CN115046479B - Superlens detection device and system - Google Patents
Superlens detection device and system Download PDFInfo
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- CN115046479B CN115046479B CN202210964619.9A CN202210964619A CN115046479B CN 115046479 B CN115046479 B CN 115046479B CN 202210964619 A CN202210964619 A CN 202210964619A CN 115046479 B CN115046479 B CN 115046479B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
- G01N2021/9583—Lenses
Abstract
The disclosure relates to the technical field of optical lenses, in particular to a superlens detection device and a system, wherein the superlens detection device comprises a moving assembly, an appearance detection assembly and a first optical performance detection assembly; the moving assembly comprises a guide rail, a sample table and a displacement table, the appearance detection assembly and the first optical performance detection assembly are positioned on one side of the guide rail, the sample table is provided with a through hole and used for bearing a detection product, and the displacement table is connected with the sample table and used for driving the sample table to move according to a set direction; the appearance detection assembly comprises a first bracket, and a microscope system is arranged on the first bracket above the moving assembly; the first optical performance detection assembly comprises a second support, a first detector is arranged above the moving assembly on the second support, a test graphic card and a first light source are sequentially arranged below the moving assembly, and the first detector performs thermal imaging on the test graphic card through a detection product. According to the technical scheme, the appearance and the optical performance of the detected product are integrally detected, and the detection is comprehensive and efficient.
Description
Technical Field
The present disclosure relates to the field of optical lens technology, and in particular, to a superlens inspection apparatus and system for inspecting the appearance and performance of a superlens.
Background
In recent years, the superlens (metalens) technology has been a revolutionary technology in the optical field, and it is designed to freely control the amplitude, phase, and polarization of electromagnetic waves by designing various artificial superatoms. The method has wide application prospect in the fields of optical imaging, polarization conversion, optical holography, vortex light generators and the like.
When the super lens is prepared, a semiconductor process is needed to be used for etching the super lens so as to obtain a required micro-nano structure. However, the processed superlens also needs to detect the appearance and the size of the micro-nano structure, so that the conditions of larger size error, even collapse and even falling off of the large-area micro-nano structure are prevented; meanwhile, the appearance of the super lens needs to be inspected for defects such as stains and scratches. For the super lens subjected to the appearance inspection, it is necessary to detect optical properties such as a focal length, a transmittance, a Modulation Transfer Function (MTF), a distortion, a field angle of view (FOV), and the like before the super lens is used in full scale.
In the mass production stage of the superlens, the detection needs to be performed on a large number of superlenses. Currently, there is no simple means for detecting the above-described properties of superlenses.
Disclosure of Invention
In order to solve at least the above technical problems in the prior art, the embodiments of the present disclosure provide a superlens detection apparatus and system.
In one aspect, the present disclosure provides a superlens detecting apparatus, including a moving component, an appearance detecting component, and a first optical performance detecting component; the moving assembly comprises a guide rail, a sample table and a displacement table, the appearance detection assembly and the first optical performance detection assembly are positioned on one side of the guide rail, a through hole is formed in the sample table and used for bearing a detection product, and the displacement table is connected with the sample table and used for driving the sample table to move in a set direction; the appearance detection assembly comprises a first support, and a microscope system for acquiring appearance image information of the detection product is arranged above the moving assembly on the first support; first optical property detection subassembly includes the second support, be located on the second support remove the subassembly top and be equipped with first detector, be located remove the subassembly below and be equipped with test graphic card and first light source in proper order, first light source be used for the test graphic card provides light source or radiation source, first detector passes through it is right to detect the product test graphic card carries out thermal imaging.
In some embodiments, a second optical performance detection assembly is also included; the second optical performance detection assembly comprises a third support, a second detector is arranged on the third support and positioned above the moving assembly, a first diaphragm and a reflector are sequentially arranged below the moving assembly, and a second diaphragm and a second light source are arranged on one side of the third support; the second detector is connected with the third support in a sliding mode and used for adjusting the installation height of the second detector, and light rays emitted by the second light source enter the second detector after passing through the second diaphragm, the reflector, the first diaphragm and the detection product.
In some embodiments, the second optical performance detection assembly further comprises a first optical power meter and a second optical power meter; the first optical power meter is positioned below the moving assembly and between the first diaphragm and the moving assembly, and the second optical power meter is positioned above the moving assembly and between the second detector and the moving assembly; the first optical power meter and the second optical power meter are rotatably connected with the third support through a rotating structure, and are rotated to the light path in a use state and rotated out of the light path in a non-use state.
In some embodiments, the displacement table comprises a sliding block, a driving motor, a carrier plate and a four-axis displacement structure, wherein the sliding block is arranged on the guide rail and is driven to move along the guide rail by the driving motor; the support plate passes through the four-axis displacement structure with the slider is connected, sample platform with support plate fixed connection, and the sample platform with the support plate is located the coplanar, the four-axis displacement structure is used for the drive the support plate drives sample bench detect the product synchronous motion, the four-axis displacement structure is used for adjusting detect the product at X axial, Y axial displacement, and adjust the angle of inclination and the angle of pitch of detection product.
In some embodiments, the microscopy system comprises a camera, a cylindrical lens, a coaxial point source, and a microscope objective; one end of the cylindrical lens is connected with the camera, the other end of the cylindrical lens is connected with the microscope objective, and the side end of the cylindrical lens is connected with the coaxial point light source; the cylindrical lens is detachably connected with the microscope objective, and the microscope objective of different types is replaced according to the micro-nano structure size of the detection product.
In some embodiments, the first optical performance detection assembly includes a plurality of the test cards; the plurality of test graphic cards are positioned on the same plane and are rotatably connected with the second support through a rotating structure, and the corresponding test graphic cards are rotated to the light path according to the performance detection requirement.
In some embodiments, the test graphics card comprises one or more of an ISO12233 test card, a checkerboard test card, and a field angle test card; the ISO12233 test card rotates to a light path and is used for obtaining a modulation transfer function value of the detection product; the chessboard test card rotates to a light path and is used for acquiring the distortion value of the detected product; and the field angle test card rotates to a light path and is used for acquiring the field angle of the detection product.
In some embodiments, the first light source is a surface light source or a radiation source; the second light source is a blackbody radiation spectrum or a laser.
An aspect of the disclosed embodiment provides a superlens detection system, including an industrial personal computer and the superlens detection device.
In some embodiments, the microscope system, the first detector, the second detector and the displacement table are respectively connected with the industrial personal computer; the industrial personal computer is used for receiving and processing data information acquired by the microscope system, the first detector and the second detector, and is used for controlling the displacement table to move.
According to the superlens detection device and system provided by the embodiment of the disclosure, the movable assembly is used as the detection line of the detected product, the appearance detection assembly and the optical performance detection assembly are arranged on one side of the detection line, and appearance detection (such as size, damage and the like) and optical performance detection (such as distortion, angle of view and the like) of the detected product can be automatically realized. According to the technical scheme, the appearance and the optical performance of the detected product are integrally detected, and the detection is comprehensive and efficient.
Drawings
The above and other objects, features and advantages of exemplary embodiments of the present disclosure will become readily apparent from the following detailed description read in conjunction with the accompanying drawings. Several embodiments of the present disclosure are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings and in which:
in the drawings, the same or corresponding reference numerals indicate the same or corresponding parts.
FIG. 1 is a schematic diagram of a superlens inspection apparatus according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of an appearance inspection assembly in a superlens inspection apparatus according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram illustrating a first optical performance testing assembly of a superlens testing apparatus according to an embodiment of the present disclosure;
FIG. 4 is a schematic diagram illustrating a second optical performance testing assembly of a superlens testing apparatus according to an embodiment of the present disclosure;
FIG. 5 is a schematic diagram of a superlens inspection system according to an embodiment of the present disclosure.
In the figure:
1: a superlens detection system;
10: a superlens detection device; 20: an industrial personal computer;
110: a moving assembly; 120: an appearance detection component; 130: a first optical performance detection assembly; 140: a second optical performance detection assembly;
111: a guide rail; 112: a through hole; 113: a sample stage; 114: a displacement table; 115: a support bar; 116: a base;
121: a camera; 122: a coaxial point light source; 123: a microscope objective; 124: a cylindrical mirror;
131: a first detector; 132: a first light source; 133: ISO12233 test cards; 134: a chessboard test card; 135: a field angle test card; 136: a rotating structure;
141: a second detector; 142: a mirror; 143: a first diaphragm; 144: a second diaphragm; 145: a second light source; 146: a first optical power meter; 147: a second optical power meter.
Detailed Description
In order to make the objects, features and advantages of the present disclosure more obvious and understandable, the technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
As shown in fig. 1 to 4, the present disclosure provides a superlens inspection apparatus 10, including a moving assembly 110, an appearance inspection assembly 120, and a first optical performance inspection assembly 130; the moving assembly 110 comprises a guide rail 111, a sample table 113 and a displacement table 114, the appearance detection assembly 120 and the first optical performance detection assembly 130 are positioned on one side of the guide rail 111, the sample table 113 is provided with a through hole 112 and used for bearing a detection product, and the displacement table 114 is connected with the sample table 113 and used for driving the sample table 113 to move according to a set direction; the appearance detection assembly 120 comprises a first bracket, and a microscope system for acquiring the appearance image information of the detected product is arranged above the moving assembly 110 on the first bracket; the first optical performance detecting assembly 130 includes a second bracket, a first detector 131 is disposed on the second bracket above the moving assembly 110, and a test card and a first light source 132 are sequentially disposed below the moving assembly 110, the first light source 132 is used to provide a light source or a radiation source for the test card, and the first detector 131 performs thermal imaging on the test card through a detection product.
In the embodiment of the disclosure, the superlens is detected in a full-automatic mode. The guide rail 111 in the moving assembly 110 serves as a detection line, the superlens to be detected is driven by the displacement table 114 and the sample table 113 to move and switch between the appearance detection assembly 120 and the optical performance detection assembly, and meanwhile, during detection, a plurality of superlenses are placed on the sample table 113, for example, a plurality of superlenses are arranged on the whole wafer in an array manner. A plurality of through holes 112 are arranged on the sample stage 113 in the same array, and each super lens and the through hole 112 are moved to a detection position through the moving assembly 110, so that appearance or optical performance detection is completed.
The appearance inspection component 120 is used for inspecting appearance information including, but not limited to, the micro-nano structure size, the overall size, stains, scratches and the like of the super lens. The optical performance detection assembly is used to detect performance including, but not limited to, distortion, field angle, focal length, etc.
As shown in fig. 2, the first frame includes a base 116 and a support bar 115, the support bar 115 has a certain height, and a microscope system is connected to the support bar 115, and when performing appearance inspection, the microscope system is located above the detected superlens, that is, the microscope system is located above the moving assembly 110. Image information for each superlens is acquired by the moving assembly 110.
For example, the microscope system includes a camera 121, a tube mirror 124, a coaxial point light source 122, and a microscope objective 123; one end of the tube mirror 124 is connected with the camera 121, the other end is connected with the microscope objective 123, and the side end of the tube mirror 124 is connected with the coaxial point light source 122; the tube lens 124 is detachably connected with the microscope objective 123, and the microscope objective 123 with different models is replaced according to the size of the micro-nano structure of the detected product.
The coaxial point light source 122 provides a light source for microscopic imaging, and the microscope objective 123 with proper multiplying power and numerical aperture can be selected according to the micro-nano structure sizes of different super lenses. And the microscope system scans and photographs the detected superlens to acquire corresponding image information.
In the embodiment of the present disclosure, a plurality of super lenses are placed on the sample stage 113 for detection, and therefore, after each super lens is detected, the detected super lens needs to be moved out of the detection position, and the next super lens needs to be moved into the detection position, and the moving operation of the super lens is completed by the moving assembly 110.
For example, the displacement table 114 includes a slider, a driving motor, a carrier plate, and a four-axis displacement structure, where the slider is disposed on the guide rail 111 and is driven by the driving motor to move along the guide rail 111; the carrier plate is connected with the sliding block through a four-axis displacement structure, the sample table 113 is fixedly connected with the carrier plate, the sample table 113 and the carrier plate are located on the same plane, the four-axis displacement structure is used for driving the carrier plate to drive a detection product on the sample table 113 to move synchronously, and the four-axis displacement structure is used for adjusting the detection product to move in the X axial direction and the Y axial direction and adjusting the inclination angle and the pitch angle of the detection product.
For example, the driving motor is adapted to the lead screw, the gear rack and the like to drive the sliding block. The driving method of the slider in the embodiment of the present disclosure is not limited. For example, the four-axis displacement structure includes a sliding structure in the X-axis direction and a sliding structure in the Y-axis direction. For example, the sliding structure is a sliding mode in which a sliding block, a sliding rail and a motor are matched, similarly, the driving mode of the sliding block is not limited, and the adjustment of the inclination angle and the pitch angle can be realized by driving the rotating shaft to rotate by the motor to drive the carrier plate to synchronously rotate.
The super lenses on the sample stage are scanned one by one to take a picture by four-axis displacement of the displacement stage 114. The superlens is regularly arranged in an array discharge mode, and when image information is obtained by scanning and photographing, the position information of the superlens can be obtained at the same time, for example, the position information is the position of the current superlens in the row and the position of the current superlens in the row.
In the embodiment of the disclosure, for the optical performance detection of the superlens, the corresponding detection equipment and the number of the detection equipment can be selected according to the detection requirement.
For example, the first light source 132 is a surface light source or a radiation source, the first light source 132 is used for providing a light source or a radiation source for the test card, and the first detector 131 thermally images the test card by detecting the product.
For example, the first optical performance detection assembly 130 includes a plurality of test cards; the plurality of test graphic cards are located on the same plane and are rotatably connected with the second support through the rotating structure 136, and the corresponding test graphic cards are rotated to the light path according to the performance detection requirement. For example, the rotation structure 136 includes a rotating motor or a push rod, etc., and the switching of the test card is driven by the structure.
For example, the test chart includes one or more of an ISO12233 test card 133, a chessboard test card 134, and a field angle test card 135; the ISO12233 test card 133 rotates to the light path and is used for acquiring the modulation transfer function value of the detected product; the chessboard test card 134 rotates to the light path for obtaining the distortion value of the detected product; the viewing angle test card 135 rotates to the optical path for acquiring the viewing angle of the inspection product.
For example, the superlens inspection device 10 further includes a second optical performance inspection assembly 140; the second optical performance detecting assembly 140 includes a third bracket, on which a second detector 141 is disposed above the moving assembly 110, a first diaphragm 143 and a reflector 142 are sequentially disposed below the moving assembly 110, and a second diaphragm 144 and a second light source 145 are disposed on one side of the third bracket, for example, the second light source 145 is a blackbody radiation spectrum or a laser; the second detector 141 is slidably connected to the third bracket, and is configured to adjust a mounting height of the second detector 141, and light emitted from the second light source 145 enters the second detector 141 through the second diaphragm 144, the reflector 142, the first diaphragm 143, and the detection product.
When the focal length is detected, the mounting height of the second detector 141 needs to be finely adjusted, and therefore, the rod bodies of the second detector 141 and the third bracket are slidably connected. For example, the sliding connection is a lead screw, a linear rack, or the like.
For example, the second optical performance detection assembly 140 further includes a first optical power meter 146 and a second optical power meter 147; a first optical power meter 146 located below the moving assembly 110 and between the first diaphragm 143 and the moving assembly 110, and a second optical power meter 147 located above the moving assembly 110 and between the second detector 141 and the moving assembly 110; the first optical power meter 146 and the second optical power meter 147 are rotatably connected with the third support through the rotating structure 136, and the first optical power meter 146 and the second optical power meter 147 rotate to the optical path in a use state and rotate out of the optical path in a non-use state.
According to the superlens detection device 10 provided by the disclosed embodiment, the moving assembly 110 is used as a detection line of a detected product, the appearance detection assembly 120 and the optical performance detection assembly are arranged on one side of the detection line, and appearance detection (such as size, damage and the like) and optical performance detection (such as distortion, angle of view and the like) of the detected product can be automatically realized. According to the technical scheme, the appearance and the optical performance of the detected product are integrally detected, and the detection is comprehensive and efficient.
The superlens detection device 10 according to the present disclosure is described below with reference to the drawings and taking mid-infrared superlens detection as an example.
As shown in fig. 1, for an appearance and micro-nano structure size detection station, a product to be detected (for example, a whole wafer is taken as an example) is placed on a sample stage 113, an array of super lenses on the wafer corresponds to an array of through holes 112 on the sample stage 113, the sample stage 113 is connected with a four-axis displacement structure, the repeated displacement precision of the four-axis displacement structure is 100um, after the inclination angle and the pitch are adjusted to ensure that the product to be detected is horizontal, the displacement stage 114 sequentially moves along the XY direction, meanwhile, a microscope system above the product to be detected continuously scans and photographs the product to be detected, the size of the micro-nano structure in each super lens and the appearance dirt and scratch conditions of the super lens are recorded, and the comparison is performed with a design value preset in software, the row and column number of an unqualified product is recorded, and the subsequent retrieval operation is convenient.
With continued reference to FIG. 1, the microscope system of the inspection station consists of a camera 121, a barrel mirror 124, a coaxial point source 122, and a microscope objective 123. In order to achieve a good imaging effect in the microscope objective 123 with a large magnification, the coaxial point light source 122 with a power of 1W or more can be selected, installed on the left side of the cylindrical lens 124, and fixed by using m2 machine meter screws; in addition, different microscope objectives 123 can be selected according to the size of the micro-nano structure to be tested. For example, the size of the micro-nano structure is about 500nm, a microscope system with a resolution lower than 500nm needs to be selected, and according to a resolution calculation formula (resolution =0.61 × wavelength/NA), in this case, a microscope objective 123 with an NA greater than 0.64 needs to be selected, and the microscope objective 123 is connected with the tube lens 124 by using a standard RMS threaded interface of 20.2 mm. The camera 121 and the tube lens 124 are connected by a C interface.
After the appearance of the superlens and the size of the micro-nano structure are measured, the displacement table 114 drives the sample table 113 and the product to be detected to flow to the first optical performance detection station along the guide rail 111. As shown in fig. 2, to detect the optical performance of the mid-infrared superlens, the first detector 131 selects an uncooled mid-infrared focal plane detector, and moves with the sample by the displacement stage 114, so as to move each superlens to a position right below the first detector 131, respectively, and perform thermal imaging on different test cards through the through hole 112 of the sample stage 113. The first light source 132 may be a flexible heating pad that is switched on to provide a source of radiation for thermal imaging of the test card. As another example, a heat-generating ceramic may be energized instead of a conventional graphics card plus a radiation source.
In the MTF measurement process, the uncooled mid-infrared detector images the ISO12233 test card 133, then photographs clear oblique edges in its central field of view and edge field of view, calculates Spatial Frequency responses (i.e., SFR, spatial Frequency Response) of the center and edge, respectively, differentiates the measured SFR curve to obtain a line expansion function (LSF) of the curve, and finally performs fourier transform (FFT) on the curve to obtain MTF values at each Frequency. Scanning is performed in the XY direction by the translation stage 114, and an MTF curve of each superlens in the entire superlens array is obtained.
After the MTF test is completed, the rotating structure 136 is rotated, the chessboard test card 134 is rotated to the position below the super lens, the intermediate infrared focal plane detector carries out thermal imaging on the chessboard test card 134, the distance of the complete side line around the edge is measured by using a distance measuring tool, then the distortion of the intermediate infrared super lens is calculated, and the distortion value of each super lens is recorded. After the above test is completed, the rotation structure 136 is rotated again, the viewing angle test card 135 is rotated to the lower side of the superlens, the thermal imaging is performed on the test card, the size of the viewing field is read from the picture, the superlens viewing angle at this time is calculated according to the distance from the test card to the superlens, the displacement table 114 scans the superlens array, and each superlens viewing angle is recorded.
After the optical performance test is completed, the displacement table 114 drives the sample table 113 and the product to be tested to flow to the second optical performance detection station along the guide rail 111. As shown in fig. 3, in order to detect the optical performance of the mid-infrared superlens, the second detector 141 selects an uncooled mid-infrared focal plane detector, moves with the superlens through the displacement table 114, moves each superlens to a position right below the second detector 141, focuses and images the mid-infrared electromagnetic waves radiated from the small hole below through the through hole 112 of the sample table 113, finely adjusts the position of the uncooled mid-infrared focal plane detector to obtain a clear image of the small hole in the image plane, measures the distance between the refrigerated mid-infrared focal plane detector and the measured superlens at the moment, and the distance between the measured superlens and the diaphragm, thereby calculating the focal length of the superlens. And moving the displacement table 114, sequentially moving the superlenses in the superlens array to be right below the second detector 141, testing the focal length of the superlenses at the moment, and recording data. When the transmittance is measured, the rotating structure 136 is rotated, the first optical power meter 146 is moved to the position right below the super-lens to be measured, the middle infrared electromagnetic waves radiated by the black body at the moment are measured, pass through the second diaphragm 144, are reflected by the reflector 142, pass through the first diaphragm 143, and then are reflected by the reflector 142Optical power P reaching the lower surface of the superlens to be measured ij . The universal rotary structure 136 rotates the second optical power meter 147 to the top of the product to be measured, and measures the optical power Q passing through the sample to be measured ij And the transmittance of the product to be tested is T = Q ij /P ij And i and j represent the index number of the line and the row of the super surface to be detected. And the displacement table 114 moves to sequentially move the superlenses in the superlens array to be under the second detector 141, test the transmittance of all the superlenses to be tested, and record data. In the second optical performance detection station, the measurement of the focal length and the transmittance can also replace the black body with a middle infrared laser, and the measurement effect can also be achieved.
Besides measuring the mid-infrared super lens, the detection device can also be used for detecting the optical performance of the near-infrared and visible light super lenses, and only the first detector 131, the second detector 141, the first light source 132 and the second light source 145 need to be replaced by detectors and light sources of corresponding working wave bands of the super lens to be detected.
As shown in fig. 5, an embodiment of the present disclosure provides a superlens detection system 1, which includes an industrial personal computer 20 and the superlens detection apparatus 10. The microscope system, the first detector 131, the second detector 141 and the displacement table 114 are respectively connected with the industrial personal computer 20; the industrial personal computer 20 is used for receiving and processing data information collected by the microscope system (such as the camera 121 of the microscope system), the first detector 131 and the second detector 141, and controlling the displacement table 114 to move.
The industrial personal computer 20 (such as an existing computer) is used for collecting, analyzing and calculating data information acquired by the camera 121, the first detector 131 and the second detector 141, and meanwhile, optical analysis software, machine vision software and a motion control program are integrated in the industrial personal computer 20 and used for positioning the position of the measured superlens so as to control the position of the displacement table 114 moving along the guide rail 111 and the precision of the displacement table 114 moving the measured superlens.
In the description of the present specification, reference to the description of "one embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present disclosure. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present disclosure, "a plurality" means two or more unless specifically limited otherwise.
The above is only a specific embodiment of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present disclosure, and shall be covered by the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (10)
1. A superlens detection device comprises a moving component (110), an appearance detection component (120) and a first optical performance detection component (130);
the moving assembly (110) comprises a guide rail (111), a sample table (113) and a displacement table (114), the appearance detection assembly (120) and the first optical performance detection assembly (130) are positioned on one side of the guide rail (111), a through hole (112) is formed in the sample table (113) and used for bearing a detection product, and the displacement table (114) is connected with the sample table (113) and used for driving the sample table (113) to move according to a set direction;
the appearance detection assembly (120) comprises a first bracket, and a microscope system for acquiring the appearance image information of the detected product is arranged on the first bracket above the moving assembly (110);
first optical property detection subassembly (130) includes the second support, be located on the second support remove subassembly (110) top and be equipped with first detector (131), be located remove subassembly (110) below is equipped with test graphic card and first light source (132) in proper order, first light source (132) are used for test graphic card provides light source or radiation source, first detector (131) pass through it is right to detect the product test graphic card carries out thermal imaging.
2. The superlens detection device of claim 1, further comprising a second optical performance detection assembly (140);
the second optical performance detection assembly (140) comprises a third support, a second detector (141) is arranged on the third support above the moving assembly (110), a first diaphragm (143) and a reflector (142) are sequentially arranged below the moving assembly (110), and a second diaphragm (144) and a second light source (145) are arranged on one side of the third support;
the second detector (141) is connected with the third support in a sliding mode and used for adjusting the installation height of the second detector (141), and light rays emitted by the second light source (145) enter the second detector (141) after passing through the second diaphragm (144), the reflector (142), the first diaphragm (143) and the detection product.
3. The superlens detection device of claim 2, wherein the second optical performance detection assembly (140) further comprises a first optical power meter (146) and a second optical power meter (147);
the first optical power meter (146) is positioned below the moving assembly (110) and between the first diaphragm (143) and the moving assembly (110), and the second optical power meter (147) is positioned above the moving assembly (110) and between the second detector (141) and the moving assembly (110);
the first optical power meter (146) and the second optical power meter (147) are rotatably connected with the third support through a rotating structure, the first optical power meter (146) and the second optical power meter (147) rotate to the optical path in a use state, and rotate out of the optical path in a non-use state.
4. The superlens detection device of claim 2 or 3, wherein the displacement table (114) comprises a slider, a driving motor, a carrier plate and a four-axis displacement structure, the slider is arranged on the guide rail (111), and the slider is driven by the driving motor to move along the guide rail (111);
the support plate passes through four-axis displacement structure with the slider is connected, sample platform (113) with support plate fixed connection, and sample platform (113) with the support plate is located the coplanar, four-axis displacement structure is used for the drive the support plate drives on the sample platform (113) detect product synchronous motion, four-axis displacement structure is used for adjusting detect the product at X axial, Y axial displacement, and adjust the angle of inclination and the angle of pitch of detecting the product.
5. The superlens detection apparatus of claim 2 or 3, wherein the microscope system comprises a camera (121), a barrel mirror (124), a coaxial point light source (122), and a microscope objective (123);
one end of the cylindrical lens (124) is connected with the camera (121), the other end of the cylindrical lens is connected with the microscope objective (123), and the side end of the cylindrical lens (124) is connected with the coaxial point light source (122);
the cylindrical lens (124) is detachably connected with the microscope objective (123), and the microscope objective (123) of different models can be replaced according to the size of the micro-nano structure of the detection product.
6. The superlens detection apparatus of claim 2 or 3, wherein the first optical performance detection assembly (130) comprises a plurality of the test cards;
the test graphics cards are located on the same plane and are rotatably connected with the second support through a rotating structure (136), and the corresponding test graphics cards are rotated to the light path according to performance detection requirements.
7. The superlens detection device of claim 6, wherein the test graphics card includes one or more of an ISO12233 test card (133), a checkerboard test card (134), and a field angle test card (135);
the ISO12233 test card (133) rotates to the light path and is used for acquiring the modulation transfer function value of the detection product;
the chessboard test card (134) rotates to the light path and is used for obtaining the distortion value of the detected product;
the viewing angle test card (135) rotates to the light path and is used for acquiring the viewing angle of the detection product.
8. The superlens detection device of claim 2, wherein the first light source (132) is a surface light source or a radiation source;
the second light source (145) is a blackbody radiation spectrum or a laser.
9. A superlens detection system comprising an industrial personal computer (20) and a superlens detection apparatus according to any one of claims 2 to 8.
10. The superlens detection system of claim 9, wherein the microscope system, the first detector (131), the second detector (141), and the displacement stage (114) are respectively connected with the industrial personal computer (20);
the industrial personal computer (20) is used for receiving and processing data information acquired by the microscope system, the first detector (131) and the second detector (141), and is used for controlling the displacement table (114) to move.
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| CN110514405A (en) * | 2019-08-30 | 2019-11-29 | 云南北方驰宏光电有限公司 | A kind of uncooled ir lens imaging quick quality testing system and method |
| CN113654661B (en) * | 2021-09-01 | 2024-04-09 | 杭州纳境科技有限公司 | Spectrometer based on super-surface lens |
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