CN114721078A - Refraction-harmonic diffraction mixed lens array device for multispectral imaging and preparation method thereof - Google Patents
Refraction-harmonic diffraction mixed lens array device for multispectral imaging and preparation method thereof Download PDFInfo
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- CN114721078A CN114721078A CN202210365899.1A CN202210365899A CN114721078A CN 114721078 A CN114721078 A CN 114721078A CN 202210365899 A CN202210365899 A CN 202210365899A CN 114721078 A CN114721078 A CN 114721078A
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- 238000000701 chemical imaging Methods 0.000 title claims abstract description 38
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 230000003595 spectral effect Effects 0.000 claims abstract description 21
- 238000001228 spectrum Methods 0.000 claims description 18
- 229920002120 photoresistant polymer Polymers 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 238000013461 design Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000008569 process Effects 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000001020 plasma etching Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 description 15
- 238000010586 diagram Methods 0.000 description 5
- 230000004075 alteration Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 238000010923 batch production Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000007687 exposure technique Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
- G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
- G02B5/1885—Arranged as a periodic array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
- G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
- G01J2003/2826—Multispectral imaging, e.g. filter imaging
Abstract
The invention provides a refraction-harmonic diffraction mixed lens array device for multispectral imaging and a preparation method thereof. The refraction-harmonic diffraction mixed lens array device is formed by combining a single refraction lens and a plurality of harmonic diffraction lenses in an array mode according to a specific arrangement mode, is directly adjusted with a traditional focal plane detector, and can realize multispectral imaging. The invention has the remarkable characteristics that when the refraction-resonance diffraction mixed lens array device is used for multispectral imaging, the timeliness is strong, the spatial resolution and the spectral resolution are high, and the device is light and thin in quality and easy to produce in batch.
Description
Technical Field
The invention belongs to the technical field of spectral imaging and micro-nano processing, and particularly relates to a refraction-harmonic diffraction mixed lens array device for multispectral imaging and a preparation method thereof.
Background
Spectral imaging technology is a multidisciplinary cross-technology that combines optics, spectroscopy, precision instruments, electronics, and computer technology into a single entity. Compared with the traditional imaging technology, the spectral imaging technology combines the traditional two-dimensional imaging technology with the spectral technology, can acquire the spectral information of a plurality of to thousands of narrow spectral bands of each pixel element while acquiring the spatial information of a target to be detected, thereby generating a continuous and complete spectral curve, and can determine the physical and chemical characteristics of the target object by utilizing the characteristic that the object has 'spectrum uniqueness', namely the spectral imaging technology can simultaneously acquire the spatial information (2-dimension) and the spectral information (1-dimension) of the target to be detected, thereby achieving the purposes of detection, identification and measurement.
In recent years, the diffraction spectrum imaging technology has the advantages of simple structure of a spectrum imaging system (a diffraction lens has imaging and light splitting functions, the number of optical elements is greatly reduced, the size of the spectrum imaging system is smaller, the quality of the spectrum imaging system is lighter), the working waveband selectivity is strong (the working waveband is only dependent on materials of the diffraction lens, the design and the response spectral band of a detector), and the like, has great potential for realizing space-based light-weight high-resolution spectrum imaging and developing a novel miniaturized spectrum imaging system, and gradually becomes a research hotspot at home and abroad.
However, the diffraction spectral imaging system currently composed of a single diffraction lens device has the following drawbacks: the acquisition of a plurality of spectral information requires that the diffraction lens device and the detector do relative motion along the optical axis to traverse the imaging positions corresponding to different wavelengths, the detection time is long, and the timeliness is poor; two-dimensional wide-band (visible light band) spatial information of the diffraction spectral imaging system is directly provided by the diffraction lens, and the single diffraction lens has serious chromatic aberration when imaging in a wide band, so that the spatial resolution of the spectral imaging system is low.
The above problems greatly limit the application and development of diffraction spectroscopic imaging techniques. Therefore, the development of a diffraction multispectral imaging technology with strong timeliness and higher spatial resolution and spectral resolution is urgently needed.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a refraction-harmonic diffraction mixed lens array device for multispectral imaging and a preparation method thereof.
The technical scheme provided by the invention is as follows: a refraction-harmonic diffraction mixed lens array device for multispectral imaging is formed by combining a single refraction lens and a plurality of harmonic diffraction lenses in an array mode according to a specific arrangement mode, and can realize multispectral imaging by being directly adjusted with a traditional focal plane detector, wherein:
the design wavelength and the available bandwidth of the single refraction lens and the multiple harmonic diffraction lenses are different, the available bandwidth of the single refraction lens is a wide band, and the narrow band information of the multiple harmonic diffraction lenses needs to be covered; the design wavelengths of the harmonic diffraction lenses can be discrete and equally spaced, and can also be customized according to actual use requirements, and the available bandwidth of each harmonic diffraction lens is a narrow band;
the focal lengths of the single refraction lens and the plurality of harmonic diffraction lenses are the same, and the vertical axis magnification ratio is kept the same under the condition that the object distances are consistent;
the array is combined according to a specific arrangement mode, and the arrangement mode comprises a quadrilateral array, a hexagonal array and a circular array.
The device and a traditional focal plane detector are directly adjusted to realize multispectral imaging, namely, a refraction-harmonic diffraction mixed lens array device is arranged on the focal plane of the traditional focal plane detector, one surface of the device with a lens structure faces the detector, wide spectrum information of a single wave band and narrow spectrum information of a plurality of wave bands can be simultaneously obtained, and spatial information and spectral information of a target to be detected can be simultaneously obtained through spectral image data processing, so that spectral imaging is realized.
In the invention, the purpose of combining and using the refraction lens and the harmonic diffraction lens is to exert the respective advantages of the refraction lens (strong acquisition capability on the spatial information under the wide bandwidth) and the harmonic diffraction lens (strong acquisition capability on the spectral information under the narrow bandwidth) and realize the simultaneous acquisition of the spatial information and the spectral information; the purpose of the arraying is to increase the number of spectral channels so as to realize snapshot-type spectral imaging.
The refraction-harmonic diffraction mixed lens array device provided by the invention has the following advantages:
the timeliness is strong: the arrayed harmonic diffraction lens is used for simultaneously acquiring a plurality of narrow-band information, so that the problems that the traditional diffraction spectrum imaging system needs to move parts when acquiring spectrum information and is low in timeliness are solved;
high spatial resolution: the refraction lens is adopted to obtain the two-dimensional spatial information, so that the problem of large chromatic aberration when the traditional diffraction spectrum imaging technology directly utilizes the diffraction lens to obtain the spatial information is solved;
③ the spectral resolution is higher: the wavelength selection and the array number of the harmonic diffraction lens can be designed according to the actual use requirement, and the more the array number is, the higher the spectral resolution is.
The invention also provides a preparation method of the refraction-harmonic diffraction mixed lens array device for multispectral imaging, which can be realized by the following process flows:
firstly, taking a quartz glass flat plate with two polished surfaces as a substrate;
step two, uniformly coating a layer of photoresist on the surface of a substrate;
thirdly, forming quantified exposure dose distribution in the photoresist by utilizing a laser direct writing gray level exposure technology;
fourthly, developing the exposed photoresist by utilizing a wet developing technology to obtain a harmonic diffraction lens array structure of the photoresist material;
fifthly, transferring the photoresist microstructure to the surface of the quartz substrate by utilizing a reactive ion etching technology to obtain a harmonic diffraction lens array structure of the quartz material;
and sixthly, taking a plano-convex refractive lens manufactured by using the traditional optical processing technology, and sticking the plano-convex refractive lens to a reserved position in the center of the quartz glass plate by using an adhesive, thereby finally finishing the preparation of the refraction-harmonic diffraction mixed lens array device.
The preparation method of the refraction-harmonic diffraction mixed lens array device for multispectral imaging adopts the traditional optical precision processing technology and micro-nano processing technology in the whole process, and is easy for batch production.
The invention has the following advantages: when the refraction-harmonic diffraction hybrid lens array device is used for multispectral imaging, the timeliness is strong, the spatial resolution and the spectral resolution are high, the device is light and thin in quality and easy to produce in batches, and the refraction-harmonic diffraction hybrid lens array device has the huge potential of achieving space-based light-weight high-resolution spectral imaging and developing a novel miniaturized spectral imaging system.
Drawings
FIG. 1 is a schematic diagram of a refractive-harmonic diffractive hybrid lens array device for multispectral imaging;
FIG. 2 is a schematic diagram of the operation of the device for multispectral imaging;
FIG. 3 is a schematic process flow diagram of a first embodiment for making the device, wherein FIGS. 3-1 through 3-6 are corresponding process steps;
wherein: 1-quartz plate glass, 2-photoresist, 3-ultraviolet light, 4-developing solution, 21-harmonic diffraction lens array structure of photoresist material, 5-plasma, 11-harmonic diffraction lens array structure of quartz material and 6-plano-convex refraction lens.
Detailed Description
The invention is described in detail below with reference to the figures and the detailed description.
Through the following embodiments, those skilled in the art can implement the technical solution of the present invention.
As shown in fig. 1, a schematic structural diagram of a refractive-harmonic diffractive hybrid lens array device for multispectral imaging is formed by combining a single refractive lens and a plurality of harmonic diffractive lenses in an array according to a specific arrangement, wherein:
the design wavelength and the available bandwidth of the single refraction lens and the multiple harmonic diffraction lenses are different, the available bandwidth of the single refraction lens is a wide band, and the narrow band information of the multiple harmonic diffraction lenses needs to be covered; the design wavelengths of the harmonic diffraction lenses can be discrete and equally spaced, and can also be customized according to actual use requirements, and the available bandwidth of each harmonic diffraction lens is a narrow band;
the focal lengths of the single refraction lens and the plurality of harmonic diffraction lenses are the same, and the vertical axis magnification ratio is kept the same under the condition that the object distances are consistent;
the array is combined according to a specific arrangement mode, and the arrangement mode comprises a quadrilateral array, a hexagonal array and a circular array.
The device and a traditional focal plane detector are directly adjusted to realize multispectral imaging, namely, a refraction-harmonic diffraction mixed lens array device is arranged on a focal plane of the traditional focal plane detector, one surface of the device with a lens structure faces the detector, wide spectrum information of a single wave band and narrow spectrum information of a plurality of wave bands can be simultaneously obtained, and spatial information and spectral information of a target to be detected can be simultaneously obtained through spectral image data processing, so that spectral imaging is realized.
As shown in fig. 2, the schematic diagram of the operation principle of the refraction-resonance diffraction hybrid lens array device for multispectral imaging is shown, and in the process of one-time imaging, one wide spectrum information and a plurality of narrow spectrum information can be simultaneously acquired.
As shown in fig. 3, a first embodiment of the method for manufacturing an ultrathin composite material diffraction lens for high resolution imaging adopts a first process flow, which includes the following steps:
(1) as shown in FIG. 3-1, a piece of quartz plate glass 1, which was double-side polished by a conventional optical processing technique, was taken as a substrate;
(2) as shown in fig. 3-2, a layer of photoresist 2 is uniformly coated on the surface of the substrate;
(3) as shown in fig. 3-3, a quantified exposure dose distribution is formed in the photoresist 2 using a laser direct write gray scale exposure technique (ultraviolet light 3);
(4) as shown in fig. 3-4, the exposed photoresist is developed by using a wet developing technique (developing solution 4) to obtain a harmonic diffraction lens array structure 21 of the photoresist material;
(5) as shown in fig. 3-5, a harmonic diffractive lens array structure 11 of quartz material is obtained by delivering a harmonic diffractive lens array structure 21 of photoresist material to the surface of the quartz substrate 1 using a reactive ion etching technique (plasma 5).
(6) As shown in fig. 3-6, a plano-convex refractive lens 6 manufactured by using a conventional optical processing technology is taken and adhered to a reserved position in the center of a quartz glass plate by using an adhesive, and finally, the preparation of the refraction-harmonic diffraction hybrid lens array device is completed.
Parts of the invention not described in detail are well known in the art.
Claims (2)
1. A refraction-harmonic diffraction hybrid lens array device for multispectral imaging, comprising: the refraction-harmonic diffraction mixed lens array device is formed by combining a single refraction lens and a plurality of harmonic diffraction lenses according to a specific arrangement mode, can realize multispectral imaging by being directly adjusted with a traditional focal plane detector, and comprises the following components in parts by weight:
the design wavelength and the available bandwidth of the single refraction lens and the multiple harmonic diffraction lenses are different, the available bandwidth of the single refraction lens is a wide band, and the narrow band information of the multiple harmonic diffraction lenses needs to be covered; the design wavelengths of the harmonic diffraction lenses can be discrete and equally spaced, and can also be customized according to actual use requirements, and the available bandwidth of each harmonic diffraction lens is a narrow band;
the focal lengths of the single refraction lens and the plurality of harmonic diffraction lenses are the same, and the vertical axis magnification ratio is kept the same under the condition that the object distances are consistent;
the array is combined according to a specific arrangement mode, and the arrangement mode comprises a quadrilateral array, a hexagonal array and a circular array;
the device and a traditional focal plane detector are directly adjusted to realize multispectral imaging, namely, a refraction-harmonic diffraction mixed lens array device is arranged on a focal plane of the traditional focal plane detector, one surface of the device with a lens structure faces the detector, wide spectrum information of a single wave band and narrow spectrum information of a plurality of wave bands can be simultaneously obtained, and spatial information and spectral information of a target to be detected can be simultaneously obtained through spectral image data processing, so that spectral imaging is realized.
2. A method for manufacturing a hybrid refractive-harmonic diffractive lens array device for multispectral imaging, the method being used for manufacturing the hybrid refractive-harmonic diffractive lens array device for multispectral imaging according to claim 1, wherein the method comprises the following steps: the method is realized by the following process flows:
firstly, taking a quartz glass flat plate (1) which is polished on two sides as a substrate;
step two, uniformly coating a layer of photoresist (2) on the surface of a substrate;
thirdly, forming quantified exposure dose distribution in the photoresist (2) by utilizing a laser direct writing gray level exposure technology;
fourthly, developing the exposed photoresist (2) by utilizing a wet developing technology to obtain a harmonic diffraction lens array structure (21) of the photoresist material;
fifthly, transmitting the photoresist microstructure to the surface of the quartz substrate by utilizing a reactive ion etching technology to obtain a harmonic diffraction lens array structure (11) of the quartz material;
and sixthly, taking a plano-convex refractive lens (6) manufactured by using the traditional optical processing technology, and sticking the plano-convex refractive lens to a reserved position in the center of the quartz glass flat plate (1) by using an adhesive, thereby finally finishing the preparation of the refraction-harmonic diffraction mixed lens array device.
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