CN110346038A - A kind of laser beam separator and method - Google Patents
A kind of laser beam separator and method Download PDFInfo
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- CN110346038A CN110346038A CN201910461047.0A CN201910461047A CN110346038A CN 110346038 A CN110346038 A CN 110346038A CN 201910461047 A CN201910461047 A CN 201910461047A CN 110346038 A CN110346038 A CN 110346038A
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- 238000000034 method Methods 0.000 title abstract description 15
- 238000001514 detection method Methods 0.000 claims abstract description 49
- 238000012372 quality testing Methods 0.000 claims abstract description 29
- 238000000926 separation method Methods 0.000 claims description 21
- 230000000644 propagated effect Effects 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000002310 reflectometry Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000005350 fused silica glass Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 239000011358 absorbing material Substances 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
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- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
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Abstract
The present invention is suitable for laser technology field, provides a kind of laser beam separator and method, and device includes: the first reflecting mirror, the second reflecting mirror, level-one light splitting plain film and secondary light-splitting plain film；First reflecting mirror, for receiving original laser light beam；First reflecting mirror and the second reflecting mirror, for original laser light beam to be preset to incident angle, transmitting is into level-one light splitting plain film；Level-one is divided plain film, for original laser light beam to be divided into the reflected beams and the first transmitted light beam, and the reflected beams is emitted with default incident angle into secondary light-splitting plain film；Secondary light-splitting plain film carries out quality testing for the reflected beams to be divided into laser detection light beam and the second transmitted light beam, and by laser detection beam emissions into detector.It can be realized sufficiently small light splitting ratio through the invention, improve light splitting precision, and avoid and the quality of laser beam and its quality testing analysis are impacted.
Description
Technical field
The present invention relates to laser technology field more particularly to a kind of laser beam separator and methods.
Background technique
In the use process of laser equipment, need to carry out test analysis to the beam quality of laser.Do not influencing laser
In the case where main optical path, need to separate small scale light beam, for testing and analyzing, meanwhile, the detector for testing laser light beam
Part usually unbearable biggish power density, the laser beam for not having biggish energy stores space, therefore isolating need
Will include beam energy few enough, can metric density detector be subjected to range in.
Currently, the device of separation laser beam mainly includes that beam splitter or beam splitter add absorptive attenuator.Wherein,
The light splitting ability of beam splitter is limited, and light splitting precision is not high, therefore the power of laser beam can be realized by absorptive attenuator
Decaying, but there are problems for absorptive attenuator, such as: 1, energy that absorptive attenuator absorb can be converted into thermal energy,
It is easy to cause material temperature to rise, influences the optical characteristics of the material, to influence the laser beam by absorptive attenuator
Quality；2, due to laser detection light beam inject attenuator when energy it is larger, be easy to damage attenuator, cause attenuator without
Method normal use；3, it is acquired due to laser detection light beam by absorbing material, the uniformity of absorbing material, processing
The depth of parallelism will affect laser beam quality collected.
To sum up, current laser beam separator light splitting precision is not high, and is easy to have an impact laser beam, thus
So that the quality testing analysis result inaccuracy of laser beam.
Summary of the invention
It is a primary object of the present invention to propose a kind of laser beam separator and method, to solve to swash in the prior art
It is not high that light beam splitting mean is divided precision, and is easy to have an impact laser beam, so that the quality of laser beam is examined
Survey the problem of analysis result inaccuracy.
To achieve the above object, first aspect of the embodiment of the present invention provides a kind of laser beam separator, including
One reflecting mirror, the second reflecting mirror, level-one light splitting plain film and secondary light-splitting plain film；
First reflecting mirror, for receiving original laser light beam；
First reflecting mirror and second reflecting mirror are used for the original laser light beam to preset incident angle,
Transmitting is into level-one light splitting plain film；
The level-one is divided plain film, for the original laser light beam to be divided into the reflected beams and the first transmitted light beam, and
The reflected beams are emitted with the default incident angle into the secondary light-splitting plain film；
The secondary light-splitting plain film, for the reflected beams to be divided into laser detection light beam and the second transmitted light beam, and
By the laser detection beam emissions into detector, quality testing is carried out；
Wherein, the energy of the reflected beams is less than the energy and the original laser light beam of first transmitted light beam
The energy of energy, the laser detection light beam is less than the energy of second transmitted light beam and the energy of the reflected beams.
In conjunction with the embodiment of the present invention in a first aspect, in first embodiment of the embodiment of the present invention, first reflecting mirror and
Second reflecting mirror is mounted on two-dimension adjustment microscope base；
The two-dimension adjustment microscope base controls institute for adjusting the position of first reflecting mirror and second reflecting mirror
Original laser light beam is stated to preset incident angle, transmitting is into level-one light splitting plain film.
In conjunction with the first embodiment of first aspect of the embodiment of the present invention, in second embodiment of the embodiment of the present invention, institute
Stating default incident angle is 15 °~20 °.
In conjunction with the embodiment of the present invention in a first aspect, in third embodiment of the embodiment of the present invention, the secondary light-splitting plain film,
It is also used to emit second transmitted light beam into detector, carries out quality testing；
Wherein, second transmitted light beam, as the quality testing sample of the original laser light beam, second transmission
Light beam has different decaying magnitudes from the laser detection light beam.
In conjunction with first aspect of embodiment of the present invention first embodiment to third embodiment, the embodiment of the present invention the 4th is real
It applies in mode, laser beam separator further includes beam-shrinked mirror；
The beam-shrinked mirror for receiving the laser detection light beam, and adjusts the diameter of the laser detection light beam；
Or, for receiving second transmitted light beam, and adjust the diameter of second transmitted light beam.
Second aspect of the embodiment of the present invention provides a kind of laser beam separation method, the laser applied to such as first aspect
Beam splitting mean, the laser beam separation method include:
Original laser light beam is received by the first reflecting mirror；
By the second reflecting mirror and first reflecting mirror, by the original laser light beam with preset incident angle, hair
It is incident upon in level-one light splitting plain film；
It is divided plain film by the level-one, the original laser light beam is divided into the reflected beams and the first transmitted light beam, and
The reflected beams are emitted into secondary light-splitting plain film；
By the secondary light-splitting plain film, the reflected beams are divided into laser detection light beam and the second transmitted light beam, and
By the laser detection beam emissions into detector, quality testing is carried out；
Wherein, the energy of the reflected beams is less than the energy and the original laser light beam of first transmitted light beam
The energy of energy, the laser detection light beam is less than the energy of second transmitted light beam and the energy of the reflected beams.
It is described to pass through the second reflection in first embodiment of the embodiment of the present invention in conjunction with second aspect of the embodiment of the present invention
Mirror and first reflecting mirror, by the original laser light beam with preset incident angle, transmitting is into level-one light splitting plain film, packet
It includes:
First reflecting mirror and second reflecting mirror are mounted on two-dimension adjustment microscope base；
It is controlled by the two-dimension adjustment microscope base for adjusting the position of first reflecting mirror and second reflecting mirror
The original laser light beam is made with preset incident angle, is propagated in the level-one light splitting plain film.
In conjunction with second aspect of the embodiment of the present invention, in second embodiment of the embodiment of the present invention, laser beam separation method
Further include:
By the secondary light-splitting plain film, second transmitted light beam is emitted into detector, carries out quality testing；
Wherein, second transmitted light beam, as the quality testing sample of the original laser light beam, second transmission
Light beam has different decaying magnitudes from the laser detection light beam.
In conjunction with the first embodiment and second embodiment of second aspect of the embodiment of the present invention, third of the embodiment of the present invention
In embodiment, laser beam separation method further include:
Beam-shrinked mirror is set；
By the beam-shrinked mirror, the laser detection light beam is received, and adjusts the diameter of the laser detection light beam；
Or, for receiving second transmitted light beam, and adjust the diameter of second transmitted light beam.
The embodiment of the present invention proposes a kind of laser beam separator, will be original by the first reflecting mirror and the second reflecting mirror
Laser beam is emitted in level-one light splitting plain film with default incident angle and carries out first time separation, then passes through secondary light-splitting plain film pair
Level-one is divided the reflected beams that plain film reflection issues and separate for the second time, wherein the reflected light after the separation of level-one light splitting piece,
Incident angle when being emitted to secondary light-splitting plain film is still default incident angle, the laser detection light after finally separating second
Beam emits as the quality testing sample of original laser light beam into detector, carries out quality testing.Since level-one light splitting is flat
The reflectivity of piece and secondary light-splitting plain film is lower, then reflected beam energy obtained is much smaller than the first transmission after separating for the first time
Beam energy and original laser beam energy, and laser detection beam energy obtained is saturating much smaller than second after separating for the second time
Irradiating light beam energy and reflected beam energy, therefore, the laser beam separator that the embodiment of the present invention proposes have sufficiently small
Light splitting ratio improves light splitting precision, and the first reflecting mirror, the second reflecting mirror, level-one light splitting plain film and secondary light-splitting plain film are equal
The mode that laser beam will not be changed is avoided and is impacted to the quality of laser beam and its quality testing analysis.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for the laser beam separator that the embodiment of the present invention one provides；
Fig. 2 is the structural schematic diagram for another laser beam separator that the embodiment of the present invention one provides；
Fig. 3 is the implementation process schematic diagram of laser beam separation method provided by Embodiment 2 of the present invention.
The embodiments will be further described with reference to the accompanying drawings for the realization, the function and the advantages of the object of the present invention.
Specific embodiment
It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, it is not intended to limit the present invention.
It should be noted that, in this document, the terms "include", "comprise" or its any other variant are intended to non-row
His property includes, so that the process, method, article or the device that include a series of elements not only include those elements, and
And further include other elements that are not explicitly listed, or further include for this process, method, article or device institute it is intrinsic
Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including being somebody's turn to do
There is also other identical elements in the process, method of element, article or device.
Herein, using the suffix for indicating such as " module ", " component " or " unit " of element only for advantageous
In explanation of the invention, there is no specific meanings for itself.Therefore, " module " can be used mixedly with " component ".
In subsequent description, inventive embodiments serial number is for illustration only, does not represent the advantages or disadvantages of the embodiments.
Embodiment one
The embodiment of the present invention one provides a kind of laser beam separator 10, including but not limited to the first reflecting mirror 11,
Second reflecting mirror 12, level-one light splitting plain film 13 and secondary light-splitting plain film 14.
As shown in Figure 1, the embodiment of the present invention schematically illustrates the position of each section in above-mentioned laser beam separator
Set relationship.In embodiments of the present invention, original laser light beam is successively divided via first reflection mirror, the second reflecting mirror, level-one
Piece, the transmitting of secondary light-splitting piece and/or transmission.
In embodiments of the present invention, the first reflecting mirror 11, for receiving original laser light beam.
In embodiments of the present invention, the first reflecting mirror 11 and the second reflecting mirror 12 are used for original laser light beam with default
Incident angle, transmitting is into level-one light splitting plain film.
Wherein, the first reflecting mirror and the second reflecting mirror are identical fused silica material eyeglass, receive original laser light
Beam is coated with 45 ° of total reflection films on one side, can change the direction of propagation of incident light.
In practical applications, the wavelength of fused silica material be 355nm, transmissivity 1.476, absorptivity is low, thermal expansion
Coefficient is small, and damage threshold is high, the application being suitble in high power laser light.
In a particular application, the position of the first reflecting mirror and the second reflecting mirror, control can be adjusted by arbitrary mode
Original laser beam emissions are divided the incident angle of plain film to level-one, to control the reflectivity of level-one light splitting plain film.
In one embodiment, the first reflecting mirror and the second reflecting mirror are mounted on two-dimension adjustment microscope base；
Wherein, two-dimension adjustment microscope base controls original laser light for adjusting the position of the first reflecting mirror and the second reflecting mirror
Beam is to preset incident angle, and transmitting is into level-one light splitting plain film.
In embodiments of the present invention, presetting incident angle is 15 °~20 °.
In a particular application, enable the first reflecting mirror and original laser light beam anti-in 45 ° of angles, the second reflecting mirror and through first
Original laser light beam after penetrating mirror reflection is also in 45 ° of angles, so that original laser light beam is in the first reflecting mirror and the second reflecting mirror
In for total reflection, between then reflect level-one light splitting plain film relative to the second reflecting mirror 15 °~20 ° of original laser light beam
One angle is placed, such as 17 °, then the original laser light beam that the second reflecting mirror can be made to reflect is with 17 ° of incident angle, transmitting
Into level-one light splitting plain film.After this, then the position of the first reflecting mirror and the second reflecting mirror is adjusted, then can enables default incidence
Angle is any one angle between 15 °~20 °.
In embodiments of the present invention, level-one is divided plain film 13, for original laser light beam to be divided into the reflected beams and first
Transmitted light beam, and the reflected beams are emitted with default incident angle into secondary light-splitting plain film；
In a particular application, between 15 °~20 ° of the reflected beams secondary light-splitting piece reflected relative to level-one light splitting piece
An angle place, such as 17 °, then the reflected beams can be emitted with similarly presetting incident angle to secondary light-splitting plain film
In.
In embodiments of the present invention, secondary light-splitting plain film 14, for the reflected beams to be divided into laser detection light beam and second
Transmitted light beam, and by laser detection beam emissions into detector, carry out quality testing；Wherein, laser detection light beam, as original
The quality testing sample of beginning laser beam.
In a particular application, level-one light splitting plain film and secondary light-splitting plain film are also identical fused silica material eyeglass, packet
Include receive light beam, the reflected beams and transmitted light beam while, and level-one light splitting plain film and secondary light-splitting plain film reflection
Coefficient is identical with transmission coefficient, therefore level-one light splitting plain film and secondary light-splitting plain film light splitting ratio having the same.
As a result, after level-one light splitting plain film separation reflected beam energy obtained much smaller than the first transmitted light beam energy and
Original laser beam energy, and laser detection beam energy obtained is much smaller than the second transmission after the separation of secondary light-splitting plain film
Beam energy and reflected beam energy.
In practical applications, using fused silica material eyeglass as light splitting plain film, level-one light splitting plain film and two may be implemented
The reflectivity of grade light splitting plain film is much smaller than its transmissivity.Since the wavelength of fused silica material eyeglass is 355nm, transmissivity is
1.476, therefore, according to fresnel formula, level-one is divided the reflectivity of plain film and secondary light-splitting plain film 4% or so.
In one embodiment, secondary light-splitting plain film is also used to emit the second transmitted light beam into detector, carries out matter
Amount detection；
Wherein, the second transmitted light beam, as the quality testing sample of original laser light beam, the second transmitted light beam and laser inspection
Surveying light beam has different decaying magnitudes.
In a particular application, the reflected light isolated in level-one light splitting plain film, has had lesser energy, using
It after secondary light-splitting plain film is divided, can apply in the detector of different size, as quality testing sample, obtain original
The quality measurements of laser beam, so that the application range of expansion of laser light beam splitting mean, improves resource utilization.
For example, it is assumed that the reflectivity of level-one light splitting plain film and secondary light-splitting plain film is 4%, transmissivity 96% then reflects
The energy of light beam is the 4% of original laser beam energy, and the energy of laser detection light beam is the percent of reflected beam energy
4%, it is the 0.16% of original laser beam energy；The energy of second transmitted light beam is percent the 96% of reflected beam energy,
It is the 3.84% of original laser beam energy.Then original laser light beam can be applied to the beam detection of 0.16% attenuation ratio,
Second transmitted light beam can be applied to the beam detection of 3.84% attenuation ratio.
As shown in Fig. 2, in embodiments of the present invention, above-mentioned laser beam separator 10 can also include beam-shrinked mirror
15。
In embodiments of the present invention, beam-shrinked mirror 15 for receiving laser detection light beam, and adjust the straight of laser detection light beam
Diameter；
Or, for receiving the second transmitted light beam, and adjust the diameter of the second transmitted light beam.
In a particular application, laser beam spot sizes can be reduced certain multiple by beam-shrinked mirror, and not change laser light
Beam divergence angle, to make detector of the laser beam suitable for different light-receiving areas.
Laser beam separator provided in an embodiment of the present invention is swashed by the first reflecting mirror and the second reflecting mirror by original
Light light beam is emitted in level-one light splitting plain film with default incident angle and carries out first time separation, then by secondary light-splitting plain film to one
The reflected beams that grade light splitting plain film reflection issues carry out second and separate, wherein the reflected light after the separation of level-one light splitting piece, hair
Incident angle when being mapped to secondary light-splitting plain film is still default incident angle, the laser detection light after finally separating second
Beam emits as the quality testing sample of original laser light beam into detector, carries out quality testing.Since level-one light splitting is flat
The reflectivity of piece and secondary light-splitting plain film is lower, then reflected beam energy obtained is much smaller than the first transmission after separating for the first time
Beam energy and original laser beam energy, and laser detection beam energy obtained is saturating much smaller than second after separating for the second time
Irradiating light beam energy and reflected beam energy, therefore, the laser beam separator that the embodiment of the present invention proposes have sufficiently small
Light splitting ratio improves light splitting precision, and the first reflecting mirror, the second reflecting mirror, level-one light splitting plain film and secondary light-splitting plain film are equal
The mode that laser beam will not be changed is avoided and is impacted to the quality of laser beam and its quality testing analysis.
Embodiment two
As shown in figure 3, being applied in above-described embodiment one the embodiment of the invention provides a kind of laser beam separation method
Laser beam separator, to obtain the laser detection light beam of stable, small splitting ratio, to carry out quality testing.Wherein, laser
Light beam separation method includes but is not limited to:
S301, original laser light beam is received by the first reflecting mirror.
S302, pass through the second reflecting mirror and first reflecting mirror, by the original laser light beam with preset incidence angle
Degree, transmitting is into level-one light splitting plain film.
In one embodiment, above-mentioned steps S302 may include:
First reflecting mirror and second reflecting mirror are mounted on two-dimension adjustment microscope base；
It is controlled by the two-dimension adjustment microscope base for adjusting the position of first reflecting mirror and second reflecting mirror
The original laser light beam is made with preset incident angle, is propagated in the level-one light splitting plain film.
S303, plain film is divided by the level-one, the original laser light beam is divided into the reflected beams and the first transmitted light
Beam, and the reflected beams are emitted into secondary light-splitting plain film.
S304, pass through the secondary light-splitting plain film, the reflected beams are divided into laser detection light beam and the second transmitted light
Beam, and by the laser detection beam emissions into detector, carry out quality testing.
In above-mentioned steps S304, energy of the energy less than first transmitted light beam of the reflected beams and the original
The energy of beginning laser beam, energy of the energy less than second transmitted light beam of the laser detection light beam and the reflected light
The energy of beam.
In one embodiment, the laser beam separation method can also include:
By the secondary light-splitting plain film, second transmitted light beam is emitted into detector, carries out quality testing；
Wherein, second transmitted light beam, as the quality testing sample of the original laser light beam, second transmission
Light beam has different decaying magnitudes from the laser detection light beam.
In one embodiment, the laser beam separation method can also include:
Beam-shrinked mirror is set；
By the beam-shrinked mirror, the laser detection light beam is received, and adjusts the diameter of the laser detection light beam；
Or, for receiving second transmitted light beam, and adjust the diameter of second transmitted light beam.
Wherein, laser beam spot sizes can be reduced certain multiple by beam-shrinked mirror, and not change laser beam divergent angle,
To make laser beam be suitable for the detector of different light-receiving areas.
Embodiment described above is merely illustrative of the technical solution of the present invention, rather than its limitations；Although previous embodiment
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these modification or
Replacement, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution should all include
Within protection scope of the present invention.
Claims (9)
1. a kind of laser beam separator, which is characterized in that be divided plain film including the first reflecting mirror, the second reflecting mirror, level-one
With secondary light-splitting plain film；
First reflecting mirror, for receiving original laser light beam；
First reflecting mirror and second reflecting mirror, for the original laser light beam to be preset to incident angle, transmitting
Into level-one light splitting plain film；
The level-one is divided plain film, for the original laser light beam to be divided into the reflected beams and the first transmitted light beam, and by institute
The reflected beams are stated to emit with the default incident angle into the secondary light-splitting plain film；
The secondary light-splitting plain film, for the reflected beams to be divided into laser detection light beam and the second transmitted light beam, and by institute
Laser detection beam emissions are stated into detector, carry out quality testing；
Wherein, the energy of the reflected beams is less than the energy of first transmitted light beam and the energy of the original laser light beam
The energy of amount, the laser detection light beam is less than the energy of second transmitted light beam and the energy of the reflected beams.
2. laser beam separator as described in claim 1, which is characterized in that first reflecting mirror and described second is instead
Mirror is penetrated to be mounted on two-dimension adjustment microscope base；
The two-dimension adjustment microscope base controls the original for adjusting the position of first reflecting mirror and second reflecting mirror
Beginning laser beam is to preset incident angle, and transmitting is into level-one light splitting plain film.
3. laser beam separator as claimed in claim 2, the default incident angle is 15 °~20 °.
4. laser beam separator as described in claim 1, which is characterized in that the secondary light-splitting plain film, be also used to by
Second transmitted light beam emits into detector, carries out quality testing；
Wherein, second transmitted light beam, as the quality testing sample of the original laser light beam, second transmitted light beam
There is different decaying magnitudes from the laser detection light beam.
5. such as the described in any item laser beam separators of Claims 1-4, which is characterized in that further include beam-shrinked mirror；
The beam-shrinked mirror for receiving the laser detection light beam, and adjusts the diameter of the laser detection light beam；
Or, for receiving second transmitted light beam, and adjust the diameter of second transmitted light beam.
6. a kind of laser beam separation method, which is characterized in that be applied to such as laser light described in any one of claim 1 to 5
Beam separator, the laser beam separation method include:
Original laser light beam is received by the first reflecting mirror；
By the second reflecting mirror and first reflecting mirror, by the original laser light beam with preset incident angle, transmitting is extremely
Level-one is divided in plain film；
It is divided plain film by the level-one, the original laser light beam is divided into the reflected beams and the first transmitted light beam, and by institute
The reflected beams are stated to emit into secondary light-splitting plain film；
By the secondary light-splitting plain film, the reflected beams are divided into laser detection light beam and the second transmitted light beam, and by institute
Laser detection beam emissions are stated into detector, carry out quality testing；
Wherein, the energy of the reflected beams is less than the energy of first transmitted light beam and the energy of the original laser light beam
The energy of amount, the laser detection light beam is less than the energy of second transmitted light beam and the energy of the reflected beams.
7. laser beam separation method as claimed in claim 6, which is characterized in that described to pass through the second reflecting mirror and described
One reflecting mirror, by the original laser light beam with preset incident angle, transmitting is into level-one light splitting plain film, comprising:
First reflecting mirror and second reflecting mirror are mounted on two-dimension adjustment microscope base；
Institute is controlled for adjusting the position of first reflecting mirror and second reflecting mirror by the two-dimension adjustment microscope base
Original laser light beam is stated with preset incident angle, is propagated in the level-one light splitting plain film.
8. laser beam separation method as claimed in claim 6, which is characterized in that further include:
By the secondary light-splitting plain film, second transmitted light beam is emitted into detector, carries out quality testing；
Wherein, second transmitted light beam, as the quality testing sample of the original laser light beam, second transmitted light beam
There is different decaying magnitudes from the laser detection light beam.
9. such as the described in any item laser beam separation methods of claim 6 to 8, which is characterized in that further include:
Beam-shrinked mirror is set；
By the beam-shrinked mirror, the laser detection light beam is received, and adjusts the diameter of the laser detection light beam；
Or, for receiving second transmitted light beam, and adjust the diameter of second transmitted light beam.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114323570A (en) * | 2020-09-29 | 2022-04-12 | 北京科益虹源光电技术有限公司 | Comprehensive performance testing device for excimer laser |
| CN114473196A (en) * | 2021-12-29 | 2022-05-13 | 深圳泰德激光技术股份有限公司 | Laser welding apparatus, laser welding method, laser welding controller, and storage medium |
| CN115016096A (en) * | 2022-07-06 | 2022-09-06 | 中国航空制造技术研究院 | Automatic alignment device and method for multi-stage reflection light path |
| CN116642413A (en) * | 2023-02-28 | 2023-08-25 | 华为技术有限公司 | Optical module and optical equipment |
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| CN116642413B (en) * | 2023-02-28 | 2024-03-01 | 华为技术有限公司 | Optical module and optical equipment |
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