation of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best, select the color characteristic amount candidate that adopts as described color condition by this degree of separation relatively

The type of the one or more color characteristic amounts that constitute the described color characteristic amount candidate who selects and the scope of value are set at described color condition.

18., further comprising the steps of as the inspection logic establishing method of any described base board checking device in the claim 15～17:

A plurality of non-defective unit images that obtain from the IC base part of installing with correct position and/or angle is taken and the IC base part that has produced dislocation taken and a plurality of substandard products images of obtaining respectively, a plurality of pixel regions of described color condition are satisfied in extraction

By the definite straight line that connects described a plurality of pixel regions of Flame Image Process,

The frequency of value of obtaining the characteristic quantity of described straight line distributes,

Frequency based on the value of described characteristic quantity distributes, obtain the scope of the value of the characteristic quantity that value and the value of the characteristic quantity of the straight line that is connected a plurality of pixel regions that extract from described substandard products image of characteristic quantity that connects the straight line of a plurality of pixel regions extract from described non-defective unit image separated best

The scope of the type of described characteristic quantity and value is set at described Rule of judgment.

19. the inspection logic establishing method of base board checking device as claimed in claim 18, wherein,

The type of described characteristic quantity is that the position of described straight line is or/and angle.

20. the inspection logic setting device of a base board checking device is created on the inspection logic of using in the inspecting substrate of the described base board checking device of claim 14, has:

According to the IC base part of installing with correct position and/or angle is taken the image that obtains, by Flame Image Process determine lead-in wire the cardinal extremity part and with the unit of the part of the cardinal extremity part adjacency of lead-in wire;

For one or more color characteristic amounts, with each pixel of the cardinal extremity part of lead-in wire as object-point, will with each pixel of part of the cardinal extremity part adjacency of lead-in wire as elimination point, obtain the unit that the frequency of the value of described a plurality of object-point and elimination point color characteristic amount separately distributes;

Frequency based on the value of described one or more color characteristic amounts distributes, and obtains the unit of scope of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best; And

The scope of the type of described one or more color characteristic amounts and value is set at the unit of described color condition.

21. the inspection logic setting device of base board checking device as claimed in claim 20, wherein,

Pre-determined the type of described color characteristic amount.

22. the inspection logic setting device of base board checking device as claimed in claim 20 also has:

Generate a plurality of color characteristic amount candidates' that constitute by one or more color characteristic amounts unit,

Respectively for described a plurality of color characteristic amount candidates, obtain the scope and the degree of separation of the value of the color characteristic amount that the value of the color characteristic amount of the value of the color characteristic amount of described object-point and described elimination point is separated best, select the color characteristic amount candidate's that adopts as described color condition unit by this degree of separation relatively

The scope of the type of the one or more color characteristic amounts that constitute the described color characteristic amount candidate who selects and value is set at the unit of described color condition.

23. the inspection logic setting device as any described base board checking device in the claim 20～22 has:

A plurality of non-defective unit images that obtain from the IC base part of installing with correct position and/or angle is taken and the IC base part that has produced dislocation taken and extract the unit of a plurality of pixel regions that satisfy described color condition a plurality of substandard products images of obtaining respectively;

Determine the unit of the straight line of the described a plurality of pixel regions of connection by Flame Image Process;

Obtain the unit that the frequency of value of the characteristic quantity of described straight line distributes;

Frequency based on the value of described characteristic quantity distributes, and obtains the unit of scope of the value of the characteristic quantity that value and the value of the characteristic quantity of the straight line that is connected a plurality of pixel regions that extract from described substandard products image of characteristic quantity that connects the straight line of a plurality of pixel regions that extract from described non-defective unit image separated best; And

The scope of the type of described characteristic quantity and value is set at the unit of described Rule of judgment.

24. the inspection logic setting device of base board checking device as claimed in claim 23, wherein,

The type of described characteristic quantity is that the position of described straight line is or/and angle.

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