CN114538933B - 一种行波管夹持杆的制备方法 - Google Patents

一种行波管夹持杆的制备方法 Download PDF

Info

Publication number
CN114538933B
CN114538933B CN202011331715.7A CN202011331715A CN114538933B CN 114538933 B CN114538933 B CN 114538933B CN 202011331715 A CN202011331715 A CN 202011331715A CN 114538933 B CN114538933 B CN 114538933B
Authority
CN
China
Prior art keywords
ceramic
rod
wave tube
percent
clamping rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202011331715.7A
Other languages
English (en)
Other versions
CN114538933A (zh
Inventor
康丁华
方剑
康文涛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Loudi Antaeus Electronic Ceramics Co ltd
Original Assignee
Loudi Antaeus Electronic Ceramics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Loudi Antaeus Electronic Ceramics Co ltd filed Critical Loudi Antaeus Electronic Ceramics Co ltd
Priority to CN202011331715.7A priority Critical patent/CN114538933B/zh
Publication of CN114538933A publication Critical patent/CN114538933A/zh
Application granted granted Critical
Publication of CN114538933B publication Critical patent/CN114538933B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C04B41/5046—Spinels, e.g. magnesium aluminate spinels
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40—Metallic constituents or additives not added as binding phase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40—Metallic constituents or additives not added as binding phase
    • C04B2235/402—Aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/40—Metallic constituents or additives not added as binding phase
    • C04B2235/404—Refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)

Abstract

本发明公开了行波管夹持杆的制备方法，包括以下步骤：S1按质量比称取以下物料粉末，氮化物陶瓷粉末95～99％；助烧剂粉末0.3～1.8％；钛0～1.2％；铝0～1.5％；镧0～0.8％；钽0～0.5％；S2：将步骤S1的混合物料球磨36h以上；S3：将混合物料烘烤8h；S4：将混合物料加入7.5％粘结剂，并在80℃的密炼室进行密炼4h以上；S5：将步骤S4中密炼好的浆料挤制成杆；S6：将步骤S5中的杆坯件放入1330～1400℃的氮气氛炉中保温1～2h烧成陶瓷中心杆；S7：在陶瓷中心杆上喷涂陶瓷介质材料并烘干；S8：在介质材料外层再喷涂散热材料并烘干；S9：将喷涂完毕散热材料的陶瓷中心杆放入1400～1500℃的氮气炉里中保温2～3h烧结成瓷。本发明所制备的行波管夹持杆具有高频损耗小，散热快等优点。

Description

一种行波管夹持杆的制备方法
技术领域
本发明涉及微波真空电子技术领域，具体涉及行波管夹持杆的制备方法。
背景技术
现有电子陶瓷中的行波管夹持杆，是由氧化铍，氮化铝和氮化硼等材料制备而成，陶瓷夹持杆是螺旋线行波管中的关键元器件之一，在行波管中起着支撑螺旋线和散热作用。
由以下单一材料制备的夹持杆存在不足之处:1.熔融石英陶瓷（SiO2）制备的夹持杆具有热导率较低的缺点；2.氧化铝陶瓷（Al2O3）制备的夹持杆具有高频损耗大的缺点；3.氧化铍陶瓷（BeO）制备的夹持杆具有毒性，容易污染环境；4.氮化硼陶瓷（BN）制备的夹持杆具有热导率低的缺点。
现有的行波管夹持杆具有高频损耗大，散热慢不适合应用于大功率高频行波管上，同时现有的行波管夹持杆还具有低强度和低韧性等缺点，很容易因为受力不均匀而发生断裂，造成大量材料的浪费。
发明内容
本发明要解决的技术问题是克服现有技术存在的不足，提供一种可以解决导热散热性差、较小功率容量、韧性差和高频损耗大的陶瓷夹持杆。
为解决上述技术问题，本发明采用以下技术方案：行波管夹持杆的制备方法，包括以下步骤：S1：按质量比称取以下粉末，氮化物陶瓷粉末95～99%；助烧剂粉末0.3～1.8%；钛0～1.2%；铝0～1.5%；镧0～0.8%；钽0～0.5%，并将其混合成中心杆材料；
S2：将步骤S1中的混合物加入球磨罐，球磨36h以上；
S3：将步骤S2中球磨后的混合物烘烤8h；
S4：将步骤S3中烘烤后的混合物倒入温度为80℃的密炼机内并加入7.5%粘结剂进行密炼4h；
S5：将步骤S4中密炼好的浆料挤至成型机内，挤制成杆；
S6：将步骤S5中的杆坯件放入1330～1400℃的氮气氛炉中保温1～2h烧成陶瓷中心杆；
S7：在步骤S6的陶瓷中心杆上喷涂陶瓷介质材料并烘干；
S8：在已喷涂陶瓷介质材料的陶瓷中心杆上再喷涂散热材料并烘干；
S9：将喷涂散热材料完毕的陶瓷中心杆放入1400～1500℃的氮气炉里中保温2～3h烧结成瓷。
优选地，所述步骤S1中的氮化物陶瓷粉末包括氮化硅、氮化铝，助烧剂粉末包括氟化钙、氟化镁。
优选地，所述步骤S4中的粘结剂包括石蜡、聚乙烯、硬脂酸和CMC，其按质量比为石蜡:聚乙烯:硬脂酸:CMC=58:32:7:3。
优选地，制备所述陶瓷介质材料的方法为由质量占比99.5%的介质主料加入0.5%的粘结剂混合，并在该混合物中加入离子水混磨28h制成的浆料，离子水占该浆料的4/5。
优选地，所述介质主料包括尖晶石组份、堇青石组份、稳定剂以及烧结助剂，其按质量比为尖晶石组份:堇青石组份:稳定剂:烧结助剂=45～60:35～45:5～8:0～5。
优选地，所述尖晶石组份包括铬-镁铝型、铁-镁铝型、锰-镁铝型、锌-镁铝型。
优选地，所述堇青石组份包括铁或锆。
优选地，所述稳定剂包括钛酸镁、钛酸钙、钛酸钡、钛酸锂。
优选地，所述烧结助剂包括Ca2+、Ba2+的二价阳离子。
优选地，制备所述散热材料的方法为称取质量占比88%的中心杆材料中加入12%的陶瓷介质材料以及0.5%的粘结剂混合，并在该混合物中加入去离子水混磨均匀得到浆料，该去离子水占该浆料的4/5。
与现有技术相比，本发明的优点在于：本发明所制备的行波管夹持杆具有高频损耗小，散热快等优点，适合应用于大功率高频行波管上；同时，夹持杆具有高强度和高韧性，在制造陶瓷生产途中以及后续装配时可操作性很高，适应量化生产。
具体实施方式
以下具体实施例对本发明作进一步详细说明，显然，所描述的实施例仅仅是本发明的一部分实施例，而不是全部的实施例，基于本发明中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
本实施例的行波管夹持杆的制备方法，包括以下步骤：
S1：按质量比称取以下粉末，氮化物陶瓷粉末95～99%；助烧剂粉末0.3～1.8%；钛0～1.2%；铝0～1.5%；镧0～0.8%；钽0～0.5%，并将其混合成中心杆材料；
S2：将步骤S1中的混合物加入球磨罐，球磨36h以上；
S3：将步骤S2中球磨后的混合物烘烤8h；
S4：将步骤S3中烘烤后的混合物倒入温度为80℃的密炼机内并加入7.5%粘结剂进行密炼4h；
S5：将步骤S4中密炼好的浆料挤至成型机内，挤制成杆；
S6：将步骤S5中的杆坯件放入1330～1400℃的氮气氛炉中保温1～2h烧成陶瓷中心杆；
S7：在步骤S6的陶瓷中心杆上喷涂陶瓷介质材料并烘干；
S8：在已喷涂陶瓷介质材料的陶瓷中心杆上再喷涂散热材料并烘干；
S9：将喷涂散热材料的陶瓷中心杆放入1400～1500℃的氮气炉里中保温2～3h烧结成瓷。
本实施例中，本发明特设制一种多层复合陶瓷夹持杆：在陶瓷中心杆上，喷涂具有高频损耗小和能补偿里外层衰减系数的中间层的陶瓷介质材料，按各原材料成份配比的大小，是可调节介电常数大小来满足功率容量和介电损耗的；最外层再喷涂散热性好的，同时能满足介电常数的散热材料。从而本发明具有高频损耗小，散热快等优点，适合应用于大功率高频行波管上；同时，夹持杆具有高强度和高韧性，在制造陶瓷生产途中以及后续装配时可操作性很高。
本实施例中，铝可用锌，钡等单质金属替换；镧可用铈，钇铌等稀土元素替换。
其中，所述步骤S1中的氮化物陶瓷粉末包括氮化硅、氮化铝，助烧剂粉末包括氟化钙、氟化镁。
其中，所述步骤S4中的粘结剂包括石蜡、聚乙烯、硬脂酸和CMC，其按质量比为石蜡:聚乙烯:硬脂酸:CMC=58:32:7:3。
其中，制备所述陶瓷介质材料的方法为由质量占比99.5%的介质主料加入0.5%的粘结剂混合，并在该混合物中加入离子水混磨28h制成的浆料，离子水占该浆料的4/5。
其中，所述介质主料包括尖晶石组份、堇青石组份、稳定剂以及烧结助剂，其按质量比为尖晶石组份:堇青石组份:稳定剂:烧结助剂=45～60:35～45:5～8:0～5。
其中，所述尖晶石组份包括铬-镁铝型、铁-镁铝型、锰-镁铝型、锌-镁铝型。
其中，所述堇青石组份包括铁或锆。
其中，所述稳定剂包括钛酸镁、钛酸钙、钛酸钡、钛酸锂。
其中，所述烧结助剂包括Ca2+、Ba2+的二价阳离子。
其中，制备所述散热材料的方法为称取质量占比88%的中心杆材料中加入12%的陶瓷介质材料以及0.5%的粘结剂混合，并在该混合物中加入去离子水混磨均匀得到浆料，该去离子水占该浆料的4/5。
经实验论证所得最佳性能状态数据如下表1：（本发明制备的行波管夹持杆为：FHLG复合材料夹持杆）
表1 与几种常见介质材料夹持杆的有关物理特性相比较表
Figure 390499DEST_PATH_IMAGE001
以上仅是本发明的优选实施方式，本发明的保护范围并不仅局限于上述实施例。对于本技术领域的技术人员来说，在不脱离本发明技术构思前提下所得到的改进和变换也应视为本发明的保护范围。

Claims (6)

1.一种行波管夹持杆的制备方法，其特征在于，包括以下步骤：
S1：按质量比称取以下粉末，一种或两种以上氮化物陶瓷粉末95～99%；助烧剂粉末0.3～1.8%；钛0～1.2%；铝0～1.5%；镧0～0.8%；钽0～0.5%，并将其混合成中心杆材料；所述氮化物陶瓷粉末包括氮化硅和氮化铝，助烧剂粉末包括氟化钙和氟化镁；
S2：将步骤S1中的混合物加入球磨罐,球磨36h以上；
S3：将步骤S2中球磨后的混合物烘烤8h；
S4：将步骤S3中烘烤后的混合物倒入温度为80℃的密炼机内并加入7.5%粘结剂进行密炼4h；
S5：将步骤S4中密炼好的浆料挤至成型机内，挤制成杆；
S6：将步骤S5中的杆坯件放入1330～1400℃的氮气氛炉中保温1～2h烧成陶瓷中心杆；
S7：在步骤S6的陶瓷中心杆上喷涂陶瓷介质材料并烘干；制备所述陶瓷介质材料的方法为由质量占比99.5%的介质主料加入0.5%的粘结剂混合，并在该混合物中加入去离子水混磨28h制成的浆料，去离子水占该浆料的4/5；所述介质主料包括尖晶石组份、堇青石组份、稳定剂以及烧结助剂，其按质量比为尖晶石组份:堇青石组份:稳定剂:烧结助剂=45～60:35～45:5～8:0～5；
S8：在已喷涂陶瓷介质材料的陶瓷中心杆上再喷涂散热材料并烘干；制备所述散热材料的方法为称取质量占比88%的中心杆材料中加入12%的陶瓷介质材料以及0.5%的粘结剂混合，并在该混合物中加入去离子水混磨均匀得到浆料，该去离子水占该浆料的4/5；
S9：将喷涂散热材料的陶瓷中心杆放入1400～1500℃的氮气炉里中保温2～3h烧结成瓷。
2.根据权利要求1所述的行波管夹持杆的制备方法，其特征在于：所述步骤S4中的粘结剂包括石蜡、聚乙烯、硬脂酸和CMC，其按质量比为石蜡:聚乙烯:硬脂酸:CMC=58:32:7:3。
3.根据权利要求1所述的行波管夹持杆的制备方法，其特征在于：所述尖晶石组份包括铬-镁铝型，铁-镁铝型，锰-镁铝型，锌-镁铝型。
4.根据权利要求1所述的行波管夹持杆的制备方法，其特征在于：所述堇青石组份包括铁或锆。
5.根据权利要求1所述的行波管夹持杆的制备方法，其特征在于：所述稳定剂包括钛酸镁，钛酸钙，钛酸钡，钛酸锂。
6.根据权利要求1所述的行波管夹持杆的制备方法，其特征在于：所述烧结助剂包括Ca2 +、Ba2+二价阳离子。
CN202011331715.7A 2020-11-24 2020-11-24 一种行波管夹持杆的制备方法 Active CN114538933B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011331715.7A CN114538933B (zh) 2020-11-24 2020-11-24 一种行波管夹持杆的制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011331715.7A CN114538933B (zh) 2020-11-24 2020-11-24 一种行波管夹持杆的制备方法

Publications (2)

Publication Number Publication Date
CN114538933A CN114538933A (zh) 2022-05-27
CN114538933B true CN114538933B (zh) 2022-11-22

Family

ID=81660693

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011331715.7A Active CN114538933B (zh) 2020-11-24 2020-11-24 一种行波管夹持杆的制备方法

Country Status (1)

Country Link
CN (1) CN114538933B (zh)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770953A (en) * 1986-02-20 1988-09-13 Kabushiki Kaisha Toshiba Aluminum nitride sintered body having conductive metallized layer
US5274304A (en) * 1991-04-01 1993-12-28 Nec Corporation Helix type traveling wave tube structure with supporting rods covered with boron nitride or artificial diamond
US6391437B1 (en) * 1997-01-29 2002-05-21 Sony Corporation Composite material and manufacturing method thereof, substrate processing apparatus and manufacturing method thereof, substrate mounting stage and manufacturing method thereof, and substrate processing method
CN101271803A (zh) * 2007-03-21 2008-09-24 中国科学院电子学研究所 一种螺旋线行波管慢波组件及制备方法
CN103474312A (zh) * 2013-09-09 2013-12-25 电子科技大学 一种行波管夹持杆及其制备方法
CN103570360A (zh) * 2012-07-30 2014-02-12 伯鑫科技有限公司 远红外线散热陶瓷浆料、纤维布、薄膜及其制备方法
CN104485270A (zh) * 2014-11-10 2015-04-01 安徽华东光电技术研究所 一种螺旋线行波管用慢波系统的制造工艺
CN104556979A (zh) * 2014-12-26 2015-04-29 宜宾红星电子有限公司 一种氧化铍陶瓷夹持杆及其制作方法
CN111048376A (zh) * 2019-12-19 2020-04-21 中国电子科技集团公司第十二研究所 一种螺旋线慢波结构及包括该慢波结构的行波管

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0328171A (ja) * 1989-06-23 1991-02-06 Nec Corp セラミック複合材料
JPH0589788A (ja) * 1991-09-27 1993-04-09 Nec Corp 進行波管用誘電体支柱
JPH0725663A (ja) * 1993-07-09 1995-01-27 Sumitomo Metal Ind Ltd 窒化アルミニウム焼結体およびその製造方法
IT1292853B1 (it) * 1997-04-08 1999-02-11 Mg 2 Spa Macchina comprimitrice per compresse multistrato.
EP3002272B1 (en) * 2014-10-03 2019-06-26 NGK Insulators, Ltd. Heat-resistant member and method for producing the same

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770953A (en) * 1986-02-20 1988-09-13 Kabushiki Kaisha Toshiba Aluminum nitride sintered body having conductive metallized layer
US5274304A (en) * 1991-04-01 1993-12-28 Nec Corporation Helix type traveling wave tube structure with supporting rods covered with boron nitride or artificial diamond
US6391437B1 (en) * 1997-01-29 2002-05-21 Sony Corporation Composite material and manufacturing method thereof, substrate processing apparatus and manufacturing method thereof, substrate mounting stage and manufacturing method thereof, and substrate processing method
CN101271803A (zh) * 2007-03-21 2008-09-24 中国科学院电子学研究所 一种螺旋线行波管慢波组件及制备方法
CN103570360A (zh) * 2012-07-30 2014-02-12 伯鑫科技有限公司 远红外线散热陶瓷浆料、纤维布、薄膜及其制备方法
CN103474312A (zh) * 2013-09-09 2013-12-25 电子科技大学 一种行波管夹持杆及其制备方法
CN104485270A (zh) * 2014-11-10 2015-04-01 安徽华东光电技术研究所 一种螺旋线行波管用慢波系统的制造工艺
CN104556979A (zh) * 2014-12-26 2015-04-29 宜宾红星电子有限公司 一种氧化铍陶瓷夹持杆及其制作方法
CN111048376A (zh) * 2019-12-19 2020-04-21 中国电子科技集团公司第十二研究所 一种螺旋线慢波结构及包括该慢波结构的行波管

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
行波管输能窗和夹持杆的研究;唐惠东等;《江苏陶瓷》;20020630;第35卷(第2期);第3-5页 *

Also Published As

Publication number Publication date
CN114538933A (zh) 2022-05-27

Similar Documents

Publication Publication Date Title
US10899669B2 (en) Boron aluminum silicate mineral material, low temperature co-fired ceramic composite material, low temperature co-fired ceramic, composite substrate and preparation methods thereof
KR101757069B1 (ko) 알루미나 복합체 세라믹스 조성물 및 그의 제조방법
CN111635222B (zh) 一种基于单斜相的低介微波介质陶瓷材料及其制备方法
CN101583579B (zh) 无玻璃微波介电陶瓷及其制法
JP2951771B2 (ja) 希土類酸化物−アルミナ−シリカ焼結体およびその製造方法
Wang et al. Low-Temperature Sintering Li 3 Mg 1.8 Ca 0.2 NbO 6 Microwave Dielectric Ceramics with LMZBS Glass
Ding et al. Low-temperature-sintering characteristic and microwave dielectric properties of (Zn0. 7Mg0. 3) TiO3 ceramics with LBSCA glass
JP2012046365A (ja) アルミナセラミックス
CN112939596B (zh) 微波介质陶瓷及其制备方法
CN116854472B (zh) 一种微波介质材料及其制备方法
CN114538933B (zh) 一种行波管夹持杆的制备方法
CN112430104A (zh) 一种用于制备陶瓷的复合添加剂及其制备方法和应用
JP3904874B2 (ja) 半導体製造装置用部材
KR102565344B1 (ko) 질화 알루미늄 세라믹스 조성물 및 그의 제조방법
CN116161869A (zh) 一种微波介质材料的制备方法
JP4808837B2 (ja) 高周波用アルミナ質焼結体
CN110734290A (zh) 一种氮化硅陶瓷材料及其制备方法
JPH0585821A (ja) 希土類酸化物−アルミナ焼結体およびその製造方法
CN111995415A (zh) 一种复合氮化硼陶瓷高温喷嘴及其制备方法
KR102216429B1 (ko) 세라믹 히터용 코디어라이트계 세라믹 조성물
CN117447202B (zh) 单相微波介质陶瓷粉体、微波介质陶瓷材料及其制备方法
JP4897163B2 (ja) アルミナ質焼結体の製造方法
Wang et al. Improved sintering characteristics and microwave dielectric properties of 0.02 B 2 O 3–0.98 SiO 2 ceramics by SiO 2 nanoparticle additive
JPH0312363A (ja) 窒化アルミニウム質焼結体およびその製造方法
CN116081950A (zh) 一种低膨胀电瓷釉料的制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant