CN114318239B - Multi-angle adjustable coating workpiece frame for optical oblique vapor deposition coating - Google Patents
Multi-angle adjustable coating workpiece frame for optical oblique vapor deposition coating Download PDFInfo
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- CN114318239B CN114318239B CN202111652929.9A CN202111652929A CN114318239B CN 114318239 B CN114318239 B CN 114318239B CN 202111652929 A CN202111652929 A CN 202111652929A CN 114318239 B CN114318239 B CN 114318239B
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Abstract
The invention provides a multi-angle adjustable coating work rest for optical oblique evaporation coating, which aims to solve the problem that the existing optical coating work rest can not finish multi-substrate multi-angle coating in a short time and at low cost through one-time operation. The invention comprises an annular hanging disc assembly, a plurality of substrate carrying platforms and an annular carrying platform fixing frame; the hanging disc assembly and the carrying platform fixing frame are spliced side by side to form a workpiece frame body; a plurality of groups of opposite pivoting grooves are arranged on the splicing surface of the workpiece frame body in parallel, two ends of the substrate carrier are respectively arranged in the opposite pivoting grooves, and the substrate carrier can freely rotate; the annular hanging disc assembly is used for being connected with the film-coated umbrella stand.
Description
Technical Field
The invention belongs to the field of optical vacuum coating, and relates to a multi-angle adjustable coating workpiece frame for optical oblique vapor deposition coating.
Background
Vacuum coating is a common coating method, and from the aspect of a substrate, the coating method can be divided into vertical evaporation and inclined evaporation. The vertical evaporation is generally used for manufacturing optical film systems, such as optimizing transmittance and reflectivity under specific wave bands to obtain required optical indexes; the inclined evaporation can obtain an inclined growing columnar structure, different refractive index film layers are realized by using the same coating material, the substrate is obliquely arranged above the evaporation source, and a certain angle is formed between the substrate and the evaporation source, so that a film layer with a special structure, such as inorganic alignment of a liquid crystal material, can be obtained.
The existing coating tool frame mostly adopted by inclined evaporation realizes the inclined evaporation coating through the angle of the coating umbrella frame. The existing optical coating workpiece racks are of two types, one type is that holes suitable for bearing substrates are dug on an umbrella-shaped workpiece rack, and the angle is fixed and cannot be adjusted, so that the optical coating workpiece rack is also the most common coating tool rack; in the other method, the angle adjusting device is arranged on the film coating workpiece frame, so that the whole film coating workpiece frame can be vertically adjusted within a certain angle range, and the film coating of one angle can be finished by one-step operation. Therefore, the existing optical coating workpiece frame can realize the simultaneous evaporation at one angle on multiple substrates, but can not perform coating at multiple angles on multiple substrates, and the comparison of multiple evaporation angles is often required under the same process conditions in scientific research and industrial process verification.
Disclosure of Invention
In order to solve the problem that the existing optical coating workpiece frame can not finish multi-substrate multi-angle coating in a short time and at low cost by one-time operation, the multi-angle adjustable coating workpiece frame for the optical oblique evaporation coating is provided.
In order to achieve the purpose, the invention adopts the technical scheme that:
a multi-angle adjustable coating work piece frame for optical oblique vapor deposition coating is characterized in that: the device comprises an annular hanging disc assembly, a plurality of substrate carrying platforms and an annular carrying platform fixing frame; the hanging disc assembly and the carrying platform fixing frame are spliced side by side to form a workpiece frame body; a plurality of groups of opposite pivoting grooves are arranged on the splicing surface of the workpiece frame body in parallel, two ends of the substrate carrier are respectively arranged in the opposite pivoting grooves, and the substrate carrier can freely rotate; the annular hanging disc assembly is used for being connected with the film-coated umbrella stand.
Furthermore, the substrate carrying platform is a semi-cylindrical roller type carrying platform, and one side of the plane is a substrate platform for placing the substrate; two sides of the semi-cylinder of the substrate carrying platform are provided with substrate retaining walls with barb structures (fixed columns are arranged at two ends of the semi-cylinder of the substrate carrying platform;
the hanging disc assembly comprises a hanging disc and a plurality of first card slot groups which are arranged in parallel and correspond to the plurality of substrate carrying platforms; each first clamping groove group comprises two U-shaped first carrier clamping grooves symmetrically arranged on the inner side of the connecting surface of the hanging disc, and the first carrier clamping grooves are matched with the fixed columns;
u-shaped second carrier clamping grooves which correspond to the first carrier clamping grooves in position and are the same in number are arranged on the inner side of the connecting surface of the carrier fixing frame, and the second carrier clamping grooves are matched with the fixing columns; the second carrying platform clamping groove is matched with the corresponding first carrying platform clamping groove to form a pivoting groove, and the fixing column is positioned in the corresponding pivoting groove and can rotate freely; and a threaded hole is formed in each second carrier clamping groove, and after the angle of the substrate carrier is adjusted in the coating process, the substrate carrier is fixed by passing a fastening screw through the threaded hole to abut against the fixed column, so that the coating angle is guaranteed to be unchanged. Furthermore, a limiting piece is arranged beside the first carrier clamping groove at any one of the upper end and the lower end of the hanging disc component and used for preventing the substrate carrier from moving left and right;
the edge of the limiting sheet is matched with the edge of the substrate carrying platform.
Furthermore, angle scale marks are respectively carved at two ends of the substrate carrying platform and used for marking the relative angle between the substrate carrying platform and the hanging disc assembly.
Furthermore, a plurality of second connecting holes are formed in the carrier fixing frame, and first connecting holes which are the same as the second connecting holes in position and number are formed in the hanging disc; the first connecting hole and the second connecting hole are connected through a screw, so that the hanging disc assembly is fixedly connected with the carrier fixing frame.
Furthermore, two ends of the semi-cylinder of the substrate carrying platform are provided with substrate limiting holes, threads are arranged in the substrate limiting holes, and the substrate limiting holes are screwed in screws to limit the substrate vertically.
Furthermore, the distance between the substrate carrying tables can be increased by manufacturing the distance of the first carrying table clamping grooves or the number and the inclination angle of the substrate carrying tables can be changed in the coating process, so that the substrate carrying tables are not shielded.
Compared with the prior art, the invention has the following beneficial technical effects:
1. the multi-angle adjustable coating workpiece frame for the optical oblique evaporation coating is provided with the U-shaped platform deck clamping groove, the roller type coating platform deck freely rotates in the platform deck clamping groove, the angle of each substrate platform deck can be independently adjusted in the coating process, multi-substrate multi-angle simultaneous coating can be realized through one-time operation, and the adjustment range of the coating angles of different substrates is 0-360 degrees.
2. The multi-angle adjustable coating workpiece frame for the optical oblique evaporation coating can simultaneously perform evaporation on various evaporation angles, can ensure the consistency of other process conditions except the evaporation angles, and has high aging and low cost.
3. The multi-angle adjustable coating workpiece frame for the optical oblique evaporation coating can increase the distance between the first carrying table clamping grooves during manufacturing or reduce the number of the roller type substrate carrying tables and change the inclination angle during the coating process so as to increase the mutual distance, reduce the mutual shielding between the carrying tables during large-angle oblique evaporation coating, avoid the step effect caused by shielding and improve the coating uniformity.
4. The roller type coating platform used by the multi-angle adjustable coating workpiece frame for the optical oblique vapor deposition coating can increase and decrease the number of the coating platform according to the actual coating requirement, and the two sides of the coating platform are provided with more accurate scale marks, so that the coating angle can be accurately controlled and recorded.
Drawings
FIG. 1 is a schematic view of a multi-angle adjustable coating work rest for optical oblique vapor deposition coating according to the present invention;
FIG. 2 is a top view of a multi-angle adjustable coating work rest structure for optical oblique vapor deposition coating of the present invention;
FIG. 3 is a schematic structural view of a wall plate assembly of the present invention;
FIG. 4 is a schematic diagram of a substrate carrier according to the present invention;
FIG. 5 is a top view of FIG. 4;
FIG. 6 is a schematic view of a carrier holder according to the present invention;
FIG. 7 is a schematic view of the mounting of the substrate carrier of the present invention;
reference numerals:
1-hanging disc assembly, 11-first connecting hole, 12-hanging disc, 13-first carrying table clamping groove and 14-limiting piece;
2-a substrate carrying platform, 21-a substrate limiting hole, 22-a substrate retaining wall, 23-a substrate platform, 24-a fixing column and 25-a scale mark ruler;
3-a carrier fixing frame, 31-a second connecting hole, 32-a carrier fixing frame main body, 33-a second carrier clamping groove and 34-a threaded hole;
4-fastening the screw.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the following description will be made in detail with reference to the accompanying drawings and the following detailed description of a multi-angle adjustable coating work holder for optical oblique deposition coating. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principle of the present invention and are not intended to limit the scope of the present invention.
It should be noted that, in the description, terms such as "upper", "lower", "left", "right", and the like are used for describing relative positions of the respective structures in the drawings, and are only for the sake of clarity of description, and are not used to limit the scope of the present invention, and changes or adjustments of the relative relationships thereof are also regarded as the scope of the present invention without substantial technical changes.
The invention provides a multi-angle adjustable coating workpiece frame for optical oblique vapor deposition, which can adjust the vapor deposition angle at 0-360 degrees by adjusting the angle of a substrate carrying platform, thereby realizing multi-angle simultaneous coating of multiple substrates, and completing multi-angle process verification by one-time operation.
As shown in figure 1, the multi-angle adjustable coating workpiece frame for optical oblique vapor deposition coating comprises a hanging disc assembly 1, a plurality of substrate carrying tables 2 and a table fixing frame 3, wherein the substrate carrying tables 2 are arranged on the table fixing frame 3, each substrate carrying table 2 can freely rotate for 360 degrees, and the mounted table fixing frame 3 is fixed on the hanging disc assembly 1 and is fixed on a coating umbrella frame through the hanging disc assembly 1.
As shown in fig. 3, the main body of the hanging disc assembly 1 is an integrated annular hanging disc 12, the hanging disc 12 is used for hanging an adjustable film-coating workpiece frame on a film-coating umbrella frame upside down, an annular bulge is arranged on the inner ring of the hanging disc 12, 6 first connecting holes 11 are arranged on the bulge, and the hanging disc is connected with the carrier fixing frame 3 through screws; the hanging disc assembly 1 is also provided with a plurality of U-shaped first carrier clamping grooves 13 which are mirror-symmetrical up and down and are used for placing the substrate carrier 2, and the substrate carrier 2 can freely rotate in the U-shaped first carrier clamping grooves; a limiting piece 14 is arranged at the joint of the lower end of the hanging disc 12 and the first carrier clamping groove 13, so that the substrate carrier 2 can be prevented from moving left and right, and can also be used as a reference plane to mark the coating angle of the substrate carrier 2.
The interval that first microscope carrier draw-in groove 13 set up needs to satisfy with substrate microscope carrier 2 joint when wherein, substrate microscope carrier 2 does not shelter from each other, and easy to assemble or dismantle. The spacing of the limiting pieces 14 is matched with the spacing between the substrate carrying platforms 2, meanwhile, as the hanging disc assembly 1 is in a circular ring shape, the first carrying platform clamping grooves 13 symmetrically arranged on the hanging disc assembly can fix the substrate carrying platforms 2 with different lengths, and the shape of the limiting pieces 14 at the lower end meets the requirement of limiting the substrate carrying platforms 2 after the substrate carrying platforms 2 are installed.
As shown in fig. 4 and 5, the substrate stage 2 is a semi-cylindrical roller-type substrate stage, and one side of the plane is a substrate table 23 for placing a substrate with a plating surface facing outward; the two ends of the semi-cylinder are provided with substrate limiting holes 21, threads are arranged in the holes, the substrate can be limited in position by screwing in screws after the substrate is placed in, and the substrate is prevented from sliding off from the two ends in the film coating process. The two sides of the semi-cylinder are also provided with substrate retaining walls 22 with barb structures, the substrates are placed in the substrate carrying platform 2 by sliding from the two ends, and the barb structures can also prevent the substrates from shifting or even sliding in the rotating process of the substrate carrying platform 2. The two ends of the substrate carrying platform 2 are provided with cylindrical fixing columns 24 which are connected in the first carrying platform clamping groove 13 in a clamped mode and can rotate in the first carrying platform clamping groove 13 and are used for continuously adjusting the coating angles in the coating process, and the plurality of substrate carrying platforms 2 can rotate to different angles, so that multi-angle coating in one-time operation is achieved. And the sector surfaces at the two ends are engraved with scale marks 25 with angles for marking the relative angle between the substrate carrying platform 2 and the hanging disc assembly 1, so that the repeatability of a coating experiment is improved.
As shown in fig. 6, the carrier holder 3 is an integral ring, the circumference of the carrier holder 3 is provided with second connection holes 31 having the same positions and number as the first connection holes 11 on the hanging plate assembly 1, and as shown in fig. 2, screws are inserted through the second connection holes 31 and the first connection holes 11 to fixedly connect the carrier holder 3 to the hanging plate assembly 1. The inner side of the ring of the carrier fixing frame 3 is also provided with second carrier clamping grooves 33 which have the same positions and the same quantity as the first carrier clamping grooves 13 on the hanging disc assembly 1, and the second carrier clamping grooves are matched with the first carrier clamping grooves 13 to fixedly clamp the substrate carriers 2 in the first carrier clamping grooves. A threaded hole 34 is formed in the stage fixing frame 3 above each second stage clamping groove 33, and after the angle of the substrate stage 2 is adjusted in the coating process, the substrate stage 2 is fixed by the aid of a set screw 4 penetrating through the threaded hole 34, so that the coating angle is guaranteed to be unchanged.
As shown in FIG. 7, taking the installation of a substrate carrier 2 as an example, when the multi-angle adjustable coating work rest is used, the operation steps are as follows:
1) Sliding the substrate into the substrate retaining wall 22 from one end of the substrate carrying platform 2, screwing screws into the substrate limiting holes at the two ends, and ensuring that the substrate is completely placed on the substrate platform 23;
2) According to the length of the substrate carrier 2, the substrate carrier 2 is arranged in a proper second carrier clamping groove 33 on the carrier fixing frame 3, and the two sides of the lower end of the substrate carrier are provided with matched limiting sheets 14 to ensure that the substrate carrier cannot incline;
3) The carrier fixing frame 3 is arranged on the hanging disc assembly 1, so that the roller type coated substrate carrier 2 can freely rotate in the first carrier clamping groove 13 and the second carrier clamping groove 33 by 0-360 degrees;
4) Screws penetrate through the second connecting holes 31 and the first connecting holes 11 to fixedly connect the carrier fixing frame 3 with the hanging disc assembly 1;
5) The limiting sheet 14 is used as a 0-degree reference line, the angle of each substrate carrying platform 2 to be coated is adjusted by using the scale mark scale 25 for marking the angle, and the substrate carrying platform 2 is fixed by screwing the set screw 4 through the threaded hole 34 in the second carrying platform clamping groove 33;
6) The evaporation is started.
The U-shaped carrying platform clamping groove is formed in the multi-angle adjustable coating workpiece frame for the optical oblique vapor deposition coating, a plurality of mutually independent roller-type substrate carrying platforms rotate freely in the carrying platform clamping groove, the coating angle of each substrate carrying platform can be continuously adjusted in 0-360 degrees, and one-time operation is realized for multi-substrate multi-angle simultaneous coating.
The distance between every two substrate carriers can be increased by manufacturing the distance of the first carrier clamping grooves 13 or the number and the inclination angle of the substrate carriers 2 are changed in the coating process, so that the mutual shielding is reduced, the step effect caused by shielding is avoided, and the coating uniformity is ensured.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (6)
1. The utility model provides an optics is adjustable coating film work rest of multi-angle for oblique vapor deposition membrane which characterized in that: comprises an annular hanging disc assembly (1), a plurality of substrate carriers (2) and an annular carrier fixing frame (3); the hanging disc assembly (1) and the carrier fixing frame (3) are spliced side by side to form a workpiece frame body; a plurality of groups of opposite pivoting grooves are arranged on the splicing surface of the workpiece frame body in parallel, two ends of the substrate carrier (2) are respectively arranged in the opposite pivoting grooves, and the substrate carrier (2) can freely rotate; the annular hanging disc assembly (1) is used for being connected with the film-coated umbrella stand;
the substrate carrying platform (2) is a semi-cylindrical roller type carrying platform, and one side of the plane is a substrate platform (23) for placing a substrate; two sides of the semi-cylinder of the substrate carrying platform (2) are provided with substrate retaining walls (22) with barb structures, and two ends of the semi-cylinder of the substrate carrying platform (2) are provided with fixing columns (24);
the hanging disc assembly (1) comprises a hanging disc (12) and a plurality of first card slot groups which are arranged in parallel and correspond to the plurality of substrate carrying platforms (2); each first clamping groove group comprises two U-shaped first carrier clamping grooves (13) which are symmetrically arranged on the inner side of the connecting surface of the hanging disc (12), and the first carrier clamping grooves (13) are matched with the fixing columns (24);
u-shaped second stage clamping grooves (33) which correspond to the first stage clamping grooves (13) in position and are the same in number are formed in the inner side of the connecting surface of the stage fixing frame (3), and the second stage clamping grooves (33) are matched with the fixing columns (24); the second carrier clamping groove (33) is matched with the corresponding first carrier clamping groove (13) to form a pivoting groove, and the fixing column (24) is positioned in the corresponding pivoting groove and can freely rotate; and a threaded hole (34) is formed in each second carrier clamping groove (33), and after the angle of the substrate carrier (2) is adjusted in the coating process, the substrate carrier (2) is fixed by passing a fastening screw (4) through the threaded hole (34) to abut against a fixed column (24), so that the coating angle is guaranteed to be unchanged.
2. The multi-angle adjustable coating workpiece holder for the optical oblique evaporation coating according to claim 1, wherein:
the hanging disc assembly (1) is provided with a limiting piece (14) beside the first carrier clamping groove (13) at any one of the upper end and the lower end, and is used for preventing the substrate carrier (2) from moving left and right;
the edge of the limiting sheet (14) is matched with the edge of the substrate carrying platform (2).
3. The multi-angle adjustable coating workpiece holder for the optical oblique evaporation coating according to claim 2, characterized in that:
and angle scale marks (25) are respectively engraved at two ends of the substrate carrying platform (2) and are used for marking the relative angle between the substrate carrying platform (2) and the hanging disc assembly (1).
4. The multi-angle adjustable coating workpiece holder for the optical oblique evaporation coating according to claim 1, wherein:
the carrying platform fixing frame (3) is provided with a plurality of second connecting holes (31), and the hanging disc (12) is provided with first connecting holes (11) which are the same as the second connecting holes (31) in position and number; the first connecting hole (11) is connected with the second connecting hole (31) through a screw, so that the hanging disc assembly (1) is fixedly connected with the carrier fixing frame (3).
5. The multi-angle adjustable coating work rest for the optical oblique evaporation coating according to any one of claims 1 to 4, characterized in that:
two ends of the semi-cylinder of the substrate carrying platform (2) are provided with substrate limiting holes (21), threads are arranged in the substrate limiting holes (21), and the substrate limiting holes (21) are screwed in screws to limit the substrate up and down.
6. The multi-angle adjustable coating workpiece holder for the optical oblique evaporation coating according to claim 5, wherein:
the distance between the substrate carrying platforms (2) can be increased by manufacturing the distance between the first carrying platform clamping grooves (13) or the number and the inclination angle of the substrate carrying platforms (2) are changed in the film coating process, so that the substrate carrying platforms (2) are not shielded.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111652929.9A CN114318239B (en) | 2021-12-30 | 2021-12-30 | Multi-angle adjustable coating workpiece frame for optical oblique vapor deposition coating |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202111652929.9A CN114318239B (en) | 2021-12-30 | 2021-12-30 | Multi-angle adjustable coating workpiece frame for optical oblique vapor deposition coating |
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| CN114318239A CN114318239A (en) | 2022-04-12 |
| CN114318239B true CN114318239B (en) | 2022-10-04 |
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| CN114318239A (en) | 2022-04-12 |
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