CN115094401B - Graphite boat suitable for conductive film deposition - Google Patents
Graphite boat suitable for conductive film deposition Download PDFInfo
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- CN115094401B CN115094401B CN202210337015.1A CN202210337015A CN115094401B CN 115094401 B CN115094401 B CN 115094401B CN 202210337015 A CN202210337015 A CN 202210337015A CN 115094401 B CN115094401 B CN 115094401B
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- boat
- graphite
- graphite boat
- sleeve
- hole
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 209
- 239000010439 graphite Substances 0.000 title claims abstract description 209
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 209
- 230000008021 deposition Effects 0.000 title claims abstract description 27
- 125000006850 spacer group Chemical group 0.000 claims description 39
- 239000000919 ceramic Substances 0.000 claims description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 238000009413 insulation Methods 0.000 claims description 8
- 239000012774 insulation material Substances 0.000 claims description 3
- 239000011800 void material Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 28
- 238000000151 deposition Methods 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 13
- 230000004308 accommodation Effects 0.000 description 8
- 239000004020 conductor Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 230000002035 prolonged effect Effects 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Resistance Heating (AREA)
- Secondary Cells (AREA)
Abstract
The invention discloses a graphite boat suitable for conductive film deposition, which belongs to the technical field of solar cell production and comprises a graphite boat sheet, a graphite clamping point and a connecting structure, wherein the graphite boat sheet comprises a graphite outer boat sheet and an intermediate graphite boat sheet; the middle graphite boat piece comprises a boat piece body and an electrode connecting plate, wherein the boat piece body comprises a bearing part and a connecting part; the connecting part is provided with a connecting hole and a clearance hole; the insulating sleeve comprises an inner layer sleeve, a middle layer sleeve and an outer layer sleeve, wherein the inner layer sleeve comprises a mounting hole, a connecting outer wall and a limiting convex ring; the middle layer sleeve comprises a first sleeve hole and a first accommodating hole, the diameter of the first accommodating hole is larger than that of the limiting convex ring, the length of the first accommodating hole is smaller than that of the limiting convex ring, and the inner end surface of the first accommodating hole abuts against one end of the limiting convex ring; the outer layer sleeve comprises a second sleeve hole and a second accommodating hole, the diameter of the second accommodating hole is larger than the outer diameter of the middle layer sleeve, and the inner end surface of the second accommodating hole abuts against the other end of the limiting convex ring. The graphite boat is suitable for conductive and nonconductive film deposition.
Description
Technical Field
The invention relates to the technical field of solar cell production, in particular to a graphite boat suitable for conductive film deposition.
Background
The graphite boat is a carrying tool for carrying out film deposition on the surface of the polycrystalline or monocrystalline silicon wafer processed by processes such as texturing and diffusion in a plasma enhanced chemical vapor deposition tube furnace by adopting a plasma enhanced chemical vapor deposition process. The existing graphite boat comprises a plurality of graphite boat sheets, a plurality of graphite cushion blocks, a plurality of graphite boat feet, a plurality of ceramic rods, a plurality of graphite rods, ceramic rings and graphite nuts; because one of the two adjacent graphite boat sheets is connected with the negative electrode of the power supply, and the other is connected with the positive electrode of the power supply, the two adjacent graphite boat sheets are connected together through the ceramic rod and the ceramic ring, and the conduction of the two adjacent graphite boat sheets is prevented. In the graphite boat, two adjacent graphite boat sheets are separated by the ceramic sleeve, when a film to be deposited is a conductive material, the deposited conductive film is attached to the surface of the ceramic sleeve, so that the ceramic sleeve is conductive, and two ends of the ceramic sleeve are respectively abutted between the two adjacent graphite boat sheets, so that the adjacent graphite boat sheets are conductive due to the conductivity of the ceramic sleeve, and the requirement of a plasma enhanced chemical vapor deposition process is not met.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a graphite boat suitable for conductive film deposition, which is suitable for non-conductive film deposition and conductive film deposition.
The technical scheme for solving the technical problems is as follows:
the graphite boat suitable for the conductive film deposition comprises a boat piece assembly, graphite clamping points arranged on the boat piece assembly and a connecting structure for connecting the boat piece assembly, wherein the boat piece assembly comprises two graphite outer boat pieces arranged at the outermost side and an intermediate graphite boat piece arranged between the graphite outer boat pieces, one of the two adjacent graphite boat pieces is connected with a positive electrode of a power supply, and the other one is connected with a negative electrode of the power supply;
the middle graphite boat piece comprises a boat piece body and an electrode connecting plate for connecting electrodes, wherein the boat piece body comprises a bearing part for bearing a silicon wafer and a connecting part for connecting with other graphite boat pieces; the connecting part is provided with a connecting hole for accommodating the connecting rod, the connecting part is provided with a clearance part for avoiding the spacer bush, and the clearance part corresponds to the connecting hole on the graphite boat sheet of the opposite electrode after the assembly of the graphite boat is completed;
the connecting structure comprises a graphite nut, a spacer bush, an insulating bush and a ceramic connecting rod for connecting graphite sheets, wherein the ceramic connecting rod penetrates through connecting holes on graphite boat sheets with the same polarity, the spacer bush is arranged on the ceramic connecting rod and positioned between adjacent graphite boat sheets with the same polarity, and the spacer bush is positioned at a clearance part on the graphite boat sheets with opposite polarities; the graphite nuts are locked at two ends of the ceramic connecting rod, and the boat piece assembly is connected and fixed;
the insulation sleeve comprises an inner layer sleeve, a middle layer sleeve and an outer layer sleeve, wherein the inner layer sleeve, the middle layer sleeve and the outer layer sleeve are all made of insulation materials, and the inner layer sleeve comprises a mounting hole matched with an insulation connecting rod, a connecting outer wall connected with the middle layer sleeve and the outer layer sleeve and a limiting convex ring arranged on the connecting outer wall;
the middle layer sleeve comprises a first sleeve hole and a first accommodating hole, wherein the first sleeve hole and the first accommodating hole are used for being matched with the connecting outer wall, the diameter of the first accommodating hole is larger than that of the limiting convex ring, the length of the first accommodating hole is smaller than that of the limiting convex ring, and the inner end face of the first accommodating hole is abutted against one end of the limiting convex ring;
the outer layer sleeve comprises a second sleeve hole and a second containing hole, wherein the second sleeve hole and the second containing hole are used for being matched with the connecting outer wall, the diameter of the second containing hole is larger than the outer diameter of the middle layer sleeve, and the inner end face of the second containing hole abuts against the other end of the limiting convex ring.
The working principle of the graphite boat is as follows:
when the insulating sleeve is assembled, the middle layer sleeve is sleeved from one end of the inner layer sleeve, the first sleeve hole is sleeved on the connecting outer wall, and the inner end surface of the first accommodating hole abuts against one end of the limiting convex ring; then the outer layer sleeve is sleeved in from the other end of the inner layer sleeve, a second sleeve hole is sleeved on the connecting outer wall, the inner end surface of the second accommodating hole abuts against the other end of the limiting convex ring, and the assembly of the insulating sleeve is completed; when loading the graphite boat, the graphite boat sheets connected with the positive electrode and the graphite boat sheets connected with the negative electrode are arranged in a staggered manner, and the ceramic connecting rod penetrates through the connecting hole of the graphite boat sheets, so that a plurality of graphite boat sheets are connected; wherein, a spacer bush is arranged between graphite boat sheets with the same polarity, the spacer bush is sleeved on the connecting rod, one end of the spacer bush is abutted against one of the graphite boat sheets, and the other end of the spacer bush is abutted against the other graphite boat sheet, so that the graphite boat sheets with the same polarity are fixedly connected together according to the interval of the length of the spacer bush; the insulating sleeve is arranged between the outermost graphite boat sheet and the second graphite boat sheet from the outside to the inside, and the connecting rods respectively penetrate through the outermost graphite boat sheet and the mounting holes of the inner sleeve to be connected with other graphite boat sheets. In the graphite boat, the positive electrode graphite boat sheets and the negative electrode graphite boat sheets are arranged in a staggered manner, so that after the graphite boat sheets with the same polarity are connected by the spacer, the spacer can cross the graphite boat sheets with opposite polarities, and as the connecting parts of the graphite boat sheets are provided with the clearance holes, the positions of the clearance holes correspond to the positions of the connecting holes on the graphite boat sheets with opposite polarities, the spacer cannot be connected with the graphite boat sheets with opposite polarities after the assembly of the graphite boat is completed. When the film is deposited, the conductive film is also deposited on the spacer to lead the spacer to be conductive in the process of depositing the film, and the arrangement of the clearance holes ensures that the graphite boat sheets of the opposite electrodes are prevented from being contacted with the spacer, so that the polarity of two adjacent graphite boat sheets is ensured to be opposite; in the insulating sleeve, the diameter of the first accommodating hole is larger than that of the spacing convex ring, so that a small gap is formed between the first accommodating hole and the spacing convex ring; the diameter of the second accommodating hole is larger than the outer diameter of the middle layer sleeve, so that a gap is formed between the second accommodating hole and the middle layer sleeve; the length of the first accommodation hole is smaller than that of the limiting convex ring, under the condition that the inner end face of the first accommodation hole abuts against the limiting convex ring, the outer end of the first accommodation hole is away from the other end of the limiting convex ring by a small distance, and due to the fact that the inner end of the second accommodation hole abuts against the other end of the limiting convex ring, a gap is formed between the outer end of the first accommodation hole and the inner end of the second accommodation hole, and the gap and the first two gaps are communicated with each other, so that a cavity is formed inside the insulating sleeve. Because the middle layer sleeve, the inner layer sleeve and the outer layer sleeve are mutually included and a communicated cavity is formed inside, when the thin film is deposited, even if the thin film of the conductive material is deposited on the outer surface of the insulating sleeve, the thin film deposition is avoided on the part of the inner cavity, so that the insulating sleeve can be ensured to be insulated all the time. Therefore, the clearance holes are formed in the graphite boat sheets, the insulating sleeves are arranged in the graphite outer boat sheets and the adjacent graphite boat sheets, and the graphite boat sheets are applicable to film deposition of conductive materials and film deposition of non-conductive materials, so that the application range of the graphite boat is greatly improved, the utilization rate of the graphite boat is improved, and the production cost is reduced.
According to the invention, two electrode connecting plates are arranged on two sides of the boat sheet body respectively.
In a preferred embodiment of the present invention, the connection part includes an upper connection part located above the boat piece body and a lower connection part located below the boat piece body; wherein, the upper connecting part is provided with a plurality of connecting holes and a plurality of clearance parts; the lower connecting part is also provided with a plurality of connecting holes and a plurality of empty avoiding parts.
In a preferred embodiment of the present invention, a plurality of the connection holes are uniformly arranged on the connection portion along the length direction of the boat sheet body; the plurality of the empty-avoiding parts are uniformly arranged on the connecting part, and the plurality of the connecting holes and the empty-avoiding parts are staggered.
In a preferred embodiment of the present invention, the clearance portion is a broken edge hole.
In a preferred aspect of the present invention, the bearing portion includes a plurality of bearing positions, and a clamping hole for installing a graphite clamping point is formed in the plurality of bearing positions.
Preferably, the bearing position is arranged in the middle of the boat piece body and is positioned between the upper connecting part and the lower connecting part; the bearing positions are uniformly arranged along the length direction of the boat piece body.
According to a preferred scheme of the invention, the bearing position is further provided with a rectangular hole, and the clamping hole is arranged around the rectangular hole.
According to the invention, three clamping holes are formed in each bearing position, and the three clamping holes comprise supporting clamping holes arranged below the rectangular holes and side clamping holes arranged on two sides of the rectangular holes.
In a preferred embodiment of the present invention, the graphite boat sheet includes a positive electrode graphite boat sheet for connection to a positive electrode and a negative electrode graphite boat sheet for connection to a negative electrode; in the anode graphite boat sheet, the electrode connecting plates are positive electrode connecting plates, and the two positive electrode connecting plates are respectively arranged at two sides of the boat sheet body and are positioned at the upper part of the boat sheet body; in the negative graphite boat sheet, the electrode connecting plates are negative electrode connecting plates, and the two negative electrode connecting plates are arranged on two sides of the boat sheet body and are positioned on the lower part of the boat sheet body.
In a preferred embodiment of the present invention, the inner layer sleeve, the middle layer sleeve and the outer layer sleeve are all made of ceramic materials.
In a preferred embodiment of the present invention, the front end of the inner layer sleeve is flush with the front end of the outer layer sleeve from the middle layer sleeve to the outer layer sleeve, and the rear end of the inner layer sleeve is flush with the rear end of the middle layer sleeve.
In a preferred embodiment of the present invention, the front end of the inner layer sleeve is flush with the front end of the outer layer sleeve in a direction from the middle layer sleeve to the outer layer sleeve, and the rear end of the inner layer sleeve exceeds the rear end of the middle layer sleeve.
In a preferred embodiment of the present invention, the front end of the inner layer sleeve extends beyond the front end of the outer layer sleeve from the middle layer sleeve to the outer layer sleeve, and the rear end of the inner layer sleeve is flush with the rear end of the middle layer sleeve.
In a preferred embodiment of the present invention, the front end of the inner layer sleeve extends beyond the front end of the outer layer sleeve from the middle layer sleeve to the outer layer sleeve, and the rear end of the inner layer sleeve extends beyond the rear end of the middle layer sleeve.
In a preferred embodiment of the present invention, the front end of the outer layer sleeve extends beyond the front end of the inner layer sleeve from the middle layer sleeve to the outer layer sleeve, and the rear end of the inner layer sleeve extends beyond the rear end of the middle layer sleeve.
In a preferred embodiment of the present invention, the front end of the inner layer sleeve extends beyond the front end of the outer layer sleeve from the middle layer sleeve to the outer layer sleeve, and the rear end of the middle layer sleeve extends beyond the rear end of the inner layer sleeve.
In a preferred embodiment of the present invention, the front end of the outer layer sleeve extends beyond the front end of the inner layer sleeve from the middle layer sleeve to the outer layer sleeve, and the rear end of the middle layer sleeve extends beyond the rear end of the inner layer sleeve.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the graphite boat, the clearance holes are formed in the boat body, so that the spacers between graphite boat sheets with opposite polarities can be avoided, and when a film is deposited, no matter the film coating material is conductive or nonconductive, the graphite boat sheets can be prevented from being contacted with the graphite boat sheets with opposite polarities, so that the opposite polarities between the adjacent graphite boat sheets can be ensured, and the principle requirement of the deposition film coating of the graphite boat is met.
According to the graphite boat disclosed by the invention, the spacer bush is arranged between the graphite boat sheets with the same polarity to replace the traditional insulating bush, and the graphite boat sheets are staggered with the spacer bush due to the arrangement of the clearance holes, so that the normal use of the graphite boat is not influenced under the condition of electric conduction by the spacer bush, the materials of the spacer bush are more diversified, and the conductive material and the non-conductive material can be selected.
The graphite boat provided by the invention has the advantages that the insulating sleeve is formed by combining the inner layer sleeve, the middle layer sleeve and the outer layer sleeve, the arrangement of the inner layer sleeve can ensure that the middle layer sleeve and the outer layer sleeve are not contacted, and compared with the traditional mode of only two assemblies, the insulating effect is better.
In the graphite boat, in the edge sleeve, the middle layer sleeve, the inner layer sleeve and the outer layer sleeve are mutually included and a communicated cavity is formed inside, and even if a film of a conductive material is deposited on the outer surface of the insulating sleeve during film deposition, the middle layer sleeve and the outer layer sleeve are mutually enmeshed and form a cavity, and the enmeshed structure can prevent the conductive film from being deposited in the cavity and prevent the conductive film from being conductive between the middle layer sleeve and the outer layer sleeve, so that the insulating sleeve can keep insulation all the time.
Drawings
FIGS. 1-5 are schematic views of a first embodiment of a graphite boat of the present invention, wherein FIG. 1 is a perspective view of the graphite boat; FIG. 2 is an enlarged view of a portion of a graphite boat; FIG. 3 is a front view of a positive graphite boat sheet; FIG. 4 is a front view of a negative graphite boat sheet; fig. 5 is a front cross-sectional view of the insulating sleeve.
Fig. 6 to 11 are main sectional views of an insulation sleeve, in which fig. 6 is a main sectional view of a second embodiment, fig. 7 is a main sectional view of a third embodiment, fig. 8 is a main sectional view of a fourth embodiment, fig. 9 is a main sectional view of a fifth embodiment, fig. 10 is a main sectional view of a sixth embodiment, and fig. 11 is a main sectional view of a seventh embodiment.
Detailed Description
The present invention will be described in further detail with reference to examples and drawings, but embodiments of the present invention are not limited thereto.
Example 1
Referring to fig. 1-5, the boat comprises a boat assembly, a graphite clamping point 10 arranged on the boat assembly and a connecting structure for connecting the boat assembly, wherein the boat assembly comprises two graphite outer boat sheets 11A arranged at the outermost side and a middle graphite boat sheet arranged between the graphite outer boat sheets 11A, one of the two adjacent graphite boat sheets is connected with a positive electrode of a power supply, and the other is connected with a negative electrode of the power supply;
the middle graphite boat piece comprises a boat piece body 1A and an electrode connecting plate for connecting electrodes, wherein the boat piece body 1A comprises a bearing part 2A for bearing silicon wafers and a connecting part 3A for connecting with other graphite boat pieces; the connecting part 3A is provided with a connecting hole 5A for accommodating the connecting rod, the connecting part 3A is provided with a clearance part 6A for avoiding the spacer bush 14A, and after the assembly of the graphite boat is completed, the clearance part 6A corresponds to the position of the connecting hole 5A on the graphite boat sheet of the opposite electrode;
the connecting structure comprises a graphite nut 13A, a spacer bush 14A, an insulating bush 15A and a ceramic connecting rod 16A for connecting graphite sheets, wherein the ceramic connecting rod 16A passes through connecting holes 5A on graphite boat sheets with the same polarity, the spacer bush 14A is sleeved on the ceramic connecting rod 16A and positioned between adjacent graphite boat sheets with the same polarity, and the spacer bush 14A is positioned at a clearance part 6A on the graphite boat sheets with opposite polarity; the graphite nuts 13A are locked at two ends of the ceramic connecting rod 16A to connect and fix the boat piece assembly;
the insulation sleeve 15A comprises an inner layer sleeve 1B, a middle layer sleeve 2B and an outer layer sleeve 3B, wherein the inner layer sleeve 1B, the middle layer sleeve 2B and the outer layer sleeve 3B are all made of insulation materials, and the inner layer sleeve 1B comprises a mounting hole 1-1B matched with an insulation connecting rod, a connecting outer wall connected with the middle layer sleeve 2B and the outer layer sleeve 3B and a limiting convex ring 1-2B arranged on the connecting outer wall;
the middle layer sleeve 2B comprises a first sleeve hole 2-1B and a first accommodating hole 2-2B, wherein the first sleeve hole 2-1B is used for being matched with the connecting outer wall, the diameter of the first accommodating hole 2-2B is larger than that of the limiting convex ring 1-2B, the length of the first accommodating hole 2-2B is smaller than that of the limiting convex ring 1-2B, and the inner end surface of the first accommodating hole 2-2B is abutted against one end of the limiting convex ring 1-2B;
the outer layer sleeve 3B comprises a second sleeve hole 3-1B and a second accommodating hole 3-2B, wherein the second sleeve hole 3-1B and the second accommodating hole 3-2B are used for being matched with the connecting outer wall, the diameter of the second accommodating hole 3-2B is larger than the outer diameter of the middle layer sleeve 2B, and the inner end surface of the second accommodating hole 3-2B abuts against the other end of the limiting convex ring 1-2B.
Referring to fig. 1 to 5, there are two electrode connection plates, and the two electrode connection plates are respectively disposed at two sides of the boat sheet body 1A.
Referring to fig. 1 to 5, the connecting portion 3A includes an upper connecting portion 3-1A located above the boat sheet body 1A and a lower connecting portion 3-2A located below the boat sheet body 1A; wherein, a plurality of connecting holes 5A and a plurality of empty avoiding parts 6A are arranged on the upper connecting part 3-1A; the lower connecting portion 3-2A is also provided with a plurality of connecting holes 5A and a plurality of clearance portions 6A. The connecting part 3A is arranged, and when the graphite boat sheets are connected, the upper connecting part 3-1A and the lower connecting part 3-2A are respectively provided with the connecting holes 5A, so that the upper part and the lower part of the graphite boat sheets are respectively provided with the connecting rods to pass through, namely the upper part and the lower part are respectively connected, the connection is reliable, and the assembly of the graphite boat is firmer.
Referring to fig. 1 to 5, a plurality of the connection holes 5A are uniformly arranged on the connection portion 3A along the length direction of the boat sheet body 1A; the plurality of the empty-avoiding portions 6A are uniformly arranged on the connecting portion 3A, and the plurality of the connecting holes 5A and the empty-avoiding portions 6A are staggered. In this way, a plurality of connecting holes 5A are arranged, so that a plurality of connecting rods can be arranged in the length direction of the graphite boat piece in a penetrating way, and the stability and the reliability of the connection of the graphite boat piece are improved; the plurality of clearance parts 6A are arranged, so that connecting rods on graphite boat sheets with opposite polarities can be just avoided, and the connecting rods on the boat sheet bodies 1A with opposite polarities correspond to each other, namely, the purpose is that the graphite boat sheets are connected by a plurality of connecting rods in the length direction of the graphite boat when assembled into the graphite boat, so that the overall stability and reliability of the graphite boat are improved.
Referring to fig. 1-5, the clearance portion 6A is a broken edge hole. The broken edge hole with the above structure is formed, since the clearance part 6A is formed at the upper part and the lower part of the boat sheet body 1A, if the whole hole is formed, the distance between the outer edge of the hole and the outer boundary of the boat sheet body 1A is small, so that the strength of the part is fragile, on one hand, the boat sheet body 1A is easily broken when the broken edge hole is processed, and on the other hand, the boat sheet body 1A is easily broken when the graphite boat is carried and assembled, and the manufacturing cost is increased. The clearance part 6A is arranged as a broken edge hole, so that the problems can be avoided, and the production cost is reduced; the space-avoiding part 6A may be a hole with a closed periphery, and may be circular, square or other shapes.
Referring to fig. 1-5, the carrying portion 2A includes a plurality of carrying positions, and a clamping hole 4A for installing the graphite clamping point 10A is provided on the plurality of carrying positions.
Referring to fig. 1-5, the bearing position is arranged in the middle of the boat piece body 1A and is positioned between the upper connecting part 3-1A and the lower connecting part 3-2A; the plurality of carrying positions are uniformly arranged along the length direction of the boat piece body 1A. The plurality of bearing positions are arranged, and each bearing position can be loaded with one silicon wafer, so that a plurality of silicon wafers can be loaded in the length direction of one graphite boat, namely, a plurality of silicon wafers can be deposited and coated at one time, and the efficiency of silicon wafer deposition and coating is improved.
Referring to fig. 1-5, the bearing position is further provided with a rectangular hole 7A, and the clamping hole 4A is arranged around the rectangular hole 7A. The bearing position with the structure is arranged, and in the process of depositing and coating, the rectangular hole 7A effectively reduces the contact area of the graphite boat piece and the silicon wafer, and reduces the abnormality generated in the process of coating, such as uneven film thickness, chromatic aberration and the like; on the other hand, the rectangular holes 7A are formed in the bearing positions, so that the weight of the graphite boat piece can be greatly reduced, and meanwhile, the structural strength of the graphite boat piece cannot be influenced, and multiple purposes are achieved.
Referring to fig. 1-5, three clamping holes 4A are provided on each bearing position, and among the three clamping holes 4A, a supporting clamping hole 4A provided below the rectangular hole 7A and side clamping holes 4A provided on both sides of the rectangular hole 7A are included. The clamping holes 4A are arranged, when the graphite boat is assembled, graphite clamping points 10A are respectively arranged on the supporting clamping holes 4A and the side clamping holes 4A, so that the graphite clamping points 10A on the supporting clamping holes 4A are used for supporting the weight of the silicon wafer, the graphite clamping points 10A on the side clamping holes 4A are used for limiting the left and right directions of the silicon wafer, after the silicon wafer is loaded on the bearing position, the silicon wafer is supported by three supporting points, and the silicon wafer is loaded safely and reliably.
Referring to fig. 1-5, the graphite boat sheets include a positive electrode graphite boat sheet 17A for connection with a positive electrode and a negative electrode graphite boat sheet 18A for connection with a negative electrode; in the positive graphite boat sheet 17A, the electrode connection plates are positive electrode connection plates 8A, and the two positive electrode connection plates 8A are respectively arranged at two sides of the boat sheet body 1A and are positioned at the upper part of the boat sheet body 1A; in the negative graphite boat sheet 18A, the electrode connection plates are negative electrode connection plates 9A, and two negative electrode connection plates 9A are arranged on two sides of the boat sheet body 1A and are positioned on the lower part of the boat sheet body 1A. The graphite boat sheets with the structure are arranged, and when the graphite boat assembly is completed, the positive graphite boat sheets 17A and the negative graphite boat sheets 18A are sequentially staggered, so that the positive electrode connecting plate 8A is positioned on the upper part of the graphite boat, and the negative electrode connecting plate 9A is positioned on the lower part of the graphite boat, thereby facilitating the connection of the graphite boat with the positive electrode and the negative electrode respectively. In the positive graphite boat sheet 17A, the positive electrode connection plate 8A may be provided at the lower portion of the boat sheet body 1A, and in the negative graphite boat sheet 18A, the negative electrode connection plate 9A may be provided at the upper portion of the boat sheet body 1A.
Referring to fig. 1-5, the inner sleeve 1B, the middle sleeve 2B and the outer sleeve 3B are all made of ceramic materials. The ceramic material is used as the material of the insulating sleeve, so that on one hand, the insulating property of the ceramic is good, and on the other hand, the hardness and the wear resistance of the ceramic are good, and the service life of the insulating sleeve can be greatly prolonged. In this embodiment, the inner layer sheath 1B, the middle layer sheath 2B and the outer layer sheath 3B may be made of other insulating materials, such as plastics, mica, etc.
Referring to fig. 1 to 5, from the middle layer cover 2B to the outer layer cover 3B, the front end of the inner layer cover 1B is flush with the front end of the outer layer cover 3B, and the rear end of the inner layer cover 1B is flush with the rear end of the middle layer cover 2B. The insulating sleeve with the structure is arranged, the front end of the insulating sleeve is formed by combining the front ends of the inner layer sleeves 1B, the rear end of the insulating sleeve is formed by combining the rear ends of the inner layer sleeves 1B and the middle layer sleeves 2B, the insulating sleeve in the combined form has the largest end surface area, and when the insulating sleeve is installed on a graphite boat, the two ends of the insulating sleeve are connected with graphite boat sheets more stably and reliably.
Referring to fig. 1 to 5, the working principle of the graphite boat is as follows:
when the insulating sleeve 15A is assembled, firstly, the middle layer sleeve 2B is sleeved from one end of the inner layer sleeve 1B, the first sleeve hole 2-1B is sleeved on the outer connecting wall, and the inner end surface of the first accommodating hole 2-2B abuts against one end of the limiting convex ring 1-2B; then, the outer layer sleeve 3B is sleeved in from the other end of the inner layer sleeve 1B, the second sleeve hole 3-1B is sleeved on the connecting outer wall, the inner end surface of the second accommodating hole 3-2B abuts against the other end of the limiting convex ring 1-2B, and the assembly of the insulating sleeve 15A is completed; when loading the graphite boat, the graphite boat sheets connected with the positive electrode and the graphite boat sheets connected with the negative electrode are arranged in a staggered manner, and the ceramic connecting rod 16A passes through the connecting hole 5A of the graphite boat sheets so as to connect a plurality of graphite boat sheets; wherein, a spacer bush 14A is arranged between graphite boat sheets with the same polarity, the spacer bush 14A is sleeved on the connecting rod, one end of the spacer bush is abutted against one of the graphite boat sheets, and the other end of the spacer bush is abutted against the other graphite boat sheet, so that the graphite boat sheets with the same polarity are fixedly connected according to the interval of the length of the spacer bush 14A; the insulating sleeve 15A is arranged between the outermost graphite boat piece 11A and the second graphite boat piece from the outside to the inside, and the connecting rods respectively penetrate through the outermost graphite boat piece and the mounting holes 1-1B of the inner sleeve 1B to be connected with other graphite boat pieces. In the graphite boat, the positive electrode graphite boat sheets and the negative electrode graphite boat sheets are staggered, so that after the graphite boat sheets with the same polarity are connected by the spacer 14A, the spacer 14A can cross the graphite boat sheets with the opposite polarity, and as the connecting part 3A of the graphite boat sheets is provided with the clearance part 6A, the position of the clearance part 6A corresponds to the position of the connecting hole 5A on the graphite boat sheets with the opposite polarity, the spacer 14A cannot be connected with the graphite boat sheets with the opposite polarity after the assembly of the graphite boat is completed. When the film is deposited, for the deposited film of the conductive material, in the process of depositing and coating, the conductive film can be deposited on the spacer 14A to lead the spacer 14A to be conductive, and the arrangement of the clearance part 6A ensures that the graphite boat pieces of the opposite electrodes are prevented from being contacted with the spacer 14A, so that the polarity of two adjacent graphite boat pieces is opposite; in the insulating sleeve 15A, the diameter of the first accommodating hole 2-2B is larger than that of the spacing convex ring 1-2B, so that a small gap is formed between the first accommodating hole 2-2B and the spacing convex ring 1-2B; the diameter of the second accommodation hole 3-2B is larger than the outer diameter of the middle layer 2B, so that a gap is also formed between the second accommodation hole 3-2B and the middle layer 2B; the length of the first accommodating hole 2-2B is smaller than that of the limiting convex ring 1-2B, in the case that the inner end surface of the first accommodating hole 2-2B abuts against the limiting convex ring 1-2B, the outer end of the first accommodating hole 2-2B is spaced apart from the other end of the limiting convex ring 1-2B by a small distance, and since the inner end of the second accommodating hole 3-2B abuts against the other end of the limiting convex ring 1-2B, a gap is also formed between the outer end of the first accommodating hole 2-2B and the inner end of the second accommodating hole 3-2B, and the gap and the first two gaps are communicated with each other, so that a cavity is formed inside the insulating sleeve 15A. Because the middle layer sleeve 2B, the inner layer sleeve 1B and the outer layer sleeve 3B are mutually included and a communicated cavity is formed inside, even if a film of conductive material is deposited on the outer surface of the insulating sleeve 15A during film deposition, the film deposition of part of the inner cavity is avoided, so that the insulating sleeve 15A can be always insulated. Therefore, the clearance part 6A is arranged on the graphite boat sheet, the insulating sleeve 15A is arranged in the graphite outer boat sheet 11A and the adjacent graphite boat sheet, and the method is applicable to both film deposition of conductive materials and film deposition of non-conductive materials, so that the application range of the graphite boat is greatly improved, the utilization rate of the graphite boat is improved, and the production cost is reduced.
Example 2
Referring to fig. 6, this embodiment is different from embodiment 1 in the direction from the middle layer cover 2B to the outer layer cover 3B, the front end of the inner layer cover 1B is flush with the front end of the outer layer cover 3B, and the rear end of the inner layer cover 1B exceeds the rear end of the middle layer cover 2B. The insulating sleeve with the structure is arranged, the front end of the insulating sleeve is formed by combining the front ends of the inner layer sleeves 1B, and the rear end of the insulating sleeve is formed by the rear ends of the inner layer sleeves 1B, so that the length of the whole insulating sleeve can be prolonged by prolonging the length of the rear ends of the inner layer sleeves 1B under the condition that the original length of the middle layer sleeves 2B and the inner layer sleeves 1B is maintained, and the requirement of longer distance between two adjacent graphite boat sheets is met.
Example 3
Referring to fig. 7, this embodiment is different from embodiment 1 in the direction from the middle layer cover 2B to the outer layer cover 3B, the front end of the inner layer cover 1B exceeds the front end of the outer layer cover 3B, and the rear end of the inner layer cover 1B is flush with the rear end of the middle layer cover 2B. The insulating sleeve with the structure is arranged, the rear end of the insulating sleeve is formed by combining the rear end of the inner layer sleeve 1B and the rear end of the middle layer sleeve 2B, and the front end of the insulating sleeve is provided with the front end of the inner layer sleeve 1B, so that the length of the whole insulating sleeve can be prolonged by prolonging the length of the front end of the inner layer sleeve 1B under the condition that the original length of the middle layer sleeve 2B and the inner layer sleeve 1B is kept, and the requirement of longer distance between two adjacent graphite boat sheets is met.
Example 4
Referring to fig. 8, this embodiment is different from embodiment 1 in that the front end of the inner layer sheath 1B exceeds the front end of the outer layer sheath 3B, and the rear end of the inner layer sheath 1B exceeds the rear end of the middle layer sheath 2B in the direction from the middle layer sheath 2B to the outer layer sheath 3B. The insulating sleeve with the structure is arranged, the front end and the rear end of the insulating sleeve are respectively formed by the front end and the rear end of the inner sleeve 1B, so that the length of the whole insulating sleeve can be further prolonged by prolonging the lengths of the two ends of the inner sleeve 1B under the condition that the original lengths of the middle sleeve 2B and the inner sleeve 1B are unchanged, and the requirement of longer distance between two adjacent graphite boat sheets is met.
Example 5
Referring to fig. 9, this embodiment is different from embodiment 1 in the direction from the middle layer cover 2B to the outer layer cover 3B, the front end of the outer layer cover 3B exceeds the front end of the inner layer cover 1B, and the rear end of the inner layer cover 1B exceeds the rear end of the middle layer cover 2B. The insulating sleeve with the structure is arranged, the front end of the insulating sleeve is formed by the front end of the outer sleeve 3B, and the rear end of the insulating sleeve is formed by the rear end of the inner sleeve 1B, so that the length of the whole insulating sleeve can be prolonged by prolonging the distance between the front end of the outer sleeve 3B and the rear end of the inner sleeve 1B under the condition that the length of the middle sleeve 2B is unchanged, and the front end of the insulating sleeve can be ensured to have a larger contact area.
Example 6
Referring to fig. 10, this embodiment is different from embodiment 1 in the direction from the middle layer cover 2B to the outer layer cover 3B, the front end of the inner layer cover 1B exceeds the front end of the outer layer cover 3B, and the rear end of the middle layer cover 2B exceeds the rear end of the inner layer cover 1B. The insulating sleeve with the structure is arranged, the front end of the insulating sleeve is formed by the front end of the inner layer sleeve 1B, and the rear end of the insulating sleeve is formed by the rear end of the middle layer sleeve 2B, so that the length of the whole insulating sleeve can be prolonged by prolonging the distance between the rear end of the middle layer sleeve 2B and the front end of the inner layer sleeve 1B under the condition that the length of the outer layer sleeve 3B is kept unchanged, and the rear end of the insulating sleeve can be ensured to have a larger contact area.
Example 7
Referring to fig. 11, this embodiment is different from embodiment 1 in the direction from the middle layer cover 2B to the outer layer cover 3B, the front end of the outer layer cover 3B exceeds the front end of the inner layer cover 1B, and the rear end of the middle layer cover 2B exceeds the rear end of the inner layer cover 1B. The insulating sleeve with the structure is arranged, the front end of the insulating sleeve is composed of the front end of the outer sleeve 3B, the rear end of the insulating sleeve is composed of the rear end of the middle sleeve 2B, and therefore the length of the whole insulating sleeve can be prolonged through the rear end of the outer sleeve 3B in a salt city and the rear end of the middle sleeve 2B, and meanwhile the front end and the rear end of the insulating sleeve can be guaranteed to have larger contact areas.
The foregoing is illustrative of the present invention and is not to be construed as limiting thereof, but rather as various changes, modifications, substitutions, combinations, and simplifications which may be made therein without departing from the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (8)
1. The graphite boat suitable for the conductive film deposition comprises a boat piece assembly, graphite clamping points arranged on the boat piece assembly and a connecting structure for connecting the boat piece assembly, wherein the boat piece assembly comprises two graphite outer boat pieces arranged at the outermost side and an intermediate graphite boat piece arranged between the graphite outer boat pieces, one of the two adjacent graphite boat pieces is connected with a positive electrode of a power supply, and the other one is connected with a negative electrode of the power supply;
the intermediate graphite boat piece is characterized by comprising a boat piece body and an electrode connecting plate for connecting electrodes, wherein the boat piece body comprises a bearing part for bearing a silicon wafer and a connecting part for connecting with other graphite boat pieces; the connecting part is provided with a connecting hole for accommodating the connecting rod, the connecting part is provided with a clearance part for avoiding the spacer bush, and the clearance part corresponds to the connecting hole on the graphite boat sheet of the opposite electrode after the assembly of the graphite boat is completed;
the connecting structure comprises a graphite nut, a spacer bush, an insulating bush and a ceramic connecting rod for connecting graphite sheets, wherein the ceramic connecting rod penetrates through connecting holes on graphite boat sheets with the same polarity, the spacer bush is arranged on the ceramic connecting rod and positioned between adjacent graphite boat sheets with the same polarity, and the spacer bush is positioned at a clearance part on the graphite boat sheets with opposite polarities; the graphite nuts are locked at two ends of the ceramic connecting rod, and the boat piece assembly is connected and fixed;
the insulation sleeve comprises an inner layer sleeve, a middle layer sleeve and an outer layer sleeve, wherein the inner layer sleeve, the middle layer sleeve and the outer layer sleeve are all made of insulation materials, and the inner layer sleeve comprises a mounting hole matched with an insulation connecting rod, a connecting outer wall connected with the middle layer sleeve and the outer layer sleeve and a limiting convex ring arranged on the connecting outer wall;
the middle layer sleeve comprises a first sleeve hole and a first accommodating hole, wherein the first sleeve hole and the first accommodating hole are used for being matched with the connecting outer wall, the diameter of the first accommodating hole is larger than that of the limiting convex ring, the length of the first accommodating hole is smaller than that of the limiting convex ring, and the inner end face of the first accommodating hole is abutted against one end of the limiting convex ring;
the outer layer sleeve comprises a second sleeve hole and a second containing hole, wherein the second sleeve hole and the second containing hole are used for being matched with the connecting outer wall, the diameter of the second containing hole is larger than the outer diameter of the middle layer sleeve, and the inner end surface of the second containing hole is abutted against the other end of the limiting convex ring;
the connecting part comprises an upper connecting part positioned above the boat piece body and a lower connecting part positioned below the boat piece body; wherein, the upper connecting part is provided with a plurality of connecting holes and a plurality of clearance parts; the lower connecting part is also provided with a plurality of connecting holes and a plurality of clearance parts;
the plurality of connecting holes are uniformly distributed on the connecting part along the length direction of the boat piece body; the plurality of the empty-avoiding parts are uniformly arranged on the connecting part, and the plurality of the connecting holes and the empty-avoiding parts are staggered.
2. The graphite boat for conductive film deposition as recited in claim 1, wherein said void is a hole.
3. The graphite boat for conductive film deposition as recited in claim 2, wherein said carrying portion comprises a plurality of carrying sites, and a plurality of said carrying sites are provided with detent holes for mounting graphite detent points.
4. A graphite boat suitable for conductive film deposition as described in claim 3 wherein said load bearing location is disposed in a central location of the boat sheet body between the upper and lower connection portions; the bearing positions are uniformly arranged along the length direction of the boat piece body.
5. The graphite boat for conductive film deposition as recited in claim 4, wherein said load bearing location further has rectangular holes, said detent holes being disposed around said rectangular holes.
6. The graphite boat for conductive film deposition as described in claim 5, wherein three detent holes are provided in each of the carrying locations, and wherein three detent holes include a support detent hole provided below the rectangular hole and side detent holes provided on both sides of the rectangular hole.
7. The graphite boat for conductive film deposition according to claim 1, wherein the graphite boat sheet comprises a positive electrode graphite boat sheet for connection with a positive electrode and a negative electrode graphite boat sheet for connection with a negative electrode; in the anode graphite boat sheet, the electrode connecting plates are positive electrode connecting plates, and the two positive electrode connecting plates are respectively arranged at two sides of the boat sheet body and are positioned at the upper part of the boat sheet body; in the negative graphite boat sheet, the electrode connecting plates are negative electrode connecting plates, and the two negative electrode connecting plates are arranged on two sides of the boat sheet body and are positioned on the lower part of the boat sheet body.
8. The graphite boat for conductive film deposition as recited in claim 1, wherein the front end of the outer layer sleeve extends beyond the front end of the inner layer sleeve and the rear end of the middle layer sleeve extends beyond the rear end of the inner layer sleeve in a direction from the middle layer sleeve to the outer layer sleeve.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202210337015.1A CN115094401B (en) | 2022-03-31 | 2022-03-31 | Graphite boat suitable for conductive film deposition |
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| CN202210337015.1A CN115094401B (en) | 2022-03-31 | 2022-03-31 | Graphite boat suitable for conductive film deposition |
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| WO2002020871A1 (en) * | 2000-09-08 | 2002-03-14 | Centrotherm Elektrische Anlagen Gmbh + Co. | Plasma boat |
| WO2017005253A1 (en) * | 2015-07-09 | 2017-01-12 | Hanwha Q Cells Gmbh | Device for receiving substrates in pairs |
| CN109524336A (en) * | 2018-11-14 | 2019-03-26 | 湖南红太阳光电科技有限公司 | A kind of tubular type PECVD graphite boat structure |
| CN215050684U (en) * | 2021-02-09 | 2021-12-07 | 宁夏隆基乐叶科技有限公司 | Graphite boat carrier and deposition device |
| KR20220037269A (en) * | 2020-09-17 | 2022-03-24 | 주식회사 한화 | Boat device including an insulation portion |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10304665B2 (en) * | 2011-09-07 | 2019-05-28 | Nano-Product Engineering, LLC | Reactors for plasma-assisted processes and associated methods |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002020871A1 (en) * | 2000-09-08 | 2002-03-14 | Centrotherm Elektrische Anlagen Gmbh + Co. | Plasma boat |
| WO2017005253A1 (en) * | 2015-07-09 | 2017-01-12 | Hanwha Q Cells Gmbh | Device for receiving substrates in pairs |
| CN108368608A (en) * | 2015-07-09 | 2018-08-03 | 韩华Qcells有限公司 | Equipment for accommodating substrate in pairs |
| CN109524336A (en) * | 2018-11-14 | 2019-03-26 | 湖南红太阳光电科技有限公司 | A kind of tubular type PECVD graphite boat structure |
| KR20220037269A (en) * | 2020-09-17 | 2022-03-24 | 주식회사 한화 | Boat device including an insulation portion |
| CN215050684U (en) * | 2021-02-09 | 2021-12-07 | 宁夏隆基乐叶科技有限公司 | Graphite boat carrier and deposition device |
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