CN111299876A - Clamp mechanism capable of positioning and fixing various substrates - Google Patents

Clamp mechanism capable of positioning and fixing various substrates Download PDF

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Publication number
CN111299876A
CN111299876A CN202010253359.5A CN202010253359A CN111299876A CN 111299876 A CN111299876 A CN 111299876A CN 202010253359 A CN202010253359 A CN 202010253359A CN 111299876 A CN111299876 A CN 111299876A
Authority
CN
China
Prior art keywords
slide holder
fine adjustment
positioning
supporting plate
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010253359.5A
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Chinese (zh)
Inventor
张政福
王洋
王凯
孙君实
王巍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changchun Guanghua Micro Electronic Equipment Engineering Center Co ltd
Original Assignee
Changchun Guanghua Micro Electronic Equipment Engineering Center Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Changchun Guanghua Micro Electronic Equipment Engineering Center Co ltd filed Critical Changchun Guanghua Micro Electronic Equipment Engineering Center Co ltd
Priority to CN202010253359.5A priority Critical patent/CN111299876A/en
Publication of CN111299876A publication Critical patent/CN111299876A/en
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0426—Fixtures for other work
    • B23K37/0435—Clamps
    • B23K37/0443—Jigs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention relates to a fixture mechanism capable of positioning and fixing various substrates.A slide holder of the fixture mechanism is positioned above an XY supporting plate and is connected with the XY supporting plate through a rotating mechanism; the fine adjustment mechanism comprises a fine adjustment thread pair active adjustment part, a fine adjustment thread pair passive adjustment part and a tension spring; the active adjusting part of the fine adjustment thread pair is fixedly arranged on the XY supporting plate; the fine-tuning screw pair passive adjusting part is fixedly connected with the slide holder; one end of the tension spring is fixedly connected with the XY supporting plate, and the other end of the tension spring is fixedly connected with the slide holder; the knob of the active adjusting part of the fine adjustment thread pair can be rotated to push the passive adjusting part of the fine adjustment thread pair to rotate so as to drive the slide holder to rotate and return under the action of the tension spring; the X positioning leaning edge and the Y positioning leaning edge are mutually and vertically fixed on the slide holder; a plurality of vacuum adsorption ports are distributed on the slide holder, and each vacuum adsorption port is connected with an external vacuum pump. The invention can realize high-precision positioning of substrates with different sizes and thicknesses.

Description

Clamp mechanism capable of positioning and fixing various substrates
Technical Field
The invention relates to the field of laser processing of semiconductor functional circuits, in particular to a clamp mechanism capable of positioning and fixing various substrates.
Background
Semiconductor function circuit product is various, and the size is different, and thickness differs, and single batch product quantity is not many, and positioning accuracy requires highly, must reach 10um, has brought very big degree of difficulty to actual production. The clamp mechanism for semiconductor laser processing can only position and fix one product for batch production, and although the positioning precision reaches 10um, the clamp mechanism is not suitable for products with various sizes; functional circuit laser beam machining's anchor clamps are of a great variety, and general way is to pasting the location by the side to different product manual works, and fixed product is pasted to the manual work, and its shortcoming is the positioning accuracy who hardly guarantees 10um, pastes and to lean on the limit consuming time and wasting power, inefficiency, and the product change is comparatively frequent again, and manual fixed product uniformity of pasting is difficult to guarantee. Therefore, it is necessary to design a fixture mechanism capable of positioning and fixing various substrates for semiconductor functional circuit laser processing equipment.
Disclosure of Invention
The invention aims to provide a fixture mechanism capable of positioning and fixing various substrates.
In order to solve the technical problem, the fixture mechanism capable of positioning and fixing various substrates comprises an XY supporting plate, a rotating mechanism, a fine adjustment mechanism, a slide holder, an X positioning near edge and a Y positioning near edge; the slide holder is positioned above the XY supporting plate and is connected with the XY supporting plate through the rotating mechanism; the fine adjustment mechanism comprises a fine adjustment thread pair active adjustment part, a fine adjustment thread pair passive adjustment part and a tension spring; the active adjusting part of the fine adjustment thread pair is fixedly arranged on the XY supporting plate; the fine-tuning screw pair passive adjusting part is fixedly connected with the slide holder; one end of the tension spring is fixedly connected with the XY supporting plate, and the other end of the tension spring is fixedly connected with the slide holder; the knob of the active adjusting part of the fine adjustment thread pair can be rotated to push the passive adjusting part of the fine adjustment thread pair to rotate so as to drive the slide holder to rotate and return under the action of the tension spring; the X positioning leaning edge and the Y positioning leaning edge are mutually and vertically fixed on the slide holder; a plurality of vacuum adsorption ports are distributed on the slide holder, and each vacuum adsorption port is connected with an external vacuum pump.
The rotating mechanism comprises cross roller bearings and a connecting plate; the outer ring of the crossed roller bearing is fixedly connected with the XY supporting plate, and the inner ring of the crossed roller bearing is fixedly connected with the connecting plate; the slide holder is fixedly arranged on the connecting plate.
The vacuum adsorption device is characterized in that a plurality of vacuum channels are distributed in the slide holder, each vacuum channel is communicated with a corresponding vacuum adsorption port on the upper surface of the slide holder through mutually vertical and crossed through grooves, and the vacuum channels are opened at the edge of the slide holder.
The vacuum adsorption device is characterized in that a plurality of vacuum channels are distributed in the slide holder, each vacuum channel is communicated with a corresponding vacuum adsorption port on the upper surface of the slide holder through a plurality of air holes, and the vacuum channels are opened at the edge of the slide holder.
The vacuum channel is provided with a threaded hole at the edge of the slide holder, the threaded hole is connected with the quick-connection plug, the other end of the quick-connection plug is connected with a throttle valve through an air pipe, and the throttle valve is connected with an external vacuum pump.
The X positioning close sides and the Y positioning close sides which are mutually vertical are adopted for preliminary positioning, and then the fine adjustment mechanism is adopted for realizing rotary fine adjustment so as to correct the rotary error of the substrate, so that the positioning precision is high, and the positioning requirement of 10um can be met; the adsorption of the base plate is fixed by adopting a mode of adsorbing a plurality of vacuum adsorption ports, the problems that in the laser processing of a semiconductor functional circuit, products are various, sizes are different, thicknesses are different, the number of single batch products is small, and production is difficult can be solved, various base plates can be reliably and stably fixed, and high-precision positioning of the base plates can be realized.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
FIG. 1 is a schematic diagram of a fixture mechanism for positioning and fixing a plurality of substrates according to the present invention.
Fig. 2 is a partial structural schematic diagram of the present invention.
Fig. 3 is a partial structural schematic diagram of the present invention.
Fig. 4 is a cross-sectional view of the present invention.
Wherein: 1. an XY pallet; 2. a crossed roller bearing; 21. an outer ring; 22. an inner ring; 31. a fine-tuning screw pair active adjusting part; 32. a fine-tuning screw pair passive adjusting part; 4. a tension spring; 5. a connecting plate; 6. a slide stage; 61. a vacuum channel; 62. a through groove; 63. a vacuum adsorption port; 71. positioning the X against the edge; 72. y positioning the leaning edge; 81. a quick connector; 82. an air tube; 83. a throttle valve.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in FIGS. 1 to 4, the fixture mechanism for fixing a plurality of substrates in a positioning manner comprises an XY supporting plate 1, a rotating mechanism, a fine adjustment mechanism, a slide holder 6, an X positioning leaning edge 71 and a Y positioning leaning edge 72.
The rotating mechanism comprises a crossed roller bearing 2 and a connecting plate 5; the outer ring 21 of the crossed roller bearing 2 is fixedly connected with the XY supporting plate 1 through a screw, and the inner ring 22 is fixedly connected with the connecting plate 5 through a screw.
The fine adjustment mechanism comprises a fine adjustment thread pair active adjustment part 31, a fine adjustment thread pair passive adjustment part 324 and a tension spring 4; the fine adjustment thread pair active adjusting part 31 is fixedly arranged on the XY supporting plate 1 close to the edge; the fine-tuning screw pair passive adjusting part 32 is fixedly connected with the connecting plate 5 through a screw; the tension spring 4 is horizontally arranged between the XY supporting plate 1 and the connecting plate 5 and is close to the edge, one end of the tension spring is fixedly connected with the XY supporting plate 1 through a screw, and the other end of the tension spring is fixedly connected with the connecting plate 5 through a screw; the knob of the active adjusting part 31 of the fine adjustment screw pair can be rotated to push the passive adjusting part 32 of the fine adjustment screw pair to rotate, so that the slide holder 6 is driven to rotate through the connecting plate 5 and return under the action of the tension spring 4.
The slide holder 6 is fixed on the connecting plate 5 through screws; the X positioning leaning edge 71 and the Y positioning leaning edge 72 are mutually and vertically fixed at the upper edge of the slide holder 6; five vacuum adsorption ports 63 are distributed on the upper surface of the slide holder 6, and five vacuum channels 61 are distributed in the slide holder 6; each vacuum channel 61 is communicated with a corresponding vacuum adsorption port 63; the vacuum channel 61 is communicated with the vacuum adsorption port 63 through 2 mutually-perpendicular-crossed through grooves 62 (or one or more air holes); the vacuum channel 61 is provided with a threaded hole at the edge of the slide holder 6; one end of the quick-connection plug 81 is connected with a threaded hole at the edge of the slide holder 6, the other end is connected with a throttle valve 83 through an air pipe 82, and the throttle valve 83 is connected with a vacuum pump.
When in use, a substrate to be produced is placed on the slide holder 6, and two mutually vertical sides of the substrate are close to the X positioning leaning side 71 and the Y positioning leaning side 72; opening a throttle valve 83 corresponding to the vacuum adsorption port 63 in the substrate coverage area according to the size of the substrate to adsorb and fix the substrate; the knob of the fine adjustment screw thread pair active adjustment part 31 is rotated to enable the front end of the knob to prop against the fine adjustment screw thread pair passive adjustment part 32, and under the pulling force of the tension spring 4 and the rotation action of the crossed roller bearing 2, the connecting plate 5 drives the slide holder 6 to rotate, so that the rotation fine adjustment function of the substrate can be realized, and the rotation error of the substrate can be corrected.
The invention can reliably and stably fix various rectangular or square substrates of 40X40 mm-165X 165mm, and realizes high-precision positioning and fixing of the substrates.

Claims (5)

1. A fixture mechanism capable of positioning and fixing a plurality of substrates is characterized by comprising an XY supporting plate (1), a rotating mechanism, a fine adjustment mechanism, a slide holder (6), an X positioning leaning edge (71) and a Y positioning leaning edge (72); the slide holder (6) is positioned above the XY supporting plate (1) and is connected with the XY supporting plate (1) through the rotating mechanism; the fine adjustment mechanism comprises a fine adjustment screw thread pair active adjustment part (31), a fine adjustment screw thread pair passive adjustment part (32) and a tension spring (4); the fine adjustment thread pair active adjusting part (31) is fixedly arranged on the XY supporting plate (1); the fine-tuning screw pair passive adjusting part (32) is fixedly connected with the slide holder (6); one end of a tension spring (4) is fixedly connected with the XY supporting plate (1), and the other end of the tension spring is fixedly connected with the slide holder (6); the knob of the active adjusting part (31) of the fine adjustment thread pair can be rotated to push the passive adjusting part (32) of the fine adjustment thread pair to rotate so as to drive the slide holder (6) to rotate and return under the action of the tension spring (4); the X positioning leaning edge (71) and the Y positioning leaning edge (72) are mutually and vertically fixed on the slide holder (6); a plurality of vacuum adsorption ports (63) are distributed on the slide holder (6), and each vacuum adsorption port (63) is connected with an external vacuum pump.
2. The fixture mechanism for holding a plurality of substrates in a positionable manner according to claim 1, wherein said rotation mechanism comprises cross-roller bearings (2) and a web (5); an outer ring (21) of the crossed roller bearing (2) is fixedly connected with the XY supporting plate (1), and an inner ring (22) is fixedly connected with the connecting plate (5); the slide holder (6) is fixedly arranged on the connecting plate (5).
3. The clamping mechanism for fixing multiple substrates in a positionable manner according to claim 1, wherein a plurality of vacuum channels (61) are distributed inside the stage (6), each vacuum channel (61) is communicated with a corresponding vacuum suction port (63) on the upper surface of the stage (6) through mutually perpendicularly crossed through grooves (62), and the vacuum channels (61) are opened at the edge of the stage (6).
4. The clamping mechanism for fixing multiple substrates in a positionable manner according to claim 1, wherein a plurality of vacuum channels (61) are distributed inside the stage (6), each vacuum channel (61) is communicated with a corresponding vacuum suction port (63) on the upper surface of the stage (6) through a plurality of air holes, and the vacuum channels (61) are opened at the edge of the stage (6).
5. The clamping mechanism for fixing multiple substrates in a positionable manner according to claim 3 or 4, wherein the vacuum channel (61) is provided with a threaded hole at the edge of the slide holder (6), the threaded hole is connected with the quick-connect connector (81), the other end of the quick-connect connector (81) is connected with the throttle valve (83) through the air pipe (82), and the throttle valve (83) is connected with an external vacuum pump.
CN202010253359.5A 2020-04-02 2020-04-02 Clamp mechanism capable of positioning and fixing various substrates Pending CN111299876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010253359.5A CN111299876A (en) 2020-04-02 2020-04-02 Clamp mechanism capable of positioning and fixing various substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010253359.5A CN111299876A (en) 2020-04-02 2020-04-02 Clamp mechanism capable of positioning and fixing various substrates

Publications (1)

Publication Number Publication Date
CN111299876A true CN111299876A (en) 2020-06-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010253359.5A Pending CN111299876A (en) 2020-04-02 2020-04-02 Clamp mechanism capable of positioning and fixing various substrates

Country Status (1)

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CN (1) CN111299876A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102087485A (en) * 2010-12-30 2011-06-08 中国科学院光电技术研究所 Micro-rotation mechanism for silicon wafer stage of projection photoetching machine
CN203185174U (en) * 2013-03-30 2013-09-11 歌尔声学股份有限公司 Vacuum absorption fixing platform
CN204278678U (en) * 2014-05-29 2015-04-22 深圳市远洋翔瑞机械股份有限公司 A kind of adhesive film of touch screen vacuum absorption device
DE202019104043U1 (en) * 2019-07-22 2019-08-01 Trumpf Sachsen Gmbh Mechanical arrangement for processing plate-like workpieces, in particular sheets
CN209408034U (en) * 2018-10-31 2019-09-20 大族激光科技产业集团股份有限公司 A kind of station dial mechanism

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102087485A (en) * 2010-12-30 2011-06-08 中国科学院光电技术研究所 Micro-rotation mechanism for silicon wafer stage of projection photoetching machine
CN203185174U (en) * 2013-03-30 2013-09-11 歌尔声学股份有限公司 Vacuum absorption fixing platform
CN204278678U (en) * 2014-05-29 2015-04-22 深圳市远洋翔瑞机械股份有限公司 A kind of adhesive film of touch screen vacuum absorption device
CN209408034U (en) * 2018-10-31 2019-09-20 大族激光科技产业集团股份有限公司 A kind of station dial mechanism
DE202019104043U1 (en) * 2019-07-22 2019-08-01 Trumpf Sachsen Gmbh Mechanical arrangement for processing plate-like workpieces, in particular sheets

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Application publication date: 20200619

RJ01 Rejection of invention patent application after publication