CN103063411A - Measuring device of performance of high-power linear polarization laser beam - Google Patents
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Abstract
本发明公开了一种高功率线偏振激光光束性能的测量装置；包括第一楔形镜，第一探测器和第二探测器；线偏振激光以布儒斯特角入射至第一楔形镜的外反射面上，入射光偏振方向在入射面内，反射光束光强为零，适当使楔形镜的外反射面有微小偏转，有少量激光经第一楔形镜的外反射面的反射光由第一探测器进行测量，经第一楔形镜的内反射面的反射光由第二探测器进行测量。而大部分透射的激光能量经过第二楔形镜后实现光斑无放大出射，其偏振特性不受影响。本发明采用楔形镜对入射激光进行分光，能够降低反射光束的能量及保持透射光束的偏振性，对激光光束多个参数进行同时测量。
The invention discloses a measuring device for the performance of a high-power linearly polarized laser beam; it includes a first wedge mirror, a first detector and a second detector; the linearly polarized laser is incident on the outer surface of the first wedge mirror at a Brewster angle. On the reflective surface, the polarization direction of the incident light is within the incident surface, and the light intensity of the reflected beam is zero, so that the outer reflective surface of the wedge mirror is slightly deflected, and a small amount of laser light is reflected by the first wedge mirror through the first reflective light. The detector is used for measurement, and the light reflected by the internal reflection surface of the first wedge mirror is measured by the second detector. However, most of the transmitted laser energy passes through the second wedge mirror and exits without magnification of the light spot, and its polarization characteristics are not affected. The invention uses a wedge mirror to split the incident laser light, which can reduce the energy of the reflected light beam and maintain the polarization of the transmitted light beam, and simultaneously measure multiple parameters of the laser light beam.
Description
技术领域technical field
本发明属于光学测量技术领域，更具体地，涉及一种高功率线偏振激光光束性能的测量装置。The invention belongs to the technical field of optical measurement, and more specifically relates to a measuring device for the performance of a high-power linearly polarized laser beam.
背景技术Background technique
随着光刻技术的不断发展，通过氟化氩（ArF）准分子激光器已经成功突破22nm节点，而这也已经达到了准分子激光器的极限，因此急需开发下一代光刻光源，即EUV（Extreme Ultra Violet，极紫外）光源使摩尔定律得以延续。EUV光刻技术面临着一系列的挑战，其中的一个问题是目前的光源功率太低，而LPP EUV（Laser Produced Plasma Extreme Ultra Violet，激光等离子体极紫外）光源被期待提供高于200W的输出功率。若要实现工业生产要求的高功率和高可靠性，LPP主驱动光源是关键因素之一。LPP的主驱动光源必须是具有高功率（数百瓦）、高重复频率和高光束质量的激光，而MOPA（A master oscillator and a power amplifier，主振荡-功率放大）激光驱动器已成为获得LPP主驱动光源的主要研究方向。因此相应地急需一种新的测量装置能对MOPA系统激光参数进行测量及评价，评价参数包括激光功率（能量）、激光脉冲波形和光束质量M2等。同样掌握和控制这些参数，对于高功率激光器在其它领域的应用也是十分重要的。With the continuous development of lithography technology, the argon fluoride (ArF) excimer laser has successfully broken through the 22nm node, and this has reached the limit of the excimer laser. Therefore, it is urgent to develop the next generation of lithography light source, namely EUV (Extreme Ultra Violet (extreme ultraviolet) light sources continue Moore's Law. EUV lithography technology is facing a series of challenges, one of which is that the power of the current light source is too low, while the LPP EUV (Laser Produced Plasma Extreme Ultra Violet, laser plasma extreme ultraviolet) light source is expected to provide an output power higher than 200W . To achieve the high power and high reliability required by industrial production, LPP main driving light source is one of the key factors. The main driving light source of LPP must be a laser with high power (hundreds of watts), high repetition rate and high beam quality, and MOPA (A master oscillator and a power amplifier, main oscillation-power amplifier) laser driver has become the main source of LPP. The main research direction of driving light source. Therefore, a new measurement device is urgently needed to measure and evaluate the laser parameters of the MOPA system. The evaluation parameters include laser power (energy), laser pulse waveform and beam quality M2 , etc. It is also very important to master and control these parameters for the application of high-power lasers in other fields.
激光参数的测量方法有很多，但它们都只能对单一的激光参数进行测量，若要对多种激光参数（如光束质量、脉冲形状、功率大小）同时进行测量，则需要采用分光的办法。为调整的方便，通常将分光镜放置在激光输出方向并与光轴方向成45°角，进而对部分反射的激光的光束参数进行检测。45°布局的分束镜，通常有较高的反射率。并且由菲涅尔公式可知，p分量与s分量的反射率和透射率一般是不一样的，而且反射时还可能发生相位跃变。当反射和折射后就会改变入射光的偏振态，对测量结果产生影响。另外这种方法较适合激光功率不是很高的情况，若激光能量过高，导致反射出的光束功率仍然超过探测器要求的最大功率阈值，会对仪器造成损坏。There are many methods for measuring laser parameters, but all of them can only measure a single laser parameter. If you want to measure multiple laser parameters (such as beam quality, pulse shape, and power) at the same time, you need to use a spectroscopic method. For the convenience of adjustment, the beam splitter is usually placed in the laser output direction and at an angle of 45° to the optical axis direction, and then the beam parameters of the partially reflected laser are detected. Beamsplitters with a 45° layout usually have higher reflectivity. And it can be seen from the Fresnel formula that the reflectivity and transmittance of the p component and the s component are generally different, and a phase jump may occur during reflection. When reflected and refracted, the polarization state of the incident light will be changed, which will affect the measurement results. In addition, this method is more suitable for the case where the laser power is not very high. If the laser energy is too high, the reflected beam power still exceeds the maximum power threshold required by the detector, which will cause damage to the instrument.
发明内容Contents of the invention
针对现有技术的缺陷，本发明的目的在于提供一种高功率线偏振激光光束性能的测量装置，旨在解决现有技术不利于高功率激光束光束参数测量的问题。In view of the defects of the prior art, the object of the present invention is to provide a measuring device for the performance of a high-power linearly polarized laser beam, aiming at solving the problem that the prior art is not conducive to the measurement of the beam parameters of the high-power laser beam.
为实现上述目的，本发明提供了一种高功率线偏振激光光束性能的测量装置，包括：第一楔形镜，第一探测器和第二探测器；线偏振激光入射至第一楔形镜的外反射面上，偏振方向在入射面内，经第一楔形镜的外反射面的反射光由第一探测器进行测量，经第一楔形镜的内反射面的反射光由第二探测器进行测量。To achieve the above object, the present invention provides a measurement device for the performance of a high-power linearly polarized laser beam, comprising: a first wedge mirror, a first detector and a second detector; On the reflective surface, the polarization direction is within the incident plane, the reflected light passing through the outer reflecting surface of the first wedge mirror is measured by the first detector, and the reflected light passing through the inner reflecting surface of the first wedge mirror is measured by the second detector .
更进一步地，还包括第二楔形镜，第二楔形镜的内反射面与第一楔形镜的外反射面平行且两楔形镜的楔角分别在激光光轴的两边，线偏振激光依次通过第一楔形镜和第二楔形镜后输出激光光斑。Further, it also includes a second wedge mirror, the internal reflection surface of the second wedge mirror is parallel to the external reflection surface of the first wedge mirror and the wedge angles of the two wedge mirrors are respectively on both sides of the laser optical axis, and the linearly polarized laser passes through the first wedge mirror in turn. The laser spot is output after the first wedge mirror and the second wedge mirror.
更进一步地，所述第二楔形镜的外反射面与第一楔形镜的内反射面之间的间距为4-8cm。Furthermore, the distance between the outer reflective surface of the second wedge mirror and the inner reflective surface of the first wedge mirror is 4-8 cm.
更进一步地，所述第一探测器为光束质量检测仪，用于对激光光束的质量进行测量。Furthermore, the first detector is a beam quality detector, which is used to measure the quality of the laser beam.
更进一步地，所述第二探测器为光电探测器，用于对激光脉冲的波形进行检测。Furthermore, the second detector is a photodetector, which is used to detect the waveform of the laser pulse.
更进一步地，所述测量装置还包括能量计，用于对经第二楔形镜输出的激光能量进行测量。Furthermore, the measuring device further includes an energy meter for measuring the laser energy output through the second wedge mirror.
更进一步地，所述第一楔形镜的外反射面与所述线偏振激光的光轴的夹角为布儒斯特角。Furthermore, the angle between the external reflection surface of the first wedge mirror and the optical axis of the linearly polarized laser is Brewster's angle.
本发明采用按布儒斯特角度布局的楔形镜克服了45°分光镜反射光束能量过高且会对光束偏振态产生变化的缺点，并能够对激光光束多个参数进行同时测量。当线偏振的激光光束入射到第一楔形镜表面，使入射激光的偏振方向在入射面（入射光线与反射光线所在的平面）内。当入射角为布儒斯特角时，反射光束光强为零，适当使外反射面有微小偏转，将会有少量激光被反射用以对激光光束的参数进行测量。而大部分透射的激光能量经过第二楔形镜后实现光斑无放大出射，其偏振特性不受影响。The invention adopts wedge-shaped mirrors arranged according to Brewster's angle to overcome the disadvantages that the reflected beam energy of the 45° spectroscopic mirror is too high and the polarization state of the beam will be changed, and can simultaneously measure multiple parameters of the laser beam. When the linearly polarized laser beam is incident on the surface of the first wedge mirror, the polarization direction of the incident laser light is within the incident plane (the plane where the incident light and reflected light are located). When the incident angle is Brewster's angle, the light intensity of the reflected beam is zero. If the outer reflective surface is slightly deflected properly, a small amount of laser light will be reflected to measure the parameters of the laser beam. However, most of the transmitted laser energy passes through the second wedge mirror and exits without magnification of the light spot, and its polarization characteristics are not affected.
附图说明Description of drawings
图1是本发明实施例提供的高功率线偏振激光光束性能的测量装置的结构示意图；Fig. 1 is a structural schematic diagram of a measuring device for the performance of a high-power linearly polarized laser beam provided by an embodiment of the present invention;
图2是本发明实施例提供的高功率线偏振激光光束性能的测量装置中单楔形镜光斑放大光路图；Fig. 2 is the enlarged light path diagram of the single wedge mirror spot in the measuring device for the performance of the high-power linearly polarized laser beam provided by the embodiment of the present invention;
图3是本发明实施例提供的高功率线偏振激光光束性能的测量装置经实验测得激光光斑三维图；Fig. 3 is a three-dimensional diagram of the laser spot measured experimentally by the device for measuring the performance of the high-power linearly polarized laser beam provided by the embodiment of the present invention;
图4是本发明实施例提供的高功率线偏振激光光束性能的测量装置经实验测得激光脉冲波形图。Fig. 4 is a diagram of laser pulse waveforms obtained through experimentation of the device for measuring the performance of a high-power linearly polarized laser beam provided by an embodiment of the present invention.
具体实施方式Detailed ways
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
本发明利用以布儒斯特角入射时楔形镜分束特性可以对高功率线偏振激光光束参数进行实时测量；图1示出了本发明实施例提供的高功率线偏振激光光束性能的测量装置的结构，为了便于说明，仅示出了与本发明实施例相关的部分，详述如下：The present invention utilizes the beam-splitting characteristics of the wedge mirror when it is incident at Brewster's angle to measure the parameters of the high-power linearly polarized laser beam in real time; Figure 1 shows the measurement device for the performance of the high-power linearly polarized laser beam provided by the embodiment of the present invention The structure of the structure, for the convenience of explanation, only shows the part related to the embodiment of the present invention, detailed description is as follows:
高功率线偏振激光光束性能的测量装置包括：第一楔形镜1，第一探测器3和第二探测器4；线偏振激光入射至第一楔形镜1的外反射面上，偏振方向在入射面内，经第一楔形镜1的外反射面的反射光由第一探测器3进行测量，经第一楔形镜1的内反射面的反射光由第二探测器4进行测量。The measuring device of the performance of the high-power linearly polarized laser beam comprises: a first wedge mirror 1, a
在本发明实施例中，第一探测器3为光束质量检测仪，用于对激光光束的质量进行测量。第二探测器为光电探测器，用于对激光脉冲的波形进行检测。In the embodiment of the present invention, the
本发明提供的一种高功率线偏振激光光束性能的测量装置主要利用了以布儒斯特角入射时楔形镜的分束特性，能够实时测量高功率线偏振激光器的多个参数。The device for measuring the performance of a high-power linearly polarized laser beam mainly utilizes the beam-splitting characteristics of a wedge mirror when incident at Brewster's angle, and can measure multiple parameters of a high-power linearly polarized laser in real time.
在本发明实施例中，高能量线偏振激光经过第一楔形镜1时，大部分能量被折射透过第一楔形镜1。由于的激光经过单楔形镜时在平行入射面方向具有光斑放大作用，透过第一楔形镜1的光斑直径会被放大，若要保持光斑形状不发生改变，应在主光路上平行放置2个楔形镜，具体放置方法如前所述，这样才能弥补光束放大上的非均匀性，得到无放大输出的高能量线偏振激光。因此，测量装置还包括第二楔形镜2，第二楔形镜的内反射面与第一楔形镜的外反射面平行且两楔形镜的楔角分别在激光光轴的两边，，线偏振激光依次通过第一楔形镜1和第二楔形镜2后输出激光光斑。光斑放大光路如图2所示。In the embodiment of the present invention, when the high-energy linearly polarized laser passes through the first wedge mirror 1 , most of the energy is refracted and passes through the first wedge mirror 1 . When the laser beam passes through the single wedge mirror, it has a spot enlargement effect in the direction parallel to the incident surface, and the spot diameter passing through the first wedge mirror 1 will be enlarged. To keep the spot shape unchanged, two wedge mirrors should be placed in parallel on the main optical path. The specific placement method of the wedge mirror is as mentioned above, so that the non-uniformity of beam amplification can be compensated, and a high-energy linearly polarized laser without amplification output can be obtained. Therefore, the measurement device also includes a
在本发明实施例中，测量装置还包括能量计，用于对经第二楔形镜2输出的激光能量进行测量。In the embodiment of the present invention, the measuring device further includes an energy meter for measuring the laser energy output through the
本发明采用布儒斯特角布局的楔形镜克服了45°分光镜反射光束能量过高且会对光束偏振态产生变化的缺点，并能够对激光光束多个参数进行同时测量。当线偏振的激光光束入射到第一楔形镜1表面，使入射激光的偏振方向在入射面（入射光线与反射光线所在的平面）内。当入射角为布儒斯特角时，反射光束光强为零，适当使第一楔形镜外反射面有微小偏转，将会有少量激光被反射用以对激光光束的参数进行测量。而大部分透射的激光能量经过第二楔形镜2后实现光斑无放大出射，其输出激光能量基本保持不变且偏振特性不受影响。The invention adopts the wedge mirror arranged at Brewster's angle to overcome the disadvantages that the energy of the beam reflected by the 45° beam splitter is too high and the polarization state of the beam will be changed, and can simultaneously measure multiple parameters of the laser beam. When the linearly polarized laser beam is incident on the surface of the first wedge mirror 1 , the polarization direction of the incident laser light is within the incident plane (the plane where the incident light and reflected light are located). When the incident angle is Brewster's angle, the light intensity of the reflected beam is zero, and if the outer reflective surface of the first wedge mirror is slightly deflected, a small amount of laser light will be reflected to measure the parameters of the laser beam. However, most of the transmitted laser energy passes through the
作为本发明的一个实施例，在进行激光等离子体极紫外光源的驱动激光器高功率高重复率脉冲CO2激光束的测试时，第二楔形镜2的外反射面与第一楔形镜1的内反射面之间的间距为4-8cm。第一楔形镜1的外反射面与所述线偏振激光的光轴的夹角为63°。As an embodiment of the present invention, when carrying out the test of the high power high repetition rate pulsed CO2 laser beam of the driving laser of the laser plasma extreme ultraviolet light source, the external reflection surface of the
本发明结构简单，操作方便，能够同时测量高功率线偏激光器的多种参数；以布儒斯特角入射的楔形镜不仅可以获得较小的反射光强，同时由于楔形镜的外反射面和内反射面非平行，两面的反射光间存在一个夹角，可以采用不同探测器进行同时测量，且在楔形镜两平面间的反射不会形成F-P干涉环，而且双楔形镜能获得无畸变的光束输出。The invention is simple in structure, easy to operate, and can measure various parameters of high-power linearly polarized lasers at the same time; the wedge-shaped mirror incident at the Brewster angle can not only obtain smaller reflected light intensity, but also due to the external reflection surface of the wedge-shaped mirror and the The internal reflection surfaces are non-parallel, and there is an included angle between the reflected light on both sides. Different detectors can be used for simultaneous measurement, and the reflection between the two planes of the wedge mirror will not form an F-P interference ring, and the double wedge mirror can obtain distortion-free beam output.
本发明基于布儒斯特角分束镜的激光分束作用，使高功率线偏振激光以略偏于布儒斯特角入射在楔形镜上，反射的极少光束用于实时光束质量和脉冲波形测量，而沿原入射方向平行出射的光束无放大无损耗出射。下面结合附图和具体实例对本发明作进一步详细的说明。The invention is based on the laser beam splitting effect of the Brewster angle beam splitter, so that the high-power linearly polarized laser is incident on the wedge mirror at a slightly biased Brewster angle, and the reflected very little beam is used for real-time beam quality and pulse Waveform measurement, while the beam exiting parallel to the original incident direction exits without amplification and loss. The present invention will be described in further detail below in conjunction with the accompanying drawings and specific examples.
高功率线偏振激光光束性能的测量装置包括第一楔形镜1，第二楔形镜2、第一探测器3、第二探测器4。高能量线偏振激光照射在第一楔形镜1外反射面上，使得偏振方向在入射面内，且第一楔形镜1外反射面的法线方向与入射激光方向的夹角为布儒斯特角。第一楔形镜1的外反射面的反射光进行反射后，由第一探测器3进行测量，所述的第一探测器3可以是光束质量检测仪，用以对激光光束质量的测量；同样第一楔形镜1的内反射面的反射光进行反射后，由第二探测器4进行测量，所述的第二探测器4可以是光电探测器，用以对激光脉冲波形的检测。第二楔形镜的内反射面与第一楔形镜的外反射面平行且两楔形镜的楔角分别在激光光轴的两边，第二楔形镜2的外反射面与第一楔形镜1的内反射面之间的间距为4-8cm，高能量线偏振激光依次通过第一楔形镜1和第二楔形镜2后激光光斑无放大岀射。The device for measuring the performance of high-power linearly polarized laser beams includes a first wedge mirror 1 , a
当激光以布儒斯特角入射到第一楔形镜1的外反射面时，反射光和折射光同为线偏振光，其中反射光为S偏振光（入射面振动的方向），折射光为P偏振光（平行于入射面振动的方向）。高能量线偏振激光的偏振方向在入射平面内，即入射的高能量激光仅含P偏振光，它经过第一楔形镜1后将全部透射，且透射后的激光的偏振状态保持不变。此时微调第一楔形镜1的外反射面的反射角度，会有少量的激光被反射，反射激光的强度与偏转的角度相关；使其略偏离布儒斯特角（偏转角小于1°角），则会有少量的激光反射，进而对弱反射的激光进行检测，从而起到保护探测仪器的作用。经第一楔形镜1外反射面反射的激光由第一探测器3对激光进行测量，若第一探测器3为光束质量检测仪，可以得到激光光斑的直径、模结构、激光的二维、三维光斑能量分布参数。同样地，高能量激光经第一楔形镜1的外反射面折射后会在第一楔形镜1的内反射面产生少量反射，该反射光经第一楔形镜1的外反射面折射后岀射由第二探测器4接收，若第二探测器4为光电探测器，可以对激光脉宽等参数进行测量，为避免在测量结果中带入楔形镜结构对光束质量的影响，一般不采用内反射面反射光进行光束质量监测。由于第一楔形镜1的内反射面和外反射面间存在一个夹角，所以经第一楔形镜1反射的两束反射光束传播一段光路后将分离的更远，这样可以采用探测器对两束光进行同时探测，彼此不会干扰；同时因为楔形角的存在，在楔形镜两平面间的反射不会形成F-P干涉环。When the laser is incident on the outer reflective surface of the first wedge mirror 1 at the Brewster angle, the reflected light and the refracted light are both linearly polarized light, wherein the reflected light is S polarized light (the direction of vibration of the incident surface), and the refracted light is P polarized light (parallel to the direction of vibration of the plane of incidence). The polarization direction of the high-energy linearly polarized laser is in the incident plane, that is, the incident high-energy laser only contains P-polarized light, which will be completely transmitted after passing through the first wedge mirror 1, and the polarization state of the transmitted laser remains unchanged. Now fine-tuning the reflection angle of the outer reflection surface of the first wedge-shaped mirror 1, a small amount of laser light will be reflected, and the intensity of the reflected laser light is related to the angle of deflection; make it slightly deviate from Brewster's angle (deflection angle is less than 1 ° angle) ), there will be a small amount of laser reflection, and then detect the weakly reflected laser light, thereby protecting the detection instrument. The laser light reflected by the outer reflective surface of the first wedge mirror 1 is measured by the
下面结合高功率线偏振的CO2激光器，对多个光束性能参数进行实时测量的实例，进一步说明本发明的技术方案。The technical scheme of the present invention will be further described below in conjunction with an example of real-time measurement of multiple beam performance parameters by a high-power linearly polarized CO2 laser.
高功率线偏振的CO2激光器的线偏振激光为45°偏振。第一楔形镜1的外反射面与水平面成45°角，保证高能量线偏振激光的偏振方向在入射平面内，并且控制第一楔形镜1的外反射面法线与高能量线偏振激光光轴的夹角为63°（略小于布儒斯特角63.7°）。第一楔形镜1的外反射面和内反射面产生的少量反射光分别由光束质量检测仪和光电探测器进行同时检测，光束质量检测仪测得光斑的三维截图分别如图3所示，光电探测器探测到的光斑脉冲如图4所示。经两面楔形镜透射后无畸变的激光通过能量计进行测量，平均功率为100W，其测量结果与未经过本发明装置直接测量的结果基本保持不变，说明经楔形镜后只有少量的光束能量被反射；同时经过楔形镜后的光束的偏振特性也未发生变化。The linearly polarized laser of the high-power linearly polarized CO2 laser is 45°polarized. The outer reflective surface of the first wedge mirror 1 forms an angle of 45° with the horizontal plane to ensure that the polarization direction of the high-energy linearly polarized laser is in the incident plane, and to control the normal line of the outer reflective surface of the first wedge mirror 1 and the high-energy linearly polarized laser light The angle between the axes is 63° (slightly less than Brewster's angle of 63.7°). A small amount of reflected light generated by the outer reflection surface and the inner reflection surface of the first wedge mirror 1 is respectively detected simultaneously by the beam quality detector and the photoelectric detector, and the three-dimensional screenshots of the light spots measured by the beam quality detector are shown in Fig. The spot pulse detected by the detector is shown in Figure 4. The undistorted laser beam transmitted through the two-sided wedge mirror is measured by an energy meter, and the average power is 100W. The measurement result is basically unchanged from the result directly measured by the device of the present invention, indicating that only a small amount of beam energy is absorbed by the wedge mirror. Reflection; at the same time, the polarization characteristics of the beam passing through the wedge mirror have not changed.
综上所述，本发明实现同时对高功率激光的多种参数进行同时测量，反射光束的能量较小，在探测器的阈值范围内且对输出光束的能量影响很小，经楔形镜后的透射光束的光斑大小和偏振状态都没有改变。此方法结构简单，操作方便，具有很强的实用性。In summary, the present invention realizes simultaneous measurement of multiple parameters of high-power lasers, the energy of the reflected beam is small, within the threshold range of the detector and has little influence on the energy of the output beam, and the energy of the output beam after passing through the wedge mirror Neither the spot size nor the polarization state of the transmitted beam was changed. This method is simple in structure, easy to operate, and has strong practicability.
本领域的技术人员容易理解，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
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