CN103286660A - Large-scale surface throttling self-compensating ultra-precise liquid change table - Google Patents
Large-scale surface throttling self-compensating ultra-precise liquid change table Download PDFInfo
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- CN103286660A CN103286660A CN2013102227087A CN201310222708A CN103286660A CN 103286660 A CN103286660 A CN 103286660A CN 2013102227087 A CN2013102227087 A CN 2013102227087A CN 201310222708 A CN201310222708 A CN 201310222708A CN 103286660 A CN103286660 A CN 103286660A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
- F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
Abstract
The invention discloses a large-scale surface throttling self-compensating ultra-precise hydrostatic pressure rotary table. The large-scale surface throttling self-compensating ultra-precise hydrostatic pressure rotary table comprises a stator system, a rotor system and a pressure fluid supply and distribution system. The pressure fluid supply and distribution system comprises a top axial hydrostatic bearing, a top radial hydrostatic bearing, a bottom axial hydrostatic bearing and a bottom radial hydrostatic bearing, and supplies pressure oil film support between the stator system and the rotor system. According to the large-scale surface throttling self-compensating ultra-precise hydrostatic pressure rotary table, geometry design is adopted in the stator system and the rotor system, the throttling surface gaps and the oil seal surface gaps of the hydrostatic bearings are formed, and pressure self-compensation of bearing oil cavities is achieved through throttling flow resistance. The change of the throttling surface gaps and the oil seal surface gaps is opposite to the change rule caused by rotor deflection, so that the fluid pressure change generated in the bearing oil cavities is two times that of a fixed throttling type hydrostatic bearing, and axial rigidity, radial rigidity and deflection rigidity of the ultra-precise liquid hydrostatic pressure rotary table are improved remarkably.
Description
Technical field
The present invention relates to a kind of ultraprecise processing unit (plant), relate in particular to a kind of large surfaces throttling self compensation ultraprecise fluid pressure turntable.
Background technology
Large-scale ultraprecise turntable is the key feature of large diameter optical mirror face ultraprecise grinding machine, can be applicable to the processing of 2 meters of diameters and above space optics large caliber reflecting mirror.For satisfying the requirement of heavy load, high rigidity and high rotating accuracy, the ultraprecise turntable adopts the hydrodynamic journal liquid polymers supporting way substantially.For improving the quiet dynamic rate of turntable, hydrodynamic journal liquid polymers need be regulated the oil pocket fluid pressure to adapt to the variation of external loading by changing the flow that flows into the oil pocket fluid.The hydrodynamic journal liquid polymers flow controller adopts modes such as outside aperture or capillary usually, but in practical engineering application, there is defectives such as easily stopping up, be difficult to the maintenance adjustment in above-mentioned flow controller; In addition, because parameters such as throttling flow resistance are very high to flow controller surface quality sensitiveness, the requirement of more high-accuracy property will certainly significantly improve the processing cost of flow controller parts; Therefore simple, the difficult obstruction of project organization, the hydrostatic bearing throttling form that reliability is high, and the hydrostatic bearing oil pocket pressure compensation measure fast and effectively of studying becomes one of key factor that improves ultraprecise fluid pressure turntable precision and rigidity.
There are how tame colleges and universities, scientific research institution all to study in this field at present both at home and abroad.Wherein Kane of the Massachusetts Institute of Technology of the U.S. etc. has developed the inclined-plane self compensation fluid pressure turntable novel with angle of diameter 330cm.This turntable has high rigidity and stability, surface accuracy at track element is under the situation of 2.5 μ m, radial accuracy can reach 0.05 μ m, and list of references is " Precision engineering " the 27th phase in 2003 " A hydrostatic rotary bearing with angled surface self-compensation " and US Patent No. 7682082B2 " Compact surface self-compensated hydrostatic bearings " in 2010.Domestic Hunan University, colleges and universities such as Shanghai Communications University and research institute are also in the research of carrying out related fields, and wherein Zhang Xiangyang has been developed the fluid pressure turntable that is used for DHM-500 ultraprecise numerical control aspheric lens grinding machine.This static pressure turntable rotating accuracy reaches 0.1 μ m, positioning accuracy ± 3 ", list of references is " nanometer technology and precision engineering " the 2nd phase in 2004 " development of DHM-500 ultraprecise numerical control aspheric lens grinding machine ".
Yet, most of research at present all is confined to small-sized underloading fluid pressure turntable object, be difficult to ultraprecise fluid pressure turret design and research and development at large diameter optical mirror face ultraprecise grinding machine, thereby limit and reduced the accuracy of manufacture and the efficient of large space optical mirror.
Therefore, those skilled in the art is devoted to develop a kind of large surfaces throttling self compensation ultraprecise fluid pressure turntable, satisfies in the ultraprecise optics processing requirement to ultra-precision machine tool superelevation rigidity and superelevation rotating accuracy.
Summary of the invention
Because the above-mentioned defective of prior art, technical problem to be solved by this invention provides a kind of large surfaces throttling self compensation ultraprecise fluid pressure turntable.
For achieving the above object, the invention provides a kind of large surfaces throttling self compensation ultraprecise fluid pressure turntable, comprising: stator system, rotor-support-foundation system and pressure fluid are supplied with and distribution system, it is characterized in that,
Described rotor is positioned at the center of described turntable, and described stator system surrounds described rotor-support-foundation system, and described pressure fluid supply and distribution system are between described stator system and described rotor-support-foundation system;
Described stator system comprises base, top end cover, stator circle, bottom head covers, motor stator, described bottom head covers is fixedly set on the described base, described stator circle is fixedly set in base end and covers, described top end cover is fixedly set on the described stator circle, and described motor stator is fixedly set on the described base;
Described rotor-support-foundation system comprises top rotor, top rotating disk, rotor, bottom rotating disk, bottom rotor, motor connecting axle and rotor, described base rotor is connected with described bottom rotating disk, and be fixedly set in the bottom of described rotor, described top rotor is connected with described top rotating disk, and be fixedly set in the top of described rotor, described motor connecting axle is fixed on the described top rotor, and described rotor is fixed on the described motor connecting axle;
Described pressure fluid is supplied with and distribution system comprise top axle to hydrostatic bearing and top hydrostatic bearing, the axial hydrostatic bearing in bottom and bottom hydrostatic bearing radially radially, described top axle is positioned at the lower surface of described top rotor to hydrostatic bearing, described top radially hydrostatic bearing is positioned at the outer surface top of described rotor, the axial hydrostatic bearing in described bottom is positioned at the upper surface of bottom rotor, and described bottom radially hydrostatic bearing is positioned at the outer surface bottom of described rotor;
The upper surface of described top rotating disk and the lower surface of described top end cover are equipped with top axle to the hydrostatic bearing throttleng surface, and two described top axle are to forming top axle between the hydrostatic bearing throttleng surface to hydrostatic bearing throttleng surface gap; The upper surface of described top end cover and the lower surface of described top rotor are equipped with top axle to the hydrostatic bearing oil sealing surface, and two described top axle are to forming top axle between the hydrostatic bearing oil sealing surface to hydrostatic bearing oil sealing surface gap; Rotating disk side, described top and described stator circle upper side are equipped with radially hydrostatic bearing throttleng surface of top, and radially hydrostatic bearing throttleng surface gap, top is radially formed between the hydrostatic bearing throttleng surface on two described tops; Described rotor outer surface upside and described stator circle inner surface upside are equipped with radially hydrostatic bearing oil sealing surface of top, and radially hydrostatic bearing oil sealing surface gap, top is radially formed between the hydrostatic bearing oil sealing surface on two described tops; Described bottom disk lower surface and described bottom head covers upper surface are equipped with axially hydrostatic bearing throttleng surface of bottom, and form axially hydrostatic bearing throttleng surface gap, bottom between two axial hydrostatic bearing throttleng surfaces in described bottom; Described bottom rotor upper surface and described bottom head covers lower surface are provided with axially hydrostatic bearing oil sealing surface of bottom, and form axially hydrostatic bearing oil sealing surface gap, bottom between two axial hydrostatic bearing oil sealing surfaces in described bottom; Rotating disk side, described bottom and described stator circle downside are equipped with radially hydrostatic bearing throttleng surface of bottom, and radially hydrostatic bearing throttleng surface gap, bottom is radially formed between the hydrostatic bearing throttleng surface on two described bottoms; Described rotor outer surface and described stator circle inner surface are equipped with radially hydrostatic bearing oil sealing surface of bottom, and journal bearing oil sealing surface gap, bottom is radially formed between the hydrostatic bearing oil sealing surface on two described bottoms.
Further, described top radially hydrostatic bearing, described top axle radially hydrostatic bearing is identical with the structure of the axial hydrostatic bearing in described bottom to hydrostatic bearing, described bottom, all comprise oil pocket and draining face.
Further, described top axle to hydrostatic bearing, described top radially hydrostatic bearing, the axial hydrostatic bearing in described bottom and described bottom radially the degree of depth of the oil pocket of hydrostatic bearing be respectively more than ten times of its corresponding throttleng surface gap or oil sealing surface gap.
Further, the oil sealing surface of described top axle to hydrostatic bearing throttleng surface and described top axle to hydrostatic bearing is parallel to each other; Described top radially the hydrostatic bearing throttleng surface radially the hydrostatic bearing oil sealing surface is coaxial with described top.
Further, the oil sealing surface of the axial hydrostatic bearing throttleng surface in described bottom and the axial hydrostatic bearing in described bottom is parallel to each other; Described bottom radially the hydrostatic bearing throttleng surface radially the hydrostatic bearing oil sealing surface is coaxial with described bottom.
Further, described top axle to hydrostatic bearing, described top radially hydrostatic bearing, the axial hydrostatic bearing in described bottom and described bottom radially the oil pocket of hydrostatic bearing be " U " shape oil pocket.
Further, the top radially hydrostatic bearing and described bottom radially hydrostatic bearing about the rotor symmetry; Described top axle to the axial hydrostatic bearing of hydrostatic bearing and described bottom equally about the rotor symmetry.
Further, described top radially hydrostatic bearing throttleng surface gap, described top axle to hydrostatic bearing throttleng surface gap, described bottom radially static pressure throttleng surface gap and described bottom axial static pressure throttleng surface gap be all 30 μ m.
Further, described top radially hydrostatic bearing oil sealing surface gap, described top axle to hydrostatic bearing oil sealing surface gap, described bottom radially hydrostatic bearing oil sealing surface gap and described bottom axial hydrostatic bearing oil sealing surface gap be all 30 μ m.
In preferred embodiments of the present invention, large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention comprises stator system, rotor-support-foundation system and pressure fluid supply and distribution system.Stator system comprises: base, top end cover, stator circle, bottom head covers and motor stator.Rotor-support-foundation system comprises: top rotor, top rotating disk, rotor, bottom rotating disk, bottom rotor, motor connecting axle and rotor.Pressure fluid is supplied with and distribution system comprises: the top radially hydrostatic bearing, top axle to hydrostatic bearing, bottom radially hydrostatic bearing, the axial hydrostatic bearing in bottom.
The present invention is by adopting the geometry design to stator system and rotor-support-foundation system, set up ultraprecise fluid pressure turntable shaft to and hydrostatic bearing surface throttle flow resistance and realized the self compensation of oil pocket pressure radially.Wherein, the bottom design principle that axially reaches journal bearing with top axle to and journal bearing identical and symmetrical about the stator circle.Top axle to hydrostatic bearing throttleng surface gap, top radially hydrostatic bearing throttleng surface gap, axial hydrostatic bearing throttleng surface gap, bottom and bottom radially hydrostatic bearing throttleng surface gap be 30 μ m; Radially hydrostatic bearing envelope stream interface gap, axial hydrostatic bearing oil sealing surface gap, bottom and bottom axial hydrostatic bearing oil sealing surface gap are 30 μ m to top axle to hydrostatic bearing envelope stream interface gap, top.
Pressure fluid enters the stator circle by oil-in, and two-way inputs to top end cover and bottom head covers about being divided into, and enters into top and base circle cavity respectively.A fluid part that enters in the top annular cavity flows directly into top axle through top axle in the hydrostatic bearing oil pocket after the throttling of hydrostatic bearing throttle clearance, and flow out to hydrostatic bearing oil sealing surface gap through top axle and to enter oil-recovery tank, form top axle and carry oil film to hydrostatic bearing; Another part fluid radially flows directly into the top after the throttling of hydrostatic bearing throttle clearance radially in the hydrostatic bearing oil pocket through the top, and through the top radially hydrostatic bearing oil sealing surface gap flow out and enter oil-recovery tank, form radially hydrostatic bearing carrying oil film of top.Enter that fluid in the base circle cavity forms the bottom axially and radially principle and the formation top axle of hydrodynamic journal liquid polymers to radially hydrodynamic journal liquid polymers are identical.
Large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention, than the restriction that fixed restriction mode throttling parameter can't change, the variation of the real-time feedback load of throttle clearance meeting in the surface throttle mode, and regulate.The Changing Pattern in throttleng surface gap and oil sealing surface gap is just the opposite, and namely the oil sealing surface gap can reduce when throttle clearance increases, and vice versa.Therefore at same offset error, the fluid pressure that produces in the oil pocket will double fixed knot streaming hydrostatic bearing, increase static pressure turntable greatly axially, radially and deflection stiffness, and effectively improve the rotating accuracy of turntable.
Be described further below with reference to the technique effect of accompanying drawing to design of the present invention, concrete structure and generation, to understand purpose of the present invention, feature and effect fully.
Description of drawings
Fig. 1 is the axle sectional view of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention;
Fig. 2 is the exploded view of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention;
Fig. 3 is the rotor-support-foundation system side view of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention;
Fig. 4 is the top rotor front view of large surfaces throttling self compensation ultraprecise fluid pressure turntable rotor-support-foundation system of the present invention;
Fig. 5 is the flow path schematic cross-section of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention;
Fig. 6 is that the top axle of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention is to the flow path cross section detailed maps of hydrostatic bearing;
Fig. 7 is the top of the large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention flow path cross section detailed maps of hydrostatic bearing radially;
Fig. 8 changes schematic diagram for the rotor axial skew back hydrostatic bearing pressure of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention;
Fig. 9 changes schematic diagram for the rotor radial skew back hydrostatic bearing pressure of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention;
Figure 10 changes schematic diagram for hydrostatic bearing pressure after the rotor deflection of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention.
The specific embodiment
The specific embodiment of a kind of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention is described below in conjunction with accompanying drawing.
A kind of large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention comprises stator system, rotor-support-foundation system and pressure fluid supply and distribution system.Rotor-support-foundation system is positioned at the center of whole ultraprecise fluid pressure turntable, and stator system is enclosed in the rotor-support-foundation system outside, and pressure fluid supply and distribution system are between stator system and rotor-support-foundation system.
As illustrated in fig. 1 and 2, stator system comprises: base 6, top end cover 2, stator circle 4, bottom head covers 5 and motor stator 10.Rotor-support-foundation system comprises: top rotor 1, top rotating disk 3, rotor 9, bottom rotating disk 8, bottom rotor 7, motor connecting axle 12 and rotor 11.As shown in Figure 3, pressure fluid is supplied with and distribution system comprises: the top radially hydrostatic bearing 20, top axle to hydrostatic bearing 22, bottom radially hydrostatic bearing 21 and bottom cod 29.
As shown in Figure 1, base 6 is positioned at the bottom of whole liquid static pressure turntable; The outside at the top of base 6 is bottom head covers 5 and bottom rotor 7, and the top of bottom rotor 7 also has bottom rotating disk 8; The outside at the top of bottom head covers 5 is stator circle 4, is followed successively by rotor 9, motor stator 10, rotor 11 and motor connecting axle 12 from outside to inside in the inside of stator circle 4 and the top of base 6; Be top end cover 2 at the top of stator circle 4; Top rotor 1 is positioned at the top of top end cover 2; And, between the lower surface of bottom head covers 5 and stator circle 4, embedded bottom rotating disk 8; Between the upper surface of top end cover 2 and stator circle 4, embedded top rotating disk 3.
In stator system, bottom head covers 5 is fixedly set on the base 6 by screw 18, and stator circle 4 is fixed on the bottom head covers 5, and top end cover 2 is fixed on the stator circle 4; Motor stator 10 is fixedly installed on the base 6.Top end cover 2, stator circle 4 and bottom head covers 5 are fixed together by pin 16.In addition, stator system also comprises two sealing rings 70 and 71, and sealing ring 70 is arranged between top end cover 2 and the stator circle 4, and sealing ring 71 is arranged between stator circle 4 and the bottom head covers 5, and sealing ring 70 and 71 is mainly used in seal fluid.
In the rotor-support-foundation system, the top of rotor 9 is top rotor 1 and top rotating disk 3, the bottom of rotor 9 is bottom rotor 7 and bottom rotating disk 8, rotor 9 is enclosed in the outside of rotor 11 and motor connecting axle 12, motor connecting axle 12 is positioned at the central authorities of whole rotor-support-foundation system, and rotor 11 is fixed on the motor connecting axle 12.Bottom rotor 7 is fixedly set in rotor 9 bottoms with bottom rotating disk 8 by screw 19, and top rotor 1 is fixedly set in rotor 9 tops with top rotating disk 3 by screw 15, and motor connecting axle 12 is fixedly set on portion's top rotor 1 by screw 14.
The top that pressure fluid is supplied with distribution system radially hydrostatic bearing 20 and top axle radially the axial hydrostatic bearing 29 of hydrostatic bearing 21 and bottom is symmetrical about stator circle 4 with the bottom to hydrostatic bearing 22.As shown in Figure 3, top radially hydrostatic bearing 20 is positioned at the upper surface of rotor 9, and top axle is positioned at the lower surface of top rotor 1 to hydrostatic bearing 22; Bottom radially hydrostatic bearing 21 is positioned at the lower surface of rotor 9; The axial hydrostatic bearing 29 in bottom is positioned at the upper surface of bottom rotor 7.Top rotating disk 3 is provided with top axle and reaches radially hydrostatic bearing throttleng surface 60 to hydrostatic bearing throttleng surface 61.Hydrostatic bearing comprises oil pocket and earial drainage face.Top radially hydrostatic bearing 20 comprises oil pocket 25, earial drainage face 24 and oil sealing surface 23; As shown in Figure 4, top axle comprises oil pocket 27, earial drainage face 26 and oil sealing surface 28 to hydrostatic bearing 22.Top axle to the oil pocket of hydrostatic bearing and top radially the oil pocket of hydrostatic bearing be " U " shape oil pocket.The radial and axial hydrostatic bearing in top among the present invention is identical with the structure of the radial and axial hydrostatic bearing in bottom.
Shown in Fig. 5,6 and 7, be equipped with top axle to the hydrostatic bearing throttleng surface at the upper surface 61 of top rotating disk 3 and the lower surface 62 of top end cover 2, and these two top axle are that top axle is to hydrostatic bearing throttleng surface gap 34 to the gap between the hydrostatic bearing throttleng surface; Be equipped with top axle to the hydrostatic bearing oil sealing surface at the upper surface 63 of top end cover 2 and the lower surface 33 of top rotor 1, and these two top axle are that top axle is to hydrostatic bearing oil sealing surface gap 31 to the gap between the hydrostatic bearing oil sealing surface.Be equipped with radially hydrostatic bearing throttleng surface of top at the surface of internal cavity 60 of top rotating disk 3 and the surface 65 of stator circle 4, and these two tops radially the gap between the hydrostatic bearing throttleng surface be radially hydrostatic bearing throttleng surface gap 52, top; Be equipped with radially hydrostatic bearing oil sealing surface of top at the outer surface 66 of rotor 9 and the inner surface 64 of stator circle 4, and these two tops radially the gap between the hydrostatic bearing oil sealing surface be radially hydrostatic bearing oil sealing surface gap 51, top.The top axially with the degree of depth 35 and 69 of hydrostatic bearing oil pocket radially be corresponding top axle to more than ten times of hydrostatic bearing throttleng surface gap or oil sealing surface gap radially, lose in oil pocket to reduce fluid pressure, shown in Fig. 6 and 7.The oil sealing surface of top axle to hydrostatic bearing throttleng surface and top axle to hydrostatic bearing is parallel to each other; The top radially the hydrostatic bearing throttleng surface radially the hydrostatic bearing oil sealing surface is coaxial with the top.In addition, bottom of the present invention axially with the design principle of journal bearing and top axle to identical with the design principle of journal bearing, so axial hydrostatic bearing throttleng surface gap, bottom 42 is the gap between the axial hydrostatic bearing throttleng surface in bottom of the axial hydrostatic bearing throttleng surface in bottom of bottom rotating disk 8 upper surfaces and bottom head covers 5 lower surfaces; Gap between the axial hydrostatic bearing oil sealing surface in bottom of the axial hydrostatic bearing oil sealing surface in bottom of the upper surface that axial hydrostatic bearing oil sealing surface gap 45, bottom is bottom rotor 7 and the lower surface of bottom head covers 5; The bottom radially throttleng surface gap 41 of hydrostatic bearing is the gap between the throttleng surface of hydrostatic bearing radially, bottom of the throttleng surface of hydrostatic bearing and stator circle 4 upper sides radially, bottom of bottom rotating disk 8 sides; The bottom radially hydrostatic bearing oil sealing surface gap 48 be rotor 9 outer surface the bottom radially the inner surface of hydrostatic bearing oil sealing surface and stator circle 4 the bottom radially between the hydrostatic bearing oil sealing surface bottom turntable the gap of existence.Same, the bottom axially and radially the degree of depth of hydrostatic bearing oil pocket be corresponding bottom axially with radially hydrostatic bearing throttleng surface gap or more than ten times of oil sealing surface gap.The oil sealing surface of the axial hydrostatic bearing throttleng surface in bottom and the axial hydrostatic bearing in bottom is parallel to each other; The bottom radially the hydrostatic bearing throttleng surface radially the hydrostatic bearing oil sealing surface is coaxial with the bottom.In a preferred embodiment of the present invention, top axle to hydrostatic bearing throttleng surface gap 34, top radially hydrostatic bearing throttleng surface gap 52, axial hydrostatic bearing throttleng surface gap 42, bottom and bottom radially the throttleng surface gap 41 of hydrostatic bearing be 30 μ m; Top axle to hydrostatic bearing oil sealing surface oil clearance 31, top radially hydrostatic bearing oil sealing surface gap 51, axial hydrostatic bearing oil sealing surface gap 45, bottom and bottom radially hydrostatic bearing oil sealing surface gap 48 be 30 μ m.
The present invention is according to geometry design stator system and rotor-support-foundation system, and the ultraprecise fluid pressure turntable shaft of foundation is to receiving the self compensation of oil pocket pressure with hydrostatic bearing surface throttle flow resistance radially.The flow path of pressure fluid in large surfaces throttling self compensation ultraprecise fluid pressure turntable of the present invention as shown in Figure 5.Pressure fluid enters in the stator circle 4 by oil-in 17, and is divided into and sets out on a journey 50 and following road 49.Setting out on a journey 50, pressure fluid flows into top end cover 2, in toroidal cavity 32, be divided into two parts then, part pressure fluid enters top rotor 1 to hydrostatic bearing throttleng surface gap 34 through top axle the pressurised fluid flow direction of top axle to hydrostatic bearing oil pocket 27(top axle to hydrostatic bearing throttleng surface gap 34 is opposite to the pressurised fluid flow direction of the oil pocket 27 of hydrostatic bearing with top axle), and through top axle 31 outflows to hydrostatic bearing oil sealing surface gap, enter oil-recovery tank 36, form top axle and carry oil film to hydrostatic bearing, specifically as shown in Figure 6; Another part pressure fluid through the top radially hydrostatic bearing throttleng surface gap 52 enter the top radially radially radially the pressurised fluid flow direction of hydrostatic bearing oil pocket 25 be opposite pressurised fluid flow direction and the top in hydrostatic bearing throttleng surface gap 52 at hydrostatic bearing oil pocket 25(top), and via radially hydrostatic bearing oil sealing surface gap 51 outflows of top, enter spill port 38, form radially hydrostatic bearing carrying oil film of top, specifically as shown in Figure 7.On following road 49, pressure fluid flows into bottom head covers 5, in toroidal cavity 44, be divided into two parts then, a part enters in the axial hydrostatic bearing oil pocket 43 in bottom of bottom rotor 7 (the pressurised fluid flow direction in axial hydrostatic bearing throttleng surface gap, bottom 42 is opposite with the pressurised fluid flow direction of the oil pocket 43 of the axial hydrostatic bearing in bottom) through axial hydrostatic bearing throttleng surface gap, bottom 42, and via the 45 back outflows of axial hydrostatic bearing oil sealing surface gap, bottom, directly enter in the base 6; Another part pressure fluid through the bottom radially the throttleng surface gap 41 of hydrostatic bearing enter bottom radially in the hydrostatic bearing oil pocket 40 (bottom radially pressurised fluid flow direction and the bottom in hydrostatic bearing throttleng surface gap 41 radially the pressurised fluid flow direction of the oil pocket 40 of hydrostatic bearing is opposite), and radially hydrostatic bearing oil sealing surface gap 48 outflows through the bottom, enter in the spill port 38, form radially hydrostatic bearing carrying oil film of bottom.Pressure fluid in oil-recovery tank 36 and the spill port 38 flows in the base 6 through drainback passage 37 and 39 and realizes oil return.This shows, enter that fluid in the base circle cavity forms the bottom axially and radially principle and the formation top axle of hydrodynamic journal liquid polymers to radially hydrostatic bearing is identical.In addition, sealing- plug 13,47 and 53 leaks to prevent pressure fluid in order to sealing.
In a preferred embodiment of the present invention, the rotor-support-foundation system of fluid pressure turntable of the present invention axially is offset, and as shown in Figure 8, static pressure is reprinted axial load and become big, and rotor-support-foundation system will offset downward with respect to stator system.Top axle will increase to hydrostatic bearing throttleng surface gap 34, and top axle will reduce to hydrostatic bearing oil sealing surface gap 31 simultaneously.These all will cause top axle to increase to the fluid pressure 56 and 58 in hydrostatic bearing oil pocket 55 and 59.In contrast, axial hydrostatic bearing throttleng surface gap, bottom 42 will reduce, and the bottom axially will increase in hydrostatic bearing oil sealing surface gap 45 simultaneously.These all will cause top axle to reduce to the fluid pressure 68 and 70 in hydrostatic bearing oil pocket 67 and 71.Therefore, the thrust that hydrostatic bearing makes progress will increase with joint efforts, promote rotor-support-foundation system with this and get back to initial position.Because axially the throttling parameter of hydrostatic bearing can change with the variation of throttling surface gap, hydrodynamic journal liquid polymers than the fixed restriction mode, same side-play amount can produce the above pressure of twice and change, and therefore, the present invention can significantly improve the axial rigidity of fluid pressure turntable.
In another preferred embodiment of the present invention, skew has radially taken place in the rotor-support-foundation system of fluid pressure turntable of the present invention, as shown in Figure 9, when rotor-support-foundation system generation axial dipole field (with to the right the skew be example) time, right radial hydrostatic bearing throttleng surface gap 77 and 80 will increase, and right radial hydrostatic bearing oil sealing surface gap 78 and 79 will reduce simultaneously.These all will cause the fluid pressure 75 and 82 in right radial hydrostatic bearing oil pocket 76 and 81 to increase.In contrast, left radial hydrostatic bearing throttleng surface gap 52 and 41 will reduce, and left radial hydrostatic bearing oil sealing surface gap 51 and 48 will increase simultaneously, and these all will cause the fluid pressure 74 and 83 in left radial hydrostatic bearing oil pocket 73 and 84 to reduce.Therefore, hydrostatic bearing thrust left will increase with joint efforts, promote rotor-support-foundation system with this and get back to initial position.Because radially the throttling parameter of hydrostatic bearing can change with the variation of throttling surface gap, hydrodynamic journal liquid polymers than the fixed restriction mode, same side-play amount can produce the above pressure of twice and change, and therefore, the present invention can significantly improve the radial rigidity of fluid pressure turntable.
In another preferred embodiment of the present invention, skew has taken place in the rotor-support-foundation system of fluid pressure turntable of the present invention, as shown in figure 10, and when rotor-support-foundation system deflects (to be deflected to example clockwise).Top static pressure bearing throttleng surface gap, right side 90 and 77 will increase, and top static pressure bearing oil sealing surface gap 94 and 78 will reduce simultaneously.These all will cause top axle to increase to the fluid pressure 58 and 75 in hydrostatic bearing oil pocket 59 and 76.In contrast, hydrostatic bearing throttleng surface gap, bottom, right side 80 and 101 will reduce, and bottom hydrostatic bearing oil sealing surface gap 79 and 97 will increase simultaneously.These all will cause the fluid pressure 82 and 70 in the axial hydrostatic bearing oil pocket 81 and 71 in bottom, right side to reduce.Left side top and bottom hydrostatic bearing are opposite fully with the right side Changing Pattern.Therefore, hydrostatic bearing will produce anticlockwise torque, promote rotor-support-foundation system with this and get back to initial position.Because axially the throttling parameter of hydrostatic bearing can change with the variation of throttling surface gap, hydrodynamic journal liquid polymers than the fixed restriction mode, same side-play amount can produce the above pressure of twice and change, and therefore, the present invention can significantly improve the deflection stiffness of fluid pressure turntable.
More than describe preferred embodiment of the present invention in detail.The ordinary skill that should be appreciated that this area need not creative work and just can design according to the present invention make many modifications and variations.Therefore, all technical staff in the art all should be in the determined protection domain by claims under this invention's idea on the basis of existing technology by the available technical scheme of logical analysis, reasoning, or a limited experiment.
Claims (9)
1. large surfaces throttling self compensation ultraprecise fluid pressure turntable comprises: stator system, rotor-support-foundation system and pressure fluid are supplied with and distribution system, it is characterized in that,
Described rotor is positioned at the center of described turntable, and described stator system surrounds described rotor-support-foundation system, and described pressure fluid supply and distribution system are between described stator system and described rotor-support-foundation system;
Described stator system comprises base, top end cover, stator circle, bottom head covers, motor stator, described bottom head covers is fixedly set on the described base, described stator circle is fixedly set in base end and covers, described top end cover is fixedly set on the described stator circle, and described motor stator is fixedly set on the described base;
Described rotor-support-foundation system comprises top rotor, top rotating disk, rotor, bottom rotating disk, bottom rotor, motor connecting axle and rotor, described base rotor is connected with described bottom rotating disk, and be fixedly set in the bottom of described rotor, described top rotor is connected with described top rotating disk, and be fixedly set in the top of described rotor, described motor connecting axle is fixed on the described top rotor, and described rotor is fixed on the described motor connecting axle;
Described pressure fluid is supplied with and distribution system comprise top axle to hydrostatic bearing and top hydrostatic bearing, the axial hydrostatic bearing in bottom and bottom hydrostatic bearing radially radially, described top axle is positioned at the lower surface of described top rotor to hydrostatic bearing, described top radially hydrostatic bearing is positioned at the outer surface top of described rotor, the axial hydrostatic bearing in described bottom is positioned at the upper surface of bottom rotor, and described bottom radially hydrostatic bearing is positioned at the outer surface bottom of described rotor;
The upper surface of described top rotating disk and the lower surface of described top end cover are equipped with top axle to the hydrostatic bearing throttleng surface, and two described top axle are to forming top axle between the hydrostatic bearing throttleng surface to hydrostatic bearing throttleng surface gap; The upper surface of described top end cover and the lower surface of described top rotor are equipped with top axle to the hydrostatic bearing oil sealing surface, and two described top axle are to forming top axle between the hydrostatic bearing oil sealing surface to hydrostatic bearing oil sealing surface gap; Rotating disk side, described top and described stator circle upper side are equipped with radially hydrostatic bearing throttleng surface of top, and radially hydrostatic bearing throttleng surface gap, top is radially formed between the hydrostatic bearing throttleng surface on two described tops; Described rotor outer surface upside and described stator circle inner surface upside are equipped with radially hydrostatic bearing oil sealing surface of top, and radially hydrostatic bearing oil sealing surface gap, top is radially formed between the hydrostatic bearing oil sealing surface on two described tops; Described bottom disk lower surface and described bottom head covers upper surface are equipped with axially hydrostatic bearing throttleng surface of bottom, and form axially hydrostatic bearing throttleng surface gap, bottom between two axial hydrostatic bearing throttleng surfaces in described bottom; Described bottom rotor upper surface and described bottom head covers lower surface are provided with axially hydrostatic bearing oil sealing surface of bottom, and form axially hydrostatic bearing oil sealing surface gap, bottom between two axial hydrostatic bearing oil sealing surfaces in described bottom; Rotating disk side, described bottom and described stator circle downside are equipped with radially hydrostatic bearing throttleng surface of bottom, and radially hydrostatic bearing throttleng surface gap, bottom is radially formed between the hydrostatic bearing throttleng surface on two described bottoms; Described rotor outer surface and described stator circle inner surface are equipped with radially hydrostatic bearing oil sealing surface of bottom, and journal bearing oil sealing surface gap, bottom is radially formed between the hydrostatic bearing oil sealing surface on two described bottoms.
2. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 1, wherein said top radially hydrostatic bearing, described top axle radially hydrostatic bearing is identical with the structure of the axial hydrostatic bearing in described bottom to hydrostatic bearing, described bottom, all comprise oil pocket and draining face.
3. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 2, wherein said top axle to hydrostatic bearing, described top radially hydrostatic bearing, the axial hydrostatic bearing in described bottom and described bottom radially the degree of depth of the oil pocket of hydrostatic bearing be respectively more than ten times of its corresponding throttleng surface gap or oil sealing surface gap.
4. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 1, the oil sealing surface of wherein said top axle to hydrostatic bearing throttleng surface and described top axle to hydrostatic bearing is parallel to each other; Described top radially the hydrostatic bearing throttleng surface radially the hydrostatic bearing oil sealing surface is coaxial with described top.
5. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 1, the oil sealing surface of the axial hydrostatic bearing throttleng surface in wherein said bottom and the axial hydrostatic bearing in described bottom is parallel to each other; Described bottom radially the hydrostatic bearing throttleng surface radially the hydrostatic bearing oil sealing surface is coaxial with described bottom.
6. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 2, wherein said top axle to hydrostatic bearing, described top radially hydrostatic bearing, the axial hydrostatic bearing in described bottom and described bottom radially the oil pocket of hydrostatic bearing be " U " shape oil pocket.
7. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 2, described top radially hydrostatic bearing and described bottom radially hydrostatic bearing about the rotor symmetry; Described top axle to the axial hydrostatic bearing of hydrostatic bearing and described bottom equally about the rotor symmetry.
8. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 1, wherein said top radially hydrostatic bearing throttleng surface gap, described top axle to hydrostatic bearing throttleng surface gap, described bottom radially static pressure throttleng surface gap and described bottom axial static pressure throttleng surface gap be all 30 μ m.
9. large surfaces throttling self compensation ultraprecise fluid pressure turntable as claimed in claim 1, wherein said top radially hydrostatic bearing oil sealing surface gap, described top axle to hydrostatic bearing oil sealing surface gap, described bottom radially hydrostatic bearing oil sealing surface gap and described bottom axial hydrostatic bearing oil sealing surface gap be all 30 μ m.
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|---|---|---|---|---|
| CN104400019A (en) * | 2014-11-20 | 2015-03-11 | 中国航空工业集团公司北京航空精密机械研究所 | Actively unloading hydrostatic pressure spindle |
| WO2015043228A1 (en) * | 2013-09-25 | 2015-04-02 | 广州市昊志机电股份有限公司 | An air-bearing rotary table |
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| CN110732887A (en) * | 2019-11-19 | 2020-01-31 | 哈尔滨工业大学 | ultra-precision hydrostatic pressure turntable |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618115A (en) * | 1994-12-22 | 1997-04-08 | Rolls-Royce Power Engineering Plc | Method of operating a rotating assembly |
| US7682082B2 (en) * | 2006-06-13 | 2010-03-23 | Ametek-Precitech, Inc. | Compact surface self-compensated hydrostatic bearings |
| CN201900557U (en) * | 2010-12-02 | 2011-07-20 | 天津市津机磨床有限公司 | High-precision rotary worktable of grinding machine |
| CN202065344U (en) * | 2010-11-11 | 2011-12-07 | 伟宝精密有限公司 | Fluid hydrostatic bearing rotary workbench |
| CN102305243A (en) * | 2011-08-31 | 2012-01-04 | 中国人民解放军国防科学技术大学 | Self-compensating fluid hydrostatic bearing |
| CN103056397A (en) * | 2012-12-31 | 2013-04-24 | 哈尔滨工业大学 | Large-diameter ultra-precise air static pressure rotating shafting |
-
2013
- 2013-06-05 CN CN201310222708.7A patent/CN103286660B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618115A (en) * | 1994-12-22 | 1997-04-08 | Rolls-Royce Power Engineering Plc | Method of operating a rotating assembly |
| US7682082B2 (en) * | 2006-06-13 | 2010-03-23 | Ametek-Precitech, Inc. | Compact surface self-compensated hydrostatic bearings |
| CN202065344U (en) * | 2010-11-11 | 2011-12-07 | 伟宝精密有限公司 | Fluid hydrostatic bearing rotary workbench |
| CN201900557U (en) * | 2010-12-02 | 2011-07-20 | 天津市津机磨床有限公司 | High-precision rotary worktable of grinding machine |
| CN102305243A (en) * | 2011-08-31 | 2012-01-04 | 中国人民解放军国防科学技术大学 | Self-compensating fluid hydrostatic bearing |
| CN103056397A (en) * | 2012-12-31 | 2013-04-24 | 哈尔滨工业大学 | Large-diameter ultra-precise air static pressure rotating shafting |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015043228A1 (en) * | 2013-09-25 | 2015-04-02 | 广州市昊志机电股份有限公司 | An air-bearing rotary table |
| CN104400019A (en) * | 2014-11-20 | 2015-03-11 | 中国航空工业集团公司北京航空精密机械研究所 | Actively unloading hydrostatic pressure spindle |
| CN107932314A (en) * | 2017-12-05 | 2018-04-20 | 无锡市明鑫数控磨床有限公司 | Vertical grinder enclosed internal feedback static pressure rotary worktable device |
| CN107932314B (en) * | 2017-12-05 | 2024-03-15 | 无锡市明鑫数控磨床有限公司 | Closed internal feedback static pressure rotary table device for vertical grinder |
| CN111120511A (en) * | 2018-10-31 | 2020-05-08 | 株式会社三丰 | Rotary table equipment |
| CN110067811A (en) * | 2019-05-30 | 2019-07-30 | 中国工程物理研究院机械制造工艺研究所 | A kind of air-float turntable |
| CN110067811B (en) * | 2019-05-30 | 2024-03-26 | 中国工程物理研究院机械制造工艺研究所 | Air-floating rotary table |
| CN110732887A (en) * | 2019-11-19 | 2020-01-31 | 哈尔滨工业大学 | ultra-precision hydrostatic pressure turntable |
| CN114151445A (en) * | 2021-12-08 | 2022-03-08 | 江苏领臣精密机械有限公司 | Self-feedback hydrostatic pressure universal shaft head and hydrostatic pressure rotary table |
| CN114151445B (en) * | 2021-12-08 | 2023-11-24 | 江苏领臣精密机械有限公司 | Self-feedback hydrostatic universal shaft head and hydrostatic turntable |
| CN117484215A (en) * | 2024-01-02 | 2024-02-02 | 中国机械总院集团宁波智能机床研究院有限公司 | Control method and device of aerostatic turntable and aerostatic turntable |
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