CN112476295A

CN112476295A - Vacuum adsorption device

Info

Publication number: CN112476295A
Application number: CN202011473293.7A
Authority: CN
Inventors: 张桐
Original assignee: Bazhou Yungu Electronic Technology Co ltd
Current assignee: Bazhou Yungu Electronic Technology Co ltd
Priority date: 2020-12-15
Filing date: 2020-12-15
Publication date: 2021-03-12
Anticipated expiration: 2040-12-15
Also published as: CN112476295B

Abstract

The invention provides a vacuum adsorption device for adsorbing a plate, which comprises: the adsorption platform is provided with a contact surface, a plurality of vacuum holes and a first channel, the contact surface is in contact with the plate, the vacuum holes are arranged on the contact surface, the first channel is positioned inside the adsorption platform, and the vacuum holes are respectively communicated with the first channel; adjusting a rod; the sealing structure is connected to one end of the adjusting rod; the adjusting rod drives the sealing structure to slide in the first channel so as to adjust the length of the vacuumizing section in the first channel.

Description

Vacuum adsorption device

Technical Field

The present invention relates to a vacuum adsorption apparatus, and more particularly, to a vacuum adsorption apparatus capable of automatically adjusting an adsorption range.

Background

In the manufacture of flat panel displays such as PDP, LCD and OLED, the large-sized substrate in the former process is generally cut and divided in the latter process to produce the smaller-sized flat panel display, and the vacuum adsorption worktable is usually used to adsorb and hold the substrate to be processed in the cutting and dividing process of the glass substrate. Similarly, vacuum suction tables are also widely used in the processing of other flat-plate workpieces such as PCBs, wafers, optical wafers, and the like. In actual production, the specification and size of flat-panel workpieces such as substrates of flat-panel displays are changed, that is, a vacuum adsorption worktable of a certain specification and size is required to be compatible with flat-panel workpieces of the maximum size and below of the specification. However, the traditional method for plugging the vacuum holes by using the vacuum adsorption workbench is inconvenient to use, is easy to leak air and has poor sealing effect.

Disclosure of Invention

The invention aims to provide a vacuum adsorption device which is simple in structure and low in cost and is adaptive to the size of a substrate.

In order to achieve the above object, the present invention provides a vacuum adsorption apparatus for adsorbing a plate material, the vacuum adsorption apparatus comprising: the adsorption platform is provided with a contact surface, a plurality of vacuum holes and a first channel, the contact surface is in contact with the plate, the vacuum holes are arranged on the contact surface, the first channel is positioned inside the adsorption platform, and the vacuum holes are respectively communicated with the first channel; adjusting a rod; the sealing structure is connected to one end of the adjusting rod; the adjusting rod drives the sealing structure to slide in the first channel so as to adjust the length of the vacuumizing section in the first channel. The length of the vacuumizing section in the first channel is adjusted by moving the adjusting rod and the sealing structure in the channel, so that the vacuum adsorption device can carry out vacuum adsorption on plates with different sizes and shapes.

As an optional technical scheme, a first convex block is arranged on a first end face of the adjusting rod; a second recess is provided on a second end face of the seal structure; the first projection is detachably connected with the second recess. The first convex block is arranged on the adjusting rod, and the second concave part is arranged on the sealing structure, so that the process is easier to realize, and the structure is simpler. Adjust pole and detachable the connection of sealing member, improved the utilization ratio of adjusting the pole, avoid the loss of sealing member.

As an optional technical solution, the first protrusion may be inserted into the second recess, and the adjustment lever is rotated in a first direction, so that the first protrusion and the second recess may be locked with each other; rotating the adjusting rod along a second direction, wherein the first convex block and the second concave part can be unlocked, and the first convex block is disengaged from the second concave part; wherein the first direction and the second direction are opposite. An embodiment of a detachable connection of an adjustment lever and a sealing structure is provided, the rotatable detachable connection facilitating the user's handling as an alternative solution, the plurality of vacuum holes being regularly arranged on the contact surface. This arrangement facilitates adjustment of the evacuation section.

As an optional technical solution, the first channel is a straight-bar channel; preferably, the number of the first channels is at least two; preferably, at least two of the first channels are spaced apart. The structure of the straight strip-shaped channel is beneficial to the adjusting rod to drive the sealing structure to slide in the channel, so that the length of the vacuumizing section is adjusted conveniently and controllably.

As an optional technical scheme, the adsorption platform further comprises a second channel arranged in the adsorption platform, the plurality of vacuum holes are communicated with the second channel, and the second channel is intersected with at least one first channel and is communicated with the first channel; the adjusting rod drives the sealing structure to slide in the second channel so as to adjust the length of the vacuumizing section in the second channel. The first channel and the second channel are arranged to facilitate adjustment of the vacuumizing section at any position of the adsorption platform, and the universality of the vacuum adsorption device is improved.

As an optional technical solution, the number of the second channels is at least two, and at least two of the second channels are straight channels; preferably, at least two of the second channels are arranged at intervals; preferably, the second channel intersects the first channel perpendicularly. The vacuum pumping sections at any positions of the adsorption platform can be conveniently adjusted through the vertical crossed straight strip-shaped first channel and the straight strip-shaped second channel, and the universality of the vacuum adsorption device is improved.

As an optional technical scheme, the outer surface of the adjusting rod is provided with scale marks. By reading the scale marks, whether the adjusting rod moves the sealing structure to the target position or not can be directly judged, and the adjusting efficiency is improved. In addition, based on set up the scale mark on the outer wall of regulation pole, the user carries out quantization management to the vacuum hole on the adsorption platform of being convenient for.

As an alternative solution, the sealing structure comprises a sealing element, and there is no gap between the sealing element and the inner wall of the first channel. Because there is not the clearance between the inner wall of sealing member and first passageway, follow-up when carrying out evacuation processing to the evacuation district section, do not have the problem of gas leakage, can promote the adsorption stability of adsorption platform to different size panels.

As an optional technical scheme, a groove is formed in the outer wall of the sealing structure, and the sealing element is accommodated in the groove; preferably, the seal is a sealing ring. The sealing ring is arranged in the groove, on one hand, the groove can limit the sealing ring and prevent the sealing ring from falling off in the sliding process of the sealing structure; on the other hand, the assembling operation of the sealing ring is convenient.

Compared with the prior art, the vacuum adsorption device provided by the invention has the advantages that the sealing element is driven by the adjusting rod to move in the channel in the adsorption platform so as to adjust the length of the vacuum extraction section in the channel, and the adsorption platform can adsorb plates with different sizes and shapes in a vacuum manner.

The invention is described in detail below with reference to the drawings and specific examples, but the invention is not limited thereto.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

Fig. 1 is a schematic view of a vacuum adsorption apparatus according to an embodiment of the present invention.

Fig. 2 is a partial cross-sectional view of the vacuum adsorption device shown in fig. 1.

Fig. 3 is a schematic partial cross-sectional view of the vacuum adsorption device in fig. 1 in a use state.

FIG. 4 is a partial cross-sectional view of the vacuum suction apparatus shown in FIG. 3 with the adjustment rod removed.

Fig. 5 and 6 are schematic views of an adjusting rod and a sealing structure of a vacuum suction apparatus according to an embodiment of the present invention at different viewing angles.

Fig. 7 is a schematic view illustrating the combination of the adjustment rod and the sealing structure of the vacuum adsorption device according to an embodiment of the present invention.

Fig. 8 is a schematic view of a sealing structure of a vacuum adsorption apparatus according to another embodiment of the present invention.

Fig. 9 is a schematic cross-sectional view illustrating an adjustment lever and a sealing structure of a vacuum adsorption apparatus according to another embodiment of the present invention.

Fig. 10 is a schematic sectional view illustrating an adjustment lever and a sealing structure of a vacuum adsorption apparatus according to still another embodiment of the present invention.

Fig. 11 is a schematic sectional view illustrating an adjustment lever and a sealing structure of a vacuum adsorption apparatus according to still another embodiment of the present invention.

Fig. 12 is a schematic view of a suction platform of a vacuum suction apparatus according to another embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

Aiming at the sizes and the shapes of different flat-plate workpieces, the arrangement position of a vacuum hole of the vacuum adsorption workbench needs to be adjusted to a certain degree. The inventor finds that in long-term research work, the traditional technical solution of the vacuum adsorption workbench is to cover the area of a vacuum hole on the workbench, where a flat-plate-type workpiece is not placed, with a plastic film, an adhesive tape or other materials, and seal the vacuum hole uncovered by the flat-plate-type workpiece, so as to avoid air leakage, but in this way, the problems of air leakage, inconvenience in use, low efficiency and poor sealing effect are easily caused.

Based on the above, the present invention provides a vacuum adsorption device with simple structure and low cost, which is adaptive to the size of the substrate, and can be seen in detail below.

As shown in fig. 1 to 3, the vacuum adsorption apparatus 100 according to the present invention is used for adsorbing a plate material (not shown), and includes: the plate adsorption device comprises an adsorption platform 10, an adjusting rod 20 and a sealing structure 30, wherein the adsorption platform 10 is provided with a contact surface 13, a plurality of vacuum holes 11 and a first channel 12, the contact surface 13 is used for contacting a plate, the plurality of vacuum holes 11 are positioned on the contact surface 13, the first channel 12 is positioned inside the adsorption platform 10, and the plurality of vacuum holes 11 are communicated with the first channel 12; the sealing structure 30 is connected to one end of the adjustment lever 20; wherein, the adjusting rod 20 drives the sealing structure 30 to slide in the first channel 12, so as to adjust the length of the vacuum-pumping section S in the first channel 12.

It is understood that the sealing structure 30 is connected to one end of the adjustment rod 20, which means that the sealing structure 30 can be fixedly connected to one end of the adjustment rod 20, or the sealing structure 30 can be detachably connected to one end of the adjustment rod 20, which can be set according to the actual situation and is not limited in detail.

In this embodiment, the length of the vacuum-pumping section S in the first passage 12 is adjusted by controlling the length of the adjustment rod 20 inserted into the first passage 12 such that the sealing structure 30 on one end of the adjustment rod 20 stays at different positions in the first passage 12. Since the length of the vacuum-pumping section S is substantially matched with the sizes of different plates, the vacuum suction apparatus 100 can be applied to plates with different sizes and shapes.

In other words, the vacuum adsorption device of the invention drives the sealing element to move in the channel in the adsorption platform through the adjusting rod, and adjusts the length of the vacuumizing section in the channel, thereby realizing the vacuum adsorption of plates with different sizes and shapes by the adsorption platform.

In a preferred embodiment, the plate is, for example, a substrate of a display, an optical film, a circuit board, etc.

As shown in fig. 2 and 3, when the lengths of the vacuum-pumping sections S are different, the number of the corresponding vacuum holes 11 is different, wherein the longer the length of the vacuum-pumping section S, the greater the number of the vacuum holes 11 corresponding to the vacuum-pumping section S.

In a preferred embodiment, the first channel 12 is a straight channel. The straight strip-shaped channel structure is beneficial to the adjusting rod 20 to drive the sealing structure 30 to slide in the channel, so that the length adjustment of the vacuumizing section S is convenient and controllable.

As shown in fig. 1, the number of the first channels 12 inside the adsorption platform 10 is at least two, and preferably, at least two first channels 12 are arranged at intervals, preferably, in parallel on the XY plane of the adsorption platform 10, wherein, when the adsorption platform 10 is rectangular, at least two first channels 12 are arranged in parallel along the long side direction, the short side direction or the diagonal direction of the rectangle.

With continued reference to fig. 1, the plurality of vacuum holes 11 are regularly arranged on the contact surface 13, the plurality of vacuum holes 11 are arranged in a matrix, the plurality of vacuum holes 11 in each row of the matrix are communicated with the same first channel 12, and the plurality of vacuum holes 11 in each column of the matrix are respectively communicated with the corresponding plurality of first channels 12.

In other embodiments of the present invention, the shape of the plurality of vacuum holes regularly arranged on the contact surface may be concentric circles, a hexagon, an octagon, etc.

In other embodiments of the present invention, the plurality of vacuum holes may also be randomly arranged on the contact surface of the adsorption platform, for example, the distribution density of the vacuum holes in the central region of the contact surface is greater than that in the peripheral region, or the distribution density of the vacuum holes in the corners of the contact surface is greater than that in other regions.

It should be noted that the arrangement of the plurality of vacuum holes 11 on the contact surface 13 is controlled so that the vacuum platform 10 can be used for adsorbing regular boards or irregular boards. In addition, the hole diameters of the plurality of vacuum holes 11 on the contact surface 13 of the adsorption platform 10 may be the same or different.

As shown in fig. 1, 5 and 6, the adjustment lever 20 is, for example, a straight bar-shaped lever body, which is preferably cylindrical. In a preferred embodiment, the shapes of the adjustment rod 20 and the sealing structure 30 are adapted to the shape of the first passage 12, respectively, so as to improve the smoothness of the sliding of the adjustment rod 20 and the sealing structure 30 in the first passage 12.

As shown in fig. 5 to 6, a first protrusion 21 is disposed on the first end surface 23 of the adjustment lever 20; a second recess 32 is provided on a second end face 33 of the sealing structure 30, the second end face 33 is opposite to the first end face 23, wherein the first protrusion 21 is detachably engaged with the second recess 32, i.e. the sealing structure 30 is detachably connected to one end of the adjustment rod 20.

As shown in fig. 7, when the first protrusion 21 moves to the vicinity of the second recess 32, the adjustment lever 20 is rotated in a first direction (e.g., clockwise or counterclockwise), and the first protrusion 21 is locked with the second recess 32.

Further, after the first protrusion 21 is locked with the second recess 32, the adjustment lever 20 is rotated in the second direction, which is opposite to the first direction, to unlock the first protrusion 21 from the second recess 32, that is, to disengage the first protrusion 21 from the second recess 32. At this time, the adjustment lever 20 and the sealing structure 30 are separated from each other, the adjustment lever 20 is pulled, which can be individually withdrawn from the first passage 12, and the sealing structure 30 is individually stayed in the first passage 12.

In the present invention, the sealing structure 30 and the adjustment lever 20 are designed as two separate elements, and the two separate elements are detachably coupled to each other. Due to the detachable connection of the sealing structure 30 and the adjustment rod 20, on the one hand, the sealing structure 30 can be preassembled separately into each first passage 12, avoiding the loss of the sealing structure 30; on the other hand, after the adjustment rod 20 drives the sealing structure 30 to move to the target position, the adjustment rod is unlocked from the sealing structure 30, and can be reinserted into the other first passages 12 and be locked with the sealing structures 30 pre-installed in the other first passages 12, so as to adjust the sealing structures 30 in the other first passages 12 to the target position, thereby significantly improving the utilization efficiency of the adjustment rod 20 and reducing the manufacturing cost of the vacuum adsorption device 100.

As shown in fig. 2 to 4, after the adjustment rod 20 is inserted into the first passage 12 and the first protrusion 21 is locked with the second recess 32, the adjustment rod 20 drives the sealing structure 30 to slide to a predetermined position, the locking between the first protrusion 21 and the second recess 32 is released, and the adjustment rod 20 is pulled out from the first passage 12. At this time, the first passage 12 is divided by the sealing structure 30 into a first evacuation section S1 and a second evacuation section S2, wherein the first evacuation section S1 and the second evacuation section S2 are independent of each other. When the suction machine sucks a vacuum from either end of the first passage 12, the first and second vacuum-sucking sections S1 and S2 may form a vacuum, and may vacuum-suck the plate materials of different sizes and shapes at the corresponding positions of the contact surface 13 of the adsorption platform 10.

As shown in fig. 5 and 6, the first bump 21 protrudes from the first end surface 23 and is opposite to the first end surface 23, a first connection portion 24 is further disposed between the first bump 21 and the first end surface 23, the first connection portion 24 protrudes from an edge of the first end surface 23 and is connected to an edge of the first bump 21, wherein a side surface 211 of the first bump 21 protrudes from a side surface 241 of the first connection portion 24, so that the first bump 21 is suspended above the first end surface 23. In addition, the first protrusion 21, the first connection portion 24, and the first end surface 23 collectively define a first recess 22.

In this embodiment, the first protrusion 21 is, for example, a semicircular plate, an edge of the semicircular plate is connected to the first connection portion 24, and the semicircular plate is substantially perpendicular to the first connection portion 24 to form an "L" shape.

The second end surface 33, the second connection portion 34, and the second bump 31 of the sealing member 30 together define a second recess 32, wherein the second connection portion 34 is disposed between the second bump 31 and the second end surface 33, the second connection portion 34 protrudes outward from an edge of the second end surface 33 and is connected to an edge of the second bump 31, and a side surface 311 of the second bump 31 protrudes from a side surface 341 of the second connection portion 34, so that the second bump 31 is suspended on the second end surface 33.

In this embodiment, the second protrusion 31 is, for example, a semicircular plate, an edge of the semicircular plate is connected to the second connection portion 34, and the semicircular plate is substantially perpendicular to the second connection portion 34 to form an "L" shape.

As shown in fig. 5 and 6, the adjustment lever 20 has a central axis C1, the seal structure 30 has a central axis C2, and the central axis C1 and the central axis C2 coincide with each other when the adjustment lever 20 and the seal structure 30 are interlocked, wherein the first protrusion 21 and the second protrusion 31 are symmetrically distributed on both sides of the central axis C1 (or the central axis C2) with the central axis C1 (or the central axis C2) as a center.

As shown in fig. 7, the first projection 21 of the adjustment lever 20 is opposite to the second recess 32 near and across the second projection 31 of the sealing structure 30, and the second projection 31 of the sealing structure 30 is opposite to the first recess 22 of the adjustment lever 20, and at this time, the adjustment lever 20 is rotated in the first direction, the first projection 21 is caught in the second recess 32, the second projection 31 is caught in the first recess 31, and the adjustment lever 20 and the sealing structure 30 are locked to each other.

As can be seen from fig. 4, if the lock between the adjustment lever 20 and the seal structure 30 needs to be released, the adjustment lever 20 is rotated in the second direction, the first projection 21 is unscrewed from the second recess 32, the second projection 31 is disengaged from the first recess 22, the adjustment lever 20 and the seal structure 30 are unlocked, and at this time, the adjustment lever 20 and the seal structure 30 are separated from each other by pulling the adjustment lever 20.

It should be noted that the embodiment of the detachable connection of the adjustment lever 20 and the sealing structure 30 is not limited to the structure illustrated in fig. 5 and 6.

As shown in fig. 9, in an embodiment of the present invention, a convex column 2011 protrudes from a first end surface of the adjustment rod 201, and the convex column 2011 has an external thread 2012; the second end face of the sealing structure 301 forms a concave assembly cavity 3011, and an inner thread 3012 is arranged on the inner wall of the assembly cavity 3011; wherein the internal thread 3012 and the external thread 2012 are adapted to each other, such that the adjustment rod 201 is detachably connected to the sealing structure 301.

As shown in fig. 10, in an embodiment of the present invention, a T-shaped engaging portion 2021 protrudes from a first end surface of the adjusting lever 202; the second end face of the sealing member 302 has an opening 3021 and a housing cavity 3022 communicating with the opening 3021; the front end of the T-shaped engaging portion 2021 is inserted into the receiving cavity 3022 from the opening 3021, the adjusting rod 202 is rotated, the front end of the T-shaped engaging portion 2021 intersects with the opening 3021 at a certain angle, the portion of the second end surface excluding the opening 3021 prevents the front end of the T-shaped engaging portion 2021 from coming out of the opening 3021, and the adjusting rod 202 and the sealing structure 302 are locked to each other.

When unlocking, the adjustment lever 202 is rotated so that the tip of the T-shaped engagement portion 2021 and the opening 3021 overlap each other, the tip of the T-shaped engagement portion 2021 is disengaged from the opening 3021, and the adjustment lever 202 and the seal structure 302 are unlocked.

As shown in fig. 11, in an embodiment of the present invention, an L-shaped hook 2031 protrudes from the first end surface 2031 of the adjustment lever 203; a second end surface 3032 of the sealing member 303 protrudes out of a U-shaped clamping groove 3031, the opening of the U-shaped clamping groove 3031 faces to the second end surface 3032, and a hole portion 3033 is formed between the U-shaped clamping groove 3031 and the second end surface 3032; the "L" shaped hook 2031 is inserted into the hole portion 3033 so that the adjustment lever 203 is detachably coupled to the sealing structure 303.

Of course, there are many embodiments of the detachable connection of the adjustment rod and the sealing structure, and any structure that can satisfy the detachable connection of the adjustment rod and the sealing structure in the first passage is suitable for the present invention.

As shown in fig. 5 and 6, the sealing structure 30 further includes a sealing member 40, and when the sealing structure 30 is received in the first passage 12 of the adsorption platform 10, the sealing member 40 is tightly or interference-fitted with an inner wall of the first passage 12. Preferably, the sealing member 40 is made of an elastic material, such as silica gel, rubber, etc., the elastic material is extruded by the inner wall of the first channel 12 and is properly deformed, the elastic material elastically abuts against the inner wall of the first channel 12 due to the resilience of the elastic material, no gap exists between the inner wall of the first channel 12 and the elastic material, and when the vacuum pumping section S is subjected to vacuum pumping, the problem of air leakage does not exist, so that the adsorption stability of the adsorption platform to plates with different sizes can be improved.

It will be appreciated that the outer wall of the sealing structure 30 is provided with a recess in which the sealing member 40 is received to further facilitate the evacuation process in subsequent operations.

In this embodiment, the sealing member 40 may be a sealing ring, such as a silicone sealing ring. Corresponding to the silica gel sealing ring, a groove is arranged on the outer wall of the sealing structure 30, the silica gel sealing ring is sleeved on the outer wall surface and is accommodated in the groove, wherein the outer diameter of the silica gel sealing ring is larger than the inner diameter of the first channel 12. The silica gel sealing ring is arranged in the groove, on one hand, the groove can limit the silica gel sealing ring to prevent the silica gel sealing ring from falling off in the sliding process of the sealing structure 30; on the other hand, the assembly operation of silica gel sealing washer is convenient for.

In a preferred embodiment, the number of the silicone sealing rings is plural, the number of the grooves is plural, and the grooves are arranged at intervals, so that the silicone sealing rings are respectively accommodated in the grooves arranged at intervals. Even, because of one of them silica gel sealing washer produces the problem, still can maintain that subsequent evacuation is handled and is not influenced, improved vacuum adsorption device's tolerance and stability.

In another embodiment of the present invention, as shown in fig. 8, a sealing member 40 'such as an elastic block is coupled to a second end surface of the sealing mechanism 30' away from the first end surface, the shape of the elastic block is adapted to the shape of the first channel 12 (as shown in fig. 2), and an outer surface of the elastic block is elastically pressed against an inner wall of the first channel 12, so that there is no gap between the inner wall of the first channel 12 and the outer surface of the elastic block.

As shown in fig. 3 and 5, the outer wall surface of the adjustment lever 20 is provided with scale marks 25. The length of the evacuation section S in each first passage 12 is calculated according to the length of the first passage 12 and the size and shape of the plate placed on the contact surface 13 of the adsorption platform 10, the difference between the length of the evacuation section S and the length of the first passage 12 is calculated, the adjustment rod 20 is inserted into the first passage 12, and when the scale mark 25 shows the same size as the above difference, it is indicated that the sealing structure 30 is moved to the target position. That is, whether the seal structure 30 is moved to the target position by the adjustment lever 20 can be directly judged by reading the scale marks 25, and the adjustment efficiency is improved. In addition, the scale marks 25 are provided on the outer wall surface of the adjusting rod 20, so that the user can conveniently manage the vacuum holes on the adsorption platform 10 in a quantitative manner.

As shown in fig. 12, in a vacuum adsorption apparatus 2000 provided in another embodiment of the present invention, an adsorption platform 2001 includes a plurality of vacuum holes 2002, a first passage 2003, a second passage 2004; a plurality of vacuum holes 2002 are provided on the contact surface of the adsorption platform 2001, wherein each vacuum hole 2002 communicates with at least a first channel 2003 and/or a second channel 2004.

In a preferred embodiment, the number of the second channels 2004 is at least two, at least two of the second channels 2004 are straight channels, and at least two of the second channels 2004 are spaced on the XY plane of the adsorption platform 2001. In addition, the arrangement of the at least two second channels 2004 may refer to the arrangement of the first channels 12 in the vacuum adsorption device 100, which is not described in detail herein. In a preferred embodiment, the first channels 2003 and the second channels 2004 intersect, and preferably, each second channel 2004 is in communication with at least one first channel 2003.

In a preferred embodiment, when the first passage 2003 and the second passage 2004 perpendicularly intersect, the intersection of the first passage 2003 and the second passage 2004 communicate with each other, and the vacuum hole 2002 at the intersection communicates with both the first passage 2003 and the second passage 2004.

As can be understood from fig. 1 to 7, when the number of the first passages 2003 and the second passages 2004 is at least two, respectively, the seal structure 30 may be pre-assembled in each of the first passages 2003 and each of the second passages 2004. Wherein one or more adjustment rods 20 are inserted into the plurality of first channels 2003 and/or the plurality of second channels 2004 in several times and locked with the corresponding sealing structures 30, and then the length of the vacuum-pumping section in each first channel 2003 and each second channel 2004 is adjusted to fit the sheets of different shapes and sizes. Namely, the vacuum adsorption device is internally provided with the first channel and the second channel which are intersected, so that the vacuum adsorption device is suitable for vacuum adsorption of plates with different shapes and sizes, and the universality of the vacuum adsorption device is improved.

In summary, the invention provides a vacuum adsorption device, which drives a sealing element to move in a channel in an adsorption platform through an adjusting rod, adjusts the length of a vacuum extraction section in the channel, realizes that the adsorption platform adsorbs plates with different sizes and shapes in vacuum, and has the advantages of simple structure and convenient adjustment.

The present invention has been described in relation to the above embodiments, which are only exemplary of the implementation of the present invention. Furthermore, the technical features mentioned in the different embodiments of the present invention described above may be combined with each other as long as they do not conflict with each other. It is to be noted that the present invention may take various other embodiments, and that various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the invention.

Claims

1. A vacuum adsorption device for adsorbing a plate material, comprising:

the adsorption platform is provided with a contact surface, a plurality of vacuum holes and a first channel, the contact surface is in contact with the plate, the vacuum holes are arranged on the contact surface, the first channel is positioned inside the adsorption platform, and the vacuum holes are respectively communicated with the first channel;

adjusting a rod;

the sealing structure is connected to one end of the adjusting rod;

the adjusting rod drives the sealing structure to slide in the first channel so as to adjust the length of the vacuumizing section in the first channel.

2. The vacuum chuck as claimed in claim 1, wherein the first end of the adjusting rod is provided with a first protrusion; a second recess is provided on a second end face of the seal structure; the first projection is detachably connected with the second recess.

3. The vacuum chuck as claimed in claim 2, wherein the first protrusion is inserted into the second recess, and the adjusting lever is rotated in a first direction, so that the first protrusion and the second recess are locked with each other; rotating the adjusting rod along a second direction, wherein the first convex block and the second concave part can be unlocked, and the first convex block is disengaged from the second concave part; wherein the first direction and the second direction are opposite.

4. The vacuum adsorption device of claim 1, wherein the plurality of vacuum holes are regularly arranged on the contact surface.

5. The vacuum adsorption device of claim 1, wherein the first channel is a straight channel;

preferably, the number of the first channels is at least two;

preferably, at least two of the first channels are spaced apart.

6. The vacuum chucking device of claim 5, further comprising a second channel disposed within said chuck table, said plurality of vacuum holes communicating with said second channel, and said second channel intersecting and communicating with at least one of said first channels; the adjusting rod drives the sealing structure to slide in the second channel so as to adjust the length of the vacuumizing section in the second channel.

7. The vacuum adsorption device of claim 6, wherein the number of said second channels is at least two, at least two of said second channels being straight channels;

preferably, at least two of the second channels are arranged at intervals;

preferably, the second channel intersects the first channel perpendicularly.

8. The vacuum chucking device of claim 1, wherein said adjustment stem has scale markings on an outer surface thereof.

9. The vacuum chucking device of claim 1, wherein said sealing structure includes a seal having no gap with an inner wall of said first passage.

10. The vacuum chuck as claimed in claim 9, wherein the sealing structure has a groove formed on an outer wall thereof, and the sealing member is received in the groove;

preferably, the seal is a sealing ring.