CN114766011A - 掩膜组件及其制造方法、显示面板、显示装置 - Google Patents

掩膜组件及其制造方法、显示面板、显示装置 Download PDF

Info

Publication number
CN114766011A
CN114766011A CN202080002388.2A CN202080002388A CN114766011A CN 114766011 A CN114766011 A CN 114766011A CN 202080002388 A CN202080002388 A CN 202080002388A CN 114766011 A CN114766011 A CN 114766011A
Authority
CN
China
Prior art keywords
mask
groove
bearing surface
edge
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080002388.2A
Other languages
English (en)
Inventor
王魁
毕娜
薛龙辉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Chengdu BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Publication of CN114766011A publication Critical patent/CN114766011A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/82Cathodes
    • H10K50/822Cathodes characterised by their shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30Devices specially adapted for multicolour light emission
    • H10K59/35Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/805Electrodes
    • H10K59/8052Cathodes
    • H10K59/80521Cathodes characterised by their shape

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

一种掩膜组件(10)及其制造方法、显示面板(30)、显示装置(00),涉及显示技术领域。掩膜组件(10)中掩膜结构(103)的第一通孔(1032a)可以用于形成显示面板(30)的阴极图案(3071),支撑结构(102)的开口(102a)可以用于形成显示面板(30)中除该阴极图案(3071)之外的其他膜层。由于通过该多个第一通孔(1032a)形成的多个阴极图案(3071)之间具有间隙,因此采用该掩膜组件(10)制备得到的显示面板(30)的光透过率较高,摄像头的成像效果较好。

Description

PCT国内申请,说明书已公开。

Claims (22)

  1. PCT国内申请,权利要求书已公开。
CN202080002388.2A 2020-10-20 2020-10-20 掩膜组件及其制造方法、显示面板、显示装置 Pending CN114766011A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/122179 WO2022082428A1 (zh) 2020-10-20 2020-10-20 掩膜组件及其制造方法、显示面板、显示装置

Publications (1)

Publication Number Publication Date
CN114766011A true CN114766011A (zh) 2022-07-19

Family

ID=81289518

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080002388.2A Pending CN114766011A (zh) 2020-10-20 2020-10-20 掩膜组件及其制造方法、显示面板、显示装置

Country Status (3)

Country Link
US (1) US20220359852A1 (zh)
CN (1) CN114766011A (zh)
WO (1) WO2022082428A1 (zh)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102506005B1 (ko) * 2017-09-28 2023-03-08 삼성디스플레이 주식회사 마스크 조립체 및 마스크 조립체의 제조 방법
KR102574297B1 (ko) * 2018-03-29 2023-09-04 삼성디스플레이 주식회사 증착용 마스크 어셈블리 및 이를 사용하여 제조된 유기 발광 표시 장치
CN109097729B (zh) * 2018-09-29 2020-07-28 京东方科技集团股份有限公司 掩膜框架、支撑板、掩膜框架组件及掩膜版组件
CN109957754B (zh) * 2019-04-09 2021-04-23 京东方科技集团股份有限公司 掩膜板组件、oled显示面板及其制作方法、显示装置
CN210856314U (zh) * 2019-06-24 2020-06-26 昆山国显光电有限公司 一种掩膜版
CN110265461A (zh) * 2019-06-27 2019-09-20 武汉天马微电子有限公司 有机发光显示面板及其制作方法、显示装置、掩膜版
CN111235525A (zh) * 2020-01-10 2020-06-05 合肥维信诺科技有限公司 掩膜版及制备方法
CN111593299B (zh) * 2020-06-29 2024-05-14 京东方科技集团股份有限公司 掩膜板及其制造方法

Also Published As

Publication number Publication date
US20220359852A1 (en) 2022-11-10
WO2022082428A1 (zh) 2022-04-28

Similar Documents

Publication Publication Date Title
US11024221B2 (en) Pixel arrangement structure, metal mask, and display device
EP3489755B1 (en) Mask plate and fabrication method therefor
US20190144987A1 (en) Mask assembly and manufacturing method thereof
US10199442B1 (en) Organic light-emitting display panel, method for preparing the same, and organic light-emitting display device
US11367752B2 (en) Pixel layout structure, metal mask, and display apparatus
US20200190655A1 (en) Mask plate
KR20200096989A (ko) 픽셀 배열 구조물, 유기 전계발광 디스플레이 패널, 디스플레이 디바이스, 및 마스크 어셈블리
CN109994507B (zh) 一种像素排布结构及相关装置
CN114959565A (zh) 蒸镀掩模、带框架的蒸镀掩模、有机半导体元件的制造方法及有机el显示器的制造方法
JP2023510055A (ja) 支持プレート及び折り畳みディスプレイ
EP3444845B1 (en) Method for manufacturing a display substrate
US11088212B2 (en) OLED display substrate, manufacturing method and display apparatus
JP6963014B2 (ja) 蒸着マスク、表示パネルの製造方法、及び表示パネル
JP6510426B2 (ja) デュアルビュー表示基板および表示装置
US20220115454A1 (en) Display panel and display device
US11091829B2 (en) Metal mask, metal mask plate and method of manufacturing the same
US11574572B2 (en) Display panel having special-shaped area and display device
WO2019030801A1 (ja) 蒸着用マスク及び蒸着用マスクの製造方法
KR20230158123A (ko) 표시 패널 및 표시 장치
CN113013222A (zh) 显示基板、显示装置及高精度金属掩膜版
CN110098232A (zh) Oled显示面板
CN114766011A (zh) 掩膜组件及其制造方法、显示面板、显示装置
US20210184125A1 (en) Mask assembly and method of patterning semiconductor film using thereof
CN114761605B (zh) 掩膜板及其制备方法、显示面板及其制备方法、显示装置
CN215418186U (zh) 一种显示面板及显示装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination