CN114683463A

CN114683463A - Optical waveguide jig and preparation method of optical waveguide

Info

Publication number: CN114683463A
Application number: CN202210311443.7A
Authority: CN
Inventors: 白文宾; 麦宏全; 林咏翔; 柯泰年
Original assignee: Interface Optoelectronics Shenzhen Co Ltd; Interface Technology Chengdu Co Ltd; Yecheng Optoelectronics Wuxi Co Ltd; General Interface Solution Ltd
Current assignee: Interface Optoelectronics Shenzhen Co Ltd; Interface Technology Chengdu Co Ltd; Yecheng Optoelectronics Wuxi Co Ltd; General Interface Solution Ltd
Priority date: 2022-03-28
Filing date: 2022-03-28
Publication date: 2022-07-01

Abstract

The application relates to an optical waveguide jig and a preparation method of an optical waveguide, wherein the optical waveguide jig comprises a first die and a second die which are arranged in a laminated mode; one side of the first die, which is close to the second die, is provided with a pattern part and a first stopping part positioned on the periphery of the pattern part, and the pattern part is provided with a first surface; one side of the second die, which is close to the first die, is provided with a supporting part and a second stopping part positioned on the periphery of the supporting part; at least part of orthographic projection of the second stopping part on the first die is superposed with the first stopping part; the supporting part is provided with a second surface, the second surface faces the first surface, and the second surface is used for bearing the optical waveguide; the first stopping portion is abutted against the second stopping portion, and a first gap is formed between the first surface and the second surface. The method and the device can realize accurate control on the thickness of the optical waveguide and improve the yield of the optical waveguide manufacturing process.

Description

Optical waveguide jig and preparation method of optical waveguide

Technical Field

The present disclosure relates to the field of optical waveguide manufacturing technologies, and in particular, to an optical waveguide fixture and a method for manufacturing an optical waveguide.

Background

An optical waveguide (optical waveguide) is a dielectric device that guides light waves to propagate therein, and is also called a dielectric optical waveguide. As a main technical solution of the existing Augmented Reality (AR) device, the optical waveguide may conduct light projected by the micro-projector to the front of the AR glasses, and superimposes a virtual image on a real image in front of human eyes, that is, has an Augmented Reality function. In the conventional technique, the optical waveguide is usually manufactured by a nano-transfer printing technique, however, in the imprinting process of the mold of the conventional technique, the thickness of the optical waveguide is not accurately controlled, and the yield of the optical waveguide process is reduced.

Disclosure of Invention

Accordingly, it is necessary to provide an optical waveguide fixture and a method for manufacturing an optical waveguide, which are directed to the problem of inaccurate thickness control of an optical waveguide in the conventional technology.

A first aspect of the embodiments of the present application provides an optical waveguide fixture, configured to prepare an optical waveguide, where the optical waveguide fixture includes a first mold and a second mold that are stacked;

one side of the first die, which is close to the second die, is provided with a pattern part and a first stopping part positioned on the periphery of the pattern part, and the pattern part is provided with a first surface;

one side of the second die, which is close to the first die, is provided with a supporting part and a second stopping part positioned on the periphery of the supporting part; at least part of orthographic projection of the second stopping part on the first mould is overlapped with the first stopping part; the supporting part is provided with a second surface facing the first surface, and the second surface is used for bearing the optical waveguide;

the first stopper portion abuts against the second stopper portion, and a first gap is formed between the first surface and the second surface.

In one embodiment, the pattern part is provided with a plurality of grooves arranged at intervals, groove walls are arranged between every two adjacent grooves, the surfaces of all the groove walls on the side close to the supporting part are located on the first surface, and the distances between the first surface and the second surface are equal everywhere.

In one embodiment, the first surface and the second surface are both planar surfaces, or the first surface and the second surface are both cambered surfaces.

In one embodiment, a third stopping portion is arranged on one side of the second mold close to the first mold, the third stopping portion is located on one side of the second stopping portion away from the supporting portion, and a side wall of the first stopping portion abuts against a side wall of the third stopping portion.

In one embodiment, a third stopping portion is arranged on one side of the first mold close to the second mold, the third stopping portion is located on one side of the first stopping portion away from the pattern portion, and a side wall of the second stopping portion abuts against a side wall of the third stopping portion.

In one embodiment, one side of the second die, which is close to the first die, is provided with a circle of grooves, and the grooves are positioned on the periphery of the supporting part;

the first stopping part extends towards the direction close to the second die, and at least part of the first stopping part is positioned in the groove;

the bottom wall of the groove forms the second stopping portion, and the side wall of the groove far away from one side of the supporting portion forms the third stopping portion.

In one embodiment, a second gap is formed between the side wall of the first blocking portion and the side wall of the supporting portion.

In one embodiment, the optical waveguide fixture further includes:

the first cover plate is positioned on one side, away from the second mould, of the first mould, the first cover plate is provided with a first clamping groove, and at least part of the first mould is positioned in the first clamping groove;

the second cover plate is positioned on one side, away from the first mold, of the second mold, the second cover plate is provided with a second clamping groove, and at least part of the second mold is positioned in the second clamping groove;

wherein the first cover plate and the second cover plate are detachably connected.

In one embodiment, the first mold is a light transmissive member.

Above-mentioned optical waveguide tool through set up first backstop portion and second backstop portion on first mould and second mould respectively, like this, at the in-process of impression, first backstop portion and second backstop portion butt can make and have first clearance between the first surface of pattern portion and the second surface of supporting part to the grating end that makes the optical waveguide has predetermined thickness, has realized the accurate control to the thickness of optical waveguide, has improved optical waveguide processing procedure yield.

A second aspect of the embodiments of the present application provides a method for manufacturing an optical waveguide, where the optical waveguide is manufactured by an optical waveguide fixture, where the optical waveguide fixture includes a first mold and a second mold that are stacked, one side of the first mold, which is close to the second mold, has a pattern portion and a first stopper portion located at a periphery of the pattern portion, and the pattern portion has a first surface;

one side of the second die, which is close to the first die, is provided with a supporting part and a second stopping part which is positioned at the periphery of the supporting part; at least part of orthographic projection of the second stopping part on the first mould is overlapped with the first stopping part; the support portion has a second surface facing the first surface;

the preparation method of the optical waveguide comprises the following steps:

forming a glue layer on the second surface of the supporting part, and covering the first mold and the second mold; wherein the first stopping portion abuts against the second stopping portion, and a first gap is formed between the first surface and the second surface;

exposing the glue layer to harden the glue layer and form an optical waveguide;

and separating the optical waveguide from the optical waveguide jig.

According to the preparation method of the optical waveguide, in the imprinting process, the first stop part is abutted with the second stop part, so that a first gap is formed between the first surface of the pattern part and the second surface of the supporting part, the gate bottom of the optical waveguide is enabled to have the preset thickness, the thickness of the optical waveguide is accurately controlled, and the process yield of the optical waveguide is improved.

In one embodiment, the step of forming a glue layer on the second surface of the support portion and closing the first mold and the second mold further includes the following steps:

and vacuumizing an external environment cavity of the optical waveguide jig.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the descriptions of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following descriptions are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1A is a schematic view of a conventional optical waveguide;

FIG. 1B is another schematic diagram of a conventional optical waveguide that is poorly prepared;

FIG. 1C is a schematic view of another conventional technique in which optical waveguides are poorly formed;

FIG. 1D is a schematic view of a conventional optical waveguide.

Fig. 2 is a schematic structural diagram of an optical waveguide fixture according to an embodiment of the present application;

FIG. 3 is a schematic structural diagram of the optical waveguide fixture and the optical waveguide shown in FIG. 2;

fig. 4 is a schematic structural diagram of another optical waveguide fixture according to an embodiment of the present application before being covered;

fig. 5 is a schematic structural view of the optical waveguide fixture in fig. 4 after being covered;

fig. 6 is a schematic structural diagram of another optical waveguide fixture according to an embodiment of the present application;

fig. 7 is an exploded view of another optical waveguide fixture according to an embodiment of the present application;

FIG. 8 is a cross-sectional view of the optical waveguide fixture of FIG. 7 in an assembled state;

FIG. 9 is a perspective view of a first mold and a second mold of the optical waveguide fixture of FIG. 7;

fig. 10 is a schematic structural view of the first cover plate of the optical waveguide fixture in fig. 7;

FIG. 11 is a flow chart of a method of fabricating an optical waveguide according to one embodiment of the present application;

fig. 12A is a schematic cross-sectional view illustrating a glue layer after being formed in a method for manufacturing an optical waveguide according to an embodiment of the present application;

fig. 12B is a perspective view of a formed adhesive layer in a method for manufacturing an optical waveguide according to an embodiment of the present application;

FIG. 13A is a schematic view of an optical waveguide manufacturing method according to an embodiment of the present application after evacuation;

fig. 13B is a perspective view of an optical waveguide according to an embodiment of the present application after vacuum is applied;

FIG. 14A is a schematic view of an exposed glue layer in a method for fabricating an optical waveguide according to an embodiment of the present disclosure;

fig. 14B is a perspective view of an exposed adhesive layer in a method for manufacturing an optical waveguide according to an embodiment of the present application;

fig. 15A is a schematic view illustrating a process of peeling off an optical waveguide in a method of manufacturing an optical waveguide according to an embodiment of the present application;

fig. 15B is a perspective view of an optical waveguide being stripped in a method for manufacturing an optical waveguide according to an embodiment of the present application;

FIG. 16A is a diagram illustrating simulated effects of an optical waveguide according to an embodiment of the present application before fabrication;

FIG. 16B is a diagram illustrating simulated effects of an optical waveguide according to an embodiment of the present application after fabrication;

FIG. 17A is a graph illustrating simulated effects of another optical waveguide provided in an embodiment of the present application before fabrication;

fig. 17B is a diagram illustrating a simulation effect of another optical waveguide according to an embodiment of the present disclosure after fabrication.

Reference numerals:

1, mounting a mold; 2-lower mould; 3-an optical waveguide; 31-a gate body; 32-gate bottom;

10-an optical waveguide jig; 110-a first mold; 111-a pattern section; 111 a-a first surface; 1111-grooves; 1112-a cell wall; 112-a first stop; 113-a third stop; 120-a second mold; 121-a support portion; 121 a-a second surface; 122 — a second stop; 123-a third stop; 124-grooves; 130-a first cover plate; 131-a first card slot; 132-a light-transmissive hole; 140-a second cover plate; 141-a second card slot; 20-an optical waveguide; 210-a gate body; 220-gate bottom; 30-glue layer; w1 — first gap; w2 — second gap.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and that modifications may be made by one skilled in the art without departing from the spirit and scope of the application and it is therefore not intended to be limited to the specific embodiments disclosed below.

In the description of the present application, it is to be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the present application and for simplicity in description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be considered limiting of the present application.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral parts; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

In this application, unless expressly stated or limited otherwise, a first feature is "on" or "under" a second feature such that the first and second features are in direct contact, or the first and second features are in indirect contact via an intermediary. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises/comprising," "includes" or "including," or "having," and the like, specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof. Also, in this specification, the term "and/or" includes any and all combinations of the associated listed items.

As described in the background art, as shown in fig. 1A, in the imprinting process of the upper mold 1 and the lower mold 2 in the conventional art, the thickness H of the gate bottom 32 is not accurately controlled, and the thickness H of the gate bottom 32 is easily too thick, which results in a thicker optical waveguide 3. Further, the conventional techniques have problems as follows: as shown in fig. 1B, misalignment of the upper mold 1 and the lower mold 2 causes the gate 31 to be skewed; as shown in fig. 1C, due to uneven pressure during the stamping process, each point of the grid bottom 32 is stressed differently, so that the grid bottom 32 is wavy; as shown in fig. 1D, the incomplete contact of the upper surface of the gate 31 results in the damage of the structure of the optical waveguide 3.

In order to solve the problem that the thickness of an optical waveguide is not accurately controlled in the prior art, the embodiment of the application provides an optical waveguide jig and a preparation method of the optical waveguide.

The first aspect of the embodiments of the present application provides an optical waveguide fixture, where the optical waveguide fixture is used to prepare an optical waveguide, and the optical waveguide is formed after the optical waveguide fixture imprints a glue layer, where the glue layer may include a photoresist.

As shown in fig. 2 and 3, the optical waveguide jig 10 includes a first mold 110 and a second mold 120 which are stacked. One side of the first mold 110 close to the second mold 120 has a pattern portion 111 and a first stopper portion 112 located at the periphery of the pattern portion 111, and the pattern portion 111 has a first surface 111 a. Wherein the pattern on the pattern part 111 may be transferred onto the glue layer 30 for forming the optical waveguide 20. Here, the first surface 111a refers to a surface of the pattern part 111 on a side close to the second mold 120.

The second mold 120 has a supporting portion 121 on a side thereof close to the first mold 110, and a second stopping portion 122 located at a periphery of the supporting portion 121. At least a part of the orthographic projection of the second stopping portion 122 on the first mold 110 coincides with the first stopping portion 112, and the orthographic projection of the supporting portion 121 on the first mold 110 covers the pattern portion 111. The supporting portion 121 has a second surface 121a, the second surface 121a faces the first surface 111a, and the second surface 121a is used for carrying the optical waveguide 20. Here, the second surface 121a refers to a surface of the support portion 121 on a side close to the first mold 110.

In the process of manufacturing the optical waveguide 20, the adhesive layer 30 is first formed on the supporting portion 121, and then the first mold 110 and the second mold 120 are covered to perform imprinting, so that the pattern on the pattern portion 111 can be transferred to the adhesive layer 30. After the first and second stopping

portions

112 and 122 abut against each other, the first and

second molds

110 and 120 are completely pressed, and at this time, the first gap W1 is formed between the first surface 111a and the second surface 121a, and the first gap W1 ensures that the gate bottom 220 of the optical waveguide 20 has a predetermined thickness (equal to the first gap W1), so that the thickness of the optical waveguide 20 can be accurately controlled, and the process yield of the optical waveguide 20 is improved. It will be appreciated that the value of the first gap W1 can be adjusted as needed to provide the gate bottom 220 of the optical waveguide 20 with a predetermined thickness.

It should be noted that, at least two first stopping portions 112 should be disposed on the first mold 110, and the two first stopping portions 112 are located on opposite sides of the pattern portion 111, and likewise, at least two second stopping portions 122 should be disposed on the second mold 120, and the two second stopping portions 122 are located on opposite sides of the supporting portion 121. It is understood that the first blocking portion 112 and the second blocking portion 122 may also be annular and respectively surround the periphery of the pattern portion 111 and the supporting portion 121. The embodiment of the present application does not limit the arrangement manner of the first blocking portion 112 and the second blocking portion 122.

In one embodiment, as shown in fig. 2, 3 and 4, the pattern part 111 is provided with a plurality of grooves 1111 arranged at intervals, groove walls 1112 are arranged between adjacent grooves 1111, all surfaces of the groove walls 1112 close to the side of the support part 121 are located on the first surface 111a, and the distance between the first surface 111a and the second surface 121a is equal everywhere. It is understood that, during the transfer, the glue layer 30 in the groove 1111 may form the gate body 210 of the optical waveguide 20, and the glue layer 30 between the first surface 111a and the second surface 121a may form the gate bottom 220 of the optical waveguide 20. The distance between the first surface 111a and the second surface 121a is equal everywhere, and the thickness of the gate bottom 220 of the optical waveguide 20 can be made uniform.

In one embodiment, as shown in fig. 2 and 3, the first surface 111a and the second surface 121a are both planar, so that the optical waveguide tool 10 can prepare the planar optical waveguide 20.

In another embodiment, as shown in fig. 4 and 5, the first surface 111a and the second surface 121a are both curved surfaces, so that the optical waveguide jig 10 can prepare the curved optical waveguide 20.

In one embodiment, as shown in fig. 4 and 5, a third stopping portion 123 is disposed on a side of the second mold 120 close to the first mold 110, the third stopping portion 123 is located on a side of the second stopping portion 122 away from the supporting portion 121, and a side wall of the first stopping portion 112 abuts against a side wall of the third stopping portion 123.

Taking the orientation in fig. 4 as an example, when the first mold 110 and the second mold 120 are closed, the third stopping portion 123 can limit the first stopping portion 112 in the horizontal direction, so as to facilitate the alignment of the first mold 110 and the second mold 120, avoid the misalignment of the first mold 110 and the second mold 120, which causes the gate 210 of the optical waveguide 20 to be skewed, and improve the process yield of the optical waveguide 20.

In one embodiment, as shown in fig. 6, a third stopping portion 113 is disposed on a side of the first mold 110 close to the second mold 120, the third stopping portion 113 is located on a side of the first stopping portion 112 away from the pattern portion 111, and a side wall of the second stopping portion 122 abuts against a side wall of the third stopping portion 113.

Taking the orientation in fig. 6 as an example, when the first mold 110 and the second mold 120 are closed, the third stopping portion 113 can limit the second stopping portion 122 in the horizontal direction, so as to facilitate the alignment of the first mold 110 and the second mold 120, avoid the misalignment of the first mold 110 and the second mold 120, and prevent the gate 210 of the optical waveguide 20 from being skewed, thereby improving the process yield of the optical waveguide 20.

It should be noted that, in the subsequent embodiments of the present application, the arrangement manner of the third stopping portion is mainly described by taking the example shown in fig. 4 as an example.

In one embodiment, as shown in fig. 4, a ring of grooves 124 is formed on one side of the second mold 120 close to the first mold 110, and the grooves 124 are surrounded on the periphery of the supporting portion 121. The first stopping portion 112 extends toward the direction close to the second mold 120, and a part of the first stopping portion 112 is located in the groove 124. The bottom wall of the groove 124 forms the second stopping portion 122, and the side wall of the groove 124 far from the supporting portion 121 forms the third stopping portion 123.

In this way, by providing the groove 124 and clamping the first blocking portion 112 in the groove 124, on one hand, a first gap W1 can be formed between the first surface 111a and the second surface 121a, so that the gate bottom 220 of the optical waveguide 20 has a predetermined thickness, and the thickness of the optical waveguide 20 can be accurately controlled; on the other hand, the first mold 110 and the second mold 120 can be aligned accurately, and the gate 210 of the optical waveguide 20 is prevented from being inclined due to misalignment of the first mold 110 and the second mold 120.

In one embodiment, as shown in fig. 2, a second gap W2 is formed between a side wall of the first blocking portion 112 close to the supporting portion 121 and a side wall of the supporting portion 121 close to the first blocking portion 112.

Thus, when stamping, part of the glue in the glue layer 30 can flow into the second gap W2, and glue overflow is prevented.

In one embodiment, as shown in fig. 7, 8, 9 and 10, the optical waveguide fixture 10 may further include: a first cover plate 130 and a second cover plate 140, wherein the first cover plate 130 is located on a side of the first mold 110 away from the second mold 120, and the second cover plate 140 is located on a side of the second mold 120 away from the first mold 110. The first and

second cover plates

130 and 140 may sandwich the first and

second molds

110 and 120 for maintaining the closed state of the first and

second molds

110 and 120.

Specifically, the first cover plate 130 may have a first card slot 131, a portion of the first mold 110 is located in the first card slot 131, the second cover plate 140 may have a second card slot 141, and a portion of the second mold 120 is located in the second card slot 141. Thus, the first mold 110 and the second mold 120 can be held more firmly and are less likely to shift in the horizontal direction. The first cover plate 130 and the second cover plate 140 are detachably connected, and for example, the first cover plate 130 and the second cover plate 140 may be connected by a bolt connection or an adhesive.

In one embodiment, the first mold 110 is a light-transmissive member, the first cover 130 has a light-transmissive hole 132, and at least a partial orthographic projection of the first mold 110 on the first cover 130 coincides with the light-transmissive hole 132. Thus, after the optical waveguide 20 is formed, the optical waveguide 20 can be exposed through the light-transmitting hole 132 and the first mold 110 to harden the optical waveguide 20, so that the optical waveguide 20 can be easily peeled from the optical waveguide fixture 10.

A second aspect of the embodiments of the present application provides a method for manufacturing an optical waveguide, where the optical waveguide is manufactured by an optical waveguide fixture, and the optical waveguide fixture may be the optical waveguide fixture in the first aspect.

Specifically, referring to fig. 2, the optical waveguide fixture 10 includes a first mold 110 and a second mold 120 stacked together, one side of the first mold 110 close to the second mold 120 has a pattern portion 111 and a first stopper portion 112 located at the periphery of the pattern portion 111, and the pattern portion 111 has a first surface 111 a. The second mold 120 has a supporting portion 121 on a side thereof close to the first mold 110, and a second stopping portion 122 located at a periphery of the supporting portion 121. At least a partial orthographic projection of the second stopping portion 122 on the first mold 110 coincides with the first stopping portion 112. The supporting portion 121 has a second surface 121a, and the second surface 121a faces the first surface 111 a.

Referring to fig. 11, the method of manufacturing an optical waveguide includes:

s10: and forming a glue layer on the second surface of the supporting part, and covering the first mold and the second mold. The first stopper 112 abuts against the second stopper 122, and a first gap W1 is formed between the first surface 111a and the second surface 121 a. The schematic diagram after the glue layer 30 is formed is shown in fig. 12A and 12B.

In this way, in the stamping process, the first stopper portion 112 abuts against the second stopper portion 122, so that the first gap W1 is formed between the first surface 111a of the pattern portion 111 and the second surface 121a of the support portion 121, and the gate bottom 220 of the optical waveguide 20 has a predetermined thickness, thereby realizing precise control of the thickness of the optical waveguide 20 and improving the process yield of the optical waveguide 20.

S20: and exposing the glue layer to harden the glue layer and form the optical waveguide. Specifically, ultraviolet light is provided, and the ultraviolet light is transmitted through the first mold 110 and irradiates the adhesive layer 30. The exposure of the glue layer 30 is schematically illustrated in fig. 14A and 14B.

S30: and separating the optical waveguide from the optical waveguide jig. Specifically, the first mold 110 and the second mold 120 are opened, and the optical waveguide 20 is peeled off from the optical waveguide jig 10. The schematic view when the optical waveguide 20 is peeled is shown in fig. 15A and 15B.

In one embodiment, S10, further includes the following steps:

s11: and vacuumizing an external environment cavity of the optical waveguide jig. The schematic diagram after evacuation is shown in fig. 13A and 13B. It can be understood that, during the imprinting process, the optical waveguide fixture 10 may be placed in a closed cavity, and during the imprinting process, the closed cavity is vacuumized, the pressure of the closed cavity is different from that of the region between the first mold 110 and the second mold 120, the gas between the first mold 110 and the second mold 120 is sucked out by the vacuum force of the closed cavity, and the glue layer 30 uniformly flows into the grooves 1111 of the first mold 110, so as to form uniform gates 210, and prevent incomplete gates 210 caused by incomplete contact between the glue layer 30 and the grooves 1111.

It should be noted that, referring to fig. 16A, fig. 16B, fig. 17A and fig. 17B, the inventor adopts the preparation method of the optical waveguide in the embodiment of the present application to simulate the preparation processes of the planar optical waveguide 20 and the curved optical waveguide 20, and as can be seen from the simulation results, after the preparation is completed, the glue layer 30 can be in sufficient contact with the groove 1111, the optical waveguide 20 is uniformly formed, and the gate body of the optical waveguide 20 has no obvious defects.

It should be understood that, although the steps in the flowchart of fig. 11 are shown in order as indicated by the arrows, the steps are not necessarily performed in order as indicated by the arrows. The steps are not performed in the exact order shown and described, and may be performed in other orders, unless explicitly stated otherwise. Moreover, at least a portion of the steps in fig. 11 may include multiple steps or multiple stages, which are not necessarily performed at the same time, but may be performed at different times, which are not necessarily performed in sequence, but may be performed in turn or alternately with other steps or at least a portion of the other steps or stages.

In the description herein, references to the description of "some embodiments," "other embodiments," "desired embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic description of the above terminology may not necessarily refer to the same embodiment or example.

The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features of the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims

1. An optical waveguide jig is used for preparing an optical waveguide and is characterized by comprising a first die and a second die which are arranged in a laminated mode;

the first stopping portion abuts against the second stopping portion, and a first gap is formed between the first surface and the second surface.

2. The optical waveguide jig of claim 1, wherein the pattern portion is provided with a plurality of grooves arranged at intervals, a groove wall is provided between adjacent grooves, surfaces of all the groove walls on a side close to the supporting portion are located on a first surface, and distances between the first surface and the second surface are equal at all places.

3. The optical waveguide tool of claim 2, wherein the first surface and the second surface are both planar surfaces, or the first surface and the second surface are both curved surfaces.

4. The optical waveguide fixture according to any one of claims 1 to 3, wherein a third stopping portion is disposed on a side of the second mold close to the first mold, the third stopping portion is located on a side of the second stopping portion away from the supporting portion, and a sidewall of the first stopping portion abuts against a sidewall of the third stopping portion.

5. The optical waveguide fixture according to any one of claims 1 to 3, wherein a third stopping portion is disposed on a side of the first mold close to the second mold, the third stopping portion is located on a side of the first stopping portion away from the pattern portion, and a sidewall of the second stopping portion abuts against a sidewall of the third stopping portion.

6. The optical waveguide jig according to claim 4, wherein a circle of grooves is formed in one side of the second mold close to the first mold, and the grooves are located on the periphery of the supporting portion;

7. The optical waveguide fixture of claim 6, wherein a second gap is formed between the sidewall of the first stop portion and the sidewall of the support portion.

8. The optical waveguide tool of any one of claims 1-3 further comprising:

the first cover plate is positioned on one side, away from the second mold, of the first mold, the first cover plate is provided with a first clamping groove, and at least part of the first mold is positioned in the first clamping groove;

the second cover plate is positioned on one side, away from the first mold, of the second mold, the second cover plate is provided with a second clamping groove, and at least part of the second mold is positioned in the second clamping groove; wherein the first cover plate and the second cover plate are detachably connected;

and/or the first mould is a light-transmitting piece.

9. The preparation method of the optical waveguide is characterized in that the optical waveguide jig comprises a first die and a second die which are arranged in a laminated mode;

one side of the second die, which is close to the first die, is provided with a supporting part and a second stopping part positioned on the periphery of the supporting part; at least part of orthographic projection of the second stopping part on the first mould is overlapped with the first stopping part; the support portion has a second surface facing the first surface;

the preparation method of the optical waveguide comprises the following steps:

exposing the glue layer to harden the glue layer and form an optical waveguide;

and separating the optical waveguide from the optical waveguide jig.

10. The method for manufacturing an optical waveguide according to claim 9, wherein the step of forming a glue layer on the second surface of the support portion and closing the first mold and the second mold comprises the steps of:

and vacuumizing an external environment cavity of the optical waveguide jig.