CN115003421A

CN115003421A - Coating device and coating method

Info

Publication number: CN115003421A
Application number: CN202080093813.3A
Authority: CN
Inventors: 元井昌司; 野村和夫; 内田新也
Original assignee: Toray Engineering Co Ltd
Current assignee: Toray Engineering Co Ltd
Priority date: 2020-02-03
Filing date: 2020-09-30
Publication date: 2022-09-02
Anticipated expiration: 2040-09-30
Also published as: JP2021122760A; KR20220128992A; WO2021157127A1; CN115003421B; JP7135015B2

Abstract

The invention provides a coating device and a coating method capable of forming a coating film with less film thickness deviation of a coating starting part and a coating finishing part. Specifically, the coating device includes: a supply valve (41) for supplying the coating liquid (3) from a supply mechanism (20) to the inlet side of the supply valve (41), the outlet side of the supply valve (41) being connected to the die head (10), the position of an internal valve body (42) being changed in accordance with the movement of the shaft, and the supply valve (41) being capable of switching and controlling 2 states of an open state of a flow path for forming the coating liquid (3) and a closed state of a flow path for cutting off the coating liquid (3); and a return valve (51) for supplying the coating liquid (3) from the supply mechanism (20) to the inlet side of the return valve (51), wherein the outlet side of the return valve (51) is connected to a return pipe (24) that is a pipe for returning the coating liquid (3) to the tank (22), the position of the internal valve element (52) is changed according to the movement of the shaft, the two states of the return valve (51) that is an open state for forming the flow path of the coating liquid (3) and a closed state for cutting off the flow path of the coating liquid (3) can be switched and controlled, the drive source for moving the valve element (42) of the supply valve (41) is of a motor type, the drive source for moving the valve element (52) of the return valve (51) is of a pneumatic type, and the movement speed of the valve element (42) of the supply valve (41) is faster than the movement speed of the valve element (52) of the return valve (51).

Description

Coating device and coating method

Technical Field

The present invention relates to a coating apparatus for coating a coating film on a substrate.

Background

The coating liquid is applied from the discharge port of the die onto a substrate conveyed roll-to-roll to produce an electrode plate of a battery or the like. For example, in the case of a battery, the thickness of a coating layer formed on a substrate directly affects the amount of charge and discharge of the battery, and therefore, it is very important to control the film thickness of a coating liquid applied to the substrate. That is, the coating liquid needs to be applied with a uniform thickness along the width direction and the conveyance direction of the substrate.

Patent document 1 describes an application apparatus and an application method for intermittently applying an electrode material containing an active material to a long metal foil. That is, the electrode material is applied to the metal foil by repeating application and interruption of the metal foil conveyed by roll-to-roll. Then, the battery electrode is formed through the subsequent steps of cutting and pressing.

Fig. 5 shows an example of an application section of an application device that intermittently applies a coating to a substrate in this manner. The coating section 100 has a die 101 and a supply mechanism 102, and the coating liquid 3 supplied from the supply mechanism 102 to the die 101 is discharged from a discharge port 105 facing the substrate 2 via a manifold 103 and a slit 104 inside the die 101.

Further, a supply valve 107 is provided in the middle of a supply pipe 106 connecting the supply mechanism 102 and the die head 101, and the position of a valve element 108 provided inside the supply valve 107 is changed in accordance with the operation of a shaft by an air cylinder 109, thereby controlling the 2 states of the open state of the flow path forming the coating liquid 3 and the closed state of the flow path blocking the coating liquid 3 to be switched. Here, when the supply valve 107 is in the open state, the coating liquid 3 is discharged from the discharge port 105 of the die 101 to start coating, and when the supply valve 107 is in the closed state, the supply of the coating liquid 3 to the die 101 is interrupted to interrupt the coating of the coating liquid 3 on the substrate 2. That is, the position of the valve element 108 is controlled by controlling the operation of the cylinder 109, and the supply valve 107 is repeatedly opened and closed, thereby intermittently forming the coating film on the substrate 2.

Further, a return valve 110 is provided in front of the supply valve 107, and while the supply of the coating liquid 3 to the die head 101 is interrupted by closing the valve body 108 of the supply valve 107, the valve body 111 of the return valve is opened, whereby the coating liquid 3 is collected into the supply mechanism 102. While the valve body 108 of the supply valve 107 is in the open state and the coating liquid 3 is supplied to the die head 101, the valve body 111 of the return valve is in the closed state. The valve body 111 is driven by a cylinder 112.

Documents of the prior art

Patent document

Patent document 1: japanese laid-open patent application No. 2010-212143

Disclosure of Invention

Problems to be solved by the invention

However, the coating section 100 has a problem that a film thickness variation occurs in at least one of the coating start section and the coating end section. Specifically, when the supply of the coating liquid 3 to the die head 101 is stopped, the closing operation of the valve element 108 in the supply valve 107 and the opening operation of the valve element 111 of the return valve 110 are performed simultaneously, but particularly when the closing operation of the valve element 108 in the supply valve 107 is slow, the liquid break at the discharge port 105 is poor, and as shown in fig. 6 (a) and 6 (b), the coating liquid 3 is dragged at the coating completion portion, and a striped terminal portion may be formed. On the other hand, when the supply of the coating liquid 3 to the die head 101 is started by simultaneously performing the opening operation of the valve element 108 in the supply valve 107 and the closing operation of the valve element 111 in the return valve 110, particularly when the opening operation of the valve element 108 in the supply valve 107 is slow, the thickness of the coating film at the coating start portion may be increased as shown in fig. 7 (a) and 7 (b). In particular, when the coating speed of the substrate is increased with an increase in the throughput, a bulge is remarkably generated at the starting end portion of the coating section, and a streak is remarkably generated at the terminal end portion of the coating section.

The present invention has been made in view of the above problems, and an object thereof is to provide a coating apparatus capable of forming a coating film with less variation in film thickness between a coating start section and a coating end section.

Means for solving the problems

In order to solve the above problem, the coating apparatus of the present invention includes: a die head having an ejection port formed thereon and elongated in the width direction of the substrate, the ejection port ejecting the coating liquid onto the substrate conveyed in the longitudinal direction; a tank that stores the coating liquid; and a supply mechanism that supplies the coating liquid stored in the tank to the die via an inflow portion communicating with the die, the coating apparatus being characterized by comprising: a supply valve for supplying the coating liquid from the supply mechanism to an inlet side of the supply valve, an outlet side of the supply valve being connected to the die, a position of an internal valve body being changed according to an operation of a shaft, and the supply valve being capable of switching and controlling 2 states of an open state of a flow path for forming the coating liquid and a closed state of a flow path for shutting off the coating liquid; and a return valve that supplies the coating liquid from the supply mechanism to an inlet side of the return valve, an outlet side of the return valve being connected to a return pipe that is a pipe that returns the coating liquid to the tank, a position of an internal valve body being changed according to an operation of a shaft, and the return valve being capable of switching and controlling 2 states of an open state of a flow path that forms the coating liquid and a closed state of a flow path that blocks the coating liquid, wherein a driving source that moves the valve body of the supply valve is of a motor type, and a driving source that moves the valve body of the return valve is of an air-operated type, and a moving speed of the valve body of the supply valve is higher than a moving speed of the valve body of the return valve.

According to the coating apparatus, a coating film with little variation in film thickness between the coating start section and the coating end section can be formed. Specifically, the valve body of the supply valve can be quickly brought into the open state or the closed state with a simple configuration by using a motor type as the drive source for moving the valve body of the supply valve and a pneumatic type as the drive source for moving the valve body of the return valve, and by setting the movement speed of the valve body of the supply valve to be faster than the movement speed of the valve body of the return valve, it is possible to reduce the swelling at the starting end portion of the application portion and the streaking at the terminal end portion of the application portion.

In the coating apparatus, the driving source for moving the valve body of the supply valve is a voice coil motor.

Thus, the valve body of the supply valve can be operated at a higher speed with a simple structure.

The coating apparatus may further include a drive source cooling mechanism that cools a drive source that moves a valve body of the supply valve by a refrigerant system.

This allows the valve body of the supply valve to be moved at high speed with reduced heat generation of the motor.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the coating apparatus of the present invention, a coating film having a small variation in film thickness between the coating start section and the coating end section can be formed.

Drawings

Fig. 1 is a diagram illustrating a schematic configuration of a coating apparatus according to an embodiment of the present invention, and is a diagram showing a state in which a coating liquid is being applied.

Fig. 2 is a diagram showing a state in which application of the coating liquid is interrupted in the coating apparatus of the present embodiment.

Fig. 3 is an operation flowchart of the coating apparatus of the present embodiment at the start of coating.

Fig. 4 is an operation flowchart of the coating apparatus of the present embodiment when the coating is completed.

Fig. 5 is a schematic view showing a conventional coating apparatus.

Fig. 6 is a diagram illustrating a film thickness distribution of a coating film in a conventional coating apparatus, in which fig. 6 (a) is a plan view and fig. 6 (b) is a front view.

Fig. 7 is a diagram illustrating a film thickness distribution of a coating film in a conventional coating apparatus, in which fig. 7 (a) is a plan view and fig. 7 (b) is a front view.

Detailed Description

The coating apparatus of the present invention will be described with reference to the drawings.

Fig. 1 is a diagram illustrating a schematic configuration of a coating apparatus according to an embodiment of the present invention. The coating apparatus 1 is an apparatus for coating a coating liquid 3 on a substrate 2 conveyed by a roll-to-roll method. The coating liquid 3 is applied in a uniform thickness (uniform application amount) along the conveyance direction MD of the base material 2. The width direction TD of the base material 2 is a direction perpendicular to the conveyance direction MD of the base material 2, and the Y-axis direction in fig. 1 corresponds to the width direction TD of the base material 2.

The coating apparatus 1 includes a die 10 and a supply mechanism 20, the die 10 is configured to be long in the width direction of the substrate 2, and the supply mechanism 20 supplies the coating liquid 3 to the die 10. In the die 10, the longitudinal direction (Y-axis direction in fig. 1) thereof is referred to as a width direction TD, which is the same as the width direction TD of the substrate 2. In the coating apparatus 1, a roll 5 is provided so as to face a die 10, and a width direction TD of the die 10 is parallel to a direction of a rotation center line of the roll 5. The substrate 2 is guided by the roller 5, and the coating liquid 3 is applied while the distance (gap) between the substrate 2 and the discharge port 18 of the die 10 (the tip of the slit 12 described later) is kept constant.

The die 10 is configured by combining a first divided body 13 and a second divided body 14 with a shim plate 15 interposed therebetween, the first divided body 13 having a tapered first lip 13a, and the second divided body 14 having a tapered second lip 14 a. A manifold 11 formed of a space long in the width direction TD and a slit 12 continuous with the manifold 11 are formed inside the die 10, and an ejection port 18 long in the width direction is formed between the first lip 13a and the second lip 14a, and the ejection port 18 is an open end of the slit 12. That is, the manifold 11 and the ejection port 18 are connected via the groove gap 12.

The slit 12 is formed long in the width direction TD as in the manifold 11, the width direction dimension of the slit 12 is determined by the internal dimension of the backup plate 15, and the coating liquid 3 having a width direction dimension substantially equal to the width direction dimension of the slit 12 can be applied to the base material 2. The gap dimension (height dimension) of the slot 12 is, for example, 0.1 to 10 mm. In the present embodiment, the die 10 is disposed in a posture in which the gap direction of the slot 12 is the vertical direction and the width direction is the horizontal direction. That is, the die 10 is set in a posture in which the manifolds 11 and 24 and the slots 12 are arranged in a horizontal direction. Therefore, the direction in which the coating liquid 3 accumulated in the manifold 11 flows toward the substrate 2 through the slit 12 and the discharge port 18 becomes the horizontal direction.

Further, by changing the thickness of the backup plate 15, the pressure (coating pressure) inside the manifold 11 can be adjusted, and by this adjustment, the coating liquid 3 having various characteristics can be coated with a uniform film thickness.

In the present embodiment, the direction in which the coating liquid 3 flows toward the base material 2 through the discharge ports 18 is set to be the horizontal direction, but the present invention is not necessarily limited thereto, and can be appropriately modified. For example, the direction may be set to an upper direction or a lower direction, and any direction may be set.

An inflow portion 16 is provided in the center of the die 10 in the width direction TD, and the inflow portion 16 is formed of a through hole (inflow port) connected from the outside of the die 10 to the manifold 11. The supply mechanism 20 includes: a supply pipe 21 for supplying the coating liquid 3 to the inflow portion 16; a tank 22 that stores coating liquid 3; and a pump 23 for supplying coating liquid 3 in the tank 22 to the die 10 through the supply pipe 21. As described above, the supply mechanism 20 can supply the coating liquid 3 from the inflow portion 16 to the manifold 11. In the present embodiment, as shown in fig. 1, the inflow portion 16 is connected to the bottom portion 17 of the manifold 11, and the coating liquid 3 is caused to flow into the manifold from the bottom portion 17.

The manifold 11 can store the coating liquid 3 supplied from the supply mechanism 20, and can eject the coating liquid 3 stored in the manifold 11 from the ejection port 18 through the slit 12 toward the substrate 2 conveyed roll-to-roll, and can continuously apply the coating liquid 3 to the substrate 2. The gap size of the slot 12 is designed to be constant in its width direction, and the thickness of the coating liquid 3 coated on the base material 2 is designed to be constant in the width direction. Further, although not shown, a filter for the coating liquid 3 is provided in the middle of the supply pipe 21.

Here, in the coating apparatus 1 of the present invention, the supply control section 40 is provided in the middle of the supply path through which the coating liquid 3 is supplied from the supply mechanism 20 to the die 10, that is, in the middle of the supply pipe 21 and the inflow section 16.

The supply control unit 40 includes a supply valve 41, and the operation of the supply valve 41 is controlled by a control device not shown. The inlet of the supply valve 41 is connected to the supply pipe 21 via an inlet of a return valve 51 described later, and the coating liquid 3 is supplied to the inlet of the supply valve 41. Further, an outlet portion of the supply valve 41 is connected to the die 10 via the supply pipe 21.

The valve body 42 is coupled to a motor (a voice coil motor 43 in the present embodiment) as a drive source, and the voice coil motor 43 moves a shaft connected to the valve body 42, thereby moving the valve body 42. That is, the supply valve 41 is a so-called motor-driven valve, and can move the valve body at a higher speed than an air-operated valve described later.

In addition, the voice coil motor 43 may be driven to increase its temperature. Therefore, it is preferable to reduce heat generation by providing a refrigerant-type drive source cooling mechanism 44 for cooling the voice coil motor 43 around the voice coil motor 43. As the refrigerant, a known refrigerant such as water, ethanol, ethylene glycol, air, or a mixture thereof can be used.

The tip end portion of the shaft connected to the valve body 42 is switched between 2 positions, i.e., the first position and the second position, by driving of the voice coil motor 43. Thereby, the supply valve 41 is switched and controlled between 2 states of an open state of the flow path for forming the coating liquid 3 and a closed state of the flow path for cutting off the coating liquid 3. In the present description, a position at which the length of the exposed shaft is relatively short is referred to as a first position, and conversely, a position at which the length of the exposed shaft is relatively long is referred to as a second position.

In the present embodiment, a reflux control unit 50 is provided between the supply control unit 40 and the supply mechanism 20. The reflux control unit 50 is a mechanism for returning the coating liquid 3 to the tank 22 when the application of the coating liquid 3 to the substrate 2 is interrupted and the supply of the coating liquid 3 to the die 10 is not necessary, and the reflux control unit 50 has a reflux valve 51, and the operation of the reflux valve 51 is controlled by a control device not shown. The return valve 51 has an inlet connected to the supply pipe 21, an outlet connected to the return pipe 24, and the return pipe 24 connected to the tank 22.

The return valve 51 has a valve body 52 therein, and the valve body 52 moves to open and close a flow path inside the supply valve 51. The valve body 52 is connected to a cylinder 53, and the valve body 52 is moved by air flowing into and out of the cylinder 53. That is, the return valve 51 is a so-called air-operated valve.

The tip end portion of the shaft of the cylinder 53 connected to the spool 52 is switched between 2 positions of the first position and the second position by the air flowing into and out of the cylinder 53. Thereby, the supply valve 51 is switched and controlled between 2 states of an open state in which the flow path of the coating liquid 3 is formed and a closed state in which the flow path of the coating liquid 3 is shut off. In the present description, a position at which the length of the exposed shaft is relatively short is referred to as a first position, and conversely, a position at which the length of the exposed shaft is relatively long is referred to as a second position.

Fig. 1 shows a state where the coating liquid 3 is applied to the base material 2, and shows a state after a predetermined time has elapsed from the start of the application.

In this state, the supply valve 41 is in an open state, and the return valve 51 is in a closed state. Thereby, the coating liquid 3 is supplied to the die 10 through the supply valve 41, and the coating liquid 3 is applied to the substrate 2 from the discharge port 18 of the die 10.

On the other hand, the return valve 51 is in a closed state, and the flow path of the coating liquid 3 returned from the outlet portion of the return valve 51 to the tank 22 through the return pipe 24 is blocked. Therefore, the entire coating liquid 3 supplied from the pump 23 is supplied to the die 10.

Fig. 2 is a view showing a state in which the application of the coating liquid 3 is interrupted in the coating apparatus 1 of the present embodiment.

In this state, the supply valve 41 is closed, and the return valve 51 is opened. Thereby, the flow path to the die 10 is cut off, and the entire coating liquid 3 is returned to the tank 22 via the outlet portion of the return valve 51 and the return pipe 24.

Further, an adjusting valve 55 is provided in the middle of the return pipe 24, and the internal pressure of the coating liquid 3 in the return valve 51 is adjusted by adjusting the flow path resistance at the adjusting valve 55. The internal pressure is measured by a pressure gauge, not shown, provided in the return pipe 24. When the pressure in the return valve 51 is too high, a large amount of the coating liquid 3 is supplied to the die 10 at the moment when the valve body 42 of the supply valve 41 starts to switch from the closed state to the open state at the start of coating, and the coating start portion bulges. On the other hand, if the pressure in the reflux valve 51 is too low, the amount of the coating liquid 3 supplied to the die 10 at the start of coating is reduced, and the film thickness at the start of coating becomes thin (does not become rectangular). Therefore, the flow rate of the return pipe 24 is adjusted to a predetermined flow rate by the adjustment valve 55 so that the internal pressure of the die 10 and the internal pressure of the return valve 51 are balanced, and in this balance, for example, a rectangular application start portion is easily formed.

After the application of the coating liquid 3 is once suspended, the coating liquid 3 is applied again as shown in fig. 1, and the coating liquid 3 is intermittently applied to the substrate 2.

Next, fig. 3 and 4 show the operation flow of the coating apparatus 1 according to the present embodiment.

Fig. 3 is an operation flow of the coating apparatus 1 at the start of coating. The expression "at the start of coating" used in the present description includes not only when coating of the coating liquid 3 is started to the substrate 2 on which the coating liquid 3 is not completely applied, but also when the formation of each coating film is started in the case of intermittent coating, that is, when coating is restarted.

In this operation flow, the case is shown from the state where the supply of the coating liquid 3 to the die 10 is not performed as shown in fig. 2 to the case where the supply of the coating liquid 3 to the die 10 is performed and the coating to the substrate 2 is performed as shown in fig. 1. That is, the case is shown from the state where the supply valve 41 is in the closed state and the return valve 51 is in the open state to the state where the supply valve 41 is in the open state and the return valve 51 is in the closed state. The coating liquid 3 is supplied from the supply mechanism 20 at all times.

First, the voice coil motor 43 and the air cylinder 53 start moving the shaft connected to the valve body 42 from the first position to the second position, and the shaft connected to the valve body 52 starts moving the valve body 42 of the supply valve 41 and the valve body 52 of the return valve 51 from the second position to the first position. Thereby, the switching of the supply valve 41 from the closed state to the open state and the switching of the return valve 51 from the open state to the closed state are simultaneously started (step S1). Regarding the phase velocity v1 of the valve element 42 and the moving velocity of the valve element 52 at this time, the moving velocity v1 of the valve element 42 using the motor system is faster than the moving velocity of the valve element 42 using the pneumatic system.

After the two valve elements start to move, first, the shaft of the supply valve 41 is moved from the first position to the second position, and the valve element 42 is moved. Thereby, switching of supply valve 41 from the closed state to the open state is completed (step S2).

After the movement of the spool 42 is completed, the movement of the shaft of the return valve 51 from the second position to the first position is completed, whereby the movement of the spool 52 is completed. Thereby, the return valve 51 is switched from the open state to the closed state (step S3). Then, by continuing this state (the state in which the supply valve 41 is in the open state and the return valve 51 is in the closed state) until the application is interrupted or the application is completed, the application to the substrate 2 is continued so that the film thickness of the coating film is uniform.

Fig. 4 is an operation flow of the coating apparatus 1 at the end of coating. The expression "at the end of coating" used in the present description includes not only when the coating onto the substrate 2 is completely completed but also when the formation of each coating film is completed, that is, when the coating is interrupted, in the case of performing intermittent coating.

In this operation flow, the following is shown: step S3 is terminated, and the process may be started from a state in which the coating liquid 3 is supplied to the die 10 and applied to the substrate 2 as shown in fig. 1, to a state in which the supply of the coating liquid 3 to the die 10 is stopped and the application to the substrate 2 is interrupted or terminated as shown in fig. 2. That is, the case is shown from the state in which the supply valve 41 is in the open state and the return valve 51 is in the closed state to the state in which the supply valve 41 is in the closed state and the return valve 51 is in the open state. The coating liquid 3 is supplied from the supply mechanism 20 at all times.

First, the voice coil motor 43 and the air cylinder 53 start moving the shaft connected to the valve body 42 from the second position to the first position, and the shaft connected to the valve body 52 starts moving the shaft connected to the valve body 52 from the first position to the second position, whereby the valve body 42 of the supply valve 41 and the valve body 52 of the return valve 51 start moving. Thereby, the switching of the supply valve 41 from the open state to the closed state and the switching of the return valve 51 from the closed state to the open state are simultaneously started (step S11). At this time, the phase velocity v1 of the valve element 42 and the moving velocity of the valve element 52 are higher in the moving velocity v1 of the valve element 42 of the motor system than in the moving velocity of the valve element 42 of the pneumatic system.

After the movement of the two spools is started, first, the movement of the shaft of the supply valve 41 from the second position to the first position is completed, and thereby the movement of the spool 42 is completed. Thereby, switching of supply valve 41 from the open state to the closed state is completed (step S12). At this point, the supply of coating liquid 3 to die 10 is cut off.

After the movement of the spool 42 is completed, the movement of the shaft of the return valve 51 from the first position to the second position is completed, whereby the movement of the spool 52 is completed. Thereby, the switching of the return valve 51 from the closed state to the open state is completed (step S13). Then, the application to the base material 2 is continuously interrupted by continuing this state (the state in which the supply valve 41 is closed and the return valve 51 is opened) until the application is restarted.

Next, the effects of the coating apparatus of the present invention will be described.

In the present invention, the drive source of the supply valve 41 is a motor, and the valve body 42 can be moved at a higher speed than in the conventional cylinder drive, and the opening → closing operation and the closing → opening operation can be completed in a short time. Specifically, in the application start operation shown in fig. 3, at the time point of step S2, the valve body 42 is completely opened. This can reduce the increase in the internal pressure of the coating liquid 3 on the upstream side of the valve element 42, which occurs during the closing → opening operation of the valve element 42, and can reduce the bulge of the coating start portion due to the increase in the internal pressure.

In the coating completion operation shown in fig. 4, at the time point of step 12, the valve body 42 is completely closed, and the supply of the coating liquid 3 to the die head 10 can be cut off in a short time without waiting for completion of the movement of the valve body 53 of the return valve 51. Therefore, the occurrence of streaks at the end of the coating section can be reduced.

Further, if a motor-type valve and a pneumatic-type valve are compared, the cost of the motor-type valve is high in many cases, but by applying the motor-type valve only to a supply valve that requires a switching speed of a valve body in particular, it is possible to realize an application device that can reduce the cost of the entire application device and can reduce the swelling of the starting end portion of the application portion and the streaking at the terminal end portion of the application portion with a simple configuration.

With the above coating apparatus, a coating film with little variation in film thickness between the coating start section and the coating end section can be formed.

Here, the coating apparatus of the present invention is not limited to the illustrated embodiment, and may be another embodiment within the scope of the present invention. For example, although the drive motor of the supply valve is a voice coil motor in the above description, the present invention is not limited thereto, and a known motor other than the voice coil motor may be used as long as the motor can move the valve body at a higher speed than the pneumatic motor.

In the above description, at the time point when the supply valve side valve element is completely opened during the coating start operation, the movement of the return valve side valve element from the opened state to the closed state may not be completed, and a part of the coating liquid may be returned to the tank. Therefore, when the film thickness of the application start portion is made thinner, the movement of the valve element on the return valve side may be started before the movement of the valve element on the supply valve side is started.

Description of the reference numerals

1 coating device

2 base Material

3 coating liquid

5 roller

10 die head

11 manifold

12 slot gap

16 inflow part

17 bottom part

18 jet outlet

20 supply device

21 supply pipe

22 pot

23 Pump

24 return pipe

40 supply control part

41 supply valve

42 valve core

43 Voice coil Motor

44 drive part cooling mechanism

50 backflow control unit

51 Return valve

52 valve core

53 cylinder

55 regulating valve

100 coating section

101 die head

102 supply mechanism

103 manifold

104 slot

105 discharge port

106 supply pipe

107 supply valve

108 valve core

109 cylinder

110 return valve

111 valve core

112 cylinder

Claims

1. A coating device is provided with: a die head having an ejection port formed thereon and elongated in the width direction of the substrate, the ejection port ejecting the coating liquid onto the substrate conveyed in the longitudinal direction; a tank that stores the coating liquid; and a supply mechanism that supplies the coating liquid stored in the tank to the die via an inflow portion communicating with the die,

the coating device is characterized by comprising:

a supply valve for supplying the coating liquid from the supply mechanism to an inlet side of the supply valve, an outlet side of the supply valve being connected to the die head, a position of an internal valve body being changed according to an operation of a shaft, and the supply valve being capable of switching and controlling 2 states of an open state of a flow path for forming the coating liquid and a closed state of a flow path for shutting off the coating liquid; and

a return valve for supplying the coating liquid from the supply mechanism to an inlet side of the return valve, an outlet side of the return valve being connected to a return pipe as a pipe for returning the coating liquid to the tank, and a position of an internal valve body being changed in accordance with an operation of a shaft, the return valve being capable of switching and controlling 2 states of an open state of a flow path for forming the coating liquid and a closed state of a flow path for shutting off the coating liquid,

the drive source for moving the valve element of the supply valve is of a motor type, and the drive source for moving the valve element of the return valve is of a pneumatic type, and the movement speed of the valve element of the supply valve is faster than the movement speed of the valve element of the return valve.

2. Coating device according to claim 1,

the driving source for moving the valve body of the supply valve is a voice coil motor.

3. Coating device according to claim 1 or 2,

the coating apparatus further includes a drive source cooling mechanism that cools a drive source that moves a valve body of the supply valve by a refrigerant method.