CN115003421B

CN115003421B - Coating device and coating method

Info

Publication number: CN115003421B
Application number: CN202080093813.3A
Authority: CN
Inventors: 元井昌司; 野村和夫; 内田新也
Original assignee: Toray Engineering Co Ltd
Current assignee: Toray Engineering Co Ltd
Priority date: 2020-02-03
Filing date: 2020-09-30
Publication date: 2023-07-14
Anticipated expiration: 2040-09-30
Also published as: KR20220128992A; WO2021157127A1; CN115003421A; JP7135015B2; JP2021122760A

Abstract

The invention provides a coating device and a coating method capable of forming a coating film with less film thickness deviation between a coating start part and a coating end part. Specifically, the coating device includes: a supply valve (41) for supplying the coating liquid (3) from the supply mechanism (20) to an inlet side of the supply valve (41), wherein an outlet side of the supply valve (41) is connected to the die (10), and a position of an inner valve body (42) is changed according to an operation of the shaft, and 2 states, that is, an open state of the supply valve (41) in which a flow path of the coating liquid (3) is formed and a closed state of the flow path of the coating liquid (3) is blocked, can be controlled in a switching manner; and a return valve (51) for supplying the coating liquid (3) from the supply mechanism (20) to an inlet side of the return valve (51), wherein an outlet side of the return valve (51) is connected to a return pipe (24) which is a pipe for returning the coating liquid (3) to the tank (22), a position of an inner valve body (52) is changed according to an operation of a shaft, and 2 states of the return valve (51), that is, an open state in which a flow path of the coating liquid (3) is formed and a closed state in which the flow path of the coating liquid (3) is blocked, can be switched and controlled, a driving source for moving the valve body (42) of the supply valve (41) is a motor type, and a driving source for moving the valve body (52) of the return valve (51) is a pneumatic type, and a moving speed of the valve body (42) of the supply valve (41) is faster than a moving speed of the valve body (52) of the return valve (51).

Description

Coating device and coating method

Technical Field

The present invention relates to a coating apparatus for coating a substrate with a coating film.

Background

A coating liquid is applied from the discharge port of the die onto a substrate transported in a roll-to-roll manner to manufacture a battery electrode plate or the like. For example, in the case of a battery, the thickness of a coating layer formed on a substrate directly affects the charge/discharge amount of the battery, and thus, the film thickness control of a coating liquid applied to the substrate becomes very important. That is, the coating liquid needs to be coated with a uniform thickness along the width direction and the transport direction of the substrate.

Patent document 1 describes a coating apparatus and a coating method for intermittently coating an electrode material containing an active material on a long metal foil. That is, the electrode material is applied to the metal foil by repeating the application and interruption of the metal foil conveyed in a roll-to-roll manner. Then, the battery electrode is formed through a subsequent step of cutting and pressing.

Fig. 5 shows an example of a coating section of a coating device that intermittently coats a substrate in this manner. The coating section 100 includes a die 101 and a supply mechanism 102, and the coating liquid 3 supplied from the supply mechanism 102 to the die 101 is discharged from a discharge port 105 facing the substrate 2 through a manifold 103 and a slit 104 inside the die 101.

Further, a supply valve 107 is provided in the middle of a supply pipe 106 connecting the supply mechanism 102 and the die 101, and the position of a valve body 108 provided in the supply valve 107 is changed in accordance with the movement of a shaft by the cylinder 109, thereby switching and controlling 2 states of an open state of a flow path forming the coating liquid 3 and a closed state of a flow path blocking the coating liquid 3. Here, when the supply valve 107 is opened, the coating liquid 3 is discharged from the discharge port 105 of the die 101 to start coating, and when the supply valve 107 is closed, the supply of the coating liquid 3 to the die 101 is interrupted to stop the coating of the coating liquid 3 on the substrate 2. That is, the position of the valve body 108 is controlled by controlling the operation of the cylinder 109, and the supply valve 107 is repeatedly opened and closed, so that a coating film is intermittently formed on the substrate 2.

Further, a return valve 110 is provided at a position immediately before the supply valve 107, and the valve element 111 of the return valve is opened while the valve element 108 of the supply valve 107 is closed to interrupt the supply of the coating liquid 3 to the die 101, whereby the coating liquid 3 is recovered to the supply mechanism 102. In addition, while the valve element 108 of the supply valve 107 is in an open state and the coating liquid 3 is supplied to the die 101, the valve element 111 of the return valve is in a closed state. The valve element 111 is driven by a cylinder 112.

Prior art literature

Patent literature

Patent document 1: japanese patent application laid-open No. 2010-212143

Disclosure of Invention

Problems to be solved by the invention

However, in the coating section 100 described above, there is a problem in that a film thickness deviation occurs in at least one of the coating start section and the coating end section. Specifically, the closing operation of the valve body 108 in the supply valve 107 and the opening operation of the valve body 111 of the return valve 110 are performed simultaneously when the supply of the coating liquid 3 to the die 101 is stopped, but particularly when the closing operation of the valve body 108 in the supply valve 107 is slow, the liquid break at the discharge port 105 becomes poor, and as shown in fig. 6 (a) and 6 (b), the coating liquid 3 may be dragged at the coating end portion, and a striped terminal portion may be formed. On the other hand, when the opening operation of the valve body 108 in the supply valve 107 and the closing operation of the valve body 111 of the return valve 110 are performed simultaneously to start the supply of the coating liquid 3 to the die 101, particularly when the opening operation of the valve body 108 in the supply valve 107 is slow, as shown in fig. 7 (a) and 7 (b), there is a possibility that the film thickness of the coating film at the coating start portion becomes thick. In particular, when the coating speed of the substrate increases with an increase in the throughput, a bulge is significantly generated at the start end of the coating portion, and a streak is significantly generated at the end of the coating portion.

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a coating apparatus capable of forming a coating film having less film thickness variation between a coating start portion and a coating end portion.

Means for solving the problems

In order to solve the above problems, a coating apparatus of the present invention includes: a die head on which an ejection port long in the width direction of the substrate is formed, the ejection port ejecting a coating liquid to the substrate conveyed in the length direction; a tank for storing the coating liquid; and a supply mechanism for supplying the coating liquid stored in the tank to the die via an inflow portion communicating with the die, wherein the coating device comprises: a supply valve for supplying the coating liquid from the supply mechanism to an inlet side of the supply valve, an outlet side of the supply valve being connected to the die head, a position of an inner valve body being changed according to an operation of a shaft, and switching control being performed between 2 states, that is, an open state of a flow path of the coating liquid forming the supply valve and a closed state of a flow path of the coating liquid cutting off the supply valve; and a return valve, wherein the supply mechanism supplies the coating liquid to an inlet side of the return valve, an outlet side of the return valve is connected to a return pipe which is a pipe for returning the coating liquid to the tank, a position of an inner valve body is changed according to an operation of a shaft, 2 states of an open state of a flow path of the coating liquid forming the return valve and a closed state of a flow path of the coating liquid cutting off the return valve are controlled to be switched, a driving source for moving the valve body of the supply valve is a motor type, a driving source for moving the valve body of the return valve is a pneumatic type, and a moving speed of the valve body of the supply valve is faster than a moving speed of the valve body of the return valve.

According to the coating apparatus, a coating film having less film thickness variation between the coating start portion and the coating end portion can be formed. Specifically, the drive source for moving the valve body of the supply valve is a motor type, and the drive source for moving the valve body of the return valve is a pneumatic type, and the movement speed of the valve body of the supply valve is faster than that of the valve body of the return valve, so that the valve body of the supply valve can be quickly brought into an open state or a closed state with a simple structure, and therefore, the bulge at the start end portion of the application portion and the streak at the end portion of the application portion can be reduced.

In the coating apparatus, a driving source for moving the valve body of the supply valve is a voice coil motor.

This makes it possible to increase the operation speed of the valve body of the supply valve with a simple structure.

The coating apparatus may further include a driving source cooling mechanism that cools a driving source that moves the valve body of the supply valve by a refrigerant system.

This can move the valve body of the supply valve at a high speed while reducing heat generation of the motor.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the coating device of the present invention, a coating film having small film thickness variation between the coating start portion and the coating end portion can be formed.

Drawings

Fig. 1 is a diagram illustrating a schematic configuration of a coating apparatus according to an embodiment of the present invention, and is a diagram showing a state in which a coating liquid is being applied.

Fig. 2 is a diagram showing a state in which the application of the coating liquid is interrupted in the coating apparatus of the present embodiment.

Fig. 3 is a flowchart showing the operation of the coating apparatus according to the present embodiment at the start of coating.

Fig. 4 is a flowchart showing the operation of the coating apparatus according to the present embodiment at the end of coating.

Fig. 5 is a schematic diagram showing a conventional coating apparatus.

Fig. 6 is a diagram illustrating a film thickness distribution of a coating film of a conventional coating apparatus, fig. 6 (a) is a plan view, and fig. 6 (b) is a front view.

Fig. 7 is a diagram illustrating a film thickness distribution of a coating film of a conventional coating apparatus, fig. 7 (a) is a plan view, and fig. 7 (b) is a front view.

Detailed Description

The coating apparatus of the present invention will be described with reference to the drawings.

Fig. 1 is a diagram illustrating a schematic configuration of a coating apparatus according to an embodiment of the present invention. The coating apparatus 1 is an apparatus for coating a coating liquid 3 on a substrate 2 transported in a roll-to-roll manner. The coating liquid 3 is coated in a uniform thickness (uniform coating amount) along the conveyance direction MD of the substrate 2. The width direction TD of the substrate 2 is a direction perpendicular to the conveyance direction MD of the substrate 2, and the Y-axis direction in fig. 1 corresponds to the width direction TD of the substrate 2.

The coating apparatus 1 includes a die 10 and a supply mechanism 20, the die 10 being formed long in the width direction of the substrate 2, and the supply mechanism 20 supplying the coating liquid 3 to the die 10. In the die 10, the longitudinal direction (Y-axis direction in fig. 1) is referred to as the width direction TD, which is the same as the width direction TD of the base material 2. In this coating apparatus 1, a roller 5 is provided opposite to the die 10, and the width direction TD of the die 10 is parallel to the direction of the rotation center line of the roller 5. The substrate 2 is guided by the roller 5, and the coating liquid 3 is applied in this state while keeping a constant gap (clearance) between the substrate 2 and an ejection port 18 (tip of a slot 12 described later) of the die 10.

The die 10 is configured by combining a first segment 13 and a second segment 14 with a shim 15 interposed therebetween, the first segment 13 having a first lip 13a in a tapered shape, and the second segment 14 having a second lip 14a in a tapered shape. A manifold 11 including a space long in the width direction TD and a slit 12 connected to the manifold 11 are formed in the die 10, and an ejection port 18 long in the width direction is formed between the first lip portion 13a and the second lip portion 14a, and the ejection port 18 is an open end of the slit 12. That is, the manifold 11 and the discharge port 18 are connected via the slit 12.

The slit 12 is formed longer in the width direction TD as in the manifold 11, and the width direction dimension of the slit 12 is determined by the internal dimension of the pad 15, so that the coating liquid 3 having the width direction dimension substantially equal to the width direction dimension of the slit 12 can be applied to the substrate 2. The gap size (height dimension) of the groove gap 12 is, for example, 0.1 to 10mm. In the present embodiment, the die 10 is disposed in a posture in which the gap direction of the slot 12 is the up-down direction and the width direction is the horizontal direction. That is, the die 10 is disposed in a posture in which the manifold 11, the second manifold 24, and the slot 12 are arranged in the horizontal direction. Therefore, the direction in which the coating liquid 3 stored in the manifold 11 flows through the slit 12 and the discharge port 18 toward the substrate 2 is horizontal.

Further, by changing the thickness of the backing plate 15, the pressure (coating pressure) inside the manifold 11 can be adjusted, and by this adjustment, the coating liquid 3 having various characteristics can be uniformly coated with a film thickness.

In the present embodiment, the direction in which the coating liquid 3 flows through the discharge port 18 toward the substrate 2 is set to the horizontal direction, but the present invention is not limited thereto and can be appropriately modified. For example, the direction may be upward or downward, and any direction may be set.

An inflow portion 16 is provided at a central portion in the width direction TD of the die 10, and the inflow portion 16 is formed of a through hole (inflow port) connected from the outside of the die 10 to the manifold 11. The supply mechanism 20 includes: a supply pipe 21 for supplying the coating liquid 3 to the inflow portion 16; a tank 22 for storing the coating liquid 3; and a pump 23 for supplying the coating liquid 3 in the tank 22 to the die 10 through the supply pipe 21. As described above, the supply mechanism 20 can supply the coating liquid 3 from the inflow portion 16 to the manifold 11. In the present embodiment, as shown in fig. 1, the inflow portion 16 is connected to the bottom 17 of the manifold 11, and the coating liquid 3 is caused to flow in from the bottom 17.

The manifold 11 can store the coating liquid 3 supplied from the supply mechanism 20, and can discharge the coating liquid 3 stored in the manifold 11 from the discharge port 18 to the substrate 2 transported in a roll-to-roll manner through the slit 12, thereby continuously coating the coating liquid 3 on the substrate 2. The gap size of the slit 12 is designed to be constant in the width direction thereof, and the thickness of the coating liquid 3 coated on the substrate 2 is designed to be constant in the width direction. Further, although not shown, a filter for the coating liquid 3 is provided in the middle of the supply pipe 21.

Here, in the coating apparatus 1 of the present invention, the supply control section 40 is provided in the middle of the supply path for supplying the coating liquid 3 from the supply mechanism 20 to the die 10, that is, in the middle of the supply pipe 21 and the inflow section 16.

The supply control unit 40 includes a supply valve 41, and controls the operation of the supply valve 41 by a control device not shown. The inlet of the supply valve 41 is connected to the supply pipe 21 via an inlet of a return valve 51 described later, and the coating liquid 3 is supplied to the inlet of the supply valve 41. The outlet of the supply valve 41 is connected to the die 10 via a supply pipe 21.

The valve element 42 is connected to a motor (in the present embodiment, a voice coil motor 43) as a driving source, and the shaft connected to the valve element 42 is moved by the voice coil motor 43, whereby the valve element 42 is moved. That is, the supply valve 41 is a so-called motor-driven valve, and can move the valve body at a higher speed than a pneumatic valve described later.

In addition, the voice coil motor 43 may be driven to raise its own temperature. Therefore, it is preferable to provide a refrigerant-type driving source cooling mechanism 44 for cooling the voice coil motor 43 around the voice coil motor 43, thereby reducing heat generation. As the refrigerant, a known refrigerant such as water, ethanol, ethylene glycol, air, or a mixture thereof can be used.

The front end portion of the shaft connected to the spool 42 is switched between the 2 positions of the first position and the second position by driving of the voice coil motor 43. Thereby, 2 states of the open state of the supply valve 41 forming the flow path of the coating liquid 3 and the closed state of the shut-off flow path of the coating liquid 3 are switched and controlled. In the present description, a position where the length of the exposed shaft is relatively short is referred to as a first position, and a position where the length of the exposed shaft is relatively long is referred to as a second position.

In the present embodiment, a backflow control unit 50 is provided between the supply control unit 40 and the supply mechanism 20. The reflow control section 50 is a mechanism for returning the coating liquid 3 to the tank 22 when the coating liquid 3 is applied to the substrate 2 and the coating liquid 3 is not required to be supplied to the die 10, and the reflow control section 50 has a reflow valve 51 and controls the operation of the reflow valve 51 by a control device not shown. The return valve 51 has an inlet connected to the supply pipe 21, an outlet connected to the return pipe 24, and the return pipe 24 connected to the tank 22.

The return valve 51 has a valve body 52 inside, and the valve body 52 moves to open and close the flow path inside the supply valve 51. The valve body 52 is coupled to the cylinder 53, and the valve body 52 is moved by air flowing in and out of the cylinder 53. That is, the return valve 51 is a so-called pneumatic valve.

The front end portion of the shaft of the cylinder 53 connected to the spool 52 is switched between the 2 positions of the first position and the second position by air passing in and out of the cylinder 53. Thereby, 2 states of the supply valve 51, i.e., the opened state of the flow path for forming the coating liquid 3 and the closed state of the flow path for cutting off the coating liquid 3, are switched and controlled. In the present description, a position where the length of the exposed shaft is relatively short is referred to as a first position, and a position where the length of the exposed shaft is relatively long is referred to as a second position.

In fig. 1, the state in which the coating liquid 3 is applied to the substrate 2 is shown after a predetermined time has elapsed from the start of the application.

In this state, the supply valve 41 is in an open state, and the return valve 51 is in a closed state. Thereby, the coating liquid 3 is supplied to the die 10 via the supply valve 41, and the coating liquid 3 is applied to the substrate 2 from the ejection port 18 of the die 10.

On the other hand, the return valve 51 is closed, and the flow path of the coating liquid 3 returned from the outlet portion of the return valve 51 to the tank 22 via the return pipe 24 is shut off. Therefore, the coating liquid 3 supplied by the pump 23 is supplied to the die 10 entirely.

Fig. 2 is a diagram showing a state in which the application of the coating liquid 3 is interrupted in the coating apparatus 1 of the present embodiment.

In this state, the supply valve 41 is closed, and the return valve 51 is opened. Thereby, the flow path toward the die 10 is shut off, and all of the coating liquid 3 is returned to the tank 22 via the outlet portion of the return valve 51 and the return pipe 24.

A regulator valve 55 is provided in the middle of the return pipe 24, and the internal pressure of the coating liquid 3 in the return valve 51 is regulated by regulating the flow path resistance at the regulator valve 55. The internal pressure is measured by a pressure gauge, not shown, provided in the return pipe 24. When the pressure in the return valve 51 is too high, a large amount of coating liquid 3 is supplied to the die 10 at the moment when the valve element 42 of the supply valve 41 starts to switch from the closed state to the open state at the start of coating, and the coating start portion bulges. Conversely, if the pressure in the return valve 51 is too low, the amount of the coating liquid 3 supplied to the die 10 at the start of coating becomes small, and the film thickness at the start of coating becomes thin (does not become rectangular). Therefore, the regulating valve 55 regulates the flow rate of the return pipe 24 to a predetermined flow rate so that the internal pressure of the die 10 and the internal pressure of the return valve 51 are balanced, and a rectangular coating start portion is easily formed under this balance.

In this way, after the application of the coating liquid 3 is temporarily interrupted, the coating liquid 3 is applied again as shown in fig. 1, whereby the coating liquid 3 is intermittently applied to the substrate 2.

Next, fig. 3 and 4 show the operation flow of the coating apparatus 1 according to the present embodiment.

Fig. 3 is a flow chart of the operation of the coating device 1 at the start of coating. The expression "at the start of coating" used in the present description includes not only when the coating liquid 3 starts to be coated on the substrate 2 completely without the coating liquid 3, but also when the formation of each coating film is started in the case of intermittent coating, that is, when coating is restarted.

In this operation flow, the state where the supply of the coating liquid 3 to the die 10 is not performed as shown in fig. 2 is shown, and the state where the supply of the coating liquid 3 to the die 10 is performed and the coating to the substrate 2 is performed as shown in fig. 1 is shown. That is, the case is shown from the state where the supply valve 41 is in the closed state and the return valve 51 is in the open state to the state where the supply valve 41 is in the open state and the return valve 51 is in the closed state. The coating liquid 3 is always supplied from the supply mechanism 20.

First, the voice coil motor 43 and the cylinder 53 operate, and the shaft connected to the valve element 42 starts to move from the first position to the second position, and the shaft connected to the valve element 52 starts to move from the second position to the first position, whereby the valve element 42 of the supply valve 41 and the valve element 52 of the return valve 51 start to move. Thereby, the switching of the supply valve 41 from the closed state to the open state and the switching of the return valve 51 from the open state to the closed state are simultaneously started (step S1). The phase velocity v1 of the valve element 42 and the moving velocity v2 of the valve element 52 at this time are set so that the moving velocity v1 of the valve element 42 by the motor method is faster than the moving velocity v2 of the valve element 52 by the pneumatic method.

After the movement of the two spools is started, first, the movement of the shaft of the supply valve 41 from the first position to the second position is completed, whereby the movement of the spool 42 is completed. Thereby, the switching of the supply valve 41 from the closed state to the open state is completed (step S2).

After the movement of the spool 42 is completed, the movement of the shaft of the return valve 51 from the second position to the first position is completed, whereby the movement of the spool 52 is completed. Thereby, the switching of the return valve 51 from the open state to the closed state is completed (step S3). Then, by continuing this state (the state in which the supply valve 41 is opened and the return valve 51 is closed) until the interruption coating or the coating is completed, the coating to the substrate 2 is continued so that the film thickness of the coating film is uniform.

Fig. 4 is a flow chart of the operation of the coating device 1 at the end of coating. The expression "at the end of coating" used in the present description includes not only when the coating onto the substrate 2 is completed but also when the formation of each coating film is completed in the case of intermittent coating, that is, when the coating is interrupted.

In this operation flow, the following is shown: the above step S3 ends from the state where the coating liquid 3 is supplied to the die 10 and the coating is applied to the substrate 2 as shown in fig. 1, to the state where the supply of the coating liquid 3 to the die 10 is stopped and the coating to the substrate 2 is interrupted or ended as shown in fig. 2. That is, the case is shown from the state where the supply valve 41 is in the open state and the return valve 51 is in the closed state to the state where the supply valve 41 is in the closed state and the return valve 51 is in the open state. The coating liquid 3 is always supplied from the supply mechanism 20.

First, the voice coil motor 43 and the cylinder 53 operate, and the shaft connected to the valve element 42 starts to move from the second position to the first position, and the shaft connected to the valve element 52 starts to move from the first position to the second position, whereby the valve element 42 of the supply valve 41 and the valve element 52 of the return valve 51 start to move. Thereby, the switching of the supply valve 41 from the open state to the closed state and the switching of the return valve 51 from the closed state to the open state are simultaneously started (step S11). The phase velocity v1 of the valve element 42 and the moving velocity v2 of the valve element 52 at this time are set so that the moving velocity v1 of the valve element 42 by the motor method is faster than the moving velocity v2 of the valve element 52 by the pneumatic method.

After the movement of the two spools is started, first, the movement of the spool 42 is completed by completing the movement of the shaft of the supply valve 41 from the second position to the first position. Thereby, the switching of the supply valve 41 from the open state to the closed state is completed (step S12). At this point in time, the supply of the coating liquid 3 to the die 10 is cut off.

After the movement of the spool 42 is completed, the movement of the shaft of the return valve 51 from the first position to the second position is completed, whereby the movement of the spool 52 is completed. Thereby, the switching of the return valve 51 from the closed state to the open state is completed (step S13). Then, by continuing this state (the state in which the supply valve 41 is in the closed state and the return valve 51 is in the open state) until the coating is restarted, the coating to the substrate 2 is continuously interrupted.

Next, the effect of the coating device of the present invention will be described.

In the present invention, by using the drive source of the supply valve 41 as a motor, the valve body 42 can be moved at a higher speed than in the conventional cylinder drive, and the opening-closing operation and the closing-opening operation can be completed in a short time. Specifically, in the coating start operation shown in fig. 3, the valve element 42 is completely opened at the time point of step S2. This can reduce the increase in the internal pressure of the coating liquid 3 on the upstream side of the valve element 42, which is generated in the closing-opening operation of the valve element 42, and can reduce the bulge of the coating start portion caused by the increase in the internal pressure.

In the coating end operation shown in fig. 4, the valve element 42 is completely closed at the time point of step 12, and the supply of the coating liquid 3 to the die 10 can be cut off in a short time without waiting for the completion of the movement of the valve element 53 of the return valve 51. Therefore, the occurrence of streaks at the terminal end portion of the coating portion can be reduced.

In addition, when the motor-type valve and the pneumatic-type valve are compared, the cost of the motor-type valve is high in many cases, but by applying the motor-type valve only to a supply valve that requires particularly the switching speed of the valve element, it is possible to realize an application device that can suppress the cost of the whole application device and can reduce the bulge at the start end portion of the application portion and the streak at the end portion of the application portion with a simple configuration.

With the above coating apparatus, a coating film with less film thickness variation between the coating start portion and the coating end portion can be formed.

The coating device of the present invention is not limited to the illustrated embodiment, and other embodiments may be used within the scope of the present invention. For example, in the above description, the driving motor for the supply valve is a voice coil motor, but the present invention is not limited thereto, and any known motor other than a voice coil motor may be used as long as the valve body can be moved at a higher speed than a pneumatic motor.

In the above description, at the time point when the valve body on the supply valve side is completely opened during the coating start operation, the movement of the valve body on the return valve side from the opened state to the closed state may not be completed, and a part of the coating liquid may be returned to the tank. In the case where the film thickness of the application start portion is reduced instead, the movement of the valve body on the return valve side may be started before the movement of the valve body on the supply valve side is started.

Description of the reference numerals

1 coating device

2 substrate

3 coating liquid

5 roller

10 die head

11 manifold

12 slot

16 inflow part

17 bottom part

18 ejection port

20 feeder

21 supply piping

22 cans

23 pump

24 return piping

40 supply control unit

41 supply valve

42 spool

43 voice coil motor

44 drive part cooling mechanism

50 reflux control part

51 reflux valve

52 valve core

53 air cylinder

55 regulating valve

100 coating section

101 die head

102 supply mechanism

103 manifold

104 slot

105 ejection port

106 supply piping

107 supply valve

108 valve core

109 air cylinder

110 reflux valve

111 valve core

112 cylinder

Claims

1. A coating device is provided with: a die head on which an ejection port long in the width direction of the substrate is formed, the ejection port ejecting a coating liquid to the substrate conveyed in the length direction; a tank for storing the coating liquid; and a supply mechanism for supplying the coating liquid stored in the tank to the die via an inflow portion communicating with the die,

the coating device is characterized by comprising:

a supply valve for supplying the coating liquid from the supply mechanism to an inlet side of the supply valve, an outlet side of the supply valve being connected to the die head, a position of an inner valve body being changed according to an operation of a shaft, and switching control being performed between 2 states, that is, an open state of a flow path of the coating liquid forming the supply valve and a closed state of a flow path of the coating liquid cutting off the supply valve; and

a return valve for supplying the coating liquid from the supply mechanism to an inlet side of the return valve, an outlet side of the return valve being connected to a return pipe which is a pipe for returning the coating liquid to the tank, a position of an inner valve body being changed in accordance with an operation of a shaft, and switching control being performed between 2 states of an open state of the return valve in which a flow path of the coating liquid is formed and a closed state of the flow path of the coating liquid is blocked,

the drive source for moving the valve element of the supply valve is a motor type, and the drive source for moving the valve element of the return valve is a pneumatic type, and the moving speed of the valve element of the supply valve is faster than the moving speed of the valve element of the return valve.

2. The coating apparatus of claim 1, wherein,

the driving source for moving the valve body of the supply valve is a voice coil motor.

3. Coating device according to claim 1 or 2, characterized in that,

the coating apparatus further includes a driving source cooling mechanism that cools a driving source that moves the valve body of the supply valve by a refrigerant system.