CN113725371A

CN113725371A - Perovskite solar cell normal position flash distillation film forming device

Info

Publication number: CN113725371A
Application number: CN202111061686.1A
Authority: CN
Inventors: 李卫东; 李新连; 赵志国; 秦校军; 赵东明; 张赟; 夏渊; 熊继光; 梁思超
Original assignee: Huaneng Clean Energy Research Institute; Huaneng Renewables Corp Ltd
Current assignee: Huaneng Clean Energy Research Institute; Huaneng Renewables Corp Ltd
Priority date: 2021-09-10
Filing date: 2021-09-10
Publication date: 2021-11-30

Abstract

The invention discloses an in-situ flash evaporation film forming device for a perovskite solar cell, which comprises: a platform; the substrate is arranged on the platform and used for forming the film layer; the substrate is buckled in a closed cavity formed by the cavity cover and the platform in a movable mode, and a vacuum pipeline is arranged on the cavity cover and can be communicated with the closed cavity and the vacuum pump. After the film layer is formed, the cavity cover is directly lowered to carry out in-situ flash evaporation on the formed film layer, so that the turnover time from film forming equipment to flash evaporation equipment for the film layer is saved, the solvent is prevented from volatilizing in a natural state, and the quality of a finished product is ensured. In order to avoid the time occupied by starting the vacuum pump and further avoid the solvent volatilization of the film layer in a natural state, the vacuum pump is normally opened by arranging the electromagnetic valve on the vacuum tube. Once the film on the substrate is formed, the closed chamber can be evacuated immediately after the solenoid valve is opened.

Description

Perovskite solar cell normal position flash distillation film forming device

Technical Field

The invention relates to the technical field of film forming of perovskite solar cells, in particular to an in-situ flash evaporation film forming device for perovskite solar cells.

Background

Perovskite solar cells are receiving more and more attention due to their advantages of high conversion efficiency, low cost, environmental friendliness, etc. In addition, the photoelectric conversion efficiency of perovskite solar energy is improved by several times in a short period of several years, and the perovskite solar energy shows very excellent photoelectric performance. The preparation method of the film layer of the perovskite solar cell comprises the following steps: preparing a transparent conductive film on a substrate for an electrode layer on a light receiving side, then preparing a carrier transmission layer on the transparent conductive film, preparing a perovskite layer above the carrier transmission layer as a light absorption layer, then preparing a carrier transmission layer on the other side on the light absorption layer, and finally preparing a metal layer as a transparent conductive film on the other side.

In the prior art, a doctor blade process is generally used to prepare the film layer. After the draw down is complete, the formed film layer needs to be transferred to a vacuum chamber to remove the solvent, which is a flash evaporation process. In the prior art, the equipment for knife coating the film layer and the equipment for flash evaporation are two sets of independent equipment. After the film layer is formed by blade coating in a blade coating device, the formed film layer needs to be transferred to a flash evaporation device for flash evaporation. However, during the process of transferring the film from the doctor blade apparatus to the flash evaporation apparatus, part of the solvent in the film may volatilize, and the volatilization of the solvent in the natural state may affect the quality of the finished product.

Therefore, how to shorten the turnover time of the film layer, so as to avoid the solvent from volatilizing in a natural state, and further ensure the quality of the finished product is a critical problem to be solved urgently by the technical personnel in the field.

Disclosure of Invention

The invention aims to shorten the turnover time of a film layer, thereby avoiding solvent volatilization in a natural state and further ensuring the quality of a finished product. In order to achieve the purpose, the invention provides the following technical scheme:

an in-situ flash evaporation film forming device for a perovskite solar cell comprises:

a platform;

the substrate is arranged on the platform and used for forming a film layer;

the substrate processing device comprises a platform, a cavity cover and a vacuum pipeline, wherein the platform is arranged on the platform, the cavity cover can be arranged on the platform in a vertically movable mode, the substrate can be buckled in a closed cavity formed by the cavity cover and the platform through the cavity cover, the cavity cover is provided with the vacuum pipeline, and the vacuum pipeline can be communicated with the closed cavity and the vacuum pump.

Preferably, the vacuum tube is provided with an electromagnetic valve, the electromagnetic valve is used for conducting or closing the vacuum tube, and the vacuum pump is in a normally open state.

Preferably, the vacuum tube is plural, and the plural vacuum tubes are uniformly arranged with respect to the substrate.

Preferably, the vacuum pump is a plurality of vacuum pipes, two or more vacuum pipes are connected with the vacuum pump through connecting pipes, electromagnetic valves are arranged on the connecting pipes, and the vacuum pump is in a normally open state.

Preferably, a sealing ring is arranged on the platform, the sealing ring is arranged around the substrate, and a sealing ring groove capable of being matched with the sealing ring is arranged on the cavity cover.

Preferably, the platform is provided with an adsorption hole, the adsorption hole is communicated with a negative pressure pump, and the adsorption hole is used for adsorbing the substrate.

Preferably, the coating device further comprises a coating head, two sides of the coating head are respectively connected with a driving rod, the driving rods are connected with sliding blocks, the sliding blocks are matched in sliding rails, the sliding rails extend along the blade coating direction of the coating head, and the driving rods are driven by a linear driving device.

Preferably, the linear driving means is a linear motor, and each of the driving rods is driven by one of the linear motors.

Preferably, the chamber cover is driven by a cylinder.

Preferably, a fixing plate is arranged above the cavity cover, a guide hole is formed in the fixing plate, a guide post is arranged on the upper surface of the cavity cover, and the guide post is matched in the guide hole.

According to the technical scheme, in the initial state, the cavity cover is positioned above the platform, the substrate is exposed, and therefore the film layer can be scraped on the substrate. After the blade coating is finished, the cavity cover moves downwards, the substrate is buckled in the closed cavity, the vacuum pump and the vacuum tube are conducted to vacuumize the closed cavity, and flash evaporation is carried out to remove the solvent. After the film layer is formed, the cavity cover is directly lowered to carry out in-situ flash evaporation on the formed film layer, so that the turnover time from film forming equipment to flash evaporation equipment for the film layer is saved, the solvent is prevented from volatilizing in a natural state, and the quality of a finished product is ensured.

Drawings

In order to more clearly illustrate the solution of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained based on these drawings without inventive efforts.

Fig. 1 is a state diagram of an in-situ flash evaporation film forming apparatus for a perovskite solar cell according to an embodiment of the present invention at a certain moment during a flash evaporation operation;

fig. 2 is a state diagram of the perovskite solar cell in-situ flash evaporation film forming apparatus provided in an embodiment of the present invention at a certain moment when blade coating operation is performed;

FIG. 3 is a top view of a drive rod and slide rail according to one embodiment of the present invention;

fig. 4 is a front view of a cavity cover, a fixing plate and a guide post according to an embodiment of the present invention.

Wherein, 1 is a platform, 2 is a substrate, 3 is a cavity cover, 4 is a vacuum tube, 5 is an electromagnetic valve, 6 is a coating head, 7 is an air cylinder, 8 is a sealing ring, 9 is a sliding rail, 10 is a driving rod, 11 is a fixing plate, and 12 is a guide column.

Detailed Description

The invention discloses an in-situ flash evaporation film forming device for a perovskite solar cell, which can be used for flash evaporation of a film layer immediately under the condition that the position of the film layer is not changed, so that solvent is prevented from volatilizing in a natural state, and the quality of a finished product is ensured.

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, the terms "upper", "lower", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of describing the present invention but do not require that the present invention must be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

The invention discloses an in-situ flash evaporation film forming device for a perovskite solar cell, which comprises a platform 1, a substrate 2 and a cavity cover 3. Wherein, the substrate 2 is arranged on the platform 1 and used for forming the film layer. The chamber cover 3 is provided on the platform 1 movably up and down. After being buckled on the platform 1, the cavity cover 3 and the platform 1 form a closed cavity, and the substrate 2 is positioned in the closed cavity. I.e. the chamber cover 3 is capable of snapping the substrate 2 into the closed chamber enclosed by the chamber cover 3 and the platform 1, as shown in fig. 1. The cavity cover 3 is provided with a vacuum tube 4, and the vacuum tube 4 can be communicated with the closed cavity and the vacuum pump.

Referring to fig. 2, in an initial state, the chamber cover 3 is positioned above the stage 1, and the substrate 2 is exposed, so that a film layer may be drawn on the substrate 2. After the blade coating is finished, the cavity cover 3 is moved downwards, the substrate 2 is buckled in the closed cavity, the vacuum pump and the vacuum tube 4 are conducted to vacuumize the closed cavity, and flash evaporation is carried out to remove the solvent. After the film layer is formed, the cavity cover 3 is directly lowered to carry out in-situ flash evaporation on the formed film layer, so that the turnover time from film forming equipment to flash evaporation equipment for the film layer is saved, the solvent is prevented from volatilizing in a natural state, and the quality of a finished product is ensured.

After the film layer is formed on the substrate 2, in order to avoid the time occupied by starting the vacuum pump and further avoid the volatilization of a solvent of the film layer in a natural state, the invention is designed as follows: an electromagnetic valve 5 is arranged on the vacuum tube 4, and the electromagnetic valve 5 is used for conducting or closing the vacuum tube 4. The vacuum pump is in a normally open state. Once the film layer on the substrate 2 is formed, the chamber cover 3 is immediately lowered, and then the solenoid valve 5 is opened. Because the vacuum pump is in a normally open state, the closed cavity can be immediately vacuumized after the electromagnetic valve 5 is opened.

In order to ensure uniform pumping speed on the surface of the substrate 2, the vacuum tube 4 is provided in a plurality, and the plurality of vacuum tubes 4 are uniformly distributed relative to the substrate 2.

The vacuum tube 4 and the vacuum pump can be connected in the following way: two or more vacuum tubes 4 are connected to a vacuum pump through a connecting tube, or all vacuum tubes 4 may be connected to a vacuum pump through a connecting tube. An upper electromagnetic valve 5 is arranged on the connecting pipe, and the vacuum pump is in a normally open state. If a vacuum is required, the closed chamber can be immediately evacuated as soon as the solenoid valve 5 is opened. By adopting the connection mode in the embodiment, the usage amount of the electromagnetic valve 5 can be reduced.

In order to ensure the sealing performance of the closed cavity formed by the cavity cover 3 and the platform 1, the invention also provides the following design: a sealing ring 8 is arranged on the platform 1 around the substrate 2, and a sealing groove capable of being matched with the sealing ring 8 is arranged on the cavity cover 3. After the chamber cover 3 is lowered onto the platform 1, the sealing ring 8 on the platform 1 is just pressed into the sealing groove.

In order to ensure the stability and accuracy of the up-and-down movement of the chamber cover 3, the present invention further provides a guide post 12 and a fixing plate 11, as shown in fig. 4. The fixing plate 11 is disposed above the chamber cover 3. In particular, the fixing plate 11 may be fixed to a surrounding frame. In addition, the fixing plate 11 can be fixed on a support frame, and the support frame is arranged on the ground. The fixing plate 11 is provided with a guide hole. The guide post 12 is arranged on the upper surface of the cavity cover 3, and the guide post 12 is fixedly connected with the cavity cover 3. The guide post 12 is inserted into the guide hole. In the process that the cavity cover 3 moves, the cavity cover 3 can stably move up and down under the matching action of the guide columns 12 and the guide holes, and can be accurately buckled on the platform 1. The sealing ring 8 can enter the sealing ring groove accurately. The enclosed cavity is also a preset enclosed cavity, and the substrate 2 can be accurately buckled in the enclosed cavity.

The present invention provides the guide posts 12 in two in consideration of uniform guiding, and the two guide posts 12 are distributed at both ends of the chamber cover 3.

Since the coating head 6 for coating the film layer is provided below the chamber cover 3, the guide posts 12 and the fixing plate 11 are provided above the chamber cover 3 to avoid interference with the coating head 6.

It should also be noted that the up and down movement of the chamber cover 3 can be driven by the air cylinder 7. The cylinder 7 is convenient to control, and the operation precision is higher.

As is clear from the above description, the substrate 2 is arranged on the platform 1, and the substrate 2 needs to be fixed during the process of coating the film layer. For this purpose, the present invention provides adsorption holes on the stage 1. The adsorption holes are distributed uniformly relative to the substrate 2. All the adsorption holes are communicated with a negative pressure pump. In the process of scraping and coating the film layer, the negative pressure pump is started to enable the adsorption hole to generate negative pressure, so that the substrate 2 is firmly adsorbed.

It is common in the art to scrape the coating film layer onto the substrate 2 using a coating head 6. The coating head 6 needs to be moved from one side of the substrate 2 to the other. In the present invention, referring to fig. 3, the driving manner of the coating head 6 is as follows: two drive rods 10 are respectively connected to both sides of the coating head 6. The driving rod 10 is connected with a slide block which is matched in the slide rail 9. Due to the two drive rods 10, there are correspondingly two slides and two slide rails 9. The slide rails 9 extend along the direction of movement of the coating head 6. The driving lever 10 is disposed in a direction perpendicular to the slide rail 9. The drive rod 10 is driven by a linear drive. The linear driving device is used for outputting a straight line, thereby driving the driving rod 10 to move along the slide rail 9. The invention preferably uses a linear drive as the linear motor. And, two linear motors, each of which drives one driving rod 10.

As can be seen from the above description, the coating head 6 is located on one side of the platform 1 before the blade coating, and as the blade coating progresses, the coating head 6 moves to the other side of the platform 1. During the movement of the coating head 6, the cavity cover 3 is located above the substrate 2, and the drive rod 10 and the coating head 6 just pass through the gap between the cavity cover 3 and the substrate 2. After the blade coating is completed, the coating head 6 stops outside the projected range of the chamber cover 3, so that the chamber cover 3 does not interfere with the coating head 6 or the drive rod 10 during the descent.

The arrangement of the driving rod 10 of the invention not only can enable the coating head 6 to realize linear blade coating action, but also can ensure that the driving rod 10 can not interfere with the cavity cover 3. Therefore, the knife coating operation and the vacuum pumping operation can be ensured not to interfere with each other, and the knife coating operation and the vacuum pumping operation are completed in sequence under the condition that the position of the substrate 2 is not changed.

Finally, it should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An in-situ flash evaporation film forming device for a perovskite solar cell is characterized by comprising:

a platform;

the substrate is arranged on the platform and used for forming a film layer;

2. The perovskite solar cell in-situ flash evaporation film forming device as claimed in claim 1, wherein the vacuum tube is provided with an electromagnetic valve, the electromagnetic valve is used for conducting or closing the vacuum tube, and the vacuum pump is in a normally open state.

3. The perovskite solar cell in-situ flash evaporation film forming device as claimed in claim 1, wherein the vacuum tube is a plurality of vacuum tubes, and the vacuum tubes are uniformly arranged relative to the substrate.

4. The perovskite solar cell in-situ flash evaporation film forming device according to claim 1, wherein the vacuum tube is provided with a plurality of vacuum tubes, two or more vacuum tubes are connected with the vacuum pump through a connecting tube, an electromagnetic valve is arranged on the connecting tube, and the vacuum pump is in a normally open state.

5. The perovskite solar cell in-situ flash evaporation film forming device according to claim 1, wherein a sealing ring is arranged on the platform, the sealing ring is arranged around the substrate, and a sealing ring groove capable of being matched with the sealing ring is arranged on the cavity cover.

6. The perovskite solar cell in-situ flash evaporation film forming device as claimed in claim 1, wherein the platform is provided with an adsorption hole, the adsorption hole is communicated with a negative pressure pump, and the adsorption hole is used for adsorbing the substrate.

7. The perovskite solar cell in-situ flash evaporation film forming device according to claim 1, further comprising a coating head, wherein two driving rods are respectively connected to two sides of the coating head, sliders are connected to the driving rods and are matched in sliding rails, the sliding rails extend along the blade coating direction of the coating head, and the driving rods are driven by a linear driving device.

8. The perovskite solar cell in-situ flash evaporation film forming device according to claim 7, wherein the linear driving device is a linear motor, and each driving rod is driven by one linear motor.

9. The perovskite solar cell in-situ flash evaporation film forming device as claimed in claim 1, wherein the cavity cover is driven by a cylinder.

10. The perovskite solar cell in-situ flash evaporation film forming device as claimed in claim 1, wherein a fixing plate is arranged above the cavity cover, a guide hole is arranged on the fixing plate, and a guide post is arranged on the upper surface of the cavity cover and is matched in the guide hole.