CN114799934A - Initial corner adjustable compound pretension type precision rotary table - Google Patents
Initial corner adjustable compound pretension type precision rotary table Download PDFInfo
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- CN114799934A CN114799934A CN202210528337.4A CN202210528337A CN114799934A CN 114799934 A CN114799934 A CN 114799934A CN 202210528337 A CN202210528337 A CN 202210528337A CN 114799934 A CN114799934 A CN 114799934A
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- 150000001875 compounds Chemical class 0.000 title claims description 4
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- 230000002411 adverse Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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Abstract
The invention discloses a composite pre-tightening type precise turntable with an adjustable initial turning angle, which comprises: the device comprises a base plate, a sensor probe seat, a damping ring, a probe body, a lever, a counter-force spring, a fine adjustment screw, a hinge and an adjusting connecting rod. The sensor probe seat is positioned above the substrate, the damping ring is vertically fixed in a through hole on the sensor probe seat, and the probe body is connected in the damping ring; the lever is connected to the upper surface of the base plate through a hinge, two ends of the counter force spring are respectively connected with the inner side end of the lever and the upper surface of the base plate, the fine adjustment screw is vertically screwed on the upper surface of the base plate and is connected with the outer side end of the lever; the adjusting connecting rod is arranged obliquely upwards, and two ends of the adjusting connecting rod are respectively connected with the inner side end of the lever and the sensor probe seat through hinges. The adjusting device can effectively overcome the problem that the capacitance nanometer displacement sensor is sensitive to the position and the posture of a spatial inclination angle under the effect of an electric field.
Description
Technical Field
The invention relates to the technical field of precision adjustment, in particular to a composite pre-tightening type precision turntable with an adjustable initial rotation angle.
Background
The information disclosed in this background of the invention is only for enhancement of understanding of the general background of the invention and is not necessarily to be taken as an acknowledgement or any form of suggestion that this information forms the prior art already known to a person skilled in the art.
With the development of the fields of ultra-precision mechanical manufacturing, micro-robot operation, precise optical measurement instrument, biomedical micro-operation and the like in recent years, the design of a micro-nano operation platform with submicron or even nano-scale resolution is increasingly becoming a key technology for limiting the development of the fields. In the 80 s of the 20 th century, A.Midha and L.L.Howell put forward the concept of a compliant mechanism, greatly promoted the development of a design method of a micro-nano operation platform, and opened a brand new design concept. A two-degree-of-freedom micro-nano operation platform based on a flexible plate spring unit is proposed in a Design of a Large Range XY Nanopositioning System, and the linear freedom degree in XY two directions can be realized; similarly, the document Design and Development of a Compact flexible-based XY Precision Positioning System with a center Range designs a double-layer micro-nano operating platform according to a layered Design method, and realizes the decoupling of XY direction displacement by means of a layered structure. The platform realizes linear freedom degrees in three axial directions of XYZ and rotational freedom degrees in the XY directions by means of a space hinge structure, the space hinge structure in the patent is complex, the rotational freedom degree of a Z axis cannot be realized, the freedom degree has very important application in micro-nano operation, and meanwhile, a large-span stroke is difficult to realize by means of a flexible hinge structure.
Patent document CN104500673B proposes a turntable angle fine-tuning mechanism, which converts the torque in the vertical direction provided by a roller screw into the swinging torque of a swing arm, and reasonably selects the included angle between a chute and the vertical center line of the swing arm and the pitch of the roller screw, so as to realize the fine angle adjustment of the turntable; and the self-locking function of the roller screw is utilized, and the stable work of the rotary table in a frequent impact state can be realized even if a small-torque motor is adopted. Patent document CN215525889U proposes a turntable fine-tuning mechanism and a probe station including the same, in which a linear driving assembly drives a rotary block to rotate in a horizontal plane, the rotary block is movably hinged with the turntable, so as to drive the turntable to rotate, the driving is smooth, and no motion impact occurs like a cam mechanism, so that all pre-test positions of a wafer on the turntable cannot correspond to probes on a probe card above the wafer one by one.
Although the above-described prior art discloses structures which to some extent achieve the accuracy of the rotational movement of the operation platform. However, the present inventors found that: after the micro-nano operation platform is assembled, the angle of the initial position of the turntable is random, and the initial angle error has obvious influence on the subsequent operation of the turntable. However, the existing related design lacks the regulation and inhibition capability for the problem, and the technical requirements are difficult to meet under the detection and operation environment with the ultimate precision requirement.
Disclosure of Invention
Aiming at the problems, the invention provides a composite pre-tightening type precise rotary table with an adjustable initial rotation angle, which has the function of precisely adjusting the initial rotation angle and effectively solves the problems. In order to achieve the purpose, the invention discloses the following technical scheme.
A compound pretension type precision rotary table with adjustable initial rotation angle comprises: the device comprises a base body, a rotor part, a connecting rod, an elastic regulating mechanism and a dynamic regulating part. Wherein: the lateral wall of base member extends and forms a plurality of extension arm, the active cell part is placed in the first holding tank of base member central authorities department, and has a plurality of groups of connecting rod along this active cell part's circumference connection, the one end of connecting rod extends to in the second holding tank, the second holding tank is located the extension arm. The extension arms on two sides of the connecting rod are internally provided with first through holes, and one of the first through holes is provided with a second through hole adjacent to the first through hole. Each first through hole is internally provided with an elastic adjusting mechanism, and one end of each elastic adjusting mechanism is abutted against the side wall of the connecting rod. The dynamic adjusting piece is fixed in the second through hole, and one end of the dynamic adjusting piece is abutted against the side wall of the connecting rod, so that the angle of the rotor part can be adjusted conveniently in the subsequent operation process of the composite pre-tightening type precision turntable.
Furthermore, the number of the extension arms is two to four, the extension arms are evenly distributed on the side wall of the base body, and each extension arm is internally provided with the connecting rod so as to conveniently adjust and position the rotor part.
Further, the dynamic adjusting piece is detachably connected in the second through hole. Preferably, the dynamic adjusting piece is in threaded connection with the second through hole.
Furthermore, each first through hole is internally provided with an elastic adjusting mechanism formed by sequentially connecting a first pressure head, a first elastic piece and a first adjusting piece, the first pressure head is abutted against the side wall of the connecting rod, and the first adjusting piece is adjustably connected with the first through hole.
Further, threaded connection between first regulating part and the first through-hole, and the one end of this first regulating part is located the extension arm outside to promote the regulation and fix the connecting rod through rotatory first regulating part, thereby realize fine setting and calibration to its initial angle at the in-process of assembly active cell part.
Furthermore, the material of the dynamic adjusting piece comprises piezoelectric ceramics, and the dynamic adjusting piece is connected with the controller through a lead.
Furthermore, a protrusion is arranged on the side wall of the connecting rod corresponding to the first pressure head, and one end of the first pressure head is abutted against the protrusion.
Further, the protrusion extends to a third accommodating groove formed in the side wall of the second accommodating groove, the first through hole is formed in the third accommodating groove, and the protrusion is connected with the inner wall of the third accommodating groove through a flexible piece.
Further, bellied bilateral symmetry is connected with the flexible piece, the inner wall of flexible piece and third holding tank is connected.
Optionally, the material of the flexible member includes any one of plastic, rubber, and the like.
Further, one end of the first pressure head abuts in a first groove on the side wall of the connecting rod or a first groove on the protrusion.
Further, the dynamic adjustment member abuts in a second groove on a side wall of the link.
Further, the first elastic member includes any one of a spring, a rubber column, and the like.
Compared with the prior art, the invention has the following beneficial effects: the composite pre-tightening type precise rotary table disclosed by the invention has a function of precisely adjusting the initial rotation angle, and effectively solves the problem that the initial angle error of the rotary table cannot be adjusted in the installation process of the precise rotary table such as the conventional micro-nano operating platform, so that the subsequent operation of the rotary table is obviously influenced. Going on during the assembly of active cell part, through rotating first regulating part among the elasticity adjustment mechanism, and then extrudees first elastic component, first pressure head, to the extrusion force is applyed to the connecting rod, and then promotes the connecting rod swings certain angle in the second holding tank, and then drives the active cell part rotates, so that adjust its initial angle in the installation of active cell part, and to the regulation the active cell part carries out initial positioning, solves current this kind of accurate revolving stage of operating platform a little and can't adjust the initial angle error of revolving stage in the installation, and has brought the problem of showing adverse effect to the follow-up operation of revolving stage. In addition, the invention realizes the adjusting process in a mechanical form, thereby having the characteristics of stability, reliability and good repeatability.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate exemplary embodiments of the invention and together with the description serve to explain the invention and not to limit the invention.
Fig. 1 is a schematic structural diagram of a composite pre-tightening type precision turntable with adjustable initial rotation angle in the embodiment.
Fig. 2 is a sectional view of a composite pre-tightening type precision turntable with adjustable initial rotation angle in the embodiment.
Wherein the numerical designations represent: 1-a base body, 2-a rotor part, 3-a connecting rod, 4-a first pressure head, 5-a first elastic part, 6-a first adjusting part, 7-a dynamic adjusting part, 8-a bolt, 9-a flexible part, 101-an extension arm, 102-a first accommodating groove, 103-a second accommodating groove, 104-a first through hole, 105-a second through hole, 106-a third accommodating groove and 301-a bulge.
Detailed Description
It is to be understood that the following detailed description is exemplary and is intended to provide further explanation of the invention as claimed. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. For convenience of description, the words "up", "down", "left" and "right" in the present invention, if any, merely indicate that the directions of movement are consistent with those of the drawings, and do not limit the structure, but merely facilitate the description of the invention and simplify the description, rather than indicate or imply that the referenced device or element needs to have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention. The probe space pose precision adjusting device provided by the invention is further explained by combining the drawings and the specific embodiment of the specification.
Referring to fig. 1 and 2, there is illustrated a composite pre-tightening type precision turntable with an adjustable initial rotation angle, including: the dynamic adjusting device comprises a base body 1, a rotor part 2, a connecting rod 3, a first pressure head 4, a first elastic piece 5, a first adjusting piece 6 and a dynamic adjusting piece 7. Wherein:
the side wall of the base body 1 extends to form a plurality of extension arms 101, in this embodiment, the number of the extension arms 101 is four, and the four extension arms are uniformly distributed on the side wall of the base body 1, so that the base body 1 forms a cross-shaped structure. The upper surface of the base body 1 is provided with a first accommodating groove 102 at the center, the upper surface of the extension arm 101 is provided with a second accommodating groove 103, and the second accommodating groove 103 is communicated with the first accommodating groove 102. Besides, the number of the extension arms 101 may be two or more, and specifically, the extension arms 101 may be uniformly distributed on the sidewall of the base 1, and the link 3 is disposed in each of the extension arms 101.
The mover portion 2 is a disc-shaped structure and is disposed in the first receiving groove 102 with a gap therebetween, so that the mover portion 2 can rotate in the first receiving groove 102 for adjustment. The group of connecting rods 3 are four groups, and are uniformly distributed along the mover part 2, one end of the group of connecting rods 3 is fixedly connected with the side wall of the mover part 2, the other end of the connecting rods 3 extends into the second accommodating groove 103, and an adjusting gap is formed between the side wall of the connecting rods 3 and the second accommodating groove 103, so that the connecting rods 3 move in the second accommodating groove 103. The connecting rods 3 mainly serve as driving arms of the mover part 2.
The extension arms 101 on both sides of the connecting rod 3 have first through holes 104 therein, and one of the first through holes 104 is provided with a second through hole 105 adjacent to it. Each first through hole 104 is provided with an elastic adjusting mechanism formed by sequentially connecting the first pressure head 4, the first elastic piece 5 and the first adjusting piece 6. Wherein, the one end butt of first pressure head 4 is on connecting rod 3 lateral wall, and the other end of first pressure head 4 is connected with the one end of first elastic component 5, the other end of first elastic component 5 is connected with the one end of first regulating part 6, first regulating part 6 is bolt or screw rod, and its threaded connection is in the outer port of first through-hole 104, just the other end of first regulating part 6 is followed the outer port extension arm 101 outside of first through-hole 104 to promote regulation and fixed to connecting rod 3 through rotatory first regulating part 6, thereby realize the fine setting and the calibration to its initial angle at the in-process of assembly active cell part 2. The first elastic member 5 may be a spring or a rubber column having an elastic expansion function.
The dynamic adjusting piece 7 is arranged in the second through hole 105, a screw rod 8 is connected to an outer port of the second through hole 105 in a threaded mode, the inner end of the dynamic adjusting piece 7 is fixedly connected with the screw rod 8, the outer end of the dynamic adjusting piece 7 abuts against the side wall of the connecting rod 3, and therefore the angle of the rotor part 2 can be adjusted conveniently in the subsequent operation process of the composite pre-tightening type precision turntable.
During the assembly of the mover part 2, the first adjusting part 6 in the elastic adjusting mechanism is rotated to extrude the first elastic part 5 and the first pressure head 4, so that the connecting rod 3 applies an extrusion force to further push the connecting rod 3 to swing by a certain angle in the second accommodating groove 103, and further drive the mover part 2 to rotate, so that the initial angle of the mover part 2 is adjusted in the installation process of the mover part 2, and the adjusted mover part 2 is initially positioned. After the initial angle of the mover portion 2 is adjusted, the position of the mover portion 2 on the base 1 can be kept unchanged under the positioning action of the elastic adjusting mechanism. In the subsequent use process, the dynamic adjusting part 7 is adopted for dynamic adjustment, rather than an elastic adjusting mechanism formed by sequentially connecting the first pressure head 4, the first elastic part 5 and the first adjusting part 6, because the adjustment in the subsequent use process belongs to dynamic adjustment, and the elastic adjusting mechanism is a mechanical manual adjusting mechanism, the requirement of dynamic adjustment cannot be met. Through the cooperation of the mechanical adjustment and the dynamic adjustment, the problem that the initial angle error of the rotary table cannot be adjusted in the installation process of the existing micro-nano operation platform and other precision rotary tables, and the subsequent operation of the rotary table is obviously adversely affected is well solved.
Therefore, in a preferred embodiment, the dynamic adjustment element 7 is made of piezoelectric ceramics, and the dynamic adjustment element 7 is connected to the controller through a wire, so that the expansion length of the dynamic adjustment element 7 can be adjusted by adjusting the amount of current input into the dynamic adjustment element 7, thereby conveniently realizing dynamic adjustment of the connecting rod 3, and enabling the mover part 2 to rotate a certain angle in the first accommodation groove 102, thereby realizing fine adjustment of the angle of the mover part 2.
Referring to fig. 1 and 2, in another embodiment, in the composite pre-tightening type precision turret exemplified by the above embodiment, a protrusion 301 is provided on a side wall of the link 3 at a position corresponding to the first ram 4, and one end of the first ram 4 abuts against the protrusion 301.
Referring to fig. 1 and 2, in another embodiment, in the composite pre-tightening type precision turret exemplified by the above embodiment, the protrusion 301 extends into the third receiving groove 106 located on the side wall of the second receiving groove 103, the first through hole 104 is located in the third receiving groove 106, the protrusion 301 and the inner wall of the third receiving groove 106 are connected through the flexible member 9, the flexible members 9 are symmetrically connected to both sides of the protrusion 301, and the flexible member 9 is connected to the inner wall of the third receiving groove 106. Therefore, in the process of pressing the protrusion 301, the flexible part 9 deforms along with the movement of the protrusion 301, and the flexible part 9 plays a role of guiding and restraining the connecting rod 3 in the process, so that the adjustment and calibration of the angle of the rotor part 2 are more accurate. The flexible member 9 may be made of plastic or rubber.
Referring to fig. 1 and 2, in another embodiment, in the composite pre-tightening type precision turret exemplified by the above embodiment, one end of the first ram 4 abuts in the first groove on the side wall of the tie rod 3 or the first groove on the protrusion 301 to prevent the first ram 4 from being displaced during the pressing of the tie rod 3.
Referring to fig. 1 and 2, in another embodiment, in the composite pre-tightening type precision turntable exemplified by the above embodiment, the dynamic adjustment member 7 abuts in the second groove on the side wall of the link 3 to prevent the dynamic adjustment member 7 from being displaced during pressing of the link 3.
Finally, it should be understood that any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention. Although the embodiments of the present invention have been described with reference to the accompanying drawings, it is not intended to limit the scope of the present invention, and it should be understood by those skilled in the art that various modifications and variations can be made without inventive efforts by those skilled in the art based on the technical solution of the present invention.
Claims (10)
1. A compound pretension type precision rotary table with adjustable initial rotation angle comprises:
the side wall of the base body extends to form a plurality of extension arms;
a mover part placed in the first accommodation groove at the center of the base;
the connecting rods are connected with a plurality of groups of connecting rods along the circumferential direction of the rotor part, one end of each connecting rod extends into a second accommodating groove, and the second accommodating groove is positioned on the extension arm;
first through holes are formed in the extension arms on two sides of the connecting rod, and a second through hole is formed in the position, adjacent to one first through hole, of the first through holes;
the elastic adjusting mechanism is arranged in each first through hole, and one end of the elastic adjusting mechanism abuts against the side wall of the connecting rod;
and the dynamic adjusting piece is fixed in the second through hole, and one end of the dynamic adjusting piece is abutted against the side wall of the connecting rod.
2. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle according to claim 1, wherein the number of the extension arms is two to four, the two to four extension arms are uniformly distributed on the side wall of the base body, and the connecting rod is arranged in each extension arm.
3. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle according to claim 1, wherein the dynamic adjusting member is detachably connected in the second through hole; preferably, the dynamic adjusting piece is in threaded connection with the second through hole.
4. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle as claimed in claim 1, wherein the dynamic adjusting member is made of piezoelectric ceramics and is connected with the controller through a lead.
5. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle as claimed in claim 1, wherein each first through hole is provided with the elastic adjusting mechanism formed by sequentially connecting a first pressing head, a first elastic member and a first adjusting member, the first pressing head abuts against a side wall of the connecting rod, and the first adjusting member is adjustably connected with the first through hole; preferably, the first adjusting piece is in threaded connection with the first through hole, and one end of the first adjusting piece is located outside the extension arm.
6. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle as claimed in claim 5, wherein a protrusion is provided on a side wall of the connecting rod at a position corresponding to the first pressing head, and one end of the first pressing head abuts against the protrusion; preferably, the protrusion extends into a third accommodating groove located on a side wall of the second accommodating groove, the first through hole is located in the third accommodating groove, and the protrusion is connected with an inner wall of the third accommodating groove through a flexible piece.
7. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle as claimed in claim 6, wherein flexible members are symmetrically connected to both sides of the protrusion, and the flexible members are connected to the inner wall of the third accommodating groove; preferably, the material of the flexible member includes any one of plastic and rubber.
8. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle according to claim 6, wherein one end of the first pressing head abuts in a first groove on a side wall of the connecting rod or a first groove on the protrusion.
9. The composite pre-tightening type precision turntable with adjustable initial rotation angle according to any one of claims 1 to 8, wherein the dynamic adjustment member abuts against a second groove on a side wall of the connecting rod.
10. The composite pre-tightening type precision rotary table with the adjustable initial rotation angle according to any one of claims 1 to 8, wherein the first elastic member comprises any one of a spring and a rubber column.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210528337.4A CN114799934B (en) | 2022-05-16 | 2022-05-16 | Composite pre-tightening type precise turntable with adjustable initial rotation angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210528337.4A CN114799934B (en) | 2022-05-16 | 2022-05-16 | Composite pre-tightening type precise turntable with adjustable initial rotation angle |
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| CN114799934A true CN114799934A (en) | 2022-07-29 |
| CN114799934B CN114799934B (en) | 2023-05-02 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19651232C1 (en) * | 1996-12-10 | 1998-05-07 | Mahr Gmbh | Rotary table for positioning workpieces esp for measuring |
| CN110006454A (en) * | 2019-04-23 | 2019-07-12 | 哈尔滨工业大学 | A kind of method of IMU calibration three-axle table verticality and initial attitude |
| CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
| CN112787542A (en) * | 2021-01-29 | 2021-05-11 | 河南科技大学 | Precise rotary table based on piezoelectric ceramics and control method |
| CN215239273U (en) * | 2021-06-28 | 2021-12-21 | 沃世机械(江苏)有限公司 | Automatic alignment revolving stage machinery original point device |
-
2022
- 2022-05-16 CN CN202210528337.4A patent/CN114799934B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19651232C1 (en) * | 1996-12-10 | 1998-05-07 | Mahr Gmbh | Rotary table for positioning workpieces esp for measuring |
| CN110006454A (en) * | 2019-04-23 | 2019-07-12 | 哈尔滨工业大学 | A kind of method of IMU calibration three-axle table verticality and initial attitude |
| CN110189791A (en) * | 2019-05-31 | 2019-08-30 | 中国工程物理研究院机械制造工艺研究所 | The adjustable micro-nano platform of initial angular errors based on two-way preload |
| CN112787542A (en) * | 2021-01-29 | 2021-05-11 | 河南科技大学 | Precise rotary table based on piezoelectric ceramics and control method |
| CN215239273U (en) * | 2021-06-28 | 2021-12-21 | 沃世机械(江苏)有限公司 | Automatic alignment revolving stage machinery original point device |
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| CN114799934B (en) | 2023-05-02 |
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Address after: 276800 Room 101, floor 1, building 15, new generation information technology industrial park, high tech Zone, Rizhao City, Shandong Province Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Address before: 276800 Room 101, floor 1, building 15, new generation information technology industrial park, high tech Zone, Rizhao City, Shandong Province Patentee before: Rizhao AMI Precision Control Technology Co.,Ltd. |
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Denomination of invention: A composite pre tightening precision turntable with adjustable initial turning angle Granted publication date: 20230502 Pledgee: Qilu Bank Co.,Ltd. Rizhao Branch Pledgor: Ami Precision Control Technology (Shandong) Co.,Ltd. Registration number: Y2024980003192 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |