CN114072620A - 一种用于半导体制造的洁净室系统及其电场除尘方法 - Google Patents

一种用于半导体制造的洁净室系统及其电场除尘方法 Download PDF

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CN114072620A
CN114072620A CN202080030943.2A CN202080030943A CN114072620A CN 114072620 A CN114072620 A CN 114072620A CN 202080030943 A CN202080030943 A CN 202080030943A CN 114072620 A CN114072620 A CN 114072620A
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electric field
anode
cathode
electrode
clean room
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唐万福
赵晓云
王大祥
段志军
邹永安
奚勇
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Shanghai Bixiufu Enterprise Management Co Ltd
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
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    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/01—Pretreatment of the gases prior to electrostatic precipitation
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    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/02—Plant or installations having external electricity supply
    • B03C3/04—Plant or installations having external electricity supply dry type
    • B03C3/06—Plant or installations having external electricity supply dry type characterised by presence of stationary tube electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/41—Ionising-electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/45—Collecting-electrodes
    • B03C3/47—Collecting-electrodes flat, e.g. plates, discs, gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C3/00—Separating dispersed particles from gases or vapour, e.g. air, by electrostatic effect
    • B03C3/34—Constructional details or accessories or operation thereof
    • B03C3/40—Electrode constructions
    • B03C3/45—Collecting-electrodes
    • B03C3/49—Collecting-electrodes tubular
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F1/00—Room units for air-conditioning, e.g. separate or self-contained units or units receiving primary air from a central station
    • F24F1/02—Self-contained room units for air-conditioning, i.e. with all apparatus for treatment installed in a common casing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit

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  • Engineering & Computer Science (AREA)
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Abstract

一种用于半导体制造的洁净室系统，包括洁净室(101)、电场除尘系统(102)；洁净室(101)包括气体入口；电场除尘系统(102)包括除尘系统出口、电场装置(1021)；洁净室的气体入口与电场除尘系统(102)的除尘系统出口连通；电场装置(1021)包括电场装置入口(1011)、电场装置出口、电场阴极(5081)和电场阳极(5082)，电场阴极(5081)和电场阳极(5082)用于产生电离电场；电场装置(1021)还包括辅助电场单元，用于产生与电离电场不平行的辅助电场。还包括相应的电场除尘方法、半导体制造系统以及半导体制造方法，能有效除去半导体制造行业中的颗粒物。

Description

PCT国内申请，说明书已公开。

Claims (32)

  1. PCT国内申请，权利要求书已公开。
CN202080030943.2A 2019-04-25 2020-04-24 一种用于半导体制造的洁净室系统及其电场除尘方法 Pending CN114072620A (zh)

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Application Number Priority Date Filing Date Title
CN201910340445 2019-04-25
CN201910340443 2019-04-25
CN2019103404438 2019-04-25
CN2019103404457 2019-04-25
CN201910446294 2019-05-27
CN2019104462943 2019-05-27
CN2019104521693 2019-05-28
CN201910452169 2019-05-28
CN2019105224887 2019-06-17
CN201910522488 2019-06-17
CN201910521796 2019-06-17
CN2019105217968 2019-06-17
CN201910605156 2019-07-05
CN2019106051565 2019-07-05
CN2019106367106 2019-07-15
CN201910636710 2019-07-15
CN2020103236543 2020-04-22
CN202010323654.3A CN113522526A (zh) 2020-04-22 2020-04-22 一种用于半导体制造的洁净室系统及其电场除尘方法
CN2020103226363 2020-04-22
CN202010322636.3A CN113522525A (zh) 2020-04-22 2020-04-22 一种用于半导体制造的洁净室系统及其多级电场除尘方法
PCT/CN2020/086850 WO2020216355A1 (zh) 2019-04-25 2020-04-24 一种用于半导体制造的洁净室系统及其电场除尘方法

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CN202080030943.2A Pending CN114072620A (zh) 2019-04-25 2020-04-24 一种用于半导体制造的洁净室系统及其电场除尘方法
CN202080030933.9A Pending CN113727782A (zh) 2019-04-25 2020-04-24 一种用于半导体制造的洁净室系统的多级电场除尘方法及半导体制造方法
CN202080030944.7A Pending CN114072619A (zh) 2019-04-25 2020-04-24 一种用于半导体制造的洁净室系统及其电场除尘方法
CN202090000511.2U Active CN218763868U (zh) 2019-04-25 2020-04-24 一种用于半导体制造的洁净室系统及半导体制造系统
CN202080030942.8A Pending CN113727783A (zh) 2019-04-25 2020-04-24 一种用于设计半导体制造洁净室系统多级电场除尘系统的方法

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CN202080030944.7A Pending CN114072619A (zh) 2019-04-25 2020-04-24 一种用于半导体制造的洁净室系统及其电场除尘方法
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