CN114381344A - 一种微泡促溶清洗液及其应用 - Google Patents
一种微泡促溶清洗液及其应用 Download PDFInfo
- Publication number
- CN114381344A CN114381344A CN202210087071.4A CN202210087071A CN114381344A CN 114381344 A CN114381344 A CN 114381344A CN 202210087071 A CN202210087071 A CN 202210087071A CN 114381344 A CN114381344 A CN 114381344A
- Authority
- CN
- China
- Prior art keywords
- cleaning solution
- circuit board
- microbubble
- promoting cleaning
- dissolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 96
- 238000004090 dissolution Methods 0.000 title claims abstract description 42
- 230000001737 promoting effect Effects 0.000 title claims abstract description 40
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 14
- 230000008569 process Effects 0.000 claims abstract description 14
- 238000001035 drying Methods 0.000 claims abstract description 12
- 239000000126 substance Substances 0.000 claims description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 20
- 239000002904 solvent Substances 0.000 claims description 19
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical group [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 claims description 12
- 239000001099 ammonium carbonate Substances 0.000 claims description 12
- GTCAXTIRRLKXRU-UHFFFAOYSA-N methyl carbamate Chemical compound COC(N)=O GTCAXTIRRLKXRU-UHFFFAOYSA-N 0.000 claims description 10
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical group COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims description 8
- 239000008367 deionised water Substances 0.000 claims description 8
- 229910021641 deionized water Inorganic materials 0.000 claims description 8
- 229910000013 Ammonium bicarbonate Inorganic materials 0.000 claims description 7
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical group CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 7
- 235000012538 ammonium bicarbonate Nutrition 0.000 claims description 7
- 235000012501 ammonium carbonate Nutrition 0.000 claims description 5
- 239000012459 cleaning agent Substances 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims description 2
- 239000003344 environmental pollutant Substances 0.000 abstract description 17
- 231100000719 pollutant Toxicity 0.000 abstract description 17
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract description 12
- 239000007788 liquid Substances 0.000 abstract description 10
- 239000001569 carbon dioxide Substances 0.000 abstract description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract description 6
- 230000006378 damage Effects 0.000 abstract description 5
- 150000001298 alcohols Chemical class 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 238000002360 preparation method Methods 0.000 abstract description 2
- 208000027418 Wounds and injury Diseases 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 208000014674 injury Diseases 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000011012 sanitization Methods 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 44
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 12
- 150000002500 ions Chemical class 0.000 description 8
- 238000002156 mixing Methods 0.000 description 6
- 239000011780 sodium chloride Substances 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- RSWGJHLUYNHPMX-UHFFFAOYSA-N Abietic-Saeure Natural products C12CCC(C(C)C)=CC2=CCC2C1(C)CCCC2(C)C(O)=O RSWGJHLUYNHPMX-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/02—Inorganic compounds
- C11D7/04—Water-soluble compounds
- C11D7/10—Salts
- C11D7/12—Carbonates bicarbonates
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/263—Ethers
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Inorganic Chemistry (AREA)
- Detergent Compositions (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210087071.4A CN114381344B (zh) | 2022-01-25 | 2022-01-25 | 一种微泡促溶清洗液及其应用 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202210087071.4A CN114381344B (zh) | 2022-01-25 | 2022-01-25 | 一种微泡促溶清洗液及其应用 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114381344A true CN114381344A (zh) | 2022-04-22 |
CN114381344B CN114381344B (zh) | 2024-06-25 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202210087071.4A Active CN114381344B (zh) | 2022-01-25 | 2022-01-25 | 一种微泡促溶清洗液及其应用 |
Country Status (1)
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CN (1) | CN114381344B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101099229A (zh) * | 2004-12-23 | 2008-01-02 | 兰姆研究公司 | 用于硅电极组件表面污染去除的清洗方法 |
CN101932389A (zh) * | 2008-02-11 | 2010-12-29 | 埃科莱布有限公司 | 气泡增强的清洁方法和化学处理 |
TW201229232A (en) * | 2010-10-27 | 2012-07-16 | Fujifilm Corp | Multi-agent type cleaning kit for semiconductor substrates, cleaning method using the same and method of producing semiconductor element |
CN103579053A (zh) * | 2012-08-09 | 2014-02-12 | 芝浦机械电子株式会社 | 清洗液生成装置及方法、基板清洗装置及方法 |
CN106471602A (zh) * | 2014-03-31 | 2017-03-01 | 独立行政法人产业技术综合研究所 | 半导体的制造方法及晶片衬底的清洗方法 |
CN106479761A (zh) * | 2015-08-28 | 2017-03-08 | 比亚迪股份有限公司 | 印刷电路板用水性清洗剂组合物和清洗剂及其制备方法和应用 |
-
2022
- 2022-01-25 CN CN202210087071.4A patent/CN114381344B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101099229A (zh) * | 2004-12-23 | 2008-01-02 | 兰姆研究公司 | 用于硅电极组件表面污染去除的清洗方法 |
CN101932389A (zh) * | 2008-02-11 | 2010-12-29 | 埃科莱布有限公司 | 气泡增强的清洁方法和化学处理 |
TW201229232A (en) * | 2010-10-27 | 2012-07-16 | Fujifilm Corp | Multi-agent type cleaning kit for semiconductor substrates, cleaning method using the same and method of producing semiconductor element |
CN103579053A (zh) * | 2012-08-09 | 2014-02-12 | 芝浦机械电子株式会社 | 清洗液生成装置及方法、基板清洗装置及方法 |
CN106471602A (zh) * | 2014-03-31 | 2017-03-01 | 独立行政法人产业技术综合研究所 | 半导体的制造方法及晶片衬底的清洗方法 |
CN106479761A (zh) * | 2015-08-28 | 2017-03-08 | 比亚迪股份有限公司 | 印刷电路板用水性清洗剂组合物和清洗剂及其制备方法和应用 |
Also Published As
Publication number | Publication date |
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CN114381344B (zh) | 2024-06-25 |
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TA01 | Transfer of patent application right |
Effective date of registration: 20240205 Address after: Room 1301, block F, Changhe international, No.180, Fengcheng 8th Road, economic and Technological Development Zone, Xi'an City, Shaanxi Province, 710018 Applicant after: XI'AN AODE PETROLEUM ENGINEERING TECHNOLOGY CO.,LTD. Country or region after: China Address before: 710021 Shaanxi province Xi'an Weiyang University Park Applicant before: SHAANXI University OF SCIENCE & TECHNOLOGY Country or region before: China |
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GR01 | Patent grant | ||
GR01 | Patent grant |