CN109357756A - A kind of laser parameter test platform - Google Patents
A kind of laser parameter test platform Download PDFInfo
- Publication number
- CN109357756A CN109357756A CN201811542419.4A CN201811542419A CN109357756A CN 109357756 A CN109357756 A CN 109357756A CN 201811542419 A CN201811542419 A CN 201811542419A CN 109357756 A CN109357756 A CN 109357756A
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- wedge shape
- light
- plate
- laser
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- 238000012360 testing method Methods 0.000 title claims abstract description 82
- 230000005540 biological transmission Effects 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 13
- 230000008033 biological extinction Effects 0.000 claims description 11
- 239000000498 cooling water Substances 0.000 claims description 10
- 239000000523 sample Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 208000003351 Melanosis Diseases 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 abstract description 14
- 238000005259 measurement Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention relates to optical technical field more particularly to a kind of laser parameter test platforms.It includes testing laser device (101) and a variety of test devices, it includes platform body (102), is equipped at least one piece in the platform body (102) and splits plate for laser reflection and the wedge shape of transmission.This laser parameter test platform can measure multiple laser parameters simultaneously.
Description
Technical field
The present invention relates to optical technical field more particularly to a kind of laser parameter test platforms.
Background technique
Laser is a kind of light source of high degree of coherence, and the technical indicator for measuring laser beam quality includes laser power, light function
Rate spectrum, time domain waveform and beam quality etc..
The performance of laser beam is tested, conventional way is to use different surveys for different laser parameters
Optical path and measurement device are tried, to measure, but this measurement method can only once measure single index, low efficiency
Under, and the relevance of each parameter is poor.
Summary of the invention
The technical problems to be solved by the present invention are: providing a kind of laser parameter survey that can measure multiple laser parameters simultaneously
Try platform.
The technical scheme adopted by the invention is that: a kind of laser parameter test platform, it includes testing laser device and more
Kind test device, it includes platform body, is equipped at least one piece in platform body and splits plate for laser reflection and the wedge shape of transmission.
Preferably, it is three pieces that wedge shape, which splits plate, and respectively the first wedge shape splits plate, the second wedge shape splits plate and third wedge shape
Plate is split, test device includes the first test device, the second test device, third test device and the 4th test device, in which:
Testing laser device exports laser, is incident on the first wedge shape and splits on plate, incident light a part is reflected, and the second wedge shape of directive is split
Plate, the first test device of directive after a part transmission；
Light a part that the second wedge shape of directive splits plate is reflected, and directive third wedge shape splits plate, and directive second is surveyed after a part transmission
Trial assembly is set；
Light a part that directive third wedge shape splits plate is reflected, directive third test device, and directive the 4th is surveyed after a part transmission
Trial assembly is set.
Preferably, the first test device is light power meter, the second test device is spectroanalysis instrument, third test device
Beam quality analysis instrument, the 4th test device are photoelectric probe.
Preferably, being equipped with three-dimensional adjustable light mirror holder in platform body, and wedge shape is split plate and is arranged in three-dimensional adjustable light
On mirror holder.
Preferably, the back side that wedge shape splits plate is inclined surface.
Preferably, platform body inner wall is equipped with the eliminating device for absorbing stray light.
Preferably, eliminating device include with receive unthreaded hole receipts light cylinder, setting receive light cylinder in for will from receive unthreaded hole
It injects and receives the reflection of the stray light in light cylinder in the reflective cone received on light cylinder inner wall and the extinction knot received on light cylinder inner wall is set
Structure.
Preferably, extinction structure is that the rough surface received and be made of on light cylinder inner wall deep pitch thread is arranged in.
It is additionally provided with cooling water channel in light cylinder preferably, receiving, receives light cylinder and is externally provided with into water swivel and water outlet connector, enter water and connect
Head and water outlet connector are connected to cooling water channel both ends.
It is made preferably, receiving light cylinder of melanism material.
Using the above structure compared with prior art, the invention has the following advantages that splitting plate light splitting, benefit by muti-piece wedge shape
The multichannel light beam of plate multiple reflections and transmission formation is split with wedge shape, and the parameters of laser can be measured simultaneously.
Three pieces of wedge shapes are set and split plate, can realize the measurement of four parameters simultaneously in this way.
Because it is most strong that the first wedge shape splits plate transmitted optical power, closest to incident optical power, so light power meter is arranged
Laser power is measured at the transmitted light that the first wedge shape splits plate, real output can be obtained by calibration light splitting proportionality coefficient
Numerical value.
Three-dimensional adjustable light mirror holder is set in platform body, and muti-piece wedge shape is split into plate and is arranged in three-dimensional adjustable light
On mirror holder, it can be directed at optical axis by adjusting fixed position and posture in this way, it is more convenient to use.
The back side that wedge shape splits plate is arranged to inclined, wedge shape can be reduced in this way splits and backboard smooth surface flare and meet light
The measurement of the overlapping of face flare, especially beam quality needs to measure using side to light reflected light, to avoid wedge
Shape splits influence of the wavefront distortion of plate itself face type error introducing to test result.
Eliminating device is set on platform body inner wall, can be very good to absorb stray light in this way, it so not only can be significantly
Stray light is eliminated to the security risk of personnel, and also increases test accuracy.
Add the eliminating device of reflective cone and this form of extinction structure using receipts light cylinder, structure is simple, and extinction effect
Preferably.
Using the uneven surface being made of deep pitch thread as extinction structure, extinction effect is preferable.
Because stray illumination be mapped to receive light cylinder in may cause receive light cylinder overheat, using cooling water channel to receive light cylinder into
Row cooling.
It is made of melanism material and receives light cylinder, the absorptivity on surface can be improved in this way.
Detailed description of the invention
Fig. 1 is the schematic diagram of laser parameter test platform of the present invention.
Fig. 2 removes wedge shape for laser parameter test platform of the present invention and splits the top view after plate.
Fig. 3 is the structural schematic diagram of eliminating device in laser parameter test platform of the present invention.
Fig. 4 is the cross-sectional view at one visual angle of eliminating device in laser parameter test platform of the present invention.
Fig. 5 is the cross-sectional view at another visual angle of eliminating device in laser parameter test platform of the present invention.
It is as shown in the figure: 101, laser；102, platform body；103, the first wedge shape splits plate；104, the second wedge shape splits plate；
105, third wedge shape splits plate；106, light power meter；107, spectroanalysis instrument；108, photoelectric probe；109, beam quality analysis instrument；
110, three-dimensional adjustable light mirror holder；111, eliminating device；112, unthreaded hole is received；113, light cylinder is received；114, reflective cone；115, cooling water
Road；116, enter water swivel；117, water outlet connector.
Specific embodiment
The present invention is described further below in conjunction with attached drawing and specific embodiment, but the present invention be not limited only to it is following
Specific embodiment.
Specific embodiment one, a kind of laser parameter test platform, including platform body 102, the first wedge shape split plate 103, to
Laser 101, the first test device and the second test device are surveyed, wherein the first test device is light power meter 106, second is surveyed
Trial assembly is set to 108 three's one of spectroanalysis instrument 107, beam quality analysis instrument 109 and photoelectric probe, in which:
Testing laser device exports laser, is incident on the first wedge shape and splits plate, a part is reflected, and the second test device of directive is another
It is partially transmitted in the first test device.
Specific embodiment two, a kind of laser parameter test platform, including 102, two pieces of wedge shapes of platform body split plate, it is to be measured swash
Light device 101, the first test device, the second test device and third test device, the first test device are light power meter 106,
Second test device and third test device are spectroanalysis instrument 107, beam quality analysis instrument 109 and photoelectric probe 108 3
Person is second, it is respectively that the first wedge shape splits plate 103 and the second wedge shape splits plate 104 that two pieces of wedge shapes, which split plate, in which:
Testing laser device exports laser, is incident on the first wedge shape and splits plate, a part is reflected, and the second wedge shape of directive splits plate, another
It is partially transmitted in the first test device；
Light a part that the second wedge shape of directive splits plate is reflected, the second test device of directive, and directive third is surveyed after a part transmission
Trial assembly is set.
Specific embodiment three, a kind of laser parameter test platform, including 102, three pieces of wedge shapes of platform body split plate, it is to be measured swash
Light device 101, the first test device, the second test device, third test device and the 4th test device, the first test device are
Light power meter 106, the second test device be spectroanalysis instrument 107, third test device be beam quality analysis instrument 109, the 4th
Test device is photoelectric probe 108, and it is respectively that the first wedge shape splits plate 103, the second wedge shape splits plate 104 and third that three pieces of wedge shapes, which split plate,
Wedge shape splits plate 105, in which:
Testing laser device exports laser, is incident on the first wedge shape and splits on plate, and the plane of incidence that the first wedge shape splits plate is smooth mirror surface, not
Coated reflection rate is about 4%, and incident light small part is reflected, and the second wedge shape of directive splits plate, and directive first is tested after most of transmission
Device；And because the transmitted optical power that the first wedge shape splits plate is most strong, closest to incident optical power, it is directly entered light power meter
Laser power is measured, the available actual laser power of correction factor is passed through；
The light small part that the second wedge shape of directive splits plate is reflected, and directive third wedge shape splits plate, and directive second is surveyed after most of transmission
Trial assembly is set；The transmitted light that second wedge shape splits plate enters spectroanalysis instrument, usually couples by optical patchcord, measures optical power
Spectrum；
The light small part that directive third wedge shape splits plate is reflected, directive third test device, and directive the 4th is surveyed after most of transmission
Trial assembly is set.The transmitted light that third wedge shape splits plate enters photoelectric probe, by photoelectric conversion, measures the time domain waveform of laser.
In above three specific embodiment, following improvement can be used:
Wedge shape is split plate and is all mounted on three-dimensional adjustable light mirror holder 110, by adjusting fixed position and attitude tracking optical axis.
In order to avoid wedge shape splits influence of the plate surface irregularity degree to beam wavefront distortion, it is desirable that reflecting surface machining accuracy reaches
It is even higher to 1/8 wavelength.
Interference of the backboard smooth surface to measurement hot spot is split in order to reduce wedge shape, it is inclined-plane, tilt angle one that wedge shape, which splits back,
As at 8 degree or so, can be adjusted according to optical path actual conditions.In this way, back reflected light and side to light reflection luminous energy are quickly
It separates and is not overlapped.
In light laser measurement process, in order to reduce the absorption that wedge shape splits plate, need to select the material of high light transmission, to close red
Outer laser is fused quartz glass.
In order to guarantee the stability of test macro, realize that debugging is primary, multiple repeated measurement can be to measurement interface and instrument
Device equipment is fixedly mounted, and guarantees that optical path is stablized.
Wedge shape is split back reflected light and may be radiated on the side wall of platform body 102, can disappear in corresponding position increase
Electro-optical device 111 handles such stray light, wherein to split 103 backside reflection optical power of plate larger for mainly the first wedge shape, so delustring
The position that device 111 is arranged is on the side that the first wedge shape splits the platform body 102 that 103 back reflected light of plate is irradiated to.
Eliminating device 111 mainly include with receive the receipts light cylinder 113 of unthreaded hole 112, setting is being received in light cylinder 113 for will be from
Receipts unthreaded hole is injected the reflective cone 114 received the reflection of the stray light in light cylinder on receipts light cylinder inner wall and is arranged and receiving in light cylinder 113
Extinction structure on wall is drilled with cooling water channel 115 receiving light cylinder 113, cooling water enters water swivel 116 for the heat that effectively sheds
It is connected with water outlet connector 117 with outer loop cooling water channel pipeline, the water outlet formed in the process of the other side is stifled with water channel
Head seals.Cooling water channel 115 using depth drill technique make, can also by burying copper pipe, friction-stir blowtorch other modes are formed
Increasingly complex channel structure.It receives light cylinder 113 to be made of melanism material, this specific embodiment can use melanism aluminium alloy material
Material is made.
Eliminating device working principle is: stray light is injected in receipts light cylinder 113 from unthreaded hole 112 is received, and is then mapped to reflective cone 114
On, it is reflected into is received on 113 inner wall of light cylinder by reflective cone 114 later, and receive and be provided with extinction structure on 113 inner wall of light cylinder and will penetrate
The light absorption to come over, this extinction structure can be the rough surface being made of deep pitch thread, be also possible to use
Other uneven structures or light absorbent absorb stray light.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, it will be understood by those of skill in the art that it still can be right
Technical solution documented by previous embodiment is modified, or is replaced on an equal basis to part of technical characteristic；And these
It modifies or replaces, the essence of corresponding technical solution is not made to be detached from the spirit and model of technical solution of various embodiments of the present invention
It encloses.
Claims (10)
1. a kind of laser parameter test platform, it includes testing laser device (101) and a variety of test devices, it is characterised in that:
It includes platform body (102), is equipped at least one piece in the platform body (102) and splits for laser reflection and the wedge shape of transmission
Plate.
2. a kind of laser parameter test platform according to claim 1, it is characterised in that: it is three pieces that the wedge shape, which splits plate,
And respectively the first wedge shape splits plate (103), the second wedge shape splits plate (104) and third wedge shape splits plate (105), the test device
Including the first test device, the second test device, third test device and the 4th test device, in which:
Testing laser device exports laser, is incident on the first wedge shape and splits on plate, incident light a part is reflected, and the second wedge shape of directive is split
Plate, the first test device of directive after a part transmission；
Light a part that the second wedge shape of directive splits plate is reflected, and directive third wedge shape splits plate, and directive second is surveyed after a part transmission
Trial assembly is set；
Light a part that directive third wedge shape splits plate is reflected, directive third test device, and directive the 4th is surveyed after a part transmission
Trial assembly is set.
3. a kind of laser parameter test platform according to claim 2, it is characterised in that: first test device is light
Power meter (106), the second test device are spectroanalysis instrument (107), third test device beam quality analysis instrument (109), the
Four test devices are photoelectric probe (108).
4. a kind of laser parameter test platform according to claim 1, it is characterised in that: in the platform body (102)
Equipped with three-dimensional adjustable light mirror holder (110), and wedge shape is split plate and is arranged on three-dimensional adjustable light mirror holder (110).
5. a kind of laser parameter test platform according to claim 1, it is characterised in that: the back side that the wedge shape splits plate is
Inclined surface.
6. a kind of laser parameter test platform according to claim 1, it is characterised in that: in the platform body (102)
Wall is equipped with the eliminating device (111) for absorbing stray light.
7. a kind of laser parameter test platform according to claim 6, it is characterised in that: eliminating device (111) packet
The receipts light cylinder (113) with receipts unthreaded hole (112), setting are included in receipts light cylinder (113) for that will inject in receipts light cylinder from receipts unthreaded hole
Stray light reflection receive light cylinder inner wall on reflective cone (114) and setting receive light cylinder (113) inner wall on extinction structure.
8. a kind of laser parameter test platform according to claim 7, it is characterised in that: the extinction structure is that setting exists
Receive the rough surface being made of on light cylinder inner wall deep pitch thread.
9. a kind of laser parameter test platform according to claim 7, it is characterised in that: in the receipts light cylinder (113) also
Equipped with cooling water channel (115), the receipts light cylinder (113) is externally provided with into water swivel (116) and water outlet connector (117), it is described enter water
Connector (116) and water outlet connector (117) are connected to cooling water channel (115) both ends.
10. a kind of laser parameter test platform according to claim 7, it is characterised in that: the receipts light cylinder (113) uses
Melanism material is made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811542419.4A CN109357756A (en) | 2018-12-17 | 2018-12-17 | A kind of laser parameter test platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811542419.4A CN109357756A (en) | 2018-12-17 | 2018-12-17 | A kind of laser parameter test platform |
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| Publication Number | Publication Date |
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| CN109357756A true CN109357756A (en) | 2019-02-19 |
Family
ID=65329838
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| CN201811542419.4A Pending CN109357756A (en) | 2018-12-17 | 2018-12-17 | A kind of laser parameter test platform |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110346038A (en) * | 2019-05-30 | 2019-10-18 | 大族激光科技产业集团股份有限公司 | A kind of laser beam separator and method |
| CN112539832A (en) * | 2020-11-19 | 2021-03-23 | 中国科学院西安光学精密机械研究所 | High-power/energy laser measuring system and stray light suppression method thereof |
| CN113686429A (en) * | 2020-05-19 | 2021-11-23 | 北京科益虹源光电技术有限公司 | Deep ultraviolet laser multi-parameter integrated comprehensive measurement system |
| CN114323570A (en) * | 2020-09-29 | 2022-04-12 | 北京科益虹源光电技术有限公司 | Comprehensive performance testing device for excimer laser |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110346038A (en) * | 2019-05-30 | 2019-10-18 | 大族激光科技产业集团股份有限公司 | A kind of laser beam separator and method |
| CN113686429A (en) * | 2020-05-19 | 2021-11-23 | 北京科益虹源光电技术有限公司 | Deep ultraviolet laser multi-parameter integrated comprehensive measurement system |
| CN114323570A (en) * | 2020-09-29 | 2022-04-12 | 北京科益虹源光电技术有限公司 | Comprehensive performance testing device for excimer laser |
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