TWI558828B - Fixture for fixed to-be-coated material - Google Patents

Description

Fixture for fixing the object to be coated

The invention relates to a fixture, in particular to a fixture for fixing a material to be coated, and used in a coating machine to clamp a material to be coated, which can effectively fix a material to be coated to avoid damage and improve unevenness of coating. .

Coating is a technique for producing a film material in a vacuum. The main processes are as follows: (1) placing the object to be coated on a rotating frame and rotating it with the evaporation source in the vacuum chamber; (2) The solid material of the target is sublimated to a gaseous state; (3) the gaseous atoms, molecules or ions are accelerated through a highly vacuum space to the surface of the attached substrate; and (4) the target material is deposited on the surface of the object to be coated. film.

This technology mainly produces metal oxide thin films. It was used in the early production of magneto-optical storage media and metal film on printed circuit boards. The process of optical magnetic storage media affects the quality of magneto-optical storage media. The key is the advantages and disadvantages of each layer sputtering technology. With the advancement of technology, the technology of coating is also improving, not only widely used in the biomedical industry, plastic film, optical components, and in the semiconductor field and flat panel display applications.

The coating technique can be used for continuous coating to produce a multi-layer structure. For example, U.S. Patent No. 5,105,310 discloses a multilayer anti-reflection film which is produced by a continuous sputtering machine by reactive sputtering. For a touch panel, if a multi-layer structure is to be produced on the touch panel, the technical aspect needs to be overcome. Kind of problem.

In the field of touch panels, most of them are capacitive touch panels, mainly using capacitive sensing formed by the contact between transparent electrodes of indium tin oxide (ITO) on the touch panel and human fingers or conductive objects. Through the operation of the control circuit, it is converted into coordinate data that can be interpreted by the operating system. Therefore, if the film is to be coated on the touch panel, it is necessary to prevent the transparent electrode from being insulated by the plating material and causing the problem that the electrical conductivity is not conductive. In addition, one of the core technologies of the coating is to design a precision fixture. The fixture needs to consider the thermal expansion and stress problems when clamping the material to be coated. In addition to its structural considerations, it is necessary to consider the design of the connection with the coating device.

Since the glass layer of the touch panel is easily broken, if the clamping force is improperly designed when holding the fixture to be coated, it may cause the material to be coated to be broken, damaged or edged, and in the continuous coating due to continuous coating The edge of the object to be coated is clamped, and the target material in the coating is deposited on the edge or the corner, resulting in uneven coating.

For the sake of the job, the applicant has, in view of the lack of the prior art, has carefully tested and researched, and has a perseverance, and finally conceived the "fixing tool for fixing the object to be coated" of the present invention to overcome The above problem is hereinafter described as a brief description of the present invention.

In view of the above problems of the prior art, the object of the present invention and the problem to be solved is to provide a jig for fixing a material to be coated, and the jig for fixing the object to be coated can overcome the cause of coating by the coating machine. The swaying causes problems such as uneven coating and cracking, and can quickly disassemble and replace the object to be coated to be coated, and at the same time prevent scratching or damage of the object to be coated.

In order to solve the above technical problem, the present invention provides a jig for fixing a material to be coated, and the jig for fixing the object to be coated includes a base and a plurality of Carding components. A positioning portion is recessed in the center of the base, and a center of the positioning portion is hollowed out to form a placing portion to place the object to be coated on the placing portion. a plurality of fastening components are disposed on one side of the base and correspondingly disposed around the positioning portion, so that the object to be coated is embedded in the placement portion of the base to clamp the object to be coated Coating is carried out.

Further, in the fixture for fixing a material to be coated according to the present invention, one side of each of the fastening elements is fitted with the object to be coated, and the other side is connected to one end of the elastic element, and the other side of the elastic element One end abuts against the edge of the positioning portion, and the amount of expansion and contraction of the elastic member is adjusted according to the size of the object to be coated. The side of the card component to be coated with the object to be coated has a surface S1 and a surface S2 protruding outwardly, the surface S1 is for the edge of the object to be coated; the surface S2 is for the lower side of the object to be coated The angle between the surface S1 and the surface S2 is 90 degrees or more but less than 180 degrees. Each of the fastening elements includes a plurality of elastic pieces.

According to the purpose of the present invention, there is further provided a fixture for fixing a material to be coated, comprising a base, a plurality of fastening elements and a supporting element. A positioning portion is recessed in the center of the base, and a center of the positioning portion is hollowed out to form a placing portion to place the object to be coated on the placing portion. a plurality of fastening components are disposed on one side of the base and correspondingly disposed around the positioning portion, so that the object to be coated is embedded in the placement portion of the base to clamp the object to be coated Coating is carried out. The support member is disposed on one side of the base, and includes a plate member and a plurality of adsorption members. The adsorption members are disposed on one side of the plate member, and one of the suction members is provided with a suction cup for holding the suction plate. The material to be coated.

In the fixture for fixing a material to be coated according to the present invention, one side of each of the fastening elements is fitted with the object to be coated, and the other side is connected to one end of the elastic element, and the other end of the elastic element is abutted. At the edge of the positioning portion, the amount of expansion and contraction of the elastic member is adjusted according to the size of the object to be coated. The clamping component is embedded in the plate to be plated The surface of the film has a surface S1 and an outwardly protruding surface S2, the surface S1 is for the edge of the object to be coated; the surface S2 is for the lower side of the object to be coated, and the surface S1 and the surface The angle of the surface S2 is 90 degrees or more but less than 180 degrees. Each of the fastening elements includes a plurality of elastic pieces.

Further, in the jig for fixing a material to be coated according to the present invention, the supporting member includes a positioning member which is disposed obliquely with respect to the plate member and abuts against one of the fastening members. The other side of the locating member has a connecting portion extending outwardly, and the connecting portion is connectable to a coating machine to drive the absorbing members to adsorb the moving position of the object to be coated by the movement of the connecting portion.

1, 2, 3‧‧‧ Fixtures for fixing the objects to be coated

11‧‧‧Base

111‧‧‧ Positioning Department

112‧‧‧Placement Department

12‧‧‧Kelly components

121‧‧‧Shrap

122‧‧‧Lock hole

123‧‧‧ screws

13‧‧‧Flexible components

14‧‧‧Support components

141‧‧‧ boards

142‧‧‧Adsorbed parts

1421‧‧‧Sucker

143‧‧‧ Positioning parts

144‧‧‧Connecting Department

90‧‧‧material to be coated

S1, S2‧‧‧ surface

R1, R2‧‧‧ adjustment area

θ ₁ , θ ₂ ‧‧‧ angle

H‧‧‧height

1 is a combined schematic view (1) of a first embodiment of a jig for fixing a material to be coated according to the present invention.

2 is a schematic view (2) of the first embodiment of the jig for fixing a material to be coated according to the present invention.

Fig. 3 is an exploded perspective view showing the first embodiment of the jig for fixing a material to be coated according to the present invention.

Fig. 4 is a view showing the state of use of the first embodiment of the jig for fixing a material to be coated according to the present invention.

Fig. 5 is a schematic view showing the combination of the second embodiment of the jig for fixing a material to be coated according to the present invention.

Fig. 6 is an exploded perspective view showing a second embodiment of the jig for fixing a material to be coated according to the present invention.

Fig. 7 is a schematic sectional view (1) of a third embodiment of the jig for fixing a material to be coated according to the present invention.

Figure 8 is a combination of the third embodiment of the jig for fixing a material to be coated according to the present invention; Intention (2).

Fig. 9 is an exploded perspective view showing a third embodiment of the jig for fixing a material to be coated according to the present invention.

Fig. 10 is a view showing the state of use of the third embodiment of the jig for fixing a material to be coated according to the present invention.

The embodiments of the jig for fixing the object to be coated according to the present invention will be described below with reference to the related drawings. For the sake of understanding, the same elements in the following embodiments are denoted by the same reference numerals.

Referring to FIG. 1 to FIG. 3 together, it is a schematic diagram (1), a combined schematic diagram (2) and an exploded view of the first embodiment of the fixture for fixing a material to be coated according to the present invention. As shown in the figure, the jig 1 for fixing a material to be coated of the present invention comprises a susceptor 11 and a fastening member 12, which is suitable for use in a coating machine for locating a material to be coated, in this embodiment, a material to be coated Lens is used as an example, but not limited to this. The base 11 is a circular plate having a thickness, and the base 11 is recessed to form a positioning portion 111, and a hollow portion is dug at the center of the positioning portion 111 to form a placement portion 112 to be The coating material is placed on the placement portion 112. The fastening component 12 is disposed on one side of the positioning portion 111 of the base 11 and is provided with a fastening component 12 along the periphery of the placement portion 112 so that the object to be coated is embedded in the placement portion of the base 11 The object to be coated is stuck and coated. The fastening component 12 includes at least one elastic piece 121. In this embodiment, the fastening component 12 has two elastic pieces 121, but is not limited thereto.

As shown in FIG. 1 to FIG. 3, the fastening component 12 is used for clamping the object to be coated. In this embodiment, the number of the fastening components 12 is six, and the two components are correspondingly disposed on the positioning portion 111. The quantity is not intended to be limited, and the actual implementation is not limited to this number and setting position. The fastening component 12 includes the fastening components C1 C C6 , wherein one side of the fastening component C1 and the clamping component C2 is stuck on the side of the object to be coated, and the fastening component C1 and the fastening component The other side of C2 is connected to one end of the elastic member 13, and the other end of the elastic member 13 abuts against the edge of the groove of the positioning portion 111 to adjust the amount of expansion and contraction of the elastic member 13 in accordance with the size of the object to be coated. In this embodiment, the spring element is exemplified by a spring column, but not limited thereto. The fastening component 12 has a locking hole 122, and the screw 123 passes through the locking hole 122 and is locked and fixed at the positioning portion. 111, wherein the locking hole 122 is an elliptical through hole, and the size of the locking hole 122 is smaller than that of the screw 123, and the hole of the locking hole 122 is slightly larger, so that the fastening component 12 can be coated with the object to be coated The positioning position is finely adjusted, and the fastening elements C3, C4, C5 and C6 are locked to the positioning portion 111 by screws 123 to define the positions of the fastening elements C3, C4, C5 and C6.

As shown in FIG. 3, the side of the fastening component 12 that can be embedded with the object to be coated has a surface S1 and an outwardly protruding surface S2, the surface S1 is for the edge of the object to be coated, and the surface S2 is for the lower side of the object to be coated. Preferably, the angle θ ₁ between the surface S1 and the surface S2 is 90 degrees or more but less than 180 degrees.

In addition, along the other side of the surface S2, there is an inclined surface having an angle θ ₂ with the reference surface, and the angle θ _{2 is} between 0 and 90 degrees, and the object to be coated can be guided when the object to be coated is to be placed. Position so that the material to be coated can be placed in the correct position. The surface S1 has a height h, which can be adjusted in advance according to the thickness of the object to be coated in order to clamp the object to be coated.

1 to 3, please refer to FIG. 4 together. FIG. 4 is a schematic view showing the use state of the first embodiment of the jig for fixing a material to be coated according to the present invention. As shown in the figure, the jig 1 for fixing a material to be coated according to the present invention is preferably applied to a coating machine, and particularly to a continuous coating machine. When the object to be coated 90 is embedded in the placing portion 112, the fastening member 12 can automatically correct its position according to slight deviation or displacement, so that the object to be coated 90 is engaged to a proper positioning position, and is engaged through the embedded portion. The material to be coated 90 can prevent the object to be coated 90 from being scratched. Preferably, the fastening component 12 of the present invention can be made of a plastic material, which can further avoid surface scratching when the object to be coated 90 is embedded.

Please refer to FIG. 5 to FIG. 6 , which are schematic diagrams and exploded views of the second embodiment of the jig for fixing the object to be coated according to the present invention. The jig 2 for fixing the object to be coated of the present invention comprises a base 11 and a fastening component 12, and the base 11 has a positioning portion 111 which is recessed on one side of the base 11 and the center of the positioning portion 111 is hollowed out to form a placement portion 112 for placing the object to be coated on the placement portion 112, wherein the size of the central hollow portion of the positioning portion 111 can be adjusted according to requirements, and the central hollow region is the object to be coated. In the plated area, the fastening component 12 is disposed on one side of the base 11 and correspondingly disposed around the positioning portion 111, so that the object to be coated is embedded in the placing portion 112 of the base 11 to be stuck. The coating material is coated, and the fastening component 12 includes at least one elastic piece 121 for engaging the object to be coated, and can prevent the object to be coated from being scratched, and is preferably made of a plastic material.

The positioning portion R is provided with the adjustment regions R1 and R2 at the positioning portion 111. If the size of the object to be coated is large, the position of the fastening member 12 can be directly adjusted for large size. The coating is embedded.

The fastening component 12 is inserted into the side of the object to be coated, and has a surface S1 and a surface S2 protruding outward. The surface S1 is for the edge of the object to be coated; the surface S2 is for the lower side of the object to be coated, and the surface is S1 and surface S2 have an angle θ ₁ and 90 θ ₁ <180. Therefore, the jig 3 for fixing the object to be coated can adjust the clamping angle θ ₁ so that the clamping force of the fastening component 12 can achieve an appropriate clamping effect and prevent the object to be coated from falling off or excessively clamping. The phenomenon of scratches and damage caused by the treatment.

In addition, along the other side of the surface S2, there is an inclined surface having an angle θ ₂ with the reference surface, and the angle θ _{2 is} between 0 and 90 degrees, and the object to be coated can be guided when the object to be coated is to be placed. Position so that the material to be coated can be placed in the correct position. The surface S1 has a height h, which can be adjusted in advance according to the thickness of the object to be coated in order to clamp the object to be coated.

Next, according to the first embodiment and the second embodiment, the present invention further mentions The third embodiment is further illustrated by way of example.

Please refer to FIG. 7 to FIG. 9 together, which is a schematic diagram (1), a combined schematic diagram (2) and an exploded view of a third embodiment of the fixture for fixing a material to be coated. The jig 3 for fixing a film to be coated according to the present invention can be applied to a continuous vacuum coater, and the continuous vacuum coater is a sputter machine having a multi-target, and the method for fixing a film to be coated according to the present invention 3 is used for engaging the object to be coated to carry out the coating process, and can improve the uniformity of the coating. As shown in the figure, the jig 3 for fixing the object to be coated of the present invention comprises the base 11 and the fastening component 12 and The support member 14 and the base 11 are recessed to the position portion 111, and the center of the positioning portion 111 is hollowed out to form the placement portion 112 to place the object to be coated on the placement portion 112, and the fastening member 12 is disposed on the base 11. One side, and correspondingly disposed around the positioning portion 111, when the object to be coated is embedded in the placing portion 112 of the base 11, the object to be coated is stuck and coated, and the supporting member 14 is disposed on one of the bases 11. The side comprises a plate member 141 and an adsorbing member 142. One end of the adsorbing member 142 is disposed on one side of the plate member 141, and the other end of the adsorbing member 142 is provided with a suction cup 1421 for adsorbing the object to be coated.

As shown in FIG. 7, in the jig for fixing a material to be coated according to the present invention, one side of the fastening member 12 is used for engaging a material to be coated, and in this embodiment, the number of the fastening member 12 is Five, respectively, are the fastening elements D1, D2, D3, D4 and D5, but not limited thereto. The fastening component D1 is an integrally formed structure, and one side of the fastening component D1 can be engaged with one side of the object to be coated, and the other side of the fastening component D1 is connected with one end of the elastic component 13 , and the other end of the elastic component 13 is abutted against the positioning. The edge of the portion 111 is such that the amount of expansion and contraction of the elastic member 13 can be adjusted in accordance with the size of the object to be coated. The fastening component 12 includes at least one elastic piece 121. In this embodiment, the fastening component D1 has four elastic pieces 121, and the fastening components D2 D D5 respectively have two elastic pieces 121. This is only an example, and is not in this number. limit.

As shown in FIG. 9, the support member 14 includes a positioning member 143 which is disposed obliquely with respect to the plate member 141 and has one end abutting against the fastening member 12. Positioning member 143 The other side has an outwardly extending connecting portion 144. The connecting portion 144 is connectable to a coating machine to drive the adsorbing member 142 to move the position to be coated by the movement of the connecting portion 144.

Referring to FIG. 10 and FIG. 10 together, FIG. 10 is a schematic view showing the use state of the third embodiment of the jig for fixing a film to be coated according to the present invention. As shown in the figure, the jig 3 for fixing a material to be coated according to the present invention can easily position the object to be coated 90 and place it in a continuous vacuum coater, thereby fixing the object to be coated by the present invention. The jig 3 can fix the position of the object to be coated 90, avoiding problems such as uneven coating due to shaking and cracking of the object to be coated 90.

However, the above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the practice of the present invention, so that it is common knowledge in the art or equivalent or easy to be familiar with the technology. Variations and modifications made by those skilled in the art without departing from the spirit and scope of the invention are intended to be included within the scope of the invention.

1‧‧‧ Fixture for fixing the object to be coated

11‧‧‧Base

111‧‧‧ Positioning Department

112‧‧‧Placement Department

12‧‧‧Kelly components

121‧‧‧Shrap

13‧‧‧Flexible components

Claims (11)

A fixture for fixing a material to be coated, which is used in a coating machine to chuck a material to be coated, comprising: a base, a positioning portion is recessed on one side thereof, and a center of the positioning portion is hollowed out to form a placement portion for placing the object to be coated on the placement portion; and a plurality of fastening members disposed on one side of the base and correspondingly disposed around the positioning portion to enable the object to be placed When the coating material is embedded in the placing portion of the base, the object to be coated is clamped and coated; wherein one side of the fastening component can be embedded with the object to be coated and has an inclined surface when the object is to be When the coating material is to be placed in the placing portion, the inclined surface can guide the position of the object to be coated, so that the object to be coated can be placed on the placing portion, and the angle between the inclined surface and a reference surface The system is between 0 and 90 degrees. The fixture for fixing a material to be coated according to claim 1, wherein the side of the fastening component that can be fitted with the object to be coated has a surface S1 and a surface S2 protruding outward, the surface S1 The surface of the object to be coated is abutted against the edge of the object to be coated, and the angle between the surface S1 and the surface S2 is 90 degrees or more but less than 180 degrees. A fixture for fixing a material to be coated, which is used in a coating machine to chuck a material to be coated, comprising: a base, a positioning portion is recessed on one side thereof, and a center of the positioning portion is hollowed out to form a placement portion for placing the object to be coated on the placement portion; and a plurality of fastening members disposed on one side of the base and correspondingly disposed around the positioning portion to enable the object to be placed When the coating material is embedded in the placing portion of the base, the object to be coated is clamped and coated, wherein one side of each of the fastening elements is fitted with the object to be coated, and the other side is connected with an elastic element. One end, and the elastic element The other end of the member abuts against the edge of the positioning portion, and adjusts the amount of expansion and contraction of the elastic member due to the size of the object to be coated. The fixture for fixing a material to be coated according to claim 3, wherein the side of the fastening component that can be embedded with the object to be coated has a surface S1 and a surface S2 protruding outward, the surface S1 being provided The edge of the object to be coated is abutted; the surface S2 is abutted against the lower side of the object to be coated, and the angle between the surface S1 and the surface S2 is 90 degrees or more but less than 180 degrees. A fixture for fixing a material to be coated, which is used in a coating machine to chuck a material to be coated, comprising: a base, a positioning portion is recessed on one side thereof, and a center of the positioning portion is hollowed out to form a placement portion for placing the object to be coated on the placement portion; and a plurality of fastening members disposed on one side of the base and correspondingly disposed around the positioning portion to enable the object to be placed When the coating material is embedded in the placing portion of the base, the object to be coated is clamped and coated, wherein each of the fastening elements comprises at least one elastic piece. A fixture for fixing a material to be coated, which is used for coating a film to be coated, comprising: a base, a positioning portion is recessed in a center thereof, and a center of the positioning portion is hollowed out to form a space a portion for placing the object to be coated on the side of the base, and correspondingly disposed around the positioning portion to embed the object to be coated And the supporting member is disposed on one side of the base, and comprises: a plate member; and a plurality of adsorbing members, wherein the receiving portion is fixed to the substrate One side of the plate member is disposed, and one of the suction members is provided with a suction cup for holding the material to be coated. The jig for fixing a material to be coated according to claim 6, wherein one side of each of the fastening elements is fitted with the object to be coated, and the other side is connected to one end of the elastic element, and the other side of the elastic element is One end abuts against the edge of the positioning portion, and the amount of expansion and contraction of the elastic member is adjusted according to the size of the object to be coated. The fixture for fixing a material to be coated according to claim 7, wherein the side of the fastening component that is embedded with the object to be coated has a surface S1 and a surface S2 protruding outward, the surface S1 being used for The edge of the coating is abutted; the surface S2 is abutted against the lower side of the object to be coated, and the angle between the surface S1 and the surface S2 is 90 degrees or more but less than 180 degrees. The jig for fixing a material to be coated according to claim 6, wherein the supporting member comprises a positioning member which is disposed obliquely with respect to the plate member and abuts against one of the fastening members. The jig for fixing a material to be coated according to claim 9, wherein the other side of the positioning member has a connecting portion extending outwardly, the connecting portion being connectable to a coating machine for connecting by the connection The movement of the parts successively drives the adsorption members to adsorb the moving position of the object to be coated. The jig for fixing a material to be coated according to claim 6, wherein each of the fastening elements comprises at least one elastic piece.