CN115016096A - Automatic alignment device and method for multi-stage reflection light path - Google Patents

Automatic alignment device and method for multi-stage reflection light path Download PDF

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Publication number
CN115016096A
CN115016096A CN202210789583.5A CN202210789583A CN115016096A CN 115016096 A CN115016096 A CN 115016096A CN 202210789583 A CN202210789583 A CN 202210789583A CN 115016096 A CN115016096 A CN 115016096A
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CN
China
Prior art keywords
laser beam
reflection
auxiliary laser
stage
detector
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CN202210789583.5A
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Chinese (zh)
Inventor
曹子文
邹世坤
车志刚
孙汝剑
吴俊峰
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AVIC Beijing Aeronautical Manufacturing Technology Research Institute
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AVIC Beijing Aeronautical Manufacturing Technology Research Institute
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Priority to CN202210789583.5A priority Critical patent/CN115016096A/en
Publication of CN115016096A publication Critical patent/CN115016096A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1822Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors comprising means for aligning the optical axis
    • G02B7/1827Motorised alignment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention relates to a device and a method for automatically aligning a multi-stage reflection light path, which comprise a reflection unit, a detector and control equipment, wherein the detector is arranged on the back side of a reflection surface of the reflection unit and is electrically connected with the control equipment, the detector is used for detecting a transmission auxiliary laser beam passing through the reflection unit and transmitting the transmission auxiliary laser beam to the control equipment, and the control equipment is electrically connected with the reflection unit and controls the reflection unit to adjust. According to the invention, the processing laser beam and the auxiliary laser beam with coincident optical axes sequentially pass through the plurality of reflection units of the multi-stage reflection light path, the transmission auxiliary laser beam of the auxiliary laser beam at the reflection unit position is imaged on the detector, the detector feeds back the actual position of the transmission auxiliary laser beam to the control equipment, the deviation is calculated by the control equipment, and the reflection units are controlled to adjust, so that the self-calibration of each reflection unit is realized, the use is simple and convenient, and the automation level is high.

Description

Automatic alignment device and method for multi-stage reflection light path
Technical Field
The invention relates to the technical field of laser processing, in particular to a device and a method for automatically aligning a multi-stage reflection light path.
Background
In order to meet the requirement of laser processing of different areas of a part, the laser beam is generally transmitted from a laser to a processing surface of the part within a certain range by adopting modes of optical fiber transmission, reflection transmission and the like. When the laser energy density exceeds the damage threshold of the optical fiber, the change of the laser beam direction is generally realized by adopting a reflection transmission mode. The laser shock peening technology generally adopts high-energy-density nanosecond pulse laser, the nanosecond pulse laser is transmitted to a part for peening through a multi-stage reflection light path in a total reflection mode, the relative distance or the relative angle of adjacent reflection units needs to be adjusted, multi-degree-of-freedom laser transmission is achieved, and moving beam laser shock peening of different positions and different incidence angles of the part is met. The placement angle of the total reflection mirror on the multistage reflection light path directly influences the transmission direction of the reflected laser. The longer the reflection light path is, the more the reflection level is, the more the angle of the reflector needs to be controlled, so that a more accurate reflection transmission light path is obtained, and the laser shock peening processing precision and the processing stability are ensured. In addition, dust and water mist are generated in the laser shock peening process, so the laser path of the multi-stage reflection light path needs to be sealed to avoid the dust and the water mist from polluting the reflection lens and attenuate the laser energy on the laser path.
At present, factors such as vibration of a mechanical motion structure cause the placing angle of a reflection unit to change, the transmission direction of a laser beam of a multi-stage reflection light path to deviate, the larger the laser transmission distance after reflection is, the larger the deviation amplitude of the transmission direction of the laser beam is, so that the processing effect and the processing range of laser shock peening of a moving beam are influenced, and even the requirements of the laser shock peening process are not met. In order to prevent the contamination of the reflective mirror and ensure the air cleaning of the transmission optical path, the multi-stage reflective optical path for dynamic beam laser shock peening is generally sealed and used in an infrared band where the laser wavelength is generally invisible to the naked eye, and therefore, the calibration of the reflective optical path is difficult.
Disclosure of Invention
In order to solve the above technical problem, in a first aspect, an embodiment of the present invention provides an automatic alignment apparatus for a multi-stage reflective light path, including a plurality of reflective units, a plurality of detectors, and a control device, where each of the detectors is disposed on a back side of a reflective surface of a corresponding reflective unit, each of the detectors is electrically connected to the control device, the reflective units are configured to reflect a processing laser beam and an auxiliary laser beam whose optical axes are coincident, the detectors are configured to detect a transmitted auxiliary laser beam passing through the reflective units and transmit the detected auxiliary laser beam to the control device, and the control device is electrically connected to the reflective units and controls the reflective units to adjust.
Further, the reflection unit includes a reflection lens and an electric adjustment frame, the reflection lens is disposed on the electric adjustment frame, and the electric adjustment frame is configured to receive a control signal of the control device and adjust a position of the reflection lens.
Further, the reflecting mirror is plated with a total reflection film for processing the wavelength of the laser beam.
Further, a concave mirror is arranged between the reflection unit and the detector.
In a second aspect, an embodiment of the present invention provides a method for automatically aligning a multi-stage reflection light path, where the method is characterized in that: the method comprises the following steps: the processing laser beam and the auxiliary laser beam with coincident optical axes sequentially pass through a plurality of reflecting units of a multi-stage reflecting light path; the processing laser beam forms total reflection at the position of the reflecting unit, and the auxiliary laser beam is divided into a reflecting auxiliary laser beam and a transmitting auxiliary laser beam at the position of the reflecting unit; the transmission auxiliary laser beam passing through one of the reflecting units is imaged on a detector after passing through the concave mirror, and the position of the transmission auxiliary laser beam is recorded; feeding back the actual position of the transmission auxiliary laser beam to the control equipment, and calculating the deviation of the actual position relative to the calibrated position through the control equipment; the control equipment controls and adjusts the reflection direction of a previous-stage reflection unit of the reflection unit according to the deviation amount until the deviation amount of the transmission auxiliary laser beam meets the laser processing requirement; the above-mentioned automatic alignment is completed for each reflection unit in turn.
Further, the processing laser beam and the auxiliary laser beam have different wavelengths, and the diameter and the energy density of the auxiliary laser beam are smaller than those of the processing laser beam.
Further, the coupling energy density of the processing laser beam and the auxiliary laser beam is lower than the damage threshold of the reflective film of the mirror plate.
Further, the confirmation of the calibration position specifically includes: arranging a plurality of reflection units at the positions of reflection nodes of a multi-stage reflection light path, debugging and processing laser beams to be transmitted according to a correct track through the multi-stage reflection light path, then adjusting the positions of the concave mirrors to enable the transmission auxiliary laser beams to just pass through the centers of the concave mirrors, and recording the positions of the transmission auxiliary laser beams on each detector as standard positions.
Furthermore, the offset comprises two offset components which are perpendicular to each other, the electric adjusting frame of the previous-stage reflecting unit is controlled by the control equipment according to the two offset components to adjust the position of the reflecting lens, so that the actual position of the transmission auxiliary laser beam is close to the calibration position, and the reflection self-calibration of the previous-stage reflecting unit is completed.
In summary, in the invention, the machining laser beam and the auxiliary laser beam with coincident optical axes sequentially pass through the plurality of reflection units of the multi-stage reflection light path, the transmission auxiliary laser beam of the auxiliary laser beam at the reflection unit position is imaged on the detector, the detector feeds back the actual position of the transmission auxiliary laser beam to the control equipment, the deviation is calculated by the control equipment, and the reflection units are controlled to adjust, so that the self-calibration of each reflection unit is realized, the use is simple and convenient, and the automation level is high.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments of the present invention will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a multi-stage reflective optical path automatic alignment device;
FIG. 2 is a schematic illustration of the deviation in the direction of reflection of FIG. 1;
figure 3 is a schematic imaging view of the detector of figure 2.
Detailed Description
Embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following detailed description of the embodiments and the accompanying drawings are provided to illustrate the principles of the invention and are not intended to limit the scope of the invention, i.e., the invention is not limited to the embodiments described, but covers any modifications, alterations, and improvements in the parts, components, and connections without departing from the spirit of the invention.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
In a first aspect, an embodiment of the present invention provides an automatic alignment apparatus for a multi-stage reflective light path, including multiple reflection units, multiple detectors, and a control device, where each of the detectors is disposed on a back side of a reflective surface of a corresponding reflection unit, each of the detectors is electrically connected to the control device, the reflection units are configured to reflect a processing laser beam and an auxiliary laser beam whose optical axes are coincident, the detectors are configured to detect a transmission auxiliary laser beam that passes through the reflection units and transmit the transmission auxiliary laser beam to the control device, and the control device is electrically connected to the reflection units and controls the reflection units to adjust. The control device can be a computer, the processing laser beam and the auxiliary laser beam which are overlapped by the optical axes sequentially pass through a plurality of reflection units of a multi-stage reflection light path, the transmission auxiliary laser beam of the auxiliary laser beam at the position of the reflection unit is imaged on a detector, the detector feeds back the actual position of the transmission auxiliary laser beam to the control device, the deviation is calculated by the control device, the reflection unit is controlled to be adjusted, the self calibration of each reflection unit is realized, the use is simple and convenient, and the automation level is high.
As a preferred embodiment, the reflection unit includes a reflection mirror and an electric adjustment frame, the reflection mirror is disposed on the electric adjustment frame, and the electric adjustment frame is configured to receive a control signal of the control device and adjust a position of the reflection mirror.
In a preferred embodiment, the reflecting mirror is coated with a total reflection film having a processing laser beam wavelength, and since the processing laser beam wavelength is different from the auxiliary laser beam wavelength, the processing laser beam can be totally reflected and the auxiliary laser beam can be partially reflected and partially transmitted by the coating film.
As a preferred embodiment, a concave mirror is disposed between the reflection unit and the detector, and is used for refracting the laser beam to facilitate imaging.
In a second aspect, an embodiment of the present invention provides a method for automatically aligning a multi-stage reflection light path, including: the processing laser beam and the auxiliary laser beam with coincident optical axes sequentially pass through a plurality of reflecting units of a multi-stage reflecting light path; the processing laser beam forms total reflection at the position of the reflecting unit, and the auxiliary laser beam is divided into a reflecting auxiliary laser beam and a transmitting auxiliary laser beam at the position of the reflecting unit; the transmission auxiliary laser beam passing through one of the reflecting units is imaged on a detector after passing through the concave mirror, and the position of the transmission auxiliary laser beam is recorded; feeding back the actual position of the transmission auxiliary laser beam to control equipment, and calculating the deviation of the actual position relative to the calibration position through the control equipment; the control equipment controls and adjusts the reflection direction of a previous stage of reflection unit of the reflection unit according to the deviation amount until the deviation amount of the transmission auxiliary laser beam meets the laser processing requirement; the above-mentioned automatic alignment is completed for each reflection unit in turn.
As a preferred embodiment, the processing laser beam and the auxiliary laser beam have different wavelengths, the diameter and the energy density of the auxiliary laser beam are smaller than those of the processing laser beam, the auxiliary laser beam is small in diameter and can be conveniently positioned, so that the deviation is calculated, the energy density of the auxiliary laser beam is small, the interference on the processing laser beam can be reduced, and meanwhile, the damage to a reflecting mirror is reduced.
As a preferred implementation mode, the coupling energy density of the processing laser beam and the auxiliary laser beam is lower than the damage threshold of the reflecting film of the reflecting mirror, and the service life of the reflecting mirror is prolonged.
As a preferred embodiment, the confirmation of the calibration position specifically includes: arranging a plurality of reflection units at the positions of reflection nodes of a multi-stage reflection light path, debugging and processing laser beams to be transmitted according to a correct track through the multi-stage reflection light path, then adjusting the positions of the concave mirrors to enable the transmission auxiliary laser beams to just pass through the centers of the concave mirrors, and recording the positions of the transmission auxiliary laser beams on each detector as standard positions.
As a preferred embodiment, the offset includes two offset components perpendicular to each other, and the control device controls the electric adjusting frame of the previous-stage reflection unit to adjust the position of the mirror plate according to the two offset components, so that the actual position of the transmissive auxiliary laser beam approaches the calibration position, thereby completing the self-calibration of the reflection of the previous-stage reflection unit.
In the embodiment, the two-stage reflection optical path is composed of a first reflection unit 3, a second reflection unit 6, a first detector 7, a second detector 8 and a control device 19, wherein the first reflection unit 3 is formed by assembling a first reflection mirror 1 and a first motorized mirror holder 2, and the second reflection unit 6 is formed by assembling a second reflection mirror 4 and a second motorized mirror holder 5. The input segment processing laser beam 9 coincides with the optical axis of the input segment auxiliary laser beam 10, the wavelength of the input segment processing laser beam 9 is 1064nm, and the wavelength of the input segment auxiliary laser beam 10 is 355 nm. The input machining laser beam 9 passes through the reflected optical path to form an output machining laser beam 14 for laser machining. As shown in fig. 1, the input segment processing laser beam 9 is totally reflected by the first reflector 1 to form an intermediate segment processing laser beam 11, and then totally reflected by the second reflector 4 to form an output segment processing laser beam 14. The input segment auxiliary laser beam 10 passes a first mirror 1 forming a reflected auxiliary laser beam 12 and a transmitted auxiliary laser beam 13, and the reflected auxiliary laser beam 12 passes a second mirror 4 forming a reflected auxiliary laser beam 15 and a transmitted auxiliary laser beam 16. When the reflection direction of first mirror 1 is correct, the transmission directions of intermediate processing laser beam 11 and reflection auxiliary laser beam 12 are correct, and transmission auxiliary laser beam 16 passes through the center of concave mirror 18 and then strikes center position P2 of second detector 8. When the reflection direction of the first reflecting mirror 1 is incorrect, the transmission directions of the intermediate segment processing laser beam 11 and the reflection auxiliary laser beam 12 are deviated, and the transmission auxiliary laser beam 16 is deviated from the center of the concave mirror 18 and then deflected to irradiate the deviated position P3 of the second probe 8.
The position information of the deviation position P3 is transmitted to the control device 19, and the two vertical-direction offset components dx and dy of the deviation position P3 and the center position P2 are calculated. The control device 19 transmits the offset component dx and the offset component dy to the first motorized mirror holder 2, causes the first motorized mirror holder 2 to rotate the first reflecting mirror 1, and adjusts the orientations of the intermediate-stage processing laser beam 11 and the reflection auxiliary laser beam 12, so that the irradiation position of the transmission auxiliary laser beam 16 on the second detector 8 coincides with the center position P2 after passing through the center of the concave mirror 18, thereby completing the automatic alignment of the reflection intermediate-stage processing laser beam 11. If the output machining laser beam 14 passes through a reflection unit, the automatic alignment of the output machining laser beam 14 can be achieved by adjusting the second motorized mirror mount 5. And multi-stage reflection exists subsequently, and automatic alignment of the processing laser beam is completed sequentially in the same way.
It should be clear that the embodiments in this specification are described in a progressive manner, and the same or similar parts in the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. For the embodiments of the method, reference is made to the partial description of the embodiments of the apparatus for the relevant points. The present invention is not limited to the specific steps and structures described above and shown in the drawings. Also, a detailed description of known process techniques is omitted herein for the sake of brevity.
The above description is only an example of the present application and is not limited to the present application. Various modifications and alterations to this application will become apparent to those skilled in the art without departing from the scope of this invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the scope of the claims of the present application.

Claims (9)

1. A kind of multistage reflection light path automatic alignment device, characterized by: including a plurality of reflection units, a plurality of detector and controlgear, every the detector sets up and is corresponding reflection of light face dorsal part of reflection unit, every the equal electric connection of detector controlgear, reflection unit is used for the processing laser beam and the supplementary laser beam of reflection optical axis coincidence, the detector is used for detecting the process reflection unit's transmission supplementary laser beam, and transmits for controlgear, controlgear electric connection reflection unit, and control reflection unit adjusts.
2. The automatic alignment device for multi-stage reflective optical paths according to claim 1, wherein: the reflection unit comprises a reflection lens and an electric adjusting frame, the reflection lens is arranged on the electric adjusting frame, and the electric adjusting frame is used for receiving a control signal of the control equipment and adjusting the position of the reflection lens.
3. The automatic alignment device for multi-stage reflective optical path according to claim 2, wherein: the reflecting mirror is plated with a total reflection film for processing the wavelength of the laser beam.
4. The automatic alignment device for multi-stage reflective optical paths according to claim 1, wherein: a concave mirror is arranged between the reflecting unit and the detector.
5. A multi-stage reflection light path automatic alignment method is characterized in that: the method comprises the following steps:
the processing laser beam and the auxiliary laser beam with coincident optical axes sequentially pass through a plurality of reflecting units of a multi-stage reflecting light path;
the processing laser beam forms total reflection at the position of the reflecting unit, and the auxiliary laser beam is divided into a reflecting auxiliary laser beam and a transmitting auxiliary laser beam at the position of the reflecting unit;
the transmission auxiliary laser beam passing through one of the reflecting units is imaged on a detector after passing through the concave mirror, and the position of the transmission auxiliary laser beam is recorded;
feeding back the actual position of the transmission auxiliary laser beam to the control equipment, and calculating the deviation of the actual position relative to the calibrated position through the control equipment;
the control equipment controls and adjusts the reflection direction of a previous-stage reflection unit of the reflection unit according to the deviation amount until the deviation amount of the transmission auxiliary laser beam meets the laser processing requirement;
the above-mentioned automatic alignment is completed for each reflection unit in turn.
6. The method according to claim 5, wherein the method comprises the following steps: the processing laser beam and the auxiliary laser beam have different wavelengths, and the diameter and the energy density of the auxiliary laser beam are smaller than those of the processing laser beam.
7. The method according to claim 6, wherein the method comprises: the coupling energy density of the processing laser beam and the auxiliary laser beam is lower than the damage threshold of the reflective film of the reflective mirror.
8. The method according to claim 5, wherein the method comprises the following steps: the confirmation of the calibration position specifically comprises the following steps: arranging a plurality of reflection units at the positions of reflection nodes of a multi-stage reflection light path, debugging and processing laser beams to be transmitted according to a correct track through the multi-stage reflection light path, then adjusting the positions of the concave mirrors to enable the transmission auxiliary laser beams to just pass through the centers of the concave mirrors, and recording the positions of the transmission auxiliary laser beams on each detector as standard positions.
9. The method according to claim 5, wherein the method comprises the following steps: the offset comprises two offset components which are vertical to each other, the electric adjusting frame of the previous-stage reflecting unit is controlled by the control equipment to adjust the position of the reflecting lens according to the two offset components, so that the actual position of the transmission auxiliary laser beam is close to the calibration position, and the reflection self-calibration of the previous-stage reflecting unit is completed.
CN202210789583.5A 2022-07-06 2022-07-06 Automatic alignment device and method for multi-stage reflection light path Pending CN115016096A (en)

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