CN112787542A - Precise rotary table based on piezoelectric ceramics and control method - Google Patents
Precise rotary table based on piezoelectric ceramics and control method Download PDFInfo
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
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Abstract
The invention discloses a precise turntable based on piezoelectric ceramics and a control method thereof, wherein the precise turntable comprises a workbench, the workbench is used for mounting a part to be processed or detected, and an upper supporting table, a lower supporting table and a chassis are arranged below the workbench; the lower supporting platform is arranged below the upper supporting platform and is fixedly connected with the lower end of the upper supporting platform, and a chassis is fixedly arranged at the bottom of the lower supporting platform; the upper supporting table is connected with an air floatation main shaft in an installing way, and the air floatation main shaft comprises a main shaft shell and a main shaft rotor arranged in the main shaft shell; and a torque motor for driving the workbench to rotate and an angle adjusting platform for adjusting the positioning precision of the torque motor are arranged in the lower supporting table. The device adopts a composite structure of the torque motor and the piezoelectric ceramics under the condition of not improving the precision of the existing torque motor, realizes wide-range quick coarse positioning of the angle by using the torque motor, and realizes precise fine adjustment of the angle by using the piezoelectric ceramics mechanism, so that the rotary table meets the requirements of preset or higher-precision quick positioning.
Description
Technical Field
The invention belongs to the technical field of rotary driving, and particularly relates to a precise rotary table based on piezoelectric ceramics and a control method.
Background
The precision turntable is equipment mainly performing rotary motion and integrating light collector and motor, and has important application in the fields of instruments and meters, optical detection, aviation, electronics and the like. The positioning precision of the rotary table is influenced by various factors such as motor precision, part machining precision, assembly precision, structural design, angle measuring instrument precision and the like. The motor and the workbench adopt structures such as a gear rack or a worm gear and the like to generate disadvantages such as reverse clearance, motion lag, vibration and the like; the positioning accuracy of the traditional direct-drive turntable is limited by factors such as the accuracy of a torque motor and an internal encoder, and the cost can be greatly improved and is very difficult to achieve higher accuracy.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provides a precise rotary table based on piezoelectric ceramics and a control method.
In order to achieve the purpose, the invention adopts the following technical scheme: a precise turntable based on piezoelectric ceramics comprises a workbench, wherein the workbench is used for mounting a part to be processed or detected, and an upper supporting table, a lower supporting table and a chassis are arranged below the workbench; the lower supporting platform is arranged below the upper supporting platform and is fixedly connected with the lower end of the upper supporting platform, and a chassis is fixedly arranged at the bottom of the lower supporting platform; the upper support table is connected with an air floatation main shaft in an installing mode, the air floatation main shaft comprises a main shaft shell and a main shaft rotor arranged in the main shaft shell, the main shaft shell is arranged in the upper support table, and the upper end of the main shaft rotor is fixedly connected with the workbench; and a torque motor for driving the workbench to rotate and an angle adjusting platform for adjusting the positioning precision of the torque motor are arranged in the lower supporting table.
According to the scheme, measurement feedback assemblies are arranged at two ends of the spindle rotor and comprise a measurement assembly I and a measurement assembly II, wherein the measurement assembly I is arranged at the upper end of the spindle rotor and comprises an upper circular grating and four upper reading heads distributed in the circumferential direction; the measuring component II is arranged at the lower end of the main shaft rotor and comprises a lower circular grating and four lower reading heads distributed in the circumferential direction; and the measurement feedback assembly is used for detecting and feeding back the rotation positioning precision of the workbench.
According to the scheme, the spindle shell is connected to the upper supporting table, the top supporting frame is arranged on the outer side of the spindle shell, the top supporting frame is fixedly mounted on the upper supporting table, and the top plate is connected to the upper end of the top supporting frame.
The scheme is further improved, torque motor includes motor housing and electric motor rotor, electric motor rotor and motor drive shaft fixed connection, motor drive shaft stretch into in the supporting bench to be connected with the main shaft rotor lower extreme through elastic coupling.
According to the scheme, a chassis shaft is mounted at the upper end of the center of the chassis, a deep groove ball bearing is mounted on the chassis shaft, the inner ring of the deep groove ball bearing is mounted on the chassis shaft, and the angle adjusting platform is supported by the outer ring of the deep groove ball bearing.
According to the scheme, the motor transmission shaft is connected with the elastic coupling through the flat key II, and the lower end of the main shaft rotor is connected with the elastic coupling through the flat key I.
According to the scheme, the angle adjusting platform comprises a piezoelectric ceramic rotating disc, a mounting hole cavity corresponding to the outer ring of the deep groove ball bearing is formed in the lower end of the piezoelectric ceramic rotating disc, the upper end face of the piezoelectric ceramic rotating disc is fixedly connected with the motor shell, and a rotating arm extends outwards from the edge of the piezoelectric ceramic rotating disc.
The scheme is further improved, the angle adjusting platform further comprises an angle control assembly installed on the chassis, the angle control assembly comprises a first stop block and a second stop block which are arranged oppositely, the first stop block and the second stop block are fixed on the chassis, the first stop block is used for fixing piezoelectric ceramics, one side of the piezoelectric ceramics is arranged in a laminating mode with the first stop block, the other side of the piezoelectric ceramics is in contact with the rotating arm, a group of inner holes are formed in the second stop block and the adjacent side of the rotating arm in a corresponding mode, and two ends of the pressure spring are embedded in the inner holes of the second stop block and the rotating arm respectively.
The invention also provides a control method of the precision turntable, which comprises the following specific steps: a rotating and positioning step: the motor rotor is controlled to rotate by an external motion controller, so that the workbench is driven to rotate within a range of 360 degrees, and the workbench is quickly and coarsely positioned; and a measurement feedback step: the rotation angle of the workbench is detected through the measurement feedback assembly, a feedback signal is obtained by comparing the rotation angle with a required preset target position, the feedback signal is sent to the motion controller, and the feedback signal obtained by the motion controller is calculated through the computer system to obtain the angle of the workbench to be corrected; controlling and adjusting: and controlling the piezoelectric ceramics to extend or shorten corresponding size according to the angle to be corrected so as to drive the motor shell and the piezoelectric ceramics to rotate around the center of the chassis shaft to adjust corresponding angles, so that the workbench meets the requirement of accurate angle positioning of a preset target position.
Advantageous effects
1. The invention improves the structure of the precise rotary table by innovation, and leads the rotary table to meet the preset or higher-precision rapid positioning requirement by adopting the composite structure of the torque motor and the piezoelectric ceramics. The specific analysis is as follows: an upper supporting table, a lower supporting table and components thereof are arranged below the workbench, and a torque motor and an angle adjusting platform for finely adjusting the torque motor are arranged in the lower supporting table; under not improving current torque motor angular positioning precision, motor rotor part realizes the quick coarse positioning on a large scale of revolving stage, and piezoceramics utilizes the piezoelectric effect to pass through the piezoceramics rolling disc, and the driving motor shell rotates, realizes the accurate fine setting location of revolving stage, uses high accuracy measurement feedback subassembly simultaneously, and the two circular grating of measurement feedback subassembly is used for measuring the feedback to the rotation positioning precision of workstation. The structure drives through the matching of the control torque motor and the piezoelectric ceramics, so that the workbench can quickly meet the preset or higher angle positioning precision requirement.
2. The invention provides a control method for a precision rotary table, which adopts a method of separately controlling macroscopic regulation and microscopic regulation. The macro regulation and control means that the torque motor is used for realizing the flexible rotation of the rotary table within a large range of 360 degrees by utilizing a motion controller; measuring the rotation angle of the workbench through the double-circle grating and comparing the rotation angle with a required target position to obtain a feedback signal; the microcosmic regulation and control means that after the system calculates the obtained feedback signal, the piezoelectric ceramic is controlled to extend or shorten by corresponding size, and the power torque motor and the workbench part are driven to rotate in a small range of angles, so that the precision rotary table can meet the positioning requirement of a preset angle.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without creative efforts.
FIG. 1 is a front view of a precision turret of the present invention;
FIG. 2 is a cross-sectional view taken at B-B of FIG. 1;
FIG. 3 is a top view of a precision turret of the present invention;
FIG. 4 is a cross-sectional view taken at D-D of FIG. 2;
FIG. 5 is a cross-sectional view taken at E-E of FIG. 4;
the labels in the figure are: 1. the chassis, 2, lower supporting bench, 3, go up the supporting bench, 4, lower reading head, 5, the top support frame, 6, the roof, 7, go up the reading head, 8, go up circular grating, 9, the workstation, 10, go up the reading head, 11, spindle rotor, 12, the main shaft shell, 13, lower circular grating, 14, lower reading head, 15, flat key one, 16, elastic coupling, 17, flat key two, 18, motor drive shaft, 19, motor rotor, 20, motor housing, 21, deep groove ball bearing, 22, chassis axle, 23, first dog, 24, piezoceramics, 25, piezoceramics rolling disc, 26, pressure spring, 27, second dog, 28, lower reading head, 29, lower reading head, 30, go up the reading head, 31, go up the reading head.
Detailed Description
In order to make the technical scheme and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.
As shown in the figure: the embodiment provides a precise turntable based on piezoelectric ceramics, which comprises a workbench 9, wherein the workbench 9 is used for mounting a part to be processed or detected, and an upper supporting table 3, a lower supporting table 2 and a chassis 1 are arranged below the workbench 9; the lower support platform 2 is arranged below the upper support platform 3 and is fixedly connected with the lower end of the upper support platform 3, and the bottom of the lower support platform 2 is fixedly provided with a chassis 1; the upper support table 3, the lower support table 2 and the chassis 1 are connected by screws.
The upper supporting table 3 is connected above the lower supporting table 2, and the upper supporting table 3 is connected with a top supporting frame 5 and a top plate 6. The upper end of the upper supporting table 3 is connected with an air-floatation main shaft, the air-floatation main shaft comprises a main shaft shell 12 and a main shaft rotor 11 in the main shaft shell 12, wherein the main shaft shell 12 is installed on the upper supporting table 3 and fixed through screws, and a gap is formed between the outer circular surface of the lower end part of the main shaft shell 12 and the inner wall of the upper supporting table 3; the upper end of the spindle rotor 11 is fixedly connected with the worktable 9.
The upper end of main shaft housing 12 with go up supporting bench 3 and connect main shaft housing 12's the outside is equipped with top sprag 5, and top sprag 5 passes through screw fixed mounting and is in go up supporting bench 3 is last, has roof 6 at top sprag 5 upper port through the screw connection.
Both ends all are provided with the measurement feedback subassembly about main shaft rotor 11, and the measurement feedback subassembly includes measurement subassembly I and measurement subassembly II, and wherein measurement subassembly I sets up in main shaft rotor 11's upper end, and measurement subassembly II sets up the lower extreme at main shaft rotor 11, and the measurement feedback subassembly is used for detecting and feeding back the rotational positioning precision of workstation 9. The measuring component I comprises an upper circular grating 8 and four upper reading heads arranged around the outside of the upper circular grating 8, namely an upper reading head 7, an upper reading head 10, an upper reading head 30 and an upper reading head 31, the upper circular grating 8 is fixedly arranged at the upper end of a spindle rotor 11 through screws, the four upper reading heads are arranged on a top plate 6 and uniformly distributed around the upper circular grating 8, the measuring component II comprises a lower circular grating 13 and four lower reading heads arranged around the outside of the lower circular grating 13, namely a lower reading head 4, a lower reading head 14, a lower reading head 28 and a lower reading head 29, the lower circular grating 13 is fixedly arranged at the lower end of the spindle rotor 11 through screws, four mounting through holes which are uniformly distributed are formed in the middle section of the circular wall of the upper supporting platform 3 and in the circumferential direction corresponding to the lower circular grating 13, and a lower reading head is correspondingly arranged at each mounting through hole, the upper reading head corresponds to the lower reading head in the upper-lower position. The measuring assemblies I and II can be installed at the upper and lower ends of the spindle rotor 11, or can be installed at the upper or lower ends of the rotor at intervals and other positions, and are not limited to the preferred embodiment of the present invention. One reading head can be selected, or a plurality of reading heads are distributed in the circumferential direction at a certain angle.
In this scheme, measuring component I and measuring component II are circle grating sensor assembly, specifically, it includes scale grating and instruction grating. A scale grating, i.e., a grating ring, mounted on the rotor to rotate together with the spindle rotor 11; the indicating grating is fixed and is arranged in the reading head. The circular grating utilizes the moire fringes of the scale grating and the indication grating to realize the non-contact measurement of the angle. The circular grating angle measurement system adopts a structure that four reading heads are uniformly arranged in the circumferential direction of a grating ring, the average value of the readings of the four reading heads is taken as an angle measurement value, and the influence of the eccentric installation of the grating ring on the angle measurement error can be effectively reduced.
The lower supporting platform 2 is connected with the chassis 1, and a torque motor and an angle adjusting platform for adjusting the positioning accuracy of the torque motor are installed in the lower supporting platform 2. The lower supporting platform 2 is arranged below the upper supporting platform 3 and is fixedly connected with the lower end of the upper supporting platform 3, the chassis 1 is arranged at the bottom of the lower supporting platform 2, the lower supporting platform 2 is fixedly connected with the chassis 1 through screws, the torque motor comprises a motor shell 20 and a motor rotor 19, the motor rotor 19 is fixedly connected with a motor transmission shaft 18, and the motor transmission shaft 18 is connected with the lower end of the spindle rotor 11 through an elastic coupling 16. The motor transmission shaft 18 is connected with the elastic coupling 16 through a flat key II 17, the lower end of the spindle rotor 11 is connected with the elastic coupling 16 through a flat key I15, and the elastic coupling 16 is located inside the upper supporting table 3. The elastic coupling 16 may allow a certain eccentricity of the spindle rotor 11 and the motor drive shaft 18, but may be rigid in the circumferential direction. As the central axis of the main shaft rotor 11 and the central axis of the motor transmission shaft 18 are inevitably subjected to certain eccentric errors during assembly of the air-floating main shaft, the rigid coupling only can play a role in transmitting torque, and the elastic coupling has a flexible part in the coupling, so that the elastic coupling 16 can play a role in compensating various non-centering errors of the two coupling shafts besides transmitting torque and motion, and is selected for connection.
A chassis shaft 22 is installed at the upper end of the center of the chassis 1, the chassis shaft 22 is connected with the chassis 1 through screws, a deep groove ball bearing 21 is sleeved on the chassis shaft 22, the inner ring of the deep groove ball bearing 21 is installed on the chassis shaft 22, and the angle adjusting platform is installed on the outer ring of the deep groove ball bearing 21. The chassis shaft 22 plays a role in installing and positioning the deep groove ball bearing 21, and the adopted deep groove ball bearing 21 can bear certain axial force and radial force at the same time. The deep groove ball bearing 21 is used for supporting the torque motor to do circular motion and can bear the axial force and the radial force transmitted by the piezoelectric ceramic rotating disc 25.
The angle adjusting platform comprises a piezoelectric ceramic rotating disc 25, an installation hole cavity corresponding to the deep groove ball bearing 21 is processed at the lower end of the piezoelectric ceramic rotating disc 25, the deep groove ball bearing 21 is installed in the hole cavity, the piezoelectric ceramic rotating disc 25 is fixedly connected with the motor shell 20 through screws, and the motor rotor 19 is connected with the motor transmission shaft 18. The motor drive shaft 18 is connected to the spindle rotor 11 via an elastic coupling 16 for transmitting a rotational movement.
The piezoceramic rotor disc 25 has rotor arms around its circumference. The angle adjusting platform further comprises an angle control assembly arranged on the chassis 1, the angle control assembly comprises a first stop block 23 and a second stop block 27 which are oppositely arranged, the first stop block 23 and the second stop block 27 are both fixed at the upper end of the chassis 1, the first stop block 23 is used for fixing piezoelectric ceramics 24, one side of the piezoelectric ceramics 24 is fixedly connected with the first stop block 23, the other side of the piezoelectric ceramics 24 is in contact with the rotating arm, a group of inner holes are correspondingly formed in the adjacent sides of the second stop block 27 and the rotating arm, and two ends of the pressure spring 26 are respectively embedded in the inner holes of the second stop block 27 and the rotating arm. First dog 23 and second dog 27 are L shape structure, all include installation arm board and vertical arm board, and the installation arm board sets up in chassis 1's mounting groove, and processing has the draw-in groove that is used for installing piezoceramics 24 on first dog 23's the vertical arm board, and piezoceramics 24's installation end is provided with the fixture block with draw-in groove matched with, and processing threaded hole in the middle of two fixture blocks, piezoceramics 24's thrust side is bulb shape, there is the screw that is used for fixed piezoceramics 24 in first dog 23's the draw-in groove, and piezoceramics 24 installs in the draw-in groove and fixed with screw connection, and piezoceramics 24's bulb lug contacts with the rotor arm of piezoceramics rolling disc 25. The edge of the piezoelectric ceramic rotating disc 25 on the side corresponding to the rotating arm is provided with a balancing weight, so that the piezoelectric ceramic rotating disc 25 can be kept balanced better in rotation adjustment. The pressure spring structure provided by the invention can be flexibly changed according to actual needs, for example, a tension spring can be arranged on one side of the piezoelectric ceramics, and the pressure spring structure is not limited to the embodiment mentioned in the scheme.
When one-half of the inherent stroke of the piezoelectric ceramic 24 is converted into angular displacement through the piezoelectric ceramic rotating disc 25, the angular displacement needs to be larger than the positioning precision of the torque motor, so that the piezoelectric ceramic 24 can conveniently and flexibly compensate the angular displacement error generated by the torque motor in the limited angular stroke. The front end of the piezoelectric ceramic 24 for generating the thrust portion is in a ball head shape. According to the characteristic that the piezoelectric ceramics 4 cannot withstand the distortion, the spherical surface of the front end of the piezoelectric ceramics 24 and the flat surface of the rotating arm of the piezoelectric ceramics rotating disk 25 are in contact with each other for transmitting the thrust.
As shown in fig. 4, when the piezoelectric ceramic 24 is not energized, i.e. in a zero position, the thrust generated by the compression spring 26 should be larger than the friction torque of the deep groove ball bearing 21. When the motor is just powered on, the piezoelectric ceramic 24 should move a positive half of the inherent stroke towards the second stopper 27 (i.e. in the Y direction), and at this time, the piezoelectric ceramic 24 and the compression spring 26 play a certain role in fixing the torque motor, so that the motor housing 20 does not rotate left and right when the motor rotor 19 rotates. After the torque motor finishes a large stroke, the piezoelectric ceramic 24 can extend in the positive direction or the negative direction, and the piezoelectric ceramic is matched with the pressure spring 26 to control the motor shell 20 to rotate in the positive direction or the reverse direction, so that the rotary table meets the preset or higher positioning precision requirement. The motor rotor 19 drives the spindle rotor 11 and the workbench 9 to realize large-range rapid coarse positioning of the rotary table, the piezoelectric ceramic rotary disc 25 bears the thrust of the piezoelectric ceramic 24 or the pressure of the pressure spring 26 to rotationally drive the torque motor part, namely, the piezoelectric ceramic 24 drives the motor shell 20 through the piezoelectric ceramic rotary disc 25 to realize precise fine adjustment of the rotary table, so that the rotary table reaches the preset position or the higher positioning precision requirement.
The scheme also provides a control method of the precision rotary table, which comprises the following specific steps of: the motor rotor 19 is controlled to rotate through the motion controller, so that the workbench 9 is driven to rotate within the range of 360 degrees, and the rapid coarse positioning of the workbench 9 is realized; and a measurement feedback step: the rotation angle of the workbench 9 is detected through the measurement feedback assembly, a feedback signal is obtained by comparing the rotation angle with a required preset target position, the feedback signal is sent to the motion controller, and the motion controller obtains the feedback signal and calculates to obtain an angle needing to be corrected; controlling and adjusting: and controlling the extension or the shortening of the corresponding size of the piezoelectric ceramics 24 according to the correction angle so as to drive the motor shell 20 and the piezoelectric ceramics rotating disc 25 to rotate around the center of the chassis shaft 22 to adjust the corresponding angle, so that the workbench 9 meets the accurate positioning requirement of a preset target position.
The control method adopts a method of separately controlling coarse positioning and precise positioning. Wherein, the step of rotating and positioning refers to that a torque motor realizes the flexible rotation of the rotary table within a large range of 360 degrees by utilizing a motion controller; in the measurement feedback assembly, the double-circle grating is used for measuring the rotation angle of the workbench 9 and comparing the rotation angle with a required target position to obtain a feedback signal, and the double-circle grating forms a feedback link and is used for carrying out real-time online measurement on the angle position of the workbench 9; the calculation control step means that the system calculates the obtained feedback signal to control the extension or the shortening of the corresponding size of the piezoelectric ceramics 24, and drives the torque motor and the whole part of the workbench 9 to rotate in a small-range angle, so that the angle positioning error generated by the rotary table is corrected, and the precision rotary table can meet the requirement of a preset angle position.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (9)
1. The utility model provides a precision revolving stage based on piezoceramics which characterized in that: the device comprises a workbench (9), wherein the workbench (9) is used for mounting a part to be processed or detected, and an upper supporting table (3), a lower supporting table (2) and a chassis (1) are arranged below the workbench (9); the lower supporting platform (2) is arranged below the upper supporting platform (3) and is fixedly connected with the lower end of the upper supporting platform (3), and the bottom of the lower supporting platform (2) is fixedly provided with a chassis (1); the upper supporting table (3) is connected with an air-floatation main shaft in an installing mode, the air-floatation main shaft comprises a main shaft shell (12) and a main shaft rotor (11) installed in the main shaft shell (12), the main shaft shell (12) is installed in the upper supporting table (3), and the upper end of the main shaft rotor (11) is fixedly connected with the workbench (9); a torque motor for driving the workbench (9) to rotate and an angle adjusting platform for adjusting the positioning precision of the torque motor are arranged in the lower supporting platform (2).
2. A precision turntable based on piezoceramic according to claim 1, wherein: the measuring and feedback device comprises a main shaft rotor (11), wherein measuring and feedback components are arranged at two ends of the main shaft rotor (11) and comprise a measuring component I and a measuring component II, the measuring component I is arranged at the upper end of the main shaft rotor (11) and comprises an upper circular grating (8) and four upper reading heads (7, 10, 30 and 31) distributed in the circumferential direction; the measuring component II is arranged at the lower end of the spindle rotor (11) and comprises a lower circular grating (13) and four lower reading heads (4, 14, 28 and 29) distributed in the circumferential direction; the measurement feedback assembly is used for detecting and feeding back the rotation positioning precision of the workbench (9).
3. A precision turntable based on piezoceramic according to claim 1, wherein: spindle housing (12) is connected on last brace table (3) the outside of spindle housing (12) is provided with top sprag frame (5), top sprag frame (5) fixed mounting be in on last brace table (3), be connected with roof (6) on top sprag frame (5).
4. A precision turntable based on piezoceramic according to claim 1, wherein: the torque motor comprises a motor shell (20) and a motor rotor (19), the motor rotor (19) is fixedly connected with a motor transmission shaft (18), and the motor transmission shaft (18) extends into the upper supporting table (3) and is connected with the lower end of the main shaft rotor (11) through an elastic coupling (16).
5. A precision turntable based on piezoceramic according to claim 4, wherein: a chassis shaft (22) is mounted at the upper end of the center of the chassis (1), a deep groove ball bearing (21) is mounted on the chassis shaft (22), the inner ring of the deep groove ball bearing (21) is mounted on the chassis shaft (22), and the angle adjusting platform is supported and arranged on the outer ring of the deep groove ball bearing (21).
6. A precision turntable based on piezoceramic according to claim 4, wherein: the motor transmission shaft (18) is connected with the elastic coupling (16) through a flat key II (17), and the lower end of the main shaft rotor (11) is connected with the elastic coupling (16) through a flat key I (15).
7. A precision turntable based on piezoceramic according to claim 5, wherein: the angle adjusting platform comprises a piezoelectric ceramic rotating disc (25), an installation hole cavity corresponding to the outer ring of the deep groove ball bearing (21) is formed in the lower end of the piezoelectric ceramic rotating disc (25), the upper end face of the piezoelectric ceramic rotating disc (25) is fixedly connected with the motor shell (20), and a rotating arm extends outwards from the edge of the piezoelectric ceramic rotating disc (25).
8. A precision turntable based on piezoceramic according to claim 7, wherein: the angle adjusting platform further comprises an angle control assembly installed on the chassis (1), the angle control assembly comprises a first stop block (23) and a second stop block (27) which are arranged oppositely, the first stop block (23) and the second stop block (27) are fixed on the chassis (1), the first stop block (23) is used for fixing piezoelectric ceramics (24), one side of the piezoelectric ceramics (24) is attached to the first stop block (23), the other side of the piezoelectric ceramics (24) is in contact with the rotating arm, a group of inner holes are formed in the second stop block (27) and the adjacent side of the rotating arm in a corresponding mode, and two ends of the pressure spring (26) are embedded in the inner holes of the second stop block (27) and the rotating arm respectively.
9. A control method of a precision turntable is characterized in that: the method comprises the following specific steps:
a rotating and positioning step: the motor rotor (19) is controlled to rotate by an external motion controller, and the workbench (9) is driven to rotate within a range of 360 degrees, so that the workbench (9) is quickly and coarsely positioned;
and a measurement feedback step: the rotation angle of the workbench (9) is detected through the measurement feedback assembly, a feedback signal is obtained by comparing the rotation angle with a required preset target position, the feedback signal is sent to the motion controller, and the feedback signal obtained by the motion controller is calculated through a computer system to obtain the angle of the workbench (9) to be corrected;
controlling and adjusting: the extension or the shortening of the corresponding size of the piezoelectric ceramics (24) is controlled according to the angle required to be corrected so as to drive the motor shell (20) and the piezoelectric ceramics rotating disc (25) to rotate around the center of the chassis shaft (22) to adjust the corresponding angle, so that the workbench (9) meets the accurate angle positioning requirement of the preset target position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110122428.3A CN112787542A (en) | 2021-01-29 | 2021-01-29 | Precise rotary table based on piezoelectric ceramics and control method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110122428.3A CN112787542A (en) | 2021-01-29 | 2021-01-29 | Precise rotary table based on piezoelectric ceramics and control method |
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| CN112787542A true CN112787542A (en) | 2021-05-11 |
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| CN202110122428.3A Pending CN112787542A (en) | 2021-01-29 | 2021-01-29 | Precise rotary table based on piezoelectric ceramics and control method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114799934A (en) * | 2022-05-16 | 2022-07-29 | 日照阿米精控科技有限公司 | Initial corner adjustable compound pretension type precision rotary table |
| CN115603630A (en) * | 2022-12-14 | 2023-01-13 | 四川大学（Cn） | Method for quickly determining reference zero point of servo motor in high-precision situation |
| WO2023082268A1 (en) * | 2021-11-15 | 2023-05-19 | 爱佩仪测量设备有限公司 | High-precision rotary table and angle calibration method used thereby |
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2021
- 2021-01-29 CN CN202110122428.3A patent/CN112787542A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023082268A1 (en) * | 2021-11-15 | 2023-05-19 | 爱佩仪测量设备有限公司 | High-precision rotary table and angle calibration method used thereby |
| CN114799934A (en) * | 2022-05-16 | 2022-07-29 | 日照阿米精控科技有限公司 | Initial corner adjustable compound pretension type precision rotary table |
| CN115603630A (en) * | 2022-12-14 | 2023-01-13 | 四川大学（Cn） | Method for quickly determining reference zero point of servo motor in high-precision situation |
| CN115603630B (en) * | 2022-12-14 | 2023-03-10 | 四川大学 | Method for quickly determining reference zero point of servo motor in high-precision situation |
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