CN114093796A - Wafer boat with wafer protection device - Google Patents
Wafer boat with wafer protection device Download PDFInfo
- Publication number
- CN114093796A CN114093796A CN202111320511.8A CN202111320511A CN114093796A CN 114093796 A CN114093796 A CN 114093796A CN 202111320511 A CN202111320511 A CN 202111320511A CN 114093796 A CN114093796 A CN 114093796A
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- China
- Prior art keywords
- wafer
- shaped limiting
- boat
- protection device
- boat body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
Abstract
The invention provides a wafer boat with a wafer protection device, which comprises a boat body and the protection device arranged on the boat body, wherein a row of slots for placing wafers are arranged in the boat body, an opening for storing or taking out the wafers is formed in the upper end of the boat body, the protection device comprises a U-shaped limiting rod and a limiting assembly, the U-shaped limiting rod is rotatably connected with a side plate of the boat body, the U-shaped limiting rod rotates along a rotation center to be close to or far away from the opening of the boat body, and the limiting assembly is used for fixing the U-shaped limiting rod at the opening of the boat body or on the outer wall surface of the side plate. According to the wafer boat with the wafer protection device, the U-shaped limiting rod is rotatably connected with the boat body side plate, the opening of the boat body is blocked by the U-shaped limiting rod when the boat body is turned over, wafers are prevented from falling out, the side edge of the U-shaped limiting rod is clamped into the L-shaped limiting groove in the side plate through the spring, the position of the U-shaped limiting rod is limited, the reliability of stopping of the U-shaped limiting plate is guaranteed, the structure is simple, and the generation of fragments is reduced.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a wafer boat with a wafer protection device.
Background
In the process of processing the wafer, the wafer needs to be placed in a wafer boat to realize the transmission of the wafer, and in the process of transmitting the wafer boat, the opening is arranged upwards, so that the wafer can be prevented from falling out of the wafer boat. However, when the wafer is transferred from one boat to another boat, the boats need to be turned over so that the openings of the two boats are opposite to each other, and the wafer is easily dropped out from the openings during the turning process, thereby causing damage.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defect that in the prior art, wafers are easy to fall out from the opening in the process of overturning the wafer boat, so that the wafers are broken and lost, the invention provides the wafer boat with the wafer protection device.
The technical scheme adopted for solving the technical problems is as follows: the utility model provides a wafer boat with wafer protection device, includes the boat body and locates the protection device on the boat body, the internal one row of slots that are used for placing the wafer that is equipped with of boat, boat body upper end is equipped with the opening of depositing in or taking out the wafer, protection device includes U-shaped gag lever post and spacing subassembly, the U-shaped gag lever post with the curb plate of the boat body rotates to be connected, the U-shaped gag lever post rotates along the rotation center and is close to or keeps away from the opening of the boat body, spacing subassembly is used for with the U-shaped gag lever post is fixed at the opening of the boat body or is fixed on the lateral plate outer wall.
Placing the wafer in the boat body slots, and turning over the boat body when the wafer is transferred between the boat bodies to enable the opening of the boat body to be arranged on the side surface; before the boat body is turned over, the U-shaped limiting rod is rotated along the rotation center, the U-shaped limiting rod is arranged at the opening of the boat body, meanwhile, the limiting component fixes the position of the U-shaped limiting rod, and the U-shaped limiting rod is used for preventing the wafer from falling out of the opening of the boat body; when the wafers are transferred between the two boat bodies, the U-shaped limiting rods rotate along the rotating centers and are far away from the opening of the boat body, and meanwhile, the U-shaped limiting rods are fixed on the outer wall surface of the side plate by the limiting assembly, so that the wafers are prevented from being transferred by the U-shaped limiting rods to cause interference.
Further, in order to make the U-shaped limiting rod be connected with the curb plate rotation, can make the U-shaped limiting rod block the opening of the boat body through spacing subassembly simultaneously, prevent that the wafer from falling out from the opening part of the boat body, spacing subassembly is including locating L shape spacing groove on the curb plate lateral wall, L shape spacing groove diapire corner is equipped with first slot, be equipped with the second slot on the relative opposite side lateral wall that sets up of curb plate and L shape spacing groove, U-shaped limiting rod opening part is provided with two rotation parts relatively, two rotation part is do not inserted and is located in first slot and the second slot, be equipped with the drive in first slot or the second slot U-shaped limiting rod side card is located the spring of L shape spacing inslot.
The two rotating parts are respectively inserted into the first slot and the second slot, and rotate in the first slot and the second slot, so that the U-shaped limiting rod and the side plate are driven to rotate; the U-shaped limiting rod can axially move along the first slot and the second slot, the side edge of the U-shaped limiting rod is clamped in the L-shaped limiting groove through the spring, when the side edge of the U-shaped limiting rod is clamped in the L-shaped limiting groove, the U-shaped limiting rod cannot rotate on the side plate, the position of the U-shaped limiting rod is fixed, and the U-shaped limiting rod blocks the opening of the boat body or is fixed on the outer wall surface of the side plate; when the position of the U-shaped limiting rod needs to be adjusted, the elasticity of the spring needs to be overcome, so that the side edge of the U-shaped limiting rod, which is arranged in the L-shaped limiting groove, slides out of the L-shaped limiting groove, and the U-shaped limiting rod can rotate freely.
Furthermore, in order to facilitate manual operation, the U-shaped limiting rod is provided with a pressing part which is used for overcoming the elastic force of the spring to drive the side edge of the U-shaped limiting rod to be separated from the L-shaped limiting groove.
Further, when the wafer boat opening is turned to the side face, one side, close to the L-shaped limiting groove, of the side plate is in contact with the workbench, in order to leave a space for the U-shaped limiting rod to slide out of the L-shaped limiting groove, an avoiding groove for allowing the side edge of the U-shaped limiting rod to be separated from the L-shaped limiting groove is formed in one side, close to the L-shaped limiting groove, of the side plate.
Further, the boat body comprises two opposite side plates, a front baffle and a rear baffle are arranged between the two side plates, one or more material supporting rods which are arranged at intervals and used for supporting the bottom of the wafer are arranged between the front baffle and the rear baffle, and the L-shaped limiting grooves are formed in the side walls, close to the front baffle, of the side plates.
And furthermore, handles are arranged on the outer wall surfaces of the two side plates and incline upwards from the rear baffle plate to the front baffle plate. When overturning the wafer boat to the opening side direction from the opening upward state, overturning the wafer boat by holding the handle, wherein the whole weight is heavier when placing the wafer in the wafer boat, and if the handle is horizontally or vertically arranged, the wafer boat is easy to slip between the hand and the overturning process, so that the handle is obliquely arranged to accord with the habit of a hand, and the wafer boat is easy to operate and safer.
Furthermore, the height of the front baffle is lower than that of the rear baffle, and the front surface of the wafer faces the direction of the rear baffle when the wafer is arranged in the slot. The empty block on the front baffle plate is mainly used for balancing the gas flow of the wafer in the wafer boat, and the wafer backs to the front baffle plate when in the wafer boat.
Furthermore, a groove matched with the long edge of the U-shaped limiting rod is formed in the outer wall surface of the side plate, and the groove is communicated with the lower end of the L-shaped limiting groove. When the U-shaped limiting rod is arranged in the groove, the U-shaped limiting rod does not protrude out of the outer wall surface of the side plate, so that the U-shaped limiting rod is prevented from being extruded by the external environment, the U-shaped limiting rod or the L-shaped limiting groove is prevented from deforming, and the precision is influenced.
The invention has the beneficial effects that: according to the wafer boat with the wafer protection device, the U-shaped limiting rod is rotatably connected with the boat body side plate, the opening of the boat body is blocked by the U-shaped limiting rod when the boat body is turned over, wafers are prevented from falling out, the side edge of the U-shaped limiting rod is clamped into the L-shaped limiting groove in the side plate through the spring, the position of the U-shaped limiting rod is limited, the reliability of stopping of the U-shaped limiting plate is guaranteed, the structure is simple, and the generation of fragments is reduced.
Drawings
The invention is further illustrated by the following figures and examples.
FIG. 1 is a schematic structural diagram of a preferred embodiment of the present invention;
FIG. 2 is a schematic structural view of a U-shaped limiting rod blocking at an opening of a boat body;
FIG. 3 is an enlarged schematic view of A in FIG. 2;
FIG. 4 is a schematic view of the U-shaped stop lever being received in a groove of a side plate;
FIG. 5 is a schematic view of the U-shaped stop lever being received in a groove of a side plate;
FIG. 6 is an enlarged schematic view of B in FIG. 5;
FIG. 7 is a schematic view of the U-shaped stop lever engaging the side plate;
fig. 8 is a schematic structural diagram of a wafer.
In the figure: 1. the wafer-shaped material supporting boat comprises a boat body, 11, side plates, 111, a first slot, 112, a second slot, 113, an avoiding groove, 114, a groove, 12, a front baffle, 13, a rear baffle, 14, a material supporting rod, 2, a slot, 3, a wafer, 4, an L-shaped limiting groove, 5, a U-shaped limiting rod, 51, a rotating part, 52, a pressing part, 6, a spring, 7 and a handle.
Detailed Description
The present invention will now be described in detail with reference to the accompanying drawings. This figure is a simplified schematic diagram, and merely illustrates the basic structure of the present invention in a schematic manner, and therefore it shows only the constitution related to the present invention.
As shown in fig. 1-8, the wafer boat with the wafer protection device of the present invention includes a boat body 1 and a protection device disposed on the boat body 1, wherein a row of slots 2 for placing wafers 3 is disposed in the boat body 1, an opening for storing or taking out the wafers 3 is disposed at an upper end of the boat body 1, the protection device includes a U-shaped limiting rod 5 and a limiting component, the U-shaped limiting rod 5 is rotatably connected with a side plate 11 of the boat body 1, the U-shaped limiting rod 5 rotates along a rotation center to be close to or far away from the opening of the boat body 1, and the limiting component is configured to fix the U-shaped limiting rod 5 at the opening of the boat body 1 or on an outer wall surface of the side plate 11.
Spacing subassembly is including locating L shape spacing groove 4 on the curb plate 11 lateral wall, 4 diapire corners in L shape spacing groove are equipped with first slot 111, be equipped with second slot 112 on the opposite side lateral wall that curb plate 11 and L shape spacing groove 4 set up relatively, 5 openings of U-shaped gag lever post are provided with two rotation parts 51 relatively, two rotation part 51 is inserted respectively and is located in first slot 111 and the second slot 112, rotation part 51 is in first slot 111 and second slot 112 internal rotation and is slided, be equipped with the drive in first slot 111 or the second slot 112U-shaped gag lever post 5 side card is located spring 6 in the L shape spacing groove 4. The spring 6 controls the side edge of one side of the U-shaped limiting rod 5 to be tightly attached to the side wall of the side plate 11, and when the side edge of the U-shaped limiting rod 5 slides into the L-shaped limiting groove 4, the position of the U-shaped limiting rod 5 is clamped.
The U-shaped limiting rod 5 is provided with a pressing part 52 which is used for overcoming the elastic force of the spring 6 to drive the side edge of the U-shaped limiting rod 5 to be separated from the L-shaped limiting groove 4.
And an avoiding groove 113 for allowing the side edge of the U-shaped limiting rod 5 to be separated from the L-shaped limiting groove 4 is formed in one side of the side plate 11 close to the L-shaped limiting groove 4.
The boat body 1 comprises two side plates 11 which are oppositely arranged, a front baffle plate 12 and a rear baffle plate 13 are arranged between the two side plates 11, two material supporting rods 14 which are arranged at intervals and used for supporting the bottom of the wafer 3 are arranged between the front baffle plate 12 and the rear baffle plate 13, and the L-shaped limiting grooves 4 are formed in the side walls, close to the front baffle plate 12, of the side plates 11.
The height of the front baffle 12 is lower than that of the rear baffle 13, and the front surface of the wafer 3 faces the direction of the rear baffle 13 when the wafer is arranged in the slot 2.
The outer wall surface of the side plate 11 is provided with a groove 114 matched with the long edge of the U-shaped limiting rod 5, and the groove 114 is communicated with the lower end of the L-shaped limiting groove 4.
The working process is as follows:
the wafer 3 is arranged in the slot 2 of the boat body 1, when the wafer 3 needs to be transferred between the boat bodies 1, a worker holds the handles 7 at two sides of the side plate 11 to turn over the boat body 1, and the opening of the boat body 1 is turned over from upward to lateral;
before the boat body 1 is turned over, a pressing part 52 on a U-shaped limiting rod 5 is pressed, a spring 6 arranged in a first groove 114 is compressed, one side, away from the pressing part 52, of the U-shaped limiting rod 5 slides out of an L-shaped limiting groove 4, the U-shaped limiting rod 5 rotates along the rotation center, the U-shaped limiting rod 5 rotates to the opening of the boat body 1, the pressing part 52 is loosened, the spring 6 in the first groove 114 resets, the side edge, close to the L-shaped limiting groove 4, of the U-shaped limiting rod 5 is clamped into the L-shaped limiting groove 4, the U-shaped limiting rod 5 is fixed in position at the moment, and the wafer 3 is prevented from falling out of the opening of the boat body 1 in the turning process of the boat body 1;
after the opening of the boat body 1 is turned to the side direction and is set up, the staff presses down the pressing part 52, the spring 6 in the first groove 114 is located in the compression, the U-shaped limiting rod 5 is far away from the L-shaped limiting groove 4 of one side of the pressing part 52, the U-shaped limiting rod 5 is rotated along the rotation center, the U-shaped limiting rod 5 is rotated to the groove 114 on the side plate 11, the pressing part 52 is loosened, the spring 6 in the first groove 114 resets, the side edge of the U-shaped limiting rod 5, which is close to the L-shaped limiting groove 4, is clamped into the L-shaped limiting groove 4, the U-shaped limiting rod 5 is fixed in position at the moment, and the wafer 3 transfer cannot be influenced.
Directions and references (e.g., up, down, left, right, etc.) may be used in the present disclosure only to aid in the description of features in the figures. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the claimed subject matter is defined only by the appended claims and equivalents thereof.
In light of the foregoing description of preferred embodiments in accordance with the invention, it is to be understood that numerous changes and modifications may be made by those skilled in the art without departing from the scope of the invention. The technical scope of the present invention is not limited to the contents of the specification, and must be determined according to the scope of the claims.
Claims (8)
1. A wafer boat with a wafer protection device is characterized in that: including the boat body (1) and locate the protection device on the boat body (1), be equipped with one row of slot (2) that are used for placing wafer (3) in the boat body (1), boat body (1) upper end is equipped with the opening of depositing or taking out wafer (3), protection device includes U-shaped gag lever post (5) and spacing subassembly, U-shaped gag lever post (5) with curb plate (11) of the boat body (1) rotate to be connected, U-shaped gag lever post (5) rotate along the rotation center and are close to or keep away from the opening of the boat body (1), spacing subassembly be used for with U-shaped gag lever post (5) are fixed at the opening part of the boat body (1) or are fixed on curb plate (11) outer wall.
2. The wafer boat with wafer protection device as claimed in claim 1, wherein: spacing subassembly is including locating L shape spacing groove (4) on curb plate (11) lateral wall, L shape spacing groove (4) diapire corner is equipped with first slot (111), be equipped with second slot (112) on curb plate (11) and the opposite side lateral wall that L shape spacing groove (4) set up relatively, U-shaped gag lever post (5) opening part is provided with two rotation portion (51) relatively, two rotation portion (51) are inserted respectively and are located in first slot (111) and second slot (112), be equipped with the drive in first slot (111) or second slot (112) U-shaped gag lever post (5) side card is located spring (6) in L shape spacing groove (4).
3. The wafer boat with wafer protection device as claimed in claim 2, wherein: the U-shaped limiting rod (5) is provided with a pressing part (52) which is used for overcoming the elastic force of the spring (6) to drive the side edge of the U-shaped limiting rod (5) to be separated from the L-shaped limiting groove (4).
4. The wafer boat with wafer protection device as claimed in claim 2 or 3, wherein: one side of the side plate (11) close to the L-shaped limiting groove (4) is provided with an avoiding groove (113) for the U-shaped limiting rod (5) to deviate from the L-shaped limiting groove (4) at the side edge.
5. The wafer boat with wafer protection device as claimed in claim 4, wherein: the boat body (1) comprises two side plates (11) which are oppositely arranged, a front baffle (12) and a rear baffle (13) are arranged between the side plates (11), one or more material supporting rods (14) which are arranged at intervals and used for supporting the bottom of the wafer (3) are arranged between the front baffle (12) and the rear baffle (13), and the L-shaped limiting groove (4) is arranged on the side wall, close to the front baffle (12), of each side plate (11).
6. The wafer boat with wafer protection device as claimed in claim 5, wherein: handles (7) are arranged on the outer wall surfaces of the two side plates (11), and the handles (7) incline upwards from the rear baffle (13) to the front baffle (12).
7. The wafer boat with wafer protection device as claimed in claim 5, wherein: the height of the front baffle (12) is lower than that of the rear baffle (13), and the front surface of the wafer (3) faces the direction of the rear baffle (13) when the wafer is arranged in the slot (2).
8. The wafer boat with wafer protection device as claimed in claim 1, wherein: the outer wall surface of the side plate (11) is provided with a groove (114) matched with the long edge of the U-shaped limiting rod (5), and the groove (114) is communicated with the lower end of the L-shaped limiting groove (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111320511.8A CN114093796A (en) | 2021-11-09 | 2021-11-09 | Wafer boat with wafer protection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111320511.8A CN114093796A (en) | 2021-11-09 | 2021-11-09 | Wafer boat with wafer protection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114093796A true CN114093796A (en) | 2022-02-25 |
Family
ID=80299682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111320511.8A Pending CN114093796A (en) | 2021-11-09 | 2021-11-09 | Wafer boat with wafer protection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114093796A (en) |
-
2021
- 2021-11-09 CN CN202111320511.8A patent/CN114093796A/en active Pending
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