CN114325325B - Apparatus for testing integrated circuit products - Google Patents
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- CN114325325B CN114325325B CN202111636878.0A CN202111636878A CN114325325B CN 114325325 B CN114325325 B CN 114325325B CN 202111636878 A CN202111636878 A CN 202111636878A CN 114325325 B CN114325325 B CN 114325325B
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Abstract
The present disclosure relates to an apparatus for testing integrated circuit products. An apparatus for testing an integrated circuit product according to an embodiment of the present application may include an input port and a motion member. The moving member may be connected with the input port. The moving member may include a first portion; and a second portion connected to the first portion, the first portion configured to move the second portion, and the second portion configured to rotate relative to the first portion. The device for testing the integrated circuit products can realize automatic alignment of the machine table of the gravity inclined back type sorting machine and the testing head of the testing machine, so that the production efficiency is improved, and damage to the testing device is avoided.
Description
Technical Field
The present application relates to the field of integrated circuit technology, and in particular, to an apparatus for testing integrated circuit products.
Background
In the manufacture of integrated circuit products, it is necessary to test the manufactured integrated circuit products. Typically, test machines and gravity inclined back sorters are used to screen out integrated circuit products having structural defects or unsatisfactory performance. The machine table of the gravity inclined back type sorting machine and the horizontal surface have a certain inclination angle, firstly, the testing head of the testing machine is required to be adjusted to be parallel to the machine table of the gravity inclined back type sorting machine, and then the male head of the adapter plate on the machine table of the gravity inclined back type sorting machine is aligned with the female head of the load plate on the testing machine, so that the male head is inserted into the female head for subsequent testing.
However, the prior art can only accomplish the above actions by manual means, which has a number of drawbacks. In one aspect, the weight of the test head is about 100KG, and the weight of the machine table of the gravity inclined back type sorting machine is about 200KG, so that the manual mode is used for moving the test head and the machine table of the gravity inclined back type sorting machine, and the time and the labor are wasted. On the other hand, the test head and the machine table of the gravity inclined back type sorting machine are adjusted by means of manual experience, so that the test head and the machine table are difficult to be accurately parallel, and the efficiency is low. The female head of the load board on the testing machine is usually made of plastic materials, and in the process of aligning the male head of the adapter board on the machine table of the gravity inclined back type sorting machine with the female head of the load board of the testing machine, the female head is difficult to align smoothly due to the fact that only the female head is limited, so that the female head is easy to be inserted and split in the aligning process. Moreover, once the contact angle between the machine table of the gravity inclined back type sorting machine and the testing head of the testing machine is deviated, the connection between the male head and the female head can be loosened easily, and the electrical connection is unstable. Moreover, if the force of manually moving the tester or the gravity inclined back type separator is too large, the pins of the test head are not in good contact with the load board, the pins are sinking, and the subsequent maintenance is difficult. Moreover, the requirements of part of integrated circuit products on the contact of the male head and the female head are very high, the alignment is realized only by means of manpower, and the production efficiency is low.
Thus, there is a need in the art for an apparatus for testing integrated circuit products that overcomes the above-described problems.
Disclosure of Invention
The application provides a device for testing integrated circuit products, which realizes automatic alignment of a machine table of a gravity inclined back type sorting machine and a testing head of a testing machine and improves production efficiency.
An embodiment of the present application provides a device for testing an integrated circuit product, comprising: an input port; and a moving member connected with the input port, the moving member comprising: a first portion; and a second portion connected to the first portion, the first portion configured to move the second portion, and the second portion configured to rotate relative to the first portion.
In another embodiment of the application, the first portion is configured to move the second portion in a first direction of the means for testing integrated circuit products and/or in a second direction of the means for testing integrated circuit products, the first direction being perpendicular to the second direction.
In yet another embodiment of the present application, the first portion includes a first arm and a second arm disposed opposite the first arm, each of the first arm and the second arm includes a first transmission element configured to be connected to the second portion to move the second portion, and the first transmission element is configured to move in the first arm and the second arm.
In another embodiment of the application, the first transmission element is a plate-like element.
In a further embodiment of the application, the first arm comprises a second transmission element configured to be connected to the first motor and provided with a first slider configured to move on the second transmission element under the drive of the first motor.
In another embodiment of the application, the second transmission element is a screw.
In yet another embodiment of the present application, the first arm includes a second slider configured to be connected to the first transmission element, and the second slider is configured to move under the drive of the first slider.
In another embodiment of the application, the second slider is configured to be disposed on a first track within the first arm, or the second slider is configured to be disposed on a first track within the first arm and on a second track within the first arm.
In yet another embodiment of the present application, the second arm includes a third slider configured to connect to the first transmission element.
In another embodiment of the application, the third slider is configured to be disposed on a third track within the second arm, or the third slider is configured to be disposed on a third track within the second arm and on a fourth track within the second arm.
In yet another embodiment of the present application, the first portion further comprises a third arm connecting the first arm and the second arm.
In another embodiment of the application, the means for testing the integrated circuit product is further connected to the second portion and is configured to rotate the second portion relative to the first portion, the angle adjustment means comprising: a second motor; and a third transmission element connected to the second motor and the second part and configured to rotate the second part under the drive of the second motor.
In a further embodiment of the application, the angle adjustment member further comprises a braking element configured to fix the third transmission element after rotation of the third transmission element is completed.
In another embodiment of the application, the angle adjustment member further comprises a power element configured to be connected to the braking element.
In yet another embodiment of the present application, the power element is a cylinder.
In another embodiment of the application, the braking element is configured to release the third transmission element when the power element is in the extended state, and is configured to fix the third transmission element when the power element is in the retracted state.
In a further embodiment of the application, the angle adjustment member further comprises a support element connected to the third transmission element.
In another embodiment of the application, the second part comprises a first bearing surface provided with a first test interface and a positioning element surrounding the first test interface.
In yet another embodiment of the present application, the input port is configured to control movement of the moving member.
In another embodiment of the present application, the means for testing the integrated circuit product further comprises a third portion configured to move the first portion along a direction of the means for testing the integrated circuit product.
The device for testing the integrated circuit products provided by the embodiment of the application can realize automatic alignment of the machine table of the gravity inclined back type sorting machine and the testing head of the testing machine, thereby not only improving the production efficiency, but also avoiding damage to the testing device.
Drawings
FIG. 1 is a schematic diagram of an apparatus and gravity-fed diagonal back sorters for testing integrated circuit products in accordance with one embodiment of the present application
FIG. 2 is a schematic view of a portion of a moving member of the apparatus for testing integrated circuit products shown in FIG. 1
FIG. 3 is a schematic view of a second portion of the angular adjustment member and the motion member of the apparatus for testing integrated circuit products shown in FIG. 1
FIG. 4 is a schematic view of a second portion of a moving member and a portion of a gravity-inclined-back classifier of the apparatus for testing integrated circuit products shown in FIG. 1
Detailed Description
Embodiments of the present application will be described in detail below. Throughout the present specification, the same or similar components and components having the same or similar functions are denoted by similar reference numerals. The embodiments described herein with respect to the drawings are of illustrative nature, of diagrammatic nature and are provided for the basic understanding of the present application. The examples of the present application should not be construed as limiting the application.
As used herein, the terms "about," "substantially" are used to describe and illustrate minor variations. When used in connection with an event or situation, the term may refer to instances in which the event or situation occurs precisely and instances in which the event or situation occurs very nearly. For example, when used in reference to a bonding value, the term may refer to a range of variation of less than or equal to ±10% of the value, such as less than or equal to ±5%, less than or equal to ±0.5%, or less than or equal to ±0.05%. For example, two values may be considered "substantially" identical if the difference between the two values is less than or equal to ±10% of the average of the values.
Moreover, for ease of description, "first," "second," "third," etc. may be used herein to distinguish between different components of a figure or series of figures. The terms "first," "second," "third," and the like are not intended to describe corresponding components.
In the present application, unless specified or limited otherwise, the terms "disposed," "connected," "coupled," "secured," and the like are used broadly and will be understood by those skilled in the art to be connected, such as fixedly, detachably, or integrally, in accordance with the particular circumstances; it may also be a mechanical or electrical connection; it may also be a direct connection or an indirect connection through intervening structures; but also internal communication of the two components.
For a better understanding of the spirit of the application, a further description is provided below in connection with some preferred embodiments of the application.
Fig. 1 is a schematic diagram of an apparatus 100 for testing integrated circuit products and a gravity-sloped back classifier 20 according to an embodiment of the present application. Fig. 2 is a schematic diagram of a portion of the moving member 30 of the apparatus 100 for testing integrated circuit products shown in fig. 1. Fig. 3 is a schematic view of the angular adjustment member 305 and the second portion 303 of the moving member 30 of the apparatus 100 for testing integrated circuit products shown in fig. 1. Fig. 4 is a schematic view of a second portion 303 of the moving member 30 and a portion of the gravity-inclined-back sorter 20 of the apparatus 100 for testing integrated circuit products shown in fig. 1.
As shown in fig. 1-4, the apparatus 100 for testing integrated circuit products may have an input port 10 and a moving member 30. The device 100 for testing integrated circuit products may have a length extending in an X-direction (i.e., a first direction), a height extending in a Y-direction (i.e., a second direction), and a thickness extending in a direction perpendicular to a plane in which X-Y lies. The first direction is perpendicular to the second direction.
The input port 10 may be configured to control movement of the moving member 30. An operator may adjust the apparatus 100 for testing integrated circuit products to a proper position for engagement with the gravity-inclined-back sorter 20 by manipulating the input port 10 to move the first portion 301 of the moving member 30 in at least one of the first direction and the second direction, thereby causing movement of the second portion 303 of the moving member 30 in the X-direction and movement in the Y-direction. Specifically, in one embodiment, an operator may move the first portion 301 of the moving member 30 in a first direction by manipulating the input port 10, thereby causing the second portion 303 of the moving member 30 to move in the X direction. In another embodiment, the operator can move the first portion 301 of the moving member 30 in the first direction and the second direction by operating the input port 10, thereby driving the second portion 303 of the moving member 30 to move in the X direction and the Y direction. In yet another embodiment, an operator may move the first portion 301 of the moving member 30 in the second direction by manipulating the input port 10, thereby causing the second portion 303 of the moving member 30 to move in the Y direction. An operator may adjust the second portion 303 of the apparatus 100 for testing integrated circuit products to an angle parallel to the gravity-inclined-back classifier 20 by manipulating the input port 10 such that the second portion 303 of the moving member 30 rotates relative to the first portion 301. For example, when the tilt angle between the gravity-inclined-back classifier 20 and the horizontal plane is about 60 degrees, the first bearing surface 3031 on the second portion 303 that interfaces with the gravity-inclined-back classifier 20 may be adjusted by the input port 10 to a tilt angle with the horizontal plane of about 60 degrees. After the second section 303 is adjusted parallel to the gravity-inclined-back classifier 20, the operator may fine tune the position of the second section 303 by operating the input port 10 to insert the second test interface 201 on the gravity-inclined-back classifier 20 into the first test interface 3031b on the load board 3031a of the second section 303. The input port 10 may include a human-machine touch screen and a split screen teach pendant. The operator can perform position control and angle adjustment of the moving member 30 by touching the man-machine touch screen. The split screen demonstrator can be connected with a man-machine touch screen. An operator may carry a split screen teach pendant to be able to manipulate the moving member 30 at any location. The input port 10 may comprise an integrated electrical cabinet comprising circuit arrangements for controlling the apparatus 100 for testing integrated circuit products.
The moving member 30 may be connected with the input port 10. The motion member 30 may include a first portion 301 and a second portion 303.
The first portion 301 may be configured to move the second portion 303 along at least one of a first direction and a second direction of the device 100 for testing integrated circuit products. The first portion 301 may be configured to be connected to a third portion 307 of the device 100 for testing integrated circuit products. The third portion 307 may be configured to connect to the input port 10. The third portion 307 may be configured to move in the Y direction of the device for testing integrated circuit products 10, thereby bringing the first portion 301 to move in the Y direction of the device for testing integrated circuit products 10 to adjust the heights of the first portion 301 and the second portion 303. The third portion 307 may be configured to rotate the first portion 301 about the X-axis to adjust the angle between the first portion 301 and the horizontal plane. The first portion 301 may include a first arm 3011, a second arm 3013, and a third arm 3015. The first arm 3011 and the second arm 3013 may be disposed opposite.
The first arm 3011 may include a first transmission element 301a configured to connect to the second portion 303 to move the second portion 303. The first transmission element 301a may be configured to move in the first arm 3011. The first transmission element 301a may be a plate-like element, or an element of any suitable shape. When the first transmission element 301a moves along the positive X direction, the first transmission element 301a drives the second portion 303 to move along the positive X direction, so as to drive the second portion 303 to move, thereby shortening the distance between the second portion 303 and the gravity inclined back type classifier 20 in the X direction. When the first transmission element 301a moves along the negative X direction, the first transmission element 301a drives the second portion 303 to move along the negative X direction, so as to drive the second portion 303 to move, so as to increase the distance between the second portion 303 and the gravity inclined back type classifier 20 in the X direction.
The first arm 3011 may include a second transmission element 3011a. The second transmission element 3011a may be a lead screw. The lead screw can facilitate high-precision automatic adjustment control. In other embodiments of the application, the second transmission element 3011a may be any suitable transmission-enabled element. The second transmission element 3011a may be configured to connect to the first motor 3011b. The second transmission element 3011a may be provided with a first slider 3011a'. The first slider 3011a' may be configured to move on the second transmission element 3011a under the drive of the first motor 3011b. The first motor 3011b may be controlled to rotate via the input port 10. The first motor 3011b can drive the second transmission element 3011a to rotate in a counterclockwise direction or a clockwise direction, so that the second transmission element 3011a rotates to drive the first slider 3011a' to move in a positive X direction or a negative X direction.
The first arm 3011 may include a second slider 3011c configured to connect to the first transmission element 301a. The second slider 3011c may be configured to move under the influence of the first slider 3011a'. The second slider 3011c may be configured to be disposed on a first track 3011d within the first arm 3011 and on a second track 3011e located within the first arm 3011. In other embodiments of the present application, the second slider 3011c may be configured to be disposed on either the first track 3011d within the first arm 3011 and the second track 3011e within the first arm 3011. When the first slider 3011a' moves, it moves the second slider 3011c on at least one of the first track 3011d and the second track 3011e, the second slider 3011c further moves the first transmission element 301a in the first arm 3011. The position and number of the second sliders 3011c may be set according to specific needs.
The second arm 3013 may include a first transmission element 301a configured to connect to the second portion 303 to move the second portion 303. The first transmission element 301a may be configured to move in the second arm 3013. The second arm 3013 may include a third slider 3013a configured to connect to the first transmission element 301a. The third slider 3013a may be configured to be disposed on a third track 3013b within the second arm 3013 and on a fourth track 3013c located within the second arm 3013. In other embodiments of the present application, the third slider 3013a may be configured to be disposed on either of the third track 3013b within the second arm 3013 and the fourth track 3013c within the second arm 3013. The position and number of the third sliders 3013a may be set according to specific needs. The third arm 3015 may connect the first arm 3011 and the second arm 3013, which is located between the first arm 3011 and the second arm 3013. As the first transmission element 301a moves in the first arm 3011, the first transmission element 301a within the second arm 3013 also moves in the second arm 3013 accordingly. In other embodiments of the application, the second arm 3013 may be made to have exactly the same arrangement as the first arm 3011. In the embodiment of the application, the first transmission element 301a is adopted in one of the first arm 3011 and the second arm 3013, the first arm 3011 and the second arm 3013 are provided with a guide rail and a sliding block positioned on the guide rail, and the first transmission element 301a is connected to the first motor 3011b, so that the first motor 3011b is automatically controlled by operating the input port 10 to drive the first transmission element 301a to drive, and the first transmission element 301a drives the second part 303 to move, so that the movement of the second part 303 in the X direction is automatically controlled. Meanwhile, high-precision position control of movement in the X direction can be realized by adopting a servo screw rod mechanism.
The second portion 303 may be connected to the first portion 301. The first portion 301 may be configured to move the second portion 303. The second portion 303 may be configured to rotate relative to the first portion 301. The second portion 303 may include a first bearing surface 3031. The first bearing surface 3031 may be provided with a load plate 3031a. The load board 3031a may be provided with a first test interface 3031b and a positioning element 3031b surrounding the first test interface 3031b. The first test interface 3031b may house a second test interface 201 of the gravity diagonal back classifier 20. The first test interface 3031b may be a female. The second test interface 201 may be a male. The positioning element 3031b may be disposed on a mount of the second portion 303. The positioning element 3031b may mate with the positioning element 203 of the gravity chute-back classifier 20. The positioning element 203 may be located on the floor of the gravity inclined-back classifier 20. One of the positioning element 3031b and the positioning element 203 may be a positioning pin, and the other may be a positioning sleeve. The positioning sleeve can be a high-precision self-lubricating positioning sleeve, can guide the insertion of the test interface, prevents the insertion deviation and protects the test interface. The locating pin can be a ball head self-lubricating wear-resistant locating pin which is matched with the locating sleeve to assist in locating so as to guide the insertion of the test interface, prevent the insertion deviation and avoid the first test interface 3031b from being damaged in the butt joint process. Thus, when an operator controls the second portion 303 to move to a proper position to mate with the gravity-inclined-back classifier 20 through the split-screen-type education, the first test interface 3031b of the load board 3031a is prevented from being damaged by the positioning member 3031b being limited by the positioning member 3031b. Meanwhile, the accurate butt joint of the first test interface 3031b and the second test interface 201 is realized through the limit of the positioning element 3031b and the positioning element 3031b, so that poor contact between the test interfaces is avoided.
The apparatus 100 for testing integrated circuit products may also have an angle adjustment member 305. The angle adjustment member 305 may be connected to the second portion 303 and configured to rotate the second portion 303 relative to the first portion 301. The angle adjustment member 305 may include a second motor 3051, a third transmission element 3053, a braking element 3055, a power element 3057, and a support element 3059.
The second motor 3051 may be configured to be controlled by the input port 10. The second motor 3051 may be fixed to the support member 3059. The second motor 3051 rotates the third transmission member 3053 by rotation, thereby adjusting the rotation angle of the second portion 303. The third transmission element 3053 may be connected to the second motor 3051 and the second member 303, and configured to rotate the second member 303 under the drive of the second motor 3051. The third transmission element 3053 may be a bearing. The embodiment of the application is convenient for high-precision automatic control and adjustment by adopting the servo deceleration direct connection mechanism. The brake element 3055 may be fixed to the power element 3057. The brake element 3055 may be configured to fix the third transmission element 3053 after the end of rotation of the third transmission element 3053 to lock the third transmission element 3053, thereby preventing the angle from naturally shifting. The brake element 3055 may be configured to release the third transmission element 3053 when the power element 3057 is in an extended state such that the third transmission element 3053 rotates the second component 303, and to secure the third transmission element 3053 when the power element 3057 is in a retracted state to prevent natural deflection of the third transmission element 3053 from rotating the second component 303. The power element 3057 may be configured to connect to the braking element 3055. The power element 3057 may be a cylinder. The power element 3057 may be secured to the bracket of the second component 303 by a support bracket. The brake element 3055 may be secured to a thimble of the power element 3057. The support member 3059 may be connected to the third transmission member 3053. The third transmission element 3053 may be received within the support element 3059. The support member 3059 may be fixed to the first transmission member 301a. According to the embodiment of the application, the angle adjusting member 305 is arranged, so that the second component 303 can realize high-precision angle rotation under the automatic control of the input port 10, and the brake element 3055 is arranged to prevent the angle after the rotation is finished from naturally shifting, so that the angle of the second part 303 of the device 100 for testing the integrated circuit products, which is parallel to the gravity inclined back type sorting machine 20, is ensured, and the first test interface 3031b can be completely contacted with the second test interface 201, so that poor contact is avoided.
The apparatus 100 for testing integrated circuit products provided by embodiments of the present application may enable automated alignment with the gravity-inclined-back sorter 20. The operator moves the second member 303 in the X and Y directions by the first portion 301 through the input port 10 to move the second member 303 into the proper position ready for alignment with the gravity-inclined-back classifier 20. The operator rotates the second component 303 through the input port 10 to a position parallel to the gravity-inclined-back classifier 20 by means of the angle adjustment member 305 for accurate alignment of the subsequent test interface. The operator further fine-tunes the second member 303 through the input port 10 to move it toward the gravity-inclined-back classifier 20 in a state parallel to the gravity-inclined-back classifier 20 so that the first test interface 3031b can be completely contacted with the second test interface 201. Therefore, the device 100 for testing integrated circuit products provided by the embodiment of the application can ensure that the first test interface 3031b and the second test interface 201 are smoothly and readily contacted, thereby improving the test efficiency, avoiding damage to the test device, and reducing the production cost and the maintenance cost.
While the technical content and features of the present application have been disclosed above, those skilled in the art may make various substitutions and modifications based on the teachings and disclosure of the present application without departing from the spirit of the present application. Accordingly, the scope of the present application should not be limited to the embodiments disclosed, but should include various alternatives and modifications without departing from the application and be covered by the claims of the present application.
Claims (17)
1. An apparatus for testing an integrated circuit product, comprising:
an input port; a kind of electronic device with high-pressure air-conditioning system
A moving member connected with the input port, the moving member comprising:
a first portion; a kind of electronic device with high-pressure air-conditioning system
A second portion connected with the first portion, wherein the first portion is configured to move the second portion and the second portion is configured to rotate relative to the first portion;
an angle adjustment member connected to the second portion and configured to rotate the second portion relative to the first portion, the angle adjustment member comprising:
a third transmission element connected to the second portion; and
a support element;
wherein the first portion comprises a first arm and a second arm disposed opposite the first arm, wherein the first arm and the second arm each comprise a first drive element connected to the second portion, the first drive element configured to move in the first arm and the second arm to move the second portion, and wherein the support element houses the third drive element and is fixed to the first drive element.
2. The device for testing integrated circuit products of claim 1, wherein the first portion is configured to cause the second portion to move in a first direction of the device for testing integrated circuit products and/or in a second direction of the device for testing integrated circuit products, the first direction being perpendicular to the second direction.
3. The apparatus for testing an integrated circuit product of claim 1, wherein the first transmission element is a plate-like element.
4. The device for testing an integrated circuit product of claim 1, wherein the first arm comprises a second drive element configured to be connected to a first motor and provided with a first slider configured to move on the second drive element under the drive of the first motor.
5. The apparatus for testing an integrated circuit product of claim 4, wherein the second transmission element is a lead screw.
6. The device for testing an integrated circuit product of claim 4, wherein the first arm comprises a second slider configured to connect to the first drive element, and the second slider is configured to move under the drive of the first slider.
7. The device for testing integrated circuit products of claim 6, wherein the second slider is configured to be disposed on a first rail within the first arm or the second slider is configured to be disposed on a first rail within the first arm and disposed on a second rail within the first arm.
8. The device for testing an integrated circuit product of claim 1, wherein the second arm comprises a third slider configured to connect to the first drive element.
9. The apparatus for testing an integrated circuit product of claim 1, wherein the first portion further comprises a third arm connecting the first arm and the second arm.
10. The device for testing an integrated circuit product of claim 1, wherein the angle adjustment means further comprises:
a second motor;
wherein the third transmission element is connected to the second motor and is configured to rotate the second portion under the drive of the second motor.
11. The device for testing an integrated circuit product of claim 10, wherein the angular adjustment means further comprises a braking element configured to fix the third transmission element after rotation of the third transmission element is completed.
12. The device for testing an integrated circuit product of claim 11, wherein the angle adjustment means further comprises a power element configured to be connected to the braking element.
13. The apparatus for testing an integrated circuit product of claim 12, wherein the power element is a cylinder.
14. The device for testing an integrated circuit product of claim 12, wherein the braking element is configured to release the third transmission element when the power element is in an extended state and is configured to secure the third transmission element when the power element is in a retracted state.
15. The device for testing an integrated circuit product of claim 1, wherein the second portion comprises a first bearing surface provided with a first test interface and a positioning element surrounding the first test interface.
16. The device for testing an integrated circuit product of claim 1, wherein the input port is configured to control movement of the moving means.
17. The device for testing integrated circuit products of claim 1, further comprising a third portion configured to move the first portion along a direction of the device for testing integrated circuit products.
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| CN202111636878.0A CN114325325B (en) | 2021-12-29 | 2021-12-29 | Apparatus for testing integrated circuit products |
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1136665A (en) * | 1994-12-12 | 1996-11-27 | 英特斯特公司 | Method and apparatus for automated docking of test head to device handler |
| CN1408065A (en) * | 2000-03-01 | 2003-04-02 | 因泰斯特Ip公司 | Vertical counter balanced test head manipulator |
| CN1484767A (en) * | 2000-09-22 | 2004-03-24 | ��̩˹��Ip��˾ | Manipulator for a test head with active compliance |
| CN1646925A (en) * | 2002-04-15 | 2005-07-27 | 因泰斯特Ip公司 | Test head positioner system |
| DE102005048237B3 (en) * | 2005-10-07 | 2007-03-15 | Hubertus Heigl | Precision positioner for head of instrument testing semiconductor components, includes arm swinging about axis, carrying head in holder turned about further axis |
| CN101038301A (en) * | 2000-09-22 | 2007-09-19 | 因泰斯特Ip公司 | Manipulator for a test head with active compliance |
| CN101685136A (en) * | 2003-08-06 | 2010-03-31 | 英特斯特公司 | Mueller christian [de] |
| CN204422573U (en) * | 2015-01-20 | 2015-06-24 | 上海宏测半导体科技有限公司 | Three Degree Of Freedom report control platform |
| CN106823371A (en) * | 2017-02-27 | 2017-06-13 | 北京赛欧必弗科技股份有限公司 | Generate the system of exercise data and the method for control multiaxial motion equipment |
| CN209927893U (en) * | 2019-02-27 | 2020-01-10 | 德淮半导体有限公司 | Alignment device for testing machine and needle testing machine |
| CN211550973U (en) * | 2019-12-22 | 2020-09-22 | 刘兆净 | Portable equipment support |
| CN112067854A (en) * | 2020-11-13 | 2020-12-11 | 上海伟测半导体科技股份有限公司 | Device and method for moving and loading test machine |
| CN112255269A (en) * | 2020-09-23 | 2021-01-22 | 郑州竹蜻蜓电子科技有限公司 | Multi-station testing device for manufacturing integrated circuit |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7307440B2 (en) * | 2005-10-25 | 2007-12-11 | Credence Systems Corporation | Semiconductor integrated circuit tester with interchangeable tester module |
| MY172746A (en) * | 2007-02-23 | 2019-12-11 | Intest Corp | Test head manipulator |
-
2021
- 2021-12-29 CN CN202111636878.0A patent/CN114325325B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1136665A (en) * | 1994-12-12 | 1996-11-27 | 英特斯特公司 | Method and apparatus for automated docking of test head to device handler |
| CN1408065A (en) * | 2000-03-01 | 2003-04-02 | 因泰斯特Ip公司 | Vertical counter balanced test head manipulator |
| CN101038301A (en) * | 2000-09-22 | 2007-09-19 | 因泰斯特Ip公司 | Manipulator for a test head with active compliance |
| CN1484767A (en) * | 2000-09-22 | 2004-03-24 | ��̩˹��Ip��˾ | Manipulator for a test head with active compliance |
| CN1646925A (en) * | 2002-04-15 | 2005-07-27 | 因泰斯特Ip公司 | Test head positioner system |
| CN101685136A (en) * | 2003-08-06 | 2010-03-31 | 英特斯特公司 | Mueller christian [de] |
| DE102005048237B3 (en) * | 2005-10-07 | 2007-03-15 | Hubertus Heigl | Precision positioner for head of instrument testing semiconductor components, includes arm swinging about axis, carrying head in holder turned about further axis |
| CN204422573U (en) * | 2015-01-20 | 2015-06-24 | 上海宏测半导体科技有限公司 | Three Degree Of Freedom report control platform |
| CN106823371A (en) * | 2017-02-27 | 2017-06-13 | 北京赛欧必弗科技股份有限公司 | Generate the system of exercise data and the method for control multiaxial motion equipment |
| CN209927893U (en) * | 2019-02-27 | 2020-01-10 | 德淮半导体有限公司 | Alignment device for testing machine and needle testing machine |
| CN211550973U (en) * | 2019-12-22 | 2020-09-22 | 刘兆净 | Portable equipment support |
| CN112255269A (en) * | 2020-09-23 | 2021-01-22 | 郑州竹蜻蜓电子科技有限公司 | Multi-station testing device for manufacturing integrated circuit |
| CN112067854A (en) * | 2020-11-13 | 2020-12-11 | 上海伟测半导体科技股份有限公司 | Device and method for moving and loading test machine |
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