CN202898531U - Transfer device for graphite plate of metal organic chemical vapor deposition equipment - Google Patents
Transfer device for graphite plate of metal organic chemical vapor deposition equipment Download PDFInfo
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- CN202898531U CN202898531U CN 201220484724 CN201220484724U CN202898531U CN 202898531 U CN202898531 U CN 202898531U CN 201220484724 CN201220484724 CN 201220484724 CN 201220484724 U CN201220484724 U CN 201220484724U CN 202898531 U CN202898531 U CN 202898531U
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- mechanical arm
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- graphite plate
- graphite
- transfer device
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Abstract
The utility model discloses a transfer device for a graphite plate of metal organic chemical vapor deposition equipment. A corrugated pipe is arranged on a bottom plate of a glove box. The bottom end of the corrugated pipe is in sealed connection with a lifting plate. The upper surface of the lifting plate is sequentially connected with a connecting sleeve, a rotary seat, a graphite plate support and the graphite plate. The graphite plate ascends or descends along with the lifting plate by compressing or stretching the corrugated pipe. A mechanical arm sliding guide rail and a graphite plate transfer device are arranged on the bottom plate of the glove box. A mechanical arm rotating shaft is arranged on the mechanical arm sliding guide rail. A mechanical arm cantilever rod is arranged at the top end of the mechanical arm rotating shaft. A mechanical arm clamping claw is arranged at the front end of the mechanical arm cantilever rod. A mechanical arm is driven by an external power device. The transfer device has the advantages that the mechanical arm is used for transferring the graphite plate, and is simple in structure and low in cost; and the sealing performance of the whole cavity is ensured, and meanwhile, the graphite plate is raised, and the mechanical arm slides to a proper position along the guide rail to remove the graphite plate from the reaction cavity in a way of clamping and transferring the graphite plate, so that the transfer device is convenient to operate, and the efficiency is improved.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors, particularly a kind of graphite plate transfer device for metal-organic chemical vapor deposition equipment.
Background technology
Metallorganics chemical vapor deposition (Metal Organic Chemical Vapor Deposition, being called for short MOCVD) to integrate precision optical machinery, semiconductor material, vacuum electronic, hydromeehanics, thermal conduction study, optics, chemistry, computer etc. multidisciplinary for technology, is high-end semiconductor material, the photoelectron specific equipment that a kind of level of automation is high, expensive, technology-intensive, skill level is high.MOCVD is as the epitaxially grown Perfected process of compound semiconductor materials, has the characteristics such as quality height, good stability, good reproducibility, technique be flexible, has broad application prospects and industrialization value.
MOCVD equipment thin film epitaxial growth process is to carry out at the substrate slice that is placed on the graphite plate, when graphite plate is cleaned or changes, graphite plate need to be taken out from the reaction cavity the inside.The mode of getting graphite plate in the prior art is after reaction chamber fully cools off, and opens the loam cake of reaction chamber, from the reaction cavity the inside graphite plate is taken out by hand.The weak point of this mode is to wait until that reaction chamber is cooled to get graphite plate and need to spends one long period, and manual complex operation, inefficiency of getting graphite plate.Through the description of above-mentioned background technology as can be known, it is very necessary finding a kind of quick, stable method that graphite plate is migrated out reaction chamber.
Summary of the invention
The purpose of this utility model is for the defective that exists in the prior art, and a kind of metal-organic chemical vapor deposition equipment graphite plate transfer device is provided.The utility model comprises: comprising: mechanical arm, glove box 1, spray dish 2, spray dish guide pillar 3, nose cone 7, lifter plate guide pillar 8, corrugated tube 9, lifter plate 10, adapter sleeve 11, corrugated tube 12, base matrix 13, rotary seat 14, millstone plate supports 15, graphite plate 16, graphite plate transferring device 17, mechanical arm is by mechanical arm gripping pawl 4, mechanical arm turning axle 5, mechanical arm cantilever lever 18 and mechanical arm rail plate 6 form, spray dish 2 is arranged in the glove box 1 through spray dish guide pillar 3, it is characterized in that described glove box 1 base plate is provided with a hole, base matrix 13 is fixed on the casing the inside of the base plate position of opening of glove box 1, nose cone 7 is fixed on the base matrix 13, the box sealing of the base plate position of opening of being connected with glove box in the top of corrugated tube 9 connects, its bottom and lifter plate 10 are tightly connected, lifter plate 10 upper surfaces successively with adapter sleeve 11, rotary seat 14, graphite plate supports 15 is connected connection with graphite plate, lifter plate 10 is driven by external impetus and moves up and down along lifter plate guide pillar 8, compression or stretching corrugated tube 9 are so that graphite plate 16 is followed lifter plate 10 risings or decline, rotary seat 14, graphite plate support 15 and graphite plate 16 all are arranged in the glove box 1, the base plate of glove box 1 is provided with a mechanical arm rail plate 6 and graphite plate transferring device 17, mechanical arm turning axle 5 is installed on the mechanical arm rail plate 6, mechanical arm cantilever lever 18 is equipped with on the top of mechanical arm turning axle 5, mechanical arm gripping pawl 4 is installed in the front end of mechanical arm cantilever lever 18, and mechanical arm is driven by the mechanical arm power set.External impetus drives lifter plate 10 and drives, when graphite plate 16 rises gradually, the emersion reaction chamber is until suitable position, mechanical arm can slide near reaction chamber along mechanical arm rail plate 6, mechanical arm can rotate to an angle around mechanical arm turning axle 5, near the graphite plate 16 in the graphite plate support 15, by programme controlled mechanical arm graphite plate 16 is migrated out reaction cavity again, graphite plate 16 is placed on the graphite plate transferring device 17 by mechanical arm, otherwise identical, graphite plate 16 by mechanical arm therefrom transposition put 17 places and shift and to be placed on above the supporting structure 15.
Described graphite plate transferring device 17 is that a mechanical arm shifts the transfer brace table that graphite plate 16 is temporarily deposited graphite plate 16.
The external motive device of described mechanical arm is electric motor driving or hydraulic drive, by power set driving device arm turning axle 5, mechanical arm turning axle 5 moves forward and backward and angle of rotation along mechanical arm guide rail 6, and mechanical arm turning axle 5 driving mechanical arm sling armed levers 18 move forward and backward and angle of rotation.
Described graphite plate 16 is placed on millstone plate and supports on 15, by 4 grippings of mechanical arm gripping pawl or placement.Graphite plate transferring device 17 is to support the intermediate station of temporarily being deposited by the graphite plate 16 of mechanical arm transfer.
The utility model has the advantages that and utilize mechanical arm to shift graphite plate, and the composition of this mechanical arm is simple, with low cost.The graphite plate that can raise in linkage when guaranteeing whole cavity stopping property, mechanical arm slides into correct position along guide rail, by gripping, shift the mode of graphite plate, graphite plate is shifted out reaction chamber, and is easy to operate, improved efficient.
Description of drawings
Fig. 1 structural representation of the present utility model;
Plan structure synoptic diagram during Fig. 2 gripping graphite plate of the present utility model;
The plan structure synoptic diagram that Fig. 3 is of the present utility model when shifting out graphite plate.
Among the figure: 1 glove box, 2 spray dishes, 3 spray dish guide pillars, 4 mechanical arm gripping pawls, 5 mechanical arm turning axles, 6 mechanical arm rail plates, 7 nose cones, 8 lifter plate guide pillars, 9 corrugated tubes, 10 lifter plates, 11 adapter sleeves, 12-1 corrugated tube flange, 12-2 corrugated tube flange, 13 base matrixes, 14 rotary seats, the support of 15 graphite plates, 16 graphite plates, 17 graphite plate transferring devices, 18 mechanical arm cantilever levers.
Embodiment
Further specify embodiment of the present utility model below in conjunction with accompanying drawing:
Referring to Fig. 1, graphite plate 16 belows are supported 15 by graphite plate and are supported, and graphite plate supports 15 arrangements and is fixed on the rotary seat 14, and rotary seat 14 is fixedly connected with adapter sleeve 11.Glove box 1 base plate is provided with a hole, base matrix 13 is fixed on the casing the inside of the base plate position of opening of glove box 1, nose cone 7 is fixed on the base matrix 13, the box outer surface of the top flange 12-2 of corrugated tube 9 and the base plate position of opening of glove box 1 is tightly connected, and flange 12-1 and the lifter plate 10 of the bottom of corrugated tube 9 are tightly connected.Lifter plate 10 upper surfaces support 15 with adapter sleeve 11, rotary seat 14, graphite plate successively is connected with graphite plate and is connected.The lifting that the external impetus drive unit can link lifter plate 10, adapter sleeve 11, rotary seat 14, graphite plate support 15 and graphite plate 16, rotary seat 14, graphite plate support 15 and graphite plate 16 all are arranged in the glove box 1.Lifter plate 10 is driven by external impetus and moves up and down along lifter plate guide pillar 8, lifter plate 10 rise and the decline process in, can compress or stretching corrugated tube 9 so that graphite plate 16 is followed lifter plate 10 rises or descend.
Spray dish 2 is arranged in the glove box 1 through spray dish guide pillar 3, and spray dish 2 contacts with nose cone 7, with the structure corrugated pipe 9, lifter plate 10 etc. of its below and form structure unit and all be arranged in airtight glove box 1.When spray dish 2 externally rises along spray dish guide pillar 3 under the driving of power, separate with nose cone 7, spray dish 2 rises to apart from suitable position of nose cone 7 upper surfaces, lifter plate 10 is driven along lifter plate guide pillar 8 by external impetus and rises, rise simultaneously with the graphite plate 16 of lifter plate 10 interlocks, until graphite plate 16 exceeds the suitable position of nose cone 7 upper surfaces.The mechanical arm that is placed in 1 li of glove box this moment begins action.
Mechanical arm is comprised of mechanical arm gripping pawl 4, mechanical arm turning axle 5, mechanical arm cantilever lever 18 and mechanical arm rail plate 6.The base plate of glove box 1 is provided with a mechanical arm rail plate 6 and graphite plate transferring device 17, and graphite plate transferring device 17 is that a mechanical arm shifts the transfer brace table that graphite plate 16 is temporarily deposited graphite plate 16.Mechanical arm turning axle 5 is installed on the mechanical arm rail plate 6, mechanical arm cantilever lever 18 is equipped with on the top of mechanical arm turning axle 5, mechanical arm gripping pawl 4 is installed in the front end of mechanical arm cantilever lever 18, and mechanical arm gripping pawl 4 is finished the gripping action under the driving of power set.
Mechanical arm cantilever lever 18 and mechanical arm gripping pawl 4 can rotate to an angle around mechanical arm turning axle 5.Mechanical arm cantilever lever 18 slides along mechanical arm guide rail 6 under the driving of power set.During correct position, mechanical arm cantilever lever 18 and mechanical arm gripping pawl 4 are around mechanical arm turning axle 5 rotation graphite plates 16 next doors when mechanical arm moves to reaction chamber along mechanical arm rail plate 6 near, and mechanical arm gripping pawl 4 clamps graphite plates 16, referring to Fig. 2.Then mechanical arm cantilever lever 18 along mechanical arm rail plate 6 away from reaction chamber, graphite plate 16 is moved to the position of graphite plate transferring device 17 after, graphite plate 16 is placed to graphite plate transferring device 17 places, referring to Fig. 3.
Claims (5)
1. metal-organic chemical vapor deposition equipment graphite plate transfer device, comprise: mechanical arm, glove box (1), spray dish (2), spray dish guide pillar (3), nose cone (7), lifter plate guide pillar (8), corrugated tube (9), lifter plate (10), adapter sleeve (11), base matrix (13), rotary seat (14), millstone plate supports (15), graphite plate (16), graphite plate transferring device (17), mechanical arm is by mechanical arm gripping pawl (4), mechanical arm turning axle (5), mechanical arm cantilever lever (18) and mechanical arm rail plate (6) form, spray dish (2) is in spray dish guide pillar (3) is arranged on glove box (1), it is characterized in that described glove box (1) base plate is provided with a hole, base matrix (13) is fixed on the casing the inside of the base plate position of opening of glove box (1), nose cone (7) is fixed on the base matrix (13), the top of corrugated tube (9) is connected 1 with glove box) the box sealing of base plate position of opening connect, its bottom and lifter plate (10) are tightly connected, lifter plate (10) upper surface successively with adapter sleeve (11), rotary seat (14), graphite plate supports (15) is connected 16 with graphite plate) connect, lifter plate (10) is driven by external impetus and moves up and down along lifter plate guide pillar (8), rotary seat (14), graphite plate supports (15) and graphite plate (16) all is arranged in the glove box (1), the base plate of glove box (1) is provided with a mechanical arm rail plate (6) and graphite plate transferring device (17), mechanical arm turning axle (5) is installed on the mechanical arm rail plate (6), mechanical arm cantilever lever (18) is equipped with on the top of mechanical arm turning axle (5), mechanical arm gripping pawl (4) is installed in the front end of mechanical arm cantilever lever (18), and mechanical arm is driven by external drive source.
2. metal-organic chemical vapor deposition equipment graphite plate transfer device according to claim 1, it is characterized in that mechanical arm is comprised of mechanical arm gripping pawl (4), mechanical arm turning axle (5), mechanical arm cantilever lever (18) and mechanical arm rail plate (6), mechanical arm cantilever lever (18) can move forward and backward and angle of rotation along mechanical arm guide rail (6) by mechanical arm turning axle (5).
3. metal-organic chemical vapor deposition equipment graphite plate transfer device according to claim 1 is characterized in that described graphite plate (16) is placed on millstone plate and supports on (15), by (4) gripping of mechanical arm gripping pawl or placement.
4. metal-organic chemical vapor deposition equipment graphite plate transfer device according to claim 1 is characterized in that described graphite plate transferring device (17) is to support the intermediate station of temporarily being deposited by the graphite plate (16) of mechanical arm transfer.
5. metal-organic chemical vapor deposition equipment graphite plate transfer device according to claim 1 is characterized in that lifter plate 10 can rise or descend, and is connected with corrugated tube (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220484724 CN202898531U (en) | 2012-09-19 | 2012-09-19 | Transfer device for graphite plate of metal organic chemical vapor deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220484724 CN202898531U (en) | 2012-09-19 | 2012-09-19 | Transfer device for graphite plate of metal organic chemical vapor deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202898531U true CN202898531U (en) | 2013-04-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220484724 Expired - Lifetime CN202898531U (en) | 2012-09-19 | 2012-09-19 | Transfer device for graphite plate of metal organic chemical vapor deposition equipment |
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| CN (1) | CN202898531U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103320852A (en) * | 2013-06-14 | 2013-09-25 | 光垒光电科技（上海）有限公司 | Reaction cavity used for epitaxial deposition |
| CN103540914A (en) * | 2013-09-24 | 2014-01-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Bucket-type CVD (chemical vapor deposition) equipment reaction chamber using radio-frequency heating |
| CN103646837A (en) * | 2013-12-25 | 2014-03-19 | 尚忠法 | Double-layer glove box type intermediate frequency furnace heating ceramic metal halide lamp arc tube sealing device |
| CN103668103A (en) * | 2012-09-19 | 2014-03-26 | 甘志银 | Graphite tray transferring device of metallorganics chemical vapor deposition device |
-
2012
- 2012-09-19 CN CN 201220484724 patent/CN202898531U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668103A (en) * | 2012-09-19 | 2014-03-26 | 甘志银 | Graphite tray transferring device of metallorganics chemical vapor deposition device |
| CN103668103B (en) * | 2012-09-19 | 2016-01-27 | 甘志银 | Metal-organic chemical vapor deposition equipment graphite plate transfer device |
| CN103320852A (en) * | 2013-06-14 | 2013-09-25 | 光垒光电科技（上海）有限公司 | Reaction cavity used for epitaxial deposition |
| CN103540914A (en) * | 2013-09-24 | 2014-01-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Bucket-type CVD (chemical vapor deposition) equipment reaction chamber using radio-frequency heating |
| CN103646837A (en) * | 2013-12-25 | 2014-03-19 | 尚忠法 | Double-layer glove box type intermediate frequency furnace heating ceramic metal halide lamp arc tube sealing device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130424 Effective date of abandoning: 20160127 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |