CN205940465U - Laser survey equipment - Google Patents
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- CN205940465U CN205940465U CN201620884802.8U CN201620884802U CN205940465U CN 205940465 U CN205940465 U CN 205940465U CN 201620884802 U CN201620884802 U CN 201620884802U CN 205940465 U CN205940465 U CN 205940465U
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Abstract
The utility model discloses a laser survey equipment, including laser instrument, first spectrometer, optical lens group, frequency modulator, photoelectric detector, retroreflector and analytical equipment, wherein, first spectrometer setting is in in the light path of the light that the laser instrument sends, and will the light path that the laser instrument sent light divide into along the light of first light path and second optical path transmission, frequency modulator set up in in the first light path, the retroreflector set up in the second light path will be followed the light of second light path incident returns, optical lens group sets up frequency modulator's emitting light path with on the emitting light path of retroreflector, frequency modulator's emergent light with the emergent light warp of retroreflector form coaxial light after the reflection of optical lens group, photoelectric detector is located on the emitting light path of coaxial light, and with analytical equipment communication connection. The utility model discloses can effectively improve SNR, improved measurement's anti -interference ability.
Description
Technical field
This utility model is related to laser measurement field, and especially, is related to a kind of laser measuring equipment.
Background technology
In vibration measurement with laser, the design of camera lens is an important component part, will meet transmitting and the reception of laser beam simultaneously.
Emission system to realize large displacement measurement it is desirable to shoot laser narrower, require camera lens aperture little simultaneously；On the other hand, receive
If system wants promotion signal intensity it is necessary to receive more light, need to accomplish camera lens heavy caliber.Therefore, realize big position
There is contradiction each other in both shift measurement and promotion signal intensity.
At present, lens design is mainly balanced between large displacement measurement and received signal strength.Generally, existing
The pattern that laser measuring equipment is mainly measured using converged light, specifically, the light beam of laser emitting is first carried out once
Imaging, then focused on vibrating object by a microscope group.In the scene of testee amplitude very little, to focusing in vibration processes
The impact of facula area is little, and vibration processes affect very little to returning the light energy receiving.In such a scenario, above-mentioned convergence
The pattern that light measures can more efficiently measure.But, in the scene that amplitude is larger, the vibration meeting of testee
Considerable influence is produced to facula area, and the energy of return light can be led to substantially to reduce, the mould that above-mentioned converged light measures
Formula will be unable to effectively be measured.
Authorization Notice No. be CN2577239Y, entitled " a kind of Potable laser collimator ", authorized announcement date be
In the utility model patent on October 1st, 2003, disclose the scheme receiving return light by photelectric receiver, and based on reception
Return light carry out subsequent treatment.Although this patent avoids the scheme using converged light, in the situation that external interference is larger
Under, can make return light that obvious signal errors occurs after carrying out opto-electronic conversion, thus affecting the degree of accuracy of subsequent treatment.
For the problems referred to above, effective solution is not yet proposed at present.
Utility model content
For the problem in correlation technique, the utility model proposes a kind of laser measuring equipment, laser can be effectively improved
The degree of accuracy of measurement.
According to one side of the present utility model, there is provided a kind of laser measuring equipment.
Laser instrument, the first beam splitter, optics microscope group, frequency modulation(PFM) are included according to laser measuring equipment of the present utility model
Device, photodetector, retroreflector and analytical equipment；Wherein, the first beam splitter is arranged in the light path of the sent light of laser instrument,
And the light path that laser instrument is sent light is divided into the light along the first light path and the second optic path；Frequency modulator is arranged at the first light
Lu Shang, retroreflector is arranged at the second light path and returns the light incident along the second light path；Optics microscope group is arranged on frequency modulator
Emitting light path and retroreflector emitting light path on, the emergent light of frequency modulator and the emergent light of retroreflector anti-through optics microscope group
Form axis light after penetrating；Photodetector is located on the emitting light path of axis light, and communicates to connect with analytical equipment.
Wherein, be may further include according to laser measuring equipment of the present utility model：
Collimating lens, are arranged in the light path of the sent light of laser instrument, and are located between laser instrument and the first beam splitter.
Additionally, above-mentioned retroreflector for corner cube or can also can be reflecting mirror at an angle each other, retroeflection
The position of device be arranged to make the summit of corner cube or each other the summit of reflecting mirror at an angle be aligned with the second light path.
Wherein, the summit of corner cube or each other the summit of reflecting mirror at an angle be aligned with the second light path and refer to：
The central shaft of the upper transmitting beam of the summit of corner cube or each other summit of reflecting mirror at an angle and the second light path is
Small distance is less than 1mm.
Additionally, according to laser measuring equipment of the present utility model, optics microscope group can include：
Second beam splitter, is arranged in the second light path, the light that reflection retroreflector returns；3rd beam splitter, is arranged at second
At the emitting light path intersection location of the emitting light path of beam splitter and frequency modulator, by frequency modulator outgoing light through the 3rd
Spectrophotometric reflection incides photodetector；Wherein, the light of the light through the second spectrophotometric reflection and frequency modulator outgoing is through the
Three beam splitters form axis light, and this axis light incides photodetector.
Wherein, be may further include according to laser measuring equipment of the present utility model：Camera lens, is arranged at the second light path,
Positioned between the second beam splitter and retroreflector.
Additionally, above-mentioned analytical equipment can be communicated to connect with frequency modulator.
Can also be included according to laser measuring equipment of the present utility model：Termination power, is arranged on photodetector and divides
Between analysis apparatus, electrically connect with photodetector, and communicate to connect with analytical equipment.
The technical solution of the utility model is capable of following beneficial effect：
(1) this utility model is by allowing the reference light and the retroreflector outgoing that adjust through overfrequency of frequency modulator output
Measurement light formed axis light, both light can be allowed preferably to interfere, thus allow interfere after light wave pattern more
Substantially such that it is able to avoid effectively increasing because leading to waveform recognition that error occurs compared with strong jamming the accuracy of measurement and
Interference free performance；In addition, passing through frequency modulator, can aid in the vibration of measurand according to prediction or misalignment is pre-
First frequency displacement being carried out to reference light, thus allowing the reference light frequency after frequency displacement and the frequency of actual measurement light to be more nearly, allowing future
The waveform of interference light being formed becomes apparent from, and further increases jamproof performance, contributes to more accurately judging that tested
The kinematic parameter (for example, shift value, movement velocity, amplitude, frequency of vibration etc.) of object；Because retroreflector can allow light be rolled over
Returning, thus allowing measurement light to be returned as far as possible, reducing light loss, though measurand carry out the motion of big displacement and away from laser
Device is it is also possible to be effectively ensured the measurement light intensity receiving；Scheme of the present utility model avoids measuring using converged light, because
This requirement to operating distance is relatively low, eliminates focus operations additionally it is possible to reduce the damage to system simultaneously.
(2) pass through to arrange collimating lens on the emitting light path of laser instrument, the more preferable light beam of the depth of parallelism can be allowed to incide
Retroreflector, thus ensure that the intensity of measurement light, it is to avoid because the led to light loss of scattering, even if measurand appearance is larger
Displacement it is also possible to accurately measure the kinematic parameter of measurand；
(3) pass through the measurement light of corner cube or the summit of the retroreflector of reflecting mirror formation at an angle and incidence each other
Beam center axle is aligned, and can allow the light returning through corner cube or reflecting mirror as far as possible with backtracking, central shaft and summit
Between distance about little, return light is higher with the degree of overlapping of incident illumination, so not only ensure that the intensity of return light, avoids light loss
Consumption, realize measurement to big displacement measurand, also contribute to allow return measurement light as far as possible with frequency displacement after reference
Light forms axis light, thus improving the waveform of formed interference light, contributes to improving further certainty of measurement；
(4) pass through includes second and the 3rd beam splitter optics microscope group, can allow return measurement light and frequency displacement after ginseng
Examine light and form interference light, and device structure is simple, manufacture and maintenance cost is relatively low；
(5) pass through to communicate to connect analytical equipment with frequency modulator, analytical equipment can be allowed according to the fortune of actual measurement
Dynamic parameter determination measurand is because the actual frequency displacement producing of motion, and then the running parameter of frequency modulator is adjusted,
The frequency displacement of reference light and the frequency displacement of actual measurement light being more nearly, thus improving interference effect further, allowing interference light
Waveform becomes apparent from, and improves certainty of measurement further, improves signal to noise ratio.
Brief description
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment
In required use accompanying drawing be briefly described it should be apparent that, drawings in the following description are only of the present utility model
Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other accompanying drawings.
Fig. 1 is the structure chart of the laser measuring equipment according to this utility model one embodiment；
Fig. 2 is the structure chart of the laser measuring equipment according to this utility model one specific embodiment；
Fig. 3 is the signal that in laser measuring equipment according to this utility model embodiment, corner cube is reflected to light
Figure；
Fig. 4 is the structure chart of the laser measuring equipment according to this utility model another specific embodiment.
Specific embodiment
The description of this illustrated embodiment should be combined with corresponding accompanying drawing, and accompanying drawing should be used as the one of complete description
Part.In the accompanying drawings, the shape of embodiment or thickness can expand, and to simplify or convenient to indicate.Furthermore, respectively tie in accompanying drawing
The part of structure will be illustrated it is notable that in figure is not shown or unit that illustrated by word with being respectively described
Part, is the form known to a person of ordinary skill in the art in art.
The description of embodiments herein, about any reference in direction and orientation, is all for only for ease of description, and can not manage
Solution is any restriction to this utility model protection domain.Relational language, as " lower ", " higher ", " level ", " vertical
", " upper ", " under ", " on ", D score, " top " and " | bottom " and its derivative (as " flatly ", " down ",
" up " etc. the orientation being discussed shown in described in illustrating or accompanying drawing all should) be interpreted.These relational languages are only
Describe only for convenient, and be not considered as explaining or the concrete operations in particular orientation to instrument and equipment.Term, such as
" enclosing ... " (attached), " being fixed on ... ", " connected " and " being connected with each other " refer to a kind of relation, wherein
Structure, by directly or indirectly through insert structure, is fixed or is attached to another structure, describes unless there are clear and definite, described structure
Including moveable or fixed or associated.Additionally, feature of the present utility model and advantage by referring to
Preferred embodiment illustrates.It is therefore preferable that the combination of the possible infinite feature of embodiment explanation, these features can
Can be individually present or combine presence, this utility model is not especially defined in preferred embodiment.Of the present utility model
Scope is defined by the claims.
According to embodiment of the present utility model, there is provided a kind of laser measuring equipment.
As shown in figure 1, laser instrument 1, the first beam splitter 2, optical frames are included according to laser measuring equipment of the present utility model
Group, frequency modulator 3, photodetector 4, corner cube 5 (being arranged in measurand) and analytical equipment 6.
First beam splitter 2 is arranged in the light path of the sent light of laser instrument 1, and the light path that laser instrument 1 is sent light is divided into
Light along the first light path and the second optic path.
For the first light path, the light along the first optic path is reference light, and frequency modulator 3 is arranged at the first light path
On, when reference light is along the first optic path, frequency modulator 3 will be incided, frequency modulator 3 can change the frequency of reference light
Rate, and export the reference light after frequency displacement.In addition, for the second light path, the light along the second optic path is measurement light, corner cube
5 are arranged at the second light path, thus the light incident along the second light path is returned.
Wherein, by frequency modulator 3, the frequency shift of reference light can be and the measurement light frequency occurring after frequency displacement
Close.For example it may be predetermined that the possible kinematic parameter of measurand is it is assumed that determine measurement light edge according to this kinematic parameter
Can frequency displacement because of the motion of measurand in the measurement light the second optic path, and frequency variation is Δ F, now, frequently
Rate manipulator 3 can carry out frequency displacement according to this Δ F to reference light.In such manner, it is possible to allow the frequency of the interference light after frequency displacement and measurement light
Rate is more nearly, and when both light interferes, the waveform of interference light becomes apparent from, it can be avoided that because leading compared with strong jamming
Cause waveform recognition that error occurs, effectively increase accuracy and the interference free performance of measurement.
In addition, the function of optics microscope group be in the emergent light to frequency modulator 3 and the emergent light of corner cube 5 at least
One of reflected, allow this two-beam formed axis light (that is, allow the direction of this two-beam identical, position overlap, thus contributing to
This two-beam is allowed preferably to interfere), optics microscope group can be to the emitting light path being arranged on frequency modulator 3 and corner cube
Emitting light path on, photodetector 4 is located on the emitting light path of axis light, and communicates to connect with analytical equipment 6.Analytical equipment
6 are used for judging the kinematic parameter of measurand according to the signal of telecommunication of photodetector 4 output, for example, it may be determined that movement velocity,
The parameters such as displacement, Oscillation Amplitude, frequency of vibration.
Schematically show only the position of optics microscope group in Fig. 1, after the position of optics microscope group will be retouched in detail
State.In addition, employing corner cube 5 in the embodiment shown in fig. 1 as retroreflector, in other embodiments, can also adopt
With the multiple reflecting mirrors intersecting at an angle each other, it is for instance possible to use the reflecting surface mirror that two is in 90 degree of knuckles (L-shaped) is made
For retroreflector, or, retroreflector can also by greater number, in other angles, the reflecting surface mirror of setting is constituted, as long as can allow
Incident illumination is turned back along former route.
As shown in Fig. 2 in one embodiment, be may further include according to laser measuring equipment of the present utility model：
Collimating lens 7, are arranged in the light path of the sent light of laser instrument 1, and are located between laser instrument 1 and the first beam splitter 2.Pass through
Using collimating lens, the light with the angle of divergence can be allowed to be changed into the directional light collimating, incide corner cube, thus contributing to protecting
The intensity of card measurement light, it is to avoid because the led to light loss of scattering, even if larger displacement away from laser in measurand
Device is it is also possible to accurately measure the kinematic parameter of measurand.
Additionally, in one embodiment, according to the position quilt of the corner cube 5 in laser measuring equipment of the present utility model
It is set to make the summit of corner cube 5 to be aligned with the second light path.Preferably, can along the central shaft of the light beam of the second optic path
With the summit just to corner cube 5, i.e. minimum range between the two is 0.Now, the light inciding corner cube 5 is passing through
Light path when returning after the reflection of corner cube 5, is completely superposed with the light path inciding during corner cube 5, so, corner cube
5 emergent light, after the reflection through optics microscope group, will form axis light with reference light as far as possible, be favorably improved the effect of interference
Really.
Under normal circumstances, laser emitting laser has certain width (be radiated at body surface and can form a hot spot).
To also there is certain error on time, lead to, between the position of laser beam central shaft and corner cube 5 summit, there is a distance,
This apart from sufficiently small when, be still able to ensure to a certain extent the light inciding corner cube 5 with from corner cube 5 outgoing
Light overlap.For example, referring to shown in Fig. 3, it is assumed that light beam is made up of multiple beam components, coboundary is beam component X, below
Boundary is beam component Y, and central shaft is C.After beam component X is radiated at reflecting surface A, it is reflected to reflecting surface B, through reflecting surface B
Outgoing after reflection, i.e. component X ' shown in Fig. 3.Lower boundary is, after beam component Y is radiated at reflecting surface B, to be reflected to reflection
Face A, outgoing after reflecting surface A reflection, i.e. component Y ' shown in Fig. 3.Now, the position of laser beam central shaft and corner rib
Mirror 5 has one apart from d between summit.When d is sufficiently small, referring to Fig. 3, by coboundary beam component X and lower boundary beam component Y
After the light beam incidence limiting, the coboundary of return light is Y ', lower boundary is X ', and this two-beam still has and partially overlaps, so
Also can ensure that reference light forms axis light with measurement light follow-up to a certain extent.In one embodiment, d is less than 1mm.
By the summit of corner cube and the measuring beam central axial alignment inciding corner cube can be allowed through angle
, as far as possible with backtracking, between central shaft and summit, distance is about little, and return light is overlapping with incident illumination for the light that corner prism returns
More, so not only ensure that the intensity of return light, avoid light loss, the measurement to big displacement measurand for the realization, and
Additionally aid and allow the measurement light of return form axis light with the reference light after frequency displacement as far as possible, thus improving formed interference light
Waveform, contributes to improving further certainty of measurement.
The foregoing describe and the embodiment that light is turned back will be measured using corner cube, the retroreflector that reflecting surface microscope group is become,
Equally can realize allowing incident illumination along backtracking.For example, the reflecting surface microscope group by two being in 90 degree of knuckles (L-shaped) is become
Retroreflector, by being directed at the position of laser beam central shafts by two reflectings surface mirror intersection location point (summit), you can incident illumination with
Return optical position to overlap.Alternatively, similar with the embodiment using corner cube, the position of laser beam central shaft is reflected with two
Have one apart from d, d can be less than 1mm between face mirror intersection location point (summit).
With continued reference to Fig. 2, in the embodiment shown in Figure 2, optics microscope group includes the second beam splitter 8 and the 3rd beam splitter 9.
Wherein, the second beam splitter 8 is arranged in the second light path, can reflect the light being returned by corner cube 5.3rd beam splitter 9 is arranged
At the emitting light path of the second beam splitter 8 with the emitting light path intersection location of frequency modulator 3.So, anti-through the second beam splitter 8
The light penetrated and the light of frequency modulator 3 outgoing form axis light after being converged by the 3rd beam splitter 9, and this axis light will incide
Photodetector 4.Here, the function of the 3rd beam splitter 9 is that incident two-beam on different directions is pooled a branch of axis light.
After the 3rd beam splitter 9 and the second beam splitter 8 set, incide beam center axle and the angle of corner cube 5
The distance on corner prism 5 summit is nearer, just incides the light path plyability of the light of corner cube 5 and the light being returned by corner cube 5
Better, the light that returned by corner cube 5 after the second beam splitter 8 reflects also just can with the reference light after frequency displacement formed coaxial
Light, thus improve the effect of interference.
Additionally, as shown in Fig. 2 in an embodiment of the present utility model, laser measuring equipment may further include
Camera lens 10, is arranged at the second light path, positioned between the second beam splitter 8 and corner cube 5.Camera lens can be to the light in the second light path
After carrying out optical treatment, project corner cube 5.The measurement light being reflected by corner cube 5 can after camera lens 10 to
Reach the second beam splitter 8, and reflect through the second beam splitter 8.
In the embodiment shown in Figure 2, both employ collimating lens 7, also use camera lens 10 simultaneously.Collimating lens 7 He
Camera lens 10 can allow the laser sending laser instrument 1 outgoing be changed into directional light.In other embodiments, collimating lens 7 and camera lens
10 can also select a use.
It should be noted that the optics microscope group (including the second beam splitter 8 and the 3rd beam splitter 9) shown in Fig. 2 is only used
In explanation.In fact, optics microscope group can be using other parts and arrangement mode, as long as two-beam can be formed axis light
, the structure and composition of these optics microscope groups is that those skilled in the art be understand that, will not enumerate here.
Additionally, in an embodiment of the present utility model, through the reference light of frequency displacement and the measurement of corner cube 5 reflection
Light can interfere in the inspection positions of photodetector, forms interference light, and photodetector 4 can gather this interference
Light, obtains the corresponding signal of telecommunication of interference light.In another embodiment, the survey reflected through reference light and the corner cube 5 of frequency displacement
Amount light just can interfere before entering photodetector 4, and photodetector 4 gathers the signal of interference light.
Fig. 4 is the structured flowchart of the laser measuring equipment according to another embodiment of this utility model.In embodiment illustrated in fig. 2
On the basis of, the present embodiment shown in Fig. 4 analytical equipment 6 is connected with frequency modulator 3 enable analytical equipment 6 control frequency
Rate manipulator 3.So, analytical equipment 6 can determine measurand because motion is to measurement according to the kinematic parameter of actual measurement
The frequency displacement of the actual generation of light, and then the running parameter of frequency modulator is adjusted so that the frequency displacement of reference light is surveyed with actual
The frequency displacement of amount light is more nearly, thus improving interference effect further, allowing the wave pattern of interference light to become apparent from, changing further
Kind certainty of measurement, raising signal to noise ratio.
In addition, in the embodiment shown in fig. 4, photodetector 4 is electrically connected with analytical equipment 6 by termination power 11,
Termination power 11 can be filtered waiting to the signal of telecommunication of photodetector 4 output and process, to reduce the noise in signal.
In Fig. 1 to scheme illustrated in fig. 4, for purposes of clarity, simply corner cube is shown as triangle,
In fact, corner cube 5 can be with micronized, i.e. corner cube being formed by pyramid microarray, thus forming multiple corners, making
Emergent ray is as overlapping as possible with incident ray.
Alternatively, said frequencies manipulator 3 can be acousto-optic modulator, or can also be that other can change laser frequency
The manipulator of rate.
In sum, by means of the technical solution of the utility model, the measurement light through reflection for the measurement can be effectively improved
Intensity, improve the interference effect of measurement light and reference light, improve signal to noise ratio and capacity of resisting disturbance, can be in the field of big displacement
Accurate and effective measurement is realized in scape；And, scheme of the present utility model avoids measuring using converged light, therefore to work
The requirement making distance is relatively low, eliminates focus operations additionally it is possible to reduce the damage to system simultaneously.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model, all this
Within the spirit of utility model and principle, any modification, equivalent substitution and improvement made etc., should be included in this utility model
Protection domain within.
Claims (8)
1. a kind of laser measuring equipment is it is characterised in that include laser instrument (1), the first beam splitter (2), optics microscope group, frequency tune
Device (3) processed, photodetector (4), retroreflector (5) and analytical equipment (6)；Wherein,
Described first beam splitter (2) is arranged in the light path of the sent light of described laser instrument (1), and described laser instrument (1) is sent out
The light path going out light is divided into the light along the first light path and the second optic path；
Described frequency modulator (3) is arranged in described first light path, and described retroreflector (5) is arranged at described second light path and incites somebody to action
Return along the incident light of described second light path；
Described optics microscope group is arranged on the emitting light path of described frequency modulator (3) and the emitting light path of described retroreflector, institute
State the emergent light of frequency modulator (3) and the emergent light of described retroreflector reflect through described optics microscope group after form axis light；
Described photodetector (4) is located on the emitting light path of described axis light, and communicates to connect with described analytical equipment (6).
2. laser measuring equipment according to claim 1 is it is characterised in that further include：
Collimating lens (7), are arranged in the light path of the sent light of described laser instrument (1), and are located at described laser instrument (1) and institute
State between the first beam splitter (2).
3. laser measuring equipment according to claim 1 it is characterised in that described retroreflector (5) be corner cube or
For reflecting mirror at an angle each other, the position of described retroreflector (5) is arranged to make the summit of described corner cube or institute
State the summit of reflecting mirror at an angle each other to be aligned with described second light path.
4. laser measuring equipment according to claim 3 it is characterised in that the summit of described corner cube or described each other
The summit of reflecting mirror at an angle is aligned with described second light path and refers to：
The summit of described corner cube or the upload of the described summit of reflecting mirror at an angle each other and described second light path
The central shaft minimum range losing bundle is less than 1mm.
5. laser measuring equipment according to claim 4 is it is characterised in that described optics microscope group includes：
Second beam splitter (8), is arranged in described second light path, reflects the light that described retroreflector (5) returns；
3rd beam splitter (9), is arranged at the emitting light path of described second beam splitter (8) and the outgoing of described frequency modulator (3)
At light path intersection location, incided described through described 3rd beam splitter (9) reflection by the light of described frequency modulator (3) outgoing
Photodetector (4)；
Wherein, the light of the light reflecting through described second beam splitter (8) and the outgoing of described frequency modulator (3) is through described 3rd light splitting
Device (9) forms axis light, and this axis light incides described photodetector (4).
6. laser measuring equipment according to claim 5 is it is characterised in that further include：
Camera lens (10), is arranged at described second light path, between described second beam splitter (8) and described retroreflector (5).
7. laser measuring equipment according to claim 1 is it is characterised in that described analytical equipment (6) is adjusted with described frequency
Device (3) communication connection processed.
8. laser measuring equipment according to claim 1 is it is characterised in that also include：Termination power (11), is arranged on institute
State between photodetector (4) and described analytical equipment (6), electrically connect with described photodetector (4), and fill with described analysis
Put (6) communication connection.
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|---|---|---|---|
| CN201620884802.8U CN205940465U (en) | 2016-08-15 | 2016-08-15 | Laser survey equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620884802.8U CN205940465U (en) | 2016-08-15 | 2016-08-15 | Laser survey equipment |
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| CN110207588A (en) * | 2019-06-10 | 2019-09-06 | 北京航天计量测试技术研究所 | A kind of prism of corner cube optical apex sighting device and its Method of Adjustment |
| CN110285948A (en) * | 2019-06-10 | 2019-09-27 | 北京航天计量测试技术研究所 | A kind of regression reflecting ball optics centre of sphere sighting device and its method of sight |
| CN112857206A (en) * | 2019-11-28 | 2021-05-28 | 余姚舜宇智能光学技术有限公司 | Laser interferometer, optical system thereof, detection method and deflection detection equipment |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110207588A (en) * | 2019-06-10 | 2019-09-06 | 北京航天计量测试技术研究所 | A kind of prism of corner cube optical apex sighting device and its Method of Adjustment |
| CN110285948A (en) * | 2019-06-10 | 2019-09-27 | 北京航天计量测试技术研究所 | A kind of regression reflecting ball optics centre of sphere sighting device and its method of sight |
| CN110207588B (en) * | 2019-06-10 | 2020-12-01 | 北京航天计量测试技术研究所 | Method for assembling and adjusting optical vertex aiming device of pyramid prism |
| CN112857206A (en) * | 2019-11-28 | 2021-05-28 | 余姚舜宇智能光学技术有限公司 | Laser interferometer, optical system thereof, detection method and deflection detection equipment |
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