CN202133819U - Direct type optical monitor system of optical films formation - Google Patents
Direct type optical monitor system of optical films formation Download PDFInfo
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- CN202133819U CN202133819U CN201120122105U CN201120122105U CN202133819U CN 202133819 U CN202133819 U CN 202133819U CN 201120122105 U CN201120122105 U CN 201120122105U CN 201120122105 U CN201120122105 U CN 201120122105U CN 202133819 U CN202133819 U CN 202133819U
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Abstract
Provided is a direct type optical monitor system of optical film formation, relating to the technical field of optical film formation and aiming to guarantee film thickness, control precision and meanwhile raise capacity. The system comprises a film forming cavity, a light source bulb, fibers, a focusing lens assembly and a light receiving apparatus; the film forming cavity is provided with a horizontally rotating workpiece disc; the light source bulb and the focusing lens assembly are both installed in the film forming cavity; the light receiving apparatus is in connection with the light source bulb through the fibers and the focusing lens assembly optical path; the film forming cavity is provided with a lens support and a light source support; the support bodies of the lens support and the light source support both extend to the workpiece disc edge from the central section of the workpiece disc; the focusing lens assembly is fixed on a lens fixing member, and the light source bulb is fixed on a light source fixing member; the fixed positions of the focusing lens assembly and the light source bulb can be adjusted. The direct type optical monitor system of optical film formation provides an adjustable means for considering both precision and capacity.
Description
Technical field
The utility model relates to the optical thin film film technique, particularly relates to a kind of technology of direct-type optical monitoring system of optical thin film film forming.
Background technology
The preparation of optical thin film is through on sample strip, being coated with the rete of different-thickness, reaching the film structure of designing requirement.Earlier sample strip is placed on the workpiece plate during film forming operation; Heating evaporation source material again; Make its evaporation attached on the sample strip, because evaporation source material evaporation back uneven distribution normally on the whole work-piece dish, therefore in order to obtain the even distribution of thickness on the whole work-piece dish; On hoop, all make the workpiece plate high speed rotating come average film thickness usually, then utilize the revision board of definite shape to revise diametrically.
For the thicknesses of layers that guarantees plated film can reach designing requirement, prepare in the process at optical thin film and also need monitor thicknesses of layers, the optical monitoring technology is that optical thin film prepares one of the most effective film thickness monitoring technology in the process.The principle of work of optical monitoring method is following: in the film forming operation process, use the light source irradiation monitoring piece; See through the light of monitoring piece or send into an optical pickup apparatus after by lens subassembly optically focused by the light of monitoring piece reflection; In film forming procedure along with the growth of thickness on the monitoring piece; The light amount signal that optical pickup apparatus receives (transmitance or reflectivity) can demonstrate the variation of similar sine wave, and the light amount signal that receives according to optical pickup apparatus calculates the thicknesses of layers on the monitoring piece, again according to the thicknesses of layers that calculates; Operation stops constantly to judge to film forming by manual work or computing machine, thereby reaches the purpose of controlling diaphragm layer thickness.The optical monitoring method of existing optical thin film film forming has two kinds, and a kind of is indirect type optical monitoring method, and another kind is a direct-type optical monitoring method.
When adopting indirect type optical monitoring method; Can on workpiece plate, place a plurality of sample strip; Place a monitoring piece in the workpiece plate centre, in the film forming operation process, monitor, reach the purpose of control sample strip thicknesses of layers through thicknesses of layers to monitoring piece.The monitored object of this method is a monitoring piece; And the product that the user needs is the sample strip that is placed on the workpiece plate; Sample strip can be rotated around the turning axle of workpiece plate along with the rotation of workpiece plate in the film forming operation process, and monitoring piece all is placed on the workpiece plate central module, can not rotate around the turning axle of workpiece plate; Thickness on the monitoring piece and the thickness ratio on the sample strip are commonly referred to the Tooling value; If this Tooling value remains unchanged in whole film forming procedure, then can be finally inversed by the thickness of sample strip, thereby reach the purpose of indirect control and supervision sample strip thickness through the thickness on the monitoring piece.But; The evaporation characteristic of evaporation source material can change along with the progress of film forming operation; The Tooling value also can change thereupon, and for example along with the minimizing gradually of evaporating materials, evaporating surface can reduce gradually; Make the relative position of evaporation source change, make the Tooling value also change thereupon; The factor that influences the Tooling value has a lot; Though can adopt certain methods effectively to reduce the variation of Tooling value; But can not avoid fully; And the variation tendency of Tooling and amplitude of variation are difficult to accurately estimate in advance that the sample strip thickness precision that therefore adopts indirect type optical monitoring method to obtain is lower.
When adopting direct-type optical monitoring method, sample strip directly is placed on the workpiece plate center, in the film forming operation process, controls thickness through direct monitoring sample strip.This method is because monitoring piece is exactly a sample strip itself; Therefore overcome the Tooling value variation issue in the indirect type optical monitoring method; Can think relatively that the Tooling value at place, control point is always 1, the sample strip thickness precision that therefore adopts direct-type optical monitoring method to obtain is higher.But; In the existing direct-type optical monitoring method; Light source and lens subassembly all are fixed in the film forming inner chamber, and the connection light path between light source and the lens subassembly all is fixed on the workpiece plate centre usually, so sample strip also can only be placed on the workpiece plate centre; Make and can only place a sample strip usually on the workpiece plate, its production capacity is lower.
The utility model content
To the defective that exists in the above-mentioned prior art, the utility model technical matters to be solved provides a kind of direct-type optical monitoring system that improves the optical thin film film forming of production capacity when can guarantee the film thickness monitoring precision.
In order to solve the problems of the technologies described above; The direct-type optical monitoring system of a kind of optical thin film film forming that the utility model provided; Comprise film forming cavity, light source bulb, optical fiber, collector lens assembly and optical pickup apparatus; Be provided with the workpiece plate that horizontally rotates in the said film forming cavity, said light source bulb and collector lens assembly are installed in the film forming cavity, and the output terminal of said optical fiber connects optical pickup apparatus; Its light-receiving end connects light source bulb through collector lens assembly light path, and said collector lens assembly passes workpiece plate with the light path that is connected between the light source bulb; It is characterized in that: be installed with a lens carrier, a light source bracket in the said film forming cavity; Said lens carrier and light source bracket lay respectively at the both sides up and down of workpiece plate, and the support body of lens carrier and light source bracket all extends to the workpiece plate edge from the workpiece plate middle part;
Said lens carrier is provided with the lens mount that moves radially along workpiece plate, and is provided with the lens position part that is used for fixing the lens mount position, and said collector lens assembly is fixed on the lens mount;
Said light source bracket is provided with the light source fixture that moves radially along workpiece plate, and is provided with the light source keeper that is used for fixing light source fixture position, and said light source bulb is fixed on the light source fixture.
Further, said optical pickup apparatus comprises data processor, and is used for the monochromator with the light monochromatization, is used for light signal is changed into the photoelectric commutator of electric signal;
Said data processor is provided with light quantity electrical signal collection mouth and communication interface, and its light quantity electrical signal collection mouth connects the electric signal interface of photoelectric commutator;
The light entrance port of said monochromator connects the output terminal of optical fiber, and its optical emission exit connects the optical signal interface of photoelectric commutator.
Further, be provided with the workpiece plate driving ring that horizontally rotates in the said film forming cavity, said workpiece plate is placed on this workpiece plate driving ring.
Further; The initial point trigger switch that also comprises open type; And be used to detect the rotary encoder that workpiece plate is placed angle, said data processor is provided with two angle signal input ports, and its two angle signal input ports are electrically connected initial point trigger switch and rotary encoder respectively; The rotating shaft of the rotating shaft of said rotary encoder and workpiece plate driving ring is meshing or be coupling, and the rotating shaft of said workpiece plate driving ring is provided with and is used to stir the closed driving lever of initial point trigger switch.
Further, the collector lens assembly that is installed on the lens carrier is the first collector lens assembly, is installed with the second collector lens assembly that is used for the indirect type optical monitoring in the said film forming cavity.
The direct-type optical monitoring system of the optical thin film film forming that the utility model provides; Because the position of collector lens assembly and light source bulb all is adjustable; Its monitoring position no longer is the center of rotation of workpiece plate, but around a loop line, and monitoring piece itself is exactly a sample strip; Non-monitoring piece also can be placed on monitoring loop wire periphery; Therefore directly upwards the variation of Tooling value is very little, can when guaranteeing sample strip film thickness monitoring precision, improve production capacity, for taking into account precision and production capacity the scalable means is provided.
Description of drawings
Fig. 1 is the structural representation of direct-type optical monitoring system of the optical thin film film forming of the utility model embodiment.
Embodiment
Embodiment to the utility model describes in further detail below in conjunction with description of drawings, but present embodiment is not limited to the utility model, and analog structure of every employing the utility model and similar variation thereof all should be listed the protection domain of the utility model in.
As shown in Figure 1; The direct-type optical monitoring system of a kind of optical thin film film forming that the utility model embodiment is provided; Comprise film forming cavity 1, light source bulb 2, optical fiber, collector lens assembly 3 and optical pickup apparatus; Be provided with the workpiece plate 4 that horizontally rotates in the said film forming cavity 1, said light source bulb 2 and collector lens assembly 3 are installed in the film forming cavity 1, and the output terminal of said optical fiber connects optical pickup apparatus; Its light-receiving end connects light source bulb 2 through collector lens assembly 3 light paths, and said collector lens assembly 3 passes workpiece plate 4 with the light path that is connected between the light source bulb; It is characterized in that: be installed with a lens carrier 5, a light source bracket 6 in the said film forming cavity 1; Said lens carrier 5 and light source bracket 6 lay respectively at the both sides up and down of workpiece plate 4, and the support body of lens carrier 5 and light source bracket 6 all extends to workpiece plate 4 edges from workpiece plate 4 middle parts;
Said lens carrier 5 is provided with the lens mount (not shown) that moves radially along workpiece plate 4, and is provided with the lens position part (not shown) that is used for fixing the lens mount position, and said collector lens assembly 3 is fixed on the lens mount; Said lens carrier is provided with the linear lens gathering sill (not shown) that is used for the lens mount mobile guide, and said lens mount is slidingly mounted in the lens gathering sill, and said lens position part is a lens position bolt;
Said light source bracket 6 is provided with the light source fixture (not shown) that moves radially along workpiece plate 4, and is provided with the light source keeper (not shown) that is used for fixing light source fixture position, and said light source bulb 2 is fixed on the light source fixture; Said light source bracket is provided with the linear light source gathering sill (not shown) that is used for light source fixture mobile guide, and said light source fixture is slidingly mounted in the light source gathering sill, and said light source keeper is a light source bolt.
Among the utility model embodiment, said optical pickup apparatus comprises data processor 7, and is used for the monochromator 8 with the light monochromatization, is used for light signal is changed into the photoelectric commutator 9 of electric signal;
Said data processor 7 is provided with light quantity electrical signal collection mouth and communication interface, and its light quantity electrical signal collection mouth connects the electric signal interface of photoelectric commutator 9;
The light entrance port of said monochromator 8 connects the output terminal of optical fiber, and its optical emission exit connects the optical signal interface of photoelectric commutator 9.
Among the utility model embodiment, be provided with the workpiece plate driving ring 10 that horizontally rotates in the said film forming cavity 1, said workpiece plate 4 is placed on this workpiece plate driving ring 10.
Among the utility model embodiment; The initial point trigger switch 11 that also comprises open type; And be used to detect the rotary encoder 12 that workpiece plate is placed angle; Said data processor 7 is provided with two angle signal input ports, and its two angle signal input ports are electrically connected initial point trigger switch 11 and rotary encoder 12 respectively; The rotating shaft of the rotating shaft of said rotary encoder 12 and workpiece plate driving ring 10 is meshing or be coupling, and the rotating shaft of said workpiece plate driving ring 10 is provided with and is used to stir the closed driving lever (not shown) of initial point trigger switch 11.
Among the utility model embodiment, said data processor is a single-chip microcomputer, and said monochromator, photoelectric commutator, rotary encoder are prior art.
Among the utility model embodiment, the collector lens assembly 3 that is installed on the lens carrier is the first collector lens assembly, is installed with the second collector lens assembly 13 that is used for the indirect type optical monitoring in the said film forming cavity 1.
The use step of the utility model embodiment is following:
1) data processor is connected to one through the communications cable and is used to control the host computer that the film forming operation stops the moment, and a thicknesses of layers controlling value is set in host computer;
2) scioptics keeper and light source keeper are regulated the position of the first collector lens assembly and light source bulb, make the first collector lens assembly pass the loop line that each monitoring piece belongs to the light path that is connected between the light source bulb;
3) to stir the initial point trigger switch closed for the driving lever in the rotating shaft of turning of work piece dish to workpiece plate driving ring, makes the initial point trigger switch send a zero signal to data processor, and data processor receives that being about to workpiece plate rotational angle value behind the zero signal is designated as 0;
4) not under the rotation situation, regulate first collector lens assembly and the light source bulb at workpiece plate, make to be connected the vertical monitoring piece that passes of light path between the first collector lens assembly and the light source bulb;
The light optically focused that passes monitoring piece that the first collector lens assembly will be sent by light source bulb this moment is after optical fiber is sent into monochromator; Monochromator is sent into photoelectric commutator after with the light beam monochromatization that receives; Photoelectric commutator is sent into data processor after converting the monochromatic light that receives into electric signal, and data processor calculates the light quantity maximal value according to the electric signal that receives;
5) the film forming operation is carried out in control workpiece plate uniform rotation, and heating evaporation source material 14, in the film forming operation process; The steam of evaporation source material is attached to forming thin film on the sample strip; Thicknesses of layers on the monitoring piece is along with the process of film forming operation constantly increases, and the electric signal that data processor obtains also changes thereupon, and data processor is according to electric signal that receives and the light quantity maximal value that step 4 calculated; Calculate the light quantity changing value; And calculate the thicknesses of layers on the monitoring piece according to the light quantity variate that calculates, and then the thicknesses of layers that calculates being uploaded to host computer, host computer compares thicknesses of layers value of receiving and predefined thicknesses of layers controlling value; If the thicknesses of layers value of receiving reaches predefined thicknesses of layers controlling value, then control the film forming operation and stop;
In the film forming operation process; Data processor is through the anglec of rotation of rotary encoder continuous collecting workpiece plate; And the anglec of rotation that collects is uploaded to host computer in real time, to guarantee the control accuracy of thicknesses of layers, the moving circle of revolution in the rotating shaft of workpiece plate driving ring; Driving lever in this rotating shaft is promptly stirred initial point trigger switch closure once; Make it send a zero signal to data processor, data processor receives that being about to workpiece plate rotational angle value behind the zero signal returns zero, with eliminate workpiece plate rotate one week the back rotary encoder cumulative errors.
Claims (5)
1. the direct-type optical monitoring system of an optical thin film film forming; Comprise film forming cavity, light source bulb, optical fiber, collector lens assembly and optical pickup apparatus; Be provided with the workpiece plate that horizontally rotates in the said film forming cavity; Said light source bulb and collector lens assembly are installed in the film forming cavity; The output terminal of said optical fiber connects optical pickup apparatus, and its light-receiving end connects light source bulb through collector lens assembly light path, and said collector lens assembly passes workpiece plate with the light path that is connected between the light source bulb; It is characterized in that: be installed with a lens carrier, a light source bracket in the said film forming cavity; Said lens carrier and light source bracket lay respectively at the both sides up and down of workpiece plate, and the support body of lens carrier and light source bracket all extends to the workpiece plate edge from the workpiece plate middle part;
Said lens carrier is provided with the lens mount that moves radially along workpiece plate, and is provided with the lens position part that is used for fixing the lens mount position, and said collector lens assembly is fixed on the lens mount;
Said light source bracket is provided with the light source fixture that moves radially along workpiece plate, and is provided with the light source keeper that is used for fixing light source fixture position, and said light source bulb is fixed on the light source fixture.
2. the direct-type optical monitoring system of optical thin film film forming according to claim 1 is characterized in that: said optical pickup apparatus comprises data processor, and is used for the monochromator with the light monochromatization, is used for light signal is changed into the photoelectric commutator of electric signal;
Said data processor is provided with light quantity electrical signal collection mouth and communication interface, and its light quantity electrical signal collection mouth connects the electric signal interface of photoelectric commutator;
The light entrance port of said monochromator connects the output terminal of optical fiber, and its optical emission exit connects the optical signal interface of photoelectric commutator.
3. the direct-type optical monitoring system of optical thin film film forming according to claim 2 is characterized in that: be provided with the workpiece plate driving ring that horizontally rotates in the said film forming cavity, said workpiece plate is placed on this workpiece plate driving ring.
4. the direct-type optical monitoring system of optical thin film film forming according to claim 3; It is characterized in that: the initial point trigger switch that also comprises open type; And be used to detect the rotary encoder that workpiece plate is placed angle; Said data processor is provided with two angle signal input ports, and its two angle signal input ports are electrically connected initial point trigger switch and rotary encoder respectively; The rotating shaft of the rotating shaft of said rotary encoder and workpiece plate driving ring is meshing or be coupling, and the rotating shaft of said workpiece plate driving ring is provided with and is used to stir the closed driving lever of initial point trigger switch.
5. the direct-type optical monitoring system of optical thin film film forming according to claim 1; It is characterized in that: the collector lens assembly that is installed on the lens carrier is the first collector lens assembly, is installed with the second collector lens assembly that is used for the indirect type optical monitoring in the said film forming cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120122105U CN202133819U (en) | 2011-04-25 | 2011-04-25 | Direct type optical monitor system of optical films formation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201120122105U CN202133819U (en) | 2011-04-25 | 2011-04-25 | Direct type optical monitor system of optical films formation |
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| Publication Number | Publication Date |
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| CN202133819U true CN202133819U (en) | 2012-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201120122105U Expired - Lifetime CN202133819U (en) | 2011-04-25 | 2011-04-25 | Direct type optical monitor system of optical films formation |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106743198A (en) * | 2017-01-22 | 2017-05-31 | 扬州君禾机械有限公司 | Capel positioning transporting device |
| CN107764523A (en) * | 2017-11-30 | 2018-03-06 | 盛禛真空技术丹阳有限公司 | Glasses lens plated visual monitor system and its application method |
| TWI685907B (en) * | 2014-10-14 | 2020-02-21 | 美商克萊譚克公司 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line |
| CN112783078A (en) * | 2020-12-29 | 2021-05-11 | 西南技术物理研究所 | Intermittent optical monitoring signal synchronous sampling method |
| CN116770257A (en) * | 2023-06-25 | 2023-09-19 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
-
2011
- 2011-04-25 CN CN201120122105U patent/CN202133819U/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI685907B (en) * | 2014-10-14 | 2020-02-21 | 美商克萊譚克公司 | Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line |
| CN106743198A (en) * | 2017-01-22 | 2017-05-31 | 扬州君禾机械有限公司 | Capel positioning transporting device |
| CN107764523A (en) * | 2017-11-30 | 2018-03-06 | 盛禛真空技术丹阳有限公司 | Glasses lens plated visual monitor system and its application method |
| CN112783078A (en) * | 2020-12-29 | 2021-05-11 | 西南技术物理研究所 | Intermittent optical monitoring signal synchronous sampling method |
| CN116770257A (en) * | 2023-06-25 | 2023-09-19 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
| CN116770257B (en) * | 2023-06-25 | 2024-02-06 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
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Granted publication date: 20120201 |
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