CN113877891B - Sticky adsorption type foreign matter removing device - Google Patents

Sticky adsorption type foreign matter removing device Download PDF

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Publication number
CN113877891B
CN113877891B CN202010619986.6A CN202010619986A CN113877891B CN 113877891 B CN113877891 B CN 113877891B CN 202010619986 A CN202010619986 A CN 202010619986A CN 113877891 B CN113877891 B CN 113877891B
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CN
China
Prior art keywords
sticky
foreign matter
base
matter removing
rod
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Active
Application number
CN202010619986.6A
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Chinese (zh)
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CN113877891A (en
Inventor
蔡孟伟
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Marketech International Corp
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Marketech International Corp
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Priority to CN202010619986.6A priority Critical patent/CN113877891B/en
Publication of CN113877891A publication Critical patent/CN113877891A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning In General (AREA)

Abstract

The invention relates to a sticky adsorption type foreign matter removing device, which is mainly characterized in that a sticky mechanism and an adsorption mechanism are arranged on a base, the sticky mechanism is internally provided with a sticky rod which can freely move up and down and is obliquely arranged, the adsorption mechanism can be externally connected with air exhaust equipment, a suction nozzle of the adsorption mechanism is positioned at the side edge of the sticky rod, and a suction port of the suction nozzle faces towards a sticky part at the bottom end of the sticky rod, when the sticky adsorption type foreign matter removing device is applied to the foreign matter removing operation on the surface of an object such as a photomask and the like, the sticky part of the sticky rod can be used for sticking target foreign matters on the surface of an object, wherein when the sticky rod which is obliquely arranged and can freely move up and down is used for touching and sticking the target foreign matters, the action force acting on the object is reduced by utilizing the reverse rising action of the sticky rod, the object is prevented from being damaged, in addition, after the target foreign matters are stuck on the object and separated from the surface of the object, the target foreign matters are directly sucked and removed by the adsorption mechanism, the next target foreign matter removing operation can be executed again, and the operation efficiency is improved.

Description

Sticky adsorption type foreign matter removing device
Technical Field
The present invention relates to an object surface cleaning device, and more particularly to a sticky and adsorptive foreign matter removing device for removing foreign matter on the surface of an object such as a photomask.
Background
In the electronics industry, vapor deposition techniques are widely used to achieve fine patterned coatings, and in the foregoing coating process operations, a mask is provided as an essential part for creating the shape of the fine patterned coating. Meanwhile, in order to ensure that the product requirements can be met when the photomask is used for coating the substrate, foreign matters cannot exist on the surface of the photomask, so that the surface of the photomask needs to be inspected after the photomask is used for a period of time, and once the foreign matters are found to be adhered to the surface of the photomask, the photomask needs to be subjected to foreign matter removal operation.
The foreign matter removing device for removing foreign matter on the surface of a cleaning photomask usually adopts an adhesion transfer type mechanism, wherein an adhesive part with adhesiveness at the tail end of an adhesive part is controlled to contact with target foreign matter on the surface of the photomask, the target foreign matter is moved away from the surface of the photomask, then the adhesive part is controlled to move to a transfer mechanism, the adhesiveness of the adhesive part of the transfer mechanism is higher than that of the adhesive part, so that the target foreign matter adhered to the adhesive part can be transferred to the adhesive part of the transfer mechanism, and then the adhesive part is controlled to execute next target foreign matter removing operation on the surface of the photomask.
Although the aforementioned adhesion transfer type foreign matter removing device can perform a foreign matter removing operation on the surface of the mask, the adhesion member in the adhesion transfer type foreign matter removing device is of a fixed structure, and thus, when the adhesion member contacts a target foreign matter on the surface of the mask with the adhesion portion thereof, a force is applied to the mask. Because the conventional photomask generally adopts a thin metal plate to prevent the shadow effect (shadow effect) generated in the coating process, when a sticky part touches the surface of the photomask, the photomask is easily damaged due to improper control of contact force based on the thin thickness of the photomask. Moreover, the adhesion transfer type foreign matter removing device is controlled to contact the target foreign matter on the surface of the photomask by the adhesion part at the tail end of the adhesion part, and after the target foreign matter is removed from the surface of the photomask, the adhesion transfer type foreign matter removing device needs to be moved to the transfer mechanism, so that the target foreign matter adhered by the adhesion part is transferred to the adhesion part of the transfer mechanism, the whole actuating stroke distance is long, the actuating steps are multiple, the operation is time-consuming, and the foreign matter removing efficiency is poor.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: provides a sticking and adsorbing type foreign matter removing device, which solves the problems that the existing sticking and transferring type foreign matter removing device used for cleaning the surfaces of objects such as a photomask is easy to damage the objects such as the photomask and the like and the operation is time-consuming.
The technical solution proposed by the invention is as follows: the utility model provides a be stained with and adhere formula foreign matter remove device, it includes a base and installs in a mechanism of being stained with of this base, it still includes an adsorption equipment structure, wherein:
the base is defined with a vertical base shaft and an oblique working shaft and comprises an assembled base part and a bearing part connected with the assembled base part;
the sticking mechanism comprises a block body and a sticking rod, the block body is fixed on the bearing part of the base, the sticking rod is obliquely penetrated and arranged in the block body in parallel with the working shaft, the sticking rod can obliquely move downwards by a limited distance of gravity and protrude to the lower part of the base and can be forced to move upwards, and the bottom end of the sticking rod is a sticking part with sticking property;
the adsorption mechanism is arranged on the base and can extend to the lower part of the base, the adsorption mechanism is provided with an adsorption part which can be externally connected with an air exhaust device, the bottom end of the adsorption part is a suction nozzle with an adsorption port, the suction nozzle is positioned on one side of the sticky bar, and the adsorption port of the suction nozzle faces downwards and faces towards the sticky part.
In the above-mentioned sticky and adsorptive foreign matter removing device, an inner angle of the working shaft with respect to the base shaft is less than 90 degrees and greater than or equal to 45 degrees.
In the sticky adsorption type foreign matter removing device, a slant hole parallel to the working shaft is formed in the block, the sticky stick comprises a stick body and a limiting block, the stick body can movably penetrate through the slant hole of the block, the sticky portion is arranged at the bottom end of the stick body, and the limiting block is arranged at the upper section of the stick body and can be positioned above the block to abut against the limit.
In the above adhesion and adsorption type foreign matter removing device, the assembly base is provided with at least one slide rail parallel to the working shaft, the bearing part is mounted on the slide rail, the adhesion and adsorption type foreign matter removing device further comprises a displacement driving mechanism, the displacement driving mechanism is mounted on the assembly base and connected with the bearing part, and the displacement driving mechanism can drive the bearing part and the adhesion mechanism and the adsorption mechanism on the bearing part to move and reset along the slide rail at a limited distance.
The invention has the advantages that the sticky adsorption type foreign matter removing device is applied to the operation of removing foreign matters on the surfaces of objects such as a photomask by virtue of the integral composition structure of the sticky adsorption type foreign matter removing device, wherein when the foreign matters on the surfaces of the objects such as the photomask are removed, the sticky rod which is obliquely arranged in the block body in a penetrating way by virtue of the sticky mechanism naturally obliquely droops in an oblique way by virtue of gravity, and after the sticky part touches a target foreign matter, the sticky rod can be naturally lifted up to reduce the acting force applied to the objects such as the photomask, so that the sticky rod can not damage the objects such as the photomask.
In addition, the sticky adsorption type foreign matter removing device is driven to move after the sticky rod adheres the target foreign matter, so that the sticky rod adheres the target foreign matter to be separated from the surfaces of the objects such as the photomask, meanwhile, the adsorption mechanism is utilized to directly adsorb the target foreign matter adhered to the sticky part at the tail end of the sticky rod, the sticky adsorption type foreign matter removing device can further remove the next target foreign matter, the operation time is effectively shortened, and therefore, the device can improve the efficiency of the foreign matter removing operation on the surfaces of the objects such as the photomask in a simple and rapid operation mode.
In the above adhering and adsorbing type foreign matter removing device, the inner angle of the working shaft relative to the base shaft can be set to be smaller than 90 degrees and larger than or equal to 45 degrees, so that the adhering rod which is parallel to the working shaft and obliquely penetrates through the block body has a better natural lifting function.
In the above adhering and adsorbing type foreign matter removing device, a slide rail parallel to the working shaft may be further disposed on the assembly base of the base, the bearing portion is mounted on the slide rail, a displacement driving mechanism is further mounted on the assembly base and connected to the bearing portion by the displacement driving mechanism, the displacement driving mechanism can drive the bearing portion, the adhering mechanism thereon, and the adsorbing mechanism to move and reset along the slide rail at a limited distance, so that the adhering and adsorbing type foreign matter removing device has a better control performance for accurately controlling adhering and adsorbing a target foreign matter when performing a target foreign matter operation on an object such as a photomask.
Drawings
The drawings described herein are for illustration purposes only and are not intended to limit the scope of the present disclosure in any way. In addition, the shapes, the proportional sizes, and the like of the respective members in the drawings are merely schematic for facilitating the understanding of the present invention, and do not specifically limit the shapes, the proportional sizes, and the like of the respective members of the present invention. Those skilled in the art, having the benefit of the teachings of this invention, may choose from the various possible shapes and proportional sizes to implement the invention as a matter of case.
Fig. 1 is a schematic perspective view of a sticky and adsorptive foreign material removing apparatus according to a preferred embodiment of the present invention.
Fig. 2 is a front plan view schematically illustrating a preferred embodiment of the sticking and adsorbing type foreign material removing apparatus shown in fig. 1.
Fig. 3 is a schematic side plan view of the sticky suction type foreign matter removing apparatus shown in fig. 1 according to a preferred embodiment.
Fig. 4 is a schematic perspective view of the adhering and adsorbing type foreign matter removing device shown in fig. 1 after the adhering mechanism and the adsorbing mechanism are driven to move.
Fig. 5 is a front plan view of the adhering and adsorbing type foreign matter removing device shown in fig. 1 according to the preferred embodiment after the adhering mechanism and the adsorbing mechanism are driven to move.
Fig. 6 is a reference diagram (one) of a state in which the sticky and adsorptive foreign matter removing apparatus of fig. 1 is used for cleaning a mask surface.
Fig. 7 is a reference diagram (ii) of a state of use of the sticky and adsorptive foreign matter removing apparatus of fig. 1 in cleaning a mask surface.
FIG. 8 is a reference diagram (III) of the preferred embodiment of the sticky and adsorptive foreign matter removal apparatus shown in FIG. 1 applied to the cleaning operation of the mask surface.
FIG. 9 is a reference diagram (IV) illustrating the use status of the stick-on-suction type foreign material removal apparatus of FIG. 1 in cleaning the surface of the reticle.
Description of reference numerals:
1. a sticky adsorption type foreign matter removing device;
10. a base;
101. a base shaft;
102. a working shaft;
theta, the internal angle of the working shaft relative to the base shaft;
11. assembling the base part;
12. a bearing part;
13. a slide rail;
20. a sticking mechanism;
21. a block body;
211. perforating in an inclined way;
22. a sticky bar;
221. a rod body;
222. a limiting block;
223. a sticky part;
30. an adsorption mechanism;
31. an adsorbing member;
32. a suction nozzle;
33. an adsorption port;
40. a displacement drive mechanism;
2. a platform;
3. a drive device;
4. a photomask;
5. a target foreign matter.
Detailed Description
The technical means adopted by the invention to achieve the predetermined purpose are further described below with the help of the drawings and the preferred embodiments of the invention.
As shown in fig. 1 to 3, which illustrate a preferred embodiment of the sticky and adsorptive foreign matter removing apparatus according to the present invention, it can be seen from the drawings that the sticky and adsorptive foreign matter removing apparatus 1 includes a base 10, a sticky mechanism 20, and an adsorption mechanism 30.
The base 10 defines a base axis 101 in a vertical direction and an oblique working axis 102, an inner angle θ of the working axis 102 with respect to the base axis 101 is smaller than 90 degrees and greater than or equal to 45 degrees, preferably, the inner angle θ of the working axis 102 with respect to the base axis 101 can be 45 degrees, 60 degrees or 75 degrees, the base 10 includes a group of connection bases 11 and a carrying portion 12, the carrying portion 12 is connected to the group of connection bases 11, the carrying portion 12 can be fixed to the group of connection bases 11, or the carrying portion 12 of the base 10 is movably assembled to the group of connection bases 11, and the carrying portion 12 can be controlled to move and reset along the direction of the working axis 102 for a limited distance.
The adhering mechanism 20 is installed on the base 10 and can extend to the lower part of the base 10, the adhering mechanism 20 includes a block 21 and an adhering rod 22, the block 21 is fixed on the bearing part 12 of the base, the adhering rod 22 is obliquely inserted into the block 21 parallel to the working shaft 102, the adhering rod 22 is obliquely moved downwards and protrudes to the lower part of the base 10 by limited distance of gravity and is forced to move upwards, wherein, by setting an angle (namely, the included angle between the working shaft 102 and the base shaft 101) theta of the inner angle (the included angle between the working shaft 102 and the base shaft 101) theta of the working shaft 102 relative to the base shaft 101 is smaller than 90 degrees and larger than or equal to 45 degrees (namely, the included angle is larger than or equal to 45 degrees and smaller than 90 degrees), the adhering rod 22 obliquely inserted into the block 21 parallel to the working shaft 10 has a better natural lifting function. The bottom of the stick bar 22 is a sticky portion 223 with adhesiveness. In the preferred embodiment, the block body 21 has an oblique through hole 211 parallel to the working axis 102, the sticky bar includes a bar body 221 and a stop block 222, the bar body 221 can movably penetrate through the oblique through hole 211 of the block body 21, the sticky portion 223 is disposed at the bottom end of the bar body 221, and the stop block 222 is disposed at the upper section of the bar body 221 and can be located above the block body 21 to abut against and limit.
The adsorption mechanism 30 is installed on the base 10 and can extend to the lower part of the base 10, the adsorption mechanism 30 has an adsorption part 31, the adsorption part 31 can be externally connected with an air extractor, the bottom end of the adsorption part 31 is provided with an adsorption port 33 and a suction nozzle 32, the suction nozzle 32 is located on one side of the sticking rod 22, and the adsorption port 33 of the suction nozzle 32 faces downwards and faces the sticking part 223. When the sticky portion 223 is located at the lowest position, the height position of the suction port 33 of the suction nozzle 32 is slightly higher than the height position of the sticky portion 223, and the height position of the suction port 33 of the suction nozzle 32 relative to the sticky portion 223 is set according to the magnitude of the suction force passing through the suction nozzle 32.
As shown in fig. 1 to 3, 4 and 5, in the sticky and adsorptive foreign matter removing device 1, when the carrying portion 12 of the base 10 is movably assembled on the assembly base 11 and can be controlled to move and reset along the direction of the working shaft 102 for a limited distance, the sticky and adsorptive foreign matter removing device 1 further includes a displacement driving mechanism 40, wherein at least one sliding rail 13 is disposed on one side surface of the assembly base 11, the sliding rail 13 is parallel to the working shaft 102, the carrying portion 12 is installed on the sliding rail 13, the displacement driving mechanism 40 is installed on the assembly base 11 and connected to the carrying portion 12, and the displacement driving mechanism 40 can drive the carrying portion 12 and the sticky mechanism 20 and the adsorptive mechanism 30 thereon to move and reset along the sliding rail 13 for a limited distance. The displacement driving mechanism 40 can be a fluid pressure cylinder such as a pneumatic cylinder or a linear driving assembly of a motor and a screw, but not limited thereto. In the preferred embodiment, the displacement driving mechanism 40 is a pneumatic cylinder, and the pneumatic cylinder is connected to an external pneumatic pressure supply source, so that the pneumatic cylinder can be controlled to drive the carrying portion 12, the adhering mechanism 20 thereon, and the adsorbing mechanism 30 to move and reset in a limited distance.
The sticky and adsorptive foreign matter removing apparatus 1 of the present invention can be applied to the cleaning operation of the foreign matter on the surface of the mask, and also can be applied to the cleaning operation of the foreign matter on the surface of other objects. Taking the application to a photomask cleaning device as an example, the device is installed above a platform 2 of the photomask cleaning device and used for cleaning a photomask 4 placed on the platform 2, the sticky and adsorptive foreign matter removing device 1 is based on the mechanism of the photomask cleaning device, the sticky and adsorptive foreign matter removing device 1 can be fixed at a preset position in the photomask cleaning device, and the photomask 4 is arranged on the platform 2 capable of being driven to move in a three-dimensional space (three-dimensional space), or the photomask 4 is arranged on the platform 2 at a fixed position in the photomask cleaning device, the sticky and adsorptive foreign matter removing device 1 is connected with a driving device 3 in the photomask cleaning device, and can be driven by the driving device 3 to move in a three-dimensional space relative to the photomask 4 on the platform 2. The mask cleaning apparatus is a conventional apparatus, and the specific structure thereof is not described herein.
When the sticky adsorption type foreign matter removing device 1 of the present invention executes foreign matter on the surface of the photomask 4, taking the sticky adsorption type foreign matter removing device 1 with the displacement driving mechanism 40 as an example, please refer to fig. 6 to 9, after the photomask cleaning apparatus determines the three-dimensional position of the target foreign matter 5 on the surface of the photomask 4 by means of image recognition, when the sticky adsorption type foreign matter removing device 1 is controlled to move to the predetermined position above the photomask 4, the sticky portion 223 of the sticky stick 22 is obliquely aligned with the target foreign matter 5 on the photomask 4, wherein the sticky stick 22 which is obliquely movably arranged on the base 10 naturally and obliquely droops by gravity. Next, the displacement driving mechanism 40 is controlled to drive the bearing portion 12 of the base 10 and the adhering mechanism 20 and the adsorbing mechanism 30 thereon along the slide rail 13 until the adhering portion 223 of the adhering mechanism 20 contacts the target foreign object 5, and the target foreign object 5 is adhered by using the adhesiveness of the adhering portion 223, if the adhering portion 223 excessively contacts the target foreign object 5, the adhering rod 22 of the adhering mechanism 20 naturally droops obliquely by using gravity, so that when the adhering portion 223 touches the target foreign object 5, the adhering rod 22 is naturally lifted up to reduce the acting force applied on the mask 4, and it is ensured that the adhering rod 22 does not damage the mask 4.
After the adhering portion 223 of the adhering rod 22 adheres the target foreign object 5, the adhering and adsorbing type foreign object removing device 1 is used to remove the target foreign object 5 from the mask surface, wherein the displacement driving mechanism 40 of the adhering and adsorbing type foreign object removing device 1 is controlled to drive the carrying portion 12 of the base 10, the adhering mechanism 20 thereon and the adsorbing mechanism 30 to ascend along the slide rail 13, and simultaneously the target foreign object 5 ascends along with the adhering portion 223 and is separated from the surface of the mask 4, or the driving device 3 in the mask cleaning equipment is controlled to drive the adhering and adsorbing type foreign object removing device 1 to ascend integrally, and simultaneously the target foreign object 5 ascends along with the adhering portion 223 and is separated from the surface of the mask 4. When the target foreign matter 5 is lifted along with the adhering portion 223 to be separated from the surface of the mask 4, the suction device externally connected to the suction mechanism 30 is controlled to start, and the target foreign matter 5 on the adhering portion 223 is sucked by the suction nozzle 32 of the suction mechanism 30, so that the target foreign matter 5 is sucked by the suction nozzle 32. Then, the sticky and adsorptive foreign matter removing apparatus 1 can be controlled to perform a foreign matter removing operation on another target foreign matter of the mask or a target foreign matter of another mask.
Although the present invention has been described in terms of preferred embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications, equivalent arrangements, and equivalents thereof, which may be made by those skilled in the art without departing from the spirit and scope of the invention.

Claims (5)

1. The utility model provides a be stained with and adhere formula foreign matter remove device, it includes a base and installs in a mechanism of being stained with of this base, its characterized in that, should be stained with and adhere formula foreign matter remove device includes an adsorption apparatus structure, wherein:
the base is defined with a vertical base shaft and an oblique working shaft and comprises an assembled base part and a bearing part connected with the assembled base part;
the sticking mechanism comprises a block body and a sticking rod, the block body is fixed on the bearing part of the base, the sticking rod is obliquely penetrated and arranged in the block body in parallel with the working shaft, the sticking rod can obliquely move downwards by a limited distance of gravity and protrude to the lower part of the base and can be forced to move upwards, and the bottom end of the sticking rod is a sticking part with sticking property;
this adsorption apparatus constructs to be installed in this base and can extend the below of this base, and this adsorption apparatus constructs has an absorption piece, and this absorption piece can external air extraction equipment, and this absorption piece bottom is the suction nozzle that has the absorption mouth, and this suction nozzle is located this one side of being stained with glutinous stick, and the absorption mouth of this suction nozzle is down and should be stained with glutinous portion towards.
2. The tacky adsorption type foreign material removal apparatus according to claim 1, wherein an internal angle of the working shaft with respect to the base shaft is less than 90 degrees and greater than or equal to 45 degrees.
3. The sticky and adsorptive foreign matter removing device according to claim 1 or 2, wherein the block has an oblique hole parallel to the working axis, the sticky bar comprises a rod movably inserted in the oblique hole of the block, the sticky portion is disposed at the bottom of the rod, and the stopper is disposed at the upper portion of the rod and can be positioned above the block to abut against and limit the position of the block.
4. The sticky and adsorptive foreign matter removing device according to claim 1 or 2, wherein the assembly base portion has at least one slide rail parallel to the working shaft, the bearing portion is mounted on the slide rail, the sticky and adsorptive foreign matter removing device further comprises a displacement driving mechanism, the displacement driving mechanism is mounted on the assembly base portion and connected to the bearing portion, and the displacement driving mechanism can drive the bearing portion and the sticky mechanism and the adsorptive mechanism on the bearing portion to move and reset along the slide rail at a limited distance.
5. The sticky and adsorptive foreign matter removing device according to claim 3, wherein the assembly base has at least one slide rail parallel to the working shaft, the bearing portion is mounted on the slide rail, the sticky and adsorptive foreign matter removing device further comprises a displacement driving mechanism, the displacement driving mechanism is mounted on the assembly base and connected to the bearing portion, and the displacement driving mechanism can drive the bearing portion and the sticky mechanism and the adsorptive mechanism on the bearing portion to move and reset along the slide rail at a limited distance.
CN202010619986.6A 2020-07-01 2020-07-01 Sticky adsorption type foreign matter removing device Active CN113877891B (en)

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TWI725884B (en) * 2020-06-29 2021-04-21 帆宣系統科技股份有限公司 Adhesive adsorption type foreign matter removal device

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