CN114905150B - Mask net-stretching welding equipment - Google Patents
Mask net-stretching welding equipment Download PDFInfo
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- CN114905150B CN114905150B CN202110172509.4A CN202110172509A CN114905150B CN 114905150 B CN114905150 B CN 114905150B CN 202110172509 A CN202110172509 A CN 202110172509A CN 114905150 B CN114905150 B CN 114905150B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The embodiment of the invention discloses mask net-opening welding equipment, which comprises: a frame for carrying a reticle, the reticle including opposite first and second sides and opposite third and fourth sides; the clamping and stretching device is used for clamping the first side and the second side of the mask and driving the first side and the second side of the mask to move oppositely or reversely; the flexible pressing device comprises a flexible pressing rod assembly, and the flexible pressing rod assembly is provided with degrees of freedom in a first direction, a second direction and a third direction and is used for being attached to the mask plate to press the third side and the fourth side of the flexible pressing rod assembly against the frame, the first direction is parallel to the first side of the mask plate, the second direction is parallel to the third side of the mask plate, and the third direction is perpendicular to the mask plate; and the laser is used for welding the mask plate on the frame. In the embodiment of the invention, the mask plate is pressed on the frame by the flexible pressing device and then welded, so that the stability of the tensile stress of the mask plate in the welding process can be improved, and the welding quality can be improved.
Description
Technical Field
The embodiment of the invention relates to the technical field of welding, in particular to mask net-opening welding equipment.
Background
An optical reticle is a structure that produces various functional patterns on a film, plastic, or glass substrate material and is precisely positioned for selective exposure of a photoresist coating. Masks are widely used, and are required to be used in the field of photolithography processes, such as ICs, display panels, and the like.
When manufacturing the display panel, a mask plate needs to be welded on a frame for manufacturing the flat display panel by adopting a laser in advance, and then the flat display panel is manufactured by adopting the mask plate frame. And (3) high-temperature fusion bonding the mask plate and the frame together during laser welding to finish welding action.
However, in the welding process, the metal at the welding point is melted to easily cause the change of the internal tensile stress of the mask, so that the pattern on the surface of the mask is moved to cause the rejection of the mask.
Disclosure of Invention
The embodiment of the invention provides mask tension net welding equipment, which aims to solve the problem of internal stress change of a mask plate in the existing welding process.
The embodiment of the invention provides mask net-opening welding equipment, which comprises the following steps:
a frame for carrying a reticle, the reticle including opposing first and second sides and opposing third and fourth sides;
the clamping and stretching device is used for clamping the first side and the second side of the mask and driving the first side and the second side of the mask to move oppositely or reversely;
the flexible press-contact device comprises a flexible press rod assembly, wherein the flexible press rod assembly is provided with degrees of freedom in a first direction, a second direction and a third direction, and is used for attaching the mask plate to press a third side and a fourth side of the mask plate with the frame, the first direction is parallel to the first side of the mask plate, the second direction is parallel to the third side of the mask plate, and the third direction is perpendicular to the mask plate;
and the laser is used for welding the mask plate on the frame.
Further, the clamping and stretching devices are symmetrically distributed along a first symmetry axis of the frame, and the flexible compression bar assemblies are symmetrically distributed along a second symmetry axis of the frame;
wherein the first symmetry axis of the frame is perpendicular to the second symmetry axis thereof.
Further, a third side and a fourth side of the mask plate are respectively provided with a welding spot group, the welding spot group comprises at least one welding spot string arranged along the first direction, and each welding spot string comprises at least one welding spot.
Further, during welding, the attaching position of the flexible compression bar assembly is adjacent to the welding spot string to be welded and is arranged at intervals.
Further, the method further comprises the following steps: the clamping and stretching device comprises at least two clamping and stretching units arranged on the base;
the extending direction of the clamping and stretching units is parallel to the first direction, the displacement direction of the clamping and stretching units is parallel to the second direction, and the displacement directions of two adjacent clamping and stretching units are opposite.
Further, the flexible press device further comprises a horizontal position adjusting unit and a vertical position adjusting unit which are connected with the flexible press rod assembly;
the horizontal position adjusting unit is used for driving the flexible pressure bar assembly to move along the direction parallel to the mask plate, and the vertical position adjusting unit is used for driving the flexible pressure bar assembly to move along the direction vertical to the mask plate.
Further, the flexible pressure bar assembly comprises two flexible pressure bar units which are oppositely arranged, the flexible pressure bar units comprise pressure bars and flexible pressure contact structures, and the extending direction of the pressure bars is parallel to the second direction;
the flexible press structure comprises a press rod connecting plate fixed on the press rod, a press touch plate and at least two flexible pieces elastically connected with the press rod connecting plate and the press touch plate, wherein the press touch plate is located on one side of the press rod connecting plate facing the mask plate, and the at least two flexible pieces are used for generating deformation in the process of laminating the press touch plate to the mask plate so as to adjust the parallelism of the press touch plate and the mask plate.
Further, at least two flexible pressing structures arranged along the second direction are connected to the pressing rod.
Further, the flexible press structure includes at least three flexible members arranged along the second direction and not arranged in a collinear manner.
Further, the flexible press-contact structure further comprises a bolt, and the bolt is used for connecting the press-contact plate to the press rod connecting plate.
Further, the flexible piece comprises a screw sleeve and a spiral spring positioned in the screw sleeve, and the screw sleeve is used for adjusting the pretightening force of the spiral spring.
The mask tension net welding equipment provided by the embodiment of the invention comprises the clamping and stretching device and the flexible press-contacting device, wherein the mask is subjected to the tensile force action of the clamping and stretching device and is flexibly pressed on the frame by the flexible press-contacting device, the flexible press-contacting device has degrees of freedom in the first direction, the second direction and the third direction, the mask can be self-adaptively attached to the flexible press-contacting device, and then welding is carried out, so that in the welding process, under the pressure action of the flexible press-contacting device, metal at the welding point is melted, the problem that the stress in the mask for resisting stretching is changed is not caused, the stability of the tensile force of the mask in the welding process is improved, the problem that the surface pattern of the mask moves due to the tensile stress change in the welding process in the prior art is solved, and the yield of the mask is improved; in addition, after the mask plate and the frame are tightly pressed, molten metal liquid can not flow to the gap position between the mask plate and the frame, so that the phenomenon of unstable welding or cold welding is solved, and the welding success rate and welding quality of the mask plate are improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, a brief description will be given below of the drawings required for the embodiments or the description of the prior art, and it is obvious that although the drawings in the following description are specific embodiments of the present invention, it is obvious to those skilled in the art that the basic concepts of the device structure, the driving method and the manufacturing method, which are disclosed and suggested according to the various embodiments of the present invention, are extended and extended to other structures and drawings, and it is needless to say that these should be within the scope of the claims of the present invention.
FIG. 1 is a schematic diagram of a mask-to-net welding device according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view taken along line A-A' of FIG. 1;
FIG. 3 is a schematic diagram of a reticle bonding location;
FIG. 4 is a schematic illustration of the locations of the flexible press and mask during the welding process;
FIG. 5 is an overall schematic diagram of a mask-to-screen welding apparatus according to an embodiment of the present invention;
fig. 6 is a schematic view of a flexible pressure contact device;
FIG. 7 is a schematic view of a flexible plunger unit;
fig. 8 is a schematic view of a flexible press-contact structure.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described by means of implementation examples with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, not all embodiments. All other embodiments obtained by those skilled in the art based on the basic concepts disclosed and suggested by the embodiments of the present invention are within the scope of the present invention.
Referring to fig. 1, a schematic diagram of a mask-to-screen welding apparatus according to an embodiment of the present invention is shown. Fig. 2 is a cross-sectional view taken along A-A' of fig. 1. The mask net-opening welding device in this embodiment includes: a frame 4 for carrying a reticle 5, the reticle 5 comprising opposite first and second sides 5a, 5b and opposite third and fourth sides; the clamping and stretching device 1 is used for clamping the first side 5a and the second side of the mask 5 and driving the first side 5a and the second side of the mask 5 to move oppositely or reversely; the flexible press-contact device comprises a flexible press-bar assembly 2a, and the flexible press-bar assembly 2a has degrees of freedom in a first direction X, a second direction Y and a third direction Z, and is used for being attached to the mask 5 to press a third side 5b and a fourth side of the mask with the frame 4, wherein the first direction X is parallel to the first side 5a of the mask 5, the second direction Y is parallel to the third side 5b of the mask 5, and the third direction Z is perpendicular to the mask 5; and the laser 3 is used for welding the mask 5 on the frame 4.
In this embodiment, the frame 4 may be used to carry the mask 5, and in practice, the frame 4 is specifically the frame 4 used for manufacturing a flat display panel. The frame 4 for manufacturing a flat display panel may be suitable for manufacturing a liquid crystal display panel, an organic light emitting display panel, a quantum dot display panel, or other types of display panels. Correspondingly, the pattern of the mask plate is changed according to the different structures of the display panel according to the different types of the manufactured display panel. It can be understood that the frame may also be a frame for manufacturing other devices, and the specific structure of the frame and the mask pattern of the mask are not specifically limited herein.
Reticle 5 is generally square in shape and includes opposing first and second sides 5a, 5b and opposing third and fourth sides, optionally first and second sides 5a, 5b extending in a horizontal direction, i.e., first direction X, in fig. 1, and third and fourth sides 5b, 5b extending in a vertical direction, i.e., second direction Y, in fig. 1. The shape, pattern and other structures of the mask 5 are not fixed, and the structure of the mask 5 is correspondingly changed according to different manufactured products, so that the structure of the mask is not particularly limited.
The clamping and stretching device 1 is used for clamping a first side 5a and a second side of the mask 5 and driving the first side 5a and the second side of the mask 5 to move oppositely or reversely, after the mask 5 is stretched by the reverse movement, the edge of the mask 5 extends to the periphery of the frame 4, and the mask 5 is loosened by the reverse movement. The clamping and stretching device 1 comprises at least two clamping and stretching units which are respectively positioned on the first side 5a and the second side of the mask 5 and clamp the first side 5a and the second side of the mask 5. Then the two clamping and stretching units can stretch the mask 5 along the direction parallel to the second direction Y when moving oppositely after clamping, or the mask 5 can be loosened along the direction parallel to the second direction Y when moving oppositely after clamping. After stretching, the first side 5a and the second side of the mask 5 extend to the periphery of the frame 4, so that the mask 5 can be welded to the frame 4 in subsequent welding.
The flexible pressure contact device comprises a flexible pressure bar assembly 2a, and the flexible pressure contact device can control the flexible pressure bar assembly 2a to have degrees of freedom in a first direction X, a second direction Y and a third direction Z. The flexible press device can control the left-right displacement of the flexible press rod assembly 2a in the X direction as shown in fig. 1, the flexible press device can control the up-down displacement of the flexible press rod assembly 2a in the Y direction as shown in fig. 1, and then the flexible press rod assembly 2a can displace in the X-Y plane according to the attaching position with the mask plate 5 until moving to the position above the attaching position, and it can be understood that the attaching position is located near the upper side of the welding position. The flexible pressure contact device can control the vertical displacement of the flexible pressure bar assembly 2a in the Z direction as shown in fig. 2, and after the flexible pressure bar assembly 2a moves to the upper part of the attaching position, the flexible pressure bar assembly can move vertically in the Z direction until the flexible pressure bar assembly is attached to the mask 5. Thus, the gap between the mask 5 and the frame 4 can be eliminated by adopting the flexible press device.
It will be appreciated that when the flexible pressure contact device controls the displacement of the flexible pressure rod assembly 2a in the X-direction, as shown in fig. 1, the two flexible pressure rod units in the flexible pressure rod assembly 2a may be moved towards or away from each other. Only the two flexible strut unit positions in the flexible strut assembly are shown in simplified form in fig. 1 and 2, it being understood that the structure of the flexible strut assembly includes others, which are not shown in full.
The flexible compression bar assembly 2a is used for pressing the third side 5b and the fourth side of the mask 5, so that the third side 5b and the fourth side of the mask 5 after pressing are flexibly compressed with the frame 4, and a gap between the mask 5 and the frame 4 is eliminated. The flexible strut assembly 2a is located on the third side 5b and the fourth side of the reticle 5 and on a surface of the reticle 5 on a side facing away from the frame 4. Specifically, after clamping and stretching, the flexible compression bar assembly 2a is displaced to the attaching position of the mask 5 and vertically pressed down to the mask 5, so that the third side 5b of the mask 5 is compressed with the frame 4 and the fourth side of the mask 5 is compressed with the frame 4. It will be appreciated that the third side 5b and the fourth side of the reticle 5 where the flexible strut assembly 2a is in contact are the welding areas of the reticle. Before welding, the mask 5 and the frame 4 are compressed by adopting the flexible compression bar assembly 2a, the flexible compression characteristic of the flexible compression bar assembly can eliminate gaps between the mask 5 and the frame 4, the phenomenon that molten metal of the mask 5 flows to the positions of the gaps between the molten metal and the frame 4 is avoided, and the phenomenon of unstable welding or cold welding is prevented.
The laser 3 is used to weld the mask 5 to the frame 4, specifically, the laser 3 welds the third side 5b of the mask 5 to the frame 4 and welds the fourth side of the mask 5 to the frame 4. After the mask 5 is stretched by the clamping and stretching device 1, the mask 5 is pressed on the frame 4 through the flexible pressing rod assembly 2a, and then the mask 5 is welded on the frame 4 for manufacturing the flat display panel through the laser 3. The mask 5 and the frame 4 are melted at high temperature by the laser 3, and the mask 5 and the frame 4 are combined together to finish the welding action.
The optional clamping and stretching devices 1 are symmetrically distributed along a first symmetry axis B-B 'of the frame 4, and the flexible compression bar assemblies 2a are symmetrically distributed along a second symmetry axis C-C' of the frame 4; wherein the first axis of symmetry B-B 'of the frame 4 is perpendicular to its second axis of symmetry C-C'.
In this embodiment, the clamping and stretching device 1 is used for clamping and stretching the first side 5a and the second side of the mask 5, so that the clamping and stretching device 1 should be symmetrically distributed along the first symmetry axis B-B' of the frame 4, so as to clamp and stretch the first side 5a and the second side of the mask 5 respectively. The flexible compression bar assembly 2a is used for pressing the third side 5b and the fourth side of the mask 5, so the flexible compression bar assembly 2a should be symmetrically distributed along the second symmetry axis C-C' of the frame 4, so as to press the third side 5b and the fourth side of the mask 5 respectively. It is known that the reticle 5 is generally square, i.e. its first side 5a and its third side 5B are perpendicular, and that the first axis of symmetry B-B 'of the optional frame 4 is perpendicular to its second axis of symmetry C-C', such that the clamping and stretching device 1 and the flexible press bar assembly 2a are distributed symmetrically along the centre of the frame 4.
The mask tension net welding equipment provided by the embodiment of the invention comprises the clamping and stretching device and the flexible press-contacting device, wherein the mask is subjected to the tensile force action of the clamping and stretching device and is flexibly pressed on the frame by the flexible press-contacting device, the flexible press-contacting device has degrees of freedom in the first direction, the second direction and the third direction, the mask can be self-adaptively attached to the flexible press-contacting device, and then welding is carried out, so that in the welding process, under the pressure action of the flexible press-contacting device, metal at the welding point is melted, the problem that the stress in the mask for resisting stretching is changed is not caused, the stability of the tensile force of the mask in the welding process is improved, the problem that the surface pattern of the mask moves due to the tensile stress change in the welding process in the prior art is solved, and the yield of the mask is improved; in addition, after the mask plate and the frame are tightly pressed, molten metal liquid can not flow to the gap position between the mask plate and the frame, so that the phenomenon of unstable welding or cold welding is solved, and the welding success rate and welding quality of the mask plate are improved.
Referring to fig. 3, the third side 5b and the fourth side 5c of the alternative reticle 5 are respectively provided with a pad group 51, the pad group 51 comprising at least one pad string 51a arranged along the first direction X, each pad string 51a comprising at least one pad 511.
In this embodiment, the third side 5b and the fourth side 5c of the mask 5 are respectively provided with a welding spot group 51, each welding spot 511 in the welding spot group 51 is a welding position of a laser during welding, and the laser melts metal at the welding spot 511 to weld the mask 5 and the frame. It will be appreciated that the mask is typically a metal mask, and that laser welding melts the metal mask at the spot where the laser melts during welding, causing it to be welded to the frame.
It should be noted that when parameters such as the size and the shape of the mask plate are changed, the welding spot group and the number, the positions and the like of the welding spots therein may be changed, but not fixed, and relevant practitioners can reasonably design the welding positions of the mask plate and the frame according to the requirements of products.
Referring to fig. 4, in the alternative welding, the attachment position of the flexible compression bar assembly 2a is adjacent to and spaced apart from the welding spot string 51a to be welded. During welding, the attaching position of the flexible compression bar assembly 2a and the mask 5 is close to the welding spot string 51a to be welded, so that the pressing between the position to be welded of the mask 5 and the frame can be ensured, no gap exists between the position to be welded of the mask 5 and the frame, the problem that molten metal liquid flows to the gap between the mask 5 and the frame during welding is avoided, and the welding stability and the welding quality are improved. It will be appreciated that the pads 511 on the mask 5 are arranged in rows along the X-direction, and the flexible strut assembly 2a moves along the X-direction according to the positions of the pads to be welded so as to adjust the fitting position with the mask 5.
Referring to fig. 5, the optional mask-to-screen welding apparatus further includes: a base 107, the clamping and stretching device 1 comprises at least two clamping and stretching units 101-106 arranged on the base 107; the extending direction X of the clamping and stretching units 101 to 106 is parallel to the first direction X, the displacement direction Y of the clamping and stretching units 101 to 106 is parallel to the second direction, and the displacement directions of the adjacent two clamping and stretching units are opposite.
In this embodiment, the clamping and stretching device 1 includes at least two clamping and stretching units, and an extending direction X of each clamping and stretching unit is parallel to an extending direction of the first side of the mask, and a moving direction Y of the clamping and stretching unit is parallel to a plane where the mask is located and perpendicular to the extending direction of the first side of the mask.
The alternative clamp drawing device 1 comprises 6 clamp drawing units, in turn designated 101, 102, 103, 104, 105 and 106; one mask plate can be clamped between two adjacent clamping and stretching units, and then at most 5 mask plates can be clamped in the clamping and stretching device 1. It can be understood that 5 masks can share a flexible device that presses, and when the device removes and presses the touch promptly, can press simultaneously 5 masks of arranging side by side.
When the clamping and stretching device 1 is adopted, at least 2 mask plates can be welded synchronously, and welding efficiency is improved.
Referring to fig. 5 and 6, the alternative flexible pressure contact apparatus 2 further includes a horizontal position adjustment unit 201 and a vertical position adjustment unit 202 connected to the flexible pressure rod assembly 2 a; the horizontal position adjusting unit 201 is used for driving the flexible pressing rod assembly 2a to move along the direction parallel to the mask, and the vertical position adjusting unit 202 is used for driving the flexible pressing rod assembly 2a to move along the direction perpendicular to the mask.
In this embodiment, the flexible press device 2 is disposed on the base 107, the flexible press device 2 includes a flexible press rod assembly 2a, the flexible press rod assembly 2a is pressed against the third side and the frame of each mask clamped by the clamping and stretching device 1, and is also pressed against the fourth side and the frame of each mask clamped by the clamping and stretching device 1, and only one side structure of the flexible press rod assembly 2a is shown in fig. 5 and 6. It will be appreciated that the flexible strut assembly 2a comprises two opposed flexible strut units extending parallel to the second direction Y; one flexible compression bar unit is used for pressing the third side and the frame of the mask, and the other flexible compression bar unit is used for pressing the fourth side and the frame of the mask. In other embodiments, the flexible press device may further include a plurality of flexible press rod assemblies, for example, two adjacent clamping and stretching units are correspondingly provided with one flexible press rod assembly.
The flexible pressure contact device 2 includes a horizontal position adjustment unit 201 and a vertical position adjustment unit 202. When the mask is touched, the horizontal position adjusting unit 201 drives the flexible pressing rod assembly 2a to move in the X-Y plane, so that the flexible pressing rod assembly 2a reaches the position above the position to be touched by the mask, and then the vertical position adjusting unit 202 drives the flexible pressing rod assembly 2a to move along the direction Z vertical to the mask, so that the flexible pressing rod assembly 2a is touched by the mask and the frame. When the mask is released, the vertical position adjusting unit 202 drives the flexible pressing rod assembly 2a to move vertically in a direction away from the mask, so that the flexible pressing rod assembly 2a rises to release the mask and the frame, and then the horizontal position adjusting unit 201 drives the flexible pressing rod assembly 2a to move in an X-Y plane, so that the flexible pressing rod assembly 2a is away from the mask.
When optional relaxation, the clamping and stretching device 1 is located at the inner side of the flexible pressing rod assembly 2a, and when the flexible pressing rod assembly 2a is in press contact, the flexible pressing rod assembly moves to the upper side of the mask from the outer side of the mask, and then the mask and the frame are pressed downwards.
The horizontal position adjusting unit is driven by a horizontal servo motor to move the flexible compression bar assembly to a position above a correct press position. The vertical position adjusting unit is driven by a vertical servo motor to provide power for compaction, so that the accurate control of vertical movement is ensured.
Referring to fig. 7 and 8, the flexible compression bar assembly includes two flexible compression bar units 203 disposed opposite to each other, and the flexible compression bar units 203 include a compression bar 204 and a flexible compression structure 205, where an extending direction of the compression bar 204 is parallel to the second direction; the flexible press structure 205 includes a press rod connection plate 2051 fixed on the press rod 204, a press contact plate 2055, and at least two flexible members 205a elastically connected to the press rod connection plate 2051 and the press contact plate 2055, where the press contact plate 2055 is located at a side of the press rod connection plate 2051 facing the mask, and the at least two flexible members 205a are used for generating deformation in the process of attaching the press contact plate 2055 to the mask, so as to adjust the parallelism between the press contact plate 2055 and the mask.
The extension length of the compression bar 204 is greater than or equal to the third side length of one mask, the flexible compression structure 205 is fixed on the compression bar 204 through a bolt, and specifically, the compression bar connecting plate 2051 in the flexible compression structure 205 is fixed on the compression bar 204 through a bolt. The press plate 2055 in the compliant press structure 205 faces the reticle, and after press, the press plate 2055 is in direct contact with the reticle and compresses the reticle and the frame.
The flexible press structure 205 further includes at least two flexible members 205a that elastically connect the press rod connection plate 2051 and the press contact plate 2055, and the flexible members 205a may deform and slightly contract when the press contact plate 2055 receives pressure. That is, after the pressure contact plate 2055 contacts the mask plate in the process of pressing the mask plate by the flexible pressure contact structure 205, the flexible member 2055 can deform or slightly compress in the process of pressing the contact plate 2055 to attach the mask plate, the parallelism between the pressure contact plate 2055 and the mask plate is ensured by mechanical adjustment, the maximum pressure contact area is realized in the pressure contact process, and the pressure contact plate 2055 is tightly pressed with the mask plate.
Adopt flexible press touch structure 205 to compress tightly mask and frame, can not harm the mask, and flexible characteristic that flexible press touch structure 205 also can be better eliminates the gap between mask and the frame, prevents that the molten metal from leaking and causing the rosin joint phenomenon, improves welding quality.
Referring to fig. 7, at least two flexible pressing structures 205 arranged in the second direction are connected to the optional pressing rod 204. The flexible parts 205a of each flexible press-contact structure 205 can ensure the parallelism between the press-contact plate and the mask plate, and the laminating stability of the flexible press-contact device and the mask plate is improved. One or more flexible press-contact structures are arranged between two adjacent clamping and stretching units.
Referring to fig. 8, the alternative compliant press structure 205 includes at least three compliant members 205a arranged in a second direction and non-collinear arrangement. It can be appreciated that if a flexible part is structurally included in a flexible press contact, when the press contact plate is attached to the mask, the flexible part deforms or is slightly compressed, which may result in unstable parallelism of the press contact plate, for example, the space between the press contact plate and the press rod connecting plate is not uniform, so that a flexible press contact structure includes a plurality of flexible parts, and the problem of instability in compression or deformation of the flexible parts can be solved.
On this basis, the flexible press structure 205 includes at least three flexible members 205a arranged along the second direction and not arranged in a collinear manner, so that the problem of instability of the press contact plate 2055 caused by compression or deformation of the flexible members can be further solved. It will be appreciated that if the plurality of flexible members of the flexible press-contact structure are collinear, then the flexible press-contact structure may ensure stability in the second direction, but may not in the first direction. Therefore, the plurality of flexible members 205a of the flexible press-contact structure 205 are arranged in a non-collinear manner in the second direction, so that the stability of the flexible press-contact structure 205 in the first direction can be improved, and the stability of the distance between the press-contact plate 2055 and the press-rod connecting member 2051 in the first direction and the second direction can be ensured.
Referring to fig. 8, an alternative flexible member 205a includes a sleeve 2053 and a coil spring 2052 positioned within the sleeve 2053, the sleeve 2053 being used to adjust the preload of the coil spring 2052. The optional flexible press-contact structure 205 further includes a bolt 2054, the bolt 2054 being used to attach the press-contact plate 2055 to the press bar connection plate 2051.
In this embodiment, the flexible pressing structure 205 mainly includes a pressing rod connecting plate 2051, where the pressing rod connecting plate 2051 is fixed on the pressing rod 204 through a bolt. The optional coil spring 2052 is a round wire coil spring, and a sleeve 2053 is used to nest the coil spring 2052, with the bottom surface of the pressure plate 2055 facing the mask and in direct contact with the mask and in flexible compression when in pressure contact.
In the press-contact process, the horizontal position adjusting unit in the flexible press rod assembly drives the flexible press rod unit to move along the first side extending direction and the third side extending direction of the mask plate, and the vertical position adjusting unit drives the flexible press rod unit to move along the direction vertical to the mask plate until the flexible press rod unit contacts the mask plate and compresses the mask plate and the frame. In the press-contact process of the press-contact plate 2055 and the mask, the thread sleeve 2053 can perform initial pre-tightening on the round wire spiral spring 2052, so that the pre-tightening force of the round wire spiral spring 2052 can be adjusted by the three-point non-collinear thread sleeve 2053 in the flexible press-contact structure 205, the parallelism between the press-contact plate 2055 and the metal mask is ensured through mechanical adjustment, and the maximum press-contact area is realized in the press-contact process.
Specifically, after the horizontal position adjusting unit of the flexible press-contact device moves in place, the vertical position adjusting unit moves downwards, and the round wire coil spring 2052 can generate tiny compression (or deformation) in the press-contact process of the press-contact plate 2055 and the metal mask plate, and due to the fact that the bolt 2054 plays a role in guiding a certain direction, the problem of instability during compression (or deformation) of the round wire coil spring 2052 is solved, the press-contact precision of the press-contact plate 2055 and the metal mask plate is guaranteed, and translation or deformation generated to the mask plate in the press-contact process is reduced.
The swivel bolt 2053 of the optional flexible press-contact structure 205 can be a micro guide rail slider structure or a guide shaft oil-free bushing structure, so that the guide precision in the micro deformation process of the circular spiral spring 2052 can be better improved.
It should be noted that, the mask pattern on the mask plate usually corresponds to the pixel hole, and if the mask pattern moves due to welding, the mask is scrapped. In the embodiment, the vertical compression position is adjusted through self-adaption and non-collineation pre-tightening of the round wire coil spring so as to compress metal mask plates with different thicknesses, achieve higher vertical precision control, ensure that mask pixel holes do not move in the welding process, and improve the mask yield.
Based on the above embodiments, the present embodiment provides tensile press-contact precision and press-contact repeatability test data of the metal mask. As shown in table 1 below.
As can be seen from the above table, the mask screen-tensioning welding apparatus provided in this embodiment can achieve single press-contact translation accuracy less than 0.25 μm, single press-contact rotation accuracy less than 0.25urad, multiple press-contact translation repeatability less than 0.5 μm, and multiple press-contact rotation repeatability less than 0.5urad.
According to the mask screen-tensioning welding equipment provided by the embodiment of the invention, the flexible press-contact device is added, the flexible press-contact device horizontally moves to the vicinity of a position to be welded before welding, and then the mask plate and the frame are flexibly compressed by vertical movement, and the mask plate is self-adaptively attached and then welded, so that the accurate control of horizontal and vertical movement is ensured. The method ensures that the stress for resisting the stretching of the clamping and stretching device in the mask is not changed in the welding process, thereby avoiding the problem that the mask is scrapped due to pattern movement on the surface of the mask. On the other hand, the surface of the metal frame is generally uneven, the mask plate and the frame are flexibly pressed before welding, molten metal liquid can be prevented from flowing to a gap position between the mask plate and the frame, and the phenomenon of unstable welding or cold welding is solved. The welding quality and the mask plate welding success rate are improved, and the mask tension stability and the yield in the welding process are improved.
Note that the above is only a preferred embodiment of the present invention and the technical principle applied. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, and that various obvious changes, rearrangements, combinations, and substitutions can be made by those skilled in the art without departing from the scope of the invention. Therefore, while the invention has been described in connection with the above embodiments, the invention is not limited to the embodiments, but may be embodied in many other equivalent forms without departing from the spirit or scope of the invention, which is set forth in the following claims.
Claims (9)
1. Mask net welding equipment, characterized by, include:
a frame for carrying a reticle, the reticle including opposing first and second sides and opposing third and fourth sides;
the clamping and stretching device is used for clamping the first side and the second side of the mask and driving the first side and the second side of the mask to move oppositely or reversely;
the flexible press-contact device comprises a flexible press rod assembly, wherein the flexible press rod assembly is provided with degrees of freedom in a first direction, a second direction and a third direction, and is used for attaching the mask plate to press a third side and a fourth side of the mask plate with the frame, the first direction is parallel to the first side of the mask plate, the second direction is parallel to the third side of the mask plate, and the third direction is perpendicular to the mask plate;
the laser is used for welding the mask plate on the frame;
the third side and the fourth side of the mask plate are respectively provided with a welding spot group, the welding spot group comprises at least one welding spot string arranged along the first direction, and each welding spot string comprises at least one welding spot;
during welding, the attaching position of the flexible compression bar assembly is adjacent to the welding spot string to be welded and is arranged at intervals.
2. Mask screen welding apparatus according to claim 1, wherein the clamping and stretching means are symmetrically distributed along a first axis of symmetry of the frame and the flexible compression bar assemblies are symmetrically distributed along a second axis of symmetry of the frame;
wherein the first symmetry axis of the frame is perpendicular to the second symmetry axis thereof.
3. The mask-to-net welding apparatus according to claim 1, further comprising: the clamping and stretching device comprises at least two clamping and stretching units arranged on the base;
the extending direction of the clamping and stretching units is parallel to the first direction, the displacement direction of the clamping and stretching units is parallel to the second direction, and the displacement directions of two adjacent clamping and stretching units are opposite.
4. The mask screen welding apparatus according to claim 1, wherein the flexible press device further comprises a horizontal position adjusting unit and a vertical position adjusting unit connected to the flexible press bar assembly;
the horizontal position adjusting unit is used for driving the flexible pressure bar assembly to move along the direction parallel to the mask plate, and the vertical position adjusting unit is used for driving the flexible pressure bar assembly to move along the direction vertical to the mask plate.
5. The mask screen welding apparatus according to claim 4, wherein the flexible pressing bar assembly includes two flexible pressing bar units disposed opposite to each other, and the flexible pressing bar units include a pressing bar and a flexible pressing structure, and an extending direction of the pressing bar is parallel to the second direction;
the flexible press structure comprises a press rod connecting plate fixed on the press rod, a press touch plate and at least two flexible pieces elastically connected with the press rod connecting plate and the press touch plate, wherein the press touch plate is located on one side of the press rod connecting plate facing the mask plate, and the at least two flexible pieces are used for generating deformation in the process of laminating the press touch plate to the mask plate so as to adjust the parallelism of the press touch plate and the mask plate.
6. The mask screen welding apparatus according to claim 5, wherein at least two flexible press-contact structures arranged along the second direction are connected to the press bar.
7. The mask-to-net welding apparatus of claim 5, wherein the flexible press-contact structure comprises at least three of the flexible members arranged in the second direction and non-collinear.
8. The mask web welding apparatus of claim 5, wherein the flexible press-contact structure further comprises a bolt for connecting the press-contact plate to the press-bar connecting plate.
9. The mask tensioning welding apparatus according to claim 5, wherein the flexible member comprises a screw sleeve and a coil spring positioned in the screw sleeve, the screw sleeve being used to adjust a preload of the coil spring.
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| CN202110172509.4A CN114905150B (en) | 2021-02-08 | 2021-02-08 | Mask net-stretching welding equipment |
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| DE102012021763A1 (en) * | 2012-11-06 | 2014-05-08 | Audi Ag | Clamping device, used to position and hold flat workpiece e.g. vehicle body sheet metal component during welding process, comprises clamping unit having flexible metal strip fixed with support frame by springs, and support unit |
| CN104668989A (en) * | 2015-01-26 | 2015-06-03 | 天津大学 | Hard-soft multipoint follow-up supporting head used for image processing |
| CN106392719A (en) * | 2016-10-14 | 2017-02-15 | 天津大学 | Pneumatic type variable-rigidity flexible mirror-image milling supporting head for measuring thickness in real time |
| CN207386914U (en) * | 2017-10-01 | 2018-05-22 | 舒兰市通用机械有限责任公司 | Suitable for the mechanical processing platform of irregular shape part |
| CN112276437A (en) * | 2019-07-25 | 2021-01-29 | 上海微电子装备（集团）股份有限公司 | Compressing head and compressing device |
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|---|---|---|---|---|
| DE102012021763A1 (en) * | 2012-11-06 | 2014-05-08 | Audi Ag | Clamping device, used to position and hold flat workpiece e.g. vehicle body sheet metal component during welding process, comprises clamping unit having flexible metal strip fixed with support frame by springs, and support unit |
| CN104668989A (en) * | 2015-01-26 | 2015-06-03 | 天津大学 | Hard-soft multipoint follow-up supporting head used for image processing |
| CN106392719A (en) * | 2016-10-14 | 2017-02-15 | 天津大学 | Pneumatic type variable-rigidity flexible mirror-image milling supporting head for measuring thickness in real time |
| CN207386914U (en) * | 2017-10-01 | 2018-05-22 | 舒兰市通用机械有限责任公司 | Suitable for the mechanical processing platform of irregular shape part |
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