CN114836727B - System and method for detecting film thickness of each layer of multilayer film system - Google Patents
System and method for detecting film thickness of each layer of multilayer film system Download PDFInfo
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- CN114836727B CN114836727B CN202210414364.9A CN202210414364A CN114836727B CN 114836727 B CN114836727 B CN 114836727B CN 202210414364 A CN202210414364 A CN 202210414364A CN 114836727 B CN114836727 B CN 114836727B
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- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000001514 detection method Methods 0.000 claims abstract description 89
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 25
- 239000007888 film coating Substances 0.000 claims abstract description 18
- 238000009501 film coating Methods 0.000 claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 14
- 238000007747 plating Methods 0.000 claims abstract description 11
- 239000011521 glass Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000011248 coating agent Substances 0.000 claims description 42
- 238000000576 coating method Methods 0.000 claims description 42
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 230000009471 action Effects 0.000 claims description 5
- 238000009826 distribution Methods 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 3
- 230000008569 process Effects 0.000 abstract description 8
- 238000003756 stirring Methods 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 70
- 239000010410 layer Substances 0.000 description 39
- 230000006872 improvement Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012788 optical film Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention belongs to the technical field of vacuum coating, in particular to a system for detecting the thickness of each layer of film of a multilayer film system, which comprises a detection box body which is arranged on a slide glass frame in a vacuum coating cavity and can move forwards along with the slide glass frame, wherein a film coating opening window for receiving a film coating material is formed in a front cover of the detection box body, a plurality of samples to be coated and a carrying disc for mounting the samples are uniformly arranged in the detection box body, a stirring device capable of stirring the carrying disc to rotate or enabling the next sample to correspond to the position of the film coating opening window after the front cover of the detection box body rotates is arranged in the center of the carrying disc, and a triggering mechanism capable of triggering the stirring device to work is arranged in the vacuum coating cavity. The independent detection system can accurately and timely detect the film thickness of each independent film layer in the film plating equipment, and has simple, convenient and quick detection process and low detection cost.
Description
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to a system and a method for rapidly and independently detecting film thickness of each layer of a multilayer film system.
Background
Products in the automobile industry, the mobile phone industry, the glass coating industry and the like have the requirement of coating films on transparent substrates, particularly optical films with special function requirements, and the conventional production equipment basically takes the single machine coating as a main part, so that the maximum size, the yield and the like of the products are greatly influenced.
The trend of the production modes with large demand output and low cost in market development gradually trends to the production modes of continuous coating production lines with large-scale production advantages. The good quality of the produced film generally requires coating of a multilayer film, so that stable quality control of each film is important, especially in accurate film thickness, and the more the number of films, the higher the difficulty.
The film thickness measuring mode commonly used in the industry at present is mainly divided into on-line detection and post-plating detection. The former data can be fed back in real time, the latter data is fed back with a certain delay, and the total film thickness is measured, so that the data of each film thickness can not be obtained; the on-line detection mainly comprises optical film thickness detection and quartz crystal oscillation thickness measuring instruments, the accuracy of the former is difficult to ensure under the influence of test conditions (continuous movement and shaking of a sample wafer, etc.), the latter is influenced by the service life of the crystal, long-term continuous measurement cannot be carried out, the deposition rate of one film coating source can only be measured, and if a plurality of film coating sources are provided, a plurality of thickness measuring instruments are needed, so that the cost is high. Because the deposition rate of the sputter coating is relatively stable, although the coating conditions gradually change along with the consumption of the target material so as to influence the deposition rate, the current mainstream film thickness detection method is still post-coating detection, and the process can be corrected through feedback of detection results.
Because the multi-layer film coating equipment is provided with a plurality of sputtering cathodes, the number of layers of the film system is increased, the precision requirement on film thickness control is improved, meanwhile, the feedback time is prolonged because of longer process flow, and in addition, after maintenance and target material replacement, trial plating is needed to determine the process parameters, so that each layer of film is independently detected, and a plurality of times are occupied, and the production efficiency is influenced.
Therefore, development of a system and a method for rapidly and independently detecting the thickness of each layer of a multilayer film system, which are low in cost, is urgent.
Disclosure of Invention
The invention aims to overcome the defects of the prior art, and particularly discloses a rapid and independent detection system for the film thickness of each layer of a multilayer film system.
In order to achieve the technical purpose, the invention is realized according to the following technical scheme:
the invention discloses a multi-layer film thickness detection system of a multi-layer film system, which comprises a detection box body which is arranged on a slide glass frame in a vacuum coating cavity and can move forwards along with the slide glass frame, wherein a coating opening window for receiving coating materials is formed in a front cover of the detection box body, a plurality of samples to be coated and a carrying disc for mounting the samples are uniformly arranged in the detection box body, a shifting device capable of shifting the carrying disc or enabling the next sample to correspond to the position of the coating opening window after the front cover of the detection box body rotates is arranged in the central position of the carrying disc, and a trigger mechanism capable of triggering the carrying disc shifting device to work is arranged in the vacuum coating cavity.
As a further improvement of the technology, the shifting device is a carrier plate shifting device capable of shifting the carrier plate to rotate, the carrier plate shifting device sequentially comprises a one-way ratchet clutch, a connecting shaft and a shifting lever which are fixedly arranged at the center of the carrier plate from the inside to the outside of the detection box body, a fixing seat is arranged in the front cover of the detection box body, the one-way ratchet clutch and the connecting shaft are arranged on the fixing seat, one part of the connecting shaft is arranged in the detection box body, the other part of the connecting shaft is arranged outside the detection box body, a reset spring is sleeved on a connecting shaft section arranged outside the detection box body, and in an initial state, the shifting lever is inclined and is arranged towards the direction close to the triggering mechanism.
As a further improvement of the technology, the triggering mechanism is a fixed touch rod fixed at the position between two adjacent coating sources, the fixed touch rods are a plurality of, are horizontally fixed on the vacuum coating cavity and are distributed along the moving direction of the detection box body, and in an initial state, the projection height of the deflector rod in the vertical direction is slightly higher than the height of the touch rod.
As a further improvement of the above technology, the carrier plate is provided with sample positioning devices which are arranged in a circular matrix and are used for fixing samples.
As a further improvement of the above technique, the positioning device comprises a positioning surface for placing the sample and a limiting connector with elasticity mounted on the positioning surface.
As a further improvement of the above technology, the positioning device comprises a positioning pin shaft fixed on the carrier plate and a limiting connecting piece with elasticity arranged on the positioning pin shaft.
The invention also discloses a detection method of the system for detecting the film thickness of each layer of the multilayer film system, which comprises the following specific steps:
(1) Firstly, assembling a detection system, installing a new sample to be coated in a detection box body, and marking the sample;
(2) Secondly, fixing a detection system provided with a new sample on a slide glass frame of a vacuum coating cavity, and confirming whether the carrier plate shifting device can elastically reset before coating;
(3) Then, the coating equipment is operated, the detection system moves forwards along with the slide holder in the vacuum coating cavity, when a deflector rod in the carrier plate poking device touches the first touch rod, the carrier plate poking device drives the carrier plate to rotate by an angle, and the first sample to be coated corresponds to the position of the opening window of the detection box body, so that the coating work of the first film layer of the first sample is performed;
(4) Then, when the detection system continues to move forwards along with the slide holder, the first touch rod is separated from the deflector rod, the carrier plate deflector device returns to the original position under the action of the spring restoring force of the restoring spring until the carrier plate deflector device moves to the film plating source position of the second film layer, the second touch rod touches the deflector rod, the second sample is stirred to the opening window position of the detection box body, the film plating work of the second film layer of the second sample is carried out, and the film plating work of the third film layer of the third sample is carried out according to the cycle until the film plating work of the N film layer of the N sample is carried out;
(5) After the film coating work of each film layer corresponding to each sample is finished, sequentially taking out each sample piece with the film coating work of the film layer finished, and carrying out film thickness detection work of each film layer according to the mark made by the sample piece and the corresponding film layer.
(6) And finally, inputting the thickness data of each film layer into a computer to manufacture a film thickness distribution curve, and revising production process parameters according to the trend of the film thickness data.
Compared with the prior art, the invention has the beneficial effects that:
(1) According to the detection system, the trigger mechanism is used for triggering the carrier plate shifting device to rotate, so that a sample to be plated accurately corresponds to the position of the coating opening window, new samples can be switched to perform film deposition sampling respectively, coating work of different films of different samples can be completed, actual thickness samples of each film layer of the multilayer film can be obtained respectively in one complete coating period, accurate basis is provided for detecting different film layer thicknesses, and the detection process is convenient and rapid and easy to realize;
(2) According to the detection method disclosed by the invention, the film thickness of different film layers of different samples is detected by the common detection method of the film thickness, so that a film coating result can be obtained quickly, the debugging time of a process is saved, the independent data of the film thickness of each film layer can be detected, the process is controlled accurately, the deviation range and degree of the process parameters can be confirmed accurately according to the feedback of the film thickness detection data of each layer, and the production process can be corrected quickly, accurately and conveniently.
(3) According to the detection method, trial production can be needed each time when consumable materials are maintained or replaced, data can be confirmed once, and debugging time is saved.
Drawings
The invention is described in detail below with reference to the attached drawings and specific examples:
FIG. 1 is a schematic view of a detection system according to the present invention installed in a vacuum coating chamber;
FIG. 2 is a schematic diagram of the front structure of the detection system according to the present invention;
FIG. 3 is a schematic side view of a detection system according to the present invention;
FIG. 4 is an enlarged schematic view of FIG. 3A;
fig. 5 is a schematic structural diagram of the carrier plate shifting device and the triggering mechanism in the invention when touching.
Detailed Description
As shown in fig. 1 to 5, the system 10 for detecting the thickness of each layer of the multilayer film system according to the present invention comprises a detection box body 1 which is mounted on a slide frame 30 in a vacuum coating cavity 100 and can move forward along with the slide frame 30, a coating opening window 11 for receiving coating materials is arranged on a front cover of the detection box body 1, a plurality of samples 20 to be coated and a carrying disc 2 for mounting the samples 20 are uniformly arranged in the detection box body 1, a stirring device capable of stirring the position of the carrying disc 2 to correspond the next sample 20 to the coating opening window 11 after rotating is arranged in the central position of the carrying disc 2, and a trigger mechanism 4 capable of triggering the stirring device to work is arranged in the vacuum coating cavity 100.
The slide frame 30 is a device which is usually provided in the vacuum coating cavity 100 in the vacuum coating technical field, a rolling device 50 for moving the slide frame 30 thereon is installed at the bottom of the vacuum coating cavity 100, a plurality of coating sources 40 are arranged in the vacuum coating cavity 100 in front of the slide frame 30, and when the slide frame 30 carries the sample 20 near the coating sources 40, the coating sources 40 are started to start coating work of different coating layers.
As shown in fig. 3 and 5, the shifting device is a carrier plate shifting device 3 for shifting the carrier plate to rotate, the carrier plate shifting device 3 sequentially comprises a one-way ratchet clutch 31, a connecting shaft 32 and a shifting rod 33 which are fixedly installed at the center position of the carrier plate 2 from the inside of the detection box body 1 to the outside, a fixed seat 5 is arranged in the front cover of the detection box body 1, the one-way ratchet clutch 31 and the connecting shaft 32 are installed on the fixed seat 5, one part of the connecting shaft 32 is arranged in the detection box body 1, the other part of the connecting shaft 32 is arranged outside the detection box body 1, a reset spring 34 is sleeved on the section of the connecting shaft 32 arranged outside the detection box body 1, and in an initial state, the shifting rod 33 is inclined and is arranged towards the direction close to the triggering mechanism 4.
In the present invention, the carrier plate shifting device 3 may be replaced by a shifting device for shifting the front cover of the detection box body 1, and the working principle of the shifting device is basically the same as that of the carrier plate shifting device 3, and will not be described herein.
As shown in fig. 3 and 5, the triggering mechanism 4 is a fixed touch rod fixed at a position between two adjacent coating sources 40, the fixed touch rods are a plurality of fixed touch rods, are horizontally fixed on the vacuum coating cavity 100 and are all arranged along the moving direction of the detection box body 1, in an initial state, the projected height of the shift rod 33 in the vertical direction is slightly higher than the height of the touch rod, the detection box body 1 moves forwards along with the slide holder 30, when the fixed touch rod touches the shift rod 33, the shift rod 33 drives the connecting shaft 32 and the one-way ratchet clutch 31 to rotate anticlockwise by an angle with the carrier disc 2, at this time, the sample 20 is aligned with the coating opening window 11 to complete the work of coating the first film layer of the first sample 20, then the fixed touch rod leaves the shift rod 33, the shift rod 33 returns to the original position under the action of elastic restoring force, and continues waiting until the next fixed touch rod is touched, so that the coating work of the second film layer of the next sample 20 is completed, and the cycle is repeated.
In the present invention, as shown in fig. 4, the carrier plate 2 is provided with the sample positioning devices 6 arranged in a circular matrix for fixing the samples 20, and the sample positioning devices 6 include a positioning surface 61 for placing the samples 20 and a limiting connecting piece 62 with elasticity mounted on the positioning surface 61, so that the samples 20 can be mounted on the carrier plate 2 more conveniently, and at the same time, the samples are also convenient to detach. In addition, the sample 20 can be installed by combining the pin shaft and the limiting connector 62, and the structural principle is the same, and will not be described again.
In addition, the invention also discloses a detection method of the film thickness detection system of each layer of the multilayer film system, which comprises the following specific steps:
(1) Firstly, assembling a detection system, installing a new sample 20 to be coated in a detection box body 1, and marking the sample 20;
(2) Secondly, fixing a detection system provided with a new sample 20 on a slide holder 30 in the vacuum coating cavity 100, and confirming whether the carrier plate shifting device 3 can elastically reset before coating;
(3) Then, the coating equipment is operated, the detection system moves forwards along with the slide holder 30 in the vacuum coating cavity 100, when the deflector rod 33 in the carrier plate deflector 3 touches the first touch rod 4', the carrier plate deflector 3 drives the carrier plate 2 to rotate by an angle, the first sample 20 to be coated is corresponding to the position of the opening window 11 of the detection box body 1, and the coating source 40 is started to perform coating operation of the first film layer of the first sample 20;
(4) Then, when the detection system continues to move forward along with the slide holder 30, when the first touch rod 4 is separated from the deflector rod 33, the carrier plate deflector 3 returns to the original position under the action of the spring restoring force of the restoring spring 34 until moving to the position of the film coating source 40 of the second film layer, the second touch rod touches the deflector rod 33 to stir the second sample 20 to the position of the opening window of the detection box body 1, the film coating source 40 is started to perform film coating work of the second film layer of the second sample 20, and film coating work of the third film layer of the third sample 20 is performed until film coating work of the N film layer of the sample 20 is performed according to the cycle;
(5) After the film coating work of each film layer corresponding to each sample 20 is completed, each sample piece with the film coating work of the film layer completed is sequentially taken out, and film thickness detection work of each film layer is performed according to the mark made by the corresponding film layer.
(6) And finally, inputting the thickness data of each film layer into a computer to manufacture a film thickness distribution curve, and revising production process parameters according to the trend of the film thickness data.
The present invention is not limited to the above-described embodiments, and various modifications or variations of the present invention are intended to be included in the present invention, provided that they fall within the scope of the appended claims and the equivalents thereof, unless they depart from the spirit and scope of the present invention.
Claims (5)
1. A film thickness detection system for each layer of a multilayer film system is characterized in that: the vacuum coating device comprises a detection box body which is arranged on a slide glass frame in a vacuum coating cavity and can move forwards along with the slide glass frame, wherein a coating opening window for receiving coating materials is formed in a front cover of the detection box body, a plurality of samples to be coated and a carrying disc for mounting the samples are uniformly arranged in the detection box body, a shifting device capable of shifting the carrying disc or enabling the next sample to correspond to the position of the coating opening window after the front cover of the detection box body rotates is arranged in the center of the carrying disc, and a triggering mechanism capable of triggering the carrying disc shifting device to work is arranged in the vacuum coating cavity;
the device comprises a detection box body, a trigger mechanism, a driving device and a driving device, wherein the driving device is a carrier plate driving device capable of driving a carrier plate to rotate, the carrier plate driving device sequentially comprises a one-way ratchet clutch, a connecting shaft and a driving lever which are fixedly arranged at the center position of the carrier plate from the inside of the detection box body to the outside, a fixed seat is arranged in the front cover of the detection box body, the one-way ratchet clutch and the connecting shaft are arranged on the fixed seat, one part of the connecting shaft is arranged in the detection box body, the other part of the connecting shaft is arranged outside the detection box body, a reset spring is sleeved on a connecting shaft section arranged outside the detection box body, and in an initial state, the driving lever is inclined and is arranged towards the direction close to the trigger mechanism;
the trigger mechanism is a fixed touch rod fixed at the position between two adjacent coating sources, a plurality of fixed touch rods are horizontally fixed on the cavity of the vacuum coating cavity and are distributed along the moving direction of the detection box body, and in an initial state, the projection height of the deflector rod in the vertical direction is slightly higher than the height of the touch rod; the detection box body moves forward along with the slide frame, when the fixed touch rod touches the deflector rod, the deflector rod drives the connecting shaft and the one-way ratchet clutch to rotate anticlockwise by an angle with the carrier disc, at the moment, the sample is aligned with the coating film windowing to finish the coating film work of the first film layer of the first sample, then the fixed touch rod leaves the deflector rod, the deflector rod returns to the original position under the action of elastic restoring force, and the deflector rod continues waiting until the deflector rod touches the next fixed touch rod, so that the coating film work of the second film layer of the next sample is finished.
2. The system for detecting the thickness of each layer of a multilayer film system according to claim 1, wherein: the carrying disc is provided with sample positioning devices which are distributed in a circular matrix and used for fixing samples.
3. The system for detecting the thickness of each layer of a multilayer film system according to claim 2, wherein: the positioning device comprises a positioning surface for placing a sample and a limiting connecting piece with elasticity, wherein the limiting connecting piece is arranged on the positioning surface.
4. The system for detecting the thickness of each layer of a multilayer film system according to claim 2, wherein: the positioning device comprises a positioning pin shaft fixed on the carrying disc and an elastic limiting connecting piece arranged on the positioning pin shaft.
5. The method for detecting the thickness of each layer of the multilayer film system according to any one of claims 1 to 4, comprising the specific steps of:
(1) Firstly, assembling a detection system, installing a new sample to be coated in a detection box body, and marking the sample;
(2) Secondly, fixing a detection system provided with a new sample on a slide glass frame of a vacuum coating cavity, and confirming whether the slide glass poking device can elastically reset or not before coating, wherein: the one-way ratchet clutch and the connecting shaft are arranged on the fixing seat, one part of the connecting shaft is arranged in the detection box body, the other part of the connecting shaft is arranged outside the detection box body, a reset spring is sleeved on a connecting shaft section arranged outside the detection box body, and in an initial state, the shifting rod is inclined and is arranged in a direction close to the trigger mechanism;
(3) Then, the coating equipment is operated, the detection system moves forwards along with the slide holder in the vacuum coating cavity, when a deflector rod in the carrier plate poking device touches the first touch rod, the carrier plate poking device drives the carrier plate to rotate by an angle, and the first sample to be coated corresponds to the position of the opening window of the detection box body, so that the coating work of the first film layer of the first sample is performed;
(4) Then, when the detection system continues to move forwards along with the slide holder, the first touch rod is separated from the deflector rod, the carrier plate deflector device returns to the original position under the action of the spring restoring force of the restoring spring until the carrier plate deflector device moves to the film plating source position of the second film layer, the second touch rod touches the deflector rod, the second sample is stirred to the opening window position of the detection box body, the film plating work of the second film layer of the second sample is carried out, and the film plating work of the third film layer of the third sample is carried out according to the cycle until the film plating work of the N film layer of the N sample is carried out;
(5) After the film coating work of each film layer corresponding to each sample is finished, sequentially taking out each sample piece with the film coating work of the film layer finished, and carrying out film thickness detection work of each film layer according to the mark made by the sample piece and the corresponding film layer;
(6) And finally, inputting the thickness data of each film layer into a computer to manufacture a film thickness distribution curve, and revising production process parameters according to the trend of the film thickness distribution curve.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210414364.9A CN114836727B (en) | 2022-04-20 | 2022-04-20 | System and method for detecting film thickness of each layer of multilayer film system |
| PCT/CN2022/095141 WO2023201841A1 (en) | 2022-04-20 | 2022-05-26 | Individual-film thickness measurement system for multi-layer film system and measurement method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210414364.9A CN114836727B (en) | 2022-04-20 | 2022-04-20 | System and method for detecting film thickness of each layer of multilayer film system |
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| Publication Number | Publication Date |
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| CN114836727A CN114836727A (en) | 2022-08-02 |
| CN114836727B true CN114836727B (en) | 2024-04-09 |
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| CN202210414364.9A Active CN114836727B (en) | 2022-04-20 | 2022-04-20 | System and method for detecting film thickness of each layer of multilayer film system |
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| WO (1) | WO2023201841A1 (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN114836727A (en) | 2022-08-02 |
| WO2023201841A1 (en) | 2023-10-26 |
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