CN114130440B - Automatically controlled initiative lane pumping device based on gallium-based liquid metal liquid drop - Google Patents

Automatically controlled initiative lane pumping device based on gallium-based liquid metal liquid drop Download PDF

Info

Publication number
CN114130440B
CN114130440B CN202111423514.4A CN202111423514A CN114130440B CN 114130440 B CN114130440 B CN 114130440B CN 202111423514 A CN202111423514 A CN 202111423514A CN 114130440 B CN114130440 B CN 114130440B
Authority
CN
China
Prior art keywords
liquid drop
channels
liquid
inlet
gallium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202111423514.4A
Other languages
Chinese (zh)
Other versions
CN114130440A (en
Inventor
任玉坤
薛睿
陶冶
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN202111423514.4A priority Critical patent/CN114130440B/en
Publication of CN114130440A publication Critical patent/CN114130440A/en
Application granted granted Critical
Publication of CN114130440B publication Critical patent/CN114130440B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06Fluid handling related problems
    • B01L2200/0642Filling fluids into wells by specific techniques
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0861Configuration of multiple channels and/or chambers in a single devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/12Specific details about materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00Moving or stopping fluids
    • B01L2400/04Moving fluids with specific forces or mechanical means
    • B01L2400/0403Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B01L2400/0427Electrowetting

Abstract

An electric control active shunting pumping device based on gallium-based liquid metal droplets relates to the technical field of micro-fluidic. In order to meet the requirement of independent and active conveying of huge branch runner systems and branch fluids of microfluidic chips. Two outlets and inlets of the electrode are respectively positioned at three vertexes of an isosceles triangle, a liquid drop cavity is positioned at the middle point of the bottom edge of the isosceles triangle, an electrode groove is positioned between the outlets and the liquid drop cavity, the liquid drop cavity outwards extends to form a liquid drop groove outer channel respectively, the electrode groove is communicated with the liquid drop groove outer channel, the inlets respectively extend to form two inlet channels, the inlet channels are communicated with the liquid drop groove outer channel, the liquid drop cavity, the inlets, the two inlet channels and the two liquid drop groove outer channels are encircled to form a triangle, the two outlets are respectively communicated with the intersection points of the inlet channels and the liquid drop groove outer channels through the two outlet channels, a graphite electrode is fixedly embedded in the electrode groove, the two liquid outlet pipes are respectively communicated with the two outlets, a liquid inlet pipe is communicated with the inlets, and an alternating current power supply is electrically connected with the graphite electrode.

Description

Electric control active shunting pumping device based on gallium-based liquid metal droplets
Technical Field
The invention belongs to the technical field of microfluidics.
Background
As a power source in microfluidic systems, micropumps are responsible for providing the energy required for fluid actuation. In view of its importance, since the concept of microfluidic systems was proposed, micropumps have undergone significant development changes according to the overall system requirements, and have become one of the important indicators for measuring the development level of the entire mems. The main research direction is high precision, simplicity, low power consumption, low cost, large output range and other purposes.
The micro pump may be classified into a mechanical micro pump and a non-mechanical micro pump according to its operation principle and structure. The mechanical micropump utilizes a physical driving mechanism to perform pumping, and is usually in a piezoelectric type, an electrostatic type, a pneumatic type, a thermal pneumatic type, an electromagnetic effect type, and the like. The micropump can realize accurate driving of fluid due to long development time, but the micropump has the characteristics of complex structure, relatively large size and low energy transmission efficiency, and is difficult to meet the requirements of miniaturization and easy integration of a microfluidic chip in the long run. In contrast, non-mechanical micropumps have no mechanical drive components in their construction, but instead achieve fluid drive through hydrodynamic effects, electroosmotic effects, or electrowetting effects. Depending on the driving mechanism, the current non-mechanical micropumps mainly include: magnetohydrodynamics, electrohydrodynamics, electroosmosis, electrochemical effect pumps, and the like. However, these non-mechanical micropumps generally have their own special requirements for pumping solutions, and generally have high operating voltages and small flow rates, so that research on new micropumps is urgently needed.
In 2014, in the Liquid metal enabled pump published in the journal of the National Academy of Sciences, the disclosure of the National Academy of Sciences, a micropump for driving fluid by using the continuous electrowetting effect of Liquid metal was proposed, the micropump has an extremely simple structure, the main structure of the micropump is a 'return' shaped circulation channel, a circular cavity is arranged at the center of the long side of the channel and serves as a working area of Liquid metal, and graphite electrodes are arranged at the two sides of the cavity and communicated with solution to apply an electric field. The pump realizes the directional conveying of the fluid in the chamber along the direction of electric field lines by the pressure difference brought by the surface tension gradient formed by the electric potential gradient in the double electric layers on the surface of the liquid metal droplet under the alternating current signal. The method has the characteristics of high flow and low power consumption.
However, the research result mainly aims at the unidirectional continuous electrowetting pump designed for the single circulation channel, and for the huge branch channel system of the microfluidic chip and the requirement of independent and active delivery of each branch fluid, a pumping channel division control method with simple structure, reliability and high efficiency is urgently needed.
Disclosure of Invention
The invention provides an electric control active shunting pumping device based on gallium-based liquid metal droplets, which aims to meet the requirements of a huge branch flow channel system of a micro-fluidic chip and independent and active conveying of each branch fluid.
An electrically controlled active tunneling pumping device based on gallium-based liquid metal droplets, comprising: PDMS channel 8, two graphite electrodes, two drain pipes, feed liquor pipe 10 and alternating current power supply 1, PDMS channel 8 includes: two outlets, a droplet chamber 805, an inlet 811 and two electrode slots,
two outlets and inlets 811 are respectively positioned at three vertexes of an isosceles triangle, the droplet chamber 805 is positioned at the middle point of the bottom side of the isosceles triangle, two electrode grooves are respectively positioned between the two outlets and the droplet chamber 805, two sides of the droplet chamber 805 extend outwards to form a droplet groove outer channel respectively, the two electrode grooves are respectively communicated with the two droplet groove outer channels, the inlets 811 extend to form two inlet channels respectively, the two inlet channels are respectively communicated with the tail ends of the two droplet groove outer channels, the surrounding areas of the droplet chamber 805, the inlets 811, the two inlet channels and the two droplet groove outer channels are triangular, the two outlets are respectively communicated with the intersection points of the inlet channels and the droplet groove outer channels through the two outlet channels, the droplet chamber 805 is used for containing gallium-based liquid metal droplets,
two graphite electrodes are respectively embedded in the two electrode grooves, the two liquid outlet pipes are respectively communicated with the two outlets, the liquid inlet pipe 10 is communicated with the inlet 811, and the alternating current power supply 1 is electrically connected with the two graphite electrodes.
Furthermore, the electrically controlled active shunting pumping device based on the gallium-based liquid metal droplet further comprises a glass substrate 9, and the PDMS channel 8 is in bonding connection with the glass substrate 9.
Further, the ac power supply 1 is electrically connected to the two graphite electrodes through two wires, respectively, and the wires are fixedly connected to the graphite electrodes through the AB glue.
Further, the width of the outer channel of the droplet tank is less than the diameter of the gallium-based liquid metal droplet inside the droplet chamber 805.
Further, the preparation method of the PDMS channel 8 includes the following steps:
the method comprises the following steps: cutting the PMMA plate by laser according to the outline of the PDMS channel 8 to obtain a template, fixing the template on a glass sheet,
step two: pouring PDMS prepolymer on the template without passing through the top of the mould, vacuumizing to remove air bubbles in the PDMS prepolymer completely, curing at 80 ℃ for 2 hours,
step three: the template is peeled off to obtain the PDMS channel 8, the PDMS channel 8 is attached to a glass sheet after hydrophilic treatment, and then bonding is carried out by heating for 1 hour under the environment of 80 ℃.
Further, in the first step, the template is adhered to the glass sheet by using the UV glue, and then the joint of the template and the glass sheet is irradiated by ultraviolet rays until the UV glue is cured.
Furthermore, in the second step, the PDMS prepolymer is 1 mm-2 mm above the top of the mould.
According to the electric control active shunting pumping device based on the gallium-based liquid metal liquid drops, the pumping direction can be changed by changing the direction of an electric field through the triangular structure, the target fluid is selectively driven by utilizing the continuous electrowetting effect of the gallium-based liquid metal, and the structure is simple. The output waveform is square wave, and the flow velocity of the fluid can be adjusted within the range of 0-700 mu m/s within the ranges of 50-1200 Hz of output frequency, 1-5V of bias voltage and 0-6V of alternating voltage amplitude.
Drawings
Fig. 1 is a schematic view of the overall structure of the electrically controlled active shunting pumping device of the present invention;
FIG. 2 is a schematic diagram of the structure of PDMS channel.
An alternating current power supply 1, a first lead 2, a second lead 3, a first liquid outlet pipe 4, a first graphite electrode 5, a second graphite electrode 6, a second liquid outlet pipe 7, a PDMS channel 8, a glass bottom plate 9, a liquid inlet pipe 10, a first outlet 801, a first outlet channel 802, a first electrode groove 803, a first liquid droplet groove outer channel 804, a liquid droplet cavity 805, a second electrode groove 806, a second liquid droplet groove outer channel 807, a second outlet 808, a second outlet channel 809, a second inlet channel 810, an inlet 811 and a first inlet channel 812.
Detailed Description
The first embodiment is as follows: specifically describing the present embodiment with reference to fig. 1 and fig. 2, an electrically controlled active channeling pumping device based on gallium-based liquid metal droplets according to the present embodiment includes: PDMS passageway 8, glass bottom plate 9, no. one graphite electrode 5, no. two graphite electrode 6, drain pipe 4, no. two drain pipes 7, feed liquor pipe 10 and alternating current power supply 1. The PDMS channel 8 includes: outlet port number one 801, outlet port number two 808, droplet chamber 805, inlet 811, electrode well number one 803, electrode well number two 806, droplet well number one 804, droplet well number two 807, inlet channel number two 810, inlet channel number one 812, and outlet channel number two,
Outlet port number one 801, outlet port number two 808 and inlet port 811 are located at the three vertices of an isosceles triangle, respectively, and drop chamber 805 is located at the midpoint of the base of the isosceles triangle. Electrode channel number one 803 is located between outlet number one 801 and droplet chamber 805; electrode slot number two 806 is located between outlet number two 808 and droplet chamber 805.
One end of the first droplet tank outer passage 804 and one end of the second droplet tank outer passage 807 are connected to both sides of the droplet chamber 805 in a straight line, respectively. The first electrode groove 803 is communicated with the first droplet groove external passage 804, and the second electrode groove 806 is communicated with the second droplet groove external passage 807.
One end of the inlet channel number one 812 and one end of the inlet channel number two 810 are both in communication with the inlet 811. The other end of the first inlet channel 812 is communicated with the other end of the first droplet out-of-tank channel 804; the other end of the No. two inlet channel 810 communicates with the other end of the No. two droplet out-of-tank channel 807. The droplet chamber 805, the inlet 811, the two inlet channels and the two droplet bath outer channels enclose a triangular area.
One end of the first outlet channel 802 is communicated with the first outlet 801, one end of the second outlet channel 809 is communicated with the second outlet 808, the other end of the first outlet channel 802 is communicated with the intersection point of the first inlet channel 812 and the first droplet tank outer channel 804, and the other end of the second outlet channel 809 is communicated with the intersection point of the second inlet channel 810 and the second droplet tank outer channel 807.
The droplet chamber 805 is used for containing gallium-based liquid metal droplets, and the widths of the first droplet tank outer channel 804 and the second droplet tank outer channel 807 are smaller than the diameter of the gallium-based liquid metal droplets in the droplet chamber 805.
The first graphite electrode 5 is embedded in the first electrode groove 803, and the second graphite electrode 6 is embedded in the second electrode groove 806. No. one liquid outlet pipe 4 is communicated with a No. one outlet 801, and No. two liquid outlet pipes 7 are communicated with a No. two outlet 808. The liquid inlet pipe 10 communicates with the inlet 811.
Alternating current power supply 1 and two graphite electrodes are respectively through a wire 2 and No. two wire 3 electrical connection, and the wire passes through AB glue and fixes with graphite electrode. The PDMS channels 8 and the glass substrate 9 are bonded to each other.
In this embodiment, based on the continuous electrowetting effect of the gallium-based liquid metal, the surface tension of the fluid on the surface of the gallium-based liquid metal droplet can be changed by applying an electric field, so as to form a tension gradient, and the fluid is driven to move along the direction of the electric field lines under the action of the tension gradient.
When the first graphite electrode 5 is connected with a power excitation electrode, the second graphite electrode 6 is connected with a power grounding electrode and forward bias voltage is applied, fluid flows out of the second outlet 808; when the second graphite electrode 6 is connected with a power excitation electrode, the first graphite electrode 5 is connected with a power grounding electrode and forward bias voltage is applied, fluid flows out to the first outlet 801.
According to the principle of continuous electrowetting, due to the surface tension gradient caused by charge distribution, the fluid moves along the direction of the electric field, and the gallium-based liquid metal liquid drop moves towards the opposite direction of the electric field. However, since the diameter of the gallium-based liquid metal droplet is larger than the two droplet bath outer channels, the gallium-based liquid metal droplet is confined within the droplet chamber.
Fluid from the negative side of the droplet chamber flows out of the first droplet tank outer channel 804, flows to the first inlet channel 812 and the second inlet channel 810 simultaneously, fluid flowing into the first inlet channel 812 enters the droplet chamber again through the triangular ring structure, and fluid flowing to the first outlet channel 802 flows to the first liquid outlet pipe 4 to complete a shunting task. The setting parameters of the alternating current power supply are adjusted to change the direction of the electric field, and the fluid flows out from the second liquid outlet pipe 7 in the similar process. In operation, the selected outlet flow rate is equal to the inlet flow rate.
Further, the preparation method of the PDMS channel 8 includes the following steps:
the method comprises the following steps: cutting a PMMA (Polymethyl methacrylate) plate by using laser according to the outline of the PDMS channel 8 to obtain a template, adhering the template on a glass sheet by using UV glue, and irradiating the joint of the template and the glass sheet by using ultraviolet rays until the UV glue is cured.
Step two: pouring PDMS prepolymer on the template and not passing through the top end of the mould by 1 mm-2 mm, vacuumizing to completely remove air bubbles in the PDMS prepolymer, and curing for 2 hours at 80 ℃.
Step three: the template is peeled off to obtain the PDMS channel 8, the PDMS channel 8 is attached to a glass sheet after hydrophilic treatment, and then bonding is carried out by heating for 1 hour under the environment of 80 ℃. At this point, the preparation of the PDMS channel 8 is completed.

Claims (6)

1. An electrically controlled active tunneling pumping device based on gallium-based liquid metal droplets, comprising: PDMS passageway (8), two graphite electrodes, two drain pipes, feed liquor pipe (10) and alternating current power supply (1), its characterized in that, PDMS passageway (8) includes: two outlets, a droplet chamber (805), an inlet (811) and two electrode slots,
two outlets and inlets (811) are respectively positioned at three vertexes of an isosceles triangle, a liquid drop chamber (805) is positioned at the middle point of the bottom edge of the isosceles triangle, two electrode grooves are respectively positioned between the two outlets and the liquid drop chamber (805), two sides of the liquid drop chamber (805) respectively extend out to form a liquid drop groove outer channel, the two electrode grooves are respectively communicated with the two liquid drop groove outer channels, the inlet (811) respectively extends out to form two inlet channels which are respectively communicated with the tail ends of the two liquid drop groove outer channels, the liquid drop chamber (805), the inlet (811), the two inlet channels and the two liquid drop groove outer channels are enclosed to be triangular, the two outlets are respectively communicated with the inlet channels and the intersection points of the liquid drop groove outer channels through the two outlet channels, and the liquid drop chamber (805) is used for containing gallium-based liquid metal liquid drops,
the two graphite electrodes are respectively embedded in the two electrode grooves, the two liquid outlet pipes are respectively communicated with the two outlets, the liquid inlet pipe (10) is communicated with the inlet (811), and the alternating current power supply (1) is electrically connected with the two graphite electrodes;
the width of the outer channel of the droplet tank is less than the diameter of the gallium-based liquid metal droplet inside the droplet chamber (805).
2. The electrically controlled active tunneling pumping device based on gallium-based liquid metal droplets, according to claim 1, further comprising a glass substrate (9), wherein the PDMS channels (8) are bonded to the glass substrate (9).
3. The electrically controlled active shunting pumping device based on gallium-based liquid metal droplets as claimed in claim 1, characterized in that the alternating current power supply (1) is electrically connected with two graphite electrodes through two wires, respectively, the wires being fixedly connected with the graphite electrodes through AB glue.
4. An electrically controlled active channelling pumping device based on gallium-based liquid metal droplets, according to claim 1, characterized in that the preparation method of the PDMS channel (8) comprises the following steps:
the method comprises the following steps: cutting the PMMA plate by laser according to the outline of the PDMS channel (8) to obtain a template, fixing the template on a glass sheet,
step two: pouring PDMS prepolymer on the template without passing through the top of the mould, vacuumizing to remove air bubbles in the PDMS prepolymer completely, curing at 80 ℃ for 2 hours,
step three: the template is peeled off to obtain a PDMS channel (8), the PDMS channel (8) is attached to a glass sheet after hydrophilic treatment, and then bonding is carried out by heating for 1 hour in an environment of 80 ℃.
5. The electrically controlled active tunneling pumping device according to claim 4, wherein in the first step, the template is adhered to the glass plate by UV glue, and then the joint is irradiated with ultraviolet rays until the UV glue is cured.
6. The electrically controlled active tunneling pumping apparatus according to claim 4, wherein in step two, the PDMS prepolymer is submerged 1mm to 2mm above the top of the mold.
CN202111423514.4A 2021-11-26 2021-11-26 Automatically controlled initiative lane pumping device based on gallium-based liquid metal liquid drop Active CN114130440B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111423514.4A CN114130440B (en) 2021-11-26 2021-11-26 Automatically controlled initiative lane pumping device based on gallium-based liquid metal liquid drop

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111423514.4A CN114130440B (en) 2021-11-26 2021-11-26 Automatically controlled initiative lane pumping device based on gallium-based liquid metal liquid drop

Publications (2)

Publication Number Publication Date
CN114130440A CN114130440A (en) 2022-03-04
CN114130440B true CN114130440B (en) 2022-11-04

Family

ID=80388601

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111423514.4A Active CN114130440B (en) 2021-11-26 2021-11-26 Automatically controlled initiative lane pumping device based on gallium-based liquid metal liquid drop

Country Status (1)

Country Link
CN (1) CN114130440B (en)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100398309B1 (en) * 2001-02-20 2003-09-19 한국과학기술원 Micropump actuated by the movement of liquid drop induced by continuous electrowetting
CN103285947A (en) * 2013-05-27 2013-09-11 苏州扬清芯片科技有限公司 Droplet micro-fluidic chip and operation method thereof
US9604209B2 (en) * 2015-03-19 2017-03-28 International Business Machines Corporation Microfluidic device with anti-wetting, venting areas
WO2018217831A1 (en) * 2017-05-22 2018-11-29 Arizona Board Of Regents On Behalf Of Arizona State University Metal electrode based 3d printed device for tuning microfluidic droplet generation frequency and synchronizing phase for serial femtosecond crystallography
CN109231148A (en) * 2018-09-25 2019-01-18 苏州大学 Micro-pump structure based on room temperature liquid metal
CN110496657B (en) * 2019-09-11 2022-04-22 苏州大学 Microfluidic chip capable of forming liquid metal droplets and preparation method thereof
US20210221676A1 (en) * 2019-10-07 2021-07-22 The Texas A&M University System Microfluidic devices and associated methods
WO2021126969A1 (en) * 2019-12-17 2021-06-24 The Regents Of The University Of California Selective and high-resolution printing of single cells
CN113522378B (en) * 2020-04-13 2023-03-17 中国科学院青岛生物能源与过程研究所 Microfluidic chip based on electrohydrodynamics, micro sample application device and method
CN111644215A (en) * 2020-06-23 2020-09-11 华北科技学院 Liquid metal micro-fluidic mixing arrangement

Also Published As

Publication number Publication date
CN114130440A (en) 2022-03-04

Similar Documents

Publication Publication Date Title
Gao et al. A handy liquid metal based electroosmotic flow pump
US7588671B2 (en) Microfluidic treatment method and device
CN204583216U (en) A kind of micro-fluidic chip of microfluid spontaneous vasomotion and priming device
CN103816805B (en) Electric osmose Micropump device
CN101862631B (en) Digital micro-fluid generating device and generating method
CN203090949U (en) Multistage drive electric osmosis micro-pump device
CN205055830U (en) Electric osmose micropump device
CN103100451A (en) Temperature response micro-pump based on micro-fluidic chip and preparation method thereof
CN108397373B (en) Valveless electromagnetic micropump and manufacturing method thereof
CN114130440B (en) Automatically controlled initiative lane pumping device based on gallium-based liquid metal liquid drop
CN103041877A (en) Photo-response micro-fluid self-driven micro-fluidic chip and preparation method thereof
CN107824105B (en) Micro mixer capable of adjusting solution concentration gradient based on moving bubbles
CN101749219B (en) Miniature peristaltic pump
CN110601497B (en) Alternating current electroosmosis driven ethanol traveling wave type micropump and working method
CN103041879A (en) Micro-fluidic chip for micro/nano liter quota-sampling and preparation method thereof
CN103055975A (en) Micro-fluid self-driven micro-fluidic chip with temperature response and preparation method thereof
CN104772168A (en) Micro-fluidic chip containing microfluid in self-discipline movement, manufacturing method, and liquid injecting device
CN103071554A (en) Microfluidic chip for circularly driving solution and preparation method thereof
CN201681080U (en) Digital micro-fluid generating device
CN204337415U (en) Induced with laser two-chamber Micropump
Fu et al. A magnetic micropump based on ferrofluidic actuation
CN114260035B (en) Multilayer wrapped micro-fluidic chip and cell particle generator
CN103084228A (en) Micro-fluidic-chip-based photoresponse micropump and manufacture method thereof
CN103071553A (en) Microfluidic chip-based electrical response micropump and manufacturing method thereof
Wang et al. Electro-hydro-dynamic (EHD) micropumps with electrode protection by parylene and gelatin

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant