CN114592235A - 一种用于集成电路生产的单晶炉 - Google Patents
一种用于集成电路生产的单晶炉 Download PDFInfo
- Publication number
- CN114592235A CN114592235A CN202210206508.1A CN202210206508A CN114592235A CN 114592235 A CN114592235 A CN 114592235A CN 202210206508 A CN202210206508 A CN 202210206508A CN 114592235 A CN114592235 A CN 114592235A
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- Prior art keywords
- furnace
- ring
- furnace body
- single crystal
- integrated circuit
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- 239000013078 crystal Substances 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 13
- 239000010439 graphite Substances 0.000 claims abstract description 13
- 230000005540 biological transmission Effects 0.000 claims description 21
- 230000000694 effects Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 235000017166 Bambusa arundinacea Nutrition 0.000 claims 1
- 235000017491 Bambusa tulda Nutrition 0.000 claims 1
- 241001330002 Bambuseae Species 0.000 claims 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 claims 1
- 239000011425 bamboo Substances 0.000 claims 1
- 125000004122 cyclic group Chemical group 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 24
- 229910052710 silicon Inorganic materials 0.000 abstract description 24
- 239000010703 silicon Substances 0.000 abstract description 24
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000000465 moulding Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 13
- 230000008859 change Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 9
- 239000007788 liquid Substances 0.000 description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 6
- 239000002210 silicon-based material Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B27/00—Single-crystal growth under a protective fluid
- C30B27/02—Single-crystal growth under a protective fluid by pulling from a melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
Description
Claims (8)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202211397410.5A CN115584555A (zh) | 2022-03-04 | 2022-03-04 | 一种半导体生产用单晶炉 |
CN202211397684.4A CN115652411A (zh) | 2022-03-04 | 2022-03-04 | 一种采用直拉法制备单晶硅的单晶炉 |
CN202210206508.1A CN114592235B (zh) | 2022-03-04 | 2022-03-04 | 一种用于集成电路生产的单晶炉 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210206508.1A CN114592235B (zh) | 2022-03-04 | 2022-03-04 | 一种用于集成电路生产的单晶炉 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202211397684.4A Division CN115652411A (zh) | 2022-03-04 | 2022-03-04 | 一种采用直拉法制备单晶硅的单晶炉 |
CN202211397410.5A Division CN115584555A (zh) | 2022-03-04 | 2022-03-04 | 一种半导体生产用单晶炉 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114592235A true CN114592235A (zh) | 2022-06-07 |
CN114592235B CN114592235B (zh) | 2022-12-09 |
Family
ID=81807438
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202211397410.5A Withdrawn CN115584555A (zh) | 2022-03-04 | 2022-03-04 | 一种半导体生产用单晶炉 |
CN202211397684.4A Withdrawn CN115652411A (zh) | 2022-03-04 | 2022-03-04 | 一种采用直拉法制备单晶硅的单晶炉 |
CN202210206508.1A Active CN114592235B (zh) | 2022-03-04 | 2022-03-04 | 一种用于集成电路生产的单晶炉 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202211397410.5A Withdrawn CN115584555A (zh) | 2022-03-04 | 2022-03-04 | 一种半导体生产用单晶炉 |
CN202211397684.4A Withdrawn CN115652411A (zh) | 2022-03-04 | 2022-03-04 | 一种采用直拉法制备单晶硅的单晶炉 |
Country Status (1)
Country | Link |
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CN (3) | CN115584555A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116479528A (zh) * | 2023-06-25 | 2023-07-25 | 常州市乐萌压力容器有限公司 | 一种碳化硅单晶生长用炉体及其加工工艺 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116288708B (zh) * | 2023-03-20 | 2023-08-11 | 鸿新新能源科技(云南)有限公司 | 一种单晶硅生产装置及生产方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0167052A1 (de) * | 1982-07-06 | 1986-01-08 | Deutsche Kommunal-Anlagen Miete GmbH | Vorrichtung zum Beschicken eines Ofens, insbesondere eines Drehrohrofens, mit zu verbrennendem Gut, insbesondere Abfällen |
JPS6465086A (en) * | 1987-09-05 | 1989-03-10 | Shinetsu Handotai Kk | Apparatus and process for producing single crystal rod |
US5788718A (en) * | 1995-12-27 | 1998-08-04 | Shin-Etsu Handotai Co., Ltd. | Apparatus and a method for growing a single crystal |
WO2002027076A1 (fr) * | 2000-09-26 | 2002-04-04 | Shin-Etsu Handotai Co.,Ltd. | Appareil et procede de production d'un mono-cristal semi-conducteur |
CN104818524A (zh) * | 2015-04-28 | 2015-08-05 | 汤灏 | 一种改善直拉法生长单晶硅质量的方法以及加热器 |
CN204714949U (zh) * | 2015-06-17 | 2015-10-21 | 山东大海新能源发展有限公司 | 一种单晶炉热场热量保护装置 |
CN111778549A (zh) * | 2020-06-10 | 2020-10-16 | 康林科 | 一种直拉法制备硅单晶用单晶炉 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6465086B2 (ja) * | 2016-08-29 | 2019-02-06 | トヨタ自動車株式会社 | 遮熱膜の製造方法 |
-
2022
- 2022-03-04 CN CN202211397410.5A patent/CN115584555A/zh not_active Withdrawn
- 2022-03-04 CN CN202211397684.4A patent/CN115652411A/zh not_active Withdrawn
- 2022-03-04 CN CN202210206508.1A patent/CN114592235B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0167052A1 (de) * | 1982-07-06 | 1986-01-08 | Deutsche Kommunal-Anlagen Miete GmbH | Vorrichtung zum Beschicken eines Ofens, insbesondere eines Drehrohrofens, mit zu verbrennendem Gut, insbesondere Abfällen |
JPS6465086A (en) * | 1987-09-05 | 1989-03-10 | Shinetsu Handotai Kk | Apparatus and process for producing single crystal rod |
US5788718A (en) * | 1995-12-27 | 1998-08-04 | Shin-Etsu Handotai Co., Ltd. | Apparatus and a method for growing a single crystal |
WO2002027076A1 (fr) * | 2000-09-26 | 2002-04-04 | Shin-Etsu Handotai Co.,Ltd. | Appareil et procede de production d'un mono-cristal semi-conducteur |
CN104818524A (zh) * | 2015-04-28 | 2015-08-05 | 汤灏 | 一种改善直拉法生长单晶硅质量的方法以及加热器 |
CN204714949U (zh) * | 2015-06-17 | 2015-10-21 | 山东大海新能源发展有限公司 | 一种单晶炉热场热量保护装置 |
CN111778549A (zh) * | 2020-06-10 | 2020-10-16 | 康林科 | 一种直拉法制备硅单晶用单晶炉 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116479528A (zh) * | 2023-06-25 | 2023-07-25 | 常州市乐萌压力容器有限公司 | 一种碳化硅单晶生长用炉体及其加工工艺 |
Also Published As
Publication number | Publication date |
---|---|
CN115652411A (zh) | 2023-01-31 |
CN114592235B (zh) | 2022-12-09 |
CN115584555A (zh) | 2023-01-10 |
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Address after: No. 22, Industrial Park, Yanhu Sub district Office, Tongshan District, Xuzhou City, Jiangsu Province, 221000 Applicant after: Xuzhou Kangxin Software Technology Co.,Ltd. Address before: 221000 No. 66, Changjiang West Road, Tongshan District, Xuzhou City, Jiangsu Province Applicant before: Xuzhou Kangxin Software Technology Co.,Ltd. |
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TR01 | Transfer of patent right |
Effective date of registration: 20240115 Address after: No. 22, Industrial Park, Yanhu Sub district Office, Tongshan District, Xuzhou City, Jiangsu Province, 221000 Patentee after: XUZHOU PENGYUAN INFORMATION TECHNOLOGY Co.,Ltd. Address before: No. 22, Industrial Park, Yanhu Sub district Office, Tongshan District, Xuzhou City, Jiangsu Province, 221000 Patentee before: Xuzhou Kangxin Software Technology Co.,Ltd. |