CN114576507B - Two-dimensional precision rotary table driven by ultrasonic motor - Google Patents
Two-dimensional precision rotary table driven by ultrasonic motor Download PDFInfo
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- CN114576507B CN114576507B CN202210214470.2A CN202210214470A CN114576507B CN 114576507 B CN114576507 B CN 114576507B CN 202210214470 A CN202210214470 A CN 202210214470A CN 114576507 B CN114576507 B CN 114576507B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/08—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting around a vertical axis, e.g. panoramic heads
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/10—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting around a horizontal axis
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/20—Undercarriages with or without wheels
- F16M11/22—Undercarriages with or without wheels with approximately constant height, e.g. with constant length of column or of legs
Abstract
The invention designs a two-dimensional precise rotary table driven by an ultrasonic motor, which comprises a pitching floating shaft system, an azimuth floating shaft system, a base and a U-shaped frame, wherein the pitching floating shaft system and the azimuth floating shaft system respectively comprise an ultrasonic motor driving device and an encoder angle measuring device, the two-dimensional precise rotary table is driven by the hollow ultrasonic motor, the pitching floating shaft system and the azimuth floating shaft system are used as motion carriers, and the pitching floating shaft system and the azimuth floating shaft system and the high-precision encoder are used as sensors to form a closed-loop feedback system together, so that precise angular displacement is cooperatively output. The precise two-dimensional turntable is driven by the hollow ultrasonic motor, and has the characteristics of high positioning precision, high response speed and small driving mechanism; the pitching shafting and the azimuth shafting are designed in a fusion mode with the ball-sealed bearings, so that the two shafting can bear axial loads and radial loads, the rotary motion precision of the shafting is improved based on the error homogenization effect of the ball-sealed bearings, the service life of the precision rotary table is prolonged, and the automatic centering function of the floating shafting is realized after the shafting motion is finished.
Description
Technical Field
The invention belongs to the field of precision measurement, and particularly relates to a two-dimensional precision rotary table driven by an ultrasonic motor.
Background
A precision turret is a device that mainly performs a rotational motion and integrates optical and electrical functions, and is widely used in various precision optical instruments, such as a laser tracker, a total station, and the like. The positioning accuracy of the platform is influenced by various factors such as motor accuracy, part machining accuracy, assembly accuracy, structural design accuracy and measuring instrument accuracy. The research of the ultrasonic motor starts in the last 60 years, and the ultrasonic motor utilizes the inverse piezoelectric effect of the piezoelectric material, applies an alternating current signal on the piezoelectric material to generate an alternating electric field, further excites the vibration of the piezoelectric material in an ultrasonic frequency band, amplifies the vibration, converts the vibration into the motion of a motor rotor through the friction action, and outputs the motion as power and drives other loads. Compared with the traditional motor, the ultrasonic motor has the advantages of low rotating speed, large torque, high response speed, power failure self-locking, no electromagnetic interference, small volume, high power density, good start-stop controllability, high displacement resolution and the like.
In a traditional electromagnetic motor driving structure, a motor and a shafting are mainly in speed reduction transmission by adopting structures such as a straight gear, a bevel gear or a turbine, a worm rod and the like, and movement among the components can generate reverse clearance, lag and vibration, so that high precision is difficult to realize, and the driving structure has the defects of large occupied space of a speed reduction mechanism and the like.
The positioning precision of a traditional electromagnetic motor direct-drive turntable is limited by factors such as the precision of a torque motor and an internal encoder, and if the precision is very high, the cost is extremely high and the implementation mode is difficult. In a smaller turntable, the area is limited, and the torque ratio of the electromagnetic direct drive motor is small.
When the traditional precision turntable is subjected to external impact due to factors such as transportation and the like, the precision of the turntable is easy to damage; the structural design of the shafting can not realize automatic centering, and only can reduce motion errors by means of an algorithm.
Disclosure of Invention
In order to solve the problems, the invention designs a two-dimensional precise rotary table driven by an ultrasonic motor. The turntable includes: pitching floating shaft system, azimuth floating shaft system, base and U-shaped frame. This scheme of adoption very big degree has increased the gyration precision and the drive accuracy of shafting and has prolonged the life of two-dimentional accurate revolving stage.
Preferably, the pitching floating shaft system and the azimuth floating shaft system are respectively arranged on the U-shaped frame and the base through a dense ball shaft system structure. The dense bead shafting structure consists of: the ball-sealing device comprises a shaft sleeve, a main shaft, a steel ball, a main ball-sealing retainer, a first end face ball-sealing retainer, a second end face ball-sealing retainer, a pressing end cover, a disc spring and a ball-sealing locking nut. The main shaft and the shaft sleeve are coaxially assembled, a main dense ball retainer and a steel ball are arranged between the main shaft and the shaft sleeve, and the steel ball is in proper interference fit with the main shaft and the shaft sleeve; the two ends of the shaft sleeve are respectively provided with an end face dense ball retainer which is coaxial with the main shaft, a steel ball of the first end face dense ball retainer is pressed by a shaft shoulder of the main shaft and the end face of the shaft sleeve, a steel ball in the second end face dense ball retainer is pressed by a pressing sleeve and the end face of the shaft sleeve, the pressing sleeve is in clearance fit with the main shaft, and pressing force is provided by a disc spring and a dense ball locking nut.
Preferably, the ball holes of the ball cage are arranged spirally and uniformly. The pressing sleeve limits the axial movement of the main dense ball retainer and enables the dense balls of the end surface dense ball retainer to tightly cling to the end surface of the shaft sleeve. The disc spring is sleeved between the pressing sleeve and the dense bead locking nut screwed into the threads of the main shaft, and the pressing force is controlled by the screwing depth of the dense bead locking nut into the threads.
The design integrates the dense ball bearing and the rotating shaft, realizes the miniaturization of the structure and ensures the precision of radial rotary motion; the disc spring and the adjustable axial pretightening force are introduced into the shaft system, so that the axial vibration and the axial impact of the shaft system can be reduced. In the pitching axis, the left and right dense-bead axis structures fixed on the U-shaped frame are arranged in a mirror image manner, so that the influence of the thermal deformation of the material on the precision of the pitching axis can be reduced.
Preferably, supersound motor drive arrangement adopts cavity type supersound motor to provide drive power, and cavity type supersound motor adopts the structure of deciding, rotor disconnect-type installation, fuses the design with the main shaft, and drive arrangement includes: the ultrasonic motor comprises an ultrasonic motor stator, an ultrasonic motor rotor, a motor support, a bearing, a spring, a locking nut and the like; the driving device on the pitching axis system is different from the driving device on the azimuth axis system in installation.
Preferably, in the ultrasonic motor driving device on the pitching shaft system, the rotor is fixed on the shaft shoulder through a screw; the stator is glued on the motor support, the bearing is embedded in the bearing hole of the motor support, the outer ring of the bearing is in interference fit with the motor support, the inner ring of the bearing is in clearance fit with the main shaft, and the locking spring and the locking nut on the outer side of the bearing provide pre-pressure between the stator and the rotor of the ultrasonic motor.
Preferably, in the ultrasonic motor driving device on the azimuth axis, the stator is fixed on the shaft shoulder through a screw, a coaxial through hole is formed in the shaft, and the ultrasonic motor stator rotates along with the shaft in an internal wiring mode and is powered by a slip ring on the azimuth axis; the rotor is glued on the motor support, the bearing is embedded in a bearing hole of the motor support, the bearing is in clearance fit with the main shaft, and the pre-pressure between the stator and the rotor of the ultrasonic motor is provided by the spring and the locking nut on the outer side of the bearing.
Preferably, the shafting floating mechanism comprises a limiting frame, a limiting fork frame, a spring and a steel ball; the upper limit frame of the azimuth axis system is fixed in the base, and the upper limit frame of the pitching axis system is fixed on the U-shaped frame; the forked end of the limiting fork frame is fixed on the motor support by a screw, a spring and two steel balls are placed in a through hole coaxial with the cylindrical end in the cylindrical end, and the two steel balls are positioned at two ends of the spring and are propped against the limiting frame under the action of elastic force. When the ultrasonic motor is turned off, due to the self-locking effect of the ultrasonic motor, the shaft system rotates under the action of external force to drive the stator and the rotor of the ultrasonic motor and the limiting fork frame arranged on the stator or the rotor to rotate together, and then the shaft system can restore to the original position under the action of the limiting frame and the spring; when the ultrasonic motor is started, the stator and the rotor rotate relatively, one of the stator and the rotor is limited and fixed by the floating mechanism, and the other one drives the rotation of the shaft; at the moment of starting the ultrasonic motor, under the action of the shafting floating mechanism, the impact between the stator and the rotor can be reduced, and the stable starting is realized; after the movement is finished, automatic centering can be realized under the action of the floating mechanism.
Preferably, the two encoder angle measuring devices are respectively arranged on the pitch axis and the azimuth axis; the encoder is arranged on the azimuth axis, a rotor of the encoder is fixed on a shaft shoulder of the rotating shaft by a screw, and a stator of the encoder is fixed on a shaft sleeve by a screw; the encoder installed on the pitching shaft is arranged in a mirror image mode with the ultrasonic motor, the rotor of the encoder is fixed on the shaft shoulder of the rotating shaft through screws, and the stator of the encoder is fixed on the U-shaped frame through a support. The distance between the stator and the rotor of the encoder is kept between 0.35 and 0.45mm.
Has the advantages that: compared with the prior art, the invention has the beneficial effects that:
the spindle, the dense ball bearing and the hollow ultrasonic motor are designed in a fusion mode, the structure is simple and reliable, equipment miniaturization can be achieved, and the carrying is convenient; the main assembly process can be completed by one-time clamping, so that the assembly precision can be improved, and high coaxiality can be realized;
based on the error homogenization effect of the dense beads in the dense bead shafting structure, the rotation precision of the system is improved; the disc spring and the adjustable locking nut are introduced into the dense ball shafting structure to provide axial pretightening force, and when the shafting is subjected to axial impact load, the axial vibration of the shafting can be reduced. The left and right dense-bead shaft system structures in the pitch shaft system are arranged in a mirror image manner, so that the influence of the thermal deformation of materials on the accuracy of the pitch shaft system can be reduced.
The hollow ultrasonic motor is adopted to drive the output of low-speed large torque without a speed reducer, so that a series of problems of vibration, impact and noise, low efficiency, difficult control and the like caused by gear speed change are avoided without additional speed change structures such as gears, the ultrasonic motor has the characteristics of high torque-weight ratio, power-off self-locking and no fear of electromagnetic interference, and in addition, the ultrasonic motor has high displacement resolution, good start-stop controllability and can realize accurate positioning.
The shafting floating mechanism can provide effective buffering when the shafting is subjected to external torque, and the precision of the two-dimensional rotary table is not easy to damage; when the ultrasonic motor is started, elastic starting can be realized, relative displacement between the stator and the rotor is reduced, and driving precision is ensured; after the shafting movement stops, the automatic centering of the shafting can be realized under the action of the floating mechanism.
Drawings
FIG. 1 is a schematic three-dimensional structure of the present invention;
FIG. 2 is a schematic structural cross-sectional view of the present invention;
FIG. 3 is a partially enlarged schematic view of the first ultrasonic motor driving apparatus according to the present invention;
FIG. 4 is a partially enlarged view of the first encoder angle-measuring device according to the present invention;
FIG. 5 is a partially enlarged schematic view of a second ultrasonic motor driving structure according to the present invention;
FIG. 6 is a schematic structural diagram of a first floating mechanism according to the present invention;
fig. 7 is a structural diagram of a second floating mechanism of the present invention.
The labels in the figure are: 1. a pitching floating shaft system; 2. an azimuth floating shafting; 3. an azimuth axis lock nut; 4. an azimuth axis; 5. an azimuth axis spring; 6. an azimuth axis bearing; 7. a base; 8. an azimuth axis limiting fork frame; 9. an azimuth axis limit spring; 10. an azimuth axis motor support; 11. an azimuth axis ultrasonic motor rotor; 12. an azimuth axis ultrasonic motor stator; 13. an azimuth axis ball-sealing lock nut; 14. an azimuth axis disc spring, 15 and an azimuth axis dense bead pressing sleeve; 16. an azimuth axis is provided with dense beads; 17. A first dense ball retainer on the end face of the azimuth shaft; 18. an azimuth axis main dense ball retainer; 19. an azimuth axis sleeve; 20. a second dense ball retainer on the end face of the azimuth shaft; 21. an azimuth axis encoder rotor; 22. an azimuth axis encoder stator; 23. an azimuth axis limiting seat; 24. an azimuth axis limiting steel ball; 25. a housing; 26. a U-shaped frame; 27. a pitch shaft encoder stator support; 28. an encoder stator bushing; 29. a pitch shaft encoder rotor; 30. a pitch axis encoder stator; 31. a dense ball retainer at the first end face of the pitching shaft; 32. a pitch shaft second end face dense bead retainer; 33. a pitch axis dense bead; 34. a main dense ball retainer of the pitching shaft; 35. A pitch shaft dense ball locking nut; 36. the pitching shaft is tightly pressed by the sleeve; 37. a pitch shaft disc spring; 38. a pitch shaft sleeve; 39. a pitch axis; 40. a pitch axis ultrasonic motor rotor; 41. a pitch axis ultrasonic motor stator; 42. a pitch axis motor support; 43. a pitch shaft bearing; 44. a pitch shaft spring; 45. a pitch shaft lock nut; 46. a pitching shaft limiting fork frame; 47. a pitch shaft limit spring; 48. a pitch shaft limiting frame; 49. and a pitching shaft limiting steel ball.
Detailed Description
In order to make the technical solutions and advantages of the present invention more precisely understood, the present invention is further described in detail with reference to the accompanying drawings and specific embodiments.
As shown in the structural schematic diagrams 1 and 2 of the present invention, the azimuth floating shaft system 2 is installed on the base 7, and the pitch floating shaft system 1 is installed on the azimuth floating shaft system 2 through the U-shaped frame 26. The pitching floating shaft system 1 is strictly orthogonal to the azimuth floating shaft system 2, a scientific instrument can be arranged on the pitching floating shaft system 1 in the middle of the U-shaped frame 26, and the left part and the right part of the pitching floating shaft system 1 are strictly coaxial.
Specifically, the pitching floating shaft system 1 is fixed on a U-shaped frame 26 through a pitching shaft sleeve 38 by screws, a main dense bead retainer 34 and a first end surface dense bead retainer 31 are arranged on the pitching shaft 39 and the shaft sleeve 38, a second end surface dense bead retainer 32 is arranged between a pressing sleeve 36 and the shaft sleeve 38, dense beads 33 which are arranged in a spiral manner are arranged in the dense bead retainer, and the dense beads 33, the shaft sleeve 38 and the pitching shaft 39 have proper interference; the dense balls 33 between the shaft sleeve 38 and the pressing sleeve 36 are provided with pressure by a disc spring 37, and the pressure is controlled by a pitch shaft dense ball locking nut 35; an ultrasonic motor driving device is arranged on the left side of the pitching shaft 39, an ultrasonic motor rotor 40 is fixed on a shaft shoulder of the pitching shaft 39 through screws, an ultrasonic motor stator 41 is fixed on a motor support 42 through screws, the outer ring of a bearing 43 is in interference fit with the motor support 42, the inner ring of the bearing 43 is in clearance fit with the pitching shaft 39, and a locking nut 45 and a spring 44 on the left side provide pressure between the ultrasonic motor stator 41 and the rotor 40.
The azimuth floating shaft system 2 is fixed by a shaft sleeve 19 and a base 7 through threaded connection, a main dense ball retainer 18 and a first end surface dense ball retainer 20 are arranged between the azimuth shaft 4 and the shaft sleeve 19, a second end surface dense ball retainer 17 is arranged between a pressing sleeve 15 and the shaft sleeve 19, steel balls 16 which are arranged in a spiral line are arranged in the dense ball retainers 17, 18 and 20, and the steel balls 16, the shaft sleeve 19 and the azimuth shaft 4 have proper interference; the steel ball between the shaft sleeve 19 and the pressing sleeve 15 is provided with pressure by the disc spring 14, and the pressure is controlled by the azimuth shaft dense ball locking nut 13; an ultrasonic motor driving device is installed at the lower end of the azimuth shaft 4, an ultrasonic motor stator 12 is fixed on a shaft shoulder of the azimuth shaft 4 through screws, an ultrasonic motor rotor 11 is fixed on a motor support 10 through screws, the outer ring of a bearing 6 is in interference fit with the motor support, the inner ring of the bearing 6 is in clearance fit with the azimuth shaft 4, and a locking nut 3 and a spring 5 at the lower end provide pressure between the ultrasonic motor stator 12 and the rotor 11.
As shown in fig. 4, an encoder angle measuring device is mounted on the right side of the pitch shaft 39, the encoder rotor 29 is fixed to the pitch shaft 39 through the encoder rotor bushing 28, and the encoder stator 30 is fixed to the U-shaped frame 26 through the encoder stator bracket 27.
The upper end of the azimuth axis is provided with another encoder, a rotor 21 of the encoder is fixed on the shaft shoulder of the azimuth axis 4 by screws, and a stator 22 of the encoder is fixed on the shaft sleeve 19 by screws.
As shown in fig. 2 and 6, a floating mechanism is arranged on the left side of the pitching shaft 39, a limiting fork 47 is fixed with a stator support 44 by a screw, a spring 47 and two steel balls 49 are arranged in the cylindrical end of the limiting fork 46, and the steel balls 49 are positioned at the two ends of the spring 47 and are propped against the limiting fork 46 under the action of elastic force.
As shown in fig. 2 and 7, the lower end of the azimuth axis 4 is provided with a floating mechanism, the limiting fork 8 is fixed with the motor support 10 by a screw, a spring 9 and two steel balls 23 are arranged in the cylindrical end of the limiting fork, and the two steel balls 23 are positioned at the two ends of the spring 9 and are propped against the limiting seat 24 under the action of elastic force.
As shown in fig. 3 and 5, when the ultrasonic motor is turned off, due to the self-locking effect of the ultrasonic motor, the shaft rotates under the action of an external force to drive the stators 12 and 41 and the rotors 11 and 40 of the ultrasonic motor, and the limit fork frame 46 and the limit fork frame 8 which are respectively installed on the stator 41 and the rotor 11 to rotate together, and then return to the original positions under the action of elastic forces of the limit seats 48 and 24 and the springs 47 and 9, so that automatic centering is realized; at the moment of starting the ultrasonic motor, under the action of the shafting floating mechanism, the impact between the stator and the rotor can be reduced, and stable starting is realized.
While the invention has been described in terms of what are presently considered to be the most practical and preferred embodiments, it will be understood by those skilled in the art that various changes and substitutions can be made without departing from the spirit and scope of the invention as defined by the appended claims. The invention is not described in detail in the prior art.
Claims (5)
1. The two-dimensional precision turntable driven by the ultrasonic motor is characterized by comprising a base (7), wherein an orientation floating shaft system (2) is arranged on the base (7), a U-shaped frame (26) is arranged on the orientation floating shaft system (2), the orientation floating shaft system (2) is bilaterally and symmetrically connected with a pitching floating shaft system (1) through the U-shaped frame (26), the left pitching floating shaft system and the right pitching floating shaft system (1) are arranged on the U-shaped frame (26) through a first dense bead shaft system structure, the orientation floating shaft system (2) is arranged on the base (7) through a second dense bead shaft system structure, a first ultrasonic motor driving device is arranged on the pitching floating shaft system (1) on the left side, a second ultrasonic motor driving device is arranged below the orientation floating shaft system (2), the pitching floating shaft system (1) is orthogonal to the orientation floating shaft system (2), and the two pitching floating shaft systems (1) are coaxial in the horizontal direction;
the first dense ball shafting structure comprises a pitching shaft first end face dense ball retainer (31), a pitching shaft second end face dense ball retainer (32), a pitching shaft dense ball (33), a pitching shaft main dense ball retainer (34), a pitching shaft dense ball locking nut (35), a pitching shaft pressing sleeve (36), a pitching shaft disc spring (37), a pitching shaft sleeve (38) and a pitching shaft (39);
the two pitching floating shafting (1) comprise first dense bead shafting structures, each first dense bead shafting structure is fixed on the U-shaped frame (26) through a pitching shaft sleeve (38) through a screw, a pitching shaft main dense bead retainer (34) and a pitching shaft first end surface dense bead retainer (31) are arranged in a gap between the pitching shaft (39) and the pitching shaft sleeve (38), a pitching shaft second end surface dense bead retainer (32) is arranged in a gap between the pitching shaft pressing sleeve (36) and the pitching shaft sleeve (38), the pitching shaft first end surface dense bead retainer (31), the pitching shaft second end surface dense bead retainer (32) and the pitching shaft main dense bead retainer (34) are all provided with spirally arranged pitching shaft dense beads (33), and the pitching shaft sleeve (38) and the pitching shaft (39) are provided with proper interference; the pitch shaft dense ball (33) between the pitch shaft sleeve (38) and the pitch shaft compression sleeve (36) is provided with pressure by the pitch shaft disc spring (37), the pitch shaft disc spring (37) is installed between the pitch shaft compression sleeve (36) and the pitch shaft dense ball locking nut (35), the pitch shaft dense ball locking nut (35) is in threaded connection with the pitch shaft (39), and the pressure is controlled by the screwing depth of the pitch shaft dense ball locking nut (35);
the first ultrasonic motor driving device comprises a pitching shaft ultrasonic motor rotor (40), a pitching shaft ultrasonic motor stator (41), a pitching shaft motor support (42), a pitching shaft bearing (43), a pitching shaft spring (44) and a pitching shaft locking nut (45);
the ultrasonic pitch shaft motor rotor (40) is fixed on a shaft shoulder of the pitch shaft (39) through screws, the ultrasonic pitch shaft motor stator (41) is fixed on the motor pitch shaft motor support (42) through screws, the motor pitch shaft support (42) is coaxial with the pitch shaft (39), the ultrasonic pitch shaft motor stator is installed on the pitch shaft (39) through a pitch shaft bearing (43) embedded in a hole of the motor pitch shaft support (42), the outer ring of the pitch shaft bearing (43) is in interference fit with the hole of the motor pitch shaft support (42), the inner ring of the pitch shaft bearing (43) is in clearance fit with the pitch shaft (39), the motor pitch shaft support (42) is provided with pressure through a pitch shaft locking nut (45) and a pitch shaft spring (44), the pitch shaft spring (44) is installed between the pitch shaft bearing (43) and the pitch shaft locking nut (45), two end faces of the pitch shaft spring (44) respectively abut against the end face of the inner ring of the pitch shaft bearing (43) and the end face of the pitch shaft locking nut (45), the pitch shaft locking nut (45) is in threaded connection with the pitch shaft locking nut (45), and the ultrasonic pitch shaft locking nut (39) is screwed into the ultrasonic pitch shaft stator, and the pitch shaft stator is used for controlling the depth of the pitch shaft motor stator (41).
2. The ultrasonic motor-driven two-dimensional precision rotary table as claimed in claim 1, wherein the second dense ball shafting structure comprises an azimuth shaft dense ball locking nut (13), an azimuth shaft disc spring (14), an azimuth shaft dense ball pressing sleeve (15), an azimuth shaft dense ball (16), an azimuth shaft end face first dense ball retainer (17), an azimuth shaft main dense ball retainer (18), an azimuth shaft sleeve (19), an azimuth shaft end face second dense ball retainer (20) and an azimuth shaft (4);
the azimuth floating shafting (2) comprises a second dense-bead shafting structure, the second dense-bead shafting structure is fixedly connected with the base (7) through the azimuth shaft sleeve (19) in a threaded manner, the azimuth shaft main dense-bead retainer (18) and the azimuth shaft end face second dense-bead retainer (20) are arranged in a gap between the azimuth shaft (4) and the azimuth shaft sleeve (19), the azimuth shaft end face first dense-bead retainer (17) is arranged in a gap between the azimuth shaft dense-bead compression sleeve (15) and the azimuth shaft sleeve (19), the azimuth shaft end face first dense-bead retainer (17), the azimuth shaft main dense-bead retainer (18) and the azimuth shaft end face second dense-bead retainer (20) are all provided with azimuth shaft dense beads (16) which are arranged in a spiral manner, and proper interference is arranged among the azimuth shaft dense beads (16), the azimuth shaft sleeve (19) and the azimuth shaft (4); the azimuth axis shaft sleeve (19) and the azimuth axis dense bead (16) between the azimuth axis dense bead pressing sleeve (15) are pressed by the azimuth axis disc spring (14), the azimuth axis disc spring (14) is installed between the azimuth axis dense bead pressing sleeve (15) and the azimuth axis dense bead locking nut (13), and the azimuth axis dense bead locking nut (13) is in threaded connection with the azimuth axis (4) and is screwed in the azimuth axis dense bead locking nut (13) to adjust the pressure.
3. An ultrasonic motor-driven two-dimensional precision rotary table according to claim 2, wherein said second ultrasonic motor driving means comprises an azimuth axis lock nut (3), an azimuth axis spring (5), an azimuth axis bearing (6), an azimuth axis motor bearing (10), an azimuth axis ultrasonic motor rotor (11), an azimuth axis ultrasonic motor stator (12);
the second ultrasonic motor driving device is arranged at the lower end of the azimuth axis (4), the azimuth axis ultrasonic motor stator (12) is fixed on the shaft shoulder of the azimuth axis (4) by a screw, the azimuth axis ultrasonic motor rotor (11) is fixed on the azimuth axis motor support (10) by screws, the azimuth axis motor support (10) is coaxial with the azimuth axis (4), and is arranged on the azimuth axis (4) through an azimuth axis bearing (6) embedded into an inner hole of the azimuth axis motor support (10), the outer ring of the azimuth axis bearing (6) is in interference fit with the inner hole of the azimuth axis motor support (10), the inner ring of the azimuth axis bearing (6) is in clearance fit with the azimuth axis (4), the azimuth axis motor support (10) is provided with pressure by the azimuth axis locking nut (3) and the azimuth axis spring (5), the azimuth axis spring (5) is arranged between the azimuth axis bearing (6) and the azimuth axis lock nut (3), and two end faces of the azimuth axis spring (5) respectively support against the end face of the inner ring of the azimuth axis bearing (6) and the end face of the azimuth axis lock nut (3), the azimuth axis locking nut (3) is in threaded connection with the azimuth axis (4), and the screwing depth of the azimuth axis locking nut (3) controls the pressure of the azimuth axis ultrasonic motor rotor (11) and the azimuth axis ultrasonic motor stator (12).
4. An ultrasonic motor-driven two-dimensional precision turntable as set forth in claim 3,
a first encoder angle measuring device is arranged on the right side of the pitching shaft (39), the first encoder angle measuring device comprises an encoder stator support (27), an encoder rotor bushing (28), a pitching shaft encoder rotor (29) and a pitching shaft encoder stator (30), the pitching shaft encoder rotor (29) is fixed on the pitching shaft (39) through the encoder rotor bushing (28), and the pitching shaft encoder stator (30) is fixed on the U-shaped frame (26) through the encoder stator support (27);
the upper end of azimuth axis (4) is equipped with 0 and has second encoder angle measuring device, second encoder angle measuring device includes azimuth axis encoder rotor (21), azimuth axis encoder stator (22), azimuth axis encoder rotor (21) is fixed by the screw on the shaft shoulder of azimuth axis (4), azimuth axis encoder stator (22) is fixed by the screw on azimuth axis axle sleeve (19).
5. An ultrasonic motor-driven two-dimensional precision turntable as recited in claim 4,
a first floating mechanism is arranged on the left side of the pitching shaft (39), and comprises a pitching shaft limiting fork frame (46), a pitching shaft limiting spring (47), a pitching shaft limiting frame (48) and a pitching shaft limiting steel ball (49); the pitching shaft limiting frame (48) is fixed on the U-shaped frame (26) through screws, the circular ring-shaped fork frame end of the pitching shaft limiting fork frame (46) is coaxial with the pitching shaft (39) and is fixed on the end face of the pitching shaft motor support (42) through screws, a pitching shaft limiting spring (47) and two pitching shaft limiting steel balls (49) which are coaxial with the pitching shaft limiting fork frame (46) are arranged in an inner hole of the cylindrical end of the pitching shaft limiting fork frame (46), the two pitching shaft limiting steel balls (49) are respectively located at two ends of the pitching shaft limiting spring (47) and are propped against two ends of the pitching shaft limiting fork frame (46) under the action of the elastic force of the pitching shaft limiting spring (47);
the lower end part of the azimuth shaft (4) is provided with a second floating mechanism, the second floating mechanism comprises an azimuth shaft limiting fork frame (8), an azimuth shaft limiting spring (9), an azimuth shaft limiting seat (23) and an azimuth shaft limiting steel ball (24), the azimuth shaft limiting seat (23) is fixed on a U-shaped frame (26) through screws, the circular ring-shaped fork frame end of the azimuth shaft limiting fork frame (8) is coaxial with the azimuth shaft (4) and fixed on the end surface of the azimuth shaft motor bearing (10) through screws, an inner hole of the cylindrical end of the azimuth shaft limiting fork frame (8) is provided with the azimuth shaft limiting spring (9) and the two azimuth shaft limiting steel balls (24) which are coaxial with the azimuth shaft limiting spring and the two azimuth shaft limiting steel balls (24), the two azimuth shaft limiting steel balls (24) are respectively located at two ends of the azimuth shaft limiting spring (9) and abut against two ends of the azimuth shaft limiting seat (23) under the action of the elastic force of the azimuth shaft limiting spring (9).
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| CN202210214470.2A CN114576507B (en) | 2022-03-07 | 2022-03-07 | Two-dimensional precision rotary table driven by ultrasonic motor |
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| CN114576507A (en) | 2022-06-03 |
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