CN115094401A - Graphite boat suitable for conductive film deposition - Google Patents
Graphite boat suitable for conductive film deposition Download PDFInfo
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- CN115094401A CN115094401A CN202210337015.1A CN202210337015A CN115094401A CN 115094401 A CN115094401 A CN 115094401A CN 202210337015 A CN202210337015 A CN 202210337015A CN 115094401 A CN115094401 A CN 115094401A
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- boat
- graphite boat
- graphite
- layer sleeve
- hole
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 217
- 239000010439 graphite Substances 0.000 title claims abstract description 217
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 217
- 230000008021 deposition Effects 0.000 title claims abstract description 23
- 125000006850 spacer group Chemical group 0.000 claims description 38
- 239000000919 ceramic Substances 0.000 claims description 25
- 238000000151 deposition Methods 0.000 claims description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 239000011810 insulating material Substances 0.000 claims description 4
- 238000000427 thin-film deposition Methods 0.000 claims 4
- 239000010408 film Substances 0.000 claims 3
- 239000011800 void material Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 235000012431 wafers Nutrition 0.000 description 13
- 239000004020 conductor Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Secondary Cells (AREA)
- Resistance Heating (AREA)
Abstract
The invention discloses a graphite boat suitable for conductive film deposition, which belongs to the technical field of solar cell production and comprises a graphite boat piece, graphite clamping points and a connecting structure, wherein the graphite boat piece comprises an outer graphite boat piece and a middle graphite boat piece; the middle graphite boat piece comprises a boat piece body and an electrode connecting plate, wherein the boat piece body comprises a bearing part and a connecting part; the connecting part is provided with a connecting hole and a clearance hole; the insulating sleeve comprises an inner layer sleeve, a middle layer sleeve and an outer layer sleeve, wherein the inner layer sleeve comprises a mounting hole, a connecting outer wall and a limiting convex ring; the middle-layer sleeve comprises a first sleeve hole and a first accommodating hole, the diameter of the first accommodating hole is larger than that of the limiting convex ring, the length of the first accommodating hole is smaller than that of the limiting convex ring, and the inner end surface of the first accommodating hole abuts against one end of the limiting convex ring; the outer layer sleeve comprises a second sleeve hole and a second accommodating hole, the diameter of the second accommodating hole is larger than the outer diameter of the middle layer sleeve, and the inner end face of the second accommodating hole abuts against the other end of the limiting convex ring. The graphite boat is suitable for conductive and non-conductive film deposition.
Description
Technical Field
The invention relates to the technical field of solar cell production, in particular to a graphite boat suitable for conductive film deposition.
Background
The graphite boat is a bearing tool for carrying out film deposition on the surface of a polycrystalline or monocrystalline silicon wafer treated by texturing, diffusion and other processes in a plasma enhanced chemical vapor deposition tube furnace by adopting a plasma enhanced chemical vapor deposition process. The existing graphite boat comprises a plurality of graphite boat pieces, a plurality of graphite cushion blocks, a plurality of graphite boat feet, a plurality of ceramic rods, a plurality of graphite rods, a ceramic ring and a graphite nut; because one of the two adjacent graphite boat pieces is connected with the negative electrode of the power supply, and the other is connected with the positive electrode of the power supply, the two adjacent graphite boat pieces are connected together through the ceramic rod and the ceramic ring, and the conduction of the two adjacent graphite boat pieces is prevented. In the graphite boat, the two adjacent graphite boats are separated by the ceramic sleeve, when the film needing to be deposited is made of a conductive material, the deposited conductive film is attached to the surface of the ceramic sleeve, so that the ceramic sleeve is conductive, and the two ends of the ceramic sleeve are respectively abutted between the two adjacent graphite boat sheets, so that the ceramic sleeve is conductive to lead the adjacent graphite boat sheets to be conductive, and the requirements of a plasma enhanced chemical vapor deposition process are not met.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a graphite boat suitable for conductive film deposition, wherein the graphite boat is not only suitable for non-conductive film deposition, but also suitable for conductive film deposition.
The technical scheme for solving the technical problems is as follows:
a graphite boat suitable for conductive film deposition comprises a boat sheet assembly, graphite clamping points arranged on the boat sheet assembly and a connecting structure for connecting the boat sheet assembly, wherein the boat sheet assembly comprises two graphite outer boat sheets arranged on the outermost side and a middle graphite boat sheet arranged between the graphite outer boat sheets, one of the two adjacent graphite boat sheets is connected with a positive electrode of a power supply, and the other graphite boat sheet is connected with a negative electrode of the power supply;
the middle graphite boat piece comprises a boat piece body and an electrode connecting plate for connecting an electrode, wherein the boat piece body comprises a bearing part for bearing a silicon wafer and a connecting part for connecting with other graphite boat pieces; the connecting part is provided with a connecting hole for accommodating the connecting rod, the connecting part is provided with a space avoiding part for avoiding the spacer bush, and after the graphite boat is assembled, the space avoiding part corresponds to the connecting hole on the graphite boat piece of the opposite electrode;
the connecting structure comprises a graphite nut, a spacer bush, an insulating bush and a ceramic connecting rod for connecting graphite sheets, wherein the ceramic connecting rod penetrates through connecting holes in graphite boat sheets with the same polarity, the spacer bush is sleeved on the ceramic connecting rod and is positioned between adjacent graphite boat sheets with the same polarity, and the spacer bush is positioned at a clearance part on the graphite boat sheets with opposite polarities; the graphite nuts are locked at two ends of the ceramic connecting rod to connect and fix the boat assembly;
the insulating sleeve comprises an inner layer sleeve, a middle layer sleeve and an outer layer sleeve, wherein the inner layer sleeve, the middle layer sleeve and the outer layer sleeve are all made of insulating materials, the inner layer sleeve comprises a mounting hole matched with the insulating connecting rod, a connecting outer wall connected with the middle layer sleeve and the outer layer sleeve and a limiting convex ring arranged on the connecting outer wall;
the middle layer sleeve comprises a first sleeve hole and a first accommodating hole, the first sleeve hole is used for being matched with the connecting outer wall, the diameter of the first accommodating hole is larger than that of the limiting convex ring, the length of the first accommodating hole is smaller than that of the limiting convex ring, and the inner end face of the first accommodating hole abuts against one end of the limiting convex ring;
the outer layer sleeve comprises a second sleeve hole and a second accommodating hole, the second sleeve hole is used for being matched with the connecting outer wall, the diameter of the second accommodating hole is larger than the outer diameter of the middle layer sleeve, and the inner end face of the second accommodating hole abuts against the other end of the limiting convex ring.
The working principle of the graphite boat is as follows:
when the insulating sleeve is assembled, firstly, the middle-layer sleeve is sleeved from one end of the inner-layer sleeve, the first sleeve hole is sleeved on the connecting outer wall, and the inner end face of the first accommodating hole abuts against one end of the limiting convex ring; then the outer layer sleeve is sleeved from the other end of the inner layer sleeve, the second sleeve hole is sleeved on the connecting outer wall, and the inner end face of the second accommodating hole abuts against the other end of the limiting convex ring to complete the assembly of the insulating sleeve; when loading the graphite boat, the graphite boat sheets connected with the positive electrode and the graphite boat sheets connected with the negative electrode are arranged in a staggered mode, and the ceramic connecting rod penetrates through the connecting hole of the graphite boat sheets so as to connect the graphite boat sheets; the spacer bush is arranged between the graphite boat pieces with the same polarity and sleeved on the connecting rod, one end of the spacer bush is tightly propped against one of the graphite boat pieces, and the other end of the spacer bush is tightly propped against the other graphite boat piece, so that the graphite boat pieces with the same polarity are fixedly connected at intervals according to the length of the spacer bush; and the insulating sleeve is arranged between the outermost graphite outer boat sheet and the second layer of graphite boat sheet from the outside to the inside, and the connecting rod respectively penetrates through the outermost graphite boat sheet and the mounting holes of the inner layer sleeve to be connected with other graphite boat sheets. In the graphite boat, the positive electrode graphite boat pieces and the negative electrode graphite boat pieces are arranged in a staggered mode, so that after the graphite boat pieces with the same polarity are connected by the spacer sleeves, the spacer sleeves can stretch across the graphite boat pieces with opposite polarities, and due to the fact that the connecting portions of the graphite boat pieces are provided with the clearance holes, the positions of the clearance holes correspond to the positions of the connecting holes in the graphite boat pieces with opposite polarities, the spacer sleeves cannot be connected with the graphite boat pieces with opposite polarities after the graphite boat is assembled. When a film is deposited, in the process of depositing a film, the conductive film can be deposited on the spacer bush to cause the spacer bush to be conductive, and the arrangement of the clearance hole enables the graphite boat piece of the opposite electrode to avoid contacting with the spacer bush, so that the polarities of the two adjacent graphite boat pieces are opposite; in the insulating sleeve, the diameter of the first accommodating hole is larger than that of the limiting convex ring, so that a small gap is formed between the first accommodating hole and the limiting convex ring; the diameter of the second accommodating hole is larger than the outer diameter of the middle layer sleeve, so that a gap is also formed between the second accommodating hole and the middle layer sleeve; the length of the first accommodating hole is smaller than that of the limiting convex ring, the outer end of the first accommodating hole is slightly away from the other end of the limiting convex ring under the condition that the inner end face of the first accommodating hole abuts against the limiting convex ring, and the inner end of the second accommodating hole abuts against the other end of the limiting convex ring, so that a gap also exists between the outer end of the first accommodating hole and the inner end of the second accommodating hole, and the gap is communicated with the first two gaps, so that a cavity is formed in the insulating sleeve. Because the middle layer sleeve, the inner layer sleeve and the outer layer sleeve are mutually wrapped and a communicated cavity is formed in the inner layer sleeve, when a film is deposited, even if the film of the conductive material is deposited on the outer surface of the insulating sleeve, the film is not deposited on the inner cavity, and the insulating sleeve can be ensured to be insulated all the time. Therefore, the clearance holes are formed in the graphite boat pieces, the insulating sleeves are arranged in the outer graphite boat piece and the adjacent graphite boat pieces, the graphite boat is applicable to film deposition of conductive materials and film deposition of non-conductive materials, the application range of the graphite boat is greatly improved, the utilization rate of the graphite boat is improved, and the production cost is reduced.
According to a preferable scheme of the invention, the number of the electrode connecting plates is two, and the two electrode connecting plates are respectively arranged on two sides of the boat sheet body.
In a preferred embodiment of the present invention, the connecting portion includes an upper connecting portion located above the boat body and a lower connecting portion located below the boat body; the upper connecting part is provided with a plurality of connecting holes and a plurality of space avoiding parts; the lower connecting part is also provided with a plurality of connecting holes and a plurality of avoiding parts.
According to a preferable scheme of the invention, a plurality of connecting holes are uniformly distributed on the connecting part along the length direction of the boat sheet body; the plurality of void-avoiding portions are evenly arranged on the connecting portion, and the connecting holes and the void-avoiding portions are arranged in a staggered mode.
In a preferred embodiment of the present invention, the recess is a hole for breaking a margin.
In a preferred embodiment of the present invention, the bearing portion includes a plurality of bearing positions, and a plurality of clamping holes for installing graphite clamping points are formed in the plurality of bearing positions.
Preferably, the bearing position is arranged in the middle of the boat sheet body and is positioned between the upper connecting part and the lower connecting part; the bearing positions are uniformly arranged along the length direction of the boat sheet body.
In a preferable scheme of the invention, the bearing position is further provided with a rectangular hole, and the clamping position hole is arranged around the rectangular hole.
In a preferred embodiment of the present invention, three clipping holes are disposed on each carrying position, and the three clipping holes include a supporting clipping hole disposed below the rectangular hole and side clipping holes disposed on two sides of the rectangular hole.
In a preferred embodiment of the present invention, the graphite boat piece comprises a positive electrode graphite boat piece connected with a positive electrode and a negative electrode graphite boat piece connected with a negative electrode; in the positive graphite boat piece, the electrode connecting plates are positive electrode connecting plates, and the two positive electrode connecting plates are respectively arranged on two sides of the boat piece body and are positioned at the upper part of the boat piece body; in the negative graphite boat piece, the electrode connecting plates are negative electrode connecting plates, and the two negative electrode connecting plates are arranged on two sides of the boat piece body and are positioned on the lower part of the boat piece body.
In a preferred embodiment of the present invention, the inner layer sleeve, the middle layer sleeve and the outer layer sleeve are made of ceramic materials.
According to a preferable scheme of the invention, in the direction from the middle layer sleeve to the outer layer sleeve, the front end of the inner layer sleeve is flush with the front end of the outer layer sleeve, and the rear end of the inner layer sleeve is flush with the rear end of the middle layer sleeve.
According to a preferable scheme of the invention, in the direction from the middle layer sleeve to the outer layer sleeve, the front end of the inner layer sleeve is flush with the front end of the outer layer sleeve, and the rear end of the inner layer sleeve exceeds the rear end of the middle layer sleeve.
According to a preferable scheme of the invention, in the direction from the middle layer sleeve to the outer layer sleeve, the front end of the inner layer sleeve exceeds the front end of the outer layer sleeve, and the rear end of the inner layer sleeve is flush with the rear end of the middle layer sleeve.
According to a preferable scheme of the invention, in the direction from the middle layer sleeve to the outer layer sleeve, the front end of the inner layer sleeve exceeds the front end of the outer layer sleeve, and the rear end of the inner layer sleeve exceeds the rear end of the middle layer sleeve.
According to a preferable scheme of the invention, in the direction from the middle layer sleeve to the outer layer sleeve, the front end of the outer layer sleeve exceeds the front end of the inner layer sleeve, and the rear end of the inner layer sleeve exceeds the rear end of the middle layer sleeve.
According to a preferable scheme of the invention, in the direction from the middle layer sleeve to the outer layer sleeve, the front end of the inner layer sleeve exceeds the front end of the outer layer sleeve, and the rear end of the middle layer sleeve exceeds the rear end of the inner layer sleeve.
According to a preferable scheme of the invention, in the direction from the middle layer sleeve to the outer layer sleeve, the front end of the outer layer sleeve exceeds the front end of the inner layer sleeve, and the rear end of the middle layer sleeve exceeds the rear end of the inner layer sleeve.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the graphite boat, the clearance holes are formed in the boat body, so that the spacer sleeves between the graphite boat pieces with opposite polarities can be avoided, and when the graphite boat is subjected to deposition coating, no matter whether a coating material is conductive or non-conductive, the graphite boat pieces can be prevented from being in contact with the graphite boat pieces with opposite polarities, so that the opposite polarities between the adjacent graphite boat pieces can be ensured, and the principle requirement of deposition coating of the graphite boat is met.
2. According to the graphite boat, the spacer sleeves are arranged between the graphite boat pieces with the same polarity to replace the traditional insulating sleeves, and the clearance holes are formed in the graphite boat pieces, so that the graphite boat pieces and the spacer sleeves are staggered, the normal use of the graphite boat is not influenced under the condition that the spacer sleeves are conductive, the materials of the spacer sleeves are more diversified, and conductive materials and non-conductive materials can be selected.
3. According to the graphite boat, the insulating sleeve is formed by combining the inner layer sleeve, the middle layer sleeve and the outer layer sleeve, the inner layer sleeve is arranged, the middle layer sleeve and the outer layer sleeve can be guaranteed not to be in contact, and compared with the traditional mode that only two assemblies are arranged, the graphite boat is better in insulating effect.
4. According to the graphite boat, in the joint edge sleeve, the middle layer sleeve, the inner layer sleeve and the outer layer sleeve are mutually included and a communicated cavity is formed in the joint edge sleeve, and even if a film made of a conductive material is deposited on the outer surface of the insulating sleeve during film deposition, the middle layer sleeve and the outer layer sleeve are mutually embraced to form the cavity, so that the embracing structure can prevent the conductive film from being deposited in the cavity, the middle layer sleeve and the outer layer sleeve are prevented from being conductive, and the insulating sleeve can be always kept insulated.
Drawings
FIGS. 1-5 are schematic views of a first embodiment of a graphite boat in accordance with the present invention, wherein FIG. 1 is a perspective view of the graphite boat; FIG. 2 is an enlarged view of a portion of the graphite boat; fig. 3 is a front view of the positive electrode graphite boat piece; fig. 4 is a front view of the negative graphite boat piece; fig. 5 is a front sectional view of the insulating sheath.
Fig. 6 to 11 are sectional front views of an insulating sheath, wherein fig. 6 is a sectional front view of a second embodiment, fig. 7 is a sectional front view of a third embodiment, fig. 8 is a sectional front view of a fourth embodiment, fig. 9 is a sectional front view of a fifth embodiment, fig. 10 is a sectional front view of a sixth embodiment, and fig. 11 is a sectional front view of a seventh embodiment.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but the present invention is not limited thereto.
Example 1
Referring to fig. 1-5, the device comprises a boat piece assembly, graphite clamping points 10 arranged on the boat piece assembly, and a connecting structure for connecting the boat piece assembly, wherein the boat piece assembly comprises two graphite outer boat pieces 11A arranged on the outermost side and a middle graphite boat piece arranged between the graphite outer boat pieces 11A, one of the two adjacent boat pieces is connected with a positive electrode of a power supply, and the other boat piece is connected with a negative electrode of the power supply;
the middle graphite boat piece comprises a boat piece body 1A and an electrode connecting plate for connecting electrodes, wherein the boat piece body 1A comprises a bearing part 2A for bearing a silicon wafer and a connecting part 3A for connecting other graphite boat pieces; the connecting part 3A is provided with a connecting hole 5A for accommodating a connecting rod, the connecting part 3A is provided with a space avoiding part 6A for avoiding the spacer bush 14A, and after the graphite boat is assembled, the space avoiding part 6A corresponds to the connecting hole 5A on the graphite boat sheet of the opposite electrode;
the connecting structure comprises a graphite nut 13A, a spacer bush 14A, an insulating bush 15A and a ceramic connecting rod 16A for connecting graphite sheets, wherein the ceramic connecting rod 16A penetrates through a connecting hole 5A on a graphite boat sheet with the same polarity, the spacer bush 14A is sleeved on the ceramic connecting rod 16A and is positioned between adjacent graphite boat sheets with the same polarity, and the spacer bush 14A is positioned at a clearance part 6A on the graphite boat sheet with the opposite polarity; the graphite nuts 13A are locked at two ends of the ceramic connecting rod 16A to connect and fix the boat piece assembly;
the insulating sleeve 15A comprises an inner layer sleeve 1B, a middle layer sleeve 2B and an outer layer sleeve 3B, the inner layer sleeve 1B, the middle layer sleeve 2B and the outer layer sleeve 3B are all made of insulating materials, the inner layer sleeve 1B comprises a mounting hole 1-1B used for being matched with an insulating connecting rod, a connecting outer wall used for being connected with the middle layer sleeve 2B and the outer layer sleeve 3B and a limiting convex ring 1-2B arranged on the connecting outer wall;
the middle-layer sleeve 2B comprises a first sleeve hole 2-1B and a first accommodating hole 2-2B, the first sleeve hole is used for being matched with the connecting outer wall, the diameter of the first accommodating hole 2-2B is larger than that of the limiting convex ring 1-2B, the length of the first accommodating hole 2-2B is smaller than that of the limiting convex ring 1-2B, and the inner end face of the first accommodating hole 2-2B abuts against one end of the limiting convex ring 1-2B;
the outer layer sleeve 3B comprises a second sleeve hole 3-1B and a second accommodating hole 3-2B, the second sleeve hole is used for being matched with the connecting outer wall, the diameter of the second accommodating hole 3-2B is larger than the outer diameter of the middle layer sleeve 2B, and the inner end face of the second accommodating hole 3-2B abuts against the other end of the limiting convex ring 1-2B.
Referring to fig. 1 to 5, there are two electrode connecting plates, and the two electrode connecting plates are respectively disposed on two sides of the boat body 1A.
Referring to fig. 1-5, the connecting portion 3A includes an upper connecting portion 3-1A located above the boat sheet body 1A and a lower connecting portion 3-2A located below the boat sheet body 1A; wherein, the upper connecting part 3-1A is provided with a plurality of connecting holes 5A and a plurality of avoiding parts 6A; the lower connecting part 3-2A is also provided with a plurality of connecting holes 5A and a plurality of avoiding parts 6A. The connecting parts 3A are arranged, when the graphite boat pieces are connected, the upper connecting parts 3-1A and the lower connecting parts 3-2A are respectively provided with the connecting holes 5A, so that the upper parts and the lower parts of the graphite boat pieces are respectively penetrated by the connecting rods, namely the upper parts and the lower parts are connected, the connection is reliable, and the assembly of the graphite boat is more stable.
Referring to fig. 1 to 5, along the length direction of the boat body 1A, a plurality of connecting holes 5A are uniformly arranged on the connecting portion 3A; the plurality of void-avoiding portions 6A are uniformly arranged on the connecting portion 3A, and the plurality of connecting holes 5A and the void-avoiding portions 6A are arranged in a staggered manner. Thus, a plurality of connecting holes 5A are arranged, so that a plurality of connecting rods can penetrate through the graphite boat piece in the length direction, and the stability and reliability of the connection of the graphite boat piece are improved; the plurality of air avoiding parts 6A are arranged, connecting rods on the graphite boat pieces with opposite polarities can be just avoided, and correspond to the connecting rods on the boat piece bodies 1A with opposite polarities, namely, the purpose is that when the graphite boat pieces are assembled into a graphite boat, a plurality of connecting rods are arranged in the length direction of the graphite boat for connection, and the overall stability and reliability of the graphite boat are improved.
Referring to fig. 1 to 5, the void-avoiding portion 6A is a hole for breaking edges. The edge breaking hole with the structure is arranged, and the air escape part 6A is arranged on the upper part and the lower part of the boat sheet body 1A, so that the distance between the outer edge of the hole and the outer edge of the boat sheet body 1A is very small if the whole hole is arranged, and the strength of the part is weak, on one hand, when the edge breaking hole is processed, the boat sheet body 1A is easy to crack, on the other hand, the boat sheet body 1A is also easy to crack when a graphite boat is carried and assembled, and the manufacturing cost is increased. The blank avoiding part 6A is arranged as a broken edge hole, so that the problems can be avoided, and the production cost is reduced; the hollow portion 6A may also be a hole with a closed periphery, and the shape thereof may be circular, square or other shapes.
Referring to fig. 1 to 5, the bearing part 2A includes a plurality of bearing positions, and a plurality of bearing positions are provided with a clamping position hole 4A for installing a graphite clamping point 10A.
Referring to fig. 1-5, the bearing position is arranged in the middle of the boat sheet body 1A and between the upper connecting part 3-1A and the lower connecting part 3-2A; the plurality of carrying positions are uniformly arranged along the length direction of the boat body 1A. The plurality of bearing positions are arranged, and each bearing position can be loaded with one silicon wafer, so that a plurality of silicon wafers can be loaded in the length direction of one graphite boat piece, namely, a plurality of silicon wafers can be deposited and coated at one time, and the efficiency of depositing and coating the film on the silicon wafers is improved.
Referring to fig. 1-5, a rectangular hole 7A is further formed in the carrying position, and the position-locking hole 4A is disposed around the rectangular hole 7A. The bearing position with the structure is arranged, so that in the process of depositing and coating, the rectangular hole 7A effectively reduces the contact area between the graphite boat piece and the silicon wafer, and reduces the abnormity generated in the coating process, such as different film thicknesses, color difference and the like; on the other hand, the rectangular hole 7A is formed in the bearing position, so that the weight of the graphite boat piece can be greatly reduced, and meanwhile, the structural strength of the graphite boat piece cannot be influenced, and multiple purposes can be achieved.
Referring to fig. 1-5, three retainer holes 4A are formed in each of the carrying positions, and each of the three retainer holes 4A includes a support retainer hole 4A formed below the rectangular hole 7A and side retainer holes 4A formed on both sides of the rectangular hole 7A. The clamping holes 4A are arranged, when the graphite boat is assembled, the graphite clamping points 10A are respectively installed on the supporting clamping holes 4A and the side clamping holes 4A, therefore, the graphite clamping points 10A on the supporting clamping holes 4A are used for supporting the weight of the silicon wafer, the graphite clamping points 10A on the side clamping holes 4A are used for limiting the left and right directions of the silicon wafer, after the silicon wafer is loaded on the bearing position, the silicon wafer is equivalently supported by three supporting points, and the loading of the silicon wafer is safe and reliable.
Referring to fig. 1 to 5, the graphite boat piece includes a positive graphite boat piece 17A for connection with a positive electrode and a negative graphite boat piece 18A for connection with a negative electrode; in the positive graphite boat piece 17A, the electrode connecting plates are positive electrode connecting plates 8A, and the two positive electrode connecting plates 8A are respectively arranged on two sides of the boat piece body 1A and are positioned on the upper part of the boat piece body 1A; in the negative graphite boat piece 18A, the electrode connecting plates are negative electrode connecting plates 9A, and the two negative electrode connecting plates 9A are arranged on two sides of the boat piece body 1A and are positioned at the lower part of the boat piece body 1A. By arranging the graphite boat piece with the structure, when the graphite boat is assembled, the positive electrode graphite boat piece 17A and the negative electrode graphite boat piece 18A are sequentially arranged in a staggered manner, so that the positive electrode connecting plate 8A is positioned at the upper part of the graphite boat, and the negative electrode connecting plate 9A is positioned at the lower part of the graphite boat, so that the graphite boat is conveniently connected with the positive electrode and the negative electrode respectively. In the positive electrode graphite boat 17A, the positive electrode connecting plate 8A may be provided at the lower part of the boat body 1A, and in the negative electrode graphite boat 18A, the negative electrode connecting plate 9A may be provided at the upper part of the boat body 1A.
Referring to fig. 1-5, the inner layer sleeve 1B, the middle layer sleeve 2B and the outer layer sleeve 3B are made of ceramic materials. The ceramic material is used as the material of the insulating sleeve, so that on one hand, the insulating property of the ceramic is good, on the other hand, the hardness of the ceramic is good, the wear resistance is good, and the service life of the insulating sleeve can be greatly prolonged. In this embodiment, the inner layer cover 1B, the middle layer cover 2B and the outer layer cover 3B may be made of other insulating materials, such as plastic and mica.
Referring to fig. 1 to 5, in a direction from the middle layer sleeve 2B to the outer layer sleeve 3B, the front end of the inner layer sleeve 1B is flush with the front end of the outer layer sleeve 3B, and the rear end of the inner layer sleeve 1B is flush with the rear end of the middle layer sleeve 2B. The insulating sleeve with the structure is arranged, the front end of the insulating sleeve is formed by combining the front ends of the inner layer sleeves 1B, the rear end of the insulating sleeve is formed by combining the rear ends of the inner layer sleeves 1B and the middle layer sleeves 2B, the insulating sleeve in the combined form has the largest end surface area, and when the insulating sleeve is installed on a graphite boat, the two ends of the insulating sleeve are more stably and reliably connected with the graphite boat piece.
Referring to fig. 1-5, the graphite boat described above works according to the following principle:
when the insulating sleeve 15A is assembled, firstly, the middle-layer sleeve 2B is sleeved from one end of the inner-layer sleeve 1B, the first sleeve hole 2-1B is sleeved on the connecting outer wall, and the inner end surface of the first accommodating hole 2-2B is enabled to be tightly abutted against one end of the limiting convex ring 1-2B; then the outer layer sleeve 3B is sleeved from the other end of the inner layer sleeve 1B, the second sleeve hole 3-1B is sleeved on the connecting outer wall, and the inner end face of the second accommodating hole 3-2B is enabled to tightly abut against the other end of the limiting convex ring 1-2B, so that the assembly of the insulating sleeve 15A is completed; when loading the graphite boat, the graphite boat sheets connected with the positive electrode and the graphite boat sheets connected with the negative electrode are arranged in a staggered mode, and the ceramic connecting rod 16A penetrates through the connecting hole 5A of the graphite boat sheets, so that a plurality of graphite boat sheets are connected; the spacer bush 14A is arranged between the graphite boat pieces with the same polarity, the spacer bush 14A is sleeved on the connecting rod, one end of the spacer bush is tightly propped against one of the graphite boat pieces, and the other end of the spacer bush is tightly propped against the other graphite boat piece, so that the graphite boat pieces with the same polarity are fixedly connected at intervals according to the length of the spacer bush 14A; and the insulating sleeve 15A is arranged between the outermost graphite outer boat sheet 11A and the second layer graphite boat sheet from the outside to the inside, and the connecting rods respectively penetrate through the mounting holes 1-1B of the outermost graphite boat sheet and the inner layer sleeve 1B to be connected with other graphite boat sheets. In the graphite boat, the positive electrode graphite boat pieces and the negative electrode graphite boat pieces are arranged in a staggered mode, so that after the spacer bush 14A connects the graphite boat pieces with the same polarity, the spacer bush 14A can stretch across the graphite boat pieces with opposite polarities, and as the connecting part 3A of the graphite boat pieces is provided with the clearance holes 6A, and the positions of the clearance holes 6A correspond to the positions of the connecting holes 5A on the graphite boat pieces with opposite polarities, the spacer bush 14A cannot be connected with the graphite boat pieces with opposite polarities after the graphite boat is assembled. During film deposition, for a deposited film of a conductive material, in the process of film deposition and coating, the conductive film can be deposited on the spacer bush 14A to cause the spacer bush 14A to be conductive, and the arrangement of the clearance holes 6A enables the graphite boat pieces of the opposite electrodes to be prevented from contacting the spacer bush 14A, so that the polarities of the two adjacent graphite boat pieces are opposite; in the insulating sleeve 15A, the diameter of the first accommodating hole 2-2B is larger than that of the limiting convex ring 1-2B, so that a small gap is formed between the first accommodating hole 2-2B and the limiting convex ring 1-2B; the diameter of the second receiving bore 3-2B is larger than the outer diameter of the middle bush 2B, so that a gap is likewise formed between the second receiving bore 3-2B and the middle bush 2B; the length of the first accommodating hole 2-2B is smaller than that of the limiting convex ring 1-2B, under the condition that the inner end face of the first accommodating hole 2-2B abuts against the limiting convex ring 1-2B, the outer end of the first accommodating hole 2-2B is slightly away from the other end of the limiting convex ring 1-2B, and the inner end of the second accommodating hole 3-2B abuts against the other end of the limiting convex ring 1-2B, so that a gap also exists between the outer end of the first accommodating hole 2-2B and the inner end of the second accommodating hole 3-2B, and the gap is communicated with the two gaps, so that a cavity is formed in the insulating sleeve 15A. Because the middle layer sleeve 2B, the inner layer sleeve 1B and the outer layer sleeve 3B are mutually wrapped and a communicated cavity is arranged in the middle layer sleeve, when a film is deposited, even if the film of a conductive material is deposited on the outer surface of the insulating sleeve 15A, the film deposition of the part of the inner cavity is avoided, and the insulating sleeve 15A can be always kept insulated. Therefore, the clearance holes 6A are formed in the graphite boat sheet, the insulating sleeves 15A are formed in the graphite outer boat sheet 11A and the adjacent graphite boat sheet, the graphite outer boat sheet and the insulating sleeves are applicable to film deposition of conductive materials and film deposition of non-conductive materials, the application range of the graphite boat is greatly improved, the utilization rate of the graphite boat is improved, and the production cost is reduced.
Example 2
Referring to fig. 6, the present embodiment is different from embodiment 1 in that the front end of the inner layer case 1B is flush with the front end of the outer layer case 3B in the direction from the middle layer case 2B to the outer layer case 3B, and the rear end of the inner layer case 1B exceeds the rear end of the middle layer case 2B. Set up the insulating cover of above-mentioned structure, the front end of insulating cover is formed by the front end combination of inlayer cover 1B, and the rear end of insulating cover comprises inlayer cover 1B's rear end, like this, under the condition that inlayer cover 2B and inlayer cover 1B keep original length, through the length of extension inlayer cover 1B's rear end, can prolong the length of whole insulating cover, accord with the longer requirement of adjacent two graphite boat pieces distance.
Example 3
Referring to fig. 7, the present embodiment is different from embodiment 1 in that the front end of the inner layer case 1B is beyond the front end of the outer layer case 3B in the direction from the middle layer case 2B to the outer layer case 3B, and the rear end of the inner layer case 1B is flush with the rear end of the middle layer case 2B. Set up the insulating cover of above-mentioned structure, the rear end of insulating cover is formed by the rear end of inlayer cover 1B and the rear end combination of inlayer cover 2B, the front end of insulating cover has inlayer cover 1B's front end to constitute, like this, under the condition that inlayer cover 2B and inlayer cover 1B keep original length, through the length of the front end of extension inlayer cover 1B, can prolong the length of whole insulating cover, accord with the longer requirement of distance between the adjacent two graphite boat pieces.
Example 4
Referring to fig. 8, the present embodiment is different from embodiment 1 in that the front end of the inner layer casing 1B exceeds the front end of the outer layer casing 3B, and the rear end of the inner layer casing 1B exceeds the rear end of the middle layer casing 2B in the direction from the middle layer casing 2B to the outer layer casing 3B. Set up the insulating cover of above-mentioned structure, the front end of insulating cover, rear end constitute by the front end and the rear end of inlayer cover 1B respectively, like this, under the unchangeable circumstances of original length is kept with inlayer cover 1B to middle level cover 2B, through the length at extension inlayer cover 1B both ends, can further prolong the length of whole insulating cover, accord with the longer requirement of distance between the adjacent two graphite boat pieces.
Example 5
Referring to fig. 9, the present embodiment is different from embodiment 1 in that the front end of the outer layer sleeve 3B exceeds the front end of the inner layer sleeve 1B, and the rear end of the inner layer sleeve 1B exceeds the rear end of the middle layer sleeve 2B in the direction from the middle layer sleeve 2B to the outer layer sleeve 3B. Set up the insulating cover of above-mentioned structure, the front end of insulating cover comprises outer cover 3B's front end, and the rear end of insulating cover comprises inlayer cover 1B's rear end, and like this, under the unchangeable condition of middle level cover 2B's length, through the distance of the outer cover 3B front end of extension and the distance of inlayer cover 1B rear end, can prolong the length of whole insulating cover, can guarantee that the front end of insulating cover has bigger area of contact simultaneously.
Example 6
Referring to fig. 10, the present embodiment is different from embodiment 1 in that the front end of the inner layer case 1B is beyond the front end of the outer layer case 3B, and the rear end of the middle layer case 2B is beyond the rear end of the inner layer case 1B in the direction from the middle layer case 2B to the outer layer case 3B. Set up the insulating cover of above-mentioned structure, the front end of insulating cover comprises inlayer cover 1B's front end, and the rear end of insulating cover comprises middle layer cover 2B's rear end, and like this, under the unchangeable condition of length of outer layer cover 3B, through the distance of extension middle layer cover 2B rear end and the distance of inlayer cover 1B front end, can prolong the length of whole insulating cover, can guarantee that the rear end of insulating cover has bigger area of contact simultaneously.
Example 7
Referring to fig. 11, the present embodiment is different from embodiment 1 in that the front end of the outer layer jacket 3B extends beyond the front end of the inner layer jacket 1B and the rear end of the middle layer jacket 2B extends beyond the rear end of the inner layer jacket 1B in the direction from the middle layer jacket 2B to the outer layer jacket 3B. Set up the insulating cover of above-mentioned structure, the front end of insulating cover comprises outer cover 3B's front end, and the rear end of insulating cover comprises middle level cover 2B's rear end, like this, through outer cover 3B's of salt city rear end and middle level cover 2B's rear end, can prolong whole insulating cover's length, can guarantee that insulating cover's front end, rear end have bigger area of contact simultaneously.
The present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents and are included in the scope of the present invention.
Claims (10)
1. A graphite boat suitable for conductive film deposition comprises a boat sheet assembly, graphite clamping points arranged on the boat sheet assembly and a connecting structure for connecting the boat sheet assembly, wherein the boat sheet assembly comprises two graphite outer boat sheets arranged on the outermost side and a middle graphite boat sheet arranged between the graphite outer boat sheets, one of the two adjacent graphite boat sheets is connected with a positive electrode of a power supply, and the other graphite boat sheet is connected with a negative electrode of the power supply;
the middle graphite boat piece is characterized by comprising a boat piece body and an electrode connecting plate for connecting an electrode, wherein the boat piece body comprises a bearing part for bearing a silicon wafer and a connecting part for connecting with other graphite boat pieces; the connecting part is provided with a connecting hole for accommodating the connecting rod, the connecting part is provided with a space avoiding part for avoiding the spacer bush, and after the graphite boat is assembled, the space avoiding part corresponds to the connecting hole on the graphite boat piece of the opposite electrode;
the connecting structure comprises a graphite nut, a spacer bush, an insulating bush and a ceramic connecting rod for connecting graphite sheets, wherein the ceramic connecting rod penetrates through connecting holes in graphite boat sheets with the same polarity, the spacer bush is sleeved on the ceramic connecting rod and is positioned between adjacent graphite boat sheets with the same polarity, and the spacer bush is positioned at a clearance part on the graphite boat sheets with opposite polarities; the graphite nuts are locked at two ends of the ceramic connecting rod to connect and fix the boat piece assembly;
the insulating sleeve comprises an inner layer sleeve, a middle layer sleeve and an outer layer sleeve, wherein the inner layer sleeve, the middle layer sleeve and the outer layer sleeve are all made of insulating materials, the inner layer sleeve comprises a mounting hole matched with the insulating connecting rod, a connecting outer wall connected with the middle layer sleeve and the outer layer sleeve and a limiting convex ring arranged on the connecting outer wall;
the middle-layer sleeve comprises a first sleeve hole and a first accommodating hole, the first sleeve hole is used for being matched with the connecting outer wall, the diameter of the first accommodating hole is larger than that of the limiting convex ring, the length of the first accommodating hole is smaller than that of the limiting convex ring, and the inner end face of the first accommodating hole abuts against one end of the limiting convex ring;
the outer layer sleeve comprises a second sleeve hole and a second accommodating hole, the second sleeve hole is used for being matched with the connecting outer wall, the diameter of the second accommodating hole is larger than the outer diameter of the middle layer sleeve, and the inner end face of the second accommodating hole abuts against the other end of the limiting convex ring.
2. The graphite boat for conductive thin film deposition according to claim 1, wherein the connection parts include an upper connection part located above the boat sheet body and a lower connection part located below the boat sheet body; the upper connecting part is provided with a plurality of connecting holes and a plurality of space avoiding parts; the lower connecting part is also provided with a plurality of connecting holes and a plurality of avoiding parts.
3. The graphite boat for conductive thin film deposition according to claim 2, wherein a plurality of said connection holes are uniformly arranged on said connection portion along a length direction of the boat body; the plurality of void avoiding portions are evenly distributed on the connecting portion, and the connecting holes and the void avoiding portions are arranged in a staggered mode.
4. The graphite boat according to claim 3, wherein the recess is a hole.
5. The graphite boat of claim 4, wherein the carrier comprises a plurality of carrier sites, and the carrier sites have card holes for mounting graphite card points.
6. The graphite boat for conductive film deposition according to claim 5, wherein the carrying position is disposed at a middle position of the boat body between the upper connection portion and the lower connection portion; the bearing positions are uniformly arranged along the length direction of the boat sheet body.
7. The graphite boat for conductive film deposition as claimed in claim 6, wherein said carrying sites further have rectangular holes, and said retaining holes are disposed around said rectangular holes.
8. The graphite boat according to claim 7, wherein three chucking holes are formed in each of the plurality of loading positions, and the three chucking holes include a support chucking hole formed below the rectangular hole and side chucking holes formed at both sides of the rectangular hole.
9. The graphite boat suitable for conductive thin film deposition of claim 1, wherein the graphite boat piece comprises a positive graphite boat piece for connecting with a positive electrode and a negative graphite boat piece for connecting with a negative electrode; in the positive graphite boat piece, the electrode connecting plates are positive electrode connecting plates, and the two positive electrode connecting plates are respectively arranged on two sides of the boat piece body and are positioned at the upper part of the boat piece body; in the negative graphite boat piece, the electrode connecting plates are negative electrode connecting plates, and the two negative electrode connecting plates are arranged on two sides of the boat piece body and are positioned on the lower part of the boat piece body.
10. The graphite boat for conductive thin film deposition according to claim 1, wherein the front end of the outer sheath is beyond the front end of the inner sheath, and the rear end of the middle sheath is beyond the rear end of the inner sheath in a direction from the middle sheath to the outer sheath.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210337015.1A CN115094401B (en) | 2022-03-31 | 2022-03-31 | Graphite boat suitable for conductive film deposition |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210337015.1A CN115094401B (en) | 2022-03-31 | 2022-03-31 | Graphite boat suitable for conductive film deposition |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002020871A1 (en) * | 2000-09-08 | 2002-03-14 | Centrotherm Elektrische Anlagen Gmbh + Co. | Plasma boat |
| WO2017005253A1 (en) * | 2015-07-09 | 2017-01-12 | Hanwha Q Cells Gmbh | Device for receiving substrates in pairs |
| US20180247797A1 (en) * | 2011-09-07 | 2018-08-30 | Vladimir Gorokhovsky | Reactors For Plasma-Assisted Processes And Associated Methods |
| CN109524336A (en) * | 2018-11-14 | 2019-03-26 | 湖南红太阳光电科技有限公司 | A kind of tubular type PECVD graphite boat structure |
| CN215050684U (en) * | 2021-02-09 | 2021-12-07 | 宁夏隆基乐叶科技有限公司 | Graphite boat carrier and deposition device |
| KR20220037269A (en) * | 2020-09-17 | 2022-03-24 | 주식회사 한화 | Boat device including an insulation portion |
-
2022
- 2022-03-31 CN CN202210337015.1A patent/CN115094401B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002020871A1 (en) * | 2000-09-08 | 2002-03-14 | Centrotherm Elektrische Anlagen Gmbh + Co. | Plasma boat |
| US20180247797A1 (en) * | 2011-09-07 | 2018-08-30 | Vladimir Gorokhovsky | Reactors For Plasma-Assisted Processes And Associated Methods |
| WO2017005253A1 (en) * | 2015-07-09 | 2017-01-12 | Hanwha Q Cells Gmbh | Device for receiving substrates in pairs |
| CN108368608A (en) * | 2015-07-09 | 2018-08-03 | 韩华Qcells有限公司 | Equipment for accommodating substrate in pairs |
| CN109524336A (en) * | 2018-11-14 | 2019-03-26 | 湖南红太阳光电科技有限公司 | A kind of tubular type PECVD graphite boat structure |
| KR20220037269A (en) * | 2020-09-17 | 2022-03-24 | 주식회사 한화 | Boat device including an insulation portion |
| CN215050684U (en) * | 2021-02-09 | 2021-12-07 | 宁夏隆基乐叶科技有限公司 | Graphite boat carrier and deposition device |
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