CN114341652A

CN114341652A - Test seat

Info

Publication number: CN114341652A
Application number: CN202080061282.XA
Authority: CN
Inventors: 郑永倍; 金钟元; 俞恩智; 金炯俊
Original assignee: ISC Co Ltd
Current assignee: ISC Co Ltd
Priority date: 2019-08-29
Filing date: 2020-08-28
Publication date: 2022-04-12
Also published as: WO2021040451A1

Abstract

The invention relates to a test socket, which comprises a plurality of conductive parts, a plurality of test pads and a plurality of test pads, wherein the conductive parts are arranged at positions corresponding to terminals of an element to be tested, and a plurality of conductive particles are arranged in the vertical direction and aligned in an elastic insulating material so as to present conductivity in the vertical direction; and an insulating portion disposed around the conductive portions to support each of the conductive portions and insulate the conductive portions from each other, wherein each of the conductive particles includes: a cylindrical body that is long in one direction and has open upper and lower ends and an internal penetrating space; and a protrusion protruding in one direction from an end of the cylindrical body, wherein the protrusion of the conductive particle has a size that can be inserted into a penetration space of the cylindrical body of another conductive particle, so that when the conductive part is compressed in the inspection process, the protrusion of the conductive particle is stuck on the another conductive particle and is not separated from the another conductive particle.

Description

Test seat

Technical Field

The present invention relates to a test socket, and more particularly, to a test socket whose electrical characteristics do not deteriorate during frequent electrical testing.

Background

In the related art, test sockets are used for electrically inspecting components, and for this purpose, such test sockets are brought into contact with a component to be inspected (a component to be inspected) and a inspecting device to electrically connect the component to be inspected and the inspecting device to each other. The test socket transmits the electrical signal of the detection device to the element to be tested, and transmits the electrical signal of the element to be tested to the detection element. As the test socket, a spring type header socket and a conductive rubber sheet are known in the related art.

The spring loaded thimble seat contains a spring loaded thimble that is vertically compressed in response to an external force applied to the element to be tested. The spring type header requires an assembly for accommodating the spring type header, and therefore it is difficult to provide the spring type header with a small thickness and to apply it to a terminal of an element to be tested with a small pitch.

The conductive rubber sheet may be elastically deformed in response to an external force applied to the element to be tested. The conductive rubber sheet comprises: a plurality of conductive portions for electrically connecting the element to be tested to the inspection device; and an insulating portion separating the conductive portions from each other. The insulating portion may comprise cured silicone rubber. Compared with a spring type thimble seat, the conductive rubber sheet is advantageous in terms of lower manufacturing cost, no damage to the element to be tested, and extremely small thickness. Therefore, attempts have been made in the related art to replace the spring-loaded thimble test socket with a conductive rubber sheet.

Such a conductive rubber sheet has a plurality of conductive portions each formed by vertically aligning a plurality of conductive particles in a soft elastic insulating material. In the inspection process, when the terminals of the element to be tested are brought into contact with and pressed onto the conductive portions, the conductive portions are compressed and become conductive in the vertical direction, and then the inspection apparatus applies electrical signals to the terminals of the element to be tested through the conductive portions to perform electrical testing.

During frequent inspection, the conductive portions of such conductive rubber sheets repeatedly compress and expand, and thus, the alignment of conductive particles distributed in the soft elastic insulating material is broken. In order to prevent the alignment of the conductive particles from being broken, korean patent No. 10-1339166 has proposed a method of forming a through hole in the center portion of a plate-shaped conductive particle as shown in fig. 1 and 2. However, although the through-hole is formed at the center portion of the conductive particle, when the conductive portion is compressed, there is still a problem that since the conductive particles contact each other, the contact surfaces of the conductive particles slide each other to affect the alignment state of the conductive particles, and thus the problem of deterioration of the electrical characteristics has not been solved.

Disclosure of Invention

Problems to be solved by the invention

Embodiments of the present disclosure provide a test socket that can maintain an aligned state of conductive particles when repeatedly pressed. Embodiments of the present disclosure provide a test socket capable of preventing sliding between contact surfaces of conductive particles.

Means for solving the problems

In order to achieve the above-mentioned object, a test socket is provided, which is disposed between a device to be tested and a testing apparatus for electrically connecting a terminal of the device to be tested to a terminal of the testing apparatus, the test socket comprising:

a plurality of conductive portions provided at positions corresponding to the terminals of the element to be tested, the plurality of conductive particles being arranged in a vertical direction and aligned in an elastic insulating material to exhibit conductivity in the vertical direction; and

an insulating portion disposed around the conductive portions to support the conductive portions and insulate the conductive portions from each other,

wherein each of the above conductive particles comprises:

a cylindrical body that is long in one direction and has open upper and lower ends and an internal penetrating space; and

a protruding portion protruding from an end portion of the cylindrical body in the one direction,

wherein the protruding portion of the conductive particle has a size that can be inserted into the penetrating space of the cylindrical body of another conductive particle, so that the protruding portion of the conductive particle is caught on the another conductive particle and is not separated from the another conductive particle when the conductive portion is compressed in the inspection process.

In the test socket, the protruding portion may protrude from an upper end and a lower end of the cylindrical body along edges of the upper end and the lower end of the cylindrical body.

In the test socket, the cylindrical body may be made of a metallic sheet material.

In the test socket, the protrusion may be made of a metal sheet material and bent to have the same center of curvature as the cylindrical body described above.

In the test socket, the cylindrical body and the protrusion may be made of sheet materials having the same thickness.

In the test socket, the tip of the protrusion may be in a sharp shape.

In the test socket, the protrusion may have a first portion of a constant width from the cylindrical body; and a second portion having a width that decreases from the first portion to the end.

In the test socket, the protrusion may have a third portion of reduced width from the cylindrical body; a fourth portion having a width that increases from the third portion, and a fifth portion having a width that decreases from the fourth portion to the distal end.

In the test socket, the maximum cross-sectional area of the protrusion may be smaller than the opening area of the cylindrical body.

In the test socket, the cylindrical body may be formed with a penetration hole penetrating through an outer surface and an inner surface, and the penetration hole may be filled with the elastic insulating material.

In the test socket, a recessed portion may be formed in at least one of an outer surface and an inner surface of the tubular body, and the recessed portion may be filled with the elastic insulating material.

In the test socket, a cut-out portion extending in a vertical direction may be formed at one side of the cylindrical body.

In the test socket, the cut-out portion may extend from the upper end to the lower end of the cylindrical body.

In the test socket, the resilient insulating material may comprise silicone rubber.

In order to achieve the above-mentioned object, a test socket is provided, which is disposed between a device to be tested and a testing apparatus for electrically connecting terminals of the device to be tested to terminals of the testing apparatus, the test socket comprising:

wherein the conductive particles include:

a cylindrical body having upper and lower ends opened and a penetration space formed therein; and

a communication hole passing through the inner surface and the outer surface of the cylindrical body,

wherein the communicating hole is filled with the elastic insulating material.

In the test socket, the plurality of communication holes may be provided at intervals along a circumferential direction of the cylindrical body.

In the test socket, a cut-out portion cut out from the upper end to the lower end of the tubular body may be provided at one side of the tubular body

In the test socket, the cut-out portion may pass through one of the plurality of communication holes.

In the test socket, a protruding portion may be formed on at least one of the upper end and the lower end of the cylindrical body.

wherein the conductive particles include:

a recess formed in an inner surface or an outer surface of the cylindrical body,

wherein the recess is filled with the elastic insulating material.

Effects of the invention

In the test socket of the present invention, the conductive particles have a cylindrical body, and a protrusion is formed at the end of the cylindrical body, so that the conductive particles can be prevented from sliding on the contact surface thereof to be separated from each other. Therefore, the alignment state of the conductive particles can be maintained even when the detection is repeated.

In particular, the conductive particles having the cylindrical body are filled with the elastic insulating material, and thus the conductive particles can be coupled to adjacent conductive particles with the protrusions in a state of being integrated in the conductive portion, so that the conductive particles can be prevented from being removed from the conductive portion and the aligned state of the conductive particles can be maintained for a long time.

Drawings

Fig. 1 is a view schematically showing a related art test socket.

Fig. 2 is a perspective view illustrating a related art conductive particle used in the test socket of fig. 1.

Fig. 3 is a view schematically showing a test socket according to an embodiment.

Fig. 4 is a view illustrating an electrical test performed using the test socket of fig. 1.

Fig. 5 is a perspective view illustrating conductive particles used in the test socket of fig. 3.

Fig. 6 is a sectional view taken along VI-VI of fig. 5.

Fig. 7 is a view illustrating conductive particles coupled to each other according to an embodiment.

Fig. 8 is a view showing a conductive particle according to a second embodiment.

Fig. 9 is a view showing a conductive particle according to a third embodiment.

Fig. 10 is a view showing a conductive particle according to a fourth embodiment.

Fig. 11 is a view showing a conductive particle according to a fifth embodiment.

Fig. 12 is a view showing a conductive particle according to a sixth embodiment.

Fig. 13 is a view showing a conductive particle according to a seventh embodiment.

Fig. 14 is a view showing a conductive particle according to an eighth embodiment.

Detailed Description

The embodiments of the present disclosure are intended to illustrate the technical idea of the present disclosure. The scope of the present disclosure is not limited to the embodiments or the detailed description of the embodiments presented below.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. All terms used in the present disclosure are selected for the purpose of more clearly describing the present disclosure, and are not selected to limit the scope of the present disclosure.

Terms used in this disclosure such as "including", "comprising", or "having" should be understood as open-ended terms (open-ended terms) implying the possibility of including other embodiments, unless otherwise stated in the phrase or sentence in which the term is used.

As used herein, the singular forms may also include the plural forms and applies equally to the singular forms recited in the claims, unless otherwise specified.

Expressions such as "first" and "second" used in the present disclosure are used to distinguish various components, which do not limit the order or importance of the components.

It will be understood that when reference is made in this disclosure to one component being "coupled" or "connected" to another component, the component may be directly coupled or connected to the other component or any other component may be interposed between the two components.

In the present disclosure, a directional indicator such as "upper" is used to refer to the direction in which the test socket is positioned relative to the test device, and a directional indicator such as "lower" is used to refer to the relative direction. In the present disclosure, a directional indicator such as a term "vertical direction" covers an upward direction and a downward direction, and thus it should not be understood that only one of the upward direction and the downward direction is referred to.

Embodiments are described with reference to the drawings. In the drawings, like reference numerals refer to like parts. In the following description of the embodiments, overlapping description of similar components may be omitted. However, even when the description of such a component is omitted, it is not intended that the component is not included in any embodiment.

The embodiments described below and the examples shown in the figures relate to a test socket for electrically connecting two electronic components. In an application example of the test socket according to the embodiment, one of the two electronic components may be a detection device, and the other of the two electronic components may be a component to be tested, which is detected by the detection device. Thus, in an embodiment, during an electrical test for a component to be tested, a test socket may be used for an electrical connection between the test device and the component to be tested. For example, in an embodiment, the test socket may be used in the final electrical characteristics of the device to be tested in a post-fabrication process of the device to be tested manufacturing process. However, the example of the embodiment in which the test is performed using the test socket is not limited thereto.

According to an embodiment of the present invention, a test socket may be disposed between two electronic components to electrically connect the two electronic components to each other. As shown in fig. 3, one of the two electronic components may be a test device, and the other of the two electronic components may be a to-be-tested component tested by the test device. When the element to be tested is electrically tested, the test seat is respectively contacted with the detection device and the element to be tested, so that the element to be tested is electrically connected with the detection device.

The device to be tested may be a semiconductor package, but is not limited thereto. The semiconductor package may be a semiconductor element in which a semiconductor IC chip, a plurality of lead frames (lead frames), and a plurality of terminals are sealed in a hexahedral shape using a resin. The semiconductor IC chip can be a memory IC chip or a non-memory IC chip. The terminal may be a thimble, a solder ball (ball), or the like. The element to be tested shown in fig. 3 has a plurality of hemispherical terminals on its lower side.

The detection device can detect, for example, an electrical characteristic, a functional characteristic or an operating speed of the element to be tested. The detection device may include a plurality of terminals to output electrical test signals to the circuit board on which the test is performed and to receive answer signals via the terminals.

According to an embodiment of the present invention, the test socket 100 may include a conductive rubber sheet 110 and a frame 140 supporting the conductive rubber sheet 110 from the periphery of the conductive rubber sheet 110.

The terminals 151 of the device under test 150 are electrically connected to the corresponding terminals 161 of the test apparatus 160 via the test socket 100. The test socket 100 connects the terminals 151 of the component to be tested 150 to the corresponding terminals 161 of the inspection device 160 in the vertical direction, thereby inspecting the component to be tested 150 using the inspection device 160.

The conductive rubber sheet 110 of the test socket 100 includes a plurality of conductive portions 120 and an insulating portion 130 supporting the conductive portions 120 and insulating the conductive portions 120 from each other.

The conductive part 120 is disposed at a position corresponding to a terminal 151 of the device under test 150, and a plurality of conductive particles 121 are disposed and aligned in a vertical direction in an elastic insulating material. Since the conductive particles 121 contact each other at points, lines, or surfaces, the conductive part 120 has an electrically conductive state.

Preferably, the elastic insulating material constituting the conductive part 120 is a polymer material having a cross-linked structure. Various curable polymer-forming materials can be used to obtain such an elastic polymeric material, and silicone rubber is preferably used particularly in terms of formability and electrical properties.

Preferably, the silicone rubber is obtained by crosslinking or condensing a liquid silicone rubber. Preferably, the liquid silicone rubber is at 10^-1At a shear rate of 10 seconds⁵Viscosity below poise, and may be one of condensation-cured silicone rubber, addition-cured silicone rubber, and silicone rubber having a vinyl group or a hydroxyl group. Specifically, the liquid silicone rubber may be dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methyl phenyl vinyl silicone raw rubber, or the like.

Among them, the liquid silicone rubber having a vinyl group (polydimethylsiloxane having a vinyl group) is generally obtained by the following method: the fractional distillation is carried out by hydrolyzing and condensing dimethyldichlorosilane or dimethyldialkoxysilane in the presence of dimethylvinylchlorosilane or dimethylvinylalkoxysilane, for example, by repeating the dissolution-precipitation. In addition, a liquid silicone rubber having vinyl groups at both ends is obtained by the following method: cyclic siloxane such as octamethylcyclotetrasiloxane is subjected to anionic polymerization in the presence of a catalyst, dimethyl divinyl siloxane is used as a polymerization terminator, for example, and other reaction conditions (for example, the amount of cyclic siloxane and the amount of polymerization terminator) are appropriately selected. Here, as the catalyst for anionic polymerization, a base such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or a silicon alkoxide solution thereof can be used, and the reaction temperature for anionic polymerization is, for example, in the range of 80 ℃ to 130 ℃. Preferably, the molecular weight Mw of such polydimethylsiloxane having a vinyl group is 10000 to 40000 (refer to a weight average molecular weight as converted to polystyrene standards, the same hereinafter). In addition, in terms of heat resistance of the conductive path member, it is preferable that a molecular weight distribution index (a value of Mw/Mn, i.e., a ratio of a weight average molecular weight Mw in terms of polystyrene standards to a number average molecular weight Mn in terms of polystyrene standards, which is the same hereinafter) is 2 or less.

In addition, the liquid silicone rubber having hydroxyl groups (polydimethylsiloxane having hydroxyl groups) is generally obtained by the following method: the fractional distillation is carried out by hydrolysis and condensation of dimethyldichlorosilane or dimethyldialkoxysilane in the presence of dimethylvinylchlorosilane or dimethylhydroxyalkoxysilane, for example, by repeated successive dissolution-precipitation. In addition, the method can also be obtained by the following method: the cyclic siloxane is subjected to anionic polymerization in the presence of a catalyst, and as a polymerization terminator, for example, dimethylhydrochlorosilane, methyldihydrochlorosilane, or dimethylhydroalkoxysilane is used, and other reaction conditions (for example, the amount of the cyclic siloxane and the amount of the polymerization terminator) are appropriately selected. Here, as the catalyst for anionic polymerization, a base such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or a silicon alkoxide solution thereof can be used, and the reaction temperature for anionic polymerization is, for example, in the range of 80 ℃ to 130 ℃. Preferably, such polydimethylsiloxanes having vinyl groups have a molecular weight Mw of 10000 to 40000. In addition, in terms of heat resistance of the conductive portion 120, the molecular weight distribution index is preferably 2 or less. In the present invention, either one or both of the polydimethylsiloxane having a vinyl group and the polydimethylsiloxane having a hydroxyl group can be used.

The plurality of conductive particles 121 provided in the elastic insulating material of the conductive part 120 described above are aligned in the vertical direction and form a conductive path while maintaining a contact state in the vertical direction. Since the conductive particles 121 are contained in an elastic insulating material such as silicone rubber, the contact area between the conductive particles 121 increases with the application of pressure, thereby increasing the electrical conductivity of the conductive particles 121.

The conductive particles 121 include a cylindrical body 122 and a protrusion 123.

The cylindrical body 122 forming the overall shape of the conductive particle 121 is long in one direction, has open upper and lower ends, and has a through space formed therein. The cylindrical body 122 is preferably cylindrical in shape, but is not limited thereto, and may have a triangular shape, a rectangular shape, or a polygonal shape.

Since the conductive particles 121 have a cylindrical shape as a whole and are filled with the elastic insulating material inside, the coupling strength between the conductive particles 121 and the elastic insulating material may be extremely high in the conductive portion 120. In particular, the conductive particles 121 are long in one direction, and the length in the direction is greater than the width of the upper and lower portions of the conductive particles 121, so that the conductive particles 121 have a large contact area with the elastic insulating material, further preventing the conductive particles 121 from being separated from the elastic insulating material.

These cylindrical bodies 122 are formed of a thin metal sheet material and can be filled with a large amount of elastic insulating material inside.

The cylindrical body 122 has a shape having a vertical length greater than a width of upper and lower ends thereof so that the cylindrical body 122 can be easily oriented by a magnetic field, and the cylindrical body 122 preferably uses a magnetic material so that it can be easily oriented in a vertical direction by a magnetic field. In order to enable the cylindrical body 122 to be easily erected and aligned by a magnetic field, the cylindrical body 122 may be made with a metal sheet having magnetism such as iron, cobalt, or nickel, or a sheet made of an alloy thereof, or a sheet containing such a metal, or these materials as a base, and a metal having high conductivity such as gold, silver, palladium, or rhodium is plated on the surface of the above base; or using non-magnetic metal sheet as substrate, electroplating conductive magnet such as nickel and cobalt on the surface of the non-magnetic metal sheet; or plating a conductive magnet and a metal having high conductivity on a metal foil. Among them, it is preferably made using a nickel-based substrate, on the surface of which a metal such as gold, silver, rhodium, palladium, ruthenium, tungsten, molybdenum, platinum, or iridium is plated, and it is preferably made using a nickel sheet coated with a plurality of different metals (e.g., particles plated with gold on the surface of the plated silver, etc.).

The method of coating the conductive metal on the surface of the thin metal sheet is not particularly limited, and for example, electroless plating, electrolytic plating, or the like can be used.

The protruding portion 123 protrudes in one direction from the distal end portion of the tubular main body 122. Specifically, the protrusion 123 may include: a first protrusion 1231 extending upward from an upper end of the cylindrical body 122; and a second protrusion 1232 extending downward from the lower end of the cylindrical body 122. The first protrusion 1231 is formed along an upper end edge of the cylindrical body 122 and protrudes upward. The first protrusion 1231 is made of a metallic sheet material and may have the same thickness as the cylindrical body 122 described above.

The first protrusion 1231 may be bent to have the same center of curvature as the cylindrical body 122. Specifically, the first protrusion 1231 may be bent to have the same curvature and center of curvature (central axis) as the cylindrical body 122 formed of a sheet. Therefore, the protruding portion is not easily deformed even if an axial load is applied, and can maintain an original shape with a small thickness.

The first projecting portion 1231 has a sharp-pointed shape and a triangular shape whose width is gradually reduced along the tip end side of the tubular body 122.

The second protrusion 1232 may be bent to have the same curvature center as the cylindrical body 122. Specifically, the second protrusion 1232 may be bent to have the same curvature and center of curvature (central axis) as the cylindrical body 122 formed of a sheet. Therefore, the protruding portion is not easily deformed even if an axial load is applied, and can maintain an original shape with a small thickness.

The second projecting portion 1232 has a shape with a sharp tip and a triangular shape with a width gradually decreasing along the tip side of the tubular body 122.

The protruding portion 123 of the conductive particle 121 has a size that can be inserted into the penetrating space of the cylindrical body 122 of the other conductive particle 121, and therefore even if the conductive portion 120 is compressed during the inspection, the protruding portion 123 of the conductive particle 121 gets stuck on the other conductive particle 121 and cannot be separated from the other conductive particle 121. The maximum cross-sectional area of the protrusion 123 is smaller than the upper end opening and the lower end opening of the cylindrical body 122 so that the protrusion 123 can be inserted through the opening between the upper end and the lower end.

Therefore, in a state where the conductive particle 121 is vertically aligned and the upper end of the conductive particle 121 is coupled with the lower end of another conductive particle 121, or the lower end of the conductive particle 121 is coupled with the upper end of another conductive particle 121, even if the conductive part 120 is pressed and compressed by the element to be tested 150, the protrusion 123 may be caught on the cylindrical body 122 or the protrusion 123 of another conductive particle 121 and may not be separated from another conductive particle 121, thereby preventing the vertical alignment of the conductive particle 121 from being broken.

In addition, since the protrusion 123 has a sharp shape, a high contact pressure can be obtained when the protrusion 123 is brought into contact with the terminal 151 of the element to be tested 150, whereby an oxide layer formed on the terminal 151 can be easily removed and a reduction in electrical contact performance can be prevented.

The insulating portion 130 is disposed around the conductive portions 120 to support the conductive portions 120 and insulate the conductive portions 120 from each other. The insulating portion 130 is formed as an elastic body and has elasticity in the vertical direction and the horizontal direction. The insulating part 130 maintains the shape of the conductive part 120 and maintains the conductive part 120 in the vertical direction.

The insulating part 130 includes an elastic insulating material. In this case, the insulating part 130 may be formed by curing a liquid insulating material. For example, after a liquid elastic insulating material in which the conductive particles 121 are dispersed is injected into a mold for forming the conductive rubber sheet 110, the conductive particles 121 are vertically aligned at positions corresponding to the conductive parts 120 by a magnetic field to form the conductive parts 120, and then the liquid elastic insulating material is cured to form the insulating parts 130. In another example, a liquid insulating material containing no conductive particles 121 is cured and molded, penetrating holes are formed in a material having the shape of the conductive rubber sheet 110 at positions corresponding to the conductive portions 120, the penetrating holes are filled with a liquid elastic insulating material in which conductive metal particles are dispersed, and the conductive metal particles filled in the penetrating holes are vertically aligned by magnetic force to form the conductive portions 120.

The test socket 100 of the present invention has the following effects.

First, according to an embodiment of the present invention, the test socket 100 is mounted on the inspection device 160 such that the conductive portions 120 are in contact with the terminals 161 of the inspection device 160, respectively.

At this time, as shown in fig. 3 and 7, the plurality of conductive particles 121 are vertically aligned to the conductive part 120, and the protrusion 123 of the conductive particle 121 is inserted into the opening of another conductive particle 121.

Subsequently, as shown in fig. 4, the terminal 151 of the element to be tested 150 presses the conductive part 120, bringing the conductive particle 121 into close contact with another conductive particle 121, and putting the conductive part 120 in a conductive state. In particular, even if the conductive part 120 expands in a horizontal direction perpendicular to the vertical direction when the conductive part 120 is pressed, the conductive particle 121 is inserted into another conductive particle 121 to maintain a coupled state without breaking the vertical alignment of the conductive particle 121, and in addition, the conductive particle 121 is prevented from being removed from the conductive part 120.

Subsequently, when the pressing force applied by the terminal 151 of the element to be tested 150 is released, the conductive part 120 returns to its original state, and the conductive particles 121 also return to their original positions.

According to the embodiment of the present invention, in a state where the elastic insulating material is filled in the cylindrical body 122 of the conductive particle 121, the conductive particle 121 is combined with the elastic insulating material disposed around the conductive particle 121, and thus even if the conductive part 120 is pressed, the conductive particle 121 can be prevented from being removed from the conductive part 120.

In addition, the cylindrical body 122 of the conductive particle 121 stands up due to the magnetic field, and since the protrusion 123 of the conductive particle 121 is inserted into the other conductive particle 121, the conductive particle 121 is stuck on the other conductive particle 121 even if the conductive part 120 is pressed, thereby preventing separation from the other conductive particle 121.

In addition, since the protrusion 123 of the conductive particle 121 has a sharp triangular shape and is bent around the central axis of the conductive particle 121, the protrusion 123 may easily remove foreign substances attached to the element 150 to be tested, and may prevent the protrusion 123 from being broken during frequent inspection. In addition, since the protrusion 123 has a triangular shape, when the depth of contact increases, the area of contact increases, and thus the pressure of contact can be reduced.

Although the test socket has been described according to the embodiments, the test socket is not limited to the embodiments and may be modified as follows.

First, in the above-described embodiment, the protrusion 123 of the conductive particle 121 has a triangular shape whose width decreases in a direction toward the end of the cylindrical body 122, but the test socket is not limited thereto.

For example, a protrusion 223 having the shape shown in fig. 8 may be provided. In this case, the protrusion 223 may include: a first portion 223a having a constant width from the cylindrical body 222; and a second portion 223b having a width reduced from the above-mentioned first portion 223a to an end thereof.

According to the protrusion 223 shown in fig. 8, when the first portion 223a is inserted into the foreign matter formed on the terminal 151 after the second portion 223a is inserted into the foreign matter formed on the terminal 151, the contact pressure can be prevented from being reduced.

In addition, a protrusion 323 having a shape shown in fig. 9 may be provided. In this case, the protrusion 323 may include: a third portion 323a having a width reduced from the cylindrical body 322; a fourth portion 323b having an increased width from the third portion 323 a; and a fifth portion 323c having a width reduced from the fourth portion 323b to the end thereof.

Even if the contact depth of the protrusion 323 shown in fig. 9 is increased, the contact pressure may not be reduced at the third portion 323a and the fourth portion 323 b.

Fig. 10 shows that a communicating hole 422a is formed in the cylindrical main body 422 of the conductive particle 121 shown in fig. 5.

Specifically, the cylindrical body 422 includes a communication hole 422a penetrating the outer and inner surfaces of the cylindrical body 422, and the elastic insulating material may be filled in the communication hole 422 a. Since these communication holes 422a integrally connect the elastic insulating material filled in the penetrating space of the cylindrical main body 422 to the elastic insulating material filling the communication holes 422a, the separation of the conductive particles 421 can be more reliably prevented.

In particular, the conductive particles 421 are connected to the elastic insulating material disposed around the conductive particles 421 in the vertical direction, and at the same time, the conductive particles 421 are integrally connected to the elastic insulating material disposed on the lateral surface of the cylindrical body 522, so that the movement of the conductive particles 421 in the vertical and horizontal directions can be maximally suppressed.

Accordingly, the conductive particles 421 may maintain the alignment state in the vertical direction by the protrusions 423, and may more reliably remove foreign substances formed on the terminals of the elements to be tested.

Fig. 11 shows conductive particles 521 having communication holes 522a formed in the outer and inner surfaces of a cylindrical main body 522. In this case, the protrusions may not be formed on the upper and lower ends of the cylindrical body 522. Since these conductive particles 521 shown in fig. 11 integrally connect the elastic insulating material filled in the penetrating space of the cylindrical main body 522 to the elastic insulating material filling the communicating hole 522a, separation of the conductive particles 521 can be more reliably prevented.

Fig. 12 shows that a cut-out portion 622b is also formed at one side of the cylindrical body 622 of the conductive particle 621 shown in fig. 5.

Specifically, in a state where the protruding portions 623 are formed at the upper and lower ends of the cylindrical body 622, the cut portions 622b that cut the upper and lower ends of the cylindrical body 622 may be formed at one side of the cylindrical body 622.

Such a cut-out portion 622b can increase the integration between the conductive particles 621 and the elastic insulating material disposed around the conductive particles 621, and can flexibly absorb the pressing force applied by the terminal since the width of the cut-out portion 622b can be expanded or reduced. That is, the conductive particle 621 of fig. 12 additionally including the cut-out portion is not separated from another conductive particle 621 during the terminal pressing process, and the elasticity imparted thereto may further improve the electrical connection capability.

Fig. 13 shows that a cut portion 722b is also formed at one side of the cylindrical body 722 of the conductive particle shown in fig. 10.

Specifically, in a state where the protrusions 723 are formed at the upper and lower ends of the cylindrical body 722 and the communication hole 722a is formed in the side surface of the cylindrical body 722, the cut-out portions 722b may be formed on one side of the cylindrical body 722 to cut the upper and lower ends of the cylindrical body 722.

This cut-out portion 722b may pass through one of the communication holes 722 a. With the additional formation of the cut portion in the conductive particle shown in fig. 10, not only is the conductive particle prevented from being detached during pressing, but also elasticity is imparted, so that the electrical connection ability and fixability of the conductive particle can be improved.

Fig. 14 shows that a cut 822b is also formed on one side of the cylindrical body 822 of the conductive particle 821 shown in fig. 110.

Specifically, in the case where the communication holes 822a are formed at the upper and lower ends of the center of the cylindrical body 822, the cut-out portions 822b are formed at one side to not only prevent the conductive particles from being detached during the pressing process but also impart elasticity thereto, so that the electrical connection ability and the fixing property of the conductive particles can be improved.

In the above-described embodiment, the plurality of protrusions are formed at the upper and lower ends of the cylindrical body, but the present invention is not limited thereto. The protruding portion may be formed on any one of the upper end and the lower end of the tubular body, and a plurality of protruding portions are not required, and only one protruding portion may be formed on the distal end portion of the tubular body.

In the above-described embodiment, the communication hole is formed in the cylindrical body, but the present invention is not limited thereto. A recess may be concavely formed in at least one of an outer surface and an inner surface of the cylindrical body, and the elastic insulating material may be filled in the recess.

Although the technical idea of the present disclosure has been described with reference to some embodiments and examples shown in the drawings, those having ordinary skill in the art to which the present disclosure pertains will appreciate that various substitutions, modifications, and changes may be made without departing from the spirit and scope of the present disclosure. Also, such alternatives, modifications, and variations are considered to be included in the appended claims.

Claims

1. A test socket disposed between a device to be tested and a test apparatus for electrically connecting terminals of the device to be tested to terminals of the test apparatus, the test socket comprising:

a plurality of conductive portions provided at positions corresponding to the terminals of the element to be tested, a plurality of conductive particles being arranged in a vertical direction and aligned in an elastic insulating material to exhibit conductivity in the vertical direction; and

an insulating portion arranged around the conductive portions to support the conductive portions and insulate the conductive portions from each other,

wherein each of the conductive particles includes:

wherein the protruding portion of the conductive particle has a size that can be inserted into the penetrating space of the cylindrical body of another conductive particle, so that the protruding portion of the conductive particle is caught on another conductive particle and is not separated from the other conductive particle when the conductive portion is compressed in a test process.

2. The test socket of claim 1, wherein the protrusions protrude from upper and lower ends of the cylindrical body along edges of the upper and lower ends of the cylindrical body.

3. The test socket of claim 1, wherein the cylindrical body is made of a metallic sheet material.

4. The test socket of claim 1, wherein the protrusion is made of a metallic sheet material and is bent to have the same center of curvature as the cylindrical body.

5. A test socket according to claim 3 or claim 4, wherein the cylindrical body and the projections are made from sheet material of the same thickness.

6. The test socket of claim 1, wherein the tips of the projections are sharp in shape.

7. The test socket of claim 6, wherein the protrusion has a triangular shape with a width gradually decreasing from the cylindrical body toward the tip.

8. The test socket of claim 6, wherein the protrusion comprises:

a first portion having a constant width from the cylindrical body; and

a second portion having a decreasing width from the first portion to the end.

9. The test socket of claim 6, wherein the protrusion comprises:

a third portion having a reduced width from the cylindrical body;

a fourth portion having a width that increases from the third portion, an

A fifth portion having a decreasing width from the fourth portion to the end.

10. The test socket of claim 1,

the maximum cross-sectional area of the protrusion is smaller than the opening area of the cylindrical body.

11. The test socket of claim 1, wherein the cylindrical body is formed with a penetration hole penetrating through an outer side surface and an inner side surface, and the penetration hole is filled with the elastic insulating material.

12. The test socket of claim 1, wherein a recessed recess is formed in at least one of the outer and inner side surfaces of the cylindrical body, and the recess is filled with the elastic insulating material.

13. The test socket according to any one of claims 1, 11 and 12, wherein a cut portion extending in a vertical direction is formed at one side of the cylindrical body.

14. The test socket of claim 11, wherein the cutaway portion extends from the upper end to the lower end of the cylindrical body.

15. The test socket of claim 1, wherein the resilient insulating material comprises silicone rubber.

16. A test socket disposed between a device to be tested and a test apparatus for electrically connecting terminals of the device to be tested to terminals of the test apparatus, the test socket comprising:

wherein the conductive particles include:

a communication hole passing through an inner side surface and an outer side surface of the cylindrical main body,

wherein the communication hole is filled with the elastic insulating material.

17. The test socket according to claim 16, wherein the communication holes are provided in plurality at intervals along a circumferential direction of the cylindrical main body.

18. The test socket of claim 16, wherein a cut-out portion cut-out from the upper end to the lower end of the cylindrical body is provided at one side of the cylindrical body.

19. The test socket of claim 18, wherein the cut-out passes through one of the communication holes.

20. The test socket of claim 16, wherein a protrusion is formed on at least one of the upper end and the lower end of the cylindrical body.

21. A test socket disposed between a device to be tested and a test apparatus for electrically connecting terminals of the device to be tested to terminals of the test apparatus, the test socket comprising:

wherein the conductive particles include:

a recess formed at an inner side surface or an outer side surface of the cylindrical body,

wherein the recess is filled with the resilient insulating material.