CN103063411A - Measuring device of performance of high-power linear polarization laser beam - Google Patents
Measuring device of performance of high-power linear polarization laser beam Download PDFInfo
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- CN103063411A CN103063411A CN2012105447667A CN201210544766A CN103063411A CN 103063411 A CN103063411 A CN 103063411A CN 2012105447667 A CN2012105447667 A CN 2012105447667A CN 201210544766 A CN201210544766 A CN 201210544766A CN 103063411 A CN103063411 A CN 103063411A
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Abstract
The invention discloses a measuring device of a performance of a high-power linear polarization laser beam. The measuring device of the performance of the high-power linear polarization laser beam comprises a first wedge-shaped mirror, a first detector and a second detector. A linear polarization laser is shot into the outer reflecting plane of the wedge-shaped mirror with a Brewster angle, the polarization direction of incident light is arranged in an incident plane, the light intensity of a reflective beam is zero, the outer reflecting plane of the wedge-shaped mirror is enabled to deflect a little, a small amount reflective light of the laser reflected by the outer reflecting plane of the first wedge-shaped mirror is measured by the first detector, and the reflective light reflected by the inner reflecting plane of the first wedge-shaped mirror is measured by the second detector. Most of projectile laser energy achieves the emergence of facula without amplification, and the polarization property of the laser is not influenced. The wedge-shaped mirror is adopted to carry out beam splitting to incident lasers, the energy of the reflective beam is reduced, the polarization property of a projectile beam is maintained, and multiple parameters of the laser beams are measured simultaneously.
Description
Technical field
The invention belongs to field of optical measuring technologies, more specifically, relate to a kind of measurement mechanism of high power line polarized laser beam performance.
Background technology
Development along with photoetching technique, successfully broken through the 22nm node by argon fluoride (ArF) excimer laser, and this has also reached the limit of excimer laser, therefore be badly in need of exploitation photoetching light source of future generation, be EUV(Extreme Ultra Violet, extreme ultraviolet) light source is continued Moore's Law.The EUV photoetching technique is faced with a series of challenge, one of them problem is that present light source power is too low, and LPP EUV(Laser Produced Plasma Extreme Ultra Violet, the laser plasma extreme ultraviolet) light source provides the output power that is higher than 200W by expectation.If realize high power and the high reliability of demand of industrial production, LPP master's driving light source is one of key factor.The main driving light source of LPP must be the laser with high power (hundreds of watts), high repetition frequency and high light beam quality, and MOPA(A master oscillator and a power amplifier, main oscillations-power amplification) laser driver become the main direction of studying that obtains LPP master's driving light source.Therefore correspondingly being badly in need of a kind of new measurement mechanism can measure and estimate MOPA system laser parameter, and evaluating comprises laser power (energy), laser pulse shape and beam quality M
2Deng.Grasp equally and control these parameters, the application in other field also is very important for superpower laser.
The measuring method of laser parameter has a lot, but they all can only measure single laser parameter, if will measure simultaneously multiple laser parameter (such as beam quality, pulse shape, watt level), then needs to adopt the way of light splitting.The convenience of be adjusting, usually spectroscope is placed on the Laser output direction and with optical axis direction angle at 45 °, and then the light beam parameters of the laser of part reflection detected.The beam splitter of 45 ° of layouts has higher reflectivity usually.And by fresnel formula as can be known, the reflectivity of p component and s component and transmissivity generally are different, and reflex time also phase jump may occur.After reflection and refraction, will change the polarization state of incident light, measurement result is exerted an influence.The suitable laser power of this method is not very high situation in addition, if laser energy is too high, the light beam power that causes reflecting can cause damage to instrument still above the maximum power threshold of request detector.
Summary of the invention
For the defective of prior art, the object of the present invention is to provide a kind of measurement mechanism of high power line polarized laser beam performance, be intended to solve the problem that prior art is unfavorable for that the high-power laser beam light beam parameters is measured.
For achieving the above object, the invention provides a kind of measurement mechanism of high power line polarized laser beam performance, comprising: the first wedge-shaped mirrors, the first detector and the second detector; Linearly polarized laser is incident on the external reflection face of the first wedge-shaped mirrors, the polarization direction is in the plane of incidence, reflected light through the external reflection face of the first wedge-shaped mirrors is measured by the first detector, is measured by the second detector through the reflected light of the interior reflective surface of the first wedge-shaped mirrors.
Further, also comprise the second wedge-shaped mirrors, the angle of wedge of the interior reflective surface of the second wedge-shaped mirrors and two wedge-shaped mirrors parallel with the external reflection face of the first wedge-shaped mirrors is respectively on the both sides of laser beam axis, and linearly polarized laser is successively by Output of laser hot spot behind the first wedge-shaped mirrors and the second wedge-shaped mirrors.
Further, the spacing between the interior reflective surface of the external reflection face of described the second wedge-shaped mirrors and the first wedge-shaped mirrors is 4-8cm.
Further, described the first detector is the beam quality detector, is used for the quality of laser beam is measured.
Further, described the second detector is photodetector, is used for the waveform of laser pulse is detected.
Further, described measurement mechanism also comprises energy meter, is used for measuring through the laser energy of the second wedge-shaped mirrors output.
Further, the angle of the optical axis of the external reflection face of described the first wedge-shaped mirrors and described linearly polarized laser is Brewster angle.
The present invention adopts wedge-shaped mirrors by Brewster angle layout to overcome the shortcoming that 45 ° of spectroscope reflected beam energy are too high and can change to light polarization, and can measure simultaneously a plurality of parameters of laser beam.When the laser beam of linear polarization incides the first wedge-shaped mirrors surface, make the polarization direction of incident laser in the plane of incidence (plane at incident ray and reflection ray place).When incident angle was Brewster angle, the folded light beam light intensity was zero, suitably makes the external reflection face that small deflection is arranged, and was reflected in order to the parameter to laser beam and measured having a small amount of laser.And the laser energy of most of transmission is realized hot spot without amplifying outgoing after through the second wedge-shaped mirrors, and its polarization characteristic is unaffected.
Description of drawings
Fig. 1 is the structural representation of the measurement mechanism of the high power line polarized laser beam performance that provides of the embodiment of the invention;
Fig. 2 is that single wedge-shaped mirrors hot spot amplifies index path in the measurement mechanism of the high power line polarized laser beam performance that provides of the embodiment of the invention;
Fig. 3 is that the measurement mechanism of the high power line polarized laser beam performance that provides of the embodiment of the invention records the laser facula three-dimensional plot through experiment;
Fig. 4 is that the measurement mechanism of the high power line polarized laser beam performance that provides of the embodiment of the invention records laser pulse shape figure through experiment.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, is not intended to limit the present invention.
Utilization of the present invention during with brewster angle incidence wedge-shaped mirrors beam splitting characteristic can measure in real time high power line polarized laser beam parameter; Fig. 1 shows the structure of the measurement mechanism of the high power line polarized laser beam performance that the embodiment of the invention provides, and for convenience of explanation, only shows the part relevant with the embodiment of the invention, and details are as follows:
The measurement mechanism of high power line polarized laser beam performance comprises: the first wedge-shaped mirrors 1, the first detector 3 and the second detector 4; Linearly polarized laser is incident on the external reflection face of the first wedge-shaped mirrors 1, the polarization direction is in the plane of incidence, reflected light through the external reflection face of the first wedge-shaped mirrors 1 is measured by the first detector 3, is measured by the second detector 4 through the reflected light of the interior reflective surface of the first wedge-shaped mirrors 1.
In embodiments of the present invention, the first detector 3 is the beam quality detector, is used for the quality of laser beam is measured.The second detector is photodetector, is used for the waveform of laser pulse is detected.
The beam splitting characteristic of wedge-shaped mirrors when the measurement mechanism of a kind of high power line polarized laser beam performance provided by the invention has mainly utilized with brewster angle incidence can be measured a plurality of parameters of high power line polarization laser in real time.
In embodiments of the present invention, the high-energy linearly polarized laser is during through the first wedge-shaped mirrors 1, and most of energy is refracted and sees through the first wedge-shaped mirrors 1.Since laser have the hot spot amplification in parallel plane of incidence direction when single wedge-shaped mirrors, the spot diameter that sees through the first wedge-shaped mirrors 1 can be exaggerated, if keep light spot shape not change, should be on main optical path 2 wedge-shaped mirrors of parallel placement, concrete laying method as previously mentioned, so just can remedy the heterogeneity in the light beam amplification, obtain without the high-energy linearly polarized laser that amplifies output.Therefore, measurement mechanism also comprises the second wedge-shaped mirrors 2, the angle of wedge of the interior reflective surface of the second wedge-shaped mirrors and two wedge-shaped mirrors parallel with the external reflection face of the first wedge-shaped mirrors is respectively on the both sides of laser beam axis,, linearly polarized laser is successively by the first wedge-shaped mirrors 1 and the second wedge-shaped mirrors 2 rear Output of laser hot spots.Hot spot amplifies light path as shown in Figure 2.
In embodiments of the present invention, measurement mechanism also comprises energy meter, is used for measuring through the laser energy of the second wedge-shaped mirrors 2 outputs.
The present invention adopts the wedge-shaped mirrors of Brewster angle layout to overcome the shortcoming that 45 ° of spectroscope reflected beam energy are too high and can change to light polarization, and can measure simultaneously a plurality of parameters of laser beam.When the laser beam of linear polarization incides the first wedge-shaped mirrors 1 surface, make the polarization direction of incident laser in the plane of incidence (plane at incident ray and reflection ray place).When incident angle was Brewster angle, the folded light beam light intensity was zero, suitably makes the first wedge-shaped mirrors external reflection face that small deflection is arranged, and was reflected in order to the parameter to laser beam and measured having a small amount of laser.And the laser energy of most of transmission is realized hot spot after through the second wedge-shaped mirrors 2 without amplifying outgoing, its Output of laser energy substantially remain unchanged and polarization characteristic unaffected.
As one embodiment of the present of invention, when the test of the drive laser high power high-repetition-rate pulse CO2 laser beam of carrying out the laser plasma EUV light source, the spacing between the external reflection face of the second wedge-shaped mirrors 2 and the interior reflective surface of the first wedge-shaped mirrors 1 is 4-8cm.The angle of the external reflection face of the first wedge-shaped mirrors 1 and the optical axis of described linearly polarized laser is 63 °.
The present invention is simple in structure, and is easy to operate, can measure simultaneously the many kinds of parameters of the inclined to one side laser instrument of high power line; Wedge-shaped mirrors with brewster angle incidence not only can obtain less reflective light intensity, simultaneously because external reflection face and the interior reflective surface of wedge-shaped mirrors are non-parallel, there is an angle between the reflected light on two sides, can adopt different detectors to measure simultaneously, and can not form the F-P interference ring in wedge-shaped mirrors two interplanar reflections, and the double-wedge mirror can obtain distortionless light beam output.
The present invention is based on the laser beam splitter effect of Brewster angle beam splitter, make the high power line polarization laser slightly to be partial to brewster angle incidence on wedge-shaped mirrors, few light beam of reflection is used for the Real-Time Optical beam quality and pulse waveform is measured, and along the light beam of the parallel outgoing of former incident direction without amplifying lossless outgoing.The present invention is further detailed explanation below in conjunction with accompanying drawing and instantiation.
The measurement mechanism of high power line polarized laser beam performance comprises the first wedge-shaped mirrors 1, the second wedge-shaped mirrors 2, the first detector 3, the second detector 4.The high-energy linearly polarized laser is radiated on the first wedge-shaped mirrors 1 external reflection face, so that the polarization direction is in the plane of incidence, and the angle of the normal direction of the first wedge-shaped mirrors 1 external reflection face and incident laser direction is Brewster angle.After the reflected light of the external reflection face of the first wedge-shaped mirrors 1 reflects, measured by the first detector 3, described the first detector 3 can be the beam quality detector, in order to the measurement to laser beam quality; After the reflected light of the interior reflective surface of same the first wedge-shaped mirrors 1 reflects, measured by the second detector 4, described the second detector 4 can be photodetector, in order to the detection to laser pulse shape.The angle of wedge of the interior reflective surface of the second wedge-shaped mirrors and two wedge-shaped mirrors parallel with the external reflection face of the first wedge-shaped mirrors is respectively on the both sides of laser beam axis, spacing between the external reflection face of the second wedge-shaped mirrors 2 and the interior reflective surface of the first wedge-shaped mirrors 1 is 4-8cm, and the high-energy linearly polarized laser passes through the first wedge-shaped mirrors 1 and the second wedge-shaped mirrors 2 rear laser faculas successively without amplifying outgoing.
When laser with brewster angle incidence during to the external reflection face of the first wedge-shaped mirrors 1, reflected light and refract light are all linearly polarized light, wherein reflected light is S polarized light (direction of plane of incidence vibration), refract light is P polarized light (direction that is parallel to plane of incidence vibration).The polarization direction of high-energy linearly polarized laser is in plane of incidence, i.e. the high energy laser of incident only contains the P polarized light, it through the first wedge-shaped mirrors 1 after with whole transmissions, and the polarization state of the laser after the transmission remains unchanged.Finely tune the reflection angle of the external reflection face of the first wedge-shaped mirrors 1 this moment, has a small amount of laser and be reflected, the intensity of reflector laser and the Angular correlation of deflection; Make it slightly depart from Brewster angle (deflection angle is less than 1 ° of angle), then have a small amount of laser reflection, and then transonic laser is detected, thereby play the effect of protecting detection instrument.Laser through the first wedge-shaped mirrors 1 external reflection face reflection is measured by 3 pairs of laser of the first detector, if the first detector 3 is the beam quality detector, can obtain the diameter, mode configuration, the two dimension of laser, three-dimensional spot energy distribution parameter of laser facula.Similarly, high energy laser can produce in the interior reflective surface of the first wedge-shaped mirrors 1 a small amount of reflection after the external reflection face refraction of the first wedge-shaped mirrors 1, the outgoing after the external reflection face refraction of the first wedge-shaped mirrors 1 of this reflected light is received by the second detector 4, if the second detector 4 is photodetector, can measure parameters such as laser pulse widths, for avoiding in measurement result, bringing the wedge-shaped mirrors structure into to the impact of beam quality, generally do not adopt the interior reflective surface reflected light to carry out the beam quality monitoring.Owing to there being an angle between the interior reflective surface of the first wedge-shaped mirrors 1 and external reflection face, so that will separate after two bundle folded light beams of the first wedge-shaped mirrors 1 reflection are propagated one section light path is farther, can adopt like this detector that two-beam is surveyed simultaneously, can not disturb each other; Simultaneously because the existence of key groove can not form the F-P interference ring in wedge-shaped mirrors two interplanar reflections.
Below in conjunction with the CO2 laser instrument of high power line polarization, the example to a plurality of light beam performance parameters are measured in real time further specifies technical scheme of the present invention.
The linearly polarized laser of the CO2 laser instrument of high power line polarization is 45 ° of polarizations.The external reflection face of the first wedge-shaped mirrors 1 and surface level angle at 45 °, guarantee the polarization direction of high-energy linearly polarized laser in plane of incidence, and control the external reflection face normal of the first wedge-shaped mirrors 1 and the angle of high-energy linearly polarized laser optical axis is 63 ° (being slightly less than 63.7 ° of Brewster angles).A small amount of reflected light that the external reflection face of the first wedge-shaped mirrors 1 and interior reflective surface produce is detected simultaneously by beam quality detector and photodetector respectively, the beam quality detector records the three-dimensional sectional drawing of hot spot to be distinguished as shown in Figure 3, and the hot spot pulse that photodetector detects as shown in Figure 4.Distortionless laser is measured by energy meter after the wedge-shaped mirrors transmission of two sides, and average power is 100W, and its measurement result remains unchanged substantially with the result who does not directly measure through apparatus of the present invention, illustrates and only has a small amount of beam energy to be reflected behind wedge-shaped mirrors; Polarization characteristic through the light beam behind the wedge-shaped mirrors does not change yet simultaneously.
In sum, the present invention realizes simultaneously the many kinds of parameters of high power laser light being measured simultaneously, the energy of folded light beam is less, and in the threshold range of detector and very little to the energy affect of output beam, the spot size of the transmitted light beam behind wedge-shaped mirrors and polarization state all do not have to change.The method is simple in structure, and is easy to operate, has very strong practicality.
Those skilled in the art will readily understand; the above only is preferred embodiment of the present invention; not in order to limiting the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. the measurement mechanism of a high power line polarized laser beam performance is characterized in that, comprising: the first wedge-shaped mirrors, the first detector and the second detector;
Linearly polarized laser is incident on the external reflection face of the first wedge-shaped mirrors, the polarization direction is in the plane of incidence, reflected light through the external reflection face of the first wedge-shaped mirrors is measured by the first detector, is measured by the second detector through the reflected light of the interior reflective surface of the first wedge-shaped mirrors.
2. measurement mechanism as claimed in claim 1, it is characterized in that, also comprise the second wedge-shaped mirrors, the angle of wedge of the interior reflective surface of the second wedge-shaped mirrors and two wedge-shaped mirrors parallel with the external reflection face of the first wedge-shaped mirrors is respectively on the both sides of laser beam axis, and linearly polarized laser is successively by Output of laser hot spot behind the first wedge-shaped mirrors and the second wedge-shaped mirrors.
3. measurement mechanism as claimed in claim 2 is characterized in that, the spacing between the external reflection face of described the second wedge-shaped mirrors and the interior reflective surface of the first wedge-shaped mirrors is 4-8cm.
4. measurement mechanism as claimed in claim 1 or 2 is characterized in that, described the first detector is the beam quality detector, is used for the quality of laser beam is measured.
5. measurement mechanism as claimed in claim 1 or 2 is characterized in that, described the second detector is photodetector, is used for the waveform of laser pulse is detected.
6. measurement mechanism as claimed in claim 2 is characterized in that, described measurement mechanism also comprises energy meter, is used for measuring through the laser energy of the second wedge-shaped mirrors output.
7. measurement mechanism as claimed in claim 1 is characterized in that, the angle of the external reflection face of described the first wedge-shaped mirrors and the optical axis of described linearly polarized laser slightly departs from Brewster angle.
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| CN105758625A (en) * | 2016-04-15 | 2016-07-13 | 中国科学院上海技术物理研究所 | Device and method for measuring linear polarization sensitivity of remote sensing instrument |
| CN105890878A (en) * | 2016-05-20 | 2016-08-24 | 北京大学 | Measurement device and method for measuring damage threshold of reflector in real time by using femtosecond laser |
| CN108700752A (en) * | 2016-03-08 | 2018-10-23 | 卡尔蔡司Smt有限责任公司 | Realize the beam splitter of the glancing incidence of light |
| WO2020015607A1 (en) * | 2018-07-19 | 2020-01-23 | 上海微电子装备（集团）股份有限公司 | Beam splitting device |
| CN111238773A (en) * | 2020-01-20 | 2020-06-05 | 中国科学院上海光学精密机械研究所 | High-resolution laser output power variation monitoring device and method |
| CN114361929A (en) * | 2021-12-30 | 2022-04-15 | 北京大学 | Directional monitoring system and method for improving stability of multi-pass laser amplifier |
| CN116773151A (en) * | 2023-08-23 | 2023-09-19 | 四川中久大光科技有限公司 | High-power laser polarization degree testing method and device |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108700752A (en) * | 2016-03-08 | 2018-10-23 | 卡尔蔡司Smt有限责任公司 | Realize the beam splitter of the glancing incidence of light |
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| CN105890878A (en) * | 2016-05-20 | 2016-08-24 | 北京大学 | Measurement device and method for measuring damage threshold of reflector in real time by using femtosecond laser |
| WO2020015607A1 (en) * | 2018-07-19 | 2020-01-23 | 上海微电子装备（集团）股份有限公司 | Beam splitting device |
| CN110737098A (en) * | 2018-07-19 | 2020-01-31 | 上海微电子装备（集团）股份有限公司 | light splitting devices |
| TWI719540B (en) * | 2018-07-19 | 2021-02-21 | 大陸商上海微電子裝備（集團）股份有限公司 | Spectroscopic device |
| CN110737098B (en) * | 2018-07-19 | 2021-08-17 | 上海微电子装备（集团）股份有限公司 | Light splitting device |
| CN111238773A (en) * | 2020-01-20 | 2020-06-05 | 中国科学院上海光学精密机械研究所 | High-resolution laser output power variation monitoring device and method |
| CN114361929A (en) * | 2021-12-30 | 2022-04-15 | 北京大学 | Directional monitoring system and method for improving stability of multi-pass laser amplifier |
| CN114361929B (en) * | 2021-12-30 | 2024-04-19 | 北京大学 | Directivity monitoring system and method for improving stability of multi-pass laser amplifier |
| CN116773151A (en) * | 2023-08-23 | 2023-09-19 | 四川中久大光科技有限公司 | High-power laser polarization degree testing method and device |
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Application publication date: 20130424 |