CN110067811A - A kind of air-float turntable - Google Patents
A kind of air-float turntable Download PDFInfo
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- CN110067811A CN110067811A CN201910463467.2A CN201910463467A CN110067811A CN 110067811 A CN110067811 A CN 110067811A CN 201910463467 A CN201910463467 A CN 201910463467A CN 110067811 A CN110067811 A CN 110067811A
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- mover
- fixed
- flow controller
- air
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 25
- 238000013461 design Methods 0.000 abstract description 7
- 230000003044 adaptive effect Effects 0.000 abstract description 5
- 238000005259 measurement Methods 0.000 description 35
- 230000003287 optical effect Effects 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 7
- 238000011161 development Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 2
- 230000003447 ipsilateral effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
- F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2370/00—Apparatus relating to physics, e.g. instruments
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Machine Tool Units (AREA)
- Motor Or Generator Frames (AREA)
Abstract
The invention discloses a kind of air-float turntables, including bearing assembly, feedback component, driving assembly, the bearing assembly includes flow controller and the rotor that is mounted on the inside of flow controller, the driving component includes motor stator and electric mover, it further include the fixed bracket of pedestal, stator pressure ring and mover, the motor stator is fixedly connected by stator pressure ring with pedestal, and the fixed bracket of the mover is fixed on rotor, and electric mover is fixed on the fixed bracket of mover；The rotor, flow controller, electric mover, motor stator are coaxial, and in the radial direction of rotor, described four successively arrange from the inside to the outside according to rotor, flow controller, electric mover, motor stator sequence, and the projection of electric mover and motor stator towards rotor axis is all fallen on rotor.In the structure design of this air-float turntable, by reducing the height of air-float turntable, its scope of application can be expanded, so that it is stronger to the adaptive faculty of space size.
Description
Technical field
The present invention relates to field of measuring technique, more particularly to a kind of air-float turntable.
Background technique
Air-float turntable belongs to high-precision turning positioning apparatus, is made of shaft, flow controller, servo motor, Circular gratings etc..
Air-float turntable includes bearing part and driving part, and bearing part is made of shaft and flow controller, realizes non-contact bearing；Driving
Component is made of servo motor and Circular gratings, realizes precision rotating positioning.
Air-float turntable is widely used in high-acruracy survey and processing technique field, meanwhile, air-float turntable itself ties measurement
Fruit and processing result all have important influence.
Summary of the invention
The technology of important influence is all had to measurement result and processing result for air-float turntable set forth above itself
Problem, the present invention provides a kind of air-float turntables.In the structure design of this air-float turntable, by reducing the height of air-float turntable,
Its scope of application can be expanded, so that it is stronger to the adaptive faculty of space size.
In view of the above-mentioned problems, a kind of air-float turntable provided by the invention is solved the problems, such as by following technical essential: a kind of
Air-float turntable, including bearing assembly, the feedback component being mounted on bearing assembly, the driving assembly being connected with bearing assembly, institute
State feedback component for measure rotate angle, for drive bearing assembly rotation, the bearing assembly includes the driving component
Flow controller and the rotor being mounted on the inside of flow controller, the driving component include motor stator and electric mover, further include pedestal,
Stator pressure ring and the fixed bracket of mover, the motor stator are fixedly connected by stator pressure ring with pedestal, the fixed branch of the mover
Frame is fixed on rotor, and electric mover is fixed on the fixed bracket of mover；
The rotor, flow controller, electric mover, motor stator are coaxial, and in the radial direction of rotor, and described four
It successively arranges from the inside to the outside according to rotor, flow controller, electric mover, motor stator sequence, electric mover and motor stator direction
The projection of rotor axis is all fallen on rotor.
It in accurate measurement, is limited by measurand space or measurement accuracy etc., it is desirable that the small, weight of air-float turntable height
Gently, precision is high.With the continuous development of China's science and technology, Technology of Precision Measurement has become people and understands and changes the objective world
A kind of new and high technology.Meanwhile the research of Technology of Precision Measurement has obtained the attention of many departments, State Scientific and Technological Commission, National Nature
Technology of Precision Measurement is all classified as prior development direction by the science fund committee.It is such as directed to field of optical measurements, existing air bearing turns
Platform generally uses tandem to design: bearing and the concatenated structure type of driving motor, the size of these air-float turntables are unable to satisfy
The limitation of measurement object space or bearing space, weight are also to influence the major reason of measurement accuracy.
In the present solution, the driving component is rotated for drive bearing assembly, the feedback component is for realizing bearing group
Part corner feedback, to achieve the purpose that as controlled air-float turntable rotational angle.In the driving component, motor stator and motor
Son interaction, while electric mover is connect by the fixed bracket of mover with rotor, by the fixed bracket torque of mover, is forced and is turned
Son rotation；It is set as described four successively to arrange from the inside to the outside according to rotor, flow controller, electric mover, motor stator sequence, electricity
The projection of motor-driven son and motor stator towards rotor axis is all fallen on rotor, and it is concatenated with bearing to be different from conventional ADS driving motor
Form, using as the upper cover plate of air-float turntable supporting table width itself or between it is generally large compared to rotor and flow controller
Feature, the matching relationship of the driving assembly and bearing assembly of form using the above structure, in the width for suitably increasing air-float turntable
Or in the case where diameter so that air-float turntable integrally greatly shortened compared to existing air-float turntable length dimension, apply to as
When optical measurement, form can well adapt to optical instrument measurement space, so that it has to space size adaptive faculty more
Strong feature solves the problems such as optical instrument precision is measured within the scope of small space；Meanwhile existing air-float turntable is using
When such as optical measurement, the position precision of detected object also has important influence to measurement accuracy, and this programme is compared to existing
The structure and assembling form of air-float turntable, center of gravity is lower, thus can by more stably turn round with better position stability come
Obtain higher measurement accuracy.
To sum up, the structure design of the air-float turntable may make it that can reduce turntable height while guaranteeing turntable precision,
Meets the needs of accurate measurement.
Further technical solution are as follows:
As a kind of specific structure type and flow controller assembling form, setting are as follows: the pedestal is cylindrical in shape, and further includes section
Device sleeve is flowed, the shape of the flow controller is in ladder shaft-like, and the duct on flow controller sleeve is different diameter hole, the flow controller set
Cylinder is fixed on the end of pedestal by the first attachment screw, and flow controller is embedded in the variable diameter of different diameter hole by its external reduced diameter portion
It is held in hole section between pedestal and flow controller sleeve.This programme facilitates processing, assembly and obtains ideal assembly precision.
As a kind of more complete technical solution, the end of the rotor is also connected with to be fixed by the second attachment screw
Upper cover plate, supporting surface of the plate face of the upper cover plate as air-float turntable.This programme facilitates processing, assembly and obtains ideal
Assembly precision.
As the specific implementation of feedback component, the feedback component includes Circular gratings and grating reading head, Circular gratings
And in grating reading head the two, one of them is installed on rotor, the relative position of another one and motor stator is fixed.
For the benefit of the rotation precision of rotor and facilitate the manufacture and assembly of this programme, setting are as follows: the Circular gratings pass through the
Five attachment screws are fixed on rotor；
It further include the fixed bracket of reading head, the fixed bracket of the reading head is fixed on stator pressure ring by the 4th attachment screw
Or on pedestal, grating reading head is fixed on the fixed bracket of reading head.
For convenience of the connection of electric mover and Circular gratings and rotor, setting are as follows: be additionally provided on the outside of the rotor and be in
Cricoid mounting ring, the extending direction of the mounting ring further include mover pressure ring, the mover is fixed around the axis direction of rotor
Bracket is connect by third attachment screw with the mounting ring screw, and the electric mover is clamped in mover pressure ring to be fixed with mover
Between bracket, mover pressure ring is as the isolated part between electric mover and rotor；
The Circular gratings are fixed in the mounting ring by the 5th attachment screw.Preferably, for convenience of assembly and raising
To the utilization rate in chassis interior space, to reduce the size of air-float turntable as far as possible, setting are as follows: Circular gratings and the fixed erection of mover
It sets in the not ipsilateral of mounting ring.
In structure situation as simple as possible, the relative position in this air-float turntable between component is constrained for convenience and is closed
System, setting are as follows: the flow controller is located between the end face of upper cover plate and the end face of mounting ring.
The invention has the following advantages:
In the present solution, the driving component is rotated for drive bearing assembly, the feedback component is for realizing bearing group
Part corner feedback, to achieve the purpose that as controlled air-float turntable rotational angle.In the driving component, motor stator and motor
Son interaction, while electric mover is connect by the fixed bracket of mover with rotor, by the fixed bracket torque of mover, is forced and is turned
Son rotation；It is set as described four successively to arrange from the inside to the outside according to rotor, flow controller, electric mover, motor stator sequence, electricity
The projection of motor-driven son and motor stator towards rotor axis is all fallen on rotor, and it is concatenated with bearing to be different from conventional ADS driving motor
Form, using as the upper cover plate of air-float turntable supporting table width itself or between it is generally large compared to rotor and flow controller
Feature, the matching relationship of the driving assembly and bearing assembly of form using the above structure, in the width for suitably increasing air-float turntable
Or in the case where diameter so that air-float turntable integrally greatly shortened compared to existing air-float turntable length dimension, apply to as
When optical measurement, form can well adapt to optical instrument measurement space, so that it has to space size adaptive faculty more
Strong feature solves the problems such as optical instrument precision is measured within the scope of small space；Meanwhile existing air-float turntable is using
When such as optical measurement, the position precision of detected object also has important influence to measurement accuracy, and this programme is compared to existing
The structure and assembling form of air-float turntable, center of gravity is lower, thus can by more stably turn round with better position stability come
Obtain higher measurement accuracy.
To sum up, the structure design of the air-float turntable may make it that can reduce turntable height while guaranteeing turntable precision,
Meets the needs of accurate measurement.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of one specific embodiment of air-float turntable of the present invention；
Fig. 2 is the structure sectional view of structure shown in Fig. 1, and cross section is parallel with the axis of rotor.
Label in figure is respectively as follows: 1, driving assembly, 2, bearing assembly, 3, feedback component, 4, pedestal, 5, stator pressure ring,
6, motor stator, the 7, first attachment screw, 8, flow controller sleeve, 9, flow controller, 10, upper cover plate, the 11, second attachment screw, 12,
Rotor, 13, the fixed bracket of mover, 14, electric mover, 15, mover pressure ring, 16, third attachment screw, the 17, the 4th attachment screw,
18, the fixed bracket of reading head, 19, grating reading head, the 20, the 5th attachment screw, 21, Circular gratings.
Specific embodiment
Below with reference to embodiment, the present invention is described in further detail, but the present invention is not limited only to following implementation
Example:
Embodiment 1:
As depicted in figs. 1 and 2, a kind of air-float turntable, including bearing assembly 2, the feedback component being mounted on bearing assembly 2
3, the driving assembly 1 being connected with bearing assembly 2, the feedback component 3 are used for for measuring rotation angle, the driving component 1
Drive bearing assembly 2 rotates, and the bearing assembly 2 includes flow controller 9 and the rotor 12 for being mounted on 9 inside of flow controller, the drive
Dynamic component 1 includes motor stator 6 and electric mover 14, further includes the fixed bracket 13 of pedestal 4, stator pressure ring 5 and mover, the electricity
Machine stator 6 is fixedly connected by stator pressure ring 5 with pedestal 4, and the fixed bracket 13 of the mover is fixed on rotor 12, electric mover
14 are fixed on the fixed bracket 13 of mover；
The rotor 12, flow controller 9, electric mover 14, motor stator 6 four are coaxial, and in the radial direction of rotor 12,
Described four successively arrange from the inside to the outside according to rotor 12, flow controller 9, electric mover 14,6 sequence of motor stator, electric mover
14 and the projection of motor stator 6 towards 12 axis of rotor all fall on rotor 12.
It in accurate measurement, is limited by measurand space or measurement accuracy etc., it is desirable that the small, weight of air-float turntable height
Gently, precision is high.With the continuous development of China's science and technology, Technology of Precision Measurement has become people and understands and changes the objective world
A kind of new and high technology.Meanwhile the research of Technology of Precision Measurement has obtained the attention of many departments, State Scientific and Technological Commission, National Nature
Technology of Precision Measurement is all classified as prior development direction by the science fund committee.It is such as directed to field of optical measurements, existing air bearing turns
Platform generally uses tandem to design: bearing and the concatenated structure type of driving motor, the size of these air-float turntables are unable to satisfy
The limitation of measurement object space or bearing space, weight are also to influence the major reason of measurement accuracy.
In the present solution, the driving component 1 is rotated for drive bearing assembly 2, the feedback component 3 is for realizing bearing
2 corner of component feedback, to achieve the purpose that as controlled air-float turntable rotational angle.In the driving component 1, motor stator 6 with
Electric mover 14 interacts, while electric mover 14 is connect by the fixed bracket 13 of mover with rotor 12, is fixed by mover
13 torque of bracket forces rotor 12 to rotate；It is fixed according to rotor 12, flow controller 9, electric mover 14, motor to be set as described four
6 sequence of son is successively arranged from the inside to the outside, and the projection of electric mover 14 and motor stator 6 towards 12 axis of rotor all falls within rotor 12
On, it is different from conventional ADS driving motor and the concatenated form of bearing, using as the upper cover plate 10 of air-float turntable supporting table width itself
Degree or between the feature generally large compared to rotor 12 and flow controller 9, the driving assembly 1 and bearing of form using the above structure
The matching relationship of component 2, in the case where suitably increasing the width or diameter of air-float turntable so that air-float turntable it is whole compared to
Existing air-float turntable length dimension greatly shortens, and when applying to such as optical measurement, form can well adapt to optical instrument
Space is measured, so that it has the characteristics that stronger to space size adaptive faculty, solves and measures light within the scope of small space
The problems such as learning accuracy of instrument；Meanwhile existing air-float turntable is when applying to such as optical measurement, the position precision pair of detected object
Measurement accuracy also has important influence, and for this programme compared to the structure and assembling form of existing air-float turntable, center of gravity is lower, therefore
Higher measurement accuracy can be obtained by more stably turning round with better position stability.
To sum up, the structure design of the air-float turntable may make it that can reduce turntable height while guaranteeing turntable precision,
Meets the needs of accurate measurement.
Embodiment 2:
The present embodiment is further qualified on the basis of embodiment 1, as depicted in figs. 1 and 2, as a kind of specific knot
9 assembling form of configuration formula and flow controller, setting are as follows: the pedestal 4 is cylindrical in shape, and further includes flow controller sleeve 8, the flow controller 9
Shape be in ladder shaft-like, and the duct on flow controller sleeve 8 be different diameter hole, the flow controller sleeve 8 by first connection spiral shell
Nail 7 is fixed on the end of pedestal 4, and flow controller 9 is embedded in the variable diameter hole section of different diameter hole by its external reduced diameter portion and is pressed from both sides
It is held between pedestal 4 and flow controller sleeve 8.This programme facilitates processing, assembly and obtains ideal assembly precision.
As a kind of more complete technical solution, the end of the rotor 12 is also connected with through the second attachment screw 11
Fixed upper cover plate 10, supporting surface of the plate face of the upper cover plate 10 as air-float turntable.This programme facilitates processing, assembles and obtains
Obtain ideal assembly precision.
As the specific implementation of feedback component 3, the feedback component 3 includes Circular gratings 21 and grating reading head 19,
In 19 the two of Circular gratings 21 and grating reading head, one of them is installed on rotor 12, the opposite position of another one and motor stator 6
Set fixation.
The for the benefit of rotation precision of rotor 12 and the manufacture and assembly that facilitate this programme, setting are as follows: the Circular gratings 21 are logical
The 5th attachment screw 20 is crossed to be fixed on rotor 12；
It further include the fixed bracket 18 of reading head, it is fixed that the fixed bracket 18 of the reading head is fixed on by the 4th attachment screw 17
On sub- pressure ring 5 or pedestal 4, grating reading head 19 is fixed on the fixed bracket 18 of reading head.
For convenience of the connection of electric mover 14 and Circular gratings 21 and rotor 12, setting are as follows: the outside of the rotor 12 is also
It is provided with mounting ring annular in shape, the extending direction of the mounting ring further includes mover pressure ring 15 around the axis direction of rotor 12,
The fixed bracket 13 of the mover is connect by third attachment screw 16 with the mounting ring screw, and the electric mover 14 is clamped in
Between mover pressure ring 15 and the fixed bracket 13 of mover, mover pressure ring 15 is as the isolation part between electric mover 14 and rotor 12
Part；
The Circular gratings 21 are fixed in the mounting ring by the 5th attachment screw 20.Preferably, for convenience of assembly and
The utilization rate to 4 inner space of pedestal is improved, to reduce the size of air-float turntable as far as possible, setting are as follows: Circular gratings 21 and mover
Fixed mount setting is not in the ipsilateral of mounting ring.
In structure situation as simple as possible, the relative position in this air-float turntable between component is constrained for convenience and is closed
System, setting are as follows: the flow controller 9 is located between the end face of upper cover plate 10 and the end face of mounting ring.
The above content is combine specific preferred embodiment to the further description of the invention made, and it cannot be said that originally
The specific embodiment of invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs,
The other embodiments obtained in the case where not departing from technical solution of the present invention, should be included within the scope of the present invention.
Claims (7)
1. a kind of air-float turntable, including bearing assembly (2), the feedback component (3) and bearing group that are mounted on bearing assembly (2)
The connected driving assembly (1) of part (2), the feedback component (3) is for measuring rotation angle, and the driving component (1) is for driving
Moving axis bearing assembly (2) rotation, the bearing assembly (2) include flow controller (9) and the rotor that is mounted on the inside of flow controller (9)
(12), the driving component (1) includes motor stator (6) and electric mover (14), which is characterized in that further includes pedestal (4), fixed
Sub- pressure ring (5) and mover are fixed bracket (13), and the motor stator (6) is fixedly connected by stator pressure ring (5) with pedestal (4),
The mover fixed bracket (13) is fixed on rotor (12), and electric mover (14) is fixed on mover fixed bracket (13)；
The rotor (12), flow controller (9), electric mover (14), motor stator (6) four are coaxial, and the diameter in rotor (12)
To direction, described four according to rotor (12), flow controller (9), electric mover (14), motor stator (6) sequence from the inside to the outside according to
The projection of secondary arrangement, electric mover (14) and motor stator (6) towards rotor (12) axis is all fallen on rotor (12).
2. a kind of air-float turntable according to claim 1, which is characterized in that the pedestal (4) is cylindrical in shape, and further includes throttling
Device sleeve (8), the shape of the flow controller (9) is in ladder shaft-like, and the duct on flow controller sleeve (8) is different diameter hole, described
Flow controller sleeve (8) is fixed on the end of pedestal (4) by the first attachment screw (7), and flow controller (9) passes through its external variable diameter
It is partially submerged into the variable diameter hole section of different diameter hole and is held between pedestal (4) and flow controller sleeve (8).
3. a kind of air-float turntable according to claim 1, which is characterized in that the end of the rotor (12) is also connected with logical
Cross the second attachment screw (11) fixed upper cover plate (10), supporting surface of the plate face of the upper cover plate (10) as air-float turntable.
4. a kind of air-float turntable according to claim 1, which is characterized in that the feedback component (3) includes Circular gratings
(21) and grating reading head (19), in Circular gratings (21) and grating reading head (19) the two, one of them is installed on rotor (12)
On, another one and the relative position of motor stator (6) are fixed.
5. a kind of air-float turntable according to claim 4, which is characterized in that the Circular gratings (21) pass through the 5th connection spiral shell
Nail (20) is fixed on rotor (12)；
It further include that reading head is fixed bracket (18), the reading head fixed bracket (18) is fixed on by the 4th attachment screw (17)
On stator pressure ring (5) or pedestal (4), grating reading head (19) is fixed on reading head fixed bracket (18).
6. a kind of air-float turntable according to claim 5, which is characterized in that be additionally provided on the outside of the rotor (12) and be in
Cricoid mounting ring, the extending direction of the mounting ring further includes mover pressure ring (15) around the axis direction of rotor (12), described
Mover fixed bracket (13) is connect by third attachment screw (16) with the mounting ring screw, electric mover (14) clamping
Between mover pressure ring (15) and mover fixed bracket (13), mover pressure ring (15) as electric mover (14) and rotor (12) it
Between isolated part；
The Circular gratings (21) are fixed in the mounting ring by the 5th attachment screw (20).
7. a kind of air-float turntable according to claim 6, which is characterized in that the flow controller (9) is located at upper cover plate (10)
End face and mounting ring end face between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910463467.2A CN110067811B (en) | 2019-05-30 | 2019-05-30 | Air-floating rotary table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910463467.2A CN110067811B (en) | 2019-05-30 | 2019-05-30 | Air-floating rotary table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110067811A true CN110067811A (en) | 2019-07-30 |
| CN110067811B CN110067811B (en) | 2024-03-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910463467.2A Active CN110067811B (en) | 2019-05-30 | 2019-05-30 | Air-floating rotary table |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112869883A (en) * | 2021-03-01 | 2021-06-01 | 戴晓静 | Pharmacy department vaccinate auxiliary device |
| CN113635085A (en) * | 2021-08-19 | 2021-11-12 | 江苏集萃精凯高端装备技术有限公司 | Precise air-flotation rotary table driven by outer rotor motor |
| CN114248122A (en) * | 2021-12-21 | 2022-03-29 | 北京海普瑞森超精密技术有限公司 | Ultra-precise air static pressure servo turntable |
| CN115435015A (en) * | 2022-09-21 | 2022-12-06 | 江苏京创先进电子科技有限公司 | Air-float rotary table and working method thereof |
| CN115467896A (en) * | 2022-08-04 | 2022-12-13 | 宁波亿文特自动化科技有限公司 | Turntable structure supported by air bearing |
Citations (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0552037A2 (en) * | 1992-01-16 | 1993-07-21 | Teijin Seiki Company Limited | Spindle device with a built-in motor |
| JPH0622493A (en) * | 1992-07-06 | 1994-01-28 | Sony Corp | Spindle motor |
| JPH06267823A (en) * | 1993-03-11 | 1994-09-22 | Canon Inc | Positioning equipment |
| JPH10149974A (en) * | 1996-11-15 | 1998-06-02 | Canon Inc | Stage device, aligner, and manufacture of device |
| JP2003065334A (en) * | 2002-06-13 | 2003-03-05 | Nsk Ltd | Hydraulic gas bearing |
| JP2003130052A (en) * | 2001-10-24 | 2003-05-08 | Union Tool Co | Fluid bearing unit and fluid bearing system |
| JP2004130502A (en) * | 2002-08-09 | 2004-04-30 | Hitachi Via Mechanics Ltd | Spindle device |
| JP2005160276A (en) * | 2003-11-28 | 2005-06-16 | Ntn Corp | Rotational-speed control device and spindle device for motor |
| JP2006052793A (en) * | 2004-08-12 | 2006-02-23 | Konica Minolta Opto Inc | Supporting device and processing machine |
| US20080047120A1 (en) * | 2006-08-24 | 2008-02-28 | Hardinge, Inc. | Rotary table with frameless motor |
| JP2008149434A (en) * | 2006-12-20 | 2008-07-03 | Okamoto Machine Tool Works Ltd | Surface grinding device |
| JP2009012120A (en) * | 2007-07-04 | 2009-01-22 | Toshiba Mach Co Ltd | Turning table device |
| JP2009068546A (en) * | 2007-09-11 | 2009-04-02 | Nsk Ltd | Spindle device |
| US20090092347A1 (en) * | 2006-03-09 | 2009-04-09 | Ntn Corporation | Fluid dynamic bearing device |
| US20090297076A1 (en) * | 2005-09-09 | 2009-12-03 | Ntn Corporation | Fluid dynamic bearing device |
| CN101733648A (en) * | 2008-11-19 | 2010-06-16 | 津田驹工业株式会社 | Clamping apparatus for main shaft driving device of machine tool |
| EP2290241A1 (en) * | 2009-07-13 | 2011-03-02 | Siemens Aktiengesellschaft | Turbocompressor assembly with a cooling system |
| CN102011918A (en) * | 2010-11-04 | 2011-04-13 | 北京卫星制造厂 | High-precision direct driven air flotation turntable |
| CN102569151A (en) * | 2010-12-30 | 2012-07-11 | 上海微电子装备有限公司 | Silicon wafer mechanical hand |
| US20120187789A1 (en) * | 2011-01-25 | 2012-07-26 | Samsung Electro-Mechanics Co., Ltd. | Hydrodynamic bearing assembly and motor including the same |
| US20120194018A1 (en) * | 2011-02-02 | 2012-08-02 | Kabushiki Kaisha Yaskawa Denki | Rotating electrical machine and rotating apparatus |
| US20120217832A1 (en) * | 2011-02-24 | 2012-08-30 | Samsung Electro-Mechanics Co., Ltd. | Hydrodynamic bearing assembly and motor including the same |
| CN102817915A (en) * | 2012-09-03 | 2012-12-12 | 中国工程物理研究院总体工程研究所 | Air flotation assembly for large-scale precise rotary table |
| CN202668087U (en) * | 2012-05-31 | 2013-01-16 | 财团法人精密机械研究发展中心 | Hydrostatic pressure turntable direct-drive motor driving device |
| CN103286660A (en) * | 2013-06-05 | 2013-09-11 | 上海交通大学 | Large-scale surface throttling self-compensating ultra-precise liquid change table |
| CN203533113U (en) * | 2013-09-25 | 2014-04-09 | 广州市昊志机电股份有限公司 | Air flotation rotary table |
| CN204247971U (en) * | 2014-11-12 | 2015-04-08 | 广州市昊志机电股份有限公司 | A kind of air floated high speed electric mandrel |
| CN204486803U (en) * | 2015-02-04 | 2015-07-22 | 上海亚资实业发展有限公司 | High-speed main spindle rotary joint structure |
| CN205817307U (en) * | 2016-07-14 | 2016-12-21 | 贵州凯博机电科技有限公司 | The air supporting lathe of outer rotor motor driven |
| CN205829388U (en) * | 2016-07-14 | 2016-12-21 | 贵州凯博机电科技有限公司 | The workbench of outer rotor motor driven |
| CN106624843A (en) * | 2016-12-26 | 2017-05-10 | 中原工学院 | Precise direct-driven aerostatic rotary table |
| CN107725592A (en) * | 2017-09-30 | 2018-02-23 | 中国工程物理研究院机械制造工艺研究所 | A kind of air-float turntable of narrow annular channel throttling |
| CN207377968U (en) * | 2017-09-30 | 2018-05-18 | 中国工程物理研究院机械制造工艺研究所 | A kind of air-float turntable |
| CN108188417A (en) * | 2018-02-06 | 2018-06-22 | 中国计量大学 | A kind of multiple throttle type static pressure air-bearing electro spindle and its application method |
| WO2019062911A1 (en) * | 2017-09-30 | 2019-04-04 | 上海微电子装备（集团）股份有限公司 | Vacuum suction manipulator, substrate transfer device, and photoetching machine |
| CN209908994U (en) * | 2019-05-30 | 2020-01-07 | 中国工程物理研究院机械制造工艺研究所 | Air-float rotary table |
-
2019
- 2019-05-30 CN CN201910463467.2A patent/CN110067811B/en active Active
Patent Citations (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0552037A2 (en) * | 1992-01-16 | 1993-07-21 | Teijin Seiki Company Limited | Spindle device with a built-in motor |
| JPH0622493A (en) * | 1992-07-06 | 1994-01-28 | Sony Corp | Spindle motor |
| JPH06267823A (en) * | 1993-03-11 | 1994-09-22 | Canon Inc | Positioning equipment |
| US5524502A (en) * | 1993-03-11 | 1996-06-11 | Canon Kabushiki Kaisha | Positioning apparatus including a hydrostatic bearing for spacing apart a supporting surface and a guide surface |
| JPH10149974A (en) * | 1996-11-15 | 1998-06-02 | Canon Inc | Stage device, aligner, and manufacture of device |
| JP2003130052A (en) * | 2001-10-24 | 2003-05-08 | Union Tool Co | Fluid bearing unit and fluid bearing system |
| JP2003065334A (en) * | 2002-06-13 | 2003-03-05 | Nsk Ltd | Hydraulic gas bearing |
| JP2004130502A (en) * | 2002-08-09 | 2004-04-30 | Hitachi Via Mechanics Ltd | Spindle device |
| JP2005160276A (en) * | 2003-11-28 | 2005-06-16 | Ntn Corp | Rotational-speed control device and spindle device for motor |
| JP2006052793A (en) * | 2004-08-12 | 2006-02-23 | Konica Minolta Opto Inc | Supporting device and processing machine |
| US20090297076A1 (en) * | 2005-09-09 | 2009-12-03 | Ntn Corporation | Fluid dynamic bearing device |
| US20090092347A1 (en) * | 2006-03-09 | 2009-04-09 | Ntn Corporation | Fluid dynamic bearing device |
| US20080047120A1 (en) * | 2006-08-24 | 2008-02-28 | Hardinge, Inc. | Rotary table with frameless motor |
| JP2008149434A (en) * | 2006-12-20 | 2008-07-03 | Okamoto Machine Tool Works Ltd | Surface grinding device |
| JP2009012120A (en) * | 2007-07-04 | 2009-01-22 | Toshiba Mach Co Ltd | Turning table device |
| JP2009068546A (en) * | 2007-09-11 | 2009-04-02 | Nsk Ltd | Spindle device |
| CN101733648A (en) * | 2008-11-19 | 2010-06-16 | 津田驹工业株式会社 | Clamping apparatus for main shaft driving device of machine tool |
| EP2290241A1 (en) * | 2009-07-13 | 2011-03-02 | Siemens Aktiengesellschaft | Turbocompressor assembly with a cooling system |
| CN102011918A (en) * | 2010-11-04 | 2011-04-13 | 北京卫星制造厂 | High-precision direct driven air flotation turntable |
| CN102569151A (en) * | 2010-12-30 | 2012-07-11 | 上海微电子装备有限公司 | Silicon wafer mechanical hand |
| US20120187789A1 (en) * | 2011-01-25 | 2012-07-26 | Samsung Electro-Mechanics Co., Ltd. | Hydrodynamic bearing assembly and motor including the same |
| US20120194018A1 (en) * | 2011-02-02 | 2012-08-02 | Kabushiki Kaisha Yaskawa Denki | Rotating electrical machine and rotating apparatus |
| US20120217832A1 (en) * | 2011-02-24 | 2012-08-30 | Samsung Electro-Mechanics Co., Ltd. | Hydrodynamic bearing assembly and motor including the same |
| CN202668087U (en) * | 2012-05-31 | 2013-01-16 | 财团法人精密机械研究发展中心 | Hydrostatic pressure turntable direct-drive motor driving device |
| CN102817915A (en) * | 2012-09-03 | 2012-12-12 | 中国工程物理研究院总体工程研究所 | Air flotation assembly for large-scale precise rotary table |
| CN103286660A (en) * | 2013-06-05 | 2013-09-11 | 上海交通大学 | Large-scale surface throttling self-compensating ultra-precise liquid change table |
| CN203533113U (en) * | 2013-09-25 | 2014-04-09 | 广州市昊志机电股份有限公司 | Air flotation rotary table |
| CN204247971U (en) * | 2014-11-12 | 2015-04-08 | 广州市昊志机电股份有限公司 | A kind of air floated high speed electric mandrel |
| CN204486803U (en) * | 2015-02-04 | 2015-07-22 | 上海亚资实业发展有限公司 | High-speed main spindle rotary joint structure |
| CN205817307U (en) * | 2016-07-14 | 2016-12-21 | 贵州凯博机电科技有限公司 | The air supporting lathe of outer rotor motor driven |
| CN205829388U (en) * | 2016-07-14 | 2016-12-21 | 贵州凯博机电科技有限公司 | The workbench of outer rotor motor driven |
| CN106624843A (en) * | 2016-12-26 | 2017-05-10 | 中原工学院 | Precise direct-driven aerostatic rotary table |
| CN107725592A (en) * | 2017-09-30 | 2018-02-23 | 中国工程物理研究院机械制造工艺研究所 | A kind of air-float turntable of narrow annular channel throttling |
| CN207377968U (en) * | 2017-09-30 | 2018-05-18 | 中国工程物理研究院机械制造工艺研究所 | A kind of air-float turntable |
| WO2019062911A1 (en) * | 2017-09-30 | 2019-04-04 | 上海微电子装备（集团）股份有限公司 | Vacuum suction manipulator, substrate transfer device, and photoetching machine |
| CN108188417A (en) * | 2018-02-06 | 2018-06-22 | 中国计量大学 | A kind of multiple throttle type static pressure air-bearing electro spindle and its application method |
| CN209908994U (en) * | 2019-05-30 | 2020-01-07 | 中国工程物理研究院机械制造工艺研究所 | Air-float rotary table |
Non-Patent Citations (4)
| Title |
|---|
| 代明君;: "回转面测量平台系统设计", 机械设计与研究, no. 01, 28 February 2006 (2006-02-28), pages 84 - 86 * |
| 孟凡东;李锋锋;孟力;: "触摸屏作为协处理器在水轮机调速系统中的应用", 大电机技术, no. 06, 15 November 2017 (2017-11-15), pages 81 - 83 * |
| 朱珈, 魏勇, 曹克伟, 张大卫: "新型喷涂涡轮永磁轴承结构设计与力学特性", 组合机床与自动化加工技术, no. 01, 25 January 2004 (2004-01-25), pages 53 - 55 * |
| 高洪民, 汪渤, 石永生, 钟秋海: "气浮球形陀螺转子的控制", 火力与指挥控制, no. 02, 30 April 2003 (2003-04-30), pages 42 - 45 * |
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| CN114248122A (en) * | 2021-12-21 | 2022-03-29 | 北京海普瑞森超精密技术有限公司 | Ultra-precise air static pressure servo turntable |
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| CN115435015A (en) * | 2022-09-21 | 2022-12-06 | 江苏京创先进电子科技有限公司 | Air-float rotary table and working method thereof |
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