CN115126882A

CN115126882A - Electric valve

Info

Publication number: CN115126882A
Application number: CN202210234200.8A
Authority: CN
Inventors: 小池亮司; 中川大树
Original assignee: Saginomiya Seisakusho Inc
Current assignee: Saginomiya Seisakusho Inc
Priority date: 2021-03-24
Filing date: 2022-03-10
Publication date: 2022-09-30
Also published as: JP7466485B2; JP2022148693A

Abstract

The invention provides an electric valve, which can stabilize the flow of fluid and reduce noise. The first silencing member (7) disposed in the flow path from the communication path (421) to the sub-valve port (41a) has a higher density than the second silencing member (8) disposed in the flow path from the sub-valve port (41a) to the main valve port (23a), so that bubbles are subdivided by the first silencing member (7) to reduce noise, and the fluid flowing out of the sub-valve port (41a) passes through the low-density second silencing member (8), and is less likely to stagnate when the fluid passes through the second silencing member (8). Therefore, the flow of the fluid can be stabilized, and the noise can be reduced.

Description

Electric valve

Technical Field

The present invention relates to an electrically operated valve.

Background

Conventionally, as an electrically operated valve, a flow rate regulating valve has been proposed which includes a first valve body portion and a second valve body portion and which can be set to a small flow rate control state or a large flow rate control state (for example, see patent document 1). In the flow rate adjustment valve described in patent document 1, a muffler member is provided in a communication passage of a coupling shaft of a valve shaft, and a muffler member is also provided in a communication passage of a valve body member. By providing the silencing member in this way, both reduction of noise and reduction of pressure loss in a wide opening area can be achieved.

Documents of the prior art

Patent literature

Patent document 1: japanese patent laid-open publication No. 2017-211034

Disclosure of Invention

Problems to be solved by the invention

However, in the motor-operated valve that can be set to the small flow rate control state or the large flow rate control state as described in patent document 1, the fluid that has passed through (flowed out of) the valve port (sub-valve port) corresponding to the small flow rate control tends to be in an unstable state (state in which large and small bubbles are mixed), and tends to be a jet flow. Therefore, even if the muffler member is disposed downstream of the sub-valve port, the fluid is less likely to pass through the muffler member, and the fluid may become in a more unstable state and the noise may not be sufficiently reduced.

The invention aims to provide an electric valve which can stabilize the flow of fluid and reduce noise.

Means for solving the problems

The motor-operated valve of the present invention comprises: a valve housing; a main valve body that changes an opening degree of a main valve port of a main valve chamber provided in the valve housing; an auxiliary valve body that changes an opening degree of an auxiliary port of an auxiliary valve chamber provided in the main valve body; and a driving unit that drives the sub valve body to retract in an axial direction, wherein a communication passage that communicates the main valve chamber and the sub valve chamber is formed in the electric valve, and the electric valve is characterized by comprising: a first muffler member disposed in a flow path from the communication passage to the sub-port; and a second muffler member disposed in a flow path extending from the sub-port to the main port, wherein the first muffler member and the second muffler member are formed to subdivide the flow path, and the first muffler member has a higher density than the second muffler member.

According to the present invention, the first muffler member disposed in the flow path from the communication passage to the sub-valve port has a higher density than the second muffler member disposed in the flow path from the sub-valve port to the main valve port, so that the fluid passes through the first muffler member having a higher density and then passes through the second muffler member having a lower density. In this way, the fluid flows toward the sub-valve port in a state where the bubbles are sufficiently subdivided by the first muffler member, so that noise can be reduced, and the fluid flowing out of the sub-valve port passes through the second muffler member having a low density, so that the fluid is less likely to stagnate when passing through the second muffler member. Therefore, the flow of the fluid can be stabilized, and the noise can be further reduced.

In this case, in the motor-operated valve according to the present invention, it is preferable that the communication passage is formed on a side surface of the cylindrical portion of the main valve, and an annular space along the cylindrical portion is formed between the communication passage and the first silencing member. According to this configuration, the fluid can easily pass through the annular space in a circulating manner and reach the first muffler member, and the velocity of the fluid can be reduced before reaching the first muffler member.

In the motor-operated valve according to the present invention, it is preferable that a plurality of the communication passages communicating with the annular space are formed in a side surface of the cylindrical portion. According to such a configuration, the variation in the flow rate of the fluid in the circumferential direction can be reduced as compared with a configuration in which the fluid is introduced into the sub valve chamber from one communication passage.

In the motor-operated valve according to the present invention, it is preferable that the annular space and the first silencing member are arranged side by side in an axial direction of the annular space. According to this configuration, the extending direction of the communication passage formed in the cylindrical portion intersects with the direction from the annular space toward the first muffler member, and the velocity of the fluid can be reduced before the fluid reaches the first muffler member.

In the motor-operated valve according to the present invention, it is preferable that the first silencing member and the second silencing member are filters formed in a three-dimensional net shape, and it is further preferable that the first silencing member and the second silencing member are randomly bent by a linear member to be formed in a three-dimensional net shape. According to this configuration, since the linear member is randomly bent, the muffler member has passage portions having various sizes of passable areas as passage portions through which the fluid can pass. Therefore, even when the fluid contains bubbles of various sizes, the fluid can be easily made fine-bubble.

Effects of the invention

According to the motor-operated valve of the present invention, the flow of fluid can be stabilized, and noise can be reduced.

Drawings

Fig. 1 is a cross-sectional view of an electrically operated valve according to an embodiment of the present invention.

Fig. 2 is an enlarged cross-sectional view of a main portion of the motor-operated valve.

Fig. 3 is a cross-sectional view showing the communication passage and the annular space of the motor-operated valve.

In the figure:

1-an electric valve, 2-a valve housing, 23 a-a main valve port, 2R-a main valve chamber, 4-a main valve, 41 a-an auxiliary valve port, 412-an annular space, 42-a cylindrical portion, 421-a communication passage, 4R-an auxiliary valve chamber, 5-an auxiliary valve, 6-a driving portion, 7-a first silencing member, 8-a second silencing member.

Detailed Description

Embodiments of the present invention will be described with reference to the accompanying drawings. The motor-operated valve 1 of the present embodiment is used in a refrigeration cycle of an air conditioner such as a package-type air conditioner or a room air conditioner, and includes, as shown in fig. 1, a valve housing 2, a guide member 3, a main valve element 4, a sub-valve element 5, a driving portion 6, a first silencing member 7, and a second silencing member 8. The main valve element 4 and the sub valve element 5 are provided so as to move in a predetermined axial direction, and hereinafter, the axial direction is referred to as a Z direction, two directions orthogonal to the Z direction are referred to as an X direction and a Y direction, and the top and bottom in the Z direction are referred to as fig. 1.

The valve housing 2 is formed into a substantially cylindrical shape, for example, from brass, stainless steel, or the like, and has a main valve chamber 2R inside thereof. The valve housing 2 has a first port 21 opened on one side in the X direction and a second port 22 opened on the lower side in the Z direction on its side surface. A first joint pipe 11 extending in the X direction is connected to the first port 21, a second joint pipe 12 extending in the Z direction is connected to the second port 22, and the first joint pipe 11 and the second joint pipe 12 communicate with the main valve chamber 2R. The first joint pipe 11 and the second joint pipe 12 may be fixed to the valve housing 2 by brazing or the like, for example.

A cylindrical main valve seat 23 projecting toward the main valve chamber 2R (toward the upper side) in the Z direction as the axial direction is formed at the lower end portion of the valve housing 2, the inside of the main valve seat 23 becomes a main valve port 23a, and the main valve port 23a communicates with the second port 22. That is, the second joint pipe 12 communicates with the main valve chamber 2R through the main valve port 23 a. In the present embodiment, the electric valve 1 is used such that the fluid (refrigerant) flowing into the main valve chamber 2R from the first joint pipe 11 flows out from the second joint pipe 12 with the first port 21 being the primary side and the second port 22 being the secondary side, but the electric valve 1 may be incorporated in a cycle in which the fluid can flow in both directions.

The guide member 3 is attached to an opening portion at the upper end of the valve housing 2, and includes: a press-in portion 31 that is pressed into the inner peripheral surface of the valve housing 2; a substantially cylindrical guide portion 32 located inside the press-fitting portion 31; a bracket part 33 extending above the guide part 32; a stopper 34 provided above the holder 33; and an annular flange 35 located on the outer periphery of the guide portion 32. The press-fitting portion 31, the guide portion 32, the holder portion 33, and the stopper portion 34 are formed as an integral member made of resin. The flange portion 35 is a metal plate made of, for example, brass, stainless steel, or the like, and the flange portion 35 is integrally provided with the resin press-fitting portion 31 and the bracket portion 33 by insert molding.

The guide member 3 is assembled to the valve housing 2, and is fixed to the upper end portion of the valve housing 2 by welding at the flange portion 35. In the guide member 3, a cylindrical guide hole 32a is formed in the guide portion 32 in the Z-direction, and an insertion hole 33a is formed in the center of the holder portion 33 so as to be coaxial with the guide hole 32 a. Further, a female screw portion (screw hole) 34a coaxial with the guide hole 32a and the insertion hole 33a is formed at the center of the stopper portion 34.

The main valve element 4 is disposed in the guide hole 32a of the holder 33, and is formed in a cylindrical shape having the Z direction as the whole as the axial direction, as shown in fig. 2. Main spool 4 integrally has: a partition portion 41 that extends along the XY plane and to which the sub-spool 5 approaches or separates; a cylindrical portion 42 extending from the partition portion 41 toward the side (upper side) opposite to the main valve port 23 a; and a main valve portion 43 that approaches or separates with respect to the main valve seat 23.

The partition wall 41 is a sub-valve seat portion provided at the lower end of the cylindrical portion 42, and is formed in a plate shape having a predetermined plate thickness (Z-direction dimension). The partition wall 41 and the cylindrical portion 42 form a bottomed cylindrical portion, and the inside of the bottomed cylindrical portion serves as the sub-valve chamber 4R. A sub-valve port 41a as a through hole is formed in the center of the partition wall 41. The cylindrical portion 42 is formed in a cylindrical shape, and a pressing member 93 described later is provided inside the cylindrical portion, and an inner peripheral surface of the pressing member 93 functions as a needle guide hole. A guide boss portion 53 attached to a valve shaft 51 described later is inserted into the needle guide hole, and an annular stopper 44 is fixed to an upper end of the cylindrical portion 42 by fitting, welding, or the like. Further, a main valve spring 4a is disposed between the stopper 44 and the upper end portion of the guide hole 32a, and the main valve core 4 is biased in the direction of the main valve seat 23 (the lower side in the Z direction; the closing direction) by the main valve spring 4 a.

As shown in fig. 3, the cylindrical portion 42 is formed with a plurality of (eight in the present embodiment) communication passages 421 for communicating the inside and the outside thereof. The eight communication paths 421 are arranged at equal intervals in the circumferential direction around the Z direction. The main valve chamber 2R, the sub valve chamber 4R, the sub valve port 41a, and the main valve port 23a communicate with each other by forming the communication passage 421 in the cylindrical portion 42.

Further, the partition wall 41 is formed with a cylindrical portion 411 extending upward in the Z direction, an annular space 412 located outside the cylindrical portion 411, and an inclined surface 413 continuous with the lower surface of the annular space 412. The cylindrical portion 411 has an auxiliary valve port 41a formed therein. The annular space 412 is formed annularly along the inside of the cylindrical portion 42, and the plurality of communication passages 421 communicate with each other. The inclined surface 413 is inclined upward from the lower end of the communication path 421 toward the inner peripheral side, and is connected to the lower surface of the annular space 412. Thus, the communication path 421 and the annular space 412 overlap each other when viewed in the radial direction, and the annular space 412 is slightly eccentrically disposed upward.

The main valve portion 43 is formed in a substantially cylindrical shape so as to extend the cylindrical portion 42 to a lower side than the partition wall portion 41. The main valve portion 43 is seated (abutted) on the main valve seat 23 in the fully closed state.

The sub-valve body 5 is a needle valve, is provided at a lower end portion of a rotor shaft 61 described later, and integrally includes a valve shaft 51 connected to the rotor shaft 61 side and a needle portion 52 connected to a lower end of the valve shaft 51. The sub-valve body 5 further has a guide boss portion 53 fixed to the valve shaft 51. The guide boss 53 is fixed to the valve shaft 51 as a separate body, but the guide boss 53 may be formed integrally with the valve shaft 51. The guide boss portion 53 is slidably inserted into a needle guide hole formed by the pressing member 93.

The drive unit 6 is provided inside and outside a housing 24 fixed to the upper end of the valve housing 2, and includes a stepping motor 6A, a screw feed mechanism 6B that advances and retracts the sub-valve body 5 by the rotation of the stepping motor 6A, and a stopper mechanism 6C that restricts the rotation of the stepping motor 6A. The housing 24 is fixed hermetically to the valve housing 2 by welding or the like, for example.

The stepping motor 6A includes a rotor shaft 61, a magnetic rotor 62 rotatably disposed inside the case 24, a stator coil, not shown, disposed on the outer periphery of the case 24 so as to face the magnetic rotor 62, and other magnetic yokes, exterior members, and the like, not shown. The rotor shaft 61 is attached to the center of the magnetic rotor 62 via a bushing, and a male screw portion 61a is formed on the outer periphery of the rotor shaft 61 on the guide member 3 side. The male screw portion 61a is screwed to the female screw portion 34a of the guide member 3, whereby the guide member 3 supports the rotor shaft 61 on the axis line along the Z direction. The female screw portion 34a of the guide member 3 and the male screw portion 61a of the rotor shaft 61 constitute a screw feeding mechanism 6B.

The first muffler member 7 is formed in an annular shape as a whole so that the valve shaft 51 and the needle portion 52 can pass therethrough, and is disposed in a flow path from the communication passage 421 to the sub-valve port 41 a. The first silencing member 7 is a filter formed by a linear member being randomly bent into a three-dimensional net shape. The first silencing member 7 may be a demister, for example. The first muffler member 7 formed in the mesh shape functions to subdivide the flow path, and the fluid (refrigerant) passes through the first muffler member 7 while being subdivided. That is, when the fluid in a gas-liquid mixed state passes through the first silencing part 7, bubbles are subdivided. At this time, since the linear member is randomly bent in the first silencing member 7, the passage portion through which the fluid can pass has a passage area of various sizes. When the fluid passes through the inside of the first silencing part 7 along the predetermined passage direction, the passable area changes depending on the position in the passage direction. Thereby, bubbles of various sizes are subdivided.

As shown in fig. 2, the first silencing member 7 is fixed inside the cylindrical portion 42 of the main valve element 4 by a pair of fixing

members

91A and 91B and a pressing member 93. The first silencing member 7 is sandwiched between a pair of fixing

members

91A, 91B from the Z direction, and a pressing member 93 is disposed above the fixing

members

91A, 91B. The first silencing member 7, the fixing

members

91A and 91B, and the pressing member 93 are sandwiched and fixed from the Z direction by the partition portion 41 and the stopper 44. At this time, the first silencing member 7 is arranged above the annular space 412 so as to be aligned in the Z direction. The pair of fixing

members

91A and 91B are respectively provided with communicating

portions

92A and 92B each formed of a plurality of through holes extending in the Z direction. Thereby, the annular space 412 communicates with the space where the first muffler member 7 is disposed, and the space where the first muffler member 7 is disposed communicates with the sub valve chamber 4R. That is, when the fluid flows from the annular space 412 into the sub-valve chamber 4R, the fluid necessarily passes through the first muffler member 7. The pressing member 93 is formed in a cylindrical shape as a whole, functions as a pressing portion for pressing the first silencing member 7 as described above, and has an engaging portion 931 whose inner diameter is reduced (reduced) at an upper end portion, and is engageable with the guide boss portion 53 of the sub-valve 5 at the engaging portion 931. The pressing member 93 is made of a sliding member such as PPS resin, for example. Thus, for example, when the guide boss 53 made of metal (stainless steel) slides on the inner peripheral surface of the pressing member 93 or engages with the engaging portion 931, the sliding resistance can be suppressed.

In the present embodiment, the first silencing member 7 is fixed to the cylindrical portion 42 of the main valve element 4 by using the fixing

members

91A and 91B, but either one may be used, or the first silencing member 7 may be fixed by only the pressing member 93 without using the fixing

members

91A and 91B.

The second muffler member 8 is disposed in a flow path from the sub-valve port 41a to the main valve port 23a, that is, in a downstream side of the first muffler member 7 when the first port 21 is on the primary side. The second muffler member 8 is a filter formed into a three-dimensional mesh shape by randomly bending a linear member, like the first muffler member 7, and may be a demister, for example. The first sound deadening member 7 has a higher density than the second sound deadening member 8. Here, the density means a mass per unit volume. As a result, the first muffler member 7 has a higher performance of subdividing the bubbles than the second muffler member 8. Further, parameters such as the thickness of the wire rod may be made different from each other so that the first silencer member 7 has a higher performance of subdividing the bubbles than the second silencer member 8.

The second muffler component 8 is disposed so as to be fitted (embedded without a gap) inside the cylindrical main valve portion 43 and so as to face the sub-valve port 41a in the Z direction. Thus, when the fluid having passed through the sub-valve port 41a flows into the main valve port 23a, the fluid necessarily passes through the second muffler member 8. The second silencing member 8 may be fastened and fixed to the lower end of the main valve portion 43 via, for example, a ring-shaped member.

Here, the opening and closing operations of the main valve element 4 and the sub valve element 5 in the motor-operated valve 1 will be described in detail. When the magnetic rotor 62 and the rotor shaft 61 are rotated by the driving of the stepping motor 6A, the rotor shaft 61 is moved in the Z direction by the screw feeding mechanism 6B of the male screw portion 61a of the rotor shaft 61 and the female screw portion 34a of the guide member 3. Thereby, the sub-valve body 5 moves forward and backward in the Z direction to approach or separate from the sub-valve port 41a, and the valve opening degree of the sub-valve port 41a is controlled (small flow rate control). Further, the guide boss portion 53 of the sub-valve body 5 engages with the engagement portion 931 of the pressing member 93, and the main valve body 4 moves together with the sub-valve body 5 and approaches or separates from the main valve seat 23 (large flow rate control). Thereby, the flow rate of the refrigerant flowing from the first joint pipe 11 to the second joint pipe 12 is controlled. In the present embodiment, even when the sub-valve body 5 is moved forward and backward in the Z direction and is closest to the sub-valve seat portion having the sub-valve port 41a, the sub-valve body 5 does not abut (seat) on the sub-valve seat portion, but a gap is formed between the sub-valve body 5 and the sub-valve seat portion, and fluid can pass through the sub-valve port 41a, but the sub-valve body 5 may be configured to seat on the sub-valve seat portion.

A guide groove 34b having a male screw shape is formed in the outer peripheral surface of the stopper portion 34 of the guide member 3, and a slider 63 is provided in the guide groove 34 b. The slider 63 abuts on the magnetic rotor 62, and rotates along the guide groove 34b with the rotation of the magnetic rotor 62 and moves up and down. The slider 63 constitutes a stopper mechanism 6C that abuts against the upper end or the lower end of the guide groove 34b to regulate the rotation of the magnetic rotor 62. The lowermost position and the uppermost position of the rotor shaft 61 and the magnetic rotor 62 are restricted by the stopper mechanism 6C.

Here, the flow of the fluid in the motor-operated valve 1 at the time of the small flow rate control will be described. First, fluid flows from the first port 21 into the main valve chamber 2R. The fluid may contain bubbles to be in a gas-liquid mixed state, and hereinafter, a case where bubbles are contained will be described. The fluid that has flowed into the main valve chamber 2R flows into the sub-valve chamber 4R through the communication passage 421. At this time, the fluid having passed through the communication passage 421 circulates in the annular space 412, passes through the communication portion 92B of the fixing member 91B, the first muffler member 7, and the communication portion 92A of the fixing member 91A, and reaches the sub-valve chamber 4R. When the fluid passes through the communication path 421 and flows toward the annular space 412, the flow direction is a direction along the XY plane. On the other hand, when the fluid flows from annular space 412 toward first muffler component 7, the direction of the flow is the direction along the Z direction. That is, the direction of flow turns at substantially right angles, and the flow velocity decreases.

As described above, the fluid passes through the first silencing part 7, and the bubbles are subdivided. Then, the fluid flows through the sub-port 41a, is throttled, passes through the second muffler component 8, and then flows toward the main port 23 a. At this time, since the density of the second muffler component 8 is lower than that of the first muffler component 7, the fluid is less likely to stay in the second muffler component 8.

When the fluid passes (flows out of) the sub-valve port 41a, the pressure is rapidly reduced, and thus bubbles of various sizes are easily contained in the fluid, and the fluid is easily formed into a jet flow flowing out of the sub-valve port. Therefore, when the performance of subdividing the bubbles is equal (for example, the density is equal) in the first muffler member 7 and the second muffler member 8, and when the performance of subdividing the bubbles is higher (for example, the density is higher) in the second muffler member 8 than in the first muffler member 7, the fluid passing through the sub-valve port 41a is less likely to pass through the second muffler member, and a part of the fluid is likely to remain, and the fluid is likely to be in a more unstable state.

According to the present embodiment described above, the first muffler member 7 disposed in the flow passage from the communication passage 421 to the sub-valve port 41a has a higher density than the second muffler member 8 disposed in the flow passage from the sub-valve port 41a to the main valve port 23a, so that the fluid flows toward the sub-valve port 41a in a state where the bubbles are sufficiently subdivided by the first muffler member 7, thereby reducing noise, and the fluid flowing out of the sub-valve port 41a passes through the low-density second muffler member 8, and is less likely to stagnate when passing through the second muffler member 8. Therefore, the flow of the fluid can be stabilized, and the noise can be further reduced. In this case, in the configuration in which only the high-density first muffler member is provided and the second muffler member is not provided, noise is generated due to rapid pressure reduction of the fluid at the sub-valve port, but compared to such a configuration, in the present embodiment, the flow of the fluid that is unstable by the sub-valve port can be stabilized, and noise can be sufficiently reduced.

Further, by forming the annular space 412 between the communication passage 421 and the first muffler member 7, the velocity of the fluid can be reduced before reaching the first muffler member 7.

Further, by forming the plurality of communication passages 421, variation in the flow rate of the fluid in the circumferential direction can be reduced as compared with a configuration in which the fluid is introduced into the sub-valve chamber 4R from one communication passage.

Further, by arranging annular space 412 and first muffler member 7 in the Z direction, the extending direction of communication passage 421 and the direction from annular space 412 toward first muffler member 7 can be made to intersect with each other, and the speed of the fluid can be reduced before it reaches first muffler member 7.

The first silencing member 7 and the second silencing member 8 have passage portions of various sizes as passage portions through which fluid can pass by bending the linear members randomly. Therefore, even when the fluid contains bubbles of various sizes, the fluid can be easily made fine-bubble.

The present invention is not limited to the above-described embodiments, and includes other configurations and the like that can achieve the object of the present invention, and modifications and the like described below are also included in the present invention. For example, although the plurality of communication paths 421 are formed at equal intervals in the above embodiment, the present invention is not limited to such a configuration. That is, a plurality of communication paths may be arranged at different intervals from each other, or only one communication path may be formed.

In the above embodiment, the annular space 412 and the first silencing member 7 are arranged in the Z direction, but the annular space and the first silencing member may be arranged, for example, along the extending direction of the communication passage.

In the above embodiment, the annular space 412 is formed between the communication passage 421 and the first muffler member 7, but the annular space may not be formed, and the fluid may be allowed to flow directly into the first muffler member from the communication passage. With this structure, the main spool can be easily downsized.

While the embodiments of the present invention have been described in detail with reference to the drawings, the specific configurations are not limited to these embodiments, and design changes and the like within a range not departing from the gist of the present invention are also included in the present invention.

Claims

1. An electrically operated valve, comprising: a valve housing; a main valve body that changes an opening degree of a main valve port of a main valve chamber provided in the valve housing; an auxiliary valve body that changes an opening degree of an auxiliary valve port provided in an auxiliary valve chamber of the main valve body; and a driving section for driving the sub valve body to advance and retreat in an axial direction, wherein the electric valve is provided with a communication passage for communicating the main valve chamber and the sub valve chamber,

the electrically operated valve is characterized by comprising:

a first muffler member disposed in a flow path from the communication passage to the sub-port; and

a second muffler member disposed in a flow path from the sub-port to the main port,

the first muffler member and the second muffler member are formed to subdivide the flow path, and the first muffler member has a higher density than the second muffler member.

2. Electrically operated valve according to claim 1,

the communication passage is formed on a side surface of the cylindrical portion of the main valve body,

an annular space is formed between the communication passage and the first muffler member along the cylindrical portion.

3. Electrically operated valve according to claim 2,

a plurality of the communication passages communicating with the annular space are formed in a side surface of the cylindrical portion.

4. Electrically operated valve according to claim 2 or 3,

the annular space and the first silencing part are arranged side by side in the axial direction of the annular space.

5. Electrically operated valve according to any of claims 1 to 4,

the first muffler member and the second muffler member are filters formed in a three-dimensional mesh shape.

6. Electrically operated valve according to claim 5,

the first muffler member and the second muffler member are formed in a three-dimensional mesh shape by randomly bending a linear member.