CN114188251B - Automatic PIN inserting production system for IGBT - Google Patents

Automatic PIN inserting production system for IGBT Download PDF

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Publication number
CN114188251B
CN114188251B CN202111589283.4A CN202111589283A CN114188251B CN 114188251 B CN114188251 B CN 114188251B CN 202111589283 A CN202111589283 A CN 202111589283A CN 114188251 B CN114188251 B CN 114188251B
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China
Prior art keywords
pin
needle
clamping jaw
feeding
clamping
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CN202111589283.4A
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Chinese (zh)
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CN114188251A (en
Inventor
王燕平
秦志强
刘锋
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Tsugami Auto Intelligent Technology Jiangsu Co ltd
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Tsugami Auto Intelligent Technology Jiangsu Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67138Apparatus for wiring semiconductor or solid state device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/6776Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers

Abstract

The invention discloses an automatic PIN inserting production system for an IGBT, which comprises a feeding conveying line, a material conveying robot, a clamping tool, a material cutting mechanism, a PIN inserting mechanism and a discharging conveying line, wherein the feeding conveying line is connected with the PIN inserting mechanism; the discharging end of the feeding conveying line corresponds to a clamping tool through the clamping end of the feeding robot; the cutting end of the cutting mechanism corresponds to the needle picking end of the needle inserting mechanism, the needle picking end of the needle inserting mechanism transfers the material needle to the needle inserting end of the needle inserting mechanism, and the needle inserting end of the needle inserting mechanism inserts the material needle into a workpiece clamped by the clamping tool; the clamping end of the clamping tool corresponds to the feeding end of the discharging conveying line through the clamping end of the material conveying robot; the PIN can be inserted quickly and accurately automatically, and the production efficiency can be effectively improved; through setting up pick-up position and contact pin position at the contact pin carousel, make pick-up insert clamping jaw centre gripping material needle rotate and pass through pick-up position and contact pin position in proper order to press from both sides in corresponding position and get or contact pin, form the streamlined operation, further improved production efficiency.

Description

Automatic PIN inserting production system for IGBT
Technical Field
The invention relates to the technical field of automatic PIN insertion, in particular to an automatic PIN insertion production system for an IGBT.
Background
The IGBT (insulated gate bipolar transistor) is a composite fully controlled voltage driven power semiconductor device composed of a BJT (bipolar transistor) and a MOS (insulated gate field effect transistor); the PIN inserting work is usually completed manually in the current production, the efficiency of the processing mode is extremely low, the condition of missing insertion and misplug easily occurs in long-time manual operation, meanwhile, due to the fact that the material needle is smaller, the PIN is easy to insert and bend during interference installation, and waste parts are caused. The defects result in large manual PIN insertion workload and high cost.
Disclosure of Invention
The invention aims to: in order to overcome the defects in the prior art, the invention provides an automatic PIN inserting production system for an IGBT, which can realize automatic PIN inserting, has high yield and effectively improves production efficiency.
The technical scheme is as follows: in order to achieve the above purpose, the automatic PIN inserting production system for the IGBT comprises a feeding conveying line, a material conveying robot, a clamping tool, a material cutting mechanism, a PIN inserting mechanism and a discharging conveying line; the discharging end of the feeding conveying line corresponds to a clamping tool through the clamping end of the feeding robot; the cutting end of the cutting mechanism corresponds to the needle picking end of the needle inserting mechanism, the needle picking end of the needle inserting mechanism transfers the material needle to the needle inserting end of the needle inserting mechanism, and the needle inserting end of the needle inserting mechanism inserts the material needle into a workpiece clamped by the clamping tool; the clamping end of the clamping tool, which is used for conveying the materials, corresponds to the feeding end of the discharging conveying line.
Further, the feeding conveying line and the discharging conveying line are both provided with a static eliminating mechanism, and the static eliminating mechanism is used for carrying out static eliminating treatment on workpieces transported on the feeding conveying line and the discharging conveying line.
Further, the static electricity removing mechanism is provided with a proximity sensor and a pneumatic stop; the proximity sensor corresponds to a workpiece transported on the feeding conveying line, when the workpiece reaches the position of the static removing mechanism, the pneumatic stop device supports the workpiece to leave the feeding conveying line, and after the workpiece is subjected to static removing treatment, the pneumatic stop device returns the workpiece to the feeding conveying line.
Further, the material conveying robot clamps a workpiece through a first clamping jaw at the end part; the first clamping jaw is provided with a 2D camera.
Further, the clamping tool comprises an X-axis module, a Y-axis module and a positioning table; the X-axis module and the Y-axis module are driven by a motor, and the positioning table can move in the X-axis direction and the Y-axis direction through the X-axis module and the Y-axis module; the positioning table is provided with a positioning pin and a compression cylinder; the locating pin corresponds to the locating hole of work piece, compress tightly the cylinder drive and connect in the compact heap, the compact heap corresponds to the locating bench.
Further, the material cutting mechanism comprises a needle feeding module, a material feeding frame, a second clamping jaw, a third clamping jaw and a fourth clamping jaw; the feeding frame is inserted with a material needle, the needle feeding module is connected to a sliding rail of the feeding frame in a rail way, the needle feeding module can move along the sliding rail through motor driving, the needle feeding module is fixedly connected with a second clamping jaw, and the second clamping jaw corresponds to the material needle; the cutting area of feed frame is located to third clamping jaw and fourth clamping jaw, third clamping jaw and fourth clamping jaw are folded along material needle length direction and are established and correspond the material needle, the third clamping jaw passes through rotating assembly and connects in the feed frame, the fourth clamping jaw is equipped with ejection of compact cylinder, the cutting area of feed frame is equipped with the material needle inductor.
Further, the pin inserting mechanism comprises a split material conveying mechanism and a disc pin inserting mechanism; the cutting and conveying mechanism is provided with a conveying turntable which can rotate along the circumferential direction of the cutting and conveying mechanism by motor driving, the circumference of the conveying turntable is provided with a plurality of needle conveying mechanisms, each needle conveying mechanism comprises a cylinder clamping jaw and a jacking cylinder, the jacking cylinder corresponds to the driving end of the cylinder clamping jaw, and the cylinder clamping jaw corresponds to the cutting end of the cutting mechanism; the disc type pin inserting mechanism comprises a pin rotating disc, a pick-up module, a pin inserting module and a pick-up clamping jaw; the picking and inserting clamping jaws are annularly arranged on the periphery of the pin rotating disc, the pin rotating disc can rotate along the circumferential direction of the pin rotating disc through motor driving, and the picking and inserting clamping jaws sequentially pass through the picking position and the pin position of the pin rotating disc along with the rotation of the pin rotating disc; the picking module is arranged at a picking position of the pin turntable and drives a picking clamping jaw corresponding to the picking position of the pin turntable; the pin module is arranged at a pin position of the pin turntable and drives a pick-up clamping jaw corresponding to the pin position of the pin turntable; and the pick-and-place clamping jaw positioned at the pin position of the pin turntable corresponds to a workpiece clamped by the clamping tool.
Further, the disk type pin inserting mechanism further comprises a detection camera and a waste box; the inspection camera and the waste cartridge correspond to pick-up jaws of a pick-up location of the pin carousel.
The beneficial effects are that: the automatic PIN inserting production system for the IGBT can realize automatic PIN inserting, has high yield and effectively improves the production efficiency, and comprises the following technical effects:
1) The automatic PIN insertion device has the advantages that the blanking mechanism and the PIN insertion mechanism are arranged, so that the PIN can be inserted rapidly and accurately, and the production efficiency can be effectively improved;
2) Through setting up pick-up position and contact pin position at the contact pin carousel, make pick-up insert clamping jaw centre gripping material needle rotate and pass through pick-up position and contact pin position in proper order to press from both sides in corresponding position and get or contact pin, form the streamlined operation, further improved production efficiency.
Drawings
FIG. 1 is an overall block diagram of the present invention;
FIG. 2 is a block diagram of the static elimination mechanism of the present invention;
FIG. 3 is a block diagram of the feed conveyor line of the present invention;
FIG. 4 is a matching structure diagram of the material conveying robot and the clamping tool;
FIG. 5 is a block diagram of the material transfer robot of the present invention;
FIG. 6 is a block diagram of the clamping tool of the present invention;
FIG. 7 is a block diagram of the blanking mechanism of the present invention;
FIG. 8 is a block diagram of a fourth jaw of the present invention;
FIG. 9 is a block diagram of a split feed mechanism of the present invention;
FIG. 10 is a block diagram of a disk type pin mechanism of the present invention;
fig. 11 is a mating structure diagram of the pin mechanism and the clamping tool of the present invention.
Detailed Description
The invention will be further described with reference to the accompanying drawings.
As shown in fig. 1-11: an automatic PIN inserting production system for an IGBT comprises a feeding conveying line 1, a material conveying robot 2, a clamping tool 3, a cutting mechanism 4, a PIN inserting mechanism 5 and a discharging conveying line 6; the discharging end of the feeding conveying line 1 corresponds to a clamping tool 3 through the clamping end of the material conveying robot 2; the material cutting end of the material cutting mechanism 4 corresponds to the needle picking end of the needle inserting mechanism 5, the needle picking end of the needle inserting mechanism 5 transfers the material needle 421 to the needle inserting end of the needle inserting mechanism 5, and the needle inserting end of the needle inserting mechanism 5 inserts the material needle 421 into a workpiece clamped by the clamping tool 3; the clamping end of the clamping tool 3 corresponds to the feeding end of the discharging conveying line 6 through the material conveying robot 2; the workpiece is sent to the clamping tool 3 and fixed by the material conveying robot 2 after being subjected to static electricity removal treatment by the material feeding conveying line 1, the workpiece is moved to the pin end of the pin mechanism 5 by the clamping tool 3, the pin mechanism 5 inserts the material pins 421 supplied by the material cutting mechanism 4 on the workpiece, and the material conveying robot 2 transfers the workpiece to the material discharging conveying line 6 after all the material pins are inserted, and the workpiece is transferred to the next working procedure after static electricity removal treatment.
The feeding conveying line 1 and the discharging conveying line 6 are respectively provided with a static eliminating mechanism 11, and the static eliminating mechanisms 11 conduct static eliminating treatment on workpieces conveyed on the feeding conveying line 1 and the discharging conveying line 6.
The static electricity removing mechanism 11 is provided with a proximity sensor 12 and a pneumatic stop 13; the proximity sensor 12 corresponds to a workpiece transported on the feeding conveyor line 1, when the workpiece reaches the position of the static electricity removing mechanism 11, the pneumatic stop 13 supports the workpiece to leave the feeding conveyor line 1, and after the workpiece is subjected to static electricity removing treatment, the pneumatic stop 13 returns the workpiece to the feeding conveyor line 1.
The material conveying robot 2 clamps a workpiece through a first clamping jaw 21 at the end part; the first jaw 21 is provided with a 2D camera 22; the 2D camera 22 is used for positioning of the workpiece.
The clamping tool 3 comprises an X-axis module 31, a Y-axis module 32 and a positioning table 33; the X-axis module 31 and the Y-axis module 32 are driven by a motor, and the positioning table 33 can travel in X-axis and Y-axis directions through the X-axis module 31 and the Y-axis module 32; the positioning table 33 is provided with a positioning pin 331 and a pressing cylinder 332; the positioning pin 331 corresponds to a positioning hole of the workpiece, the pressing cylinder 332 is drivingly connected to the pressing block 333, and the pressing block 333 corresponds to the positioning table 33.
The cutting mechanism 4 comprises a needle feeding module 41, a feeding frame 42, a second clamping jaw 43, a third clamping jaw 44 and a fourth clamping jaw 45; the feeding frame 42 is inserted with a material needle 421, the needle feeding module 41 is in rail connection with a sliding rail of the feeding frame 42, the needle feeding module 41 can move along the sliding rail through motor driving, the needle feeding module 41 is fixedly connected with a second clamping jaw 43, and the second clamping jaw 43 corresponds to the material needle 421; the third clamping jaw 44 and the fourth clamping jaw 45 are arranged in a cutting area of the feeding frame 42, the third clamping jaw 44 and the fourth clamping jaw 45 are overlapped along the length direction of the material needle 421 and correspond to the material needle 421, the third clamping jaw 44 is connected to the feeding frame 42 through a rotating assembly, the fourth clamping jaw 45 is provided with a discharging cylinder, and the cutting area of the feeding frame 42 is provided with a material needle sensor; the needle feeding module 41 moves and feeds the material needle 421 to the cutting area of the feed frame 42, the second clamping jaw 43 and the fourth clamping jaw 45 clamp the material needle 421 together during cutting, the third clamping jaw 44 clamps the material needle 421 and then rotates, the end of the material needle 421 is sheared, and the cut part of the material needle 421 is fed to the needle inserting mechanism 5.
The pin inserting mechanism 5 comprises a split material conveying mechanism and a disc pin inserting mechanism; the cutting and conveying mechanism is provided with a conveying turntable 51, the conveying turntable 51 can rotate along the circumferential direction of the conveying turntable by being driven by a motor, the periphery of the conveying turntable 51 is provided with a plurality of needle conveying mechanisms, each needle conveying mechanism comprises a cylinder clamping jaw 511 and a jacking cylinder 512, the jacking cylinder 512 corresponds to the driving end of the cylinder clamping jaw 511, and the cylinder clamping jaw 511 corresponds to the cutting end of the cutting mechanism 4; cylinder jaw 511 holds a cut material needle 421 for delivery to the disc pin mechanism.
The disc type pin inserting mechanism comprises a pin rotating disc 52, a pick-up module 53, a pin module 54 and a pick-up clamping jaw 56; the plurality of pick-up clamping claws 56 are circumferentially arranged at the periphery of the pin turntable 52, the pin turntable 52 can rotate circumferentially along the motor, and the pick-up clamping claws 56 sequentially pass through the pick-up position and the pin position of the pin turntable 52 along with the rotation of the pin turntable 52; the pick-up module 53 is arranged at a pick-up position of the pin turntable 52, and the pick-up module 53 drives a pick-up clamping jaw 56 correspondingly positioned at the pick-up position of the pin turntable 52; the pin module 54 is arranged at a pin position of the pin turntable 52, and the pin module 54 drives the pick-up clamping jaw 56 corresponding to the pin position of the pin turntable 52; pick-and-place clamping jaw 56 located at the pin position of pin turntable 52 corresponds to the workpiece clamped by clamping fixture 3; when the pick-up clamping jaw 56 is driven by the pin turntable 52 to rotate to the pick-up position, the pick-up module 53 drives the pick-up clamping jaw 56 to clamp the material needle 421, then the pick-up clamping jaw 56 clamping the material needle 421 rotates to the pin position, and the pin module 54 drives the pick-up clamping jaw 56 to move downwards to insert the material needle 421 into a workpiece.
The disc type pin inserting mechanism further comprises a detection camera and a waste box; the inspection camera and the waste cartridge correspond to pick-up fingers 56 of pick-up location of pin carousel 52; the inspection camera detects the perpendicularity of the material needle 421 by photographing, and the material needle 421 which does not meet the standard is put in when the pick-up clamping jaw 56 rotates to the waste box.
The foregoing is only a preferred embodiment of the invention, it being noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the present invention, and such modifications and adaptations are intended to be comprehended within the scope of the invention.

Claims (1)

1. A automatic PIN production system of inserting for IGBT, its characterized in that: comprises a feeding conveying line (1), a conveying robot (2), a clamping tool (3), a cutting mechanism (4), a contact pin mechanism (5) and a discharging conveying line (6); the discharging end of the feeding conveying line (1) corresponds to the clamping tool (3) through the clamping end of the material conveying robot (2); the cutting end of the cutting mechanism (4) corresponds to the needle picking end of the needle inserting mechanism (5), the needle picking end of the needle inserting mechanism (5) transfers the material needle (421) to the needle inserting end of the needle inserting mechanism (5), and the needle inserting end of the needle inserting mechanism (5) inserts the material needle (421) into a workpiece clamped by the clamping tool (3); the clamping end of the clamping tool (3) corresponds to the feeding end of the discharging conveying line (6) through the material conveying robot (2);
the feeding conveying line (1) and the discharging conveying line (6) are respectively provided with a static eliminating mechanism (11), and the static eliminating mechanisms (11) are used for carrying out static eliminating treatment on workpieces conveyed on the feeding conveying line (1) and the discharging conveying line (6);
the static electricity removing mechanism (11) is provided with a proximity sensor (12) and a pneumatic stop (13); the proximity sensor (12) corresponds to a workpiece transported on the feeding conveyor line (1), when the workpiece reaches the position of the static eliminating mechanism (11), the pneumatic stop device (13) supports the workpiece to leave the feeding conveyor line (1), and after the workpiece is subjected to static eliminating treatment, the pneumatic stop device (13) returns the workpiece to the feeding conveyor line (1); the material conveying robot (2) clamps a workpiece through a first clamping jaw (21) at the end part; the first clamping jaw (21) is provided with a 2D camera (22);
the clamping tool (3) comprises an X-axis module (31), a Y-axis module (32) and a positioning table (33); the X-axis module (31) and the Y-axis module (32) are driven by a motor, and the positioning table (33) can travel in the X-axis and Y-axis directions through the X-axis module (31) and the Y-axis module (32); the positioning table (33) is provided with a positioning pin (331) and a pressing cylinder (332); the positioning pin (331) corresponds to a positioning hole of a workpiece, the pressing cylinder (332) is in driving connection with the pressing block (333), and the pressing block (333) corresponds to the positioning table (33);
the cutting mechanism (4) comprises a needle feeding module (41), a feeding frame (42), a second clamping jaw (43), a third clamping jaw (44) and a fourth clamping jaw (45); the feeding frame (42) is inserted with a material needle (421), the needle feeding module (41) is connected to a sliding rail of the feeding frame (42) in a rail way, the needle feeding module (41) can move along the sliding rail through motor driving, the needle feeding module (41) is fixedly connected with a second clamping jaw (43), and the second clamping jaw (43) corresponds to the material needle (421); the third clamping jaw (44) and the fourth clamping jaw (45) are arranged in a cutting area of the feeding frame (42), the third clamping jaw (44) and the fourth clamping jaw (45) are overlapped along the length direction of the material needle (421) and correspond to the material needle (421), the third clamping jaw (44) is connected to the feeding frame (42) through a rotating assembly, the fourth clamping jaw (45) is provided with a discharging cylinder, and a material needle sensor is arranged in the cutting area of the feeding frame (42);
the pin inserting mechanism (5) comprises a split material conveying mechanism and a disc pin inserting mechanism; the cutting and conveying mechanism is provided with a conveying turntable (51), the conveying turntable (51) can rotate along the circumferential direction of the conveying turntable by being driven by a motor, a plurality of needle conveying mechanisms are arranged on the periphery of the conveying turntable (51), each needle conveying mechanism comprises a cylinder clamping jaw (511) and a jacking cylinder (512), each jacking cylinder (512) corresponds to the driving end of each cylinder clamping jaw (511), and each cylinder clamping jaw (511) corresponds to the cutting end of each cutting mechanism (4);
the disc type pin inserting mechanism comprises a pin rotating disc (52), a pick-up module (53), a pin module (54) and a pick-up clamping jaw (56); the plurality of pick-up clamping jaws (56) are circumferentially arranged on the periphery of the pin rotating disc (52), the pin rotating disc (52) can rotate along the circumferential direction of the pick-up clamping jaws by motor drive, and the pick-up clamping jaws (56) sequentially pass through the pick-up position and the pin position of the pin rotating disc (52) along with the rotation of the pin rotating disc (52); the picking module (53) is arranged at a picking position of the pin turntable (52), and the picking module (53) drives a picking clamping jaw (56) correspondingly positioned at the picking position of the pin turntable (52); the pin module (54) is arranged at a pin position of the pin turntable (52), and the pin module (54) drives a pick-up clamping jaw (56) corresponding to the pin position of the pin turntable (52); pick-and-place clamping jaws (56) located at pin positions of the pin turntable (52) correspond to workpieces clamped by the clamping tool (3);
the disc type pin inserting mechanism further comprises a detection camera and a waste box; the inspection camera and the scrap box correspond to pick-up jaws (56) of a pick-up location of a pin carousel (52).
CN202111589283.4A 2021-12-23 2021-12-23 Automatic PIN inserting production system for IGBT Active CN114188251B (en)

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Application Number Priority Date Filing Date Title
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116313897B (en) * 2022-12-28 2023-11-24 津上智造智能科技江苏有限公司 IGBT pin inserting machine
CN116705682B (en) * 2023-08-02 2023-10-03 常州科瑞尔科技有限公司 Needle belt type contact pin feeding mechanism and working method thereof

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