JP4151823B2

JP4151823B2 - Micro displacement device

Info

Publication number: JP4151823B2
Application number: JP2002025512A
Authority: JP
Inventors: 広之山宮; 峯夫水村; 三雄山口
Original assignee: SIGMAKOKI Co Ltd
Current assignee: SIGMAKOKI Co Ltd
Priority date: 2002-02-01
Filing date: 2002-02-01
Publication date: 2008-09-17
Anticipated expiration: 2022-02-01
Also published as: JP2003235271A

Description

【０００１】
【発明の属する技術分野】
本発明は、半導体の製造、光ファイバーの接続、高倍率顕微鏡等の微小範囲の位置決めを必要とする分野において用いられる微小変位装置に係り、詳しくは１軸（Ｚ軸）廻りの回転方向θｚの微小変位装置に関する。
【０００２】
【従来の技術】
一般に、位置決め装置は、ネジ機構が用いられるが、近時、超精密加工、半導体の製造、バイオテクノロジー、光ファイバーの接続等の分野では、μｍオーダ、サブμｍオーダ、更にはｎｍオーダの微小範囲の位置決めが求められており、該微小範囲の変位装置としては、ピエゾ素子等の圧電アクチュエータが用いられている。
【０００３】
従来、１軸廻りの回転方向（θｚ）の微小変位装置として、例えば特公平５−５５２６３号公報のものが提案されている。このものは、図６に示すように、一体ブロックから放電加工機により形成された３個の剛体部１，２，３を備えており、左右両剛体部１，３はそれぞれ枠体５，５に固定され、固定側剛体部（固定部）となっており、中央の剛体部２が、点Ｏを中心に回転可能な移動側剛体部（移動部）となっている。両固定部１，３と移動部２との間には、それぞれ２本の撓み梁６ａ，６ｂ，７ａ，７ｂが連結されており、これら撓み梁は、上記中心点Ｏにてその延長線が交差するように放射状に設けられている。
【０００４】
また、両固定部１，３には、それぞれ上記撓み梁の内側において内側に突出する突部１ａ，３ａを有しており、また移動部２の両側には外側に突出する突部２ａ，２ｂを有しており、これら突部１ａ，２ａと２ｂ，３ａの間にはそれぞれ積層ピエゾ素子からなる圧電アクチュエータ９，１０が設置されている。
【０００５】
上記回転用微小変位装置１１は、図７に示すように、上記両圧電アクチュエータ９，１０に圧電を印加して、これらアクチュエータに接続方向の力を発生すると、各撓み梁６ａ，６ｂ，７ａ，７ｂの固定部１，３との連結部から中心点Ｏに延びる直線Ｌ₁，Ｌ₂と、各撓み梁の移動部２との連結部から中心点Ｏに延びる直線Ｌ₁’，Ｌ₂’とが僅かにずれる微小変位を生じ、この結果、移動部２は、点Ｏを中心に微小角度δ回転する。
【０００６】
【発明が解決しようとする課題】
上記回転用微小変位装置１１は、圧電アクチュエータ９，１０の接線方向力により、上記放射方向の撓み梁６ａ，６ｂ，７ａ，７ｂに曲げ変形を生じると、移動部２は、点Ｏを中心に回動する力の他に、副次的に該中心点をずらす方向の力も発生する。上述した回転用微小変位装置１１は、中心点Ｏを通る垂直線を中心に、左右対称に撓み梁及び圧電アクチュエータを設けて、上記副次的な力をキャンセルして、中心点がずれる方向の変位を極力小さくするようにしている。
【０００７】
しかし、上記回転微小変位装置１１は、移動部が放射方向の撓み梁にて浮動支持されている以上、左右の圧電アクチュエータ９，１０の発生力が相違したり、また各撓み梁６ａ，６ｂ，７ａ，７ｂの変形が微妙に異なる等の原因により、中心点Ｏがずれてしまうことがある。
【０００８】
そこで、本発明は、軸受により移動側剛体部を支持することにより、上述した課題を解決した微小変位装置を提供することを目的とするものである。
【０００９】
【課題を解決するための手段】
請求項１に係る本発明は（例えば、図１、図２、図３参照）、第１の（例えば移動側）剛体部（１７…）と、該第１の剛体部に対して１軸を中心とした回転方向に変位自在に支持される第２の（例えば固定側）剛体部（１６）と、前記第１及び第２の剛体部に相対変位を生じる微小変位アクチュエータ（２１）と、を備えてなる微小変位装置（１５）において、前記第１の剛体部（１７…）は、前記微小変位アクチュエータ（２１）に連結される連結ブロック（２２）と、軸（２９）と、平板（１７）と、を一体に固定して構成され、前記軸（２９）を、軸受（３３，３５）を介して前記第２の剛体部（１６）に所定角度回転自在に支持してなり、前記微小変位アクチュエータ（２１）と前記連結ブロック（２２）との間に介在され、前記第２の剛体部（１６）に連結する支点（２５）と、前記微小変位アクチュエータ（２１）に連結する力点（２６）と、前記連結ブロック（２２）に連結する作用点（２７）とを有する変位変更機構（２３）と、前記第２の剛体部（１６）に貫通して螺合される調整スクリュー（２４）と、前記連結ブロック（２２）を回動付勢する圧縮スプリング（３９）と、を備え、前記第２の剛体部（１６）には、中央空部（２０ａ）と、該中央空部（２０ａ）の両側に振り分け配置され、該中央空部（２０ａ）で連通される第１の空部（２０ｂ）及び第２の空部（２０ｃ）とが形成され、前記微小変位アクチュエータ（２１）及び前記変位変更機構（２３）が、前記第１の空部（２０ｂ）に収容され、前記連結ブロック（２２）が前記軸（２９）を中心に回動自在に、前記連結ブロック（２２）において前記軸（２９）を固定した円筒部（２２ａ）が、前記中央空部（２０ａ）に収容され、前記連結ブロック（２２）における前記軸（２９）に対して前記作用点（２７）の反対側に位置する突部（２２ｃ）が、前記第２の空部（２０ｃ）に収容され、該突部（２２ｃ）と、前記軸（２９）とが前記平板（１７）に固定され、前記圧縮スプリング（３９）が、前記突部（２２ｃ）に当接して前記第２の空部（２０ｃ）に収容され、前記圧縮スプリング（３９）による前記連結ブロック（２２）の付勢力を前記変位変更機構（２３）を介して前記微小変位アクチュエータ（２１）に作用し、前記微小変位アクチュエータ（２１）の一端と前記調整スクリュー（２４）の先端とを常時接触させる、ことを特徴とする微小変位装置にある。
【００１０】
請求項２に係る本発明は、（例えば、図５参照）、第１の（例えば移動側）剛体部（１７…）と、該第１の剛体部に対して１軸を中心とした回転方向に変位自在に支持される第２の（例えば固定側）剛体部（１６）と、前記第１及び第２の剛体部に相対変位を生じる微小変位アクチュエータ（２１）と、を備えてなる微小変位装置において、前記第１の剛体部（１７…）は、前記微小変位アクチュエータ（２１）に連結される連結ブロック（２２）と、軸（２９）と、平板（１７）と、を一体に固定して構成され、前記軸（２９）を、軸受（３３，３５）を介して前記第２の剛体部（１６）に所定角度回転自在に支持してなり、前記微小変位アクチュエータ（２１）と前記連結ブロック（２２）との間に介在され、前記第２の剛体部（１６）に連結する支点（２５’）と、前記微小変位アクチュエータ（２１）に連結する力点（２６’）と、前記連結ブロック（２２）に連結する作用点（２７’）とを有する変位変更機構（２３’）と、前記変位変更機構（２３’）に貫通して螺合される調整スクリュー（２４）と、前記連結ブロック（２２）を回動付勢する圧縮スプリング（３９）と、を備え、前記第２の剛体部（１６）には、中央空部（２０ａ）と、該中央空部（２０ａ）の両側に振り分け配置され、該中央空部（２０ａ）で連通される第１の空部（２０ｂ）及び第２の空部（２０ｃ）とが形成され、前記微小変位アクチュエータ（２１）及び前記変位変更機構（２３’）が、前記第１の空部（２０ｂ）に収容され、前記連結ブロック（２２）が前記軸（２９）を中心に回動自在に、前記連結ブロック（２２）において前記軸（２９）を固定した円筒部（２２ａ）が、前記中央空部（２０ａ）に収容され、前記連結ブロック（２２）における前記軸（２９）に対して前記作用点（２７’）の反対側に位置する突部（２２ｃ）が、前記第２の空部（２０ｃ）に収容され、該突部（２２ｃ）と、前記軸（２９）とが前記平板（１７）に固定され、前記圧縮スプリング（３９）が、前記突部（２２ｃ）に当接して前記第２の空部（２０ｃ）に収容され、前記圧縮スプリング（３９）による前記連結ブロック（２２）の付勢力を前記変位変更機構（２３’）に作用し、前記微小変位アクチュエータ（２１）の一端と前記調整スクリュー（２４）の先端とを常時接触させる、ことを特徴とする微小変位装置にある。
なお、上記第１の剛体部（１７，２２，２９）が移動側剛体部となり、上記第２の剛体部（１６）が固定側剛体部となり、従って上記平板（１７）が移動ステージとなって、該移動ステージが軸受（３３，３５）に支持された軸（２９）を中心に回転することが好ましいが、上記関係は相対的なものであって、上記第１の剛体部（１７，２２，２９）が固定側剛体部となり、上記第２の剛体部が可動側剛体部となり、従って上記平板（１７）が基盤となって、該基盤に固定されている軸（２９）を中心に、軸受（３３，３５）を介して第２の剛体部（１６）が回転変位するようにしてもよい。
【００１１】
請求項３に係る本発明は、前記中央空部（２０ａ）及び前記第２の空部（２０ｃ）に、前記連結ブロック（２２）を、該空部（２０ａ，２０ｃ）の厚さ方向（ｔ）に対して略々納まるように配置し、
前記連結ブロック（２２）の円筒部（２２ａ）は、厚さ方向に薄く形成され、
前記第２の剛体部（１６）は、前記軸に所定間隙（ａ）を存して対向配置される少なくとも２箇所の支持部（１６ｄ，１６ｅ）を有し、該支持部にて前記軸受（３３，３５）を支持してなる、
請求項１又は２記載の微小変位装置にある。
【００１２】
請求項４に係る本発明は、前記軸受（３３，３５）は、前記軸（２９）の両端部分に配置されたラジアル軸受からなり、該軸受の内輪（３３ａ，３５ａ）を前記軸（２９）に嵌合すると共に、該軸受の外輪（３３ｂ，３５ｂ）を前記第２の剛体部の支持部（１６ｄ，１６ｅ）の空部（２０ａ）に嵌合し、
前記軸の一端に鍔部（２９ａ）を形成して、該鍔部に前記一方の軸受（３３）の内輪（３３ａ）を抜止め・当接すると共に、前記他方の軸受（３５）の内輪（３５ａ）を前記平板（１７）に当接し、
前記軸（２９）を前記平板（１７）にボルト（３０）にて締付けることにより前記両軸受のガタ取りをしてなる、
請求項３記載の微小変位装置にある。
【００１９】
請求項５に係る本発明は、前記第１の剛体部が移動側剛体部（１７…）であり、前記第２の剛体部が固定側剛体部（１６）であり、前記平板が移動ステージ（１７）である、請求項１ないし４のいずれか記載の微小変位装置にある。
【００２０】
［作用］
以上構成に基づき、圧電アクチュエータ（２１）の発生した変位は、第２の剛体部（１６）との相対変位として、連結ブロック（２２）に伝達され、かつ該連結ブロックは、軸（２９）に固定されていると共に、該軸が軸受（３３，３５）を介して第２の剛体部（１６）に回転自在に支持されているので、上記連結ブロック（２２）は、軸（２９）を中心として第２の剛体部（１６）に対して相対的に回転し、該連結ブロックと一体の平板（１７）が相対的に所定角度回転方向に変位する。
【００２１】
なお、上記カッコ内の符号は、図面と対照するためのものであるが、これにより各請求項の構成に何等影響を及ぼすものではない。
【００２２】
【発明の効果】
請求項１及び請求項２に係る本発明によると、第１の剛体部は、一体に固定された連結ブロック、軸及び平板からなり、かつ該軸が、軸受を介して第２の剛体部に回転自在に支持されているので、微小変位アクチュエータからの変位により、上記第１の剛体部は、軸受により軸を中心に第２の剛体部に対して相対的に回転し、従って第１及び第２の剛体部は、中心からずれることなく正確な回転変位を行うことができる。
また、変位変更機構により、微小変位アクチュエータの変位量を変更して移動側の剛体部に伝達することができ、平板での所望の回転変位を得ることができる。
また、調整スクリューを容易に取付けることができ、簡単な構造でもって、該調整スクリューの手動による粗動調整と、微小変位アクチュエータによる微動調整とが相俟って、効率的な微小範囲の位置決め調整を行うことができる。
また、連結ブロックを圧縮スプリングにより回動付勢して、調整スクリューの先端と微小変位アクチュエータの一端とが常に当接を維持するように構成されているので、調整スクリューがどのような調整範囲にあっても、該調整スクリューによる粗動調整及び微小変位アクチュエータによる微動調整を正確かつ確実に行うことができる。
【００２３】
請求項３に係る本発明によると、連結ブロックは、第２の剛体部に形成された空部に、その厚さ内に納まるように配置され、かつ連結ブロックを薄い円筒部にて軸に固定すると共に、該軸を支持する軸受を、第２の剛体部の少なくとも２箇所の支持部にて支持したので、微小変位装置は、コンパクト、特に回転軸方向（厚さ方向）にコンパクトに構成でき、また放電加工機等により高精度で容易に製造することができる。
【００２４】
請求項４に係る本発明によると、軸を支持する両軸受をラジアル軸受として、第１及び第２の剛体部を軽い力で相対変位し得るものでありながら、ボルトにより締付けることにより両軸受のガタをなくすことができ、精度の高い回転支持により、高い精度での回転方向の位置決めを行うことができる。
【００３１】
請求項５に係る本発明によると、第１の剛体を固定側剛体として、第２の剛体を可動側剛体とし、かつ平板を移動ステージとするので、幅（上下方向高さ）のある第１の剛体が固定側剛体となり、平板からなる移動ステージを有する第２の剛体が可動側剛体となる合理的な構成の微小変位装置を得ることができる。
【００３２】
【発明の実施の形態】
以下、図面に沿って、本発明の実施の形態について説明する。図１は、本発明に係る１軸（Ｚ軸）廻りの回転（θｚ）に係る微小変位装置を示す平面図、図２は、その上板（平板）である移動ステージを取り除いた状態を示す平面図、図３は、図１，図２のＡ−Ａ部分の断面図、図４は、図１，図２のＢ−Ｂ部分の断面図である。微小変位装置１５は、平面視略々正方形からなり、３板等の多数の板を積層して構成された下板１６、１板の平板からなる上板１７とを有しており、下板１６は、基台に固定又は載置される基盤（固定側剛体部；第２の剛体部）を構成し、上板１７は、１軸廻り（θｚ）の回転方向の微細動が要求される移動ステージを構成する。上記下板１６は、４隅部１６ａが切欠かれており、また上記上板１７は、辺中央部１７ａが切欠かれており、該中央切欠き部には下板１６に植設されたピン１９が位置して、移動ステージである上板１７の回動量を規制している。
【００３３】
そして、下板１６は、図２に示すように、中央空部２０ａで連通する所定形状の空部２０ｂ，２０ｃが放電加工機により切抜かれており、一方の空部２０ｂに圧電アクチュエータ２１及び変位拡大機構２３等が収容され、また中央空部２０ａ及び他方の空部２０ｃに亘って可動（連結）ブロック２２が収容されている。圧電アクチュエータ２１は、複数のピエゾ素子が積層して形成され、その長手方向を上記下板１６の一辺に略々平行に収容され、その一（基）端が、上記下板１６に形成したネジ孔（図示せず）に螺合・貫通するマイクロメータ等の調整スクリュー２４の先端２４ａに当接している。なお、該調整スクリュー２４の操作部となる摘み部２４ｂは、上記下板１６の外方に突出して外部から調整可能となっている。また、該調整スクリュー２４は、マイクロメータに限らず、単純なネジからなるものでもよい。
【００３４】
前記変位拡大機構２１は、所定長さの剛体からなり、放電加工等により、前記下板１６の少なくともその（中央の）一枚に一体に形成されており、その一端が下板１６に薄肉平板からなる弾性ヒンジ２５を介して連結し、また前記圧電アクチュエータ２１の先端に同じく薄肉平板からなる弾性ヒンジ２６を介して連結し、更に前記可動ブロック２２に同じく薄肉平板からなる弾性ヒンジ２７を介して連結している。そして、前記３個の弾性ヒンジ２５，２６，２７は、すべて同じ方向に平行に延びており、下板１６に連結する弾性ヒンジ２６は、支点を構成し、圧電アクチュエータ２１に連結する弾性ヒンジ２６は力点を構成し、可動ブロック２２に連結する弾性ヒンジ２７は作用点を構成し、上記支点２５と力点２６とは近接して配置され、力点２６に作用する圧電アクチュエータ２１からの変位を拡大して作用点２７に伝達する。
【００３５】
前記可動ブロック２２は、上述と同様に、放電加工機により一体に刳り貫かれて形成されており、図２及び図３に示すように、中央部２２ａが円筒状に比較的薄く（ｔ１）形成され、該円筒中央部以外は、下板１６と略々同じ厚さ（ｔ）からなり、（ｔ１／ｔ＝０．３〜０．５）、かつ上記中央円筒部２２ａの中心に所定径の丸孔２８が形成されており、更に上記円筒部２２ａにあっても、円筒部以外である突出部２２ｂ，２２ｃに位置する方向にあっては、比較的幅広く形成され（２２ａ１；図２及び図３参照）、それ以外の方向にあっては、比較的幅狭に形成されている（２２ａ２；図２及び図４参照）。また、上記円筒部中心の丸孔２８には軸２９が嵌合されており、該軸２９の上端は前記上板１７にボルト３０により固定されている。また、可動ブロック２２は、３個のボルト３１（図１参照、図２にボルト孔３１ａを示す）により上板１７と一体に固定されており、かつ上記軸２９は、可動ブロック２２に形成された横孔２２ｄに螺合する押しネジ３２により一体に固定されている。従って、移動ステージとなる上板（平板）１７、可動ブロック２２及び軸２９は一体に固定されて、移動側剛体部（第１の剛体部）を構成している。
【００３６】
そして、軸２９下端の鍔部２９ａと上記可動ブロックの円筒部２２ａ下面との間、及び該可動ブロック円筒部２２ａ上面と上板１７下面との間は、それぞれアンギュラコンタクトボールベアリング等のラジアル軸受３３，３５が装着されている。なお、これら軸受は、ラジアル軸受に限らず、アンギュラコンタクトタイプ等のスラストベアリングでもよく、またボールベアリングに限らず、コロ軸受、更にブッシュ等の滑り軸受等の他の軸受でもよい。上記軸受３３，３５は、可動ブロック２２部分（図３参照）にあっては、薄肉円筒部２２ａの上下面に形成される空部Ｃ，Ｃに位置し、その内輪３３ａ，３５ａが軸２９に嵌合していると共に、その外輪３３ｂ，３５ｂと肉厚部分（２２ｂ，２２ｃ）との間に所定空隙を存している。
【００３７】
一方、前記下板１６は、図２に示すように、上記空部２０ａ，２０ｂ，２０ｃが刳り抜かれた所定以外において、該中央空部２０ａに臨む２箇所に支持部１６ｄ，１６ｅを有しており、これら支持部は、前記軸２９に所定間隙ａを存して対向配置されている。そして、上記軸２９と同心状に形成されている２個の支持部１６ｄ，１６ｅにおける中央空部２０ａには、図４に示すように、前記２個の軸受３３，３５の外輪３３ｂ，３５ｂが嵌合・支持されており、かつこれら軸受３３，３５の間において、該下板１６の中央空部２０ａとの間に空隙を存して、前記可動ブロックの円筒幅狭部２２ａ２が位置している。なお、上記軸受の外輪３３ｂ，３５ｂは、鍔部を有しており、該鍔部が下板１６の上下面に当接して、軸方向に位置決めされている。従って、移動側剛体部である軸２９は、固定側剛体部である下板１６（２箇所の支持部１６ｄ，１６ｅ）に軸受３３，３５を介して、所定角度回動自在に支持されている。また、ボルト３０を締付けることにより、アンギュラコンタクトボールベアリングからなる軸受３３，３５は、その内輪３３ａ，３５ａを軸方向に相対移動してガタ（隙間）がないように締付けられる。
【００３８】
また、前記可動ブロック２２の一方の突部２２ｃと、下板１６に植設されたリテーナ３７との間にスプリング３９が縮設されており、可動ブロック２２を図２において時計方向に付勢している。該可動ブロック２２の付勢力は、変位拡大機構２３を介して圧電アクチュエータ２１に図中上方向の付勢力として作用し、該圧電アクチュエータ２１の基端と調整スクリュー先端２４ａとの接触を常時確保する。また、上記可動ブロック２２の突部２２ｃには腕２２ｃ１が突出して形成されており、該腕２２ｃ１及び前記２個の突部２２ｂ，２２ｃにそれぞれボルト３１により上板１７が固定され、可動ブロック２２に、移動ステージとなる上板１７をバランスよく固定している。
【００３９】
ついで、上述構成による微小変位装置１５の作用について説明する。まず、調整スクリュー２４を手動操作することにより、該スクリュー先端の変位は、一定長さにある圧電アクチュエータ２１を介して変位拡大機構２３の力点ヒンジ２６に伝達され、更に該変位拡大機構２３により拡大された変位は、作用点ヒンジ２７を介して可動ブロック２２に伝達される。該可動ブロック２２は、軸受３３，３５を介して軸２９を中心に回動し、該軸２９に一体の移動ステージである上板１７を回動し、これにより移動ステージ１７は、大まかな回動方向の位置決め（粗動位置決め）がなされる。
【００４０】
該粗動位置調整された状態で、コントローラにより圧電アクチュエータ２１に所定電圧を供給する。該圧電アクチュエータは、その供給電圧と変位との間に所定関係を備えており、上記所定電圧の印加により所定の微小変位を生ずる。この状態では、調整スクリュー２４は所定螺合状態に保持されており、かつ上述したように、圧縮スプリング（付勢手段）３９によりスクリューの先端２４ａと圧電アクチュエータ２１の基端とは常に当接した状態にあり、上述した圧電アクチュエータ２１の長さ方向の微小変位は、変位拡大機構２３の力点であるヒンジ２５に作用し、該変位拡大機構２３は、支点ヒンジ２５を支点として、作用点ヒンジ２７に変位を拡大して作用する。一例として、圧電アクチュエータ２１の最大変位が約１７［μｍ］であり、上記変位拡大機構２３によるてこ比により、５〜１１倍に拡大されて、作用点での変位は、８５〜１８７［μｍ］となる。
【００４１】
そして、上述した調整スクリュー２４による粗動と同様に、上記圧電アクチュエータ２１に基づく変位拡大機構２３の作用点ヒンジ２７の変位は、可動ブロック２２に伝達される。該可動ブロック２２は、その円筒部２２ａにて軸２９に固定されており、かつ該軸２９は、図４に示すように、下板１６の支持部１６ｄ，１６ｅにて軸受３３，３５により所定角度回動自在に支持されており、従って上記作用点ヒンジ２７からの可動ブロック２２の変位は、軸２９を中心とした回転変位となり、該回転変位は、可動ブロックと一体の上板からなる移動ステージ１７に伝達されて、微小変位装置１５を１軸（Ｚ軸）を中心とした回動量（θｚ）として位置決めする。
【００４２】
ついで、図５に沿って一部変更した実施の形態について説明する。なお、本実施の形態は、先の実施の形態に比して、変位拡大機構部分が相違しているが、他の部分は同様なので、同一符号を付して説明を省略する。
【００４３】
本変位拡大機構２３’は、固定側剛体部である下板１６と別体の別部材からなり、平面視屈曲形状のブロックからなる。該変位拡大機構２３’は、下板１６の隅部に開口する空部２０ｂに収納され、該開口部分を閉塞するように延びる第１の突出部２３ａと、圧電アクチュエータ２１に沿って延びる本体部２３ｂと、該本体部の端から鍵状に延びる第２の突出部２３ｃと、を有している。そして、第１の突出部側の本体部２３ｂには半円形の突起２５’が形成されており、該突起が下板１６に形成された半円形の凹部４０に嵌合して、面対偶からなる支点２５’を構成している。
【００４４】
前記第１の突出部２３ａにはネジ孔が形成されており、該ネジ孔には調整スクリュー２４が貫通して螺合しており、該スクリュー２４の先端２４ａが圧電アクチュエータ２１の一端に当接している。該圧電アクチュエータ２１は、その他端が下板１６に当接しており、その一端に前記調整スクリューの半球状からなる先端２４ａが当接して、点対偶からなる力点２６’を構成している。また、前記第２の突出部２３ｃには半円形等の突起２７’が形成されており、該突起は、可動ブロック２２の突出部２２ｂに当接して作用点２７’を構成している。
【００４５】
以上構成により、圧電アクチュエータ２１又は調整スクリュー２４による力点２６’の変位は、変位拡大機構２３’が支点２５’を中心に回動することにより作用点２７’に拡大して伝達し、該拡大した変位が可動ブロック２２の突出部２２ｂに伝達される。なお、上記力点、作用点の点線対偶は、すべり運動からなるが、これは、コロ等を介在してころがり運動により接触してもよい。
【００４６】
また、上述した実施の形態は、圧電アクチュエータ２１と可動ブロック２２との間に変位拡大機構を介在して、上記アクチュエータの変位を拡大して可動ブロックに伝達しているが、これに限らず、圧電アクチュエータを直接可動ブロックに連結しても、またてこ比を縮小するようにして用いてもよい。これにより、圧電アクチュエータのストローク増大及び更に微小な変位（サブμｍオーダ、ｎｍオーダ）の位置決め要求等に対応できる。従って、変位拡大機構は、てこ比により変位を変更し得る変位変更機構であればよい。
【図面の簡単な説明】
【図１】本発明に係る回転微小変位装置を示す平面図。
【図２】その移動ステージ（上板）を取り除いた状態の平面図。
【図３】図１及び図２のＡ−Ａ線による断面図。
【図４】図１及び図２のＢ−Ｂ線による断面図。
【図５】一部変更した実施の形態を示す図２と同様な平面図。
【図６】従来の技術による回転微小変位装置を示す平面図。
【図７】その回転変位状態を示す平面図。
【符号の説明】
１５微小変位装置
１６第２の（固定側）剛体部（下板）
１６ｄ，１６ｅ支持部
１７平板（移動ステージ、上板）
２０ａ，２０ｂ，２０ｃ空部
２１微小変位（圧電）アクチュエータ
２２連結（可動）ブロック
２２ａ円筒部
２２ｃ突部
２３，２３’ 変位変更（拡大）機構
２４調整スクリュー
２５支点（弾性）ヒンジ
２６力点（弾性）ヒンジ
２７作用点（弾性）ヒンジ
２５’ 支点（面対偶）
２６’ 力点（線点対偶）
２７’ 作用点（線点対偶）
２９軸
２９ａ鍔部
３３，３５軸受
３３ａ，３５ａ内輪
３３ｂ，３５ｂ外輪
３９スプリング[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a micro-displacement device used in a field that requires positioning in a micro range, such as semiconductor manufacturing, optical fiber connection, and high-power microscope, and more specifically, a micro displacement in a rotation direction θz around one axis (Z axis). The present invention relates to a displacement device.
[0002]
[Prior art]
Generally, a screw mechanism is used for the positioning device. Recently, in the fields of ultra-precision processing, semiconductor manufacturing, biotechnology, optical fiber connection, etc., a micro range of micrometer order, sub-micrometer order, and even nm order. Positioning is required, and a piezoelectric actuator such as a piezo element is used as the displacement device in the minute range.
[0003]
Conventionally, for example, a device disclosed in Japanese Patent Publication No. 5-55263 has been proposed as a minute displacement device in a rotational direction (θz) around one axis. As shown in FIG. 6, this is provided with three rigid body parts 1, 2 and 3 formed from an integral block by an electric discharge machine, and the left and right rigid body parts 1 and 3 are respectively provided with frame bodies 5 and 5. The center rigid body portion 2 is a movable side rigid body portion (movable portion) that can rotate around the point O. Two bending beams 6 a, 6 b, 7 a, 7 b are connected between the fixed portions 1, 3 and the moving portion 2, and these bending beams are extended at the center point O. It is provided radially so as to intersect.
[0004]
The fixed portions 1 and 3 have protrusions 1a and 3a that protrude inward on the inside of the bending beam, respectively, and protrusions 2a and 2b that protrude outward on both sides of the moving portion 2. Between these protrusions 1a, 2a and 2b, 3a, piezoelectric actuators 9 and 10 each comprising a laminated piezoelectric element are installed.
[0005]
As shown in FIG. 7, when the micro displacement device 11 for rotation applies a piezoelectric force to the piezoelectric actuators 9 and 10 and generates a force in the connecting direction to the actuators, the bending beams 6 a, 6 b, 7 a, A straight line L extending from the connecting portion with the fixed portions 1 and 3 of 7b to the center point O₁, L₂And a straight line L extending from the connecting portion of each bending beam to the moving portion 2 to the center point O.₁', L₂As a result, the moving unit 2 rotates by a minute angle δ around the point O.
[0006]
[Problems to be solved by the invention]
When the rotating micro-displacement device 11 causes bending deformation in the radial bending beams 6a, 6b, 7a, and 7b due to the tangential force of the piezoelectric actuators 9 and 10, the moving unit 2 is centered on the point O. In addition to the rotating force, a force in the direction of shifting the center point is also generated secondary. The rotating micro displacement device 11 described above is provided with bending beams and piezoelectric actuators symmetrically about a vertical line passing through the center point O, canceling the secondary force, and shifting the center point. The displacement is made as small as possible.
[0007]
However, in the rotary minute displacement device 11, since the moving part is floatingly supported by the bending beam in the radial direction, the generated forces of the left and right piezoelectric actuators 9 and 10 are different, and the bending beams 6a, 6b, The center point O may be displaced due to a slight difference in deformation of 7a and 7b.
[0008]
Then, this invention aims at providing the micro displacement apparatus which solved the subject mentioned above by supporting a movement side rigid body part with a bearing.
[0009]
[Means for Solving the Problems]
  The present invention according to claim 1(For example, see FIGS. 1, 2, and 3), The first (egMoveSide) Rigid body (17 ...) And a second (for example, movably supported in the rotational direction about one axis with respect to the first rigid body portion)FixedSide) Rigid body (16) And a micro displacement actuator (21) that produces a relative displacement in the first and second rigid body portions, the first rigid body portion(17 ...)Is constituted by integrally fixing a connecting block (22) connected to the minute displacement actuator (21), a shaft (29), and a flat plate (17), and the shaft (29) is connected to a bearing ( 33, 35) and supported by the second rigid body portion (16) so as to be rotatable by a predetermined angle.And a fulcrum (25) interposed between the minute displacement actuator (21) and the connection block (22) and connected to the second rigid body portion (16), and connected to the minute displacement actuator (21). And a displacement changing mechanism (23) having a force point (26) to be connected and an action point (27) to be connected to the connecting block (22), and an adjustment screwed through the second rigid body portion (16). A screw (24), and a compression spring (39) that urges the connection block (22) to rotate. The second rigid body portion (16) includes a central empty portion (20a), A first vacant portion (20b) and a second vacant portion (20c) are formed and arranged on both sides of the vacant portion (20a) and communicated with the central vacant portion (20a). 21) and the displacement changing mechanism (23) A cylinder which is accommodated in the first empty portion (20b) and in which the connecting block (22) is rotatable about the shaft (29), and the shaft (29) is fixed to the connecting block (22). A protrusion (22c) that is housed in the central empty part (20a) and is located on the opposite side of the operating point (27) with respect to the shaft (29) in the connection block (22); The protrusion (22c) and the shaft (29) are fixed to the flat plate (17), and the compression spring (39) is inserted into the protrusion (20c). 22c) and is accommodated in the second empty portion (20c), and the urging force of the connecting block (22) by the compression spring (39) is applied to the minute displacement actuator via the displacement changing mechanism (23). Acting on (21), said minute change An actuator (21) at one end and the contacting always a tip of the adjusting screw (24) of,There is a micro displacement device characterized by the above.
[0010]
The present invention according to claim 2 includes (for example, see FIG. 5), a first (for example, moving side) rigid body portion (17...), And a rotation direction about one axis with respect to the first rigid body portion. A micro displacement comprising a second (for example, a fixed side) rigid body portion (16) that is movably supported by the first and second rigid body portions, and a micro displacement actuator (21) that causes a relative displacement in the first and second rigid body portions. In the apparatus, the first rigid body portion (17) integrally fixes the connecting block (22), the shaft (29), and the flat plate (17) connected to the minute displacement actuator (21). The shaft (29) is supported by the second rigid body portion (16) via bearings (33, 35) so as to be rotatable at a predetermined angle, and is connected to the minute displacement actuator (21). The second rigid body portion (16) interposed between the block (22) and the second rigid body portion (16). A displacement changing mechanism (23 ′) having a connecting fulcrum (25 ′), a force point (26 ′) connected to the minute displacement actuator (21), and an action point (27 ′) connected to the connecting block (22). ), An adjustment screw (24) that is threaded through the displacement changing mechanism (23 ′), and a compression spring (39) that urges the connection block (22) to rotate. The second rigid body portion (16) is divided and arranged on the both sides of the central empty portion (20a) and the central empty portion (20a), and the first empty portion (20b) communicated with the central empty portion (20a). ) And a second empty portion (20c), and the minute displacement actuator (21) and the displacement changing mechanism (23 ′) are accommodated in the first empty portion (20b), and the connecting block ( 22) is rotatable about the axis (29), A cylindrical portion (22a) to which the shaft (29) is fixed in the connection block (22) is accommodated in the central empty portion (20a), and the action point with respect to the shaft (29) in the connection block (22). A protrusion (22c) located on the opposite side of (27 ') is accommodated in the second empty part (20c), and the protrusion (22c) and the shaft (29) are connected to the flat plate (17). The compression spring (39) is in contact with the protrusion (22c) and is accommodated in the second empty portion (20c), and the connection block (22) is attached by the compression spring (39). The microdisplacement device is characterized in that a force is applied to the displacement changing mechanism (23 ′) so that one end of the microdisplacement actuator (21) and the tip of the adjustment screw (24) are always in contact with each other.
  The first rigid body portion (17, 22, 29) is a moving-side rigid body portion, the second rigid body portion (16) is a stationary-side rigid body portion, and thus the flat plate (17) is a moving stage. The moving stage preferably rotates about the shaft (29) supported by the bearings (33, 35), but the above relationship is relative and the first rigid body portion (17, 22). 29) becomes a fixed-side rigid body part, and the second rigid body part becomes a movable-side rigid body part. Therefore, the flat plate (17) serves as a base, and the shaft (29) fixed to the base is centered. The second rigid body portion (16) may be rotationally displaced via the bearings (33, 35).
[0011]
  Claim3The present invention relates to the aboveCentral empty part (20a) and said second empty part (20c)The connecting block (22)(20a, 20c)Are arranged so as to be approximately within the thickness direction (t) of
  The connecting block (22)Cylindrical part (22a)Is thin in the thickness directionFormed,
  The second rigid body portion (16) has at least two support portions (16d, 16e) disposed opposite to each other with a predetermined gap (a) on the shaft, and the bearing ( 33, 35)
  Claim 1Or 2It exists in the described micro displacement apparatus.
[0012]
  Claim4According to the present invention, the bearings (33, 35) comprise radial bearings disposed at both ends of the shaft (29), and the inner rings (33a, 35a) of the bearings are fitted to the shaft (29). And the outer ring (33b, 35b) of the bearing is fitted into the empty part (20a) of the support part (16d, 16e) of the second rigid body part,
  A flange part (29a) is formed at one end of the shaft, and the inner ring (33a) of the one bearing (33) is retained and abutted against the flange part, and the inner ring (35a) of the other bearing (35) ) In contact with the flat plate (17),
  The both bearings are loosened by tightening the shaft (29) to the flat plate (17) with a bolt (30).
  Claim3It exists in the described micro displacement apparatus.
[0019]
  Claim5According to the present invention, the first rigid body portion isMoveSide rigid body (17 ...And the second rigid body portion isFixedSide rigid body (16The flat plate is a moving stage (17).4The micro displacement device according to any one of the above.
[0020]
[Action]
Based on the above configuration, the displacement generated by the piezoelectric actuator (21) is transmitted to the connecting block (22) as a relative displacement with the second rigid body portion (16), and the connecting block is transferred to the shaft (29). Since the shaft is fixed and rotatably supported by the second rigid body portion (16) via the bearings (33, 35), the connecting block (22) is centered on the shaft (29). As a relative rotation with respect to the second rigid body portion (16), and the flat plate (17) integrated with the connection block is relatively displaced in the rotation direction by a predetermined angle.
[0021]
In addition, although the code | symbol in the said parenthesis is for contrast with drawing, it has no influence on the structure of each claim by this.
[0022]
【The invention's effect】
  Claim 1And claim 2According to the present invention, the first rigid body portion includes a connecting block, a shaft, and a flat plate that are integrally fixed, and the shaft is rotatably supported by the second rigid body portion via the bearing. Therefore, due to the displacement from the minute displacement actuator, the first rigid body portion is rotated relative to the second rigid body portion around the axis by the bearing, and therefore the first and second rigid body portions are centered. Accurate rotational displacement can be performed without deviating from the above.
In addition, the displacement changing mechanism can change the displacement amount of the minute displacement actuator and transmit it to the rigid body portion on the moving side, so that a desired rotational displacement on the flat plate can be obtained.
In addition, the adjustment screw can be easily installed, and with a simple structure, the coarse adjustment by manual adjustment of the adjustment screw and the fine adjustment by the micro displacement actuator are combined, so that the positioning adjustment of the minute range is efficient. It can be performed.
  In addition, the connecting block is configured to rotate and bias with a compression spring so that the tip of the adjusting screw and one end of the minute displacement actuator are always kept in contact with each other. Even if it exists, the coarse motion adjustment by this adjustment screw and the fine motion adjustment by a micro displacement actuator can be performed correctly and reliably.
[0023]
  Claim3According to the present invention, the connecting block is disposed in the hollow portion formed in the second rigid body portion so as to be within the thickness thereof, and the connecting block is fixed to the shaft by the thin cylindrical portion, Since the bearing that supports the shaft is supported by at least two support portions of the second rigid body portion, the micro displacement device can be configured compactly, particularly in the direction of the rotation axis (thickness direction), and discharge It can be easily manufactured with high accuracy by a processing machine or the like.
[0024]
  Claim4According to the present invention, both bearings supporting the shaft are radial bearings, and the first and second rigid body portions can be relatively displaced with a light force, but the backlash of both bearings is eliminated by tightening with bolts. In addition, the rotation support with high accuracy enables positioning in the rotation direction with high accuracy.
[0031]
  Claim5According to the present invention, since the first rigid body is a fixed-side rigid body, the second rigid body is a movable-side rigid body, and the flat plate is a moving stage, the first rigid body having a width (vertical height) is obtained. It is possible to obtain a micro-displacement device having a rational configuration in which the second rigid body having a movable stage made of a flat plate becomes a fixed-side rigid body and the movable-side rigid body.
[0032]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view showing a micro-displacement device related to rotation (θz) around one axis (Z axis) according to the present invention, and FIG. 2 shows a state where a moving stage which is an upper plate (flat plate) is removed. 3 is a cross-sectional view taken along the line AA in FIGS. 1 and 2, and FIG. 4 is a cross-sectional view taken along the line BB in FIGS. The micro-displacement device 15 has a substantially square shape in plan view, and includes a lower plate 16 formed by laminating a large number of plates such as three plates, and an upper plate 17 formed of one flat plate. Reference numeral 16 denotes a base (fixed-side rigid body part; second rigid body part) fixed or placed on the base, and the upper plate 17 is required to be finely moved in the rotational direction around one axis (θz). Configure the moving stage. The lower plate 16 has four corners 16a cut out, and the upper plate 17 has a side central portion 17a cut out, and a pin 19 implanted in the lower plate 16 in the central cutout portion. Is positioned to regulate the amount of rotation of the upper plate 17 which is a moving stage.
[0033]
As shown in FIG. 2, the lower plate 16 has a predetermined shape of hollow portions 20b and 20c communicated with the central hollow portion 20a cut out by an electric discharge machine. An expansion mechanism 23 and the like are accommodated, and a movable (connected) block 22 is accommodated across the central empty portion 20a and the other empty portion 20c. The piezoelectric actuator 21 is formed by laminating a plurality of piezoelectric elements, the longitudinal direction of which is accommodated substantially parallel to one side of the lower plate 16, and one (base) end of the piezoelectric actuator 21 is a screw formed on the lower plate 16. It abuts on the tip 24a of an adjusting screw 24 such as a micrometer that is screwed and penetrated into a hole (not shown). Note that a knob portion 24b serving as an operation portion of the adjustment screw 24 protrudes outward from the lower plate 16 and can be adjusted from the outside. The adjustment screw 24 is not limited to a micrometer, and may be a simple screw.
[0034]
The displacement enlarging mechanism 21 is made of a rigid body having a predetermined length, and is integrally formed on at least one (center) of the lower plate 16 by electric discharge machining or the like, and one end of the lower plate 16 is formed on the lower plate 16 with a thin flat plate. It is connected to the tip of the piezoelectric actuator 21 via an elastic hinge 26 made of a thin flat plate, and is further connected to the movable block 22 via an elastic hinge 27 made of a thin flat plate. It is connected. The three elastic hinges 25, 26 and 27 all extend in parallel in the same direction, and the elastic hinge 26 connected to the lower plate 16 constitutes a fulcrum and is connected to the piezoelectric actuator 21. Constitutes a force point, and an elastic hinge 27 connected to the movable block 22 constitutes an action point. The fulcrum 25 and the force point 26 are arranged close to each other, and the displacement from the piezoelectric actuator 21 acting on the force point 26 is enlarged. Is transmitted to the action point 27.
[0035]
Similarly to the above, the movable block 22 is formed by being integrally penetrated by an electric discharge machine, and as shown in FIGS. 2 and 3, the central portion 22a is formed in a relatively thin cylindrical shape (t1). Except for the cylindrical central portion, it has substantially the same thickness (t) as the lower plate 16, (t1 / t = 0.3 to 0.5), and has a predetermined diameter at the center of the central cylindrical portion 22a. A round hole 28 is formed, and even in the cylindrical portion 22a, it is formed relatively wide in the direction of the protruding portions 22b and 22c other than the cylindrical portion (22a1; FIG. 2 and FIG. 2). 3), in other directions, it is formed relatively narrow (22a2; see FIGS. 2 and 4). A shaft 29 is fitted in the round hole 28 at the center of the cylindrical portion, and the upper end of the shaft 29 is fixed to the upper plate 17 by a bolt 30. The movable block 22 is fixed integrally with the upper plate 17 by three bolts 31 (see FIG. 1, and a bolt hole 31 a is shown in FIG. 2), and the shaft 29 is formed on the movable block 22. It is integrally fixed by a push screw 32 screwed into the lateral hole 22d. Accordingly, the upper plate (flat plate) 17, the movable block 22 and the shaft 29, which serve as a moving stage, are integrally fixed to constitute a moving-side rigid body portion (first rigid body portion).
[0036]
A radial bearing 33 such as an angular contact ball bearing is provided between the flange 29a at the lower end of the shaft 29 and the lower surface of the cylindrical portion 22a of the movable block, and between the upper surface of the movable block cylindrical portion 22a and the lower surface of the upper plate 17. , 35 are mounted. These bearings are not limited to radial bearings, but may be thrust bearings such as angular contact types, and are not limited to ball bearings, and may be other bearings such as roller bearings and sliding bearings such as bushes. In the movable block 22 portion (see FIG. 3), the bearings 33 and 35 are located in empty portions C and C formed on the upper and lower surfaces of the thin cylindrical portion 22a, and the inner rings 33a and 35a are connected to the shaft 29. While being fitted, a predetermined gap exists between the outer rings 33b and 35b and the thick portions (22b and 22c).
[0037]
On the other hand, as shown in FIG. 2, the lower plate 16 has support portions 16d and 16e at two locations facing the central empty portion 20a, except for the case where the empty portions 20a, 20b and 20c are cut out. These support portions are arranged to face the shaft 29 with a predetermined gap a. As shown in FIG. 4, outer rings 33b and 35b of the two bearings 33 and 35 are formed in the central hollow portion 20a of the two support portions 16d and 16e formed concentrically with the shaft 29, respectively. The cylindrical narrow portion 22a2 of the movable block is located between the bearings 33 and 35 with a gap between the bearings 33 and 35 and the central empty portion 20a of the lower plate 16 between them. Yes. The outer rings 33b and 35b of the bearing have flange portions, and the flange portions are in contact with the upper and lower surfaces of the lower plate 16 and are positioned in the axial direction. Accordingly, the shaft 29 that is the moving-side rigid body portion is supported by the lower plate 16 (two support portions 16d and 16e) that is the fixed-side rigid body portion via the bearings 33 and 35 so as to be rotatable by a predetermined angle. . Further, by tightening the bolt 30, the bearings 33 and 35 formed of angular contact ball bearings are tightened so that there is no backlash (gap) by relatively moving the inner rings 33a and 35a in the axial direction.
[0038]
Further, a spring 39 is contracted between one protrusion 22c of the movable block 22 and a retainer 37 planted on the lower plate 16, and urges the movable block 22 clockwise in FIG. ing. The urging force of the movable block 22 acts on the piezoelectric actuator 21 as an urging force in the upward direction in the figure via the displacement magnifying mechanism 23, so that contact between the base end of the piezoelectric actuator 21 and the adjustment screw tip 24a is always ensured. . An arm 22c1 protrudes from the protrusion 22c of the movable block 22, and the upper plate 17 is fixed to the arm 22c1 and the two protrusions 22b and 22c by bolts 31, respectively. In addition, an upper plate 17 serving as a moving stage is fixed in a balanced manner.
[0039]
Next, the operation of the micro displacement device 15 configured as described above will be described. First, by manually operating the adjusting screw 24, the displacement of the screw tip is transmitted to the power point hinge 26 of the displacement magnifying mechanism 23 via the piezoelectric actuator 21 having a certain length, and is further magnified by the displacement magnifying mechanism 23. The displacement thus transmitted is transmitted to the movable block 22 via the action point hinge 27. The movable block 22 is rotated about a shaft 29 via bearings 33 and 35, and the upper plate 17 which is a moving stage integral with the shaft 29 is rotated. As a result, the moving stage 17 is rotated roughly. Positioning in the moving direction (coarse positioning) is performed.
[0040]
A predetermined voltage is supplied to the piezoelectric actuator 21 by the controller with the coarse movement position adjusted. The piezoelectric actuator has a predetermined relationship between its supply voltage and displacement, and a predetermined minute displacement is generated by the application of the predetermined voltage. In this state, the adjusting screw 24 is held in a predetermined screwed state, and as described above, the tip 24a of the screw and the base end of the piezoelectric actuator 21 are always in contact with each other by the compression spring (biasing means) 39. In this state, the above-described minute displacement in the length direction of the piezoelectric actuator 21 acts on the hinge 25 that is the power point of the displacement magnifying mechanism 23, and the displacement magnifying mechanism 23 uses the fulcrum hinge 25 as a fulcrum and acts as an action point hinge 27. It works by enlarging the displacement. As an example, the maximum displacement of the piezoelectric actuator 21 is about 17 [μm], which is enlarged 5 to 11 times by the lever ratio by the displacement enlarging mechanism 23, and the displacement at the operating point is 85 to 187 [μm]. It becomes.
[0041]
The displacement of the action point hinge 27 of the displacement enlarging mechanism 23 based on the piezoelectric actuator 21 is transmitted to the movable block 22 in the same manner as the coarse movement by the adjusting screw 24 described above. The movable block 22 is fixed to a shaft 29 by a cylindrical portion 22a, and the shaft 29 is fixed by bearings 33 and 35 at support portions 16d and 16e of the lower plate 16, as shown in FIG. Therefore, the displacement of the movable block 22 from the operating point hinge 27 is a rotational displacement about the shaft 29, and the rotational displacement is a movement made of an upper plate integral with the movable block. The minute displacement device 15 is transmitted to the stage 17 and positioned as a rotation amount (θz) about one axis (Z axis).
[0042]
Next, an embodiment that is partially changed will be described with reference to FIG. In this embodiment, the displacement magnifying mechanism portion is different from that of the previous embodiment, but the other portions are the same, so the same reference numerals are given and the description is omitted.
[0043]
The displacement magnifying mechanism 23 ′ is composed of a separate member separate from the lower plate 16 that is a fixed-side rigid body portion, and is composed of a block that is bent in plan view. The displacement enlarging mechanism 23 ′ is housed in a hollow portion 20 b that opens at the corner of the lower plate 16, and a first protrusion 23 a that extends so as to close the opening, and a main body that extends along the piezoelectric actuator 21. 23b and a second protrusion 23c extending in a key shape from the end of the main body. A semicircular protrusion 25 ′ is formed on the main body part 23 b on the first projecting part side, and the protrusion fits into a semicircular recess 40 formed on the lower plate 16, so This constitutes a fulcrum 25 ′.
[0044]
A screw hole is formed in the first projecting portion 23 a, and an adjustment screw 24 penetrates and is screwed into the screw hole, and a tip 24 a of the screw 24 comes into contact with one end of the piezoelectric actuator 21. ing. The other end of the piezoelectric actuator 21 is in contact with the lower plate 16, and a tip 24a made of a hemispherical shape of the adjusting screw is brought into contact with one end of the piezoelectric actuator 21 to form a force point 26 'consisting of a point pair. The second protrusion 23c is formed with a semicircular protrusion 27 ', and the protrusion abuts on the protrusion 22b of the movable block 22 to form an action point 27'.
[0045]
With the above configuration, the displacement of the force point 26 ′ caused by the piezoelectric actuator 21 or the adjusting screw 24 is expanded and transmitted to the action point 27 ′ by the displacement magnifying mechanism 23 ′ rotating around the fulcrum 25 ′, and is expanded. The displacement is transmitted to the protruding portion 22 b of the movable block 22. In addition, although the dotted line pair of the said power point and an action point consists of a sliding motion, this may contact by a rolling motion via a roller etc.
[0046]
In the above-described embodiment, a displacement magnifying mechanism is interposed between the piezoelectric actuator 21 and the movable block 22, and the displacement of the actuator is magnified and transmitted to the movable block. The piezoelectric actuator may be directly connected to the movable block, or the lever ratio may be reduced. As a result, it is possible to cope with an increase in the stroke of the piezoelectric actuator and a request for positioning a further minute displacement (sub-μm order, nm order). Therefore, the displacement enlarging mechanism may be a displacement changing mechanism that can change the displacement by the lever ratio.
[Brief description of the drawings]
FIG. 1 is a plan view showing a rotary minute displacement device according to the present invention.
FIG. 2 is a plan view showing a state in which the moving stage (upper plate) is removed.
3 is a cross-sectional view taken along line AA in FIGS. 1 and 2. FIG.
4 is a cross-sectional view taken along line BB in FIGS. 1 and 2. FIG.
FIG. 5 is a plan view similar to FIG. 2, showing a partially modified embodiment.
FIG. 6 is a plan view showing a rotary minute displacement device according to the prior art.
FIG. 7 is a plan view showing the rotational displacement state.
[Explanation of symbols]
15 Minute displacement device
16 Second (fixed side) rigid part (lower plate)
16d, 16e support part
17 Flat plate (moving stage, upper plate)
20a, 20b, 20c empty part
21 Minute displacement (piezoelectric) actuator
22 Connection (movable) block
22a Cylindrical part
22c protrusion
23, 23 'Displacement change (enlargement) mechanism
24 Adjustment screw
25 fulcrum (elastic) hinge
26 Force point (elastic) hinge
27 Action point (elastic) hinge
25 'fulcrum (face-to-face even)
26 'force point (line point pair even)
27 'action point (line point pair even)
29 axes
29a Isobe
33, 35 Bearing
33a, 35a Inner ring
33b, 35b Outer ring
39 Spring

Claims

A first rigid body part; a second rigid body part supported to be displaceable in a rotational direction about one axis relative to the first rigid body part; and a relative displacement between the first rigid body part and the second rigid body part. A micro-displacement device comprising:
The first rigid body portion is configured by integrally fixing a connecting block connected to the minute displacement actuator, a shaft, and a flat plate,
Said shaft, Ri Na by a predetermined angle rotatably supported by the second rigid section via a bearing,
Displacement change interposed between the micro-displacement actuator and the connecting block and having a fulcrum that connects to the second rigid body part, a force point that connects to the micro-displacement actuator, and an action point that connects to the connecting block Mechanism,
An adjustment screw threaded through the second rigid body portion;
A compression spring that urges the connection block to rotate,
The second rigid body portion is formed with a central empty portion, a first empty portion and a second empty portion that are arranged on both sides of the central empty portion and communicated with the central empty portion,
The minute displacement actuator and the displacement changing mechanism are accommodated in the first empty portion,
The connecting block is rotatable about the shaft, and a cylindrical portion fixing the shaft in the connecting block is accommodated in the central empty portion,
A protrusion located on the opposite side of the operating point with respect to the shaft in the connection block is accommodated in the second empty portion, and the protrusion and the shaft are fixed to the flat plate,
The compression spring is in contact with the protrusion and accommodated in the second cavity,
An urging force of the connecting block by the compression spring is applied to the minute displacement actuator via the displacement changing mechanism, and one end of the minute displacement actuator and the tip of the adjusting screw are always in contact with each other;
A micro displacement device characterized by that.

A first rigid body part; a second rigid body part supported to be displaceable in a rotational direction about one axis relative to the first rigid body part; and a relative displacement between the first rigid body part and the second rigid body part. A micro-displacement device comprising:
The first rigid body portion is configured by integrally fixing a connecting block connected to the minute displacement actuator, a shaft, and a flat plate,
The shaft is supported by the second rigid body portion via a bearing so as to be rotatable by a predetermined angle,
Displacement change interposed between the micro-displacement actuator and the connecting block and having a fulcrum that connects to the second rigid body part, a force point that connects to the micro-displacement actuator, and an action point that connects to the connecting block Mechanism,
An adjustment screw threaded through the displacement changing mechanism;
A compression spring that urges the connection block to rotate,
The second rigid body portion is formed with a central empty portion, a first empty portion and a second empty portion that are arranged on both sides of the central empty portion and communicated with the central empty portion,
The minute displacement actuator and the displacement changing mechanism are accommodated in the first empty portion,
The connecting block is rotatable about the shaft, and a cylindrical portion fixing the shaft in the connecting block is accommodated in the central empty portion,
A protrusion located on the opposite side of the operating point with respect to the shaft in the connection block is accommodated in the second empty portion, and the protrusion and the shaft are fixed to the flat plate,
The compression spring is in contact with the protrusion and accommodated in the second cavity,
The urging force of the connecting block by the compression spring acts on the displacement changing mechanism, and always makes one end of the minute displacement actuator and the tip of the adjusting screw contact each other.
A micro displacement device characterized by that .

The connecting block is disposed in the central empty portion and the second empty portion so as to be substantially contained in the thickness direction of the empty portion ,
Cylindrical portion of the connecting block is rather thin in the thickness direction is formed,
The second rigid body portion has at least two support portions disposed to face the shaft with a predetermined gap, and supports the bearing by the support portion.
The micro displacement device according to claim 1 or 2 .

The bearing is a radial bearing disposed at both end portions of the shaft, and the inner ring of the bearing is fitted to the shaft, and the outer ring of the bearing is fitted to the empty portion of the support portion of the second rigid body portion. Together
Forming a flange at one end of the shaft, preventing and abutting the inner ring of the one bearing against the flange, abutting the inner ring of the other bearing against the flat plate,
By loosening the both bearings by tightening the shaft to the flat plate with bolts,
The micro displacement device according to claim 3 .

The first rigid body portion is a moving- side rigid body portion, the second rigid body portion is a fixed- side rigid body portion, and the flat plate is a moving stage.
The micro displacement device according to any one of claims 1 to 4 .